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Applied Surface Science 353 (2015) 793803

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Applied Surface Science


journal homepage: www.elsevier.com/locate/apsusc

The inuence of gold nanoparticles on the conductivity response


of SnO2 -based thin lm gas sensors
G. Korotcenkov a, , V. Brinzari b , L.B. Gulina c , B.K. Cho a,
a
School of Material Science and Engineering, Gwangju Institute of Science and Technology, Gwangju, Republic of Korea
b
Department of Theoretical Physics, State University of Moldova, Chisinau, Republic of Moldova
c
Institute of Chemistry, St. Petersburg State University, St. Petersburg, Russia

a r t i c l e i n f o a b s t r a c t

Article history: The results presented in this study demonstrate that the successive ionic layer deposition (SILD) method
Received 9 April 2015 for gold nanoparticle formation can be used for surface functionalization of SnO2 lms to improve their
Received in revised form 26 June 2015 gas sensing properties. As a result of successive treatments in HAuCl4 nH2 O and NaBH4 solutions, gold
Accepted 29 June 2015
nanoparticles can be formed on the surface of SnO2 crystallites. The size of the gold particles varies
Available online 10 July 2015
over the range of 150 nm depending on the number of SILD cycles. Gas sensing characteristics of the
Au-modied SnO2 lms are discussed as well. Unlike most studies focused on the development of CO
Keywords:
sensors, the present research focuses on the specics of the response of the SnO2 :Au-based sensors to
SnO2
Films
other gases, such as hydrogen and ozone. It is established that gold nanoparticles deposited on the SnO2
Gold clusters surface are active toward both reducing and oxidizing gases, and the effect of the SnO2 surface decoration
Surface modication by the gold nanoparticles on the gas sensing characteristics depends on the number of deposition cycles
SILD (i.e., the size of the gold particles). The sensitization to ozone and hydrogen suggests that the application
Gas sensors of the surface modication by gold in the eld of gas sensor design should not be limited by optimization
Characterization of the CO sensors parameters. Models showing the promotional role of Au additives are discussed, and
Optimization a mechanism of sensitization in the SnO2 :Au-based gas sensor is proposed.
2015 Elsevier B.V. All rights reserved.

1. Introduction using AuNPs for surface functionalization of metal oxides in solid


state sensors, including in conductometric gas sensors [1015]. It
For many years, it was believed that only Pd and Pt, showing was assumed that surface modication with gold nanoparticles
pronounced catalytic properties, were the most suitable materials would allow for the design of selective CO gas sensors that could be
for surface functionalization of metal oxides and optimization of operated at low temperature. However, the same studies showed
gas sensor parameters [13]. However, studies carried out during that achieving these indicated objectives is not a trivial task, and
recent decades have shown that gold, which was previously con- that achieving enhanced low-temperature sensitivity of the metal
sidered an inert material, at the transition to nanosized particles oxide sensors to CO requires the execution of several specic con-
supported by metal oxides has started to show enhanced catalytic ditions to AuNPs synthesis and deposition, related to both the size
activity [47]. For example, it was found that a reaction of CO oxida- and gold state in the cluster as well as the properties of the used
tion, with the participation of an Au-based catalyst, could proceed metal oxide support. These conditions have been reviewed in Ref.
at an increased rate at signicantly lower temperatures than when [16].
using conventional catalysts [8]. Therefore, during the last decade Research has shown that, depending on the purpose, various
among the research aimed at using gold nanoparticles (AuNPs) methods can be used for gold nanoparticle deposition on the surface
in heterogeneous catalysis [9], there have been reports related to of metal oxides to form a gas-sensitive matrix. For example, AuNPs
can be prepared using various physical deposition methods, such
as evaporation, sputtering, laser ablation, and discharge plasma
synthesis [17]. Methods of deposition from the gas phase, such as
Corresponding authors at: School of Material Science and Engineering, Gwangju
chemical vapor deposition (CVD), can also be used for the formation
Institute of Science and Technology, 123 Cheomdan-gwagiro, Buk-gu, 500-712,
of gold nanoparticles [18]. However, physical methods, as well as
Gwangju, Republic of Korea.
E-mail addresses: ghkoro@yahoo.com (G. Korotcenkov), chobk@gist.ac.kr the CVD method, are rather expensive. In addition, they have signif-
(B.K. Cho). icant limitations for the formation of clusters and nanoparticles on

http://dx.doi.org/10.1016/j.apsusc.2015.06.192
0169-4332/ 2015 Elsevier B.V. All rights reserved.
794 G. Korotcenkov et al. / Applied Surface Science 353 (2015) 793803

