Identification and Elimination of Hygro-Thermo-

Mechanical Stress-Effects in a High-Precision

MEMS Pressure Sensor

Authors:

smund Sandvand
University College of Southeast Norway, Borre, Norway
smund Sandvand received the Cand.Scient. degree in physics from the University of
Bergen, Norway, in 1991. He is currently pursuing the Ph.D. degree in applied micro- and
nanosystems with the University College of Southeast Norway, Horten, Norway. He has
broad experience ranging from multimedia encoding algorithms as a Research Scientist at
Telenor Research and Development, Kjeller, Norway, to Bluetooth-based product
dev... View More

Einar Halvorsen
University College of Southeast Norway, Norway
Einar Halvorsen (M03) received the Siv.Ing. degree in physical electronics and the Dr.Ing.
degree in physics from the Norwegian Institute of Technology, Trondheim, Norway, in 1991
and 1996, respectively. He has worked both in academia and the microelectronics industry.
Since 2004, he has been with the University College of Southeast Norway, Horten, Norway,
where he is currently a Professor of micro-and nanotechnology. Hi... View More

Knut E. Aasmundtveit
University College of Southeast Norway, Norway
Knut E. Aasmundtveit received the M.Sc. degree in technical physics and the Ph.D. degree
in materials physics from the Norwegian Institute of Technology, Trondheim, in 1994 and
1999, respectively. He was at Alcatel Space Norway/Ame Space, Horten, Norway, as a
Radio Frequency System Design Engineer until 2004. He joined the University College of
Southeast NorwayIMST as an Associate Professor, where he became a Professor i... View
More

Abstract:
A micromechanical pressure sensor has been modeled and characterized with a focus on
hygro-thermo-mechanical stress originating from a thermoset-polymer die-attach material,
and its influence on the sensor output signal. The sensor output signal shows a first-cycle
effect during the first thermal cycle after storage, as well as increased hygro-thermal
hysteresis. Whereas such effects are normally difficult to explain quantitatively, our model of
hygroscopic diffusion and swelling provides an excellent match with experimental values.
By implementing suitable stress-isolating structures in the sensor design, the effect of
thermoset polymer stress on the sensor output signal can be reduced to non-detectable
levels. The resulting sensor designs shows improved performance with a reduced signal
drift and hygro-thermal hysteresis.
Published in: Journal of Microelectromechanical Systems ( Volume: 26, Issue: 2, April
2017 )
Page(s): 415 - 423
Date of Publication: 31 January 2017
ISSN Information:

INSPEC Accession Number: 16775816

DOI: 10.1109/JMEMS.2017.2651162
Publisher: IEEE
Sponsored by: IEEE Robotics and Automation Society
IEEE Industrial Electronics Society
IEEE Electron Devices Society
The American Society of Mechanical Engineers
Funding Agency: 10.13039/501100005416-Research Council of Norway through the 4P-
Precision Piezoresistive Pressure-Sensor Platform Project, Norwegian Micro- and Nano-
Fabrication Facility, NorFab, Norwegian Ph.D. Network on Nanotechnology for
Microsystems, Nano-Network