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KOBELCO’s Global Network

KCS Europe GmbH KOBELCO Advanced Coating (America), Inc


・European representative of Kobe Steel, Ltd. ・Turn-key toll coating service
・PVD demonstration and coating center ・High performance PVD thin films named BELCOAT® series

■ Office : Am Handwerkerzentrum 6, 52156 Monschau, Germany ■ Office : 1007 Commerce Ct.Buffalo Grove, IL 60089
■ Phone : +49-2472-97032-0 ■ Phone : +1-847-520-6000
■ Fax : +49-2472-97032-29 ■ Fax : +1-847-520-6222
■ email : info@KCS-Europe.com ■ email : contact@kobac-us.com
■ URL : http://www.kcs-europe.com/ ■ URL : http://www.kobac-us.com/index.html

KOBELCO PVD COATING Systems

Scope of KOBELCO’s Business Activities


A broad array of business activities are conducted under the KOBELCO brand. With these activities, the Kobe Steel Group
aims to contribute to society in many different fields, including iron and steel, welding,aluminum and copper, industrial and
construction machinery, natural resources and engineering, environmental solutions, wholesale power supply, real estate
and electronic materials.

Other Iron & Steel


Businesses Business

Profile of Kobe Steel, Ltd.


■ Company Name Kobe Steel, Ltd. Welding
Kobelco
Cranes Business
■ Group Brand
Kobelco Aluminum
■ Founded September 1,1905 Construction & Copper
Machinery Kobelco Business
(incorporated on June 28,1911)
Eco-
■ Capital 233,313,248,065 yen Solutions Engineering
(as of March 31,2013)
Business Machinery
Business
■ President & CEO Hiroya Kawasaki
■ Number of Employees 10,398
(nonconsolidated, as of March 31,2013) Machinery Business
36,018 Industrial Machinery
(consolidated, as of March 31,2013) Compressors
Energy & Nuclear Equipment

Advanced Products & Technology Dept.


Tokyo Office
Tel:81-3-5739-6761 Fax:81-3-5739-6990
9-12,5-chome,Kitashinagawa,Shinagawa-ku, Tokyo, 141-8688 JAPAN
Takasago Office
Tel:81-79-445-7784 Fax:81-79-445-7787
3-1, 2-chome, Shinhama, Arai-cho, Takasago, Hyogo 676-8670 JAPAN
URL http://www.kobelco.co.jp/pvd /en /
E-Mail pvd@kobelco.com
1507100-PR-J
Introduction KOBELCO Technology
The Kobe Steel Group operates in a wide range of fields that contribute to the very foundation of society, including both
the materials sector and the machinery sector.
CVD
As a key division of Kobe Steel’s machinery business, we have been designing, manufacturing and selling AIPsystems, a Vapor Deposition
type of PVD equipment, since 1986. We have developed standard batch systems, in-line systems, and special coating
Thermal Light Plasma
systems for piston rings, etc. Kobe Steel has also developed coating technologies for a number of different applications.
PVD CVD CVD CVD
In 1998 the company started to sell UBMS systems and expanded PVD system applications.
As of August, 2011, we have manufactured 500 units worldwide.

Vacuum Deposition Cathodic Arc Sputtering


Advantages of Coating Equipment
Effect of Surface Treatment Arc lon plating UBM Sputtering
(1986~) (1998~)
Improvement of
• Wear resistance
• Oxidation Resistance
• Lubricity UnBalanced Magnetron
Arc Ion Plating Sputtering
• Surface Roughness
AIPTM--Registered name of Kobe Steel LTD. AIPTM UBMSTM is also registered name of Kobe Steel LTD.
S-series are mounted plasma enhanced cathodes We have made remarkable improvements to the
which provide innovative technologies. Extremely adhesion force of DLC film for any application.
smooth surface is successfully created without Contributing not only to diversifying DLC
jeopardizing deposition rate. applications but also to the development of other
Cutting Tools Machine Components Dies and Molds films available by UBMSTM.
• Improvement of tool life Improvement of Improvement of
• Higher cutting speed • Sliding characteristics • Life of die
• Dry cutting • Wear resistance • Sliding characteristics
• Release properties Effect of KOBELCO PVD Coating
Life Expansion of Reduction of
Higher productivity Cold Working Punches Wear of WC endmill
Higher quality production
100 100
More ecological production

Number of Workpieces (a.u.)