the surfaces developed. Wet chemical methods do not have such lms have been described in Refs. [34,35]. The main advantages
constraints and have therefore recently begun to attract signi- of this method for metal oxide lm deposition include simplicity of
cant attention. Wet chemical methods include the TurkevichFrens design, ease of operation, the possibility of depositions of complex
method [19], the BrustSchiffrin method [20], impregnation [6,21], composition, low cost, and the ability to use cheap non-toxic pre-
solgel [22], coprecipitation [6] and some other that can be found in cursors with low vapor pressure. The thickness of the SnO2 lms,
the literature [12]. However, one should note that till now there are equal to 4050 nm, was chosen because of the need to achieve
problems associated with the formation and stabilization of AuNPs optimal parameters of gas sensors. According to [36], these thick-
of optimal size on the required surface. nesses provide maximum sensor response to ozone at a minimum
Present study shows that the technology of successive ionic response time. At such thicknesses, diffusion processes do not limit
layer deposition (SILD) of gold nanoparticles can also be used for the kinetics of the sensor response. The SnO2 lms were deposited
the surface functionalization of metal oxide-based gas sensors. The on alumina ceramic substrates.
specicity of this technique is based on multiple, successive treat-
ments of required samples in solutions, which provide adsorption 2.1. Surface modication
on the substrate surface of anions and cations and their subsequent
interactions, and are accompanied by the formation of poorly sol- Deposition of the gold nanoparticles by SILD technology was
uble compounds. This technique has been described in detail in conducted using the following route: in the rst SILD cycle, a SnO2
[2325]. The advantages of this method, which is one version of lm on the substrate was treated in a metal salt solution, and then
the layer by layer (LbL) deposition technique and in many articles the samples were washed with distilled water to remove the non-
has the name successive ionic layer adsorption and reaction (SILAR) reacted reagents, treated with a water solution of NaBH4 , and again
[2629], include precise control of the thickness of the growing washed with distilled water. Such a treatment represents one depo-
layer and the size of the surface clusters formed. The primary objec- sition cycle. As a precursor for surface modication by the gold
tive of this work was to evaluate the possibilities of this method nanoparticles, a water solution of HAuCl4 was used. Gold nanopar-
for the formation of gold nanoparticles of a required size and to ticles were formed according to reaction:
determine the optimal synthesis conditions for their use in the
8HAuCl4 + 3NaBH4 + 6H2 O = 8Au + 3NaBO2 + 32HCl (1)
manufacturing of SnO2 conductometric gas sensors. Earlier studies
in this area have not been conducted. Only a couple of papers are One of the main advantages of the indicated process is the
devoted to the formation of gold nanoparticles on Al2 O3 and TiO2 irreversibility of the reaction and high reaction rate at room tem-
substrates for plasmon excitation studies using this method [28]. perature. This means that the reduction of HAuCl4 with NaBH4 can
Currently, the SILAR method is being used usually for the synthesis take place at room temperature. The size of the gold nanoparti-
of metal chalcogenide semiconductor quantum dots [27,29]. cles was controlled by changing the number of deposition cycles.
Unlike most studies aimed at developing SnO2 :Au-based CO During the present experiments, this varied from 1 to 8 SILD cycles.
sensors, the present research focused on studying the specics HAuCl4 nH2 O with a gold mass content of 49.47% obtained from
of the SnO2 :Au-based sensor response to other gases, such as Aurat Ltd. (Russia) and NaBH4 obtained from Vekton (Russia) were
hydrogen and ozone. It is well known that hydrogen and ozone used as the reactants for the gold nanoparticle synthesis. Working
are the basis for promising, environmentally clean technologies water solutions with required concentrations of HAuCl4 and NaBH4
[30,31]. Therefore, it is important to determine whether there are were prepared directly before synthesis. For preparation of solu-
any restrictions for using SnO2 lms with surface modied with tions as well as for washing procedures, Milli-Q high pure water
gold nanoparticles for improving parameters of sensors designed with a resistivity higher than 18 M was used.
for the detection of the aforementioned gases. This study also The choice of precursor concentration in solutions prepared for
aimed to understand the role of the gold nanoparticles in gas AuNPs synthesis was based on preliminary experiments, which
sensing effect and to determine the factors that are responsible showed that, in our case, 0.001 M HAuCl4 solution and 0.02 M
for controlling the parameters of SnO2 :Au gas sensors. SILD NaBH4 solution are optimal concentrations of reactants. Signi-
technology has previously been used for the surface modica- cantly higher concentrations of the reducing agent are required
tion of SnO2 lms with gold nanoparticles [32,33]. However, in for complete reduction of adsorbed gold ions. Further increase in
those studies, SILD technology was used for deposition of the concentration is undesirable because at higher concentrations of
SnO2 Au nanocomposites. Simultaneously with the deposition of reagent the solutions pH is too high. It has been found that the
the gold nanoparticles a ne dispersed SnO2 phase was formed indicated concentrations provide an acceptable process duration,
on the surface of the SnO2 crystallites. It was established that which is required for the formation of gold nanoparticles with the
surface modication by SnO2 Au nanocomposites could be used desired size. The treatment time in each solution, including wash-
for improving the operating characteristics of conductometric ing, varied in the range of 0.52 min. A more detailed description
SnO2 -based gas sensors. In particular, an increase in sensor of this process can be found in Ref. [37].
response and a decrease in response and recovery times have
been observed. However, it should be noted that this situation, 2.2. Film characterization
when the gold nanoparticles and the ne dispersed metal oxide
phase are deposited simultaneously on the surface of the SnO2 For structural characterization of the lms, X-ray diffraction,
crystallites, creates difculties in interpreting the obtained results scanning electron microscopy (SEM) and laser ellipsometry were
and understanding a real role for AuNPs in gas-sensitive effects. used. These methods provide control of the thickness, microstruc-
Therefore, we decided to conduct new research using only gold ture and morphology of the deposited lms. For these purposes,
nanoparticles for the surface modication of SnO2 lms. Philips XL30 ESEM and FEI Nova Nanolab SEM/FIB scanning elec-
tron microscopes were used. All SEM images were obtained in
2. Experimental details secondary electron detection mode using an acceleration voltage
of 1030 kV. X-ray photoelectron spectroscopy (XPS) was used for
For surface modication by gold nanoparticles, we have been surface characterization. X-ray photoelectron spectra have been
using SnO2 lms obtained by a spray pyrolysis deposition from collected from an ultrahigh vacuum system equipped with the
SnCl4 water solutions at temperatures (Tpyr ) of 450 C. Some hemispherical electrostatic analyzer Omicron EA125 with the Al
features of this process used for the deposition of gas sensing K line (h = 1486.7 eV) for excitation. The O, Sn, In, Au, Cl, and
G. Korotcenkov et al. / Applied Surface Science 353 (2015) 793803 795

C lines were recorded in detail with a band pass energy of 20 eV. Table 1
The average size of the gold clusters formed by the SILD technology on the surface
A Zeiss Merlin scanning electron microscope equipped with an
of SnO2 lms with the size of crystallites varied in the range of 25 15 nm.
Oxford instruments Inca X-act EDX detector for X-ray microanalysis
was also used for characterization of the surface composition. Number of SILD cycles 0.5 1 2 4 8
Size of AuNPs, nm <3 36 47 510 1030

