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In this study, we investigated the transient catalytic function of SPS in Cu electrodeposition via cyclic voltammetry. The addition of
SPS into the electrolyte for Cu electrodeposition caused the shift of the peak potential for the electrochemical Cu2+ reduction in the
positive direction. Its catalytic effect was manifested exclusively on Cu electrode and became stronger as Cu electrode was incubated
longer in the electrolyte prior to the measurement, which is interpreted to indicate that the catalytic function was associated with
the interaction between SPS and Cu+ generated from Cu electrode surface via comproportionation. The change in the concentration
of SPS and Cu2+ , or the change in the potential of Cu electrode affected the catalytic function, which gives an evidence of the
interaction. Cyclic voltammetry on ultramicroelectrode clearly showed the Cu+ generation and the interaction between SPS and
Cu+ .
2016 The Electrochemical Society. [DOI: 10.1149/2.1101608jes] All rights reserved.
Manuscript submitted April 26, 2016; revised manuscript received May 25, 2016. Published June 9, 2016.
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Journal of The Electrochemical Society, 163 (8) D428-D433 (2016) D429
Current (x10 A)
Current (x10 A)
0.3 0.3
4
4 0.2 0.2
0.1 0.1
Additive-free Additive-free
0.0 Cl ion
0.0 SPS 0 s
PEG-Cl SPS 30 ~ 360 s
-0.1 -0.1
0.0 -0.1 -0.2 -0.3 -0.4 0.1 0.0 -0.1 -0.2 -0.3 -0.4
Potential (V vs. Ag/AgCl) Potential (V vs. Ag/AgCl)
0.5 0.5
0.4
(c) 0.4 (d)
Current (x10 A)
Current (x10 A)
0.3 0.3
4
4
0.2
0.2
0.1
0.1
0.0
0.0 -0.1
Additive-free Additive-free
-0.1 SPS-Cl 0 s -0.2 PEG-Cl-SPS 0 s
SPS-Cl 30 ~ 360 s PEG-Cl-SPS 30 ~ 360 s
-0.2 -0.3
0.1 0.0 -0.1 -0.2 -0.3 -0.4 0.1 0.0 -0.1 -0.2 -0.3 -0.4
Potential (V vs. Ag/AgCl) Potential (V vs. Ag/AgCl)
0.10 (e)
0.05
0.00
Ep (V)
-0.05 Additive-free
Cl ion
-0.10 PEG-Cl
SPS
-0.15 SPS-Cl
PEG-Cl-SPS
-0.20
0 50 100 150 200 250 300 350
Incubation time (s)
Figure 1. (a-d) Cyclic voltammograms (scan rate: 50 mV/s) for electrochemical reduction of Cu2+ (2 mM) on Cu disk electrode in 1.0 M H2 SO4 electrolyte with
the addition of various additives (1 mM each). (e) The plot of the change in peak shift (Ep = Ep Ep in additive-free condition) according to the incubation time.
exhibits indistinguishable single wave in CV. In the electrochemical was intended for small iRs (Rs 20 ohm)8 drop. The addition of
reduction of Cu2+ , the reaction product can be considered as unit 1 mM Cl and PEG-Cl (1 mM each) resulted in a well-known accel-
activity (when the deposit is more than monolayer) because it is insol- erating and suppressing effect, respectively (Fig. 1a), and any mean-
uble, so that the onset potential (emerging potential) of CV is equal to ingful changes on CV after experiencing the electrode incubation were
the equilibrium potential and the slope of i-V curve is steeper than the not observed in both cases (The data were not shown here). On the
case of soluble product.7 However, the actual CV slope of the elec- other hands, the incubation in all electrolytes containing SPS (1 mM)
trochemical reduction of Cu2+ is sluggish because it is non-reversible caused the gradual shift in CV as it became steeper and its peak (Ep )
reaction with the slow kinetics, as well as mass transfer overpotential was shifted to more positive direction (Figs. 1b1d). This transient
and IR drop. In addition, after the first electron transfer, the product behavior of CV was not observed after a few minutes (5 min), and
Cu+ ions have a chance to be disproportionated while most of them it seemed to being stagnated. Similar change in the response of elec-
would be reduced to Cu0 . The disproporationation, therefore, would trochemical analysis such as LSV, chronoamperometry, according to
change the concentrations of Cu2+ and Cu+ slightly. These tell us that the pre-immersion of Cu electrode in the electrolyte has been reported
general quantitative analysis on CV for Cu electrodeposition would be previously.5,6,9
very difficult. Nevertheless, CV is one of the most suitable methods In CV for quasi-reversible or irreversible reaction, its peak poten-
for investigation on the change in the reaction kinetics of Cu elec- tial (Ep ) and slope (or Ep - Ep/2 ) are the function of the standard rate
trodeposition by organic additives. Herein, CV change in association constant (k0 ). Although an accurate quantitative analyses might not
with SPS was monitored with the change in the time period (noted as be applied herein, the positive shift in Ep would show the improve-
an incubation time) for the electrode being immersed in the electrolyte ment in the reaction kinetics by the catalytic function of SPS, and the
prior to starting the potential scan. extent of the peak shift (Ep = Ep Ep in additive-free condition)
Fig. 1 shows CVs for the electrochemical reduction of Cu2+ on Cu would represent the degree of acceleration. Fig. 1e exhibits the plot
electrode in the electrolyte containing various organic additive combi- of Ep against incubation time in the various additives condition.