Reduced
100 100 by a third
3 2 80 80

Flank Wear (a.u.)


10 times
PVD coating constitutes approx. 40% of coated tools! increased
5 60 60
8 66
39
PVD Uncoated 40 40
24
Nanostructured Diamond
20 20
19 CVD DLC
% 10
Other 00 00
Uncoated AIP TiN Uncoated AIP TiN

01 02
Why KOBELCO? High-Temp Pre-Heating & Substrate Temperature Control
Easy-Handling KOBELCO machine can pre-heat substrates to high temperatures in order to improve adhesion and film properties.
Also, KOBELCO machines can control substrate temperatures in 3 zones: upper/middle/lower zone.
Our machine has a highly advanced automatic operation system and control system monitors, which enable the
following:
• User-friendly operation Upper
• Highly reliable and reproducible operation

Temperature
• Whole operation is done by just pressing “START” button.
• Parameters can be easily and flexibly modified. Middle
• Operation and measured process parameters are automatically saved.

Lower
Display showing coating

Display showing Time


evacuation
Online Support System
Kobelco’s internet support system monitors and provides online help for on-site AIP or UBMS equipment. Remote
diagnostics for troubleshooting, and downloadable modifications are possible.

INTERNET

KOBELCO SIDE CUSTOMER SIDE

Display for setting KOBELCO’ s Customer


parameters LAN LAN
system system

Easy-Maintenance HUB

Convenient KOBELCO design with wide-opening twin doors granting easy access for substrate loading, target
changing, and overall ease of maintenance.

Easy access to the cathodes and other parts mounted on the machine.
PVD
Machine

Reliability
Since 1986, more than 200 industry leading companies have operated KOBELCO coating systems in-house to
enhance their product lines. Contact a representative for more information, today!

03 04
Arc Ion Plating Machine Lineup

AIP-S20 AIP-S40 AIP-S70


Features of AIPTM
1. Droplets, a major defect of Cathodic arc deposition, are successfully minimized by AIPTM.
2. Thick & dense film with extremely smooth surface
3. High deposition rate by high energy density & high ionization
4. Multi-layer films & multi process films are possible

Fine Cathode Normal Cathode


Φ450×H400mm or Φ700×H700mm or
Plasma Enhanced Cathode Conventional Cathode Recommended Loading Space Φ220×H120mm Φ130×H400mm × 6-Spindles Φ130×H700mm × 12-Spindles

Arc Evaporation Source 1 to 3 6 to 12 8 to 16


coating coating

Substrate Table Multi Spindles planetary 6-Spindles planetary rotary table 12-Spindles planetary rotary table

WC-Co WC-Co

AIPTM Systems for Special Use


Work Work
pieces pieces

Plasma Plasma AIPTM In-Line Coating System

/ for continuous medium lot production


/ Typical Coating: TiN, TiCN, TiAlN, CrN
etc. /
Effect of Fine Cathode

Turning Test Milling Test


30 100

25 80 PVD Coater for Piston Rings


Cutting Length [m]

Flank Wear (µm)

20
60
PVD coater with a new type cathode
15
40
Commercial Coated Insert
/ Typical Coating: CrN based coatings
10 Insert Coated by KOBELCO
20
05
00
00
Commercial TiAIN KSL TiAIN
00 20 40
Cutting Length (m)
60 80 100 Latest Design
Material: Carbide, Work Piece: AISI 316, Material: Carbide, Workpiece: AISI A48-94a,
Cutting Speed: 270 [m/min], Coolant: Wet Cutting speed: 220 [m/min], Coolant: Dry,

