Piezo-stage input voltage (Volt) - Point "QPD Signal, (Volt/Volt) - Point" Piezo-

stage input voltage (Volt) - Plot 1 "QPD Signal, (Volt/Volt) - Plot 1"
0 0.0151062 0 0
0.1 0.014801 0 0
0.2 0.0157166 0 0
0.3 0.0172424 0 0
0.4 0.0184631 0 0
0.5 0.019989 0 0
0.6 0.0205994 0 0
0.7 0.0218201 0 0
0.8 0.0224304 0 0
0.9 0.0227356 0 0
1 0.0227356 0 0
1.1 0.0227356 0 0
1.2 0.0227356 0 0
1.3 0.0221252 0 0
1.4 0.0215149 0 0
1.5 0.0209045 0 0
1.6 0.019989 0 0
1.7 0.018158 0 0
1.8 0.0172424 0 0
1.9 0.0151062 0 0
2 0.0135803 0 0
2.1 0.0111389 0 0
2.2 0.00869751 0 0
2.3 0.00686646 0 0
2.4 0.00411987 0 0
2.5 0.00198364 0 0
2.6 -0.00106812 0 0
2.7 -0.0038147 0 0
2.8 -0.00656128 0 0
2.9 -0.00930786 0 0
3 -0.0114441 0 0
3.1 -0.0135803 0 0
3.2 -0.0163269 0 0
3.3 -0.0187683 0 0
3.4 -0.0215158 0 0
3.5 -0.0230417 0 0
3.6 -0.0248728 0 0
3.7 -0.0263987 0 0
3.8 -0.0273142 0 0
3.9 -0.0285349 0 0
4 -0.0294504 0 0
4.1 -0.0303659 0 0
4.2 -0.0303659 0 0
4.3 -0.0300608 0 0
4.4 -0.0297556 0 0
4.5 -0.0279245 0 0
4.6 -0.0263987 0 0
4.7 -0.0248728 0 0
4.8 -0.0233469 0 0
4.9 -0.0212107 0 0
5 -0.0193787 0 0
5.1 -0.0160217 0 0
5.2 -0.0135803 0 0
5.3 -0.0102234 0 0
5.4 -0.00778198 0 0
5.5 -0.0050354 0 0
5.6 -0.00167847 0 0
5.7 0.00228882 0 0
5.8 0.0062561 0 0
5.9 0.00961304 0 0
6 0.0123596 0 0
6.1 0.0154114 0 0
6.2 0.0187683 0 0
6.3 0.0218201 0 0
6.4 0.0242615 0 0
6.5 0.0260925 0 0
6.6 0.0279236 0 0
6.7 0.0300598 0 0
6.8 0.0312805 0 0
6.9 0.0318909 0 0
7 0.0325012 0 0
7.1 0.0328064 0 0
7.2 0.0328064 0 0
7.3 0.0325012 0 0
7.4 0.0315857 0 0
7.5 0.030365 0 0
7.6 0.0285339 0 0
7.7 0.0267029 0 0
7.79999 0.0245667 0 0
7.89999 0.0221252 0 0
7.99999 0.0196838 0 0
8.09999 0.0175476 0 0
8.2 0.0138855 0 0
8.3 0.0108337 0 0
8.4 0.00778198 0 0
8.5 0.0050354 0 0
8.6 0.00198364 0 0
8.7 -0.000762939 0 0
8.8 -0.00259399 0 0
8.9 -0.00534058 0 0
9 -0.00686646 0 0
9.1 -0.00839233 0 0
9.2 -0.00961304 0 0
9.3 -0.0102234 0 0
9.4 -0.0102234 0 0
9.5 -0.0102234 0 0
9.6 -0.00930786 0 0
9.7 -0.00808716 0 0
9.8 -0.00564575 0 0
9.9 -0.00320435 0 0
10 0.000457764 0 0
10.1 0.00442505 0 0
10.2 0.00869751 0 0
10.3 0.0138855 0 0
10.4 0.0169373 0 0
10.5 0.0239563 0 0
10.6 0.0297546 0 0
10.7 0.0364685 0 0
10.8 0.0422678 0 0
10.9 0.0468454 0 0
11 0.05478 0 0
11.1 0.0602732 0 0
11.2 0.0645456 0 0
11.3 0.070344 0 0
11.4 0.0737009 0 0
11.5 0.0791941 0 0
11.6 0.0816355 0 0
11.7 0.0849924 0 0
11.8 0.0871286 0 0
11.9 0.0880442 0 0
12 0.0883493 0 0
12.1 0.087739 0 0
12.2 0.0862131 0 0
12.3 0.0840769 0 0
12.4 0.0807199 0 0
12.5 0.0764475 0 0
12.6 0.0730906 0 0
12.7 0.0679026 0 0
12.8 0.0636301 0 0
12.9 0.0584421 0 0
13 0.0517282 0 0
13.1 0.0459299 0 0
13.2 0.039216 0 0
13.3 0.0337219 0 0
13.4 0.0279236 0 0