nations. Low Cu2+ concentration in the electrolyte compared to that in The positive Ep value indicates of the accelerating function whereas
the electrolyte for the conventional Cu electrodeposition (0.2 1.0 M) negative value indicates of the suppressing function. Almost constant
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D430 Journal of The Electrochemical Society, 163 (8) D428-D433 (2016)
0.2 c2 0.5
(a) c1 (b)
0.0 Additive-free
0.0 Additive-free
Current (x10 A)
Current (x10 A)
SPS 0 s
SPS 0 s -0.5 SPS 30 s
SPS 30 s
4
4
a1 SPS 60 s
-0.2 SPS 60 s -1.0 SPS 120 s
SPS 120 s
0.05 -2.0
-0.6 a2
0.00
-2.5 0.0
0.2
(c)
0.0 Additive-free
Current (x10 A)
SPS 0 s
-0.2 SPS 30 s
4
-0.4 SPS 60 s
SPS 120 s
-0.6
0.12
-0.8
-1.0 0.06
-1.2 0.00
0.0 -0.1 -0.2 -0.3
-1.4
0.2 0.1 0.0 -0.1 -0.2 -0.3 -0.4
Potential (V vs. Ag/AgCl)
Figure 2. Cyclic voltammograms (scan rate: 50 mV/s) on (a) Au disk, (b) GC disk, and (c) Ag disk electrodes, respectively, in 1.0 M H2 SO4 electrolyte containing
2 mM Cu2+ and 1 mM SPS.
positive or negative Ep values of Cl and PEG-Cl represent con- or comproportionation reaction. The transient catalytic function of
sistent accelerating or suppressing effect. At short incubation time SPS with the incubation would be strongly related to its interaction
(<50 s), a slight change in Ep (<10 mV) was observed, and it would with Cu+ . As a reducing agent for the reductive bond cleavage of
be associated with the approach to saturation of the additive cover- disulfide, Cu+ would convert SPS to two thiolates (Reaction 1 in
age where it is expected to take less than 1 min in this concentration Eq. 1).17,18 It was followed by the re-formation of disulfide bond by
range.10,11 The above-mentioned transient catalytic function of SPS the catalytic oxidation of thiol accompanying the reduction of Cu2+
in all additive combinations resulted in the gradual increase in Ep . with the transition metal thiolate complex formation (Reaction 2 in
Although it was difficult to define absolute 0 s incubation experi- Eq. 2),19 which might be fundamentals of the catalytic function of
mentally, repeated experiments confirmed that in case of SPS alone, SPS and MPS for Cu electrodeposition. Eq. 1 also represents the
Ep started with negative value. It indicated that SPS on un-incubated interconversion between SPS and MPS in associated with the thiol-
Cu electrode weakly inhibited the electrochemical reduction of Cu2+ , disulfide exchange.
which accorded with a study which mentioned the suppression effect As the incubation was initiated, Cu+ would start to be generated
of SPS alone.12,13 Note that changes in Ep from all electrolytes with from Cu electrode via following comproportionation reaction.
