MEMS

Micro-Electro-Mechanical
Systems
MEMS

Micro-Electro-Mechanical Systems, or MEMS, is a technology that in

its most general form can be defined as miniaturized mechanical and
electro-mechanical elements (i.e., devices and structures) that are
made using the techniques of micro fabrication.
History

Point contact transistor was the first and major breakdown in the
world of Micro Electronics and thus provide the base for every micro
and Nano technology that we are currently dealing with
Point contact transistor

Invented in 1947

By,Barden-
Brattain-Schockly

At,BELL telephone
laboratories
Realization of integrated circuit
Invention of integrated circuit by Jack Kilby plays a very important role in
taking the world to a next level where the Complex and large analog circuitry
can be replaced by a single chip.

Monolithic integrated circuit

Monolithic:-made on a single large block

Fabrication of MEMS (100um to 1um)

1. LIGA
Another popular high aspect ratio micromachining technology is called LIGA,
which is a German acronym for “LIthographie Galvanoformung Adformung.”
This is primarily a non-silicon based technology and requires the use of
synchrotron generated x-ray radiation.
2. Bulk Micromachining
The oldest micromachining technology is bulk micromachining. This technique
involves the selective removal of the substrate material in order to realize
miniaturized mechanical components.
3.surface Micromachining
Unlike Bulk micromachining, where a silicon substrate (wafer) is selectively
etched to produce structures, surface micromachining builds microstructures
by deposition and etching of different structural layers on top of the substrate

 Although micro fabrication was originally limited to silicon, the field is now
developing into generic search for the best micromachining methodology involving
many non-silicon materials
 Other non-silicon material:-Polymer, Ceramic and composite material
(example-oxides of silicon si-siO2)
MEMS primary distinctive features

1. Miniaturization-Chip size is in between 1um to 100um.

2. Multiplicity- Numbers of Micro-machines can be combined together to perform a big task.
3. Microelectronics- integrate microelectronic control device, sensors and actuators.