13.5 0.0236511 0 0
13.6 0.019989 0 0
13.7 0.0166321 0 0
13.8 0.0132751 0 0
13.9 0.0111389 0 0
14 0.0108337 0 0
14.1 0.0114441 0 0
14.2 0.01297 0 0
14.3 0.014801 0 0
14.4 0.0193787 0 0
14.5 0.0233459 0 0
14.6 0.0300598 0 0
14.7 0.0364685 0 0
14.8 0.0413523 0 0
14.9 0.0480661 0 0
15 0.0541697 0 0
15.1 0.0624094 0 0
15.2 0.0688181 0 0
15.3 0.075532 0 0
15.4 0.0822458 0 0
15.5 0.0865183 0 0
15.6 0.0914011 0 0
15.7 0.0935373 0 0
15.8 0.0959787 0 0
15.9 0.0965891 0 0
16 0.0962839 0 0
16.1 0.0938425 0 0
16.2 0.0901804 0 0
16.3 0.0849924 0 0
16.4 0.0804148 0 0
16.5 0.0740061 0 0
16.6 0.0675974 0 0
16.7 0.0611887 0 0
16.8 0.0535593 0 0
16.9 0.0471506 0 0
17 0.0407419 0 0
17.1 0.0370789 0 0
17.2 0.0325012 0 0
17.3 0.0309753 0 0
17.4 0.0315857 0 0
17.5 0.0346375 0 0
17.6 0.0386047 0 0
17.7 0.044404 0 0
17.8 0.0569162 0 0
17.9 0.0663767 0 0
18 0.0846872 0 0
18.1 0.0978098 0 0
18.2 0.124971 0 0
18.3 0.144503 0 0
18.4 0.165865 0 0
18.5 0.195774 0 0
18.6 0.217136 0 0
18.7 0.252537 0 0
18.8 0.27451 0 0
18.9 0.30045 0 0
19 0.326085 0 0
19.1 0.346227 0 0
19.2 0.365759 0 0
19.3 0.365149 0 0
19.4 0.387732 0 0
19.5 0.390783 0 0
19.6 0.387426 0 0
19.7 0.378881 0 0
19.8 0.373083 0 0
19.9 0.352026 0 0
20 0.32639 0 0
20.1 0.292211 0 0
20.2 0.260777 0 0
20.3 0.219578 0 0
20.4 0.165865 0 0
20.5 0.129854 0 0
20.6 0.077363 0 0
20.7 0.0260925 0 0
20.8 -0.0346384 0 0
20.9 -0.0917063 0 0
21 -0.136873 0 0
21.1 -0.196689 0 0
21.2 -0.237888 0 0
21.3 -0.273594 0 0
21.4 -0.323644 0 0
21.5 -0.358435 0 0
21.6 -0.397497 0 0
21.7 -0.421912 0 0
21.8 -0.442359 0 0
21.9 -0.452736 0 0
22 -0.455177 0 0
22.1 -0.454567 0 0
22.2 -0.447242 0 0
22.3 -0.432593 0 0
22.4 -0.416724 0 0
22.5 -0.387121 0 0
22.6 -0.362097 0 0
22.7001 -0.323339 0 0
22.8001 -0.289768 0 0
22.9001 -0.257725 0 0
23.0001 -0.216221 0 0
23.1001 -0.183261 0 0
23.2001 -0.144808 0 0
23.3001 -0.114901 0 0
23.4001 -0.0788889 0 0
23.5001 -0.0437937 0 0
23.6001 -0.0282297 0 0
23.7001 -0.00411987 0 0
23.8001 0.0126648 0 0
23.9001 0.0282288 0 0
24.0001 0.0337219 0 0
24.1001 0.0410471 0 0
24.2001 0.042573 0 0
24.3001 0.0410471 0 0
24.4001 0.032196 0 0
24.5001 0.0267029 0 0
24.6001 0.0123596 0 0
24.7001 0.00473022 0 0
24.8001 -0.00930786 0 0
24.9001 -0.025178 0 0
25.0001 -0.0370798 0 0
25.1001 -0.0520334 0 0
25.2001 -0.0621042 0 0
25.3001 -0.0718699 0 0
25.4001 -0.0785837 0 0
25.5001 -0.0840769 0 0
25.6001 -0.0871286 0 0
25.7001 -0.0871286 0 0
25.8001 -0.0856028 0 0
25.9001 -0.0831614 0 0
26.0001 -0.0776682 0 0
26.1001 -0.0718699 0 0
26.2001 -0.0624094 0 0
26.3001 -0.0498972 0 0
26.4001 -0.042573 0 0
26.5001 -0.0312815 0 0
26.6001 -0.0212107 0 0
26.7001 -0.0105286 0 0
26.8001 -0.00289917 0 0