SPS had similar time period, and it was also similar with that of rising
k1 k1 [Cu+ ]2
transient in chronoamperometries which have been reported in the Cu2+ + Cu +
2Cu where K = = [2]
many researches.46 k1 k1 [Cu2+ ]
Interestingly, the transient catalytic effect of SPS was not observed
on Au, GC, and Ag electrodes in the equivalent condition (Fig. 2). Herein, the equilibrium constant for a disproportionation-
Rather, SPS slightly inhibited the Cu2+ reduction on Au and GC comproportionation can be derived from following equation.7
surface. On Au surface, Cu underpotential deposition (peak c1 ) as well RT
as Cu overpotential deposition (peak c2 ) was kinetically perturbed by ln K = E 10 E 20 = 0.36(V) [3]
F
SPS (Fig. 2a). As the catalytic function of the thiolate on Au surface
has been reported elsewhere,14 these results would imply that the Therefore, K is about e14 which means the amount of Cu+ is small
catalytic function of SPS is related to its time-evolving chemical (40 M) compared to that of Cu2+ (2 mM). Low concentration of
interaction of SPS with Cu electrode for the formation of the thiolate. Cu+ would be the reason why the separate Cu+ reduction peak was
The electrochemical reduction of SPS was not reported not detected in CV on disk electrode. Comproportionation would
elsewhere,10,13 and any peak from SPS itself was not evolved in the be followed by the reaction of Eq. 1, resulting in the increase in
potential region of CV (Data were not shown here) whereby it can be the thiolate amount near the electrode. At the same time, Cu+ and
ruled out in this condition. Many studies mentioned the interaction of thiolate would also diffuse out to the bulk electrolyte whereby the
SPS with Cu+ as follows.13,15,16 concentration of thiolate would reach to a certain steady-state level.
Assuming that Ep is roughly proportional to the concentration of
1
4Cu+ + 2SPS 4Cu2+ + 4(thiolate) thiolate, the catalytic function would gradually increase and maxi-
mized, which is consistent with the observation in the shift of CV
2
2Cu2+ + 2Cu (I) thiolate + SPS [1] (Fig. 1).
The rate of the formation of Cu+ (Eq. 2) and thiolate (Eq. 1) would
Initially, Cu+ was not in the electrolyte and it would be generated be so slow that the transition spans the incubation time period (a few
only on Cu electrode surface via the first electron transfer of Cu2+ minutes) though it is not clear how total reaction rate is determined,
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Journal of The Electrochemical Society, 163 (8) D428-D433 (2016) D431
Ep / Ep,t=360
Ep / Ep, t=360
0.6 0.6
0.4 0.4
0.2 0.5 mM SPS 0.2 1 mM Cu2+
1 mM SPS 2 mM Cu2+
4 mM Cu2+
0.0 4 mM SPS 0.0
8 mM Cu2+
-0.2 -0.2
0 60 120 180 240 300 360 0 60 120 180 240 300 360
Incubation time (s) Incubation time (s)
SPS conc. (mM)
0 1 2 3 4 5 6 7
0.12
(c)
0.10
Ep, t=360s (V)
0.08
0.06
0.04
0 1 2 3 4 5 6 7 8 9
2+
Cu concentration (mM)
Figure 3. (a, b) The plot of the change in peak shift (Ep = Ep Ep in additive-free condition) with respect to the peak shift at 360 s against the incubation time
with varying (a) SPS (at 2 mM Cu2+ ) and (b) Cu2+ concentration (at 1 mM SPS). The standard deviation of measured Ep /Ep,t = 360s was less than 0.02.
(c) The plot of the change in peak shift (Ep = Ep Ep in additive-free condition) at 360 s incubation against SPS and Cu2+ concentration.
and it would be related to the time required for reaching maximum due to the decrease in the relative amount of accelerating species
degree of acceleration. Fig. 3 showed the change in the Ep with compared to the reactant (Cu2+ ).