2.3. Sensor fabrication and testing

Gas sensor prototypes were fabricated on alumina ceramic sub- were conducted after temperature stabilization and establishment
strates using thin-lm technology. The tested samples had Au of the steady-state value of the lm conductivity. To control the
contacts. They were deposited by thermal gold evaporation on reproducibility of the results, we repeated every measurement
the SnO2 :Au lms already formed on alumina substrate using the cycle three to four times for a series of three samples manufactured
technology described above. The distance between the measuring with the same process. Deviations in the values obtained during
contacts was 23 mm. Such a long distance between the con- the measurements are reected in the gures.
tacts allows to reduce their inuence on the analyzed gas sensing
characteristics. The width of the samples was 2 mm. 3. Results and discussion
The gas-sensing properties of as-deposited and modied SnO2
lms were investigated using a specially designed automated setup 3.1. SEM of the SnO2 :Au lms
that can conduct measurements in either stationary conditions
or in the conditions of controlling transition processes. For these Detailed analysis of gold nanoparticle formation on the surface
measurements, the samples were placed in a special ow-type of SnO2 lms by the SILD method and further material charac-
reactor with a controlled gas atmosphere and ambient humidity. terization have been published previously [37]. This allows us to
For the samples heating an external heater was used. The mea- avoid repeating the previously published results and simply to state
sured chamber volume was 0.5 cm3 . The small volume of the that SILD technology is capable to form gold nanoparticles with
chamber allowed to control transient processes with a time con- controlled size. As established in Ref. [37], the size of the AuNPs
stant of more than 23 s. Measurements of sensor response were depends on the conditions of the synthesis and increases with the
conducted in the temperature range of 25450 C. However, the number of deposition cycles used. Representative SEM images of
primary measurements were conducted at operating temperatures SnO2 lms modied with Au by varying the numbers of SILD cycles
corresponding to the maxima of the sensor response, which were are shown in Fig. 1. As can be seen in Table 1, the particle size,
observed to be in the temperature range of 300500 C. It is known depending on the number of SILD cycles, can vary from 15 nm to
that the most successful operation of conductometric sensors is 1015 nm or higher.
observed in this precise temperature range. In this range, the inu- Analysis of the SEM images presented in Fig. 1 shows that the
ence of water vapor and surface poisoning on sensor parameters is particle growth occurs mainly near the tops of the crystallites as
substantially reduced. To exclude instability [38], we exposed the well as within the cavities formed by several crystallites of the base
tested samples to stabilizing annealing at a temperature of 450 C, material. SEM images also show that, after 4 deposition cycles, each
and all experiments were carried out at a constant humidity, which crystallite contains 12 gold particles. According to [31], these
was maintained at 3545% relative humidity (RH). formations of 3D nanoparticles occur due to the aggregation of 1D
While studying gas-sensitive properties, the sensor response and 2D clusters from the whole surface of crystallographic planes
(Rozone /Rair for ozone detection and Rair /Rgas for the detection faceting the crystallite. This regularity generally coincides with reg-
of reducing gases) and the kinetics of the sensor response were ularities established for nanoparticles formed on smooth surfaces,
controlled. Sensor testing was performed using the measurement where the growth and accumulation of the gold clusters rst takes
cycle air (air + gas) air. Carbon monoxide, hydrogen and ozone place at the step edges [39]. It is known that, in these places, the
were used as the test gases. For the ozone source, a special ozone substrate atoms have the largest number of uncoordinated bonds.
generator based on an ultraviolet radiation lamp was used. The In particular, according to Wahlstrom et al. [40], the step edges of
ozone concentration in the tested gas was 1 ppm. The concentra- oxide surfaces can be considered a collection of oxygen vacancies.
tion of H2 and CO during these experiments was equal to 1000 ppm. However, the synthesized particles unfortunately have a large
The response and recovery times were determined during the variation in size [31], and along with small clusters, particles with
measurement cycles air (air + gas) and (air + gas) air, respec- a substantially larger size are present on the surface (Fig. 1c). This
tively. Time constants of transient processes were determined on a is a major disadvantage of the SILD method and of most meth-
0.9 level from the steady state value of the lm conductivity. Mea- ods of AuNPs synthesis [18], including wet chemical methods,
surements of transient characteristics at each temperature point because nanoparticles with different sizes have different functional

Fig. 1. SEM image of SnO2 lms deposited by spray pyrolysis and Au-modied by the SILD method: (a) 1, (b) 4, and (c) 8 deposition cycles (Tan = 400 C).
796 G. Korotcenkov et al. / Applied Surface Science 353 (2015) 793803

