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Abstract
A sensor array with nine discrete sensors integrated on a substrate was developed for recognizing the species and quantity of explosive
gases such as methane, propane, and butane. The sensor array consisted of nine oxide semiconductor gas-sensing materials with SnO2 as the
base material plus a heating element based on a meandered platinum layer all deposited on the sensor. The sensors on the sensor array were
designed to produce a uniform thermal distribution and show a high and broad sensitivity and reproductivity to low concentrations through
the use of nano-sized sensing materials with high surface areas and different additives. Using the sensitivity signals of the array along with
an articial neural network, a gas recognition system was then implemented for the classication and identication of explosive gases. The
characteristics of the multi-dimensional sensor signals obtained from the nine sensors were analyzed using the principal component analysis
(PCA) technique, and a gas pattern recognizer was implemented using a multi-layer neural network with an error back propagation learning
algorithm. The simulation and experimental results demonstrate that the proposed gas recognition system is effective in identifying
explosive gases. For real time processing, a DSP board (TMS320C31) was then used to implement the proposed gas recognition system in
conjunction with a neural network. # 2000 Elsevier Science B.V. All rights reserved.
0925-4005/00/$ see front matter # 2000 Elsevier Science B.V. All rights reserved.
PII: S 0 9 2 5 - 4 0 0 5 ( 0 0 ) 0 0 6 1 4 - 6
D.-S. Lee et al. / Sensors and Actuators B 71 (2000) 9098 91
2. Experimental Table 1
Dopants of the sensors utilized in the array
2.1. Preparation of base material Sensor no. Dopants
1 Pd (3 wt.%)
The priority for the reliable recognition of leaked explo- 2 Au (0.1 wt.%)
sive gases is the development of stable individual sensors 3 Pt Pd (2 wt.%)
that exhibit a high sensitivity to gases. Therefore, sensing 4 CuO (1 wt.%)
materials that can satisfy the above conditions need to be 5 La2O3 (5 wt.%)
6 Sc2O3 (3 wt.%)
fabricated and processed. It has been previously reported
7 TiO2 (1 wt.%)
that reducing particles to a nano-size through the addition of 8 WO3 (10 wt.%)
Ca along with the spillover effect caused by adding the Pt 9 ZnO (1 wt.%)
catalyst enhances the sensitivity of sensing materials to
gases even at low concentrations [12].
For preparing the raw materials, a solution containing
SnCl4, (CH3CO2)2CaxH2O and, H2PtCl66H2O was copre- the sensors on the array listed in Table 1. All the sensing
cipitated by controlling the pH value while dropping a materials were deposited on an alumina substrate
NH4OH solution to a white precipitated powder. The powder (55 m 14 m) along with a heating element and tempera-
was then washed with an NH4NO3 solution for 3 days, dried ture sensor based on a meandered silk-printed platinum layer
in an oven at 1008C for 24 h, and calcined in an electric on the backside of the substrate. Platinum pads and inter-
furnace at 6008C for 1 h. The Ca and Pt contents were both digitated platinum contacts were deposited on the front-face
set at 0.1 wt.% relative to the amount of SnCl4. Using this of the substrate.
powder as a base material, nine kinds of sensing materials As shown in Fig. 2, the sensor array was connected with
with different additives such as Pd, Au, Pt, CuO, La2O3, the long bonding pins for electrical conduction and thermal
Sc2O3, TiO2, WO3, and ZnO within a range of 0.15 wt.% isolation from the socket and peripheral circuit. The char-
were evenly mixed by hand-milling for 1 h to modify the acteristics of the sensor array were then tested in a testing
selectivity spectrum of the sensors. A process chart for the chamber after injection of explosive gases of butane, pro-
base material is shown in Fig. 1. The selection of the pane, and methane at 4008C. The sensor signals were
additives for the sensor array was based on previously transferred to a test system and monitored using a personal
reported results [1216]. computer in a testing chamber, as shown in Fig. 3.