05 06
BELCOAT® – by AIP Lineup of BELCOAT® by AIP
BELCOAT ® series has a variety of films, enabling customers to find optimal films for their purposes.
KOBELCO’s BELCOAT ® series by AIP has been providing efficient and high performance films to customers all over
Name Color Film Hardness Oxidation Coef. Thickness Typical Application
the world. Si and Y, which are known to be effective in oxidation resistance, are added to our TiAlCrN based films. Fric
(Hv) (GPa) ( c) (µm)
These films have proven extremely suitable for high speed dry machining because of its high oxidation resistance and
BELCOAT TiN 2,200 22 600 0.5 1-4 General wear resistance, wet machining
hardness. G
Workpiece BELCOAT TiCN 2,800 27 400 0.4 2-4 General wear resistance, drilling
hardness R1
(with topcoat)

Nano multilayer coatings


BELCOAT BELCOAT TiCN 2,800 27 400 0.4 2-4 General wear resistance, drilling
NS/R Si added R2
(without topcoat)

BELCOAT BELCOAT TiAIN 2,800 27 800 0.5 1-4 General dry machining, inserts
VS
BELCOAT
High AI added V
SDG
BELCOAT AITiN 3,000 29 900 0.5 1-4 High speed dry machining

BELCOAT VS
V
BELCOAT
BELCOAT AITiN 3,000 29 950 0.5 1-4 High speed dry machining

SD
AI cotanig VB
BELCOAT CrN 1,800 18 700 0.4 1-5 Mold and Dies, Cu machining, tribological
components
SG
TiN based BELCOAT CrN multilayer 2,600 25 1,000 0.4 1-5 Cu machining
BELCOAT BELCOAT
R G SM
BELCOAT Si added TiCrAIN 3,500 34 1,100 0.5 5-10 Cold stamping mold
bilayer
SS/S
Ferrous Non-coat Si added TiCrAIN
material BELCOAT 3,500 34 1,100 0.5 15-20 Hot forging mold
bilayer
Cutting speed SS/HF
CrN/ TiCrAIN bilayer
BELCOAT 3,500 34 1,000 0.4 2-4 Wet to semi-dry machining (mainly hobs)

SS/B
TiCrAIN
BELCOAT 3,500 34 1,000 0.4 1-4 General machine substitute to TiAIN

SD
Milling Test Hob Test BELCOAT TICrAISiN
3,600 35 1,100 0.5 1-4 Semi-dry to dry machining(mainly end mills)

SDG
1000 0.25 Si added TiCrAIN
BELCOAT 3,600 35 1,100 0.5 1-4 Semi-dry to dry machining(mainly hobs)
bilayer
MAX.Flank Wear (µm)

SDG/S
800 0.2
Flank Wear (µm)

Si added TiCrAIN
BELCOAT 3,600 35 1,100 0.5 1-4 Semi-dry to dry machining(mainly end mills)
bilayer
SDG/H
600 0.15 BELCOAT Rare earth added
3,600 35 1,200 0.5 1-4 High speed dry machining of hardened die
TiAICrN
TiCrAIN multilayer steel, Ti (dry), inconel,Waspaloy
TiAICrSiYN SDG/MR
400 0.1 BELCOAT Rare earth added 3,600 35 1,200 0.5 1-4 Dry machining (mainly hobs)
TiCrAIN bilayer
NS/R
200 0.05 BELCOAT
Rare earth added
3,000 29 1,000 0.4 1-4 Drilling of carbon steel
TiCrAIN multilayer
NS/MR
00 00 BELCOAT Modified AITiN
2,800 27 600 0.4 1-4 Ti machining (wet to dry)
multilayer
00 20 40 60 80 Commercial Commercial Si & Y added TI1
TiAIN Oxide TiAICrN
Machining Length [m] BELCOAT Modified CrN multilayer
2,500 25 600 0.4 1-4 Ti machining (wet to dry)
Tool: Ball-nose endmill (C-2SB), Workpiece: D2, Tool: HSS hob, Workpiece: AISI 4150, TI2
Axial depth: 4.5 mm, Feed: 0.04 mm/flute Machining speed: 250 m/min,
TiCrAIN multilayer
Machining speed: 150m/min, Radial: 0.2 mm Feed: 2.4 mm/tooth, Lubrication: DRY BELCOAT 3,000 29 1,000 0.5 1-4 Turning of carbon steel (small tool)

