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Abstract: MEMS gyroscope technology rotation. They have no rotating parts that require
provides cost- effective method for improving bearings, and hence they can be easily
directional estimation and overall accuracy in the miniaturized and batch fabricated using
navigation systems. This paper presents a tuning- micromachining techniques. All vibratory
fork gyroscope (TFG) [1] with a perforated proof gyroscopes are based on the transfer of energy
mass. The perforated proof mass used in the between two vibration modes of a structure
design enables the reduction of the damping caused by Coriolis acceleration.
effect. This MEMS based gyroscope was
designed using COMSOL Multiphysics 4.2a. TFG realizes the Coriolis acceleration to
This gyroscope has two modes- drive mode and improve the sensitivity. The parameters, of TFG,
sense mode. The driving force is given in the x- that are of prime importance are the sensitivity
direction and the displacement due to the and accuracy [2] of the device. In this paper we
Coriolis Effect is sensed in the y-direction. The report the design and simulation of the tuning-
device is driven at its natural frequency and the fork gyroscope to improve their sensitivity. The
response of the device is analyzed at static and design has been supported using Thermo
dynamic state. The TFG produced a Electro- mechanical simulations using the
displacement of 2.6 10-9 m. The frequency COMSOL Multiphysics 4.2a.
range applied is 0.027 - 0.24 MHz.
If the damping effects are taken into account, When Coriolis force is applied in z - direction,
then the equations become the proof masses vibrate in direction
perpendicular to the applied force. The mode 2 is
(8)
the sense mode of the device.
(9)
Where
c = damping factor,
k = m2 = Spring constant.
(10)
(11)
4. Simulation
7. References
Figure 6. Transient response in y- direction
1. Andrei M. Shkel, Chris C. Painter, Active
Structural Error Suppression in MEMS
Vibratory Gyroscopes, Proceedings of
IEEE Sensors, Vol 2, 1089-1094 (2002).
8. Acknowledgements