www.clarycon.

com October 2003

Gas Conversion Factors for Mass Flow Controllers

Gas Symbol Conversion Factor

Air Air 1.002

Ammonia NH3 0.729
Argon Ar 1.398
Arsine AsH3 0.673
Boron Trichloride BCl3 0.426
Bromine Br2 0.816
Bromotrifluoromethane CBrF3 0.388
Carbon Dioxide CO2 0.763
Carbon Tetrachloride CCl4 0.320
Carbon Tetrafluoride CF4 0.445
Chlorine Cl2 0.873
Chlorodifluoromethane CHClF2 0.473
Chloroform CHCl3 0.410
Chloropentafluoroethane C2ClF5 0.251
Chlorotrifluoromethane CClF3 0.404
Diborane B2H6 0.471
Dibromotetrafluoroethane C2Br2F4 0.147
Dichlorofluoromethane CHCl2F 0.440
Dichlorosilane SiH2Cl2 0.435
Dichlorotetrafluoroethane C2Cl2F4 0.219
Difluorochloroethane C2H3ClF2 0.312
Difluoroethane C2H4F2 0.380
Difluoroethylene C2H2F2 0.443
Disilane Si2H6 0.329
Ethane C2H6 0.499
Ethylene C2H4 0.625
Fluorine F2 0.942
Fluoroform CHF3 0.528
Germanium Tetrachloride GeCl4 0.277
Helium He 1.445
Hexafluoroethane C2F6 0.255
Hydrogen H2 1.024
Hydrogen Bromide HBr 1.000
Hydrogen Chloride HCl 1.000
Hydrogen Fluoride HF 1.000
Hydrogen Sulfide H2S 0.806
Methane CH4 0.730
Nitric Oxide NO 0.972
Nitrogen N2 1.000
Nitrous Oxide N2O 0.734
Oxygen O2 0.994
Phosphine PH3 0.706

1
www.clarycon.com October 2003
Gas Conversion Factors for Mass Flow Controllers

Gas Symbol Conversion Factor

Phosphorous Oxychloride POCl3 0.313

Silane SiH4 0.625
Silicon Tetrachloride SiCl4 0.294
Sulfur Hexachloride SF6 0.285
Trichloroethane C2H3Cl3 0.278
Trichlorofluoromethane CCl3F 0.344
Trichlorotrifluoroethane C2Cl3F3 0.211
Trimethylborate C3H9BO3 0.178
Trimethylphosphorous C3H9P 0.257
Tungsten Hexafluoride WF6 0.226