respect to the saturated one (Ep at 360 s incubation) according to Nernst relation between Cu+ concentration and the electrode po-
the incubation time and the effect of SPS and Cu2+ concentrations. tential predicts that Cu+ concentration thermodynamically decreases
As the concentration of SPS (Fig. 3a) and Cu2+ (Fig. 3b) increased, as the electrode potential was polarized negatively. Although the
the rate of peak shift became faster. It implies of the increase in actual concentration of Cu+ would be different from one from Nernst
the rate of the formation of Cu+ (Eq. 2) and thiolate (Eq. 1), which relation due to non-reversibility of Cu2+ reduction, the tendency ac-
would be reasonable. The change in SPS and Cu2+ concentrations cording to the potential would be similar and it has been already
also accompanied the change in the absolute value of Ep at 360 experimentally proved by rotating ring disk electrode,13,20 and scan-
which is an indication of the degree of acceleration. Increase in SPS ning electrochemical microscopy.21 Accordingly, it can be expected
concentration would also increase the amount of thiolate as well as that the incubation under applying the negative potential would not
its formation rate whereby Ep increased with SPS concentration. raise catalytic function as the catalytic function of SPS is initiated
On the other hands, the increase in Cu2+ concentration reduced the by Cu+ . Fig. 4a shows cyclic voltammograms of the electrochemical
degree of acceleration. Actually, it increased in the current for the reduction of Cu2+ on Cu electrode incubated in the electrolyte for
electrochemical reduction of Cu2+ , followed by increase in IR drop, 360 s under different applied potential. The imposing of the negative
which would perturb CV in the negative direction. It also might be potential during the incubation would cause the Cu deposit followed
(a) 0.4
OCP (b) 0.09
Cu concentration (M)
-0.05 V 30
-0.15 V
+
Current (x10 A)
Ep (V)
0.2 0.03 10
0.1 0.00 0
Nernst condition
0.0
-0.03
0.0 -0.2 -0.4
-0.1
0.1 0.0 -0.1 -0.2 -0.3 -0.4 0.08 0.00 -0.08 -0.16 -0.24
Potential (V vs. Ag/AgCl) Potential (V vs. Ag/AgCl)
Figure 4. (a) Cyclic voltammograms (scan rate: 50 mV/s) for electrochemical reduction of Cu2+ (2 mM) on Cu disk electrode in 1.0 M H2 SO4 electrolyte in the
presence of 1 mM SPS. Before scanning potential, Cu electrode was incubated in the electrolyte for 360 s under imposing various potentials. (b) The plot of the
change in peak shift (Ep = Ep Ep in additive-free condition) and nernstian Cu+ concentration according to the incubation potential (incubation time: 360 s).
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D432 Journal of The Electrochemical Society, 163 (8) D428-D433 (2016)
(a)
0
Current (x10 A)
8
-2
-4
Additive-free
SPS
-6
Current (x10 A)
E = Eeq + RT/nF ln(1-i/iL)
ip, Cu upd (x10 A)
8
0.4
10
2 0.2
1 Additive-free Additive-free
SPS SPS
0.0
0
0.00 0.03 0.06 0.09 0.1 0.0 -0.1 -0.2 -0.3 -0.4
Scan rate (V/s) Potential (V vs. Ag/AgCl)
Figure 5. (a) Cyclic voltammograms (scan rate: 20 mV/s) on Au disk ultramicroelectrode (UME, 12.5 m dia.) in 1.0 M H2 SO4 electrolyte containing 2 mM
Cu2+ and 1 mM SPS. (b) The plot of peak current for Cu underpotential deposition on Au against the scan rate in the presence of SPS in the electrolyte. (c) Cyclic
voltammograms (scan rate: 20 mV/s) for the electrochemical reduction of Cu2+ on Au disk UME (12.5 m dia.) in 1.0 M H2 SO4 electrolyte containing 2 mM
Cu2+ and 1 mM SPS.
