HIWIN Linear Motors

Linear Motor System Technical Information
Linear Motor System
HIWIN MIKROSYSTEM CORP.

No.6, Jingke Central Rd.,
Taichung Precision Machinery Park,
Taichung 40852, Taiwan
Tel: +886-4-23550110
Fax: +886-4-23550123
www.hiwinmikro.tw
business@hiwinmikro.tw
Linear Motor System

Subsidiaries & R&D Centers
HIWIN GmbH HIWIN Schweiz GmbH HIWIN KOREA

OFFENBURG, GERMANY JONA, SWITZERLAND SUWON, KOREA
www.hiwin.de www.hiwin.ch www.hiwin.kr
www.hiwin.eu
info@hiwin.de
info@hiwin.ch info@hiwin.kr
Technical Information
HIWIN JAPAN HIWIN FRANCE HIWIN CHINA
KOBETOKYONAGOYAKYUSHUNAGANO ECHAUFFOUR, FRANCE SUZHOU, CHINA
HIROSHIMAHOKURIKU, JAPAN www.hiwin.fr www.hiwin.cn
www.hiwin.co.jp info@hiwin.fr info@hiwin.cn
info@hiwin.co.jp
HIWIN USA HIWIN Srl Mega-Fabs Motion System, Ltd.

CHICAGOSILICON VALLEY, U.S.A. MILAN, ITALY HAIFA, ISRAEL
www.hiwin.com www.hiwin.it www.mega-fabs.com
info@hiwin.com info@hiwin.it info@mega-fabs.com
HIWIN s.r.o. HIWIN SINGAPORE

BRNO, CZECH REPUBLIC SINGAPORE
www.hiwin.cz www.hiwin.sg
info@hiwin.cz info@hiwin.sg
The specifications in this catalog are subject to change without notification.
2017 FORM MM99TE07-1701

(PRINTED IN TAIWAN)
INDUSTRIE 4.0 Best Partner
Multi Axis Robot

Pick-and-place / Assembly /
Grinding and Polishing / Semiconductor /
Light Industry / Automotive industry /
Food industry
Articulated Robot
Delta Robot
Movable Delta Robot
SCARA Robot
Wafer Robot
Electric Gripper
Single Axis Robot Medical Equipment

Precision / Semiconductor / Hospital / Rehabilitation centers /
Medical / FPD Nursing homes
KK, SK Robotic Gait Training System
KS, KA Hygiene System
KU, KE, KC Robotic Endoscope Holder
Ballscrew Linear Guideway

Precision Ground / Rolled Automation / Semiconductor / Medical
Super S series Ball Type--HG, EG, WE, MG, CG
Super T series Quiet Roller Type--QH, QE, QW, QR
Mini Roller Other--RG, E2, PG, SE, RC
Ecological & Economical
lubrication Module E2
Rotating Nut (R1)
Energy-Saving & Thermal-
Controlling (C1)
Heavy Load Series (RD)
Direct Drive Bearing

Rotary Table Machine tools / Robot
Crossed Roller Bearings
Aerospace / Medical / Auto industry
Ball Screw Bearings
RAB Series
Linear Bearing
RAS Series
Support Unit
RCV Series
RCH Series

AC Servo Motor & Drive Torque Motor
Publication DateMay 2002, first edition
Semiconductor / Packaging machine / (Direct Drive Motor)
SMT / Food industry / LCD
Drives-D1, D1-N, D2
Inspection / Testing equipment / Print DateJanuary 2017, 7th edition
Machine tools/ Robot
Motors-50W~2000W
Rotary Tables-TMS,TMY,TMN
TMRW Series
1. HIWIN is the registered trademark of HIWIN Mikrosystem Corp.. Please avoid buying the counterfeit
goods that are from unknown sources to protect your rights.
2. Actual products may be different from the specifications and photos in this catalog, and the
differences in appearances or specifications may be caused by, among other things, product
improvements.
3. HIWIN will not sell or export those techniques and products restricted under the "Foreign Trade
Linear Motor Positioning Act" and relevant regulations. Any export of restricted products should be approved by competent
Automated transport / AOI application / Measurement System authorities in accordance with relevant laws, and shall not be used to manufacture or develop the
Precision / Semiconductor
Motor type-ironcore motor, ironless
Cutting machines / nuclear, biochemical, missile and other military weapons.
Traditional gantry milling machines /
motor, planar servo motor, shaft motor
Programmable drilling machines
Air bearing stage
High Resolution
X-Y stage
Gantry stage
Signal Translator Copyright HIWIN Mikrosystem Corp.
High-precision Enclosed
High Efficiency Counter
ContentsLinear motor system
SAlow gravity center, high payload

1.Technical Information 04 Linear motor SA stages are equipped with ironcore motor(s) and well suited for applications that
Brief Introduction to proper nouns. require point to point precision positioning and larger payload.
2.Standard linear motor stage 06

Standard single, X-Y, gantry and air bearing stages are constructed
by ironcore or ironless motor.
HIWIN can quickly provide the following products
LMChigh-precision, high-speed stability
Linear motor LMC stages are equipped with coreless motor(s) and well suited for applications
2.1 Positioning stage ______________________________ 6 that require precision positioning and constant velocity scanning motion.
2.2 SA:low center of gravity, high payload _____________ 8

2.3 LMC:high-precision, high-speed stability _________ 26
2.4 LMT:lightweight, high acceleration/deceleration ___ 38
2.5 X-Y stage____________________________________ 54
2.6 Gantry stage _________________________________ 59 LMTmiddle precision, light payloads
2.7 Air bearing stage _____________________________ 62 Linear motor LMT stages are equipped with a coreless shaft motor, which perfectly replace the
combination of ball screw and AC servo motor, and improve max. speed greatly.
3.Customized positioning stage 66

A sampling of customized solutions is shown here. With various
combinations of standard single axis stage, it may constitute a
number of different linear stages. We can also provide customized
products according to customer demand.
4.Drives 101
Brief introduction to HIWIN standard drive D1 and D1-N.
Appendix 115
The inquiry form at the end of this catalogue helps us know
customers demand, so that we can make a preliminary design.
A Motor sizing ________________________________ 115

B Optional regeneration resistors________________ 118
C Inquiry form (Mechanical system) ______________ 120
D Inquiry form (Electronical control system) _______ 121
4 MM99TE07-1701 Linear Motor System 5
1 Technical Information
1.1 Glossary
Back emf constant (K v ) Horizontal straightness Peak torque, peak force (Fp)
This is the ratio of the back emf voltage (rms) to the mo- The measure of straightness when moving in X-axis. If Step size The peak torque (for rotary motion) or peak force
tor rotational speed or linear speed (rpm or m/s). The there is deviation in horizontal straightness, there would Also called resolution. It is the smallest possible movement (for linear motion) is the maximum force that a mo-
back emf is the electromagnetic force, which is created be positioning error in Y-axis, as the system moves along of a system. It depends on encoder, amplifier, mechanical tor can generate for approximately one second with
at the movement of the coil in the magnetic field of per- X-axis. construction, backlash, etc. peak current I p. While applying I p into motor, it is
manent magnets, e.g. in a servo motor. operating near the non-linear range of motor. This
is especially useful for acceleration and braking.
Accuracy
Acceleration Guide deviation
This, or actually the better terminology, the inaccuracy,
This is the speed change per time unit, i.e., acceleration This is the deviation from the axis of stroke. It depends
Technical
corresponds to the deviation between target and actual
= speed / time or a = v / t. on horizontal straightness (also straightness) and verti-
position. The accuracy along an axis is defined as the re-
cal straightness (also flatness).
maining difference of target and actual position, after other
linear deviations are excluded. Such systematic or linear
Acceleration time
Force, torque deviations can be caused by cosine error, angle deviation,
This is defined as the time a drive requires from start
Force (in linear movements) or torque (in rotational mo- ball screw error, thermal expansion, etc. For all target po-
until achieving maximum speed.
vements) is given for defined conditions, e.g., as continu- sitions of interest in an application, it is calculated with the
ous force or torque at: following formula:
Vertical straightness 20 C ambient temperature Maximum of sum of systematic target-actual-difference
80 C winding temperature + 2 sigma (standard deviation)
The measure of straightness when moving in X-axis. If
100% rate of loading(duty cycle) Please do not confuse accuracy with repeatablity.
there is deviation in vertical straightness, there would be
positioning error in Z-axis, as the system moves along X- or as peak force or peak torque.
axis. Attraction force (Fa)
Force constant (K f ) This is created between the primary and secondary parts of
Torque This is a coil specific constant. The motor output force the ironcore linear motors which must be taken up by the
can be calculated by multiplying the force constant of the guide.
This is a measurement of the rotational movement in a
body and consequently a vectorial direction that can be motor by input current: F = I x K f
expressed in the following cross product: Winding resistance R 25
The torque is expressed in the equation Nm = kg x m/s.
Continuous torque, continuous force (Fc ) This is the coil-specific dimension of is the winding
Or also nominal torque, nominal force. This is the torque resistance at 25 C. At 80 C, the winding resistance increas-
Repeatability or force, that rotary or linear motors can produce in con- es to approximately 1.2 x R 25.
Repeatability should not be confused with absolute accu- tinuous operation when continuous current of 100% load
racy. A linear axis can have medium accuracy, but have rate(duty cycle) is applied to the motor coil.
Winding temperature (T)
good repeatability. Uni-directional repeatability can be
This is the permitted winding temperature. The actual
measured in a way, that a target position is approached
Continuous current (I c ) motor temperature is dependent on the installation, cooling
multiple times from an appropriately distance and the
It is a current that flows over longer time into motor. and operating conditions and consequently can only be
same approaching direction. In this way, the backlash
The maximum allowed current into each coil is also cal- determined in a concrete case and cannot be calculated.
will not have any effect. For measurement of bi-direc-
tional repeatability, the target position is approached led nominal current. It is characterized when the gene-
from different directions, in which case the backlash will rated heat results in motor warming of up to 80 C.
Wobbling
take effect.
It is a term for rotary motor. Wobble is the angular deviation
Resolution of rotating axis from theoretical axis of rotation as the mo-
Motor constant (K m) It is the smallest distance, that the position measuring tor turns. The reason for it is possibly bearing tolerances.
This designates the ratio of generated force and system will detect. The reachable step size is, in prin-
dissipation power,represents the efficiency of the motor. ciple, larger than resolution due to other additional fac-
tors. Peak current (I p)
This current is applied to coils for a short time to generate
Stiffness peak force.The maximum time for applying peak current
This corresponds to the mechnical resistance to defor- Eccentricity is 1 second. After that, motor has to cool down to nominal
mation a part or an assembly can provide under external This is the deviation of the center point of rotation of ro- operating temperature, before further peak current could
static payload. (static stiffness) Or, it is the elastic resis- tary tables from their position during rotation. It is crea- be applied again.
tance to deformation a part or an assembly can provide ted by centering and bearing tolerances.
under external dynamic payload. (dynamic stiffness)
2 Standard linear motor stage 2.1.1 Single axis positioning stage

HIWIN single axis positioning stage provides fast, accurate positioning, linear direct drive motor and can
reach long stroke applications, in addition to providing metal cover, dust jacket and other optional items
2.1 Positioning stage to achieve dust protection requirements. Choose cable chain type, horizontal or vertical wiring that uses
extension cords not to scatter outside, make the machine look tidy.
HIWIN offers a variety of positioning stages, such as single axis, X-Y double axis, bridge, gantry and X-Y- Depend on different linear motors, those can be further divided into the following different types:
Z-axis Cartesian robots, to meet a variety of automation application needs. All above positioning stages
use self-made key components, such as linear motors, linear slide, ball screw, direct drive motors, servo
motors and drives. Therefore, HIWIN positioning stages can achieve the best performance and the most
effective cost, can significantly enhance the competitiveness of our customers. HIWINs diversified
positioning stages have been widely used in various technical fields, such as optical detection, laser
processing, plastic material coating, metal processing and other automated production equipment. SAlow gravity center, high payload
Industrial fields cover semiconductor industry, optical elements, panel displays, medical equipment,
Linear motor SA stages are equipped with ironcore
machine tools, electronic components, MEMS and so on.
motor(s) and well suited for applications that require
Rich specifications and quick customized ability to fully meet customers mass production, shorten product
point to point precision positioning and larger payload.
development process and strict application environment, high specification requirements.
LMChigh-precision, high-speed stability

Linear motor LMC stages are equipped with coreless
motor(s) and well suited for applications that require
Standard
precision positioning and constant velocity scanning
motion.
LMTmiddle precision, light payload

Linear motor LMT stages are equipped with a coreless
shaft motor, which perfectly replace the combination of
ball screw and AC servo motor, and improve max. speed
greatly.
2.1.2 Measurement standards 2.2.1 SA

All the precision measurement data provided by HIWIN are measured at temperature at 23 1 ,
humidity at 55%5% environmental, and the position feedback system of positioning stages apply 1m LMX1A S A111 800G 1 E V1 3-CL
resolution optical scale. Stage type
LMX1A
Motor type
SA11: LMSA11 SA21L: LMSA21L
2.1.3 Cable chains: horizontal/vertical orientation SA13: LMSA13 SA23L: LMSA23L
SA31: LMSA31
SA32: LMSA32
SA33: LMSA33
The number of slider

1: 1
Stroke
100: 100mm
Lin
600: 600mm
ear

Motor
Lin

ear

Motor

200: 200mm 700: 700mm

300: 300mm 800: 800mm
400: 400mm 900: 900mm
500: 500mm 1000: 1000mm
Cable chain horizontal orientation Cable chain vertical orientation
Encoder type
Standard
0:None
A:40m analogical 1Vpp optical scale
E:TTL digital 1m resolution magnetic scale
G:TTL digital 1m resolution optical scale(standart)
K:TTL digital 0.1m resolution optical scale
Limit switch
1:Inductive typePNPNC
2:Inductive typeNPNNC
2.2 SA low gravity center, high payload C:Customized
Limit switch connector type

Linear motor SA stages are equipped with ironcore motor(s) and well suited for applications that require
E:Connector is mounted on edge of stage
point to point precision positioning and larger payload.
S:Connector contains 300mm extension cord
It offers larger continuous force, especially for larger force and fast applications Cable chain
Stroke range up to 4m N:None
Superior speed control characteristic V1:Vertical, chain internal space is 21x25mm
V2:Vertical, chain internal space is 21x38mm
Low cost, small size, high performance
V3:Vertical, chain internal space is 21x50mm
Suitable for clean rooms V4:Vertical, chain internal space is 21x68mm
H1:Horizontal, chain internal space is 21x25mm
H2:Horizontal, chain internal space is 21x38mm
Extension cable
0:None
3:3m
5:5m
7:7m
(Includes limit switch extension cable)
Additional option
None:Standard
C:Customized request
CL:Centralized lubrication
NoteContact HIWIN for customized specification.
(m)
(m/
0.1 50
10 0
MM99TE07-1701 0 Linear Motor System 11
-0.1 -50
-0.2 -100
2.2.2 SA series stage
-0.3 -150 SA11,SA12,SA13
-0.4 -200
Low profile High force Table2-1 SA11,12,13 stage specification
0 1 2 3 4 0 offers maximum
0.1 0.2 peak force.
0.3 0.4
SA series stage reduced maximum 38% stage height. SA series stage 2469N Specification SA11 SA12 SA13
(s) (s)
Continuous force,FC (N) 103 205 308
Peak force,FP (N) 289 579 868
Stroke (mm) 100~1000(mm)
linear motor stage LMSA33 Resolution 0.1m / 1.0m / Analog 1Vpp
875 2469
linear motor stage
1646 Digital 1m encoder / Analog encoder: 1
LMSA32 Repeatability (m) *2
583 Digital 0.1m encoder: 0.5
LMSA31 823 Digital 1m encoder / Analog encoder: 2
292 Accuracy (m) *2,3
Digital 0.1m encoder: 1
LMSA23 1535 Horizontal straightness (m) 10 / 500 mm
linear motor stage 544
linear motor stage
Vertical straightness (m) 20 / 500 mm
LMSA22 1023
362 Moving mass (kg) 5 6 8
512
Loading capacity (kg) 10 20 30
LMSA21
181
LMSA13 868 F-V(DC bus
Force-Velocity = 325V)bus = 325V)
Curve(DC *4
308
linear motor stage SA11 Fp SA11 Fc SA12 Fp SA12 Fc SA13 Fp SA13 Fc
LMSA12 579
linear motor stage 205 Instant
thrust 1000 1000 1000
289 Continuous
thrust
LMSA11 800 800 800
103
(N)
(N)
(N)
600 600 600
0 500 1000 1500 2000 2500
Force
Force
Force
400 400 400
Standard
Thrust
(N)
200 200 200
0 0 0
0 1 2 3 4 5 6 0 1 2 3 4 5 6 0 1 2 3 4 5 6
(m/s)
Velocity (m/s)
Velocity (m/s)
Velocity
High acceleration/deceleration High static stability Force-Velocity Curve(DC *4

F-V(DC bus =600V)bus = 600V)
Acceleration / deceleration up to 140 m/s2 (14G). Position stability is within 0.1m (measured by SA11 Fp SA11 Fc SA12 Fp SA12 Fc SA13 Fp SA13 Fc
Actual acceleration / deceleration might be limited by laser interferometer, the result is depended on
1000 1000 1000
linear guideway life consideration. environment condition.).
800 800 800
(N)
(N)
(N)
200 0.4 200 600 600 600
Force
Force
Force
400 400 400
150 0.3 150 200 200
200
100 0 0 0
100 0.2
(m/s2 )
(m/s2 )
0 1 2 3 4 5 6 0 1 2 3 4 5 6 0 1 2 3 4 5 6
error (m)
Velocity
(m/s) (m/s)
Velocity (m/s)
Velocity
50 0.1 50
Acceleration
A-Load
Acceleration-Payload Curve
0 0 0
SA11 SA12 SA13
Position
50 60 60
-50 -0.1 -50 40 50 50
(m/s 2 )
(m/s 2 )
(m/s 2 )
40 40
30
-100 -0.2 -100 30 30
Acceleration
Acceleration
Acceleration 20
20 20
-150 -0.3 -150 10 10 10
0 0 0
-200 -0.4 -200 0 5 10 15 20 25 30 35 0 5 10 15 20 25 30 35 0 5 10 15 20 25 30 35
4 0 0.1 0.2 0.3 0.4 0 1 2 3 4 0 0.1 0.2 0.3
Payload 0.4
(kg) Payload
(kg) Payload
(kg)
Time (s)
Time (s)
(s)
*1All values are measured on a granite table, all stage mounting *4The Force-Velocity Curve is the characteristic curve of the motor.
holes are well fixed. The actual velocity will change with stroke, payload and acceleration.
*2Values are measured according to HIWIN measuring standard. Please refer to the Velocity-Stroke Curve or Appendix AMotor Sizing.
LMSA33 LMSA33 *3After error compensation. *5All specifications above are standard, contact HIWIN for special request.
875 2469 875 2469
LMSA32 1646 LMSA32 1646

583 583
LMSA31 823 LMSA31 823
Velocity-Stroke Curve SA11 Linear motor stage dimensions

3.5
SA11 3.5
SA12 3.5
SA13
2xN-6.5 THRU, 11x6DP 6-M6x1Px12DP
3.0 3.0 3.0 LT
Velocity (m/s)
Velocity (m/s)
Velocity (m/s)
LA (N-1)x150=LB
2.5 2.5 2.5 LC LD LC
2.0 2.0 2.0 150
68 25 2x50=100
1.5 1.5 1.5
1.0 Load 1 kg 1.0 Load 1 kg 1.0 Load 1 kg
Load 5 kg Load 10 kg Load 15 kg
0.5 0.5 0.5
0.0 0.0 0.0
150
190
170
162
186
0 200 400 600 800 1000 0 200 400 600 800 1000 0 200 400 600 800 1000
Stroke (mm) Stroke (mm) Stroke (mm)
(56)
Cantilever Load Capability*2.3 (300) Encoder
cable
Vertical Limit switches connector

(option
( S)S) Motor
cable
Vertical
Vertical Limit switches connector
Extension
()2cable *2
(option
( E)E)
LT/2
ST/2+18 ()
(-Stopper) ST/2+18 ()
(+Stopper)
ST/2+5 (-Limit)
() ST/2+5 (+Limit)
()
ST/2(Home position)
Horizontal
Horizontal
Horizontal Linear motor stage with horizontal chain
150
186
190
Standard
Encoder cable
(166)

Vertical
35 35 35 Motor cable

21
SA11: SA12: SA13:
30 Velocity < 2 m/s 30 Velocity < 2 m/s 30 Velocity < 2 m/s *1
Extension
()2cable *2
Payload (kg)
Payload (kg)
Payload (kg)
25 25 25 (65)
20 20 20
15 15 15
10 10 10 Linear motor stage with vertical chain
5 5 5
150
186
190
0 0 0
0 50 100 150 200 0 50 100 150 200 0 50 100 150 200
Cantilever distance (mm) Cantilever distance (mm) Cantilever distance (mm)
(LC)
*1
Encoder
cable
Horizontal 21
(130) Motor cable

35 35 35 Extension cable *2
()2
SA11: SA12: SA13:
30 Velocity < 2 m/s 30 Velocity < 2 m/s 30 Velocity < 2 m/s
Payload (kg)
Payload (kg)
Payload (kg)
25 25 25
20 20 20 Table2-2 SA11
15 15 15 LC(cable chain)
Stroke(mm) N LT LA LB LC LD
10 10 10 V1,V2*3 V3,V4*3
5 5 5
100 4 400 25 - 100 150
0 0 0
200 4 500 25 - 100 250
0 50 100 150 200 0 50 100 150 200 0 50 100 150 200 300 4 600 65 - 100 270
Cantilever distance (mm) Cantilever distance (mm) Cantilever distance (mm) 400 5 700 75 - 150 250
500 6 800 25 750 - -
65 95
600 6 900 75 750 - -
700 7 1000 50 900 - -
800 8 1100 25 1050 - -
*1All values above are standard, contact HIWIN for special request. 900 8 1200 75 1050 - -
*2Cantilever load capability due to different positioning stage, application rated life also vary. 1000 9 1300 50 1200 - -
*3The main reason for lifetime derives from linear guideway. For more details, please refer to HIWIN linear guideway catalog.
*1:Cable chain interior width is selected from ordering information.
*2:Extension cable length is selected from ordering information.
*3:Dimension LC is determined by cable chain interior width V1~V4 from ordering information.
SA12 Linear motor stage dimensions SA13 Linear motor stage dimensions
2xN-6.5 THRU, 11x6DP 8-M6x1Px12DP 2xN-6.5 THRU, 11x6DP 10-M6x1Px12DP
LT LT
LA (N-1)x150=LB (N-1)x150=LB
LA
LC LD LC LC LD LC
250 350
68 35 3x60=180 68 35 4x70=280
162
186
150
190
170
162
186
150
190
170
(56)
(56)
(300) Encoder
cable (300) Encoder
cable
Limit switches connector

