Maintaining uniform temperature in a vacuum chamber is

critical for establishing consistent processes. High

performance metal sheath heaters are the choice for
many of the CVD and plasma etch vacuum chamber
applications. Heaters are an integral component in the
vacuum chambers critical thermal subsystems. Watlow
uses our application expertise to design special heaters that
meet precision semiconductor specifications for heating
external chamber walls and lids and in-situ wafer chucks.
Electrical, thermal, mechanical and environmental
specifications determine the best heater solution.

FIREROD distributed wattage

FIREROD Cartridge Heaters
Watlows FIREROD cartridge heaters provide superior heat
transfer, uniform temperature and resistance to oxidation
and corrosion, even at high temperatures. FIREROD heaters
can be cleanroom compatible using Teflon insulated lead
wires or mineral insulated leads which feature a stainless
steel sheath.

FIREROD Maximum Watt DensityHeating Metals Features and Benefits

0.100
0.090
0.080 Nickel-chromium resistance wire
0.070
0.060 Precisely wound and centered in the unit, assures even,
0.050 efficient distribution of heat to the sheath
0.040
Minimal spacing between the element wire and sheath
0.030 Results in lower internal temperature, giving you the
ability to design with fewer or smaller heaters that
0.020 operate at higher watt densities
Fit in Hole (inches)

UL and CSA approved flexible stranded wires

With silicone fiberglass oversleeve, insulate the wire to
0.010
0.009 temperatures of 250C (480F)
0.008
0.007 Incoloy sheath
0.006
95 C 59

Resists oxidation and corrosion from many chemicals,

20 C
42

31

C (4 9F
54

5 (

0.005
5
5
65

heat and atmospheres

(2 01 )
0

03 F
0

C
76

0.004
(7
C

F )
(1

97
0C

)
(1

00

F
20

0.003
4

)
(14

F)
1
00

F)
F)

0.002

Incoloy is a registered trademark of

0.001 Special Metals Corporation.
10 20 30 40 50 60 70 80 100 200 300 400 500 600 800 1000
Teflon is a registered trademark of
Watt DensityW/in2 E.I. du Pont de Nemours and Company.

16 - Deposition and Etch Vacuum Chamber Thermal Management Solutions

 Cable Heaters
The versatile Watlow cable heater can be formed to a variety
of shapes for high-tech semiconductor applications. Cable
heaters from Watlow are small diameter, high-performance
units, fully annealed and readily bent to desired configurations.

Flat spiral cable heater configurations are the heart of many

turnkey platen heater assemblies. Coil assemblies are used in
wire bonding, while flat spiral assemblies are used in
photolithography and chemical vapor deposition. Star wound
cable heaters can be used for a variety of nitrogen, air and
liquid applications.

Features and Benefits

High ductility
Allows the heater to be cold-formed into almost any shape
Low mass
Allows for quick response to both heating and cooling
Heater sheath can be brazed
Allows the permanent attachment of mounted fittings to the
heater
Standard 304 stainless steel or optional 316L stainless steel
or Inconel 600
Provide high temperature corrosion and oxidation resistance
along with ideal thermal expansion properties

Cable Heater Construction

With or Without a No-Heat Tail Section

Straight Resistance Wire

OR Swaged Adaptor

Crimp Ring

Stainless Steel Hose Lead Wires

Parallel Coiled Lead Protection
Welded Resistance Wire
End Cap

Sheath

Compacted Magnesium Oxide

by Swaging or Drawing

Deposition and Etch Vacuum Chamber Thermal Management Solutions - 17

 Round and Flat Tubular Heating
Elements
High performance tubular heaters are used in both radiant
and convection modes to provide uniform temperature
profiles in core wafer process applications. Tubular elements
and assemblies from Watlow generate all the heat
necessary in these processes; and are virtually 100 percent
energy efficient.

Sheath Watt Density vs. Sheath 2

Features and Benefits
Sheath Watt DensityW/cm
3.0
Temperature
4.0 6.0 Precision bending with intricate formations
1800 3 4"/ Coil I.D.
Enables heating element to be designed around
1 1/4" Coil I.D. available space to maximize heating efficiency
900

ra
ge High temperature moisture-resistant seals
ve
1600 3 4"/ Coil I.D.
t Co Protect against moisture contamination and are rated to
en 1 1/4" Coil I.D.
rc
0
pe
ra
ge
800
400C (752F)
10 ve
e Co
1400
bl en
t
MgO insulation filled sheath
a

rc Not Coiled
C

pe
Maximizes dielectric strength, heat transfer and life
d

50
ile
Co

le
ab ble
C Ca 700
ile
d
en
gt
h Stainless steel studs
tL
o

Fusion-welded to terminal pins for mechanical strength

C

1200 i gh
ra
St
600 with ceramic insulators
Sheath TemperatureC
Sheath TemperatureF

1000
500

800
Safe Allowable Watt Density Limit

400

600
300

400 200

100
200

10 20 30 40 50

Sheath Watt DensityW/in2

18 - Deposition and Etch Vacuum Chamber Thermal Management Solutions