Fig. 2. Full-range XPS spectra of the SnO2 lms modied by Au nanoparticles


deposited by the SILD method (8 deposition cycles). Fig. 4. XPS Au 4f core level spectra of SnO2 lms with their surface modied by Au
nanoparticles deposited by SILD methods: (1) 0.5, (2) 2, and (3) 4 deposition cycles.
The 0.5 cycle means that the time of the treatment in HAuCl4 and NaBH4 solutions
properties [47]. However, the number of gold particles with an was reduced 2-fold compared to the usual route.
abnormally large size is signicantly lower than the number of
grains (see Fig. 1c). Therefore, they should not have a signicant
effect on the functional properties of modied lms. Moreover, The absence or small concentration of chlorine is a good indication
their appearance and growth was particularly intense when a large of the effectiveness of the washing procedure used in SILD. This
number of deposition cycles were used. Further research related feature is a signicant advantage of the SILD method because the
to the study of gas-sensitive properties of SnO2 lms (presented in removal of excess reactants and reaction products already occurs
Section 3.3) shows that SnO2 surface modication by gold using a during the gold nanoparticles deposition, in contrast to many other
large number of deposition cycles was not optimal for achieving methods of chemical deposition used for AuNP synthesis.
high gas sensitivity. Typical XPS Au 4f (4f5/2 and 4f7/2 ) core level spectra are shown
in Fig. 4. XPS spectra show that repetition of deposition cycles is
3.2. XPS of the SnO2 :Au lms accompanied by an increase in gold content at the metal oxide
surface. Moreover, the change in the intensity of the Au 4f peaks
Typical full-range XPS spectra of the SnO2 :Au lms are shown in corresponds to variations in the number of SILD cycles. For exam-
Fig. 2. The data indicate that the surface of the samples contains only ple, the XPS data revealed that the surface concentration of gold
gold, tin, oxygen and ordinary surface species, such as carbon ele- atoms [Au]/[Sn] increased from 0.01 after 0.5 deposition cycles
ments. Quantitative analysis of the surface chemistry of SnO2 lms to 0.03 after 2 deposition cycles and to 0.06 after 4 SILD cycles.
was based on the area (intensity) of the main core level XPS O1s, Sn This means that SILD technology truly provides the opportunity to
3d, and C 1s, weighted by the corresponding atomic sensitivity fac- control the gold content on the surface of metal oxide lms. It is
tor (ASF) and showed that SnO2 is slightly non-stoichiometric with important to note that XPS Au 4f peaks corresponding to binding
an [O]/[Sn] ratio of 1.71.8. This value is typical for nanostructured energies of 84 and 88 eV are already clearly visible after surface
metal oxides [41], which have oxygen vacancy defects in the sur- modication when using a 0.5 deposition cycle. This means that an
face region of the SnO2 grains. XPS measurements also revealed that appreciable amount of gold already appears on the surface of the
carbon is the main surface contaminant of the SnO2 grains. From lms after such a treatment. However, no AuNPs were found on
our estimations, the [C]/[Sn] ratio is equaled to 1. This means that the SEM images of these samples. This fact indicates that the size
the surface concentration of carbon is sufcient. However, this sit- of the gold particles formed on the surface of the SnO2 grains after
uation is typical for metal oxides stored under ambient conditions a 0.5 SILD cycle is less than the threshold resolution of the micro-
[41]. scope used, which was in the range of 13 nm. It looks realistic. For
Energy-dispersive X-ray (EDX) spectroscopy data (see Fig. 3) example, the gold nanoparticles at initial stages of growth on a at
also prove that the gold nanoparticles without impurities, such TiO2 surface during thermal evaporation have sizes in the range of
as chlorides and sodium, are really present on the surface. This 15 nm [42].
means that the gold nanoparticles either do not contain contami- Analysis of the energy position of Au 4f peaks (binding energy
nants that are present in the solutions used or their concentration (BE) = 84.2 and 87.8 eV) suggests that gold on the SnO2 surface is
is lower than the threshold sensitivity of the EDX and XPS methods. in the metallic state. For ionic Au3+ , the BEs are equal to 85.3 and
88.9 eV [43]. In principle, this outcome is not surprising because
the gold reduction to metal during thermal treatment is a typical
process for all systems containing gold deposited using wet chem-
ical methods. Typically, full gold reduction occurs at temperatures
above 300 C [44,45]. In the present experiments, the samples were
annealed at Tan = 450 C, and other chemical states of gold were
therefore not expected.
The XPS core level spectra, corresponding to the metal of the
dominant oxide (i.e., Sn 3d, see Fig. 5a), showed that the appear-
ance of the component corresponding to lower oxide states, such
as Sn2+ and Sno , did not take place. Sn 3d spectra are identical for
all samples regardless of the number of gold deposition cycles. Fur-
thermore, there is no change in the energy position of the peaks.
This means that there are no changes in the band bending. The
Fig. 3. EDX spectra of SnO2 lms deposited on a Si substrate and modied by AuNPs presence of gold also does not affect the shape of the O1s peak (see
using 3 SILD cycles. Fig. 5b).
G. Korotcenkov et al. / Applied Surface Science 353 (2015) 793803 797

Fig. 7. Conductivity of the SnO2 lms modied by Au vs. the number of SILD depo-
sition cycles in different atmospheres at the operation temperature Toper = 280 C:
(1) air and (2) air + ozone (1 ppm).

Fig. 5. XPS (a) Sn 3d and (b) O 1s core level spectra of SnO2 lms with their surface
modied by Au clusters deposited by the SILD method: (1) initial SnO2 lms and (2)
SnO2 :Au samples after 4 deposition cycles.

All of this indicates that a signicant chemical interaction with


the oxide material does not take place during the gold deposition,
and the appearance of gold on the SnO2 surface is not accompanied
by a change in the initial ratio of adsorbed species present on the
SnO2 surface. It is also important to note that the intensities of the
primary XPS peaks of tin and oxygen, in contrast to Au 4f intensity,
are changed very slightly, which is evidence of the fact that gold Fig. 8. (a) Conductivity responses to H2 and CO (1000 ppm) of the SnO2 lms
occupies a small part of the surface. modied by Au vs. the number of SILD deposition cycles. (b) Typical temperature
dependencies of SnO2 -based sensor responses to H2 : (1) unmodied samples and
(2) SnO2 :Au sensors modied by AuNCs (1 deposition cycle).
3.3. Gas sensing characteristics

The results of the SnO2 -based gas sensor testing after sur- in the air and in atmospheres containing hydrogen (Fig. 6) and
face modication by AuNPs are shown in Figs. 69. In particular, ozone (Fig. 7). Figs. 8a and 9a present results related to the inu-
Figs. 6 and 7 show the inuence of the number of SILD cycles during ence of the number of SILD cycles during gold deposition on sensor
gold deposition on sheet resistance of the SnO2 :Au lms measured responses to reducing gases and ozone, respectively. The effect of

Fig. 6. Conductivity of the SnO2 lms modied by Au vs. the number of SILD depo- Fig. 9. (a) Inuence of the number of Au deposition cycles on the SnO2 :Au sensor
sition cycles in different atmospheres at the operation temperature Toper = 450 C: response to ozone. (b) Typical temperature dependencies of SnO2 -based sensors in
(1) air and (2) air + hydrogen (1000 ppm). response to ozone.
798 G. Korotcenkov et al. / Applied Surface Science 353 (2015) 793803