(option(
S) S) Motor
cable (option S) S)
( Motor
cable
Extension cable *2
()2 Extension cable *2
()2

(option(
E) E) (option E) E)
(
LT/2 LT/2
ST/2+18 (-Stopper)
() (+Stopper)
ST/2+18 () ST/2+18 (-Stopper)
() (+Stopper)
ST/2+18 ()
ST/2+5 ()
(-Limit) ST/2+5 (+Limit)
() ST/2+5 (-Limit)
() ST/2+5 ()
(+Limit)
ST/2 ()
(Home position) ST/2 ()
(Home position)
Linear motor stage with horizontal chain Linear motor stage with horizontal chain
150
150
186
190
186
190
Standard
Encoder cable
(166)
Encoder cable
(166)

Motor
cable Motor cable

21
21
*1 *1
(65) Extension cable *2
()2
(65)
Linear motor stage with vertical chain Linear motor stage with vertical chain
150
150
186
190
186
190
(LC)
(LC)
*1
*1
Encoder
cable Encoder
cable
21 21
(130) Motor
cable (130) Motor cable

Extension cable *2
()2
Table2-3 SA12
Table2-4 SA13
LC(cable chain)
Stroke(mm) N LT LA LB LC LD LC(cable chain)
V1,V2*3 V3,V4*3 Stroke(mm) N LT LA LB LC LD
V1,V2*3 V3,V4*3
100 4 500 25 - 100 250 100 4 600 65 - 100 270
200 4 600 65 - 100 270 200 4 700 75 - 150 250
300 4 700 75 - 150 250 300 6 800 25 750 - -
400 6 800 25 750 - - 400 6 900 75 750 - -
500 6 900 75 750 - - 65 95 500 7 1000 50 900 - - 65 95
600 7 1000 50 900 - - 600 8 1100 25 1050 - -
700 8 1100 25 1050 - - 700 8 1200 75 1050 - -
800 8 1200 75 1050 - - 800 9 1300 50 1200 - -
900 9 1300 50 1200 - - 900 10 1400 25 1350 - -
1000 10 1400 25 1350 - - 1000 10 1500 75 1350 - -
*1:Cable chain interior width is selected from ordering information. *1:Cable chain interior width is selected from ordering information.
*2:Extension cable length is selected from ordering information. *2:Extension cable length is selected from ordering information.
*3:Dimension LC is determined by cable chain interior width V1~V4 from ordering information. *3:Dimension LC is determined by cable chain interior width V1~V4 from ordering information.
Velocity-Stroke Curve
SA21 SA22 SA23
SA21,SA22,SA23 5.0
Load 1 kg
5.0
Load 1 kg
5.0
Load 1 kg
SA21 Load 15 kg SA22 Load 20 kg SA23 Load 25 kg
(m/s) (m/s)
(m/s) (m/s)
(m/s) (m/s)
4.0 4.0 4.0
5.0 Load 5.0 5.0
Load 30 kg
1 kg Load
Load 40 kg
1 kg Load
Load 50 kg
1 kg
3.0 3.0 3.0
Table2-5 SA21,22,23 stage specification
Velocity
Velocity
Velocity
2.0 2.0 2.0
Specification SA21 SA21L SA22 SA22L SA23 SA23L 3.0 3.0 3.0
Velocity
Velocity
Velocity
Continuous force,FC (N) 181 181 362 362 544 544 1.0
2.0
1.0
2.0
1.0
2.0
Peak force,FP (N) 512 512 1023 1023 1535 1535 0.0 0.0 0.0
1.0 0 1.0 0 1.0 0
Stroke (mm) 100~1000 200 400 600 800 1000 200 400 600 800 1000 200 400 600 800 1000
Resolution 0.1m / 1.0m / Analog 1Vpp 0.0 Stroke (mm) 0.0 Stroke (mm) 0.0 Stroke (mm)
0 200 400 600 800 1000 0 200 400 600 800 1000 0 200 400 600 800 1000
Digital 1m encoder / Analog encoder: 1 SA21L SA22L SA23L
Repeatability (m) *2 Stroke (mm) Stroke (mm) Stroke (mm)
Digital 0.1m encoder: 0.5 5.0 5.0 5.0
Digital 1m encoder / Analog encoder: 2 SA21L SA22L SA23L
(m/s) (m/s)
(m/s) (m/s)
(m/s) (m/s)
4.0 4.0 4.0
Accuracy (m) *2,3 5.0 5.0 5.0
3.0 3.0 3.0
Velocity
Velocity
Velocity
Horizontal straightness (m) 10 / 500 mm 4.0 4.0 4.0
Vertical straightness (m) 20 / 500 mm 2.0 2.0 2.0
Velocity
Velocity
Velocity
Moving mass (kg) 6 8 11 1.0 Load 15 kg 1.0 Load 20 kg 1.0 Load 25 kg
2.0 2.0 2.0
Loading capacity (kg) 30 40 50 Load
Load 30 kg
1 kg Load
Load 40 kg
1 kg
Load
Load 50 kg
1 kg
0.0 0.0 0.0
1.0 0 200 400 600 Load 15 1000
800 kg 1.0 0 200 400 600 Load 20 1000
800 kg 1.0 0 200 400 600 Load 25 1000
800 kg
Force-Velocity Curve(DC bus = 325V)*4 0.0 0.0 0.0
0 200 400 600 800 1000 0 200 400 600 800 1000 0 200 400 600 800 1000
Cantilever LoadStroke
Capability
(mm)
*2.3
Stroke (mm) Stroke (mm)
Cantilever Load Capability*2.3

Vertical
Force
Force
Force
Standard
Velocity Velocity Velocity
*4
Force-Velocity Curve(DC bus = 600V) Horizontal
Vertical
Force
Force
Force
60 60 60
Vertical
50
SA21/SA21L:
Velocity < 1.5 m/s 50
SA22/SA22L:
Velocity < 1.5 m/s 50
SA23/SA23L:
Velocity < 1.5 m/s
(kg) (kg)
(kg) (kg)
(kg) (kg)
60 SA21L: 60 SA22L: 60 SA23L:
40 SA21/SA21L:
Velocity < 2 m/s 40 SA22/SA22L:
Velocity < 2 m/s
Payload
Payload
Payload
50 Velocity < 1.5 m/s 50 Velocity < 1.5 m/s 50 Velocity < 1.5 m/s
30 SA21L:
30 SA22L:
30 SA23L:
Velocity Velocity Velocity 20 20 20
Payload
Payload
Payload
30 30 30
10 10 10
Acceleration-Payload Curve 20 20 20
0 0 0
10 0 100 200 300 400 10 0 100 200 300 400 10 0 100 200 300 400
0
Cantilever distance (mm) 0
Cantilever distance (mm)
0 100 200 300 400 0 100 200 300 400 0 100 200 300 400
HorizontalCantilever distance (mm) Cantilever distance (mm) Cantilever distance (mm)
Acceleration
Acceleration
Acceleration
60 60 60
Horizontal SA21/SA21L:
Velocity < 1.5 m/s
SA22/SA22L:
Velocity < 1.5 m/s
SA23/SA23L:
Velocity < 1.5 m/s
50 50 50
(kg) (kg)
(kg) (kg)
(kg) (kg)
60 SA21L: 60 SA22L: 60 SA23L:
40 SA21/SA21L:
Velocity < 2 m/s
Payload
Payload
Payload
50 Velocity < 1.5 m/s 50 Velocity < 1.5 m/s 50 Velocity < 1.5 m/s
30 SA21L:
30 SA22L:
30 SA23L:
Payload Payload Payload 20 20 20
Payload
Payload
Payload
30 30 30
10 10 10
20 20 20
0 0 0
*1All values are measured on a granite table, all stage mounting *4The Force-Velocity Curve is the characteristic curve of the motor. 10 0 100 200 300 400 10 0 100 200 300 400 10 0 100 200 300 400
holes are well fixed. The actual velocity will change with stroke, payload and acceleration. 0
*2Values are measured according to HIWIN measuring standard. Please refer to the Velocity-Stroke Curve or Appendix AMotor Sizing. 0 values100
*1All above are200 300
standard, contact 400for special
HIWIN 0 request.100 200 300 400 0 100 200 300 400
*3After error compensation. *5All specifications above are standard, contact HIWIN for special request. Cantilever distance (mm) Cantilever distance (mm) Cantilever distance (mm)
*2Cantilever load capability due to different positioning stage, application rated life also vary.
2xN-6.5 THRU, 11x6DP 6-M6x1Px12DP 2xN-6.5 THRU,11x6DP 8-M6x1Px12DP
LT LT
LA (N-1)x150=LB LA (N-1)x150=LB
LC LD LC LC LD LC
150 250
74 25 2x50=100
74 35 3x60=180
230
234
214
202
194
230
234
214
202
194
(56)
(56)
(300) Encoder cable

(300) Encoder
cable
(option S) S)
( Motor cable

(option
(S)S) Motor cable

Extension cable *2
()2
Limit
switches connector Extension cable *2
()2
(option
( E)E)
(option
(E)E)
LT/2 LT/2
ST/2+18 (-Stopper)
() (+Stopper)
ST/2+18 () ST/2+18 (-Stopper)
() (+Stopper)
ST/2+18 ()
(-Limit)
ST/2+5 () (+Limit)
ST/2+5 () ST/2+5 ()
(-Limit) ST/2+5 ()
(+Limit)
ST/2 (Home
() position) (Home position)
ST/2 ()
194
194
230
234
230
234
Standard
Encoder cable
Encoder cable

(166)
(166)
Motor cable
Motor
cable
21
21
*1 *1
()2
(71)
194
230
194
234
230
234
(LC)
(LC)
*1
Encoder cable
*1

21 Encoder
cable
21
(130) Motor cable

Extension cable *2
()2 (130) Motor
cable
Extension cable *2
()2
Table2-6 SA21 Table2-7 SA22

LC(cable chain) LC(cable chain)
Stroke(mm) N LT LA LB LC LD Stroke(mm) N LT LA LB LC LD
V1,V2*3 V3,V4*3 V1,V2*3 V3,V4*3
100 4 400 25 - 100 150 100 4 500 25 - 100 250
200 4 500 25 - 100 250 200 4 600 65 - 100 270
300 4 600 65 - 100 270 300 4 700 75 - 150 250
400 5 700 75 - 150 250 400 6 800 25 750 - -
500 6 800 25 750 - - 65 95 500 6 900 75 750 - - 65 95
600 6 900 75 750 - - 600 7 1000 50 900 - -
700 7 1000 50 900 - - 700 8 1100 25 1050 - -
800 8 1100 25 1050 - - 800 8 1200 75 1050 - -
900 8 1200 75 1050 - - 900 9 1300 50 1200 - -
1000 9 1300 50 1200 - - 1000 10 1400 25 1350 - -
SA23 Linear motor stage dimensions SA31,SA32,SA33

2xN-6.5 THRU, 11x6DP 10-M6x1Px12DP
LT
LA (N-1)x150=LB Table2-9 SA31,32,33 stage specification
LC LD LC
74
350 Specification SA31 SA31L SA32 SA32L SA33 SA33L
35 4x70=280
Continuous force,FC (N) 292 292 583 583 875 875
Peak force,FP (N) 823 823 1646 1646 2469 2469
Stroke (mm) 100~1000(mm)
Resolution 0.1m / 1.0m / Analog 1Vpp
230
234
214
202
194
Digital 1m encoder / Analog encoder: 1

Repeatability (m) *2
Digital 0.1m encoder: 0.5
Digital 1m encoder / Analog encoder: 2
Accuracy (m) *2,3
(56)
(300) Encoder
cable
Horizontal straightness (m) 10 / 500 mm
(option
( S)S) Motor cable

Extension cable *2
()2

(option
( E)E)
LT/2
Moving mass (kg) 7.5 10.5 14.5
ST/2+18 (-Stopper)
() (+Stopper)
ST/2+18 () Loading capacity (kg) 40 50 60
ST/2+5 (-Limit)
() ST/2+5 ()
(+Limit)
ST/2 ()
(Home position)
Force-Velocity Curve(DC bus = 325V)*4
Linear motor stage with horizontal chain
Force
Force
Force
194
230
234
Standard
Encoder cable

(166)
Velocity Velocity Velocity

*4
Motor cable
Force-Velocity Curve(DC bus = 600V)
21
*1
()2
Linear motor stage with vertical chain
Force
Force
Force
194
230
234
(LC)
*1
Encoder
cable
21 Velocity Velocity Velocity
(130) Motor cable

()2
Extension cable *2
Table2-8 SA23
2
2
LC(cable chain)
Stroke(mm) N LT LA LB LC LD
V1,V2*3 V3,V4*3
Acceleration
Acceleration
Acceleration
100 4 600 65 - 100 270
200 4 700 75 - 150 250
300 6 800 25 750 - -
400 6 900 75 750 - -
Payload Payload Payload
500 7 1000 50 900 - -
65 95
600 8 1100 25 1050 - -
700 8 1200 75 1050 - -
800 9 1300 50 1200 - -
*1All values are measured on a granite table, all stage mounting *4The Force-Velocity Curve is the characteristic curve of the motor.
900 10 1400 25 1350 - -
holes are well fixed. The actual velocity will change with stroke, payload and acceleration.
1000 10 1500 75 1350 - - *2Values are measured according to HIWIN measuring standard. Please refer to the Velocity-Stroke Curve or Appendix AMotor Sizing.
*1:Cable chain interior width is selected from ordering information. *3After error compensation. *5All specifications above are standard, contact HIWIN for special request.
*2:Extension cable length is selected from ordering information.
SA31 SA32 SA33
Velocity-Stroke
3.0 Curve Load 1 kg
3.0
Load 1 kg
3.0
Load 1 kg SA31 Linear motor stage dimensions
2.5 SA31 Load 20 kg 2.5 SA32 Load 25 kg 2.5 SA33 Load 30 kg
(m/s) (m/s)
(m/s) (m/s)
(m/s) (m/s)
2xN-6.5 THRU,11x6DP 6-M8x1.25Px16DP
3.0 Load 3.0 3.0
2.0 Load 40 kg
1 kg 2.0
Load
Load 50 kg
1 kg 2.0
Load
Load 60 kg
1 kg LT
LA (N-1)x150=LB
Velocity
Velocity
Velocity
1.5 1.5 1.5 LC LD LC
Load 40 kg Load 50 kg Load 60 kg 150
2.0 2.0 2.0 80
1.0 1.0 1.0 25 2x50=100
Velocity
Velocity
Velocity
1.5 1.5 1.5
0.5 0.5 0.5
1.0 1.0 1.0
0.0 0.0 0.0
0.5 0 200 400 600 800 1000 0.5 0 200 400 600 800 1000 0.5 0 200 400 600 800 1000
0.0 Stroke (mm) 0.0 Stroke (mm) 0.0 Stroke (mm)
262
226
266
246
234
0 200 400 600 800 1000 0 200 400 600 800 1000 0 200 400 600 800 1000
SA31L
Stroke (mm) SA32L
Stroke (mm) SA33L
Stroke (mm)
3.0 3.0 3.0
2.5 2.5 2.5
SA31L SA32L SA33L
(m/s) (m/s)
(m/s) (m/s)
(m/s) (m/s)
3.0 3.0 3.0
2.0 2.0 2.0
(56)
2.5 2.5 2.5 (300) Encoder cable

Velocity
Velocity
Velocity
1.5 1.5 1.5
Limit
switches connector
2.0 2.0 2.0 (option
( S)
S) Motor cable

1.0 Load 1 kg 1.0 Load 1 kg 1.0 Load 1 kg Limit switches connector Extension cable *2
Velocity
Velocity
Velocity
()2
1.5 1.5 1.5 (option E)
( E)
0.5 Load 20 kg 0.5 Load 25 kg 0.5 Load 30 kg LT/2
1.0 Load 1.0 1.0 (-Stopper)
ST/2+18 () ST/2+18 (+Stopper)
()
0.0 Load 40 kg
1 kg 0.0
Load
Load 50 kg
1 kg 0.0
Load
Load 60 kg
1 kg
ST/2+5 (-Limit)
() ST/2+5 ()
(+Limit)
0.5 0 200 400 600 Load 20 1000
800 kg 0.5 0 200 400 600 Load 25 1000
800 kg 0.5 0 200 400 600 Load 30 1000
800 kg
(Home position)
ST/2 ()
0.0 Stroke (mm) 0.0 Stroke (mm) 0.0 Stroke (mm)
0 200 400 600 800 1000 0 200 400 600 800 1000 0 200 400 600 800 1000
Cantilever Load Capability
Stroke (mm)
*2.3
Stroke (mm) Stroke (mm)
Vertical
Linear motor stage with horizontalVertical
chain
Vertical
226
262
266
Standard
Encoder cable

Horizontal
(166)
Motor cable

Horizontal
Horizontal
21
*1
(77)
Extension cable *2
()2
Linear motor stage with vertical chain

Vertical
226
70 70 70
262
266
Vertical
60
SA31/SA31L:
Velocity < 1 m/s 60
SA32/SA32L:
Velocity < 1 m/s 60
SA33/SA33L:
Velocity < 1 m/s
(kg) (kg)
(kg) (kg)
(kg) (kg)
70
50 SA31L: 70
50 SA32L: 70
50 SA33L:
SA31/SA31L:
Velocity < 2 m/s SA32/SA32L:
Velocity < 2 m/s
60
40 60
40 60
40
(LC)
Payload
Payload
Payload
Velocity < 1 m/s Velocity < 1 m/s Velocity < 1 m/s
*1
50
30 SA31L: 50
30 SA32L: 50
30 SA33L: Encoder
cable
Velocity < 2 m/s Velocity < 2 m/s Velocity < 2 m/s 21
40
20 40
20 40
20
Payload
Payload
Payload
(130) Motor cable

Extension cable *2
()2
30
10 30
10 30
10
20
0 20
0 20
0
10 0 200 400 600 10 0 200 400 600 10 0 200 400 600
Cantilever distance (mm) Cantilever distance (mm) Cantilever distance (mm) Table2-10 SA31
0 0 0
0
HorizontalCantilever distance (mm)
200 400 600 0 200 400 600 0 200 400 600 LC(cable chain)
Cantilever distance (mm) Cantilever distance (mm) Stroke(mm) N LT LA LB LC LD
V1,V2*3 V3,V4*3
70 70 70
Horizontal SA31/SA31L: SA32/SA32L: SA33/SA33L: 100 4 400 25 - 100 150
200 4 500 25 - 100 250
(kg) (kg)
(kg) (kg)
(kg) (kg)
70
50 SA31L: 70
50 SA32L: 70
50 SA33L:
SA31/SA31L:
Velocity < 2 m/s 300 4 600 65 - 100 270
60
40 60
40 60
40
Payload
Payload
Payload
Velocity < 1 m/s Velocity < 1 m/s Velocity < 1 m/s

SA31L: SA32L: SA33L:
400 5 700 75 - 150 250
50
30 50
30 50
30
Velocity < 2 m/s Velocity < 2 m/s Velocity < 2 m/s 500 6 800 25 750 - -
40
20 40
20 40
20 65 95
Payload
Payload
Payload
30 30 30
600 6 900 75 750 - -
10 10 10
20
0 20
0 20
0
700 7 1000 50 900 - -
10 0 200 400 600 10 0 200 400 600 10 0 200 400 600 800 8 1100 25 1050 - -
0
0
0
Cantilever distance (mm) 900 8 1200 75 1050 - -
0
*1All values200 400 contact600
above are standard, 0
HIWIN for special request.200 400 600 0 200 400 600 1000 9 1300 50 1200 - -
Cantilever distance (mm) Cantilever distance (mm)
Cantilever distance (mm) *1:Cable chain interior width is selected from ordering information.
*3The main reason for lifetime derives from linear guideway. For more details, please refer to HIWIN linear guideway catalog. *2:Extension cable length is selected from ordering information.
2xN-6.5 THRU,11x6DP 8-M8x1.25Px16DP 2xN-6.5 THRU, 11x6DP 10-M8x1.25Px16DP
LT
LT
LA (N-1)x150=LB
LA (N-1)x150=LB
LC LD LC
LC LD LC
250
80 350
35 3x60=180 80 35 4x70=280
262
226
266
246
234
262
226
266
246
234
(56)
(56)
(300) Encoder
cable

(300) Encoder
cable
(option
(S)S) Limit switches connector

Motor
cable (option
( S)S)
Limit
connector
switches Extension cable *2
()2
Motor
cable
(option
(E)E)
Limit
connector
switches Extension cable *2
()2
LT/2 (option
(E) E)
ST/2+18 (-Stopper)
() ST/2+18 (+Stopper)
() LT/2
ST/2+18 (-Stopper)
() (+Stopper)
ST/2+18 ()
(-Limit)
ST/2+5 () (+Limit)
ST/2+5 ()
ST/2+5 (-Limit)
() ST/2+5 (+Limit)
()
(Home position)
ST/2 ()
(Home position)
ST/2 ()
226
226
262
266
262
266
Standard
Encoder cable
Encoder cable
(166)
(166)
Motor cable
Motor cable

21
21
*1 *1
Extension cable *2
()2
(77) (77) Extension cable *2
()2
226
226
262
266
262
266
(LC)
(LC)
*1
*1
Encoder
cable Encoder
cable
21 21
(130) Motor cable