The microstructure of the basic sensing-lm was inves-
2.2. Fabrication of sensor array and measurement tigated using transmission electron microscope (TEM),
X-ray diffraction (XRD), and Brunauer-Emmett-Teller
The sensor array consisting of nine metal-oxide semi- (BET) adsorption, and a voltage detecting method was used
conductor gas sensors along with their dopants is shown in to calculate the sensitivity of the sensor [17]. The sensitivity
Table 1. The coprecipitated SnO2/Ca,Pt (0.1 wt.%) powder was dened as Rair Rgas =Rair 100 (%), where Rgas and
was used as the base material. The sensing lms were all Rair are the electrical resistances in explosive gas and clean
prepared using the silk printing technique. After being air, respectively.
simultaneously deposited by the silk printing method, the
sensing lms were then annealed at 8008C for 2 h in air. The
following presents a brief outline of the results produced by 3. Results and discussions
Fig. 2. Structure of sensor array. (a) Electrode (front); (b) heater (backside); (c) photograph of sensor array.
the rutile structure (JCPDS 21-1250) of the commercial analyses, as shown in Table 2. After measuring the full width
powder (99.9%, Aldrich Co.). at half maximum (FWHM) of the XRD pattern peaks, the
TEM photographs of this powder with and without Ca particle size was then calculated using Scherrer's formula
after being calcined at 6008C for 1 h are shown in Fig. 5. The
Ca-added powder exhibited restrained particle growth sizes.
Xu et al. reported that a reduced particle size produces a
signicant increase in sensitivity [19,20]. Accordingly, the
Ca-added powder would be more sensitive in detecting low-
level gas concentrations. Based on the above papers, the
particle sizes of commercial SnO2, precipitated SnO2, and
SnO2/Ca,Pt powders were measured using XRD and TEM
Using the BET method, the nitrogen sorption curve for the
base material was investigated, as shown in Fig. 6. The
hysterisis recorded in the graph indicated a higher number of
pores in the sensing materials, which produces more effec-
tive gas diffusion and a higher sensitivity. The specic
surface areas calculated from this curve are shown in
Table 3. As the annealing temperature increased, the specic
surface area decreased. The coprecipitation of SnO2 with Ca
and Pt produced an increased specic surface area.
Fig. 5. TEM photographs of (a) pure SnO2; (b) SnO2/Ca,Pt (0.1 wt.%) The response time of a sensor to a gas is directly related to
powders with heat-treatment at 8008C for 1 h.
gas detection and classication. Thus, the time response
property of the sensor array to objective gases is very
important. The time response curve of the sensor array to
[21]. The differences between the values of the XRD and 4000 ppm propane at 4008C is shown in Fig. 7. It shows that
TEM analyses were due to the pretreatment process for the the gas reaction began to saturate within 35 s and de-
TEM photographs. The particle size of the precipitated SnO2 sorption of the gas was also completed within 30 s. The
powder was smaller than that of the commercial powder. The detection and recognition of a gas was thus completely
particle size of the coprecipitated SnO2/Ca,Pt powder was nished within 23 min, in situ. The sensors also exhibited
the smallest at 7 nm after being calcined at 6008C for 1 h. a variety of sensitivity curves according to the additives used
Accordingly, it is believed that a sensor with nano-sized to obtain gas selectivity.
powders will be effective in detecting low-level gas con- Different sensing patterns for the sensors are critical for
centrations. conferring selectivity to a sensor array. Fig. 8 shows the
Table 2
Particle size of SnO2 and SnO2/Ca,Pt powders for the heating temperature
Calcining temperature (8C) Pure SnO2 (nm) Commercial SnO2 (nm) 0.1 wt.% SnO2/Ca,Pt (nm)
Table 3
Specific surface area of SnO2 and SnO2/Ca,Pt powders for the heating
temperature
Fig. 10. PCA results of sensing data obtained from sensor array.
96 D.-S. Lee et al. / Sensors and Actuators B 71 (2000) 9098
Fig. 14. Recognition results of implemented gas recognition system for explosive gases: (a) 2000 ppm butane; (b) 4000 ppm propane; (c) 6000 ppm methane.
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