26.9001 0.00473022 0 0
27.0001 0.0123596 0 0
27.1001 0.0163269 0 0
27.2001 0.0196838 0 0
27.3001 0.0215149 0 0
27.4001 0.0215149 0 0
27.5001 0.0202942 0 0
27.6001 0.0160217 0 0
27.7001 0.0108337 0 0
27.8001 0.00534058 0 0
27.9001 -0.00320435 0 0
28.0001 -0.00991821 0 0
28.1001 -0.0154114 0 0
28.2001 -0.0260935 0 0
28.3001 -0.0325022 0 0
28.4001 -0.0450144 0 0
28.5001 -0.0526438 0 0
28.6001 -0.0621042 0 0
28.7001 -0.0694284 0 0
28.8001 -0.0749216 0 0
28.9001 -0.0819407 0 0
29.0001 -0.0831614 0 0
29.1001 -0.0874338 0 0
29.2001 -0.08957 0 0
29.3001 -0.0892649 0 0
29.4001 -0.0846872 0 0
29.5001 -0.0837717 0 0
29.6001 -0.0794992 0 0
29.7001 -0.0758371 0 0
29.8001 -0.0700388 0 0
29.9001 -0.0645456 0 0
30.0001 -0.0590525 0 0
30.1001 -0.0517282 0 0
30.2001 -0.0456247 0 0
30.3001 -0.0346384 0 0
30.4001 -0.0273142 0 0
30.5001 -0.01999 0 0
30.6001 -0.01297 0 0
30.7001 -0.00717163 0 0
30.8001 0.000152588 0 0
30.9001 0.00534058 0 0
31.0001 0.0111389 0 0
31.1001 0.0163269 0 0
31.2001 0.0205994 0 0
31.3001 0.0236511 0 0
31.4001 0.0270081 0 0
31.5001 0.0285339 0 0
31.6001 0.0294495 0 0
31.7001 0.0297546 0 0
31.8001 0.0294495 0 0
31.9001 0.0282288 0 0
32.0001 0.0273132 0 0
32.1001 0.0276184 0 0
32.2001 0.0254822 0 0
32.3001 0.0236511 0 0
32.4001 0.0184631 0 0
32.5001 0.0154114 0 0
32.6001 0.0123596 0 0
32.7001 0.0123596 0 0
32.8001 0.00686646 0 0
32.9001 0.00717163 0 0
33.0001 0.00411987 0 0
33.1001 0.00289917 0 0
33.2001 0.000152588 0 0
33.3001 -0.00198364 0 0
33.4001 -0.00289917 0 0
33.5001 -0.00320435 0 0
33.6001 -0.00289917 0 0
33.7001 -0.00167847 0 0
33.8001 0.000152588 0 0
33.9001 0.00259399 0 0
34.0001 0.0062561 0 0
34.1001 0.00595093 0 0
34.2001 0.00869751 0 0
34.3 0.0108337 0 0
34.4 0.0138855 0 0
34.5 0.0169373 0 0
34.6 0.0187683 0 0
34.7 0.0215149 0 0
34.8 0.0230408 0 0
34.9 0.025177 0 0
35 0.0267029 0 0
35.1 0.0276184 0 0
35.2 0.0282288 0 0
35.3 0.0282288 0 0
35.4 0.0276184 0 0
35.5 0.0273132 0 0
35.6 0.0260925 0 0
35.7 0.0245667 0 0
35.8 0.0224304 0 0
35.9 0.0196838 0 0
36 0.0172424 0 0
36.1 0.0138855 0 0
36.2 0.0111389 0 0
36.3 0.00686646 0 0
36.4 0.00411987 0 0
36.5 0.000457764 0 0
36.6 -0.00289917 0 0
36.7 -0.00595093 0 0
36.8 -0.00930786 0 0
36.9 -0.0111389 0 0
37 -0.0157166 0 0
37.1 -0.0178528 0 0
37.2 -0.0184631 0 0
37.3 -0.0196848 0 0
37.4 -0.0206003 0 0
37.5 -0.0227365 0 0
37.6 -0.0227365 0 0
37.7 -0.0202951 0 0
37.8 -0.0193787 0 0
37.9 -0.0178528 0 0
38 -0.0163269 0 0
38.1 -0.0141907 0 0
38.2 -0.0117493 0 0
38.3 -0.00991821 0 0
38.4 -0.00656128 0 0
38.5 -0.00350952 0 0
38.6 0.000152588 0 0
38.7 0.00228882 0 0
38.8 0.00534058 0 0
38.9 0.00839233 0 0
39 0.0108337 0 0
39.1 0.0135803 0 0
39.2 0.0157166 0 0
39.3 0.0166321 0 0
0 0