(130) Motor cable

()2
Extension cable *2 Extension
()2 cable *2
Table2-11 SA32 Table2-12 SA33

LC(cable chain) LC(cable chain)
Stroke(mm) N LT LA LB LC LD Stroke(mm) N LT LA LB LC LD
V1,V2*3 V3,V4*3 V1,V2*3 V3,V4*3
100 4 500 25 - 100 250 100 4 600 65 - 100 270
200 4 600 65 - 100 270 200 4 700 75 - 150 250
300 4 700 75 - 150 250 300 6 800 25 750 - -
400 6 800 25 750 - - 400 6 900 75 750 - -
500 6 900 75 750 - - 500 7 1000 50 900 - -
65 95 65 95
600 7 1000 50 900 - - 600 8 1100 25 1050 - -
700 8 1100 25 1050 - - 700 8 1200 75 1050 - -
800 8 1200 75 1050 - - 800 9 1300 50 1200 - -
900 9 1300 50 1200 - - 900 10 1400 25 1350 - -
1000 10 1400 25 1350 - - 1000 10 1500 75 1350 - -
2.3 LMC high-precision, high-speed stability 2.3.1 Linear single axis
Linear motor LMC stages are equipped with coreless motor(s) and well suited for
applications that require precision positioning and constant velocity scanning motion. LMX1ECB51300 G200
Linear motor direct drive, enabling ultra-precise movement Stage type
Stroke range up to 4m LMX1E
Superior speed control characteristic
Motor type
Low cost, small size, high performance
Suitable for clean rooms CB5:LMCB5
CB6:LMCB6
CB7:LMCB7
CB8:LMCB8

1:1
Stroke
100:100mm 700:700mm
200:200mm 800:800mm
300:300mm 900:900mm
400:400mm 1000:1000mm
500:200mm 1100:1100mm
600:300mm 1200:1200mm
Encoder type
0:None
A:40m analog 1Vpp optical scale
Standard
B:20m analog 1Vpp optical scale
D:1mm analog 1Vpp magnetic scale
G:TTL digital 1m resolution optical scale (standard)
H:TTL digital 0.5m resolution optical scale
M:TTL digital 20nm resolution optical scale
P:40m analog glass optical scale
X:Other (please remark desired specifications, product or model)
Limit switch
0:None
1:Inductive type, PNP
2:Optical switch, NPN (standard)
3:Optical switch, PNP
4:Inductive type, NPN
C:Customized
Cover
0:None (standard)
A:Metal cover
B:Bellows
C:Customized
D:Non-woven
Cable chain
0:None (standard)
1:Horizontal direction (chain internal space 15x30mm)
2:Vertical direction (chain internal space 15x30mm)
C:Customized

Velocity-Stroke Curve CB5 CB6
Table2-13 LMCB5,6,7,8 stage specification 5.0 5.0
CB5 CB6
Specification CB5 CB6 CB7 CB8
(m/s)(m/s)
(m/s)(m/s)
5.0
4.0 5.0
4.0
Continuous force,FC (N) 91 109 128 145
4.0 4.0
Velocity
Velocity
3.0 3.0
Peak force,FP (N) 364 436 512 580
Stroke (mm) 100-1200
Velocity
Velocity
3.0
2.0 3.0
2.0
Resolution 1.0m Load 10 kg Load 10 kg
2.0
1.0 2.0
1.0
Stroke 100~1000 mm: 1 Load 20 kg Load 20 kg
Repeatability (m) *2 Load 30
Load 10 kg
kg Load 30
Load 10 kg
kg
Stroke 1100 / 1200 mm: 2 1.0
0.0 Load 20 kg 1.0
0.0 Load 20 kg
Stroke 100~1000 mm: 3 0 200 400 600 800 1000 1200
Load 30 kg 0 200 400 600 800 1000 1200
Load 30 kg
Accuracy (m) *2,3 0.0 Stroke (mm) 0.0 Stroke (mm)
Stroke 1100 / 1200 mm: 8 0 200 400 600 800 1000 1200 0 200 400 600 800 1000 1200
CB7 (mm)
Stroke CB8 (mm)
Stroke
Horizontal straightness (m) 10 / 500 mm 5.0 5.0
Vertical straightness (m) 20 / 500 mm CB7 CB8
(m/s)(m/s)
(m/s)(m/s)
5.0
4.0 5.0
4.0
No cover: 2.1 No cover: 3.1
Moving mass (kg) 3.8 4.7
With cover: 2.3 With cover: 3.3 4.0 4.0
Velocity
Velocity
3.0 3.0
Velocity
Velocity
3.0
2.0 3.0
2.0
Force-Velocity Curve (DC bus = 325V) *4
Load 10 kg Load 10 kg
CB5 Fp CB5 Fc CB6 Fp CB6 Fc CB7 Fp CB7 Fc CB8 Fp CB8 Fc 2.0
1.0 2.0
1.0
Load 30
Load 10 kg
kg Load 30
Load 10 kg
kg
800 800 800 800 1.0 1.0
0.0 Load 20 kg 0.0 Load 20 kg
0 200 400 600 800 1000 1200
Load 30 kg 0 200 400 600 800 1000 1200
Load 30 kg
600 600 600 600 0.0 Stroke (mm) 0.0 Stroke (mm)
Force (N)
Force (N)
Force (N)
Force (N)
0 200 400 600 800 1000 1200 0 200 400 600 800 1000 1200
400 400 400 400 Cantilever Load Capability
Stroke (mm) *2.3
Stroke (mm)
200 200 200 200

Vertical
0 0 0 0
Vertical
0 1 2 3 4 5 6 0 1 2 3 4 5 6 0 1 2 3 4 5 6 0 1 2 3 4 5 6
Standard
Velocity (m/s) Velocity (m/s) Velocity (m/s) Velocity (m/s)
CB5 CB6 CB7 CB8
60 60 60 60
50 50 50 50
Acceleration (m/s 2 )
Horizontal
40 40 40 40
30 30 30 30
Horizontal
20 20 20 20
10 10 10 10
0 0 0 0
0 20 40 60 80 0 20 40 60 80 0 20 40 60 80 0 20 40 60 80 Vertical
Payload (kg) Payload (kg) Payload (kg) Payload (kg) CB5: Velocity < 2 m/s CB6: Velocity < 2 m/s CB7: Velocity < 2 m/s CB8: Velocity < 2 m/s
Vertical
80 80 80 80
CB5: Velocity < 2 m/s CB6: Velocity < 2 m/s CB7: Velocity < 2 m/s CB8: Velocity < 2 m/s
(kg) (kg)
(kg) (kg)
(kg) (kg)
(kg) (kg)
80
60 80
60 80
60 80
60
Payload
Payload
Payload
Payload
60
40 60
40 60
40 60
40
Payload
Payload
Payload
Payload
*1All values are measured on a granite table, all stage mounting holes are well fixed. 40 40 40 40
20 20 20 20
*2Values are measured according to HIWIN measuring standard.
*3After error compensation.
*4The Force-Velocity Curve is the characteristic curve of the motor. The actual velocity will change with stroke, payload and acceleration. 20
0 20
0 20
0 20
0
Please refer to the Velocity-Stroke Curve or Appendix AMotor Sizing. 0 50 100 150 200 0 50 100 150 200 0 50 100 150 200 0 50 100 150 200
*5All specifications above are standard, contact HIWIN for special request. 0 Cantilever distance (mm) 0 Cantilever distance (mm) 0 Cantilever distance (mm) 0 Cantilever distance (mm)
0 50 100 150 200 0 50 100 150 200 0 50 100 150 200 0 50 100 150 200
Horizontal
Cantilever distance (mm) Cantilever distance (mm) Cantilever distance (mm) Cantilever distance (mm)
Horizontal
80 80 80 80
(kg) (kg)
(kg) (kg)
(kg) (kg)
(kg) (kg)
80
60 80
60 80
60 80
60
Payload
Payload
Payload
Payload
60
40 60
40 60
40 60
40
Payload
Payload
Payload
Payload
40
20 40
20 40
20 40
20
20
0 20
0 20
0 20
0
0 50 100 150 200 0 50 100 150 200 0 50 100 150 200 0 50 100 150 200
0 Cantilever distance (mm) 0 Cantilever distance (mm) 0 Cantilever distance (mm) 0 Cantilever distance (mm)
0 50 100 150 200 0 50 100 150 200 0 50 100 150 200 0 50 100 150 200
*1All values abovedistance
Cantilever are standard,
(mm)contact HIWIN for special request.
30 MM99TE07-1701 + Linear Motor System 31
60 180
(22)
35 110 80
11
2.2.3 LMC Series Stage Without cover
22
36.5
LMCB5 +Direction
+
60 180
Effective stroke
180
158
105
178
(22)
35 110
Table2-14 Without/with cover linear motor stage specifications 80
11
22
36.5
22
Stroke L L1 Mass H
N
(mm) (mm) (mm) (kg) (mm)
(89)
4 - M6x1.0Px12DP
180
158
105
178
100 400 35 1*1 18/19 95
200 500 85 2 22/23 95 (68)
300 600 60 3 26/27 95 2x2-6H7 THRU
22
400 700 35 4 30/31 95 2x(N+1)-6.5 THRU,
Limit

11x8.5DP
(89)
500 800 85 4 34/35 95 4 - M6x1.0Px12DP

Connector
600 900 60 5 38/39 95
700 1000 35 6 42/43 95 (68)
800 1100 85 6 46/47 95 2x2-6H7 THRU

75 75
900 1200 60 7 50/51 95 L1 Nx150 (1) 2x(N+1)-6.5 THRU,
11x8.5DP
15 L-30
1000 1300 35 8 54/55 95
L
1100 1400 85 8 58/59 105
1200 1500 60 9 62/63 105
*1When stroke is 100mm, the mounting holes spacing is 300mm. 75 75
Standard
*2: Absolute accuracy is after error mapping(with HIWIN drive). L1 Nx150 (1)
(*1)
15 L-30
L
With cover
+Direction
+
60 180
Effective stroke
(22)
35 110 H
11
22
36.5
+
60 180
180
158
178
105
(22)
35 110 H
11
22
36.5
22
Limit

(89)
4 - M6x1.0Px12DP
180
158
105
178

Connector
(68)
2x2-6H7 THRU
22
2x(N+1)-6.5
THRU,
11x8.5DP
(89)
4 - M6x1.0Px12DP

(68)
2x2-6H7 THRU
75 75 2x(N+1)-6.5 THRU,
(*1) 11x8.5DP
L1 Nx150 (1)
15 L-30
L
+
32 MM99TE07-1701
60 210
Linear Motor System 33
(22)
35 2x70=140 80
11
22
LMCB6 Without cover
36.5
+Direction
+
180
158
178
(22) 105
Table2-15 Without/with cover linear motor stage specifications 60 210 Effective
stroke
35 2x70=140 80
11
Stroke L L1 Mass H
N
22
22
36.5

100 430 50 1*1 19/20 95 6-M6x1.0Px12DP

180
158
178
105
200 530 25 3 23/24 95
(68)
2x2-6H7 THRU
300 630 75 3 27/28 95
400 730 50 4 31/32 95 2x(N+1)-6.5 THRU,
22
11x8.5DP
500 830 25 5 35/36 95
Limit

600 930 75 5 39/40 95 6-M6x1.0Px12DP
700 1030 50 6 43/44 95 Connector

800 1130 25 7 47/48 95 2x2-6H7 THRU

(68)
900 1230 75 7 51/52 95 75 75

Nx150( 1) 2x(N+1)-6.5 THRU,
L1
1000 1330 50 8 55/56 95 11x8.5DP
15 L-30
1100 1430 25 9 59/60 105 L
1200 1530 75 9 63/64 105

*1When stroke is 100mm, the mounting holes spacing is 300mm.
*2: Absolute accuracy is after error mapping(with HIWIN drive).
75 75
L1 (*1)1)
Nx150(
Standard
15 L-30
L
With cover
+Direction
+
60 210 Effective
stroke
(22)
35 2x70=140 H
11
22
36.5
+
180
158
178
(22) 105
60 210
35 2x70=140 H
11
22
22
36.5
Limit

(89)
6 - M6x1.0Px12DP
Connector
180
158
178
105

(68)
2x2-6H7 THRU
22
2x(N+1)-6.5 THRU,
11x8.5DP
(89)
6 - M6x1.0Px12DP

(68)
2x2-6H7 THRU
75 75
2x(N+1)-6.5 THRU,
L1 Nx150(1)
(*1)
11x8.5DP
15 L-30
L
34 MM99TE07-1701 + Linear Motor System 35
60 240
(22)
15 3x70=210 80
11
LMCB7 Without cover
22
36.5
+Direction
+
60 240 Effective
stroke
Table2-16 Without/with cover linear motor stage specifications
(22)
180
158
105
178
15 3x70=210 80
11
Stroke L L1 Mass H
22
36.5
N
22

100 460 65 1*1 20/21 95
(89)
8-M6x1.0Px12DP
180
158
105
178
200 560 40 3 24/25 95
300 660 90 3 28/29 95 2x2-6H7 THRU (68)
22
400 760 65 4 32/33 95 2x(N+1)-6.5 THRU,
Limit

500 860 40 5 36/37 95 11x8.5DP
(89)
8-M6x1.0Px12DP
600 960 90 5 40/41 95 Connector

700 1060 65 6 44/45 95 (68)
2x2-6H7 THRU
800 1160 40 7 48/49 95
900 1260 90 7 52/53 95 2x(N+1)-6.5 THRU,
75 75 11x8.5DP
1000 1360 65 8 56/57 95 L1 Nx150( 1)
15 L-30
1100 1460 40 9 60/61 105
L
1200 1560 90 9 64/65 105
*1When stroke is 100mm, the mounting holes spacing is 300mm.
*2: Absolute accuracy is after error mapping(with HIWIN drive). 75 75
L1 Nx150(
(*1)1)
Standard
15 L-30
L
With cover
+Direction
+
60 240 Effective
stroke
(22)
15 3x70=210 H
11
22
36.5
+
60 240
(22)
180
158
178
105
15 3x70=210 H
11
22
36.5
22
Limit

(89)
8-M6x1.0Px12DP
180
158
178
105
Connector

(68)
2x2-6H7 THRU
22
2x(N+1)-6.5 THRU,

11x8.5DP
(89)
8-M6x1.0Px12DP

(68)
2x2-6H7 THRU
2x(N+1)-6.5 THRU,
75 75 11x8.5DP
L1 Nx150(
(*1)1)
15 L-30
L
75 75
L1 Nx150( 1)
+
60 280
LMCB8 Without cover
(22)
35 3x70=210 80
11
+Direction
+
22
36.5
Table2-17 Without/with cover linear motor stage specifications
60 280 Effective stroke
(22)
35 3x70=210 80
158 11
Stroke L L1 Mass H
180
36.5 105
178
N
22
100 500 85 1*1 21/22 95
22
200 600 60 3 25/26 95
180
158
105
(89) 178

300 700 35 4 29/30 95 8-M6x1.0Px10DP
400 800 85 4 33/34 95
22
500 900 60 5 37/38 95 (68)
Limit

600 1000 35 6 41/42 95 2x2-6H7 THRU
(89)
8-M6x1.0Px10DP
700 1100 85 6 45/46 95 Connector
THRU,
2x(N+1)-6.5
11x8.5DP
800 1200 60 7 49/50 95 (68)
900 1300 35 8 53/54 95 2x2-6H7 THRU
1000 1400 85 8 57/58 95 2x(N+1)-6.5 THRU,

1100 1500 60 9 61/62 105 11x8.5DP
75 75
1200 1600 35 10 65/66 105 L1 Nx150( 1)
15 L-30
*1When stroke is 100mm, the mounting holes spacing is 300mm. L
*2: Absolute accuracy is after error mapping(with HIWIN drive).
75 75
L1 Nx150(
(*1)1)
Standard
15 L-30
L
With cover
+Direction
+
60 280
Effective stroke
(22)
35 3x70=210 H
11
+
22
36.5
60 280
(22)
35 3x70=210 H
15811
180
36.5 105
178
22 22
180
158
105
(89) 178
Limit

8 - M6x1.0Px10DP
Connector

22
(68)
THRU
2x2-6H7
(89)
8 - M6x1.0Px10DP
2x(N+1)-6.5
THRU,
11x8.5DP
(68)
2x2-6H7 THRU
2x(N+1)-6.5 THRU,
11x8.5DP
75 75
L1 Nx150(
(*1)1)
15 L-30
L
75 75
L1 Nx150( 1)
2.4 LMT light weight, high acceleration/deceleration 2.4.2 LMTA2 Shaft motor stage
Shaft motor series with LMT ironless motors are suitable for inspection, scan and semiconductor industry. Table2-18 LMTA2,3,4 stage specification
It can also be assembled into X-Y stage; position feedback apples incremental analog or digital optical scale
and magnetic scale as position feedback are seletable. Specification TA2 TA3 TA4
Peak force,FP (N) 108 168 220
Lightweight
No cogging
Resolution 1.0m
Max. acceleration 50m/s2, max. velocity 5m/s
Repeatability (m) *2 1
High acceleration and deceleration characteristics
Accuracy (m) *2,3 3
2.4.1 Linear single axis Vertical straightness (m) 20 / 500 mm
LMX1E T A 21300 G200 Moving mass (kg) 1.4 2.1 2.3
Stage type
LMX1E Force-Velocity Curve (DC bus = 325V)*4
TA2 Fp TA2 Fc TA3 Fp TA3 Fc TA4 Fp TA4 Fc
Motor type 300 300 300
TA2:LMTA2 TB3:LMTB3 TC4:LMTC4
TA3:LMTA3 TB4:LMTB4
200 200 200
Force (N)
Force (N)
Force (N)
TA4:LMTA4 TC2:LMTC2
TB2:LMTB2 TC3:LMTC3
100 100 100
1:1 0 0 0
0 1 2 3 4 5 6 0 1 2 3 4 5 6 0 1 2 3 4 5 6
Stroke
Standard
Velocity (m/s) Velocity (m/s) Velocity (m/s)
388:388mm 1156:1156mm
516:516mm 1412:1412mm
644:644mm 1668:1668mm Acceleration-Payload Curve
722:722mm 1924:1924mm TA2 TA3 TA4
900:900mm 2180:2180mm 60 60 60
50 50 50
Encoder type 40 40 40
0:None 30 30 30
A:40m analog 1Vpp optical scale 20 20 20
B:20m analog 1Vpp optical scale 10 10 10
D:1mm analog 1Vpp magnetic scale 0 0 0
E:TTL digital 1m resolution magnetic scale 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40
G:TTL digital 1m resolution optical scale (standard) Payload (kg) Payload (kg) Payload (kg)
P:40m analog glass optical scale
X:Other (please remark desired specifications, product or model) *1All values are measured on a granite table, all stage mounting holes are well fixed.
*3After error compensation.
Limit switch *4The Force-Velocity Curve is the characteristic curve of the motor. The actual velocity will change with stroke, payload and acceleration.
0:None Please refer to the Velocity-Stroke Curve or Appendix AMotor Sizing.
*5All specifications above are standard, contact HIWIN for special request.
1:Inductive type, PNP
C:Customized
Cover
0:None (standard)
A:Metal cover
B:Bellows
C:Customized
D:Non-woven
Cable chain
0:None (standard)
C:Customized NoteContact HIWIN for customized specification.
TA2 TA3 TA4
6.0 6.0 6.0
Table2-19 LMTA2 Shaft motor stage specifications

Velocity (m/s)
Velocity (m/s)
Velocity (m/s)
5.0 5.0 5.0
4.0 4.0 4.0
3.0 3.0 3.0 Stroke L L1 L2 Mass

N
2.0 Load 1 kg
2.0 Load 1 kg
2.0 Load 1 kg
(mm) (mm) (mm) (mm) (kg)
100 304 67 54.5 1 5
0.0 0.0 0.0
0 200 400 600 800 1000 0 200 400 600 800 1000 0 200 400 600 800 1000
200 404 42 54.5 2 6
Stroke (mm) Stroke (mm) Stroke (mm) 300 534 32 69.5 3 6.9
400 634 82 69.5 3 7.9
Cantilever Load Capability *2.3 500 734 57 69.5 4 8.8
Vertical 600 834 32 69.5 5 9.8
700 974 27 89.5 6 11.2
800 1074 77 89.5 6 12.1
900 1174 52 89.5 7 13.1
1000 1274 27 89.5 8 14
* Absolute accuracy is after error mapping (with HIWIN drive).
Horizontal
Horizontal
Standard
Dimension
+Direction
+
(21.5)
L2 95
Effective stroke
78
Vertical 22.5 50
4-M5x0.8Px10DP
11
5
TA2: Velocity < 2 m/s TA3: Velocity < 2 m/s TA4: Velocity < 2 m/s
25 25 25
Payload (kg)
Payload (kg)
Payload (kg)
20 20 20
110
100
102
80
15 15 15
10 10 10

Limit
5 5 5
(92)
0 0 0
Connector
2x(N+1)-M5x0.8Px10DP
0 50 100 150 200 250 300 0 50 100 150 200 250 300 0 50 100 150 200 250 300 (67.5)
Horizontal
TA2: Velocity < 2 m/s TA3: Velocity < 2 m/s TA4: Velocity < 2 m/s
25 25 25 L1 Nx150
10 L-20
Payload (kg)
Payload (kg)
Payload (kg)
20 20 20
L
15 15 15
10 10 10
5 5 5
0 0 0
0 50 100 150 200 250 300 0 50 100 150 200 250 300 0 50 100 150 200 250 300
*1All values above are standard, contact HIWIN for special request.
Table2-20 LMTA3 Shaft type linear motor stage specifications Table2-21 LMTA4 Shaft type linear motor stage specifications
Stroke L L1 L2 Mass Stroke L L1 L2 Mass

N N
(mm) (mm) (mm) (mm) (kg) (mm) (mm) (mm) (mm) (kg)
100 340 85 55 1 6.3 100 376 28 53 2 7.0

200 440 60 55 2 7.4 200 476 78 53 2 8.1
300 570 50 70 3 8.5 300 606 68 68 3 9.2
400 670 25 70 4 9.6 400 706 43 68 4 10.4
500 770 75 70 4 10.8 500 806 18 68 5 11.5
600 870 50 70 5 11.9 600 906 68 68 5 12.6
700 1010 45 90 6 13.5 700 1046 63 88 6 14.2
800 1110 20 90 7 14.6 800 1146 38 88 7 15.3
900 1210 70 90 7 15.8 900 1246 13 88 8 16.5
1000 1310 45 90 8 16.9 1000 1346 63 88 8 17.6
* Absolute accuracy is after error mapping (with HIWIN drive). * Absolute accuracy is after error mapping (with HIWIN drive).
Standard
Dimension Dimension
+Direction
+ +Direction
+
(21.5)
L2 170
Effective stroke
L2 130 Effective
stroke 78
(21.5) 10 3x50=150
2x4-M5x0.8Px10DP
15 2x50=100
11
78
5
6-M5x0.8Px10DP
11
5
102
110
100
80
102
110
100
80