the operating temperature on the sensor responses is shown in gold is slightly decreased (see Figs. 6 and 7). Such behavior can have
Figs. 8b and 9b. The results presented in Figs. 69 correspond to the following explanations: (1) because of their large size, most of
operating temperatures at which there is a maximum of sensor the gold particles on the SnO2 surface are neutral due to the lack
response. It is observed that the maximum response to reduc- of electron exchange with support; (2) the negative charge trans-
ing gases takes place at Toper of 450 C, whereas the maximum ferred from the metal oxide to gold is less than the negative charge
response to ozone is observed at Toper of 280 C. Such a major dif- captured by the species on the free SnO2 surface at the area equiva-
ference in the behavior of the sensor responses to reducing and oxi- lent to the area of the gold particles; and (3) the appearance of gold
dizing gases is typical for metal oxide sensors and can be explained nanoparticles on the surface of the SnO2 crystallites is accompanied
by a difference in the reactivity of the tested gases [10,15,36,46]. by a decrease in the chemisorbed oxygen concentration.
To eliminate the side effects of treatments used during SILD of Figs. 69 also demonstrate that the gold nanoparticles deposited
AuNPs on the sensor parameters, we performed additional experi- on the SnO2 surface are active to both reducing and oxidizing
ments with the studied samples; tested sensors were subjected to gases (Figs. 8a and 9a). However, the increase in sensor response to
the same treatments as they were during gold deposition, except reducing gases is not signicant (see Fig. 8a). In principle, a strong
that the treatment in an aqueous solution of HAuCl4 was replaced increase in sensitivity to reducing gases was not expected because
by washing with water. In Figs. 69, 0 deposition cycles cor- thin lms, especially those formed by thin-lm technology due to
responds to this treatment. This exact state was considered as a the peculiarities of the morphology, are not optimal for detecting
reference point for the analysis of the inuence of gold deposition such gases [49]. Films formed using thin-lm technology are usu-
on the properties of the SnO2 lms. 0.5 deposition cycles corre- ally characterized by lower porosity, a lack of necks, a larger area
sponds to the treatment when the processing time in the HAuCl4 of intergrain contacts, and an increased size of the crystallites rel-
and NaBH4 water solutions was reduced two times in comparison ative to gas sensing material prepared using thick-lm technology
with the time of treatments used in all of the other experiments. [53]. In addition, due to the factors indicated above, the maximum
Initial in Figs. 69 corresponds to the parameters of the SnO2 sensitivity of sensors based on such lms as a rule is shifted to
gas sensors before any surface treatment. Detailed analysis of SnO2 higher temperatures in comparison to sensors fabricated by thick-
gas sensor parameters with an unmodied surface can be found in lm technology. An essential point in the obtained results was that
previously published articles [3436,4649]. the increase in sensitivity was observed relative to both CO and
Analysis of the results presented in Figs. 68 establishes that H2 (see Fig. 8a). At the same time, a signicant increase in the
the treatment with 0 deposition cycles, unlike other treatments response of SnO2 :Au-based sensors to ozone was unexpected. As
accompanied by deposition of gold, increases the lm resistance shown in Fig. 9a, the growth of sensor response to ozone may be as
(Figs. 6 and 7) and reduces the sensor response to reducing gases large as two orders of magnitude. The sensitization to ozone leads
(Fig. 8) relative to the initial unmodied samples. Unfortunately, we to the conclusion that the eld of using surface modications by
do not know the real cause of the increase in the resistance after gold should not be limited to optimization of CO sensor parame-
the 0 deposition cycle treatment because this treatment included ters [14]. These results along with data given by Krivetskiy et al. [15]
washing with distilled water, treatment with a water solution of indicate that modication by gold can also be effective in the devel-
NaBH4 , washing again with distilled water and annealing at 450 C. opment of SnO2 -based sensors of ozone, acetone vapors, hydrogen,
Perhaps changes in the surface state of SnO2 lms occurred during and so forth. Regarding NO2 sensors, more research is needed
partial surface reduction after treatment with a water solution of because studies presented in Refs. [15,53,54] gave inconsistent
the treatment NaBH4 and subsequent thermal reoxidation during results.
annealing. However, such changes in SnO2 sample properties after Furthermore, the results presented in Figs. 8 and 9 have shown
the 0 deposition cycle treatment, suggests that the increase in that the effect of SnO2 surface decoration by AuNPs on gas sensing
sensor response and the decrease in the lm resistance observed for characteristics depends on the number of deposition cycles (i.e.,
tested SnO2 :Au samples after surface modication by gold clusters the size of the gold particles; see Figs. 8a and 9a). Thus, as in the
associated with the appearance of AuNPs on the SnO2 surface. case of surface modication by noble metals such as Pd and Pt
There is an assumption that the active (i.e., the smallest) Au [13], there is an optimal level of surface doping, and this level
nanoparticles are negatively charged through electron donation of doping corresponds to a very low degree of surface coverage. As
from the conduction band of metal oxides. This assumption is seen in Figs. 8 and 9, the maximum sensor response is observed for
based on the experimentally established fact that gold atoms pre- the samples corresponding to the 0.5 deposition cycle, for which
fer to bind to the site of oxygen vacancies (VO ) [50]. It is also the presence of gold nanoparticles on SEM images has not been
based on the results of theoretical studies [51] showing that gold observed. However, XPS studies indicated the presence of gold on
atoms can take electrons from VO . This assumption is important the surface of these samples (see Fig. 4). This signies that gold is
because the presence of a negative charge on the gold nanopar- responsible for the observed effect and that atomically dispersed
ticles promotes either the activation or dissociation of molecular gold or gold nanoparticles with a size not exceeding the resolution
oxygen and thus stimulates the oxidation of CO, 2 , alcohol, and of microscopes are the most active in gas sensing effects. The reso-
so forth. The same conclusion was made by Tsunoyama et al. lution of the microscope used in the present studies was 23 nm.
[52] regarding the Au:(poly(N-vinyl-2-pyrrolidone)-based catalyst. This is consistent with data obtained for heterogeneous catalysis
Moreover, they found that the catalytic activity was enhanced with [7,8], where the most catalytically active clusters had a size of
increasing electron density on the Au core. In addition, the same 2.53.0 nm. However, one should note that a further increase of
studies [51] conducted on TiO2 samples have shown that charge deposition cycles, in which the gold nanoparticles appear on the
transfer is only possible for small clusters, such as Au1 , Au3 , Au5 SEM images and their size reaches 610 nm or more [37], is not
and Au7 and for certain Au strips on the surface. This behavior pro- accompanied by a sharp drop in sensor response, which should
vides a basis for the conclusion that the interaction of the large gold occur if the effect of the gold particles size on the catalytic activity
particles with the substrate is not as strong as that of the small is taken into account [7,8]. This result suggests that small parti-
clusters. cles can form on the surface of SnO2 rather than exclusively after
As is known, electron transfer on gold nanoparticles should be the rst deposition cycles and that the gas-sensitive effect involves
accompanied by the formation of depletion zones under the parti- not only small but also large particles. This conclusion is consistent
cles and an increase in metal oxide resistance. However, this effect with ndings made by Carabineiro and Thompson [55], who found
is not observed. Moreover, the resistance of the lm modied by that gold-based catalysts are the most active in the 25 nm gold
G. Korotcenkov et al. / Applied Surface Science 353 (2015) 793803 799

