Discipline Elective II

14ME404 INTRODUCTION TO MEMS

Course Prerequisite: None
Course Description:
This course covers the fundamental basis of MEMS and devices, such as micro-actuators and
microsensors,
as well as their principles of operation. The course will introduce the state-of-the-art
micromachining techniques including surface micromachining, bulk micromachining, and
related
methods.
Course Objectives:
This course is designed such that students will
1. Gain a fundamental understanding of standard micro fabrication techniques and the issues
surrounding them
2. Know the major classes, components, and applications of MEMS devices/systems and to
demonstrate an understanding of the fundamental principles behind the operation of these
devices/systems
3. Understand the unique requirements, environments, and applications of MEMS
4. Apply knowledge of micro fabrication techniques and applications to the design and
manufacturing
of an MEMS device or a microsystem
5. Foster interest for further study
UNIT I: OVERVIEW AND WORKING PRINCIPLES OF MEMS AND
MICROSYSTEMS
MEMS and Microsystems, Evolution of Micro fabrication, Microsystems and Microelectronics,
Microsystems and miniaturization, Applications of MEMs in Industries, Micro sensors, Micro
actuation,
MEMS with Micro actuators Micro accelerometers, Micro fluidics
UNIT II: ENGINEERING SCIENCE FOR MICROSYSTEMS DESIGN AND
FABRICATION
Atomic structure of Matter, Ions and Ionization, Molecular Theory of Matter and Intermolecular
Forces,
Doping of Semiconductors, The Diffusion Process, Plasma Physics, Electrochemistry, Quantum
Physics.
UNIT III: Mechanical Design, Mechanical design using FEM, Design of a Silicon Die for a
Micro pressure sensor.
UNIT IV: MATERIALS FOR MEMS
Substrates and Wafers, Active substrate materials, Silicon as a substrate material, Silicon
compounds,
Silicon Piezo resistors, Gallium Arsenide, Quartz, Piezoelectric Crystals and Polymers.
UNIT V: MICROSYSTEMS AND THEIR FABRICATION
Photolithography, Ion implantation, Diffusion and oxidation, Chemical and Physical vapor
deposition,
etching, Bulk micro manufacturing, Surface Micromachining, The LIGA Process.
LTPC
3203
Course Outcomes:
At the end of the course, student will be able to
1. Understand working principles of currently available micro sensors, actuators, and motors,
valves,
pumps, and fluidics used in microsystems.
2. Apply scaling laws that are used extensively in the conceptual design of micro devices and
systems.
Students will be able to differentiate between the positive and negative Consequences of scaling
down certain physical quantities that are pertinent to microsystems.
3. Use materials for common micro components and devices.
4. Choose a micromachining technique, such as bulk micromachining and surface
micromachining for
a specific MEMS fabrication process.
5. Understand the basic principles and applications of micro-fabrication processes, such as
photolithography, ion implantation, diffusion, oxidation, and etching.
6. Consider recent advancements in the field of MEMS and devices.
Text Books:
1. MEMS and Microsystems. Design and Manufacturing, Tia-Ran Hsu, TMH 2002
2. Foundation of MEMS, Chang Liu,Pearson, 2012
References:
1. An Introduction to Microelectromechanical Systems Engineering. Maluf, M., Artech House,
Boston
2000
2. Micro robots and Micromechnaical Systems, Trimmer , W.S.N., Sensors & Actuators, Vol
19,
1989
3. Applied Partial Differential Equations, Trim., D.W., PWS-Kent Publishing, Boston, 1990
Mode of Evaluation: Assignment, Mid Examination, End Examination