Limit
(92)
Limit

(92)
Connector

Connector
2x(N+1)-M5x0.8Px10DP
2x(N+1)-M5x0.8Px10DP (67.5)
(67.5)
L1 Nx150
L1 Nx150 10 L-20
10 L-20
L
L
2.4.3 LMTB2 Shaft motor stage Velocity-Stroke Curve

TB2 TB3 TB4
5.0 5.0 5.0
Table2-22 LMTB2,3,4 stage specification Load 5 kg
Velocity (m/s)
Velocity (m/s)
Velocity (m/s)
4.0 4.0 4.0 Load 10 kg
Specification TB2 TB3 TB4 Load 15 kg
Continuous force,FC (N) 48 72 96 3.0 3.0 3.0
Peak force,FP (N) 192 288 384 2.0 2.0 2.0
Stroke (mm) 100-1000 Load 5 kg Load 5 kg
1.0 1.0 1.0
Resolution 1.0m Load 10 kg Load 10 kg
Repeatability (m) *2 1 0.0 0.0 0.0
0 200 400 600 800 1000 0 200 400 600 800 1000 0 200 400 600 800 1000
Accuracy (m) *2,3 3
Moving mass (kg) 2.1 2.7 3.6 Cantilever Load Capability*2.3
Vertical
Force-Velocity Curve (DC bus = 325V) *4 Vertical
Vertical
TB2 Fp TB2 Fc TB3 Fp TB3 Fc TB4 Fp TB4 Fc
500 500 500
400 400 400

Force (N)
Force (N)
Force (N)
300 300 300
200 200 200
100 100 100

Horizontal
0 0 0
0 1 2 3 4 5 6 0 1 2 3 4 5 6 0 1 2 3 4 5 6
Horizontal
Velocity (m/s)
Horizontal
Velocity (m/s) Velocity (m/s)
Standard
TB2 TB3 TB4
60 60 60
50 50 50 Vertical
TB2: Velocity < 2 m/s TB3: Velocity < 2 m/s TB4: Velocity < 2 m/s
40 40 40
50 50 50
30 30 30
Payload (kg)
Payload (kg)
Payload (kg)
20 20 20 40 40 40
10 10 10 30 30 30
0 0 0
0 10 20 30 40 50 0 10 20 30 40 50 0 10 20 30 40 50 20 20 20
Payload (kg) Payload (kg) Payload (kg)
10 10 10
0 0 0
0 50 100 150 200 250 300 0 50 100 150 200 250 300 0 50 100 150 200 250 300
*1All values are measured on a granite table, all stage mounting holes are well fixed.
*3After error compensation. Horizontal
*4The Force-Velocity Curve is the characteristic curve of the motor. The actual velocity will change with stroke, payload and acceleration. TB2: Velocity < 2 m/s TB3: Velocity < 2 m/s TB4: Velocity < 2 m/s
Please refer to the Velocity-Stroke Curve or Appendix AMotor Sizing. 50 50 50
Payload (kg)
Payload (kg)
Payload (kg)
40 40 40
30 30 30
20 20 20
10 10 10
0 0 0
0 50 100 150 200 250 300 0 50 100 150 200 250 300 0 50 100 150 200 250 300
Table2-23 LMTB2 Shaft type linear motor stage specifications Table2-24 LMTB3 Shaft type linear motor stage specifications

N N
100 380 30 80 2 8.2 100 425 52.5 80 2 9.5

200 480 80 80 2 9.6 200 525 27.5 80 3 10.9
300 580 55 80 3 11.0 300 625 77.5 80 3 12.3
400 680 30 80 4 12.4 400 725 52.5 80 4 13.6
500 780 80 80 4 13.8 500 825 27.5 80 5 15.0
600 880 55 80 5 15.2 600 925 77.5 80 5 16.4
700 1020 50 100 6 17.1 700 1055 72.5 100 6 18.3
800 1120 25 100 7 18.5 800 1165 47.5 100 7 19.7
900 1220 75 100 7 19.8 900 1265 22.5 100 8 21.1
1000 1320 50 100 8 21.2 1000 1365 72.5 100 8 22.5
Standard
Dimension Dimension
+Direction
+
+Direction
+
Effective stroke
(21.5)
L2 165
6.5
88
L2 120 Effective
stroke (21.5) 22.5 2x60=120
6.5
88 6-M5x0.8Px10DP
15
30 60 4-M5x0.8Px10DP
15
136
123
106
136
136
123
106
136
Limit

(88)

Limit
(88)
Connector

Connector
2x(N+1)-M6x1Px12DP
(76.5)
2x(N+1)-M6x1Px12DP (76.5)
L1 Nx150
L1 Nx150 10 L-20
10 L-20 L
L
2.4.4 LMTC2 Shaft motor stage

Table2-26 LMTC2,3,4 stage specification
Table2-25 LMTB4 Shaft type linear motor stage specifications
Specification TC2 TC3 TC4
Stroke L L1 L2 Mass
N Peak force,FP (N) 368 552 736
(mm) (mm) (mm) (mm) (kg)
100 470 75 80 2 11 Resolution 1.0m
200 570 50 80 3 12.4 Repeatability (m) *2 1
Accuracy (m) *2,3 3
300 670 25 80 4 13.8
400 770 75 80 4 15.2 Vertical straightness (m) 20 / 500 mm
500 870 50 80 5 16.6 Moving mass (kg) 4.0 5.7 6.9
600 970 25 80 6 18
700 1110 20 100 7 19.9 Force-Velocity Curve (DC bus = 325V) *4
TC2 Fp TC2 Fc TC3 Fp TC3 Fc TC4 Fp TC4 Fc
800 1210 70 100 7 21.3
1000 1000 1000
900 1310 45 100 8 22.7
800 800 800
1000 1410 20 100 9 24.1
Force (N)
Force (N)
Force (N)
* Absolute accuracy is after error mapping (with HIWIN drive). 600 600 600
400 400 400
200 200 200
0 0 0
0 1 2 3 4 5 6 0 1 2 3 4 5 6 0 1 2 3 4 5 6
Velocity (m/s) Velocity (m/s) Velocity (m/s)
Standard
Dimension
+Direction
+ Acceleration-Payload Curve
TC2 TC3 TC4
(21.5)
L2 210 Effective
stroke 60 60 60
88
15 3x60=180 8-M5x0.8Px10DP 50 50 50
6.5
15
40 40 40
30 30 30
20 20 20
10 10 10
136
123
106
136
0 0 0
0 10 20 30 40 50 60 0 10 20 30 40 50 60 0 10 20 30 40 50 60
Payload (kg) Payload (kg) Payload (kg)
Limit

(88)
Connector
*1All values are measured on a granite table, all stage mounting holes are well fixed.
2x(N+1)-M6x1Px12DP *3After error compensation.
(76.5)
*4The Force-Velocity Curve is the characteristic curve of the motor. The actual velocity will change with stroke, payload and acceleration.
Please refer to the Velocity-Stroke Curve or Appendix AMotor Sizing.
L1 Nx150
10 L-20
L
TC2 TC3 TC4
5.0 5.0 5.0
Load 10 kg
Velocity (m/s)
Velocity (m/s)
Velocity (m/s)
4.0 4.0 4.0 Load 20 kg Table2-27 LMTC2 Shaft type linear motor stage specifications
Load 30 kg
3.0 3.0 3.0
Stroke L L1 L2 Mass
2.0 2.0 2.0 N
Load 10 kg Load 10 kg (mm) (mm) (mm) (mm) (kg)
1.0 Load 20 kg 1.0 Load 20 kg 1.0
Load 30 kg Load 30 kg 100 420 50 80 2 14.1
0.0 0.0 0.0
0 200 400 600 800 1000 0 200 400 600 800 1000 0 200 400 600 800 1000 200 520 25 80 3 16.2
Stroke (mm) Stroke (mm) Stroke (mm) 300 620 75 80 3 18.3
400 720 50 80 4 20.4
Cantilever Load Capability*2.3 500 820 25 80 5 22.5
Vertical 600 920 75 80 5 24.6
700 1020 50 80 6 27.5
800 1160 45 100 7 29.5
900 1260 20 100 8 31.6
1000 1360 70 100 8 33.7
* Absolute accuracy is after error mapping (with HIWIN drive).
Horizontal
Horizontal
Standard
Dimension
+Direction
+
L2 160 Effective
stroke
(21.5)
109
Vertical 10 2x70=140 6-M6x1.0Px12DP
7.95
16
TC2: Velocity < 2 m/s TC3: Velocity < 2 m/s TC4: Velocity < 2 m/s
60 60 60
50 50 50
Payload (kg)
Payload (kg)
Payload (kg)
40 40 40
170
154
136
168
30 30 30
20 20 20
10 10 10
0 0 0
0 50 100 150 200 250 300 0 50 100 150 200 250 300 0 50 100 150 200 250 300
Limit

(89)
Connector

Horizontal 2x(N+1)-M8x1.25Px16DP
TC2: Velocity < 2 m/s TC3: Velocity < 2 m/s TC4: Velocity < 2 m/s (94)
60 60 60
50 50 50
Payload (kg)
Payload (kg)
Payload (kg)
40 40 40
30 30 30
20 20 20 L1 Nx150
10 L-20
10 10 10
L
0 0 0
0 50 100 150 200 250 300 0 50 100 150 200 250 300 0 50 100 150 200 250 300
Table2-28 LMTC3 Shaft type linear motor stage specifications Table2-29 LMTC4 Shaft type linear motor stage specifications

N N
100 480 80 80 2 17 100 540 35 80 3 19.4
200 580 55 80 3 19.1 200 640 10 80 4 21.5
300 680 30 80 4 21.2 300 740 60 80 4 23.6
400 780 80 80 4 23.3 400 840 35 80 5 25.7
500 880 55 80 5 25.4 500 940 10 80 6 27.8
600 980 30 80 6 27.5 600 1040 60 80 6 29.9
700 1080 80 80 6 30.4 700 1140 35 80 7 32.9
800 1220 75 100 7 32.4 800 1280 30 100 8 34.9
900 1320 50 100 8 34.5 900 1380 80 100 8 37
1000 1420 25 100 9 36.6 1000 1480 55 100 9 39.1
Standard
Dimension Dimension
+Direction
+ +Direction
+
L2 220
Effective stroke L2 280
Effective stroke
(21.5)
(21.5)
40 2x70=140 109 35 3x70=210 109
6-M6x1.0Px12DP 8-M6x1.0Px12DP
7.95
16
16
8
170
154
136
168
170
154
136
168
Limit
Limit

(89)
(89)
Connector

Connector

2x(N+1)-M8x1.25Px16DP 2x(N+1)-M8x1.25Px16DP
(94) (94)
L1 Nx150 L1 Nx150
10 L-20 10 L-20
L L
2.5 X-Y stage 2.5.2 X-Y stage
LMX1 series linear motor stages can be assembled into an X-Y stage and configured for a variety of different LMX 2ECB5CB8 200 300G2 00
X and Y strokes.
Stage type
LMX2E
Upper axis motor type

2.5.1 LMX2E-CB5-CB8 X-Y stage CB5
High speed
Lower axis motor model
No cogging CB8
High precision Upper axis stroke
Easy to assemble
100:100mm
High stiffness aluminum structure 200:200mm
Ironless linear motor 300:300mm
Optical inspection
Lower axis stroke
100:100mm
Without cover 200:200mm
300:300mm
400:400mm
Encoder type
0:none
Standard
P:40m glass optical analog scale
X:Other (please remark desired specifications or product model)
Limit switch
0:None
1:Metal cover
With cover C:Customized
Cover
0:None (standard)
A:Metal cover
B:Bellows
B:Customized
D:Non-woven
Cable chain
0:None (standard)
C:Customized

Without cover 2.5.3 LMX2E-CB5CB8 X-Ystage-cover type
Table2-30 Without cover X-Y stage product specifications Different stroke and function of dual axes stages consist of various standard single axes. This will shortens
the development and mass production lead time. It can be applied in machine tool and semiconductor
X- Y- LX LY L1 L2 N Absolute Resolution Repeatability Orthogonality X moving Y moving Mass industry.
Stroke Stroke accuracy unit mass unit mass
(mm) (mm) (mm) (mm) (mm) (mm) (m) (m) (m) (arc-sec) (Kg) (Kg) (kg)
100 100 400 500 85 111 1 *1
3 1 5 2.5 20 44
100 200 400 600 60 111 3 3 1 5 2.5 20 46
High speed
200 200 500 600 60 161 4 3 1 5 2.5 22 48
No cogging
100 300 400 700 35 111 5 3 1 5 2.5 20 48
High precision
200 300 500 700 35 161 5 3 1 1 5 2.5 22 50 Easy to assemble
300 300 600 700 35 211 6 3 1 5 2.5 24 52 Optical detection application
100 400 400 800 85 111 7 3 1 5 2.5 20 50 High rigid aluminum structure
200 400 500 800 85 161 7 3 1 5 2.5 22 52 Ironless linear motor
300 400 600 800 85 211 8 3 1 5 2.5 24 54

* 1: When the stroke is 100mm, the mounting holes spacing is 300mm.
* 2: Absolute accuracy is after error mapping (with HIWIN drive).
* 3: Except resolution magnetic scale.
* 4: For higher resolution, please contact HIWIN MIKROSYSTEM.
Standard
YY+
axis +direction
Y axis cable chain
Y
(148)
Connector

Limit

1/2 stroke
axis +direction
Effective
35
X+
110
180
178
105
LX
X
stroke
36.5
1/2
LX/2
Effective
4-M6x1.0Px10DP
L2
X axis cable
Xchain
136
158 11
180
LY/2
1/2
Effective stroke 1/2
Effective stroke
X Y
X-axis cable chain internal space Y-axis cable chain internal space
13 Max.
15
160
17
15 Max.
30
38
75 75
(*1)
L1 Nx150( 1) 2x(N+1)-6.5 THRU
,11x8.5DP
15 LY-30
(45.4) LY Line
2x2-6H7 THRU Mot ar

or
(148)

1/2
35
X+
110
180
178
105
LX
With cover type 2.6 Gantry Stage
36.5
1/2
Table2-31 With cover X-Y stage product specifications LMG2A series standardized gantry system is a unilateral drive system.
LX/2
LMG2A-C applies to ironless linear motor, and LMG2A-S applies to iron core linear motor.
X- Y- LX LY L1 L2 N 4-M6x1.0Px10DP
Absolute Resolution Repeatability Orthogonality X moving Y moving Mass
L2
X
(mm) (mm) (mm) (mm) (mm) (mm) (m) (m) (m) (arc-sec) (Kg) (Kg) (kg)
136
100 100 400 500 85158 111 111 *1
3 1 5 3 21 46
180
100 200 400LY/2 600 60 111 3 3 1 5 3 21 48
200 200 500 1/2
600 60 161 4
1/2 3 1 5 3 23 50
2.6.1 Gantry stage LMG2A-CB6-CC8
100 300 400 700 35 111 5 3 X
1 5 3
Y 21 50 High acceleration
200 300 500 700 35 161 5 3 1 1 5 3 23 52 No cogging
300 300 600 700 35 211 6 3 1
13 Max. 5 3 25 54 Low inertia
15
160
17
15 Max.
100 400 400 800 85 111 7 3 1 5 3 21 52 Easy to assemble
30
High stiffness aluminum gantry structure
200 400 500 800 85 161 7 3 1 5 3 38 23 54
75 75
Equipped with ironless linear motor
300 400 600 800 85 211 8 3 1 5 3 25 56
L1 Nx150( 1) 2x(N+1)-6.5 THRU Optical detection application
* 1: When ,11x8.5DP
15 the stroke is 100mm, theLY-30
mounting holes spacing is 300mm.
* 2:(45.4)
Absolute accuracy is after error LY
mapping (with HIWIN drive).
* 3: Except resolution magnetic scale. 2x2-6H7 THRU
* 4: For higher resolution, please contact HIWIN MIKROSYSTEM.
YY+
axis +direction
Standard
YY
axis cable chain
Connector

Limit
(148)
1/2 stroke
axis +direction
Effective
35
X X+
110
180
105
178
LX
stroke
36.5
1/2
LX/2
Effective
4-M6x1.0Px10DP
L2
X
X axis cable chain
136
158 11
180
LY/2
X+
1/2
Effective stroke Effective stroke
1/2
X
X Y
1/2
X-axis cable chain internal space Y-axis cable chain internal space
15
17
max
Y+
13 Max.
15
17
15 Max. 63
190
30
38
280
75 75
59.5
L1 (*1)1)
Nx150( 2x(N+1)-6.5 THRU
32
28
1/2
15 LY-30 ,11x8.5DP
max
(45.4) LY
2x2-6H7 THRU 63

1/2 180 1/2

2.6.2 Gantry stage Table2-31 Gantry stage LMG2A product specifications
LMG2 A CB6CC8300 400G200 X- Y- W W1 W2 W3 N L L1 Absolute Resolution Repeatability Orthogonality X moving X moving Mass
(mm) (mm) (mm) (mm) (mm) (mm) (mm) (mm) (m) (m) (m) (arc-sec) (Kg) (Kg) (kg)
Stage type
LMG2A
200 200 740 440 817 110 2 600 100 9 3 5 5 31 50
Upper axis motor type 300 300 840 540 917 135 3 700 50 9 3 5 5 35 52
CB6 400 400 940 640 1017 160 3 800 100 12 1m 4 5 5 39 54
Lower axis motor model 500 500 1040 740 1117 185 4 900 50 12 4 5 5 43 54
CC8 600 600 1140 840 1217 210 4 1000 100 12 4 5 5 47 56
* 1: Absolute accuracy is after error mapping (with HIWIN drive).
Upper axis stroke * 2: Except resolution magnetic scale.
200:200mm 500:500mm * 3: For higher resolution, please contact HIWIN MIKROSYSTEM.
300:300mm 600:600mm
400:400mm
Lower axis stroke

100:100mm 500:500mm

Limit
X+
X axis +direction
200:200mm 600:600mm
300:300mm
Effective stroke
X
X-axis cable chain internal space
400:400mm
1/2
axis +direction
15
17
max
Encoder type
YY+
63
0:none
Standard
280
E:TTL digital 1m resolution magnetic scale Y
Y-axis cable chain internal space
Effective stroke
59.5
32
28
1/2
M:TTL digital 20nm resolution optical scale max
P:40m glass optical analog scale
X:Other (please remark desired specifications or product model) 63

Limit
Limit switch
0:None 1/2
Effective stroke 180 1/2
Effective stroke
1:Metal cover 20 2x70=140
2:Optical switch, NPN (standard) 6-M6x1Px12DP
45 90
C:Customized Connector

Cover
198
115
0:None (standard) Connector

A:Metal cover
427
B:Bellows
22.5
2-6H7x10DP
B:Customized
189
D:Non-woven
168.5
Cable chain
0:None (standard) 200
30
1:Horizontal direction (chain internal space 15x30mm) 123 W3 2xW3 140 (L1)
L1 Nx200
2:Vertical direction (chain internal space 15x30mm) 150 W1 150
L
C:Customized W (L3)
(W2)
NoteContact HIWIN for customized specification. 2x(N+1)-11 THRU, 3x(N+1)-M6x1Px12DP
18x12DP
2.7 Air bearing stage Dimensions 260

20 5x44=220 12-M5x0.8Px10DP
(Mounting holes)
()
13
2.7.1 Non-contact air bearing stage LMAS
143
115
89
Non-contact air bearing provides better positioning accuracy
Embedded magnetic preloading design, enhance stability
Provide extremely smooth motion and rapid settling time
Equipped with ironless linear motor, no cogging
High resolution feedback with linear optical encoder 4x(N+1)-M8x1.5Px16DP
(Mounting holes)
()
Equipped with high flexible cable
For clean room, no need to lubricate and easy to maintain
Low velocity ripple
168
Available for precision positioning, calibration systems, scanning
applications, wafer inspection 30 30
60 60
A
B 120 28
C 20 (310)
D
Dimensions
Type Stroke
Table2-33 LMAS product specifications A B C D N
AS200 200 280 - 526 619 2
Specifications Unit AS200 AS400 AS600 AS800 AS1000 AS400 400 480 - 726 819 2
Stroke mm 200 400 600 800 1000 AS600 600 580 - 926 1019 2
Standard
Motor type - LMCB8 AS800 800 440 880 1126 1219 4
Bus voltage V Up to 325 VDC AS1000 1000 540 1080 1326 1419 4
Instant current A(pk) 6
Continuous current A(rms) 2.0
Feedback system - Optical Linear Encoder: Analog period 20m
Resolution*1 m 4
Repeatability m 0.3 0.4 0.4 0.5 0.5
Positioning accuracy *2
m 3.0 4.0 4.0 5.0 5.0
Horizontal straightness *3
m 1.0 1.0 1.5 2.0 2.5
Vertical straightness*3 m 1.0 1.0 1.5 2.0 2.5
Pitch *3
arc-sec 2.0 2.5 3 3.5 4
Yaw *3
arc-sec 2.0 2.5 3 3.5 4
Roll *3
arc-sec TBD
Allowable payload kg 10
Max. speed*4*5 m/s 1 1.2 1.4 1.6 2
Max. acceleration *5
m/s 2
10 11 12 13 14
Working pressure *6
N/m 2
4x10 N/m 2x10 N/m
5 2 4 2
Moving unit mass *7

kg 8
Moving unit material - Aluminum (hardened anodized)
Base - Granite
*1: The maximum resolution is up to 4096 times, resolution accuracy is about 4 nm
*2: Absolute accuracy is after error mapping.
*3: Required specification is restricted by load, this specification is based on empty load
*4: Must comply with the resolution of encoder and the number of mass transfer rate
*5: Based on the limitations of motor instantly force, only allow moving unit mass about 8Kg (center load)
*6: It is recommended to link pressure switch on the emergency stop devices to protect air bearing from overloading
*7: Free of load
2.7.2 Air bearing stage LMAP series Dimensions