particle range, but that smaller and larger gold particles also have
activity and may play signicant roles.
It is important to note that surface modication by the gold
nanoparticles inuences the SnO2 lm conductivity measured in
the air without the addition of any target gas (Figs. 6 and 7). More-
over, for reducing gases, the lm resistance and sensor response
have identical dependences on the number of deposition cycles
(see Figs. 6 and 8). This suggests that most likely the same processes
are responsible for the increase in the conductivity of the SnO2 :Au
lms measured in the air without the addition of target gas and
for the growth of sensor response to reducing gases. As indicated
above, the gold particles formed on the surface of already deposited
SnO2 lms, and therefore AuNCs could not affect the bulk proper-
ties of the lms or their structure. This means that the gold particles Fig. 10. Inuence of the number of deposition cycles on the recovery time of
could only affect the processes having a surface nature. Analysis SnO2 :Au sensors after interacting with ozone.
of such processes suggests that the back spillover of chemisorbed
oxygen, which is intensied in the presence of reducing gases, is
the most likely process, which may explain the observed behavior
of both conductivity and sensor response in the presence of gold surface modication by gold. Low temperature sensitivity to CO
nanoparticles (see Section 3.4). was observed only for sensors that were not subjected to stabiliza-
The absence of a shift in the response maximum in the lower tion annealing [61] or stabilized at temperatures below 200 C [12].
temperature range for the SnO2 sensors with a modied surface is Low temperature sensitivity to CO was also observed by Ramgir
another important result of the present study. The maximum sen- et al. [62], who reported that the SnO2 :Au lms used in gas sensors
sor response for the modied and unmodied SnO2 :Au samples were deposited by spray pyrolysis at Tspray = 450 C. However, in
was observed at the same temperatures (Figs. 8b and 9b). From our this case, we doubt that the temperature was correct because spray
point of view, the absence of a shift of the sensor response max- pyrolysis is accompanied by strong cooling of the substrate [63]. For
imum in the range of lower temperatures is quite natural for the a prolonged spray pyrolysis, the temperature of the substrate can
studied samples, because after the heat treatments used during gas be decreased by several hundred degrees. This situation appears
sensor fabrication, (i) the coalescence of most catalytically active to have occurred in the experiments of Ramgir et al. [62], evi-
small gold particles with the formation of larger but less active par- denced by the unusual morphology of the SnO2 :Au layers studied
ticles takes place [47], and (ii) gold transforms to a metallic state [62].
(see Section 3.2) in which gold does not show increased catalytic Fig. 10 presents results related to the effect of surface modica-
activity in low temperature range [44,56]. The increased size of the tion on the recovery time of the sensor resistance after interacting
SnO2 crystallites and the large distance between gold particles can with ozone. It is observed that surface modication by gold is
also contribute to the observed behavior of S = f(Toper ) dependence. accompanied by a decrease in the recovery time ( rec ) to the initial
As seen in the SEM images (Fig. 1), the 2050 nm SnO2 crystallites state of the SnO2 :Au sensors after interacting with ozone. It should
only have 12 gold nanoparticles on their surface. However, when be noted that this is an important effect because a long recovery
the distance between the gold particles is too big, a signicant gas time is one of the major disadvantages of SnO2 -based ozone sen-
sensing effect requires high temperature to provide high mobility sors [63]. As shown in Fig. 10, the maximum effect of  rec reduction
of the surface species participating in the detection reactions (see was observed for the samples prepared using the maximum num-
Section 3.4). Otherwise, the area of spillover zones around the gold ber of gold deposition cycles. Regarding the nature of this effect, one
particles is not sufcient for effective inuence of the gold particles can then suggest the following mechanism: Because the recovery
on the gas sensing properties of the SnO2 lms. Regarding crys- time in the case of ozone detection is determined by the lifetime of
tallite size, it is necessary to note that, according to Ref. [16], the chemisorbed atomic oxygen remaining on the metal oxide surface
achievement of high AuNPs reactivity at low temperature requires after interacting with ozone [63], we presume that gold stimulates
that metal oxide crystallites not exceed 56 nm. This statement is reactions that reduce this time. Reverse oxygen spillover and disso-
justied because oxides with such small crystallite size perform ciative adsorption of water, carbon dioxide or hydrogen presenting
chemistry that is different than the chemistry of the same mate- in the atmosphere and interacting with chemisorbed oxygen pre-
rials with larger crystallites. For example, the smaller metal oxide sented on the SnO2 surface are examples of such reactions. The
nanoparticles with a spherulite shape may supply more active sites decreased recovery time with an increasing number of deposi-
and contribute to the strong interaction between gold and the tion cycles agrees with this hypothesis because the increase in
nanocrystalline metal oxide. Unfortunately, forming porous metal the size of the clusters and their number should decrease the dis-
oxides with such small crystallite size using thin-lm technology tance between the clusters and should thus increase the role of the
is quite a difcult task [48,49]. As shown in Ref. [35], crystallites in spillover effect in the gas sensing phenomenon. It is clear that more
lms deposited on a heated substrate using thin-lm technologies specic statements will require more research.
have a size that is proportional to the lm thickness. While analyzing the kinetics of the detection of reducing gases,
It should be noted that the absence of a signicant shift in the no positive effects from the surface modication by gold were
sensor response maximum of the SnO2 :Au-based sensors in the observed. In the range of operating temperatures between 300 C
low-temperature range that is characteristic of the current exper- and 400 C, surface modication by gold nanoparticles did not prac-
iments is also typical of almost all such studies [10,11,54,5760]. tically affect the kinetics of sensor response. We presume that
Almost all these studies were aimed at the development of sensors such a situation exists because the kinetics of the SnO2 :Au gas
suitable for the sensor market, and therefore heat treatment at sensor response is controlled by adsorption/desorption processes
Tan 400 C was used in the fabrication technology. Such treatment taking place at the surface of SnO2 without participation of the gold
is necessary for the sensor parameter stabilization. It is important nanoparticles, which is quite probable assuming that the kinetics
that the absence of a temperature shift of the sensor response of the sensor response are controlled by adsorption/desorption of
maximum was observed regardless of the method used for the oxygen and water on the SnO2 surface. Earlier in Refs. [64,65], this
800 G. Korotcenkov et al. / Applied Surface Science 353 (2015) 793803