by the change in the electrode surface condition, or the change in Fig. 5a is CV for the electrochemical reduction of Cu2+ on Au
the surface concentration of Cu2+ and SPS. However, it would not UME in the absence and presence of SPS in the electrolyte, which
alter significantly as even at 0.25 V (vs. Ag/AgCl) incubation for shows the current for Cu electrodeposition and its stripping. The
360 s, the total charge was about 0.071 C/cm2 which corresponds to incubation did not affect CV in either case, which is consistent with
26 nm of Cu deposit or 7.3 106 mole of chemical species. After CV on Au disk electrode (Fig. 2a). The suppressing effect of SPS
the incubation, the electrode was stirred shortly in order to replenish was obviously observed on Au UME as all current responses were
Cu2+ and SPS near Cu electrode surface. The incubation at the open decreased with the addition of SPS. The decrease in the peak current
circuit shifted CV considerably as shown previously whereas the shift of the underpotential deposition (Fig. 5b) implies that the suppressing
became smaller as Cu electrode was incubated at more negative poten- effect of SPS arises from the surface adsorption. Fig. 5c exhibits
tial. Fig. 4b is a plot of Ep versus the incubation potential, overlaid CVs in the potential region for the overpotenital deposition of Cu
with the curve of Nernst relation between Cu+ concentration and po- after Cu underpotential deposition. The product of the electrochemical
tential. Both of Ep and Cu+ concentration decreased as the potential reduction of Cu2+ is insoluble Cu metal which can be considered to
applied negatively. The incubation at very negative potential (0.25 V be at essentially unit activity. If the kinetics of the reduction is rapid
vs. Ag/AgCl) exhibited the suppression effect (negative Ep ) as sim- (Nernstian multistep process, n = 2), i-E curve is then,7
ilar as the un-incubation on Cu electrode. These support our explana-
tion on the acceleration function associated with the reaction between RT il i
E = E eq + ln [4]
SPS and Cu+ from the comproportionation. Meanwhile, this might nF il
be interpreted in terms of the potential-dependent adsorption of SPS
along with surface coverage-based acceleration explanation. How- where Eeq is the equilibrium potential (0.063 V vs. Ag/AgCl in 2 mM
ever, Walker et al. reported that the adsorption of SPS was rather Cu2+ on Cu electrode), R is ideal gas contant, T is temperature, F is
enhanced at more negative potential whereby more catalytic func- Faraday constant, and il is limiting current. For disk UME, il is,
tion of SPS was expected at more negative potential.22 Usually, Cu il = 4n FCCu 2+ DCu 2+ r0 [5]
electrodeposition for superfilling is carried out at low overpotential
(<0.25 V) in order to prevent the thick deposit on trench top.23 where CCu2+ is the bulk concentration of Cu2+ in the electrolyte
Above results suggests that the low overpotential requirement for su- (2 mM), DCu2+ is the diffusion coefficient of Cu2+ (5.8 106
perfilling is also associated with Cu+ being present near the surface cm2 /s.24,25 ), and r0 is the radius of the disk electrode (6.25 m). Actual
and initiating the catalytic function of SPS. i-E curve for the electrochemical reduction of Cu2+ was displaced to
more negative potential and broadened, compared to the theoretical
curve (dash line) for the facile kinetics, though it eventually reach
CV on UME.The electrochemical character of UME is the small to il . It indicates that the electrochemical reduction of Cu2+ is not
current (<108 A) which leads to the rapid approach to a steady-state, electrochemically reversible and the addition of SPS made k0 smaller.
and therefore, CV on UME manifests virtually steady-state voltam- For the addition of SPS, CV curve was crossed at the reverse scan,
metry with the negligible perturbation of IR drop and transient mass which would be associated with the gradual evolution of the catalytic
transfer effect. Accordingly, the transient behaviors associated with function of SPS during CV, which is similar to the hysteresis on CV.24
the formation of Cu+ and thiolate can be separated from the steady- Cu-electrodeposited (0.4 V vs. Ag/AgCl for 100 s, 7.0 107
state electrochemical Cu2+ reduction in CV on UME. C) Au UME can serve as Cu UME with slight increase in the
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Journal of The Electrochemical Society, 163 (8) D428-D433 (2016) D433
(a) 0.8
Additive-free
(b ) 0.8
Incubation
0s
Current (x10 A)
Current (x10 A)
0.6 150 s 0.6
8
8
300 s
450 s
0.4 600 s
0.4
Additive-free
0.2 1st 0.2 SPS 0 s
2nd SPS 60 s
SPS 120 s
0.0 0.0 SPS 180 s
0
0.0 -0.1 -0.2 -0.3 -0.4 0.0 -0.1 -0.2 -0.3 -0.4
Potential (V vs. Ag/AgCl) Potential (V vs. Ag/AgCl)
Figure 6. Cyclic voltammograms (scan rate: 20 mV/s) for the electrochemical reduction of Cu2+ on Cu ultramicroelectrode (UME) in 1.0 M H2 SO4 electrolyte
containing (a) 2 mM Cu2+ , and (b) 2 mM Cu2+ and 1 mM SPS, with various incubation time. Cu UME was prepared via Cu electrodeposition (0.4 V vs.
Ag/AgCl for 100 s, 7.0 107 C) on Au UME (12.5 m dia.).
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