Low profile, XY symmetric structure design, with high stiffness granite base magnetic preload designed to
enhance stability, with excellent geometrical property; applies ironless linear motor, no cogging to parid A 380
setting time, that provides excellent smooth motion and positioning accuracy; strong beam design uses high B 200
stiffness lightweight aluminum, reduces weight of moving unit; gantry dual-drive structure and use of two
sets of optical linear encoder for feedback compensation, offers dynamic control and error mapping; for
clean room, no lubrication for easy maintenance and provides high flexible cable management.
436
Applications 28 4x95=380
Wafer inspection system

Micromachining system
Laser lithography
C
2x110=220
Semiconductor inspection system
400
Exposure system
Tabke2-34 LMAP series product specification
90
Basic model Unit AP250 AP450 AP650
15-M6x1P-12DP
Stroke mm 250x250 450x450 650x650 (Mounting holes)
()
Motor specification - Beam axis: LMCC8 Gantry axes: LMCB8 x 2

(386)
Bus Voltage V Up to 325 VDC
Standard
Instant current A(pk) 6.0
Dimensions
Continuous current A(rms) 2.0 Type Stroke
A B C
Feedback system - Optical Linear Encoder: Analog period 40m glass scale
AP250 250x250 1168 1030 1100
Resolution*1 m 10
AP450 450x450 1368 1230 1300
Repeatability m 0.5 0.5 0.5
AP650 650x650 1568 1430 1500
Positioning accuracy*2 m 1.5 1.5 1.5
Horizontal straightness*3 m 1.5 2 2.5
Vertical straightness *3
m 1.5 2 2.5
Orthogonality arc-sec 2.5 2.5 3.5
Pitch *3
arc-sec 6 8 12
Yaw *3
arc-sec 1.5 2 2.5
Roll *3
arc-sec TBD
Allowable load kg 30
Max. speed *4*5
m/s 0.6 0.8 1
Max. acceleration *5
m/s 2
4 4.5 5
Working pressure *6
N/m 2
4x10 N/m 2x10 N/m
5 2 4 2
Moving unit Bridge kg 30

mass*7 Gantry kg 75 85 95
Moving unit material - Aluminum (hardened anodized)
Base - Granite
*1: The maximum resolution is up to 4096 times, resolution accuracy is about 4 nm
*2: Error after compensation
*3: Required specification is restricted by load, this specification is based on empty load
*4: Must comply with the resolution of encoder and the number of mass transfer rate
*5: Based on the limitations of motor instantly force, only allow moving unit mass about 8Kg (center load)
*6: It is recommended to link pressure switch on the emergency stop devices to protect air bearing from overloading
*7: Free of load
3 Customized Positioning Systems

The standardized positioning axes presented in this catalogue make it possible to handle many kinds of
positioning tasks.For positioning tasks, that cannot be solved using standard axes, HIWIN engineers are
able to work out an optimized solution for customers. The inquiry form at the end of this catalogue serves Semiconductor inspection and exposure
to help our application engineers make a preliminary design. High precision cross stages with air-bearings are the
prerequisites for surface monitoring and mask production, to find
even the smallest errors, to produce precision masks, in wafer
A sampling of customized solutions is shown here. In several examples, mechanics are not the only parts production for the electronics, chip and flat panel industries.
customized. For instance, with the planar motors, special software is developed in order to obtain optimal
integration of the positioning system to the production process. Stroke 500 mm x 500 mm
Vertical straightness
Repeatability 0.5 m
Accuracy 1.5 m
3.1 Examples
Economical Pick & Place and Inspection Microsystem Technology and Wafer Processing
XY gantry systems are economical for many applications. Absolute precision and suitability for clean room conditions are the
Gantry axes are assembled from standard components. prerequisites for every drive in microsystem technology and wafer
processing. Linear motor cross stages meet these requirements.
Standard axes of the LMX1L series
Repeatability 2 m Stroke 200 mm x 200 mm, optional 300 mm x 300 mm
Delivery with base frame Levelness 4 m across the complete stroke
Repeatability 1 m across both axes
Accuracy 4 m across both axes
Clean room suitability class 100; optional class 10
Microshapes and Macroshapes

Milling of microstructures with cutting tools and lasers are Laser Scanners
application areas in which gantry systems excel. They are Extremely smooth motion and long operating life are a
also very economical to implement. must for optical inspection systems such as laser scan-
ners. Linear motor stages with air bearings fulfill these
requirements.
Ironless motors LMC
Customized
Repeatability 2 m
Air bearing system without friction
Technology proven through countless worldwide installations
Ironless linear motors are not effected by cogging.
Stroke up to 1,500 mm
Planar Motors
Servo-planar motors provide an excellent technological Horizontal High-Speed Hot Weld Machine for Welding
stage for inspection tasks. During inspection of circuit Synthetic Materials
boards, optical sensors are integrated to completely monitor Linear motor stages of the LMX1L series with absolute
the printed conductive tracks and SMD components. position measurement offer:
Virtually no wear due to an air bearing Rapid initialization phase
Guaranteed levelness for the complete stroke path material when removed from the heated plate
(up to 1000 mm x 1000 mm)

Welding is controlled by time, force and path
Repeatability 3 m Rapid load/unload system
3.2 General type positioning stage
HIWIN offers a variety of customized positioning stages to satisfy customer requirements in a variety of
technical fields, such as optical inspection, laser processing, plastic material coating, metal processing
Water Jet Application
and other automated production equipment. Application industries include semiconductor industry, Optical
LMSA multi-forcer linear stage provides 2.5m stroke and carries two
HIWIN KK stages on the Z-axis. The lower 2 axes are also equipped elements, panel displays, medical equipment, machine tools, electronic components, MEMS and so on.
with LMS high force liner motors and run under synchronization. Specifications diversification and the ability for rapid customization are combined to fully meet customer
needs for mass production, a shorted product development process and strict environmental requirements.
No commutation required at power up
Long stroke
Delivered with base frame, cover and precision motion controller
Model code description

S L A
Total Solution for AOI Industry Category
LMC linear stage provides smooth motion for the special requi- S: single-axis
rement in AOI applications. With the LMS linear stage mounted to D: dual-axis
the upper axis, the ballscrew driven Z-axis integrated with a CCD R: tri-axis
camera can attain high speeds. G: Gantry
M: multi-axis composite
Repeatability 1 m A: air bearing
Velocity ripple below 1.5 %
Delivery with base frame and cover Transmission method
L: linear motors
B: AC/DC servo motor
Serial number
A~Z
Customized for Glass Working
The linear motor stage is designed to carry a working head to move
above the flat table. The customer's laser head is for cutting double
layer glasses. Note1Contact HIWIN for customized specification.
Note2: Starting from April 2016, users of LMS series linear motor positioning stage products,
Gantry structure linear motor positioning stage for Gen. 5 glass
1300 mm x 1450 mm stroke
will be fully converted to LMSA series motors.

Customized
Smooth motion
Sinusoidal commutation and no cogging
LMC series motors
Repeatablility 2 m
Rigid base structure
Provide motion plan for customer
This is another AOI application, where customer needed high

costperformance ratio.
Stroke 534mm x 534mm

LMSA type gantry
Special synchrnous control for gantry
Steel base frame
Integrating PCB conveyor, PLC, IPC for customers
Sub-micron repeatability
Promising move and settle time 40mm within 200ms to 1.5 m
3.2 SLA series 3.3 SLB series

Max. velocity 5 m/s (no load). High stiffness design of base.
Max. stroke up to 6,000 mm or more. Milt-forcer design.
High stiffness structure.
Suitable for point-to-point motion.
Can be equipped with ironcore motor.
With a special chain design, it can be installed upside down. 3.3.1 Industry applications
Large-scale inkjet printer, glass substrate/PCB board testing
equipment, glass substrate exposure equipment
3.2.1 Industry applications
Automation equipment, glass substrate moving equipment
3.3.2 Performance specifications
3.2.2 Performance specifications Table3-2 LMX1C-CB2-4-290 product specification
Stage type LMX1C-CB2-4-290

Table3-1 LMX1L-S27-6200-X202 product specification
Motor Type Ironless(/Ironcore) motor
Stage type LMX1L-S27-6200-X202 Stroke(mm) 290
Motor specifications Ironcore motor (can select ironless motor) Peak Force(N)/Continuous
144/36
Stroke (mm) 6200 Force(N)
Max. force (N)/Continuous force(N) 1017/382 Repeatability(m) 1(with HIWIN solution)
Repeatability (m) 15 (apply HIWIN measurements) Accuracy(m) 3(after error mapping)
Max. acceleration (m/s) 10 (with Payload) Max. Acceleration(m/s )2
0.05(with payload)
Max. speed (m/s) +Direction
2 (with Payload) Max. Velocity(m/s) 0.05(with payload)
365 +Direction
Payload (kg) 5 Payload(kg) 25
Stage orientation Upside down Stage orientation Side-Mount
94.5
343
NoteAll specifications can be designed according to customer demand.
6630 790 412.5
(800.5)
Customized
+Direction 365
343
6630 +Direction
94.5
790 412.5
(800.5)
3.4 SLC series 3.5 SLD series

Uses dust-proof design. Vertical Applications.
Uses granite base, high stiffness. Integrate adjustable pneumatic counterweight module.
Not easily influenced by environmental temperature. Equipped with ironless motor.
Can be equipped with ironless or ironcore motor. In line with the smaller space requirements.
Horizontal straightness and vertical straightness up to 3 m/m. High-speed, lightweight design.
Design with hidden cable chain.
3.4.1 Industry applications 3.5.1 Industry applications

Automation equipment, laser cutting applications Automation equipment, high-speed pick and place feeding equipment, electronic component assembly equipment
3.4.2 Performance specifications 3.5.2 Performance specifications
Table3-3 LMX1C-S27-1-460 product specification Table3-4 LMX1C-TA2-1-260 product specification
Stage type LMX1C-S27-1-460 Stage type LMX1C-TA2-1-260

Motor Type Ironcore(/Ironless) motor Motor Type Ironless motor
Stroke(mm) 460 Stroke(mm) 260
Peak Force(N)/Continuous Peak Force(N)/Continuous
1017/382 108/27
Force(N) Force(N)
Repeatability(m) 1(with HIWIN solution) Repeatability(m) 2(with HIWIN solution)
+Direction
Accuracy(m) 3(after error mapping) Accuracy(m) 6(after error mapping)
(580.2)
Max. Acceleration(m/s )2
5(with payload) Max. Acceleration(m/s )2
10(with payload)
Max. Velocity(m/s) 1(with payload) Max. Velocity(m/s) 1(with payload)
Horizontal Straightness(m) 3 Payload(kg) 0.5
Vertical Straightness(m) 3 Stage orientation Vertical
Payload(kg) 30 NoteAll specifications can be designed according to customer demand.
Stage orientation Horizontal
+Directionto customer demand.
NoteAll specifications can be designed according
Customized
153
(180.5)
1068 400
+Direction
(580.2)
(183.4)
+Direction
153
1068 400
(180.5)
(183.4)
3.6 SLE series 3.7 SBF series

Integration of high-precision torque motor. Vertical applications.
Precision compensation and angular positioning. High load capacity of up to 200 kg.
Simple structure, wide range of applications Linear feedback system can be applied,high positioning accuracy,
High stiffness extruded aluminum structure. zero backlash.
High-speed, point-to-point motion.
Can be equipped with ironless or ironcore motor.
3.6.1 Industry applications Automation equipment, touch panel coating equipment, AOI testing, exposure apparatus.
Automation equipment, touch panel coating equipment, AOI testing equipment
Table3-6 BS-2-50 product specification
Table3-5 LMX1C-S47-1-700+TMS34 product specification
Stage type BS-2-50
Stage type LMX1C-S47-1-700+TMS34 Motor Type HIWIN AC Servo motor
Motor Type Ironcore(/Ironless) motor Stroke(mm) 50
Stroke(mm) 700 Ball screw lead(mm) 2
Peak Force(N)/Continuous Force(N) 1953/733 Repeatability(m) 1(with HIWIN solution)
(187)
Repeatability(m) 1(with HIWIN solution) Accuracy(m) 3(after error mapping)
Accuracy(m) 3(after error mapping) Max. Acceleration(m/s )2
2(with payload)
Max. Acceleration(m/s2) 10(with payload) Max. Velocity(m/s) 0.05(with payload)
Max. Velocity(m/s) 1(with payload) Horizontal Straightness(m) 2
Payload(kg) 15 Vertical Straightness(m) 10
Stage orientation Horizontal Payload(kg) 200
Torque Motor Type TMS34 Stage orientation Vertical
+Direction
+Direction 60/20
Peak Torque(Nm)/Continuous Torque(Nm) NoteAll specifications can be designed according to customer demand.
562.5
Max. Velocity(rpm) 500(220V)
Repeatability(arc-sec) 2.5
Accuracy(arc-sec)
272
25
Customized
(187)
Inertia of rotation parts(kgm )
2
0.02
NoteAll specifications can be designed according to customer demand. 791
1145 118
377.5
(876.5)
+Direction
562.5
+Direction
272
791
118
(876.5)
1145
377.5
3.8 SBH series 3.9 DLA series

High stiffness oblique wedge structure. Integration of high-precision torque motor.
Vertically precision positioning. XY positioning with high precision angular compensation.
High load capacity. Use dust-proof design.
Large installation area,can be equipped with large-size vacuum chuck. High stiffness extruded aluminum structure.

Exposure apparatus, the touch panel lamination equipment, laser cutting, AOI testing equipment. 3D measuring equipment, glass substrate chamfering devices, glass
substrate/PCB testing equipment.
Table3-7 BS-2-12 product specification Table3-8 LMX2C-CB4CB7-50-50+TMS03 product specification
Stage type BS-2-12 Stage type LMX2C-CB4CB7-50-50+TMS03

Motor Type HIWIN AC Servo motor Motor Type Ironless(/Ironcore) motor
Stroke(mm) 12 Stroke(mm) 50
Ball screw lead(mm) 2 Peak Force(N)/Continuous Force(N) X-axis512/128, Y-axis292/73
Y-Axis +Direction
Repeatability(m) 2.5(uni-direction, with HIWIN solution) Repeatability(m) 1(with HIWIN solution)
Accuracy(m) 10(uni-direction,after error mapping) Accuracy(m) 5(after error mapping)
Max. Acceleration(m/s2) Vertical0.5, Horizontal0.87(with payload) Max. Acceleration(m/s ) 2
X-axis5, Y-axis5(with payload)
(212)
+Direction
Max. Velocity(m/s) Vertical0.02, Horizontal0.035(with payload) Max. Velocity(m/s) X-axis0.4, Y-axis0.2(with payload)
Payload(kg) 35 Payload(kg) 5
Stage orientation Horizontal 365 418 Stage orientation Horizontal
NoteAll specifications can be designed according to customer demand. Torque Motor Type X-AxisTMS03
+Direction
Peak Torque(Nm)/Continuous Torque(Nm) 9.3/3.1
Repeatability(arc-sec) 3
338
Accuracy(arc-sec) 45
2
0.003
Customized
412 324
Y-Axis +Direction
(212)
+Direction
X-Axis +Direction
365 418
338
412 324
3.10 DLB series 3.11 DLC series

Upside down applications. Suitable for High-speed scanning and rapid positioning motion.
Suitable for point-to-point motion. Simple structure and wide range of applications.
High stiffness extruded aluminum structure.
Wide range of applications.

Biomedical testing equipment, electronic components plug-in equipment.
Automation equipment, AOI inspection applications, Wafer cutting applications.ations, Wafer cutting applications.
Table3-10 LMX2C-CC8CFC-150-400 product specification

Table3-9 LMX2C-S23S47L-362-390 product specification
Stage type LMX2C-CC8CFC-150-400

Stage type LMX2C-S23S47L-362-390
Motor Type Ironless(/Ironcore) motor
Motor Type Ironcore (/Ironless) motor
X-Axis +Direction
Stroke(mm) X-axis150, Y-axis400
Peak Force(N)/Continuous Force(N) X-axis780/195, Y-axis2736/684
Repeatability(m) 2(with HIWIN solution)
Accuracy(m) 5(after error mapping)
Max. Acceleration(m/s2) 10(with payload)
Y-Axis +Direction
Max. Velocity(m/s) X-axis1, Y-axis1(with payload)

Max. Velocity(m/s) 1(with payload)
Payload(kg) 10
Payload(kg) 10
790
Stage orientation Upside down
NoteAll specifications can be designed according to customer demand. NoteAll specifications can be designed according to customer demand.
Y-Axis +Direction
183
X-Axis +Direction
1266 (627.5)
X-Axis +Direction 183
Customized
Y-Axis +Direction
747
790
Y-Axis +Direction
183
X-Axis +Direction 183 1266 (627.5)
747
3.12 DLD series 3.13 DLE series

Suitable for point-to-point motion. Integration of high-precision torque motor.
Vertical straightness up to 4 m. X-Y positioning with high precision angular compensation.
Use dust-proof design. High stiffness extruded aluminum structure.
High load capacity. Best guideway supporting structure design.
Simple structure and wide range of applications.

3.12.1 Industry applications Automation equipment, AOI testing equipment, laser cutting applications, appearance grinding
PCB/steel plate laser cutting applications, automation equipment, and 3D engraving machine applications. trimming equipment.

Table3-12 LMX2C-S27S47-300-300+TMS12 product specification
Table3-11 LMX2C-S37S67L-600-600 product specification Stage type LMX2C-S27S47-300-300+TMS12

Stage type LMX2C-S37S67L-600-600 250
Repeatability(m) 0.5(with HIWIN solution)
X-Axis +Direction
Max. Acceleration(m/s ) 2
5(with payload)
X-Axis +Direction
Max. Velocity(m/s) 0.8(with payload)

Max. Acceleration(m/s2) X-axis10, Y-axis7(with payload)
Orthogonality(arc-sec)
1280
5
Payload(kg) 40 Y-Axis +Direction
Vertical Straightness(m) X-axis4, Y-axis5
Orthogonality(arc-sec) 5
Torque Motor Type TMS12
Payload(kg) 35
310
Peak Torque(Nm)/Continuous Torque(Nm) 15/5
NoteAll specifications can be designed according to customer demand. 730
Repeatability(arc-sec) 3 730
250 Accuracy(arc-sec) 45
Y-Axis +Direction
Customized
2
0.006
1200
X-Axis +Direction
1280
X-Axis +Direction
Y-Axis +Direction
Y-Axis +Direction
310
1200
730 730
3.14 DLF series 3.15 DLG series

Stainless steel cover, can withstand Instantaneous high temperature. Sealed architecture.
Maze dust-proof design. Suitable for the high dust environment.
With short setting time. Low center of gravity design.
With short setting time.
Low center of gravity design.
Equipped with ironless motor.

Automation equipment, laser cutting equipment, PCB drilling equipment.
Automation equipment, laser cutting equipment.

Table3-14 LMX2C-CE4CE6-2-450-500 product specification
Table3-13 LMX2C-CB7CC7-280-340 product specification
Stage type LMX2C-CE4CE6-2-450-500
Stage type LMX2C-CB7CC7-280-340
Motor Type Ironless motor
Accuracy(m) 1.5(after error mapping)
Max. Acceleration(m/s2) X-axis10, Y-axis5(with payload)
X-Axis +Direction
Max. Velocity(m/s) X-axis0.7, Y-axis0.5(with payload)

Payload(kg) 35
Y-Axis +Direction
Payload(kg) 35
X-Axis +Direction
Customized
Y-Axis +Direction
Y-Axis +Direction
232.5
X-Axis +Direction
149
(1171) (1001)
675 610
X-Axis +Direction
Y-Axis +Direction
232.5
149
(1171) (1001)
675 610
3.16 DLH series 3.17 DLJ series

Suitable for vacuum environment, 1x10-6 Torr. Integration of high-precision torque motor.
Vacuum flat cable. XY positioning with high precision angular compensation.
Integration of high-precision torque motor. Low center of gravity design.
X-Y positioning with high precision angular compensation. With short setting time.
Can be equipped with ironless or ironcore motor. Excellent servo stability.
Use low dust flat cable(class 1).
Automation equipment, plasma repair equipment, electron beam scanning applications.
The semiconductor wafer inspection equipment, AOI equipment.

Table3-15 LMX2C-S23S27-360-240+TMS32 product specification Table3-16 LMX2C-SA11LSA21L-420-490+TMF42 product specification
Stage type LMX2C-S23S27-360-240+TMS32 Stage type LMX2C-SA11LSA21L-420-490+TMF42

Motor Type Ironcore (/Ironless) motor Motor Type Ironcore (/Ironless) motor
Stroke(mm) X-axis240, Y-axis360 Stroke(mm) X-axis420, Y-axis490
Peak Force(N)/Continuous Force(N) X-axis1017/382, Y-axis639/240 Peak Force(N)/Continuous Force(N) X-axis254/90, Y-axis462/149
Repeatability(m) X-axis2, Y-axis1(with HIWIN solution) Repeatability(m) 0.5(with HIWIN solution)
Accuracy(m) X-axis5, Y-axis3(after error mapping)
X-Axis +Direction

X-axis5, Y-axis5(with payload) Max. Acceleration(m/s ) 2
6.5(with payload)
Max. Velocity(m/s) X-axis0.7, Y-axis1(with payload) Max. Velocity(m/s) 0.5(with payload)
Payload(kg) 5 Vertical Straightness(m) 10
X-Axis +Direction
Torque Motor Type TMS32 Payload(kg) 10
Peak Torque(Nm)/Continuous Torque(Nm) 30/10 Stage orientation Horizontal
Max. Velocity(rpm) 700(220V) Torque Motor Type TMF42
Repeatability(arc-sec) Y-Axis +Direction
3 Peak Torque(Nm)/Continuous Torque(Nm) 3.6/1.2
Accuracy(arc-sec) 15 Max. Velocity(rpm) 120(220V)
Y-Axis +Direction
Customized
Inertia of rotation parts(kgm2) 0.014 Repeatability(arc-sec) 2.5
326
NoteAll specifications can be designed according to customer demand. Accuracy(arc-sec) 25
180
2
0.0005
870 650 NoteAll specifications can be designed according to customer demand. 630
750
X-Axis +Direction
X-Axis +Direction
Y-Axis +Direction
Y-Axis +Direction
326
180
870 650
750 630
3.18 DLK series 3.19 RLA series

Multi-forcer simultaneously motion. Fully enclosed waterproof design.
Suitable for laterally applications. Using non-contact air bearing.
For high-speed reciprocating motion. XY cantilever structure.
Z-axis using a linear motor with a pneumatic counterweight design. Space saving.
With high speed and high accuracy. Lightweight and high-stiffness design.
Can be equipped with ironless or ironcore motor. Can be equipped with ironless or ironcore motor.