conclusion was conrmed for SnO2 -based sensors with unmodied primary role in the sensitization of SnO2 :Au-based gas sensors. At
surfaces. the same time, Hubner et al. [11], studying SnO2 :Au-based gas sen-
sors fabricated using the gel impregnation method, believed that
3.4. Sensitization mechanism in the SnO2 :Au-based gas sensor there is no electronic interaction between the gold nanoparticles
and host oxide and that the sensitization effect of Au during CO and
Taking into account the close relationship of the gas sensi- H2 detection can be attributed to the spillover effect. According
tive effect observed in conductometric sensors with heterogeneous to this model, the Au particles enrich the surface of the active metal
catalysis [66], one can state that the increased sensor response oxide with oxygen species, which subsequently react with reduc-
is conditioned by the appearance of the catalytically active gold ing gases such as CO and H2 . This statement is based on the fact that
nanoparticles on the SnO2 surface, which participate in a vari- the addition of gold during SnO2 synthesis was accompanied by an
ety of reactions on the surface involved in sensor response, for increase in the lm resistance. However, it is known that molec-
example such as the oxidation of CO and H2 . In Section 3.2, it was ular oxygen does not chemisorb dissociatively onto a gold surface
shown that SnO2 surface at room temperature is contaminated with within the temperature range of 25500 C [73,74]. This eliminates
carbon. However, we did not consider the inuence of this contam- the increase in the concentration of chemisorbed oxygen on the
ination on gas sensing properties of SnO2 :Au. During the surface surface of metal oxide due to oxygen spillover effects. In addition,
modication experiments of SnO2 with gold, we did not observe the experiment showed that the gold additive signicantly modi-
any correlation between concentration of carbon on the surface es the conditions of SnO2 synthesis and thus has a signicant effect
measured at room temperature, and gas sensing properties. The on crystallite properties, such as the size, shape, and lm morphol-
concentration of carbon remained almost unchanged. However, a ogy [10,15,62]. From our point of view, these precise changes may
clear correlation between the concentration of gold on the surface be the reason for the increased resistance observed in [13]. In the
and gas sensing effects was detected. In addition, it was established present study, the effect of gold on the structural properties of the
that at increased temperature and in an ozone-rich atmosphere, SnO2 lm is excluded because the gold deposition was conducted
this concentration strongly decreases [67]. It has been suggested on an already formed lm. This means that gold could not inu-
that the decrease in the concentration of carbon is due to the ence the structure of the lm, and, therefore, changes observed in
oxidation reaction that occurs with participation of chemisorbed the gas sensing properties had a purely surface nature. Moreover,
oxygen and are accompanied by desorption of CO or CO2 . For the data obtained (see Figs. 6 and 7) indicate that the resistance
example Cataldo [68] showed that graphite nanoparticles react of the SnO2 lm after modication by gold decreases. This sug-
with O3 already at room temperature with evolution of CO2 . Such gests that in the temperature range used there is a reduction in
behavior of surface carbon explains why carbon has a low inu- the chemisorbed oxygen concentration on the surface of SnO2 :Au
ence on gas sensing effects measured at temperatures higher than crystallites but not its growth. This means that, in such a situation,
180200 C. At these temperatures, highly reactive chemisorbed oxygen back spillover is more likely than the direct spillover effect
oxygen appears at the surface of metal oxides. Because of this, considered in [11]. However, at the same time, one can agree with
our attention was focused on gold nanoparticles. In addition, the Hubner et al. [11] that, during the detection of reducing gases, there
inclusion of carbon in our model may further complicate the con- is no change in the chemical state of Au. As shown in Section 3.2,
sideration of gas sensing properties of SnO2 :Au, that even without gold particles are already metallic in the initial state and there-
carbon is rather complicated. fore this state cannot change in a reducing atmosphere. This means
It is known that the increased sensor response should only be that the chemical mechanism seems preferable for the detection
observed in the case when electron transfer between surface cata- of reducing gases. Certainly, one can agree with statements made
lysts and metal oxide accompanies this catalytic reaction [66,69]. In in numerous papers [11,61,75] that the processes responsible for
Ref. [6], based on the obtained data, H2 oxidation with the partici- improvement in the sensor response of SnO2 :Au-based devices to
pation of Au/MeOx -based catalysts was presumed to occur without reducing gases take place at the periphery around the gold particles
electron transfer, whereas the oxidation of CO with electron trans- (i.e., at the perimeter interface between the gold particle and the
fer is possible according to Ref. [39]. It appears from these studies metal oxide support, whereas oxygen species participating in oxi-
that during CO and H2 detection, a signicant difference in sen- dation reactions responsible for gas sensing effects are provided by
sor parameters should be observed. However, in the present study, the support (see Fig. 11a). It should be noted that the statements
any essential difference in the behavior of the gas sensing charac- made above correlate with results discussed in the previous sec-
teristics of the SnO2 Au sensors during CO and H2 detection were tion, where it was determined that the sensor response is largely
not observed (see Fig. 6). On the basis of this fact, one can assume controlled by processes occurring at the free surface of the SnO2
that for the studied SnO2 Au system, the mechanisms of the sensor crystallites.
response increase, observed during the detection of reducing gases With regard to ozone detection, from our point of view, the
CO and H2 , are the same, at least at elevated temperatures. electronic mechanism is thus the most preferred for explaining
It should be noted that at present there is no consensus the observed effects. This mechanism is associated with oxidation
regarding the mechanism of gold nanoparticles participation in of gold in the ozone atmosphere and a corresponding increase in the
gas sensing effects. Therefore, both electronic and chemical work function (see Fig. 11b). This should encourage the transition
[1,2,66,69] mechanisms of sensitization can be found in explana- of electrons from the metal oxide on the cluster and thus promote
tions proposed by various authors who studied gas-sensing effects an increase in the resistance of the metal oxide lm. As shown by
in AuMeOx -based sensors. For example, Rogers et al. [70], analyz- Miller et al. [76], small gold particles can be oxidized quite eas-
ing optical properties of AuYSZ lms, came to the conclusion that ily, whereas big clusters do not have such capability. Experiments
between AuNPs and YSZ at T = 500 C, charge transfer takes place, have shown that a metallic gold lm on TiO2 is stable toward heat-
and the gas surrounding (CO, H2 , and O2 ) inuences this process. ing in an oxygen atmosphere. However, Venkov et al. [77] have
However, it is not clear what the reason for this charge transfer, and established that, in a NO + O2 gas mixture, metallic gold on the
does this process take place at the Au surface or in the bulk of YSZ TiO2 surface is oxidized even at 573 K. The formation of a stable
(redox)? In Refs. [57,71,72], it was also noted that, due to a charge gold oxide, Au2 O3 , after treatment in oxygen d.c. plasma was also
transfer between the gold nanoparticles and SnO2 , the depletion reported by Pireaux et al. [78] and Tsai et al. [79]. This oxide state of
area is formed around gold nanoparticles on the surface of SnO2 Au corresponds to a formal state 3+. This means that Au oxidation
nanobelts. In addition, it was concluded that this effect plays the or at least signicant oxygen chemisorption on the gold surface in
G. Korotcenkov et al. / Applied Surface Science 353 (2015) 793803 801