Lubrication :DRY SMH

07 08
Coating Guide for Cutting Tools New Technology
Recently we have launched the SFC (Super Fine Cathode), a newly developed cathode which has advantages due to
tuning the magnetic field around the cathode.
Drill End Mill Hob Insert
Material Coolant Carbide Carbide HSS Turning Milling ● Residual stress is adjustable by substrate bias while   
5
Carbon Steel, Dry VS/MR,SDG/V SD NS/R VS,VB VS,VB   covering all range of existing AIPTM cathodes.
Alloyed Steel Wet VS/MR,SDG/V SD SS/B,SDG/S,-/H SMH VS,VB ● Thick coatings (up to 20 µm) with low internal stress is  

Film Stress(-GPa)
  possible
Hardened die Dry SDG/S,NS/R SDG/S,NS/R VS,VB VS,VB
● Boltless structure enables to change targets with     
steel (>HRC52) Wet SD SD VS,VB VS,VB
  one-touch operation
Hardened die Dry SDG/MR SDG/MR VS,VB VS,VB ● Productivity is increased by improvement of yield rate of  
Super Fine Cathode
steel (>HRC52) Wet SD SD VS,VB VS,VB   target (20 % up)
Fine Cathode

Stainless steel Dry VS,VB VS,VB VS,VB VS,VB


Wet VS,VB VS,VB VS,VB VS,VB
0 200
Cast iron Dry - - VS,VB VS,VB BIAS Voltage(-V)

Wet VS,VB VS,VB VS,VB VS,VB Comparison of AIP-Cathodes - Plasma range extended by SFC
Nickel alloy Wet SDG/MR SDG/MR SDG/MR SDG/MR
Titanium alloy Ti1,TI2 TI1,TI2 TI1,TI2 TI1,TI2 Fine Cathode Super Fine Cathode

Copper SG,SM Work Work


pieces pieces
Aluminum UB(DLC) UB(DLC) UB(DLC) -
Plasma Plasma

Target Consumption
Drilling Test Milling Test “Ti50%Al50% Target. Processed under high N2 pressure”
3500 600 @4500A*Hr @6000A*Hr

3000 500
Flank Wear [μm]
Number of Hits

Competitor
2500
400
BELCOAT SDG/S
2000
300 Coating Thickness Distribution
1500
200
1000

500 100

00 00
Commercial Competitor’s BELCOAT 00 100 200 300
Tool film SDG/MR
Machining Length [m]
Effective Coating Zone
Tool: Camtec carbide, Tool: Ball-nose endmill (C-2SB),
Workpiece: Hardened steel (HRC 30-35), Workpiece: H13, Cutting speed: 500m/min,
Machining speed: 2800 RPM, Feed: 0.25 mm/rev, Axial depth: 5 mm, Feed: 0.06 mm/flute,
Depth of Cut: 38.6 mm Radial: 0.6 mm, Lubrication :DRY

09 10
UnBalanced Magnetron Sputtering Features of DLC by UBMS
DLC (Diamond-like carbon) has widespread applications such as car parts, mechanical components, dies, molds etc.
Features of UBMSTM because of its high mechanical hardness, chemical inertness, and low friction behavior.
1. Plasma density is increased near target by imbalanced magnetic field. KOBELCO can offer optimized DLC for each customer’s target by tuning coating parameters.
2. Maximization of ion-assist effect.
3. Control of Film Property; Composition, Adhesion, Crystallization, Surface Morphology Applications of DLC Advanced DLC by UBMS