Solar automation equipment, high-speed pick and place feeding equipment, Waterjet equipment, laser cutting equipment, automation equipment.
electronic components assembly equipment.

Table3-18 LMX2C-S13S17-510-510 product specification
Table3-17 LMX4C-S13S37-2-32-750 product specification
Stage type LMX2C-S13S17-510-510
Stage type LMX4C-S13S37-2-32-750
Stroke(mm) Z-axis32, Y-axis750
Peak Force(N)/Continuous Force(N) Z-axis540/203, Y-axis1425/535
Repeatability(m) X-axis2, Y-axis2(with HIWIN solution)
Accuracy(m) X-axis5, Y-axis5(after error mapping)
X-Axis +Direction
Max. Acceleration(m/s2) Z-axis10, Y-axis10(with payload)
Z-Axis +Direction
Max. Velocity(m/s) X-axis0.8, Y-axis0.5(with payload)
Max. Velocity(m/s) Z-axis0.5, Y-axis1.3(with payload)
Payload(kg) 10
Payload(kg) 10
Stage orientation Laterally
Y-Axis +Direction
Y-Axis +Direction
Z-Axis +Direction
X-Axis +Direction
669.5
Customized
462
(1116) 1217.5
1714 (685)
Y-Axis +Direction
Y-Axis +Direction
462
669.5
1714 (685)
(1116) 1217.5
3.20 RLB series 3.21 RBC series

Z-axis counterweight design. Z-axis designed with KK series ballscrew driven stage module significantly
Excellent low speed velocity stability 1 %@10 mm/s. reduces system cost.
Fully enclosed waterproof design. Use dust-proof design.
High positioning accuracy up to 1 m. Three-dimensional motion.
Can be equipped with ironless or ironcore motor. Simple structure design.

Micromachining equipment, 3D measurement equipment, 3D engraving equipment.
Mechanical component testing equipment, automation equipment, 3D engraving equipment.

Table3-19 LMX3C-CB5CB5CB8-200-200-200 product specification
Table3-20 KK6010-KK6010-KK6005-150-150-150 product specification
Stage type LMX3C-CB5CB5CB8-200-200-200
Motor Type Ironless(/Ironcore) motor Stage type KK6010-KK6010-KK6005-150-150-150
Stroke(mm) X-axis200, Y-axis200, Z-axis200 Motor Type HIWIN AC Servo motor

Peak Force(N)/Continuous Force(N) X-axis580/145, Y-axis364/91, Z-axis364/91 Stroke(mm) X-axis55, Y-axis55, Z-axis55
Repeatability(m) 0.5(with HIWIN solution) Ball screw lead(mm) X-axis10, Y-axis10, Z-axis5
Repeatability(m) 2(uni-direction, with HIWIN solution)
X-Axis +Direction
Max. Acceleration(m/s2) X-axis0.5, Y-axis0.5, Z-axis0.5(with payload) Accuracy grade C
X-Axis +Direction
Max. Velocity(m/s) X-axis0.2, Y-axis0.2, Z-axis0.05(with payload) Max. Acceleration(m/s )2

X-axis5, Y-axis5, Z-axis5(HIWIN 100W, with payload)
Orthogonality(arc-sec) X-Y4, Y-Z2, X-Z3 Max. Velocity(m/s) X-axis0.5, Y-axis0.5, Z-axis0.2(HIWIN 100W, with payload)
Speed ripple X-axis1.35, Y-axis0.93, Z-axis1.57(when V=5mm/s) Payload(kg) 1
Payload(kg) 5 Stage orientation Horizontal
Stage orientation Horizontal NoteAll specifications can be designed according to customer demand.

Y-Axis +Direction
X-Axis +Direction
Y-Axis +Direction
X-Axis +Direction
Z-Axis +Direction
Z-Axis +Direction
Customized
441
682.5
385 385
Y-Axis +Direction Y-Axis +Direction

568.5 613.5
Z-Axis +Direction
Z-Axis +Direction
682.5
441
568.5 613.5
385 385
3.22 GLA series 3.23 GLB series

Micro gantry structure. High stiffness aluminum gantry structure.
Space saving. Use dust-proof design.
Lightweight beam design. Z-axis designed with KK series ballscrew driven stage module.
High dynamic response. Unilateral or bilateral drive structure are seletable according
Can be equipped with ironless or ironcore motor. to the precision requirement.
3.22.1 Industry applications Can be equipped with ironless or ironcore motor.
Electronic components assembly equipment, biomedical 3.23.1 Industry applications

equipment industries, AOI testing equipment.
Automation industrial equipment, laser cutting applications, spraying equipment
Table3-21 LMG2C-S11S11-200-200+KK4005C-150A1-F2M product specification
Table3-22 LMG2A-S13S23-600-900+KK6005C-400A1-F2BS2M product specification
Stage type LMG2C-S11S11-200-200+KK4005C-150A1-F2M
Stage type LMG2A-S13S23-600-900+KK6005C-400A1-F2BS2M
Motor Type Ironcore (/Ironless) motor & HIWIN AC Servo motor
Motor Type Ironcore (/Ironless) motor & HIWIN AC Servo motor
Stroke(mm) X-axis200, Y-axis200, Z-axis50
Stroke(mm) X-axis600, Y-axis900, Z-axis234
Peak Force(N)/Continuous Force(N) X-axis254/92, Y-axis254/92, Z-axisHIWIN 50W(220V)
Peak Force(N)/Continuous Force(N) X-axis540/203, Y-axis639/240, Z-axisHIWIN 100W(220V)
Ball screw lead(mm) Z-axis5
Ball screw lead(mm) Z-axis5
Y-Axis +Direction
X-axis2, Y-axis3, Z-axis2(uni-direction, with
Repeatability(m) X-axis5, Y-axis5, Z-axis2(uni-direction, with
HIWIN solution) Repeatability(m)
HIWIN solution)
X-axis5, Y-axis10, Z-axis10(uni-direction, after
X-Axis +Direction
Accuracy(m) X-axis15, Y-axis15, Z-axisC(uni-direction, after

error mapping) Accuracy(m)
error mapping)
X-axis5, Y-axis5, Z-axis5(with payload)
Max. Velocity(m/s) X-axis1, Y-axis0.5, Z-axis0.04(with payload)
Payload(kg) 1
Z-Axis +Direction
Payload(kg) 5
Z-Axis +Direction
NoteAll specifications can Y-Axis +Direction
be designed according to customer demand.
X-Axis +Direction
(419)
(812.5)
Customized
X-Axis +Direction
Y-Axis +Direction
1373 1600
572 470
Z-Axis +Direction
Y-Axis +Direction
Z-Axis +Direction
X-Axis +Direction
(419)
(812.5)
572 470
1373 1600
3.24 GLD series 3.25 GLE series

High stiffness cast iron base. High stiffness aluminum gantry structure.
With excellent vibration suppression capability. Suitable for high acceleration and deceleration applications.
Suitable for high acceleration and deceleration applications. Maximize the working area.
With excellent positioning accuracy. Space saving.
Unilateral or bilateral drive structure are seletable according to the Can be equipped with ironless or ironcore motor.
precision requirement.
3.24.1 Industry applications Automation equipment, electronic components plug-in assembly
Automation equipment, PCB AOI inspection applications. equipment, AOI equipment, automatic coating equipment
Table3-23 LMG2C-S13S37L-515-540 product specification Table3-24 LMG2C-SA11SA22-580-500 product specification
Stage type LMG2C-S13S37L-515-540 Stage type LMG2C-SA11SA22-580-500

Motor Type Ironcore (/Ironless) motor Motor Type Ironcore (/Ironless) motor
Stroke(mm) X-axis515, Y-axis540 Stroke(mm) X-axis580, Y-axis500
Peak Force(N)/Continuous Force(N) X-axis540/203, Y-axis1425/535 Peak Force(N)/Continuous Force(N) X-axis289/121, Y-axis1023/426
Repeatability(m) 1(uni-direction, with HIWIN solution) Repeatability(m) 2.5(uni-direction, with HIWIN solution)
Accuracy(m) 2(after error mapping) Accuracy(m) 5(after error mapping)
Y-Axis +Direction
Max. Acceleration(m/s2) X-axis15, Y-axis10(with payload) Max. Acceleration(m/s2) X-axis10, Y-axis10(with payload)
Y-Axis +Direction
Max. Velocity(m/s) X-axis1.5, Y-axis1.5(with payload) Max. Velocity(m/s) X-axis0.5, Y-axis0.5(with payload)
Vertical Straightness(m) 10 Vertical Straightness(m) 5
Horizontal Straightness(m) 10 Horizontal Straightness(m) 5
Pitch(arc-sec) 25 Payload(kg) 5
Yaw(arc-sec) X-axis20, Y-axis15 Stage orientation Horizontal
Orthogonality(arc-sec) 5 X-Axis +Direction
Payload(kg) 12 X-Axis +Direction
(619)
Customized
649
Y-Axis +Direction
Y-Axis +Direction
1015 (1238.5)
(1103.4) 930
X-Axis +Direction
X-Axis +Direction
(619)
649
1015 (1238.5)
(1103.4) 930
3.26 GLF series 3.27 GBC series

Use dust-proof design. Ballscrew structure.
Granite base, Steel beams. High acceleration and deceleration motion.
Modular Z-axis with a high-precision torque motor. Can be equipped with linear scale to enhance the positioning
Can be equipped with ironless or ironcore motor. accuracy and reproducibility.
Simple structure.
Optical detection applications, 3D measurement system
Automation equipment, AOI inspection applications.
Table3-25 LMG3C-S47LS37L-750-550 +KK8610P-340A1-F0BS2M+TMN71EH product specification

LMG3C-S47LS37L-750-550 +KK8610P-340A1- Table3-26 BS-20-540+BS-20-515 product specification

Stage type
F0BS2M+TMN71EH
Motor Type Ironcore (/Ironless) motor & HIWIN AC Servo motor Stage type BS-20-540+BS-20-515
Stroke(mm) X-axis750, Y-axis550, Z-axis170 Motor Type HIWIN AC Servo motor
Y-Axis +Direction
Peak Force(N)/Continuous Force(N) X-axis1953/733, Y-axis1425/535, Z-axisHIWIN 400W Stroke(mm) X-axis515, Y-axis540
Repeatability(m) X-axis1, Y-axis1, Z-axis2(with HIWIN solution) Ball screw lead(mm) 20
Accuracy(m) 3(after error mapping) Repeatability(m) 2.5(uni-direction, with HIWIN solution)
Y-Axis +Direction
Max. Acceleration(m/s2) X-axis20, Y-axis4, Z-axis2.5(with payload) Accuracy(m) 6(after error mapping)
Max. Velocity(m/s) X-axis1, Y-axis1, Z-axis0.5(with payload) Max. Acceleration(m/s )2
Payload(kg) 5 Max. Velocity(m/s) X-axis1, Y-axis1(with payload)
Stage orientation Horizontal Vertical Straightness(m) 20
Horizontal Straightness(m) 20X-Axis +Direction
Z-Axis +Direction
Torque Motor Type TMN71EH

Peak Torque(Nm)/Continuous Torque(Nm) 11.1/3.7 Pitch(arc-sec) 30
Max. Velocity(rpm) X-Axis +Direction
600(220V) Yaw(arc-sec) X-axis20, Y-axis25
Repeatability(arc-sec) 2.5 Orthogonality(arc-sec) 10
(1351)
Accuracy(arc-sec) 10 Payload(kg) 9
2
0.008 Stage orientation Horizontal
(1073.2)
Customized
NoteAll specifications can be designed according to customer demand. NoteAll specifications can be designed according to customer demand.
Y-Axis +Direction
1604 1400 1110 1040
Y-Axis +Direction
Z-Axis +Direction
X-Axis +Direction
X-Axis +Direction
(1351)
(1073.2)
1604 1400
1110 1040
3.28 MLA series 3.29 MLB series

Integration of high-precision TMN torque motor. Multi-axis simultaneously motion.
With excellent flatness(X-Y-theta 0.01 mm). Good working efficiency.
Water cooling design, reduce thermal deformation. High stiffness honeycomb beam design.
XY Stage low center of gravity design. High acceleration and deceleration motion.
Can be equipped with ironless or ironcore motor. With excellent settling time.
Can be used with automated pick and place conveying mechanism.
Wafer cutting, the glass substrate testing equipment, wafer bonding. 3.29.1 Industry applications
Precision component assembly applications, electronic components plug-in equipment.
Table3-27 LMX2C-F23F43-300-300+BS-5-170+TMN93EH product specification X1-Axis +Direction X2-Axis +Direction
Table3-28 LMX8C-SA11F13-264-632 product specification
Y3-Axis +Direction
Y1-Axis +Direction
Stage type LMX2C-F23F43-300-300+BS-5-170+TMN93EH
Motor Type Ironcore (/Ironless) motor & HIWIN AC Servo motor Stage type LMX8C-SA11F13-264-632
Stroke(mm) X-axis362, Y-axis390 Motor Type Ironcore (/Ironless) motor
Peak Force(N)/Continuous Force(N) X-axis2082/764, Y-axis5496/2252 Stroke(mm) X-axis264, Y-axis632
Y2-Axis +Direction
Y4-Axis +Direction
Repeatability(m) 0.5(with HIWIN solution) Peak Force(N)/Continuous Force(N) X-axis289/121, Y-axis1380/510
Accuracy(m) 1(after error mapping) Repeatability(m) X-axis1, Y-axis2(with HIWIN solution)
10(with payload) Accuracy(m) X-axis3, Y-axis5(after error mapping)
Max. Velocity(m/s) 1(with payload) Max. Acceleration(m/s ) X-axis20, Y-axis30(with payload)
Y-Axis +Direction
Payload(kg) Z-axis50, A-axis30 Max. Velocity(m/s) X-axis1, Y-axis1(with payload)

X3-Axis +Direction X4-Axis +Direction
Stage orientation Horizontal Horizontal Straightness(m) 10
Torque Motor Type TMN93EH Orthogonality(arc-sec) 10
Peak Torque(Nm)/Continuous Torque(Nm) 45/15 Payload(kg) 1
X-Axis +Direction Stage orientation Horizontal
1388
Repeatability(arc-sec) 2.5 NoteAll specifications can be designed according to customer demand.
Accuracy(arc-sec) 25 X1-Axis +Direction X2-Axis +Direction
Z-Axis +Direction
Inertia of rotation parts(kgm2) 0.052
Customized
Y3-Axis +Direction
Y1-Axis +Direction
1638.6

1340 1580
Y-Axis +Direction
Y2-Axis +Direction
Y4-Axis +Direction
1610 1415
X-Axis +Direction X3-Axis +Direction X4-Axis +Direction

Z-Axis +Direction
1638.6
1388
1340 1580
1610 1415
3.30 ALA series 3.31 ALB series

Using non-contact air bearing. Using non-contact air bearing.
Without maintenance. Without maintenance.
High positioning accuracy. High positioning accuracy.
Not easily influenced by environmental temperature. Not easily influenced by environmental temperature.
With high-precision and large-size vacuum chuck. With high-precision and large-size vacuum chuck.
With passive vibration suppressing system. Z direction jitter 100 nm.
Integrated electronic control system. Vertical straightness up to 1 m.
Equipped with ironless motor. Equipped with ironless motor.

Glass substrate exposure Application, white testing equipment, wafer defect detection equipment. Glass substrate exposure Application, white testing equipment, wafer defect detection equipment.
Table3-29 LMAP-CC8CB8-700-800+BS-2-50 product specification Table3-30 LMAP-CC8CB8-250-250 product specification
Stage type LMAP-CC8CB8-700-800+BS-2-50 Y-Axis +Direction Stage type LMAP-CC8CB8-250-250

Motor Type Ironless motor Motor Type Ironless motor
Y-Axis +Direction
Stroke(mm) X-axis700, Y-axis800, Z-axis50 Stroke(mm) X-axis250, Y-axis250
Peak Force(N)/Continuous Force(N) X-axis580/145, Y-axis780/195, Z-axisHIWIN 1KW(220V) Peak Force(N)/Continuous
Z-Axis +Direction
X-axis780/195, Y-axis580/145
Repeatability(m) X-axis0.5, Y-axis0.5, Z-axis2(with HIWIN solution) Force(N)
Accuracy(m) X-axis1.5, Y-axis1.5, Z-axis6(after error mapping) Repeatability(m) 0.75(with HIWIN solution)
X-Axis +Direction
X-axis2.5, Y-axis4(with payload 10 kg), Z-axis2(with payload Accuracy(m) 1.5(after error mapping)
Max. Acceleration(m/s2) X-Axis +Direction
200 kg) Max. Acceleration(m/s2) 2(with payload)
X-axis0.3, Y-axis0.3(with payload 10 kg) , Z-axis0.05(with Max. Velocity(m/s) 0.25(with payload)
Max. Velocity(m/s)
payload 200 kg)
Vertical Straightness(m) 1
486
Vertical Straightness(m) X-axis2, Y-axis2, Z-axis10
1868.5
Horizontal Straightness(m) 2
Horizontal Straightness(m) X-axis1, Y-axis1, Z-axis2
Orthogonality(arc-sec) XY-axis5 1180 1100
Payload(kg) 15
Payload(kg) XY-axis10, Z-axis200
Customized
2154 1604 NoteAll specifications can be designed according to customer demand.
Y-Axis +Direction
Y-Axis +Direction
Z-Axis +Direction
X-Axis +Direction
X-Axis +Direction
1868.5
486
2154 1604
1180 1100
3.32 ALC series 4 Drive

Using non-contact air bearing.
Without maintenance.
High positioning accuracy. 4.1 HIWIN D1 servo motor drive
High load capacity of up to 680 kg.
Vertical straightness up to 3 m.
Digital drive
Vector control
Lightening human, machine interface
3.32.1 Industry applications 100-240Vac power input
Large-size glass substrate detection equipment Support various pulse wave formats
Support analog or digital optical scales
Table3-31 LMAP-CFC-1-2350 product specification
Stage type LMAP-CFC-1-2350

Stroke(mm) 2320
Peak Force(N)/Continuous Force(N) 2736/684
Repeatability(m) 0.5 (with HIWIN solution)
Vertical Straightness(m) 4
Horizontal Straightness(m) 3
Payload(kg) 680
+Direction
Stage orientation Horizontal 357.5
DC24V
Option
4
3620 1118.5
Main Power
LM STAGE
1
Drive
CN3
CN2
CN3 CN2 CN4
2
3
+Direction CN1
357.5
3620 1118.5 5
Drives
PC
6 Limit signals Pulse signal etc.
Mot ion
Controller
4.2 HIWIN D1-N servo motor drive 4.3 D1 related accessories

Table4-1 Drive peripheral accessories
Current vector control Name Specication Connector Description
Best for driving linear motors, shaft motors and torque motors
D-Sub9PIN to RJ-11
100-240VAC power input D-sub
RS-232communication
Supports STP / DIR, CW / CCW, A / B pulse formats 3 LMACR21D connector
cable Note Note
(differential / single ended interace) and CN1
upports 10V voltage or digital commands for velocity or
force/ torque modes 4 10 Regenerative resistor 050100700001 Rated power 100W, instant power 500W
PDL general motion language D1 Drive connector D1-CK1 All connectors (not included CN3)
Supports analog and digital encoder and resolver accessories kit bag All connectors (also included CN3)
D1-EMC1 Single phase power
EMC accessories kit bag
D1-EMC2 Three phase power
D1-H1 Standard
Heat sink
D1-H2 Small type
LMAHS Suitable for LMS series, single-ended signal
Digital Hall sensor LMAHC Suitable for LMCA,LMCB and LMCC series, single-ended signal
LMAHC2 Suitable for LMCD and LMCE series, single-ended signal
LMAHSA-D Suitable for LMS series, differential signal
Analog Hall sensor
LMAHCA-D Suitable for LMCA,LMCB and LMCC series, differential signal
NotePlease contact us for hall sensor.
DC24V
Op tion
10
Drive
Main Power
LM STAGE
X1
7 X3
X9
X2
X4
X10/X11
CN3 CN2 CN4
X5
8
9
CN1
X6
11 PC
Drives
12 Limit signals Pulse signal etc.
Motion
Controller
4.4 Cables and connectors Table4-3 Position feedback cables

Drive Specication Connector Description
4.4.1 D1 related cables
FMK3G
For Renishaw digital optical scale, motor over-temperature signal.
For position feedback D-SUB 15 female connector
FMK3G
Motor over-temperature connector
Table4-2 Control signals, limit signals, motor power cables LMACEY
Name Specication Connector Description Drive connector (3M)
Model no.10120-3000VE
To motion controller (about 3 meters long)
Control signal Renishaw digital optical scale, motor over-temperature signal, digital Hall
5 component signals.
cables LMACK30R CN2 Motor over-temperature connector
For position feedback D-SUB 15 female connector
Drive connectors (3M) LMACEZ

Model: 10126-3000VE
Suitable for linear motor positioning stages Drive connector (3M)
HIWIN Model no.10120-3000VE
6 Limit switch 2 D1-XX-S2
Digital Hall component D-SUB 9 female connector
FMK3G
Note Note
LMACKS
12 extension cord series Renishaw digital optical scale, motor over-temperature signal.
FMK3G
D-Sub9 Pin to discrete wires Motor over-temperature connector
LMACEC
Suitable for LMS series linear motorsLMC series linear motors: LMC-
EFELMC-EFF
Drive connector (3M)
LMACSD Note Note Model no.10120-3000VE
Renishaw analog optical scale, motor over-temperature signal, digital Hall

9W4S to discrete cables and over-temperature connector component signals. Motor over-temperature connector
Suitable for LMCF motors
LMACEJ
LMACSL Note Note
Drive connector (3M)

Digital Hall component D-SUB 9 female connector Model no.10120-3000VE
9W4S to discrete cables and over-temperature connector
Suitable for LMSA series linear motors Renishaw digital optical scale,
Motor power Motor motor over-temperature signal.
Note
supply cables and power LMACEAW

CN3
1 LMACST Note Note
Note
over-temperature connector
HIWIN
signal cables (U.V.W) 9W4S to discrete cables and over-temperature connector D1-XX-S3
series Renishaw digital optical scale, motor
Suitable for LMC series linear motors: A, B, C, D, E, EFC LMT series linear
over-temperature signal, digital Hall
motors: A, B, C
Note
LMACEAV component signals.