Fig. 11. Schematic diagram illustrating mechanisms of AuNP inuence on the gas sensing characteristics of SnO2 :Au lms in the case of (a) reducing gases (CO, H2 ) and (b)
oxidizing gases (O3 ): (a) adsorption of reducing gases, back spillover of chemisorbed oxygen and reaction of these species at the periphery of gold nanoparticles as the main
processes controlling reducing gas detection. (b) In the case of ozone, the mechanism of detection includes two processes: (1) oxidation/reduction of gold nanoparticles,
which is accompanied by electron transfer between SnO2 and gold nanoparticles, and (2) dissociative adsorption of ozone with following spillover of chemisorbed oxygen.

the atmosphere of a strong oxidizing gas such as ozone (O3 + O2 ) surface decoration by AuNPs on the gas sensing characteristics also
is possible. In particular, it is known that gold is reactive enough depends on the number of deposition cycles (i.e., the size of the
to catalyze surface reactions, such as ozone dissociation [80]. The gold particles). The maximum effect is observed with the smallest
results obtained by Saliba et al. [81], Puckett et al. [82], Biener et al. size gold nanoparticles. Sensitization to O3 and H2 suggests that
[83], and King [84] also indicate an interaction of gold nanoparti- applications of the gold surface modication in the eld of gas
cles with ozone. For example, King [84] found that gold surfaces sensor design should not be limited to the optimization of the CO
were oxidized by a combination of UV light and ozone generated sensor parameters.
from a mercury lamp, and after such treatment, the gold surfaces Models showing the promotional role of Au additives were also
were enriched in oxygen. According to King [84], the oxide layer discussed, and a mechanism of sensitization in the SnO2 :Au-based
was found to be 1.7 nm thick. Saliba et al. [81] also established gas sensor was proposed. Based on the results obtained, it was
that, after interaction with ozone, the Au(1 1 1) surface was cov- assumed that (1) during interaction with reducing gases, gold does
ered by chemisorbed oxygen, and an electron transfer took place not change its chemical state (i.e., AuNCs remain in a metallic
from the Au substrate to the oxygen adlayer, induced by the change state); (2) processes that are responsible for improving the sen-
of the work function up to 0.80 eV. The change in the work func- sor response occur at the periphery around the Au nanoparticles;
tion of the Au surface after UV/ozone treatment was also observed and (3) oxygen back spillover is more likely than is a direct spillover
by Suzue et al. [85]. They found that the work function changed at effect. With regard to the detection of ozone, it was concluded that
0.55 eV. Here, it should be noted that this state is stable because the an electronic mechanism, which is associated with the oxidation
chemisorbed oxygen species could be removed from the gold sur- of gold nanoparticles in ozone atmosphere, and the increase of the
face only by heating the surface to temperatures of 600 K (375 C). work function seem to be preferred. The increase of the work func-
For comparison, as mentioned above, dissociative O2 adsorption on tion should stimulate the transition of electrons from the metal
the Au surface was observed only at temperatures exceeding 500 C oxide to the gold particles and thus increase the resistance of the
[73,74]. metal oxide lm.
However, taking into account the inuence of gold particles on However, the same analysis also conrms that our knowledge of
the magnitude of sensor response to ozone, it must be recognized the processes taking place in the AuSnO2 system is rather limited
that due to the small area of the gold nanoparticles on the surface and that to extend this fundamental understanding, additional
of the SnO2 crystallites, the electronic mechanism of sensitiza- research is required. The SILD technology analyzed in this paper
tion can hardly explain such a strong increase in sensor response. also requires further development and optimization. In particular,
It appears in this case that a combined mechanism works when from our point of view, it is necessary to nd criteria that allow an
the oxidation/reduction of the gold nanoparticles is accompanied increase in the number of gold nanoparticles of the required size
by a spillover of chemisorbed oxygen, which is formed at the sur- formed on the surface of metal oxide crystallites (i.e., increasing
face of the gold clusters as a result of the dissociative adsorption of the density of their distribution and decreasing the inter-particles
ozone [80,81]. The spillover effect in this case stimulates electronic distance). It is also important to elucidate the role of the size of the
exchange between SnO2 and the gold particles and also provides SnO2 crystallites in gas-sensitive effects involving gold nanoparti-
growth of the concentration of chemisorbed oxygen on the SnO2 cles.
surface. In other words, the spillover effect, which occurs during the
interaction with ozone, promotes the growth of a negative charge
captured by a surface species and thus contributes to the increase in Acknowledgments
band bending and the increased resistance of polycrystalline SnO2
lms. This work was supported by National Research Foundation
(NRF) grants funded by the Korean government (Nos. 2011-
0028736 and 2013-K000315), by the Basic Science Research
4. Conclusions Program through the NRF funded by the Ministry of Science, ICT
and Future Planning of Korea (2012-R1A1A2041564), by the Rus-
The results presented in this study demonstrate that successive sian Foundation for Basic Research (Grant No. 15-03-08045A), and
ionic layer deposition (SILD) technology for gold nanoparticle for- by the Moldova Government under grant 15.817.02.29F and ASM-
mation can be used for surface functionalization of SnO2 lms to STCU project #5937. The authors are also thankful to Dr. X.Y. Chen
improve their gas sensing properties. It was found that the size of and Prof. J. Schwank from the University of Michigan, USA for help
the gold particles varies in the range of 150 nm depending on the in SnO2 :Au lm characterization and Prof. V.P. Tolstoy from St.
number of SILD cycles. It is established that the gold nanoparticles Petersburg State University, Russia, for participation in the design
deposited on the SnO2 surface are active to both reducing (CO of the SILD technology used for SnO2 surface modication by gold
and H2 ) and oxidizing (O3 ) gases and that the effect of the SnO2 nanoparticles.
802 G. Korotcenkov et al. / Applied Surface Science 353 (2015) 793803

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