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growth
dependent on .
Monitoring SK growth
Wide beam techniques
Figure 4. Evolution of Auger peak height as function of
surface coverage during SK growth. The plot is a series
of segmented linear curves with a clear break point
indicating the critical thickness (clearly marked in the
diagram) and the onset of island growth. Slope
differences are due to the different modes of growth.
The initial steep-sloped segment corresponds to the
FM growth mode while the later, shallow-sloped region
is representative of the VW mode. This schematic is
characteristic of 'ideal' SK growth where nucleation
onset begins at 2 monolayer coverage.
Microscopies
Application to
nanotechnology
As mentioned previously, coherent island
formation during SK growth has attracted
increased interest as a means for
fabricating epitaxial nanoscale structures,
particularly quantum dots
(QDs).[12][13][14][15][16] Significant effort has
been spent developing methods to control
island organization, density, and size on a
substrate. Techniques such as surface
dimpling with a pulsed laser and control
over growth rate have been successfully
applied to alter the onset of the SK
transition or even suppress it
altogether.[14][17] The ability to control this
transition either spatially or temporally
enables manipulation of physical
parameters of the nanostructures, like
geometry and size, which, in turn, can alter
their electronic or optoelectronic
properties (i.e. band gap). For example,
Schwarz-Selinger, et al. have used surface
dimpling to create surface miscuts on Si
that provide preferential Ge island
nucleation sites surrounded by a denuded
zone.[14] In a similar fashion,
lithographically patterned substrates have
been used as nucleation templates for
SiGe clusters.[13][15] Several studies have
also shown that island geometries can be
altered during SK growth by controlling
substrate relief and growth rate.[14][16]
Bimodal size distributions of Ge islands on
Si are a striking example of this
phenomenon in which pyramidal and
dome-shaped islands coexist after Ge
growth on a textured Si substrate.[14] Such
ability to control the size, location, and
shape of these structures could provide
invaluable techniques for 'bottom-up'
fabrication schemes of next-generation
devices in the microelectronics industry.
See also
Epitaxy
Thin films
Molecular-beam epitaxy
References
1. Venables, John (2000). Introduction to
Surface and Thin Film Processes.
Cambridge: Cambridge University Press.
ISBN 0-521-62460-6.
2. Pimpinelli, Alberto; Jacques Villain
(1998). Physics of Crystal Growth.
Cambridge: Cambridge University Press.
ISBN 0-521-55198-6.
3. Oura, K.; V.G. Lifshits; A.A. Saranin; A.V.
Zotov; M. Katayama (2003). Surface
Science: An Introduction. Berlin: Springer.
ISBN 3-540-00545-5.
4. Eaglesham, D.J.; M. Cerullo (April 1990).
"Dislocation-free Stranski-Krastanow growth
of Ge on Si(100)". Physical Review Letters.
64 (16): 1943–1946.
Bibcode:1990PhRvL..64.1943E .
doi:10.1103/PhysRevLett.64.1943 .
PMID 10041534 .
5. Stranski, Ivan N.; Krastanow, Lubomir
(1938). "Zur Theorie der orientierten
Ausscheidung von Ionenkristallen
aufeinander". Abhandlungen der
Mathematisch-Naturwissenschaftlichen
Klasse IIb. Akademie der Wissenschaften
Wien. 146: 797–810.
6. Bauer, Ernst (1958). "Phänomenologische
Theorie der Kristallabscheidung an
Oberflächen. I". Zeitschrift für
Kristallographie. 110: 372–394.
Bibcode:1958ZK....110..372B .
doi:10.1524/zkri.1958.110.1-6.372 .
7. Markov, Ivan V. (1995). Crystal Growth for
Beginners: Fundamentals of Nucleation,
Crystal Growth, and Epitaxy. Singapore:
World Scientific. ISBN 981-02-1531-2.
8. See for example Oura et al (Surface
Science) or Venables (Introduction to
Surface and Thin Film Processes).
9. Matthews, John Wauchope (1975).
Epitaxial Growth. New York: Academic
Press. ISBN 0-12-480901-4.
10. Kukta, R.V.; L.B. Freund (November–
December 1997). "Minimum energy
configuration of epitaxial material clusters
on a lattice-mismatched substrate". Journal
of the Mechanics and Physics of Solids. 45
(11–12): 1835–1860.
Bibcode:1997JMPSo..45.1835K .
doi:10.1016/S0022-5096(97)00031-8 .
11. Venables, John; G. D. T. Spiller; M.
Hanbucken (April 1984). "Nucleation and
growth of thin films". Reports on Progress
in Physics. 47 (4): 399–459.
Bibcode:1984RPPh...47..399V .
doi:10.1088/0034-4885/47/4/002 .
12. Li, Y.R.; Z. Liang; Y. Zhang; J. Zhu; S.W.
Jiang; X.H. Wei (October 2005). "Growth
modes transition induced by strain
relaxation in epitaxial MgO thin films on
SrTiO3 (001) substrates". Thin Solid Films.
489 (1–2): 245–250.
Bibcode:2005TSF...489..245L .
doi:10.1016/j.tsf.2005.04.095 .
13. Chiu, C.-h.; Z. Huang; C. T. Poh
(September 2004). "Formation of
Nanostructures by the Activated Stranski-
Krastanow Transition Method". Physical
Review Letters. 93 (13): 36105.
Bibcode:2004PhRvL..93m6105C .
doi:10.1103/PhysRevLett.93.136105 .
PMID 15524741 .
14. Schwarz-Selinger, T.; Y. L. Foo; David G.
Cahill; J. E. Greene (March 2002). "Surface
mass transport and island nucleation during
growth of Ge on laser textured Si(001)".
Physical Review B. 53 (12): 125317.
Bibcode:2002PhRvB..65l5317S .
doi:10.1103/PhysRevB.65.125317 .
15. Bauer, G.; F. Schäffler (November 2006).
"Self-assembled Si and SiGe
nanostructures: New growth concepts and
structural analysis physica status solidi (a)".
Physica Status Solidi. 203 (14): 3496–3505.
Bibcode:2006PSSAR.203.3496B .
doi:10.1002/pssa.200622405 .
16. Shklyaev, O.E.; M. J. Beck; M. Asta; M. J.
Miksis; P. W. Voorhees (May 2005). "Role of
Strain-Dependent Surface Energies in
Ge/Si(100) Island Formation". Physical
Review Letters. 94 (17): 176102.
Bibcode:2005PhRvL..94q6102S .
doi:10.1103/PhysRevLett.94.176102 .
PMID 15904314 .
17. Watanabe, Fumiya; David G. Cahill; J. E.
Greene (February 2005). "Roughening Rates
of Strained-Layer Instabilities". Physical
Review Letters. 94 (6): 066101.
Bibcode:2005PhRvL..94f6101W .
doi:10.1103/PhysRevLett.94.066101 .
PMID 15783751 .
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