LMACSK Note Note
Note
Interconnect to discrete cables and over-temperature connector

Jena for analog encoder, motor over-temperature signal, suitable for TMS
Suitable for TMSTMNTMY series torque motors (not include over- series torque motors.
temperature signal)
LMACSF Note Note LMACEAA Note Note
Intercontec
Intercontec to discrete cables HIWIN Model no.ASTA876NN0085200A000 Drive connector (3M)
Model no.10120-3000VE
D1-XX-S8
series Jena for analog encoder, motor over-temperature signal, Hall component
signals.
Note Note
LMACEAM
Intercontec
Model no.ASTA876NN0085200A000
Single Resolver extension cable, includes over-temperature signal.

HIWIN
D1-XX-SR LMACEAD Note
series Intercontec
Dual Resolver extension cable, includes over-temperature signal.

HIWIN
Drives
D1-XX-DR LMACEAU Note
series
Intercontec
03 04 05 06 07 08 09 10
Cable
3 4 5 6 7 8 9 10
length (m)
4.4.2 Pin assignments of D1

LMACEZ LMACEAV
LMACEAM
LMACEY (No Hall component) LMACEAW (No Hall component)
LMACEAA (No Hall component)
D-SUB 15Pin Color D-SUB 20Pin D-SUB 15Pin Color D-SUB 20Pin
Signal female (051400300063) male Signal female (051400300069) male 8-10-0090 JENA Color SCSI 20 mega-fabs D1
Function
connector connector connector connector (Female) Signal (051400300069) (Male) Signal
5V 7 Brown 3 5V 7 Brown 3 4 5V Blue 3 +5Vdc
0V 2 White 2 0V 2 White 2
Power 5 5V Blue - -
A+ 14 Green 4 A+ 14 Green 4
A- 6 Yellow 5 A- 6 Yellow 5 6 0V White 2 Signal Gnd
B+ 13 Blue 6 B+ 13 Blue 6 2 U2- Red 19 Cos(-)
B- 5 Red 7 B- 5 Red 7
3 U1 - Brown 17 Sin(-)
Z+ 12 Violet 8 Z+ 12 Violet 8 Incremental signals
Z- 4 Grey 9 Z- 4 Gray 9 9 U2+ Black 18 Cos(+)
Inner Shield 15 Inner shield 20 Encoder Alarm 3 Pink 18 10 U1 + Green 16 Sin(+)
Case - Outer shield 1 Inner 15 Inner shield 20
1 U 0- Pink 9 /X
2Pin Outer Case Outer shield 1 Origin signal
Color 8 U 0+ Grey 8 X
Signal female 2Pin
(051400300133) Color
connector Signal female 6 0V Inner shield 20 Signal Gnd
(051400100133)
T+ 1 Brown 14 connector
Case Shield Outer shield 1 Frame Gnd
T- 2 Blue 15 T+ 1 Brown 14
11 T+ Violet 14 [IN5] Motemp
D-SUB 9Pin T- 2 Blue 15 Temperature
Color 12 T- Yellow 15 Signal Gnd
Signal female D-SUB 9Pin
(051400100075)
connector Signal female Color 13 Vcc Blue 3 +5Vdc
5V 1 Brown 3 connector
14 HallA Brown/Green 11 HA
Hall A 2 White 11 5V 1 Brown 3
Hall B 3 Grey 12 Hall A 2 White 11 Hall sensor 15 HallB White/Yellow 12 HB
Hall C 4 Yellow 13 Hall B 3 Grey 12 16 HallC White/Green 13 HC
0V 5 Green 10 Hall C 4 Yellow 13
17 GND White 10 Signal Gnd
Shield Case Shield 1 0V 5 Green 10
Shield Case Shield 1
LMACEAD LMACEAU
LMACEJ Signal Round connector Color SCSI 20Pin Function Signal Round connector Color SCSI 20Pin
LMACEC (No Hall component) 17Pin (051400300069) Male 17Pin (051400300069) Male
8-10-0090 8-10-0090
connector connector
Signal D-SUB 15Pin Color D-SUB 20Pin Female Female
connector connector
female (051400300063) male
connector connector Z+ 13 Grey 12 1 Brown
Vref+ 11
Z- 14 Pink 13 4 White/Yellow
5V 4 Brown 3
Sin1+ 2 Green 16 7 White
0V 12 White 2 Vref- 3
Sin1- 3 Yellow 17 Resolver1 8 Yellow/Brown
Sin(+) 9 Green 16
COS1+ 9 Blue 18 (20/115) SIN+ 2 Green 16
Sin(-) 1 Yellow 17
COS1- 10 Red 19 SIN- 3 Yellow 17
Cos(+) 10 Blue 18
VREF+ 1 Brown 11 COS+ 9 Blue 18
Cos(-) 2 Red 19
VREF- 8 White 3 COS- 10 Red 19
Z+ 3 Violet 8
Inner 12 Inner shield 15 SIN+ 13 Black 4
Z- 11 Grey 9
Metal Resolver2 SIN- 14 Violet 5
Inner Shield 15 Inner shield 20 Outer Outer shield 1/Case
housing (24/114) COS+ 15 Grey 6
Case - Outer shield 1
COS- 16 Pink 7
Signal 2Pin T+ 11 White/Green 14
female Color Inner Shield 12 Inner shield 15
T- 12 Brown/Green 15
connector (051400100133) Outer Shield Case Outer shield 1/Case
+5V 5 Violet 9
T+ 11 Brown/Green 14
T+ 1 Brown 14 0V 6 Black 10 Temperature
T- 12 White/Green 15
T- 2 Blue 15
Signal D-SUB 9Pin
Color
female
(051400100075)
connector
Drives
5V 1 Brown 3
Hall A 2 White 11
Hall B 3 Grey 12
Hall C 4 Yellow 13
0V 5 Green 10
Shield Case Shield 1
4.5 D1-N related accessories
Table4-4 Drive peripheral accessories

LMACK30R
Name Specication Connector Description
Signal Pin Color Wire pair Color Pin Signal
051700800514
Frame Ground 1 Brown 1a 8a Blue 14 [Out2]
USB 2.0A to Mini-B
9
Signal Ground 2 Brown/White 1b 8b Blue/White 15 [Out3] Cable (5m)
Enable [IN1] 3 Red 2a 9a Light blue 16 Encoder A In/Out
GP Input [IN2] 4 Red/Black 2b 9b Light blue /Black 17 Encoder /A In/Out

Regenerative resistor 050100700001 Rated power 100W, instant power 500W
GP Input [IN3] 5 Orange 3a 10a Purple 18 Encoder B In/Out
D1-N Drive connector
D1-CK All connectors
GP Input [IN4] 6 Orange/Black 3b 10b Purple /White 19 Encoder /B In/Out accessories kit bag
HS Input [IN6] 7 Green 6a 11a Grey 20 Encoder X In/Out D1-N EMC2 Single phase power
EMC accessories kit bag
HS Input [IN7] 8 Pink 4a 11b Grey /Black 21 Encoder /X In/Out D1-N EMC1 Three phase power
HS Input [IN8] 9 Yellow 5a 12a White/Red 22 +5 Vdc @ 400mA
HS Input [IN9] 10 Pink/Black 4b 12b White/Blue 23 Siganl Ground
HS Input [IN10] 11 Yellow/Black 5b 13a White 24 Analog Ref In (+)
GP Input [IN11] 12 Green/Black 6b 13b White /Black 25 Analog Ref In (-)
[Out1] 13 Light green 7a 7b Light green/Black 26 [IN12] GP Input
Shield Case
NOTE: Wire pair 1a and 1b represent diagonal.
LMACKS
Signal Pin Color Wire set

Vcc 1 Yellow +
GNb 9 Green -
Negative limit signal output 3 Grey 1-OUT
* Reference notes 2 White 1-L
Positive limit signal output 5 Pink 2-OUT
* Reference notes 4 Brown 2-L

Origin signal output 7 Red 3-OUT
* Reference notes 6 Blue 3-L
NOTE: If connect wire set "L" to "+", can change wire set "OUT" output contact patterns.
Drives
110 MM99TE07-1701 LMACTA Note Note Linear Motor System 111
4.5.1 D1-N related cables

LMACTB
Table4-5 Control signals, limit signals, motor power cables Table4-5 Control signals, limit signals, motor power cables Note Note
Name Specication Connector Description Name Specication Connector Description
Both ends are scattered lines,suitable for HIWIN D1-N drive series. Suitable for LMFA series linear motors:LMFA64L,includes KTY and PTC two sets
Control signal of over-temperature signals.(round metal connector, wire diameter 6.0mm2)
11
cables LMACKF X6 LMACKF Note Note
LMACSC LMACTC Note Note
Motor power
supply cables and
Suitable for LMC series linear motors: LMC-EFELMC-EFF X3
over-temperature Suitable for DD series direct drive motors: TMS TMN TMY,(not include over-
7 LMACSU signal cables temperature signal)
G3KMF
LMACSU Note Note
LMACSR LMACSR Note Note
Suitable for LMSA motors
LMACSV LMACSV Note Note
Suitable for LMC series linear motors: A, B, C, D, E, EFC LMT series linear
motors: A, B, C, D
LMACSM LMACSM Note Note
Suitable for LMC series linear motors:F

LMACTD Note Note
LMACSN
G3KMF
Note Note
LMACSN
X3
Suitable for LMT series linear motors:E
Motor power
LMACSS
supply cables and LMACTD LMACTD
Note
Note
Note
Note
over-temperature
signal cables
Suitable for LMFA series linear motors:
LMFA0LMFA1 LMFA2 LMFA31LMFA31LLMFA32LMFA32LLMFA41
LMFA41LLMFA42LMFA42LLMFA52LMFA52LLMFA62(round metal connector, wire diameter
1.5mm2LMACSS
) Note Note
LMACSZ Note Note
LMACSZ

LMFA33LMFA33LLMFA34LMFA43 LMFA43LLMFA44LMFA53LMFA53L LMFA54
LMFA62L LMFA63LMFA64,includes KTY and PTC two sets of over-temperature signals.(round metal
Note Note
wire diameter 2.5mm2)
LMACSZ
connector,
LMACTA
LMACTA Note Note

LMFA34LLMFA44L LMFA54L LMFA63L,includes KTY and PTC two sets of over-temperature
signals.(round metal connector, wire diameter 4.0mm2)
LMACTA
LMACTB Note Note
LMACTB Note Note
Drives
LMACTC Note Note
LMACTB Note Note
LMACSR
LMACTC Note Note
Note Note
4.5.2 Pin assignments of D1-N

Table4-6 Position feedback cables LMACFD LMACEH
LMACFC (No Hall component) LMACEA (No Hall component)
Drive Specication Connector Description
D-SUB 15Pin Color X10HD-SUB D-SUB 15Pin Color X11HD-SUB
For Renishaw digital optical scale,connector is the D-type connector,doesn't female (051400300069) 15Pin female (051400300069) 15Pin
Signal male Signal male
include Hall sensor signal. connector connector connector
connector
LMACFC LMACFC 7 Brown 4 Brown
Note Note 5V 5 5V 5
8 Brown/Yellow 5 Brown/Yellow
2 White 12 White
0V 15 0V 15
X10 9 White/Yellow 13 White/Yellow
For Renishaw digital optical scale,connector is the D-type connector, include
A+ 14 Green 1 Sin(+) 9 Green 1
Hall sensor signal.
A- 6 Yellow 6 Sin(-) 1 Yellow 6
B+ 13 Blue 2 Cos(+) 10 Blue 2
8 LMACFD
B- 5 Red 7 Cos(-) 2 Red 7
LMACFD
Z+ 12 Violet 3 Z+ 3 Violet 3
Z- 4 Grey 8 Z- 11 Grey 8
Inner Shield 15 Inner shielding 15 Inner Shield 15 Inner shielding 15
For Renishaw analog optical scale,connector is the D-type connector,doesn't
Outer Case Outer shielding Case Outer Case Outer shielding Case
include Hall sensor signal.
9Pin D-SUB 9Pin
LMACFA female Color Color
Note Note Signal Signal female
LMACFA connector (051400100075) (051400100075)
connector
5V 1 Brown 5 5V 1 Brown 5
Hall A 2 White 9 Hall A 2 White 9
For Renishaw analog optical scale,connector is the D-type connector, include
Suitable for linear Hall sensor signal. Hall B 3 Grey 10 Hall B 3 Grey 10
motors Note Note Hall C 4 Yellow 11 Hall C 4 Yellow 11
8 LMACFH 0V 5 Green 15 0V 5 Green 15
LMACFH Shield Case Shield Case Shield Case Shield Case
Note Note
X11 Jena for analog encoder, motor over-temperature signal, suitable for TMS
TMNE motors. LMACFG
LMACFL (No Hall component)
LMACFL
X12 HD-SUB
LMACFL JENA 17Pin female Color
Note Note Function 15Pin female
Signal connector (051400300069)
connector
Jena for analog encoder, motor over-temperature signal, hall sensor 5V 4 Blue 5
signals,suitable for TMNEH motors.
Power 5V 5 Blue 5
0V 6 White 15
LMACFG U2- 2 Red 7
LMACFG
T+
T-
Incremental U1- 3 Brown 6
signals U 2+ 9 Black 2
U1+ 10 Green 1
Single Resolver encoder,with motor over-temperature signal,suitable for U 0- 1 Pink 8

Origin signal
TMN motors. U0+ 8 Grey 3 Color Line number
LMACFE Shield Case Inner shield 15 (051400100133) casung
LMACFE
Note Note T+ 11 Purple Brown T+
Temperature
Suitable for direct X12 T- 12 Yellow Blue T-
drive motors Dual Resolveruencoder,with motor over-temperature signal,suitable for X10 HD-SUB
TMYTMNA motors. Color
15Pin male
(051400300063)
connector
LMACFJ
LMACFJ
Vcc 13 Blue Blue 5
Note Note
HallA 14 Brown/Green Brown 9
Drives
Hall sensor HallB 15 White/Yellow Yellow 10
HallC 16 White/Green Green 11
GND 17 White White 15

Appendix A: Motor Sizing

LMACFE
Round connector Color X12HD-
17Pin (051400300108) SUB 15Pin
Signal 8-10-0090
female
Female
connector connector
Start Motor Sizing Motion velocity profile
Brown The following contents describe how to choose proper 1. 1/3-1/3-1/3 trapezoid profile
5V 5 5
Brown/Green motor according to speed, moving distance, and Payloading If the distance (X) and move time (T) have been
White inertia. The basic process for sizing a motor is: given, the most common and efficient velocity profile
0V 6 4
White/Green for point-to-point motion is the 1/3-1/3-1/3
Sin1+ 2 Green 1 trapezoid curve because it provides the optimal
Sin1- 3 Yellow 6
Decide motion profile and required parameters
Calculate peak and continuous force move by minimizing the power required to complete
COS1+ 9 Blue 2
Select motor the move. It breaks the time of the acceleration,
COS1- 10 Red 7
Strokeing, and deceleration into three segments as
VREF+ 1 Gray 11
shown below.
VREF- 8 Pink 12 Symbols
Z+ 13 Black 13 Color Line number X : move distance (mm) V (m/sec)
Z- 14 Violet 14 (051400300138) casing T : move time (sec)
T+ 11 Gray/Pink Brown T+ a : acceleration (mm/s2) VmaxV (m/sec)
T- 12 Red/Blue White T- V : velocity (mm/s) Vmax
Shield Case Shield 15 ML : Payloading (kg)

LMACFJ g : gravitation acceleration (mm/s2)
Fp : peak force (N) t(sec)
t(sec)
Round connector Color X12HD-
17Pin (051400300108) SUB 15Pin Fc : continuous force (N) T/3 T/3 T/3
Signal 8-10-0090 Fa : attraction force between stator and forcer (applicable for T/3 T/3 T/3
female
Female
connector connector LMS, LMF series) (N)
Fi : inertia force (N) V max = 1.5 X V T T V T
Sin1+ 2 Green 1 (Because X = 2 3 + V 3 + 2 3 )
Kp : force constant (N/Arms) T
Sin1- 3 Yellow 6
Ip : peak current (Arms) X
V max V T T V T
COS1+ 9 Brown 2
Ie : effective current (Arms)
V max a=max1.5
= =
T T (4.5X
Because X = + V + )
T 2
2 3 3 2 3
COS1- 10 White 7 3
Ic : continuous current (Arms)
Sin2+ 13 Blue 3 V0 : starting velocity (mm/s) V the parameters
4.5X
Sin2- 14 Red 8 = max
a maxHerein = 2 are described as motion
COS2+ 15 Gray 9 T
equation. T
COS2- 16 Pink 10 STEP 1 Decide motion velocity profile and required 3
VREF+ 1/4 Black 11 Color Line number parameters
In order to determine the correct motor for a particular 2. 1/2-1/2 triangle profile
VREF- 7/8 Violet 12 (051400300138) casing
If X and T are given, another common motion profile is
T+ 11 Brown/Green Brown T+ application it is necessary to be familiar with the motion
the 1/2-1/2 triangle profile. The motion is divided into
T- 12 White/Green White T- equation.
two parts, namely
Shield Case Outer shielding Case
acceleration and deceleration. The second motion velo-
LMACKF Motion equation city profile is shown as follows.
Basic kinematics equations are described as follows:
Signal Pin Color Signal Pin Color
V = V 0 + aT V (m/sec)
X = V 0T + 1 aT 2
CWL 1 White FG 21 Light blue V (m/sec)
CCWL 2 White/Black GND 22 Light blue/Black

2 Vmax
Vmax
CW+ 3 Red 01+ 23 Light green Where V is velocity, a is acceleration, T is move time and X is
move distance.
X Because = Vfour
Tparameters
+ V T + V (V,T a, V max = 2 X
CW- 4 Red/Black 01- 24 Light green /Black
VYou can choose
max = 1.5 ( two of Xthe ) T and X) as
CCW+ 5 Yellow 02+ 25 White/Red your designedT parameters,2 then 3 the last
3 two
2 parameters
3 can T t(sec)
V max 4.5X
a max = 4X2 T/2
be calculated by above equations. T/2 t(sec)
CCW- 6 Yellow/Black 02- 26 White/Blue a max = = 2
T T T T/2 T/2
I1 7 Green 03+ 27 Red/White 3
V max = 2 X
I2 8 Green/Black 03- 28 Red/Blue
I3 9 Blue PT+ 29 Yellow/Red F p = M L amax +( M L g + Fa ) = Fi + F f T

I4 10 Blue/White PT- 30 Yellow/Blue Vamax
4X
max == 2 X
T2
I5 11 Brown N/A 31 Green/White T
4X
I6 12 Brown/White N/A 32 Light green /Blue Fp a max =
I7 13 Orange A 33 Gray/Red
Ip =
Kf 2 2 2
(Fi + Ff ) t 1 + F f t 2 +( Fi F f ) t 3
T2
I8 14 Orange/Black /A 34 Gray/Blue
Fe =
Fe t1 + t 2 + t 3 + t4
Ie =
I9 15 Gray B 35 Pink/Red Kf
I10 16 Gray/Black /B 36 Pink/Blue
COM 17 Purple Z 37 Light blue/Red
REF+ 18 Pink /Z 38 Light blue/Blue