Argon ion is activated in plasma Activated argon ion sputters out Film deposition is made with □Automobile parts □High Adhesion DLC
and hits target. metal atom from target. sputtered metal ion.
(engine parts/ fuel pump parts ) −Ion assist effect by UBM
□Mechanical parts −Optimized Interlayer
(Ball bearing, ball screw, hydraulic pump parts ) □Hardness control and Multi-layer DLC
Balanced Magnetron UnBalanced Magnetron □Cutting tools for aluminum −Ion assist effect by UBM
□Spinning tools for aluminum can □Metal-doped DLC
□Trimming dies for SUS/Copper tube −Co-sputter with metal target and carbon
□Punches for SUS/aluminum sheet □Hydrogen content controlled DLC
and more −Solid carbon source
□Hybrid coating with AIP
and more

Well Balanced DLC Film

KOBELCO DLC Coating


Typical DLC Nano-Multilayered DLC
Machine Lineup
DLC Hard DLC(HV3000)
UBMS 202 UBMS 504 UBMS 707
Substrate Soft DLC(HV1000)

No Interlayer
Hard DLC Each layer:10nm~

Soft DLC
Φ450×H400mm or Φ700×H700mm or
Recommended Loading Space Φ220×H120mm 10nm
Φ130×H400mm×6-Spindles Φ130×H700mm×12-Spindles Substrate
Arc Evaporation Source 1 to 3 6 to 12 8 to 16 Wear Resistance Low
Simple Multilayer Friction Toughness
Substrate Table Multi Spindles planetary 6-Spindles planetary rotary table 12-Spindles planetary rotary table

11 12
Effect of KOBELCO DLC High-end with High-performance system
KOBELCO’s Hybrid System has both AIPTM cathodes and UBMSTM cathodes in one chamber and can operate these two
Punching of SUS Sheets Drilling of Al Alloy types of cathodes alternately or together. Depositing more complex and high-end coatings is now possible. The HYBRID
35 500
Number of punches (×10^4)

system can expand possibilities of R&D and/or Production for more sophisticated films in various industrial fields.

30
400

Number of Holes
25
300 AIP UBMS
20 AIP Film
15 200 UBMS Film
10 AIP Film
100
5 UBMS Film
0 0
AIP Film
HSS Non-coat DLC Coat HSS DLC Coat

Substrate
UBMS AIP

Typical Coating Applications


BELCOAT – by UBMS ®
Multi Component Coating -Cutting Tools
Nano Multilayer Coating -Dies and Molds
TiCrAIn/WN,CrN/BCN etc. -Automotive Parts etc.
Name Type Hardness(Hv) Thickness(µm) Feature & Typical Application

Balance of Wear Resistance,Lubricity


BELCOAT B Standard 1,500~2,500 0.5~5 and Adhesion.
Common Mechanical Component.
Drilling Test

Focused on Wear Resistance


Non- Cutting Speed: 60m/min,
BELCOAT HB High Hardness 2,500~3,500 0.1~0.2 Automotive Component Stamping Mold Coating Feed:0.1 mm/rev,
(For Non-Iron, Stainless Steel)
Depth of holes: 18mm

Focused on Wear Resistance Under


BELCOAT UB Ultra High Hardness 3,500~4,000 0.1~0.2 High Pressure Automotive Component TiAIN
by AIP
For Racing Use Cutting Tool(Non-Iron)

Balance of Wear Resistance and Lubricity


BELCOAT NB Nano-Multi Layer 1,500~2,500 0.1~0.15 Toughness with Shock TiAIN/WC/C
by Hybrid
Resistant,Bearing,Punching Die

Property Change by Metal Doping Relief


BELCOAT MB Metal Doped 1,000~2,000 0.15~0.25 of Film Stress Automotive 0 20 40 60 80 100 120
Component,Plastic Injection Mold
Number of holes

13 14

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