Fp
REF- 19 Pink/Black CZ 39 Light green /Red Ip = < I p (from specification of chosen motor)
Kf
DSF+ 20 Violet/White DSF- 40 Green/Blue
Fe
Ie = < I c (from specification of chosen motor)
Kf
F p = M L amax +( M L g + Fa ) = Fi + F f
Fp
Ip = 2 2
Kf 2
(Fi + Ff ) t 1 + F f t 2 +( Fi F f ) t 3
Fe =
116 MM99TE07-1701
Ie = e
F t1 + t 2 + t 3 + t4 Linear Motor System 117
F pK f
Ip = 2 2
Kf 2
(Fi + Ff ) t 1 + F f t 2 +( Fi F f ) t 3
Fe =
Fe t1 + t 2 + t 3 + t4
I e = Motor
Linear Sizing Example
Kf
For example, F p if Payload is 5 kg (moving mass of mechanism
Ip = < I p (from specification of chosen motor)
is 1 kg and payPayload
Kf is 4 kg), friction factor is 0.01
,distance isF500 mm, move time is 400 ms and dwell time is
3. Some useful equations 350 ms. I e = e < I c (from specification of chosen motor)
F pK f
At first,
I p = we can < I pcalculate the Vmax, of
(from specification amax , Fp and
chosen Fe by the
motor)
formulasKdescribed
f above (choose the first motion velocity
1/3 -1/3-1/3 Trapezoid profile Triangle profile profile and F LMC series)
V (m/sec) I e = e < I c (from specification of chosen motor)
Kf X 0.5
V (m/sec) V max = 1.5 = 1.5 = 1.875 (m/sec)
T 0.4
Vmax 4.5 X 4.5 0.5
Vmax a max = = = 14.06 (m/sec2)
T2 (0.4 ) 2
X 0.5
Fp ==1.5
V max M L Ta max
= 1.5
+ (M0.4 = 1.875 (m/sec)
L g + Fa )
a max= 5= 4.5 X+ 5
14.06 4.5 0.5
= 9.812 0.01 = 70.3
= 14.06 + 0.492)= 70.79 (N)
(m/sec
t(sec) t(sec) T2 (0.4 )
T/3 T/3 T/3 T/2 T/2 Fp F=eM [(70.3+ 0.49)2 + 0.492 + (70.3 0.49)2] 0.1333
= L a max + ( M L g + Fa )
0.4 + 0.35
= 5 14.06 + 5 9.81 0.01 = 70.3 + 0.49 = 70.79 (N)
V = V 0 + aT = 41.92 (N)
X X = V 0T +X 1,aTor2 Fe =
[(70.3+ 0.49)2 + 0.492 + (70.3 0.49)2] 0.1333
V 1.5 2 2 a X 0.4 + 0.35of type LMCA6 (p.48) which
T T In this case, weF pcan70 choose
.79 motor
I p (=up
= 41.92
can provide N) to =187(N )of .09 (Arms
= 2peak ) < and
force 5.4( Arms )
continuous force
4.5X 4X Kf 33.8
a 62(N), and the force constant is 33.8 N/A(rms). Then the
T 2 V max = 1.5 X T(Because
2 X= V T +V T + V T) V max = 2 X current supply Fe motor
41.92can be determined as follows
T 2 3 3 2 3 T I p = of = = 1. 24 (Arms) < 1.8( Arms)
X Vmax X Vmax V = V 0 + aT F p K f 70.79
33.8
V max 4.5X Ip = = = 2.09 (Arms ) < 5.4( Arms)
t + ( if > ) a = = a max = 4X2
Vmax a Vmax a = V 0TT+ 1 aT 2T 2
X max T
K
I e f 1.24
=
33.8
100% = 68.89% < 70%
32 IFc 141 .8 .92
Ip = e = = 1. 24 (Arms) < 1.8( Arms)
Kf 33.8
F p = M L aXmax +( M L g + FaV) T= Fi + FTf V T Ie 1.24
V = V 0 + aT V max = 1.5 (BecauseX = + V + ) V max = 2 X Ic
= 100% = 68.89% < 70%
The acceleration required in the first motion velocity profile is The peak currentT Ip and effective 2 3current 3 Ie 2can3be T 1.8
bigger
X = Vthan T + 1that
aT 2
in the second motion velocity profile; there- calculatedVby maxusing
4.5Xmotor force constant Kf.
a max = 4X2
0
2 a max = = 2
fore, the required motor size is bigger. When choosing second T T
T
motion velocity profile, the chosen motor size is smaller, ho- Fp
3
= V 0 + aT wever, we need to verify the DC bus of driver is bigger enough, Ip = 2 2
K 2
due
V maxto= the X Because
1.5higher ( velocity X =(VVmax).T + V T + V T ) V max f= 2 X F =
(Fi + Ff ) t 1 + F f t 2 +( Fi F f ) t 3
= V 0T + 1 aT 2 T 2 3 3 2 3 T
F p =FM L amax +( M L g + Fa ) = Fi + tF+f t + t + t
e
2 I e = e 4X 1 2 3 4
V max 4.5X K f=
a max = = 2 a max 2
T T T
STEP 2 Determine
3 peak force and effective force
STEP 3 Select motor by peak force and verify the
X BecauseX = V T + V Tbe
The peak force can calculated by the follow equation
+ V T) V max = 2 X
ax = 1.5 ( current
F psupply of motor
T 2 3 3 2 3 T Ip =
V max 4.5X F p = M L amax +( M L g + Fa ) = Fi + F f
2 2
4X K fFp 2
(Fi + Ff ) t 1 + F f t 2 +( Fi F f ) t 3
ax = = 2 a max = 2 Ip = Fe =
< I p (from specification of chosen motor)
T T T From F K HIWIN catalog, you can check
the t1 + tthe
2 + t 3 + t4
3 Where Fi is inertia force while Ff is friction force, and is Ie = e f
specifications
K fF of motor and choose an applicable
friction factor. < I c force,
I e =by epeak specification
motor Kf
(fromand then you of canchosen
verifymotor)
the
In most
F cases, motions are cyclic point-to-point
= M L amax +( M = g +pFa ) = FAssuming
I pLmovements. i + Ff
current supply if it is fitted the specification as
a cyclic motion
2 2 shown in the 2
Kf (Fi + Ff ) t 1 + F f t 2 +( Fi F f ) t 3 follows.
following profile with Fe =a pause time of t4 second, the
F force can be calculated tas 1 + tfollowing
2 + t 3 + t4 formula: Fp
I e effective
= e Ip = < I p (from specification of chosen motor)
Kf K =f 1.5 X = 1.5 0.5 = 1.875 (m/sec)
V max
Fp T 0.4
F
Kf 2 2 I e = e 4.5 < I c X(from4.5 0.5
specification of chosen motor)
2
(Fi + Ff ) t 1 + F f t 2 +( Fi F f ) t 3 a max
K =f = = 14.06 (m/sec2)
Fe = T2 (0.4 ) 2
Fe t1 + t 2 + t 3 + t4
Fp Regarding
Fp = M Leffective and
a max + ( M L continuous
g + Fa ) current, the
Kf Ip = < I p (from specification of chosen motor)
Kf ratio of Ie/Ic had better be less than 0.7 to attain
= 5 14.06 + 5 9.81 0.01 = 70.3 + 0.49 = 70.79 (N)
V (m/sec) some margin.X 0.5
Fe V max = 1.5 = 1.5 2 = 1.875 (m/sec)
Ie = < I c (from specification of chosen motor)
K f Vmax Fe =
[ T + 0.49)0.4
(70.3 + 0.492 + (70.3 0.49)2] 0.1333
4.5 X 4.5 0.5 0.4 + 0.35
Fp a max = 2
= 2
= 14.06 (m/sec2)
< I p (from specification of chosen motor) T
= 41.92 (N) (0.4 )
Kf
Fp = M L a max + ( M L g + Fa )
Fe X of chosen
0.5 motor)
< I c (from Vspecification
Kf max = 1.5 = 1.5 = 1.875 (m/sec) t(sec) = 5 14.06 + 5 9.81 0.01 = 70.3 + 0.49 = 70.79 (N)
T 0.4 F p 70.79
4.5 X t1 4.5 0.5 t2 t3 t4 Ip = = 2 = 2.09 2 (Arms ) < 5.4( Arms)
a max =2
= 2
= 14.06 (m/sec2) Fe =
[(70.3 33.)8 + 0.49 + (70.3 0.49) ] 0.1333
K f + 0.49 2
T (0.4 ) 0.4 + 0.35

F 41.92
= M L a max + ( M L g + Fa )
Fp0.5 Ip = e = = 1. 24 (Arms) < 1.8( Arms)
X = 41.92 (NK) f 33.8
= 1.5 = 1.5 = 1.875 (m/sec)
T = 0.4
5 14.06 + 5 9.81 0.01 = 70.3 + 0.49 = 70.79 (N) 1.24
Ie
4.5 X 4.5 0.5 = 100% = 68.89% < 70%
2 I
Appendix B: Sizing a Regen Resistor

Choose a standard value of resistance less than the
calculated value. The value must also be greater than
the minimum regen resistor value specified by the
amplifier supplier.
1. Gather required information N for linear applications 10. Regen resistor sizing example
To calculate the power and resistance of the regen resistor Kt: Torque constant for the motor Gather required information
requires information about the amplifier and the motor. Nm/Amp for rotary applications LM ROBOTS type:LMXL1L-S37L-1200-G200
For all applications, gather the following information: N/Amp for linear applications Amplifier: mega-fabs D1
Emotor = Pmotor Tdecel DC bus capacitance: 1880uF
Detail of motion profile, including acceleration and velocity Emotor (joules): Energy dissipated in the motor Regen circuit turn on voltage: 390V
Amplifier model number Tdecel (seconds): Time of deceleration Minimum resistance:15
Applied line voltage to amplifier Moving mass: 86Kg (include payPayload 74 Kg)
Toque/force constant of the motor 5. Determine the amount of energy returned to the Vmax: 2 m/s
Resistance (line-to-line) of the motor windings amplifier Acceleration, deceleration: 5 m/s2
Calculate the amount of energy that will be returned to the Power supply (AC) of driver: 220VAC
For rotary motor applications, gather additional information amplifier for each deceleration using the following formula Motor type:LMS37L
Payload inertia seen by the motor Force constant (Kf): 68N/A(rms)
Ereturned = Edec-Emotor
Inertia of the motor Rwinding: 2 ohms(line-to-line)
Ereturned (joules): Energy returned to the amplifier
For linear motor applications, gather additional information Edec (joules): Energy returned by the deceleration
Emotor (joules): Energy dissipated by the motor Calculate regen resistor as following step:
Moving mass
6. Determine if energy returned exceeds amplifier capacity
2. Observe the properties of each deceleration during a com- Compare the amount of energy returned to the amplifier
plete cycle of operation in each deceleration with the amplifiers absorption
For each deceleration during the motion cycle, determine: capacity. The following formula is used to determine the
Speed at the start of the deceleration energy that can be absorbed by the amplifier.
1880 at the end of the deceleration
Speed
Time over which the deceleration takes place
51.98
3. Calculate energy returned for each deceleration Wcapacity (joules): The energy that can be absorbed by the bus capacitor
The energy returned during
51.98 each deceleration can be
72.02 C (farads): Bus capacitance
calculated by the following formulas. Vregen(volts): Voltage at which the regen circuit turns on
Rotary motor:72.02 180.05 Vmains(volts): Mains voltage (AC) applied to the amplifier
844.77 7. Calculated energy to be dissipated for each deceleration

180.05
Edec (joules): Energy returned by the deceleration For each deceleration where the energy exceeds the 1880
Jt (kg m2 ): Payload inertia on the motor shaft plus the motor inertia amplifiers capacity, using the following formula to
(radians /sec): Shaft speed at the start of deceleration calculate the energy that must be dissipated by the regen 51.98
(radians /sec): Shaft speed at the end of deceleration resistor.
Ie : effective current (Arms) Eregen = Ereturned _ Eamp
Eregen (joules): Energy that must be dissipated in the regen resistor 51.98 72.02
Linear motor: Ereturned (joules): Energy delivered back to the amplifier from the motor 72.02 180.05
Eamp (joules): Energy that the amplifier will absorb
Edec (joules): Energy returned by the deceleration 8. Calculate pulse power of each deceleration that exceeds Because the180.05 844.77
total value of selected resistance must be
Mt (kg): Moving mass amplifier capacity less than 844.77 ohms and the power capacity must be
V1 (meters /sec): Velocity at the start of deceleration For each 1880
deceleration where energy must be dissipated by more than 180.05 watts, we choose two resistors and
V2 (meters /sec): Velocity at the end of deceleration the regen resistor, use the following formula to calculate connect them in series, in each resistor the resistance
51.98 power that will be dissipated by the regen
the pulse is 68 ohms and power capacity is 100W. The total
4. Determine the amount of energy dissipated by the motor
resistor resistance value is 136 ohms and power capacity is
Calculate the amount of energy dissipated by the motor
Ppulse = Eregen / Tdecel 200W. The resistance order number is 050100700001.
due to current flow through the motor winding resistance 51.98 72.02
using the following formula. Ppulse (watts): Pulse power
Eregen (joules): Energy
72.02that must180.05
be dissipated in the regen resistor
Tdecel (seconds): Time of deceleration
844.77
Ppower (watts): Power dissipated in the motor 180.05resistance needed to dissipate the pulse power
9. Calculate
Rwinding (ohm): Line to Line resistance of the motor coil Using the maximum pulse power from the previous
F : Force need to decelerate the motor calculation, calculate the resistance value of the regen
Nm for rotary applications resistor required to dissipate the maximum pulse power.
R = V2regen / Ppulse max
R(ohms):Resistance
Ppulse max:The maximum pulse power
Vregen :The voltage at which the regen circuit turns on
1880
51.98
Appendix C:Inquiry form,Mechanical System Appendix D:Inquiry form,Electric Control System

Fields marked with asterisk (*) are required. Date:
Fields marked with asterisk (*) are required. Date:
Customer name_______________________________ Contact HIWIN_______________________________
110V 220V(Single phase)
Email______________________________________ Inquiry No.___________________________________
Input 220V(Three-phase) Input Voltage: ________V
Tel._________________Fax._________________ Business owners_____________________________ Socket
Voltage Other: ______V Quantity: ________
Yes,quantity____________pcs HIWIN design
*Industry/Application Multi-forcers
___________________ No
Input quantity______:
Indoor, general 25 Straightness(H)_______m H Type(Input current< 15A.) Optional
*Power system NPN PNP Dry contact
Cleaning room, class______ Required Connector T Type(Input current< 15A.) parts I/O
Straightness(V)_________m
*Operational environment measurement Output quantity______:
Vacuum , _______ Pitch_________arc-sec type Bare Wire terminal
protocol NPN PNP Dry Contact
Others Yaw_________arc-sec Other: _______
Output current : ________mA
Single Dual axis Bridge *Cover No Metal cover Bellows Yes___KVA
Gantry (single-driven) UPS No
*Stage type No
Gantry (dual-driven) Cable chain No Horizontal Vertical
HIWIN
Others _________ Spare parts list(.pdf)N/A
Installation method document
*Movement Point to point movement Scanning
Mass___kg Wiring Vertical Horizontal Touchscreen
Firmware Latest version
Dimensions___ mm version Panel Drawer-Type Quantity: ______ Size: ______ inches
*Payload Specific version___________
Offset, X___ mm,Y___ mm, Dimension(Unit: inch): Screen Non-touchscreen
110V 220V L:_____W:_____H:_____ Quantity: ______ Size:______ inches
Z____ mm Voltage
Other,_______ V No
X-axis Y-axis Z-axis Pulse STEP/DIR
External force (N) Material type and Surface
_____ _____ _____ Drive formet CW/CCW A/B
processing:
X-axis Y-axis Z-axis *Control panel
*Max. speed(m/s) Analog voltage command Stainless Steel Required safety approval: __________
_____ _____ _____ command
Aluminum Industrial
mega-ulink
X-axis Y-axis Z-axis Electric Coated Non-Coated specification
*Max. acceleration(m/s) Bus EtherCAT
_____ _____ _____ Cabinet Dimension(Unit: inch): Customer wiring method:
Modbus
8U: L: 26W: 19H: 14 Customer wiring method
X-axis Y-axis Z-axis Wiring board
*Stroke(mm) Yes (Please fill out appendix D) No 8U: L: 48W: 19H: 14 HIWIN Standard
_____ _____ _____ included
Other:______________
Repeatability(m) Uni-dir.___ Bi-dir.___ Software requirements Yes (Please fill in the remarks column) No List of designated parts(.PDF)(.xls)
Designated
Motion board
parts List of designated parts (Customer-
Controller HIWIN Design
Accuracy(m) ________________________ supplied )(.PDF)(.xls)
Specify IPC
Keep Motor power-off
Upper controller PLC Stack light Buzzer
Customer provide (Control power retains.)
Analog Digital *Emergency Safety Light Curtains
HIWIN Design Keep Drive disable Alarm
Absolute__________ stop mode Other: ________ N/A
Encoder type(m) (Control power retains.)
Resolution__________ No (Multiple choice are acceptable.)
Position trigger
HIWIN design
function Yes No
Special requirements:
*Stage installation Horizon Vertical Distance ___________mm
Axis______
Axis_______ Travel time ___________sec
Dwelling time ___________sec
Hang Upside-down Motion profile
Axis________ Axis________
Others FME0001-12
The information below is to be filled out by HIWIN or authorized agents.

Recommended specification:
FME0001-12
MEMO MEMO
MEMO
INDUSTRIE 4.0 Best Partner
Multi Axis Robot

Pick-and-place / Assembly /
Grinding and Polishing / Semiconductor /
Light Industry / Automotive industry /
Food industry
Articulated Robot
Delta Robot
Movable Delta Robot
SCARA Robot
Wafer Robot
Electric Gripper
Single Axis Robot Medical Equipment

Precision / Semiconductor / Hospital / Rehabilitation centers /
Medical / FPD Nursing homes
KK, SK Robotic Gait Training System
KS, KA Hygiene System
KU, KE, KC Robotic Endoscope Holder
Ballscrew Linear Guideway

Precision Ground / Rolled Automation / Semiconductor / Medical
Super S series Ball Type--HG, EG, WE, MG, CG
Super T series Quiet Roller Type--QH, QE, QW, QR
Mini Roller Other--RG, E2, PG, SE, RC
Ecological & Economical
lubrication Module E2
Rotating Nut (R1)
Energy-Saving & Thermal-
Controlling (C1)
Heavy Load Series (RD)
Direct Drive Bearing

Rotary Table Machine tools / Robot
Crossed Roller Bearings
Aerospace / Medical / Auto industry
Ball Screw Bearings
RAB Series
Linear Bearing
RAS Series
Support Unit
RCV Series
RCH Series

AC Servo Motor & Drive Torque Motor
Publication DateMay 2002, first edition
Semiconductor / Packaging machine / (Direct Drive Motor)
SMT / Food industry / LCD
Drives-D1, D1-N, D2
Inspection / Testing equipment / Print DateJanuary 2017, 7th edition
Machine tools/ Robot
Motors-50W~2000W
Rotary Tables-TMS,TMY,TMN
TMRW Series
1. HIWIN is the registered trademark of HIWIN Mikrosystem Corp.. Please avoid buying the counterfeit
goods that are from unknown sources to protect your rights.
2. Actual products may be different from the specifications and photos in this catalog, and the
differences in appearances or specifications may be caused by, among other things, product
improvements.
3. HIWIN will not sell or export those techniques and products restricted under the "Foreign Trade
Linear Motor Positioning Act" and relevant regulations. Any export of restricted products should be approved by competent
Automated transport / AOI application / Measurement System authorities in accordance with relevant laws, and shall not be used to manufacture or develop the
Precision / Semiconductor
Motor type-ironcore motor, ironless
Cutting machines / nuclear, biochemical, missile and other military weapons.
Traditional gantry milling machines /
motor, planar servo motor, shaft motor
Programmable drilling machines
Air bearing stage
High Resolution
X-Y stage
Gantry stage
Signal Translator Copyright HIWIN Mikrosystem Corp.
High-precision Enclosed
High Efficiency Counter
Linear Motor System
HIWIN MIKROSYSTEM CORP.

No.6, Jingke Central Rd.,
Taichung Precision Machinery Park,
Taichung 40852, Taiwan
Tel: +886-4-23550110
Fax: +886-4-23550123
www.hiwinmikro.tw
business@hiwinmikro.tw
Linear Motor System

Subsidiaries & R&D Centers
HIWIN GmbH HIWIN Schweiz GmbH HIWIN KOREA

OFFENBURG, GERMANY JONA, SWITZERLAND SUWON, KOREA
www.hiwin.de www.hiwin.ch www.hiwin.kr
www.hiwin.eu
info@hiwin.de
info@hiwin.ch info@hiwin.kr
HIWIN JAPAN HIWIN FRANCE HIWIN CHINA
KOBETOKYONAGOYAKYUSHUNAGANO ECHAUFFOUR, FRANCE SUZHOU, CHINA
HIROSHIMAHOKURIKU, JAPAN www.hiwin.fr www.hiwin.cn
www.hiwin.co.jp info@hiwin.fr info@hiwin.cn
info@hiwin.co.jp
HIWIN USA HIWIN Srl Mega-Fabs Motion System, Ltd.

CHICAGOSILICON VALLEY, U.S.A. MILAN, ITALY HAIFA, ISRAEL
www.hiwin.com www.hiwin.it www.mega-fabs.com
info@hiwin.com info@hiwin.it info@mega-fabs.com
HIWIN s.r.o. HIWIN SINGAPORE

BRNO, CZECH REPUBLIC SINGAPORE
www.hiwin.cz www.hiwin.sg
info@hiwin.cz info@hiwin.sg
The specifications in this catalog are subject to change without notification.
2017 FORM MM99TE07-1701

(PRINTED IN TAIWAN)

HIWIN Linear Motors

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Linear Motor System Technical Information

Linear Motor System

HIWIN MIKROSYSTEM CORP.

Linear Motor System

HIWIN GmbH HIWIN Schweiz GmbH HIWIN KOREA

HIWIN USA HIWIN Srl Mega-Fabs Motion System, Ltd.

HIWIN s.r.o. HIWIN SINGAPORE

The specifications in this catalog are subject to change without notification.

2017 FORM MM99TE07-1701

Multi Axis Robot

Single Axis Robot Medical Equipment

Ballscrew Linear Guideway

Direct Drive Bearing

Linear Motor System Technical Information

SAlow gravity center, high payload

2.Standard linear motor stage 06

2.2 SA:low center of gravity, high payload _____________ 8

3.Customized positioning stage 66

A Motor sizing ________________________________ 115

2 Standard linear motor stage 2.1.1 Single axis positioning stage

LMChigh-precision, high-speed stability

LMTmiddle precision, light payload

2.1.2 Measurement standards 2.2.1 SA

The number of slider

Limit switch connector type

High acceleration/deceleration High static stability Force-Velocity Curve(DC *4

LMSA32 1646 LMSA32 1646

Velocity-Stroke Curve SA11 Linear motor stage dimensions

Digital 1m encoder / Analog encoder: 2 SA21L SA22L SA23L

Cantilever Load Capability*2.3

Table2-6 SA21 Table2-7 SA22

SA23 Linear motor stage dimensions SA31,SA32,SA33

Digital 1m encoder / Analog encoder: 1

Linear motor stage with horizontal chain

Velocity Velocity Velocity

Linear motor stage with vertical chain

Linear motor stage with vertical chain

Velocity < 1 m/s Velocity < 1 m/s Velocity < 1 m/s

(130) Motor cable

Velocity < 1 m/s Velocity < 1 m/s Velocity < 1 m/s

Table2-11 SA32 Table2-12 SA33

2.3 LMC high-precision, high-speed stability 2.3.1 Linear single axis

The number of slider

NoteContact HIWIN for customized specification.

200 200 200 200

200 500 85 2 22/23 95 (68)

300 600 60 3 26/27 95 2x2-6H7 THRU

800 1100 85 6 46/47 95 2x2-6H7 THRU

100 430 50 1*1 19/20 95 6-M6x1.0Px12DP

800 1130 25 7 47/48 95 2x2-6H7 THRU

900 1230 75 7 51/52 95 75 75

1200 1530 75 9 63/64 105

300 660 90 3 28/29 95 2x2-6H7 THRU (68)

400 800 85 4 33/34 95

900 1300 35 8 53/54 95 2x2-6H7 THRU

1000 1400 85 8 57/58 95 2x(N+1)-6.5 THRU,

LMX1E T A 21300 G200 Moving mass (kg) 1.4 2.1 2.3

Table2-19 LMTA2 Shaft motor stage specifications

4.0 4.0 4.0

3.0 3.0 3.0 Stroke L L1 L2 Mass

Stroke L L1 L2 Mass Stroke L L1 L2 Mass

100 340 85 55 1 6.3 100 376 28 53 2 7.0

2.4.3 LMTB2 Shaft motor stage Velocity-Stroke Curve

500 500 500