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Article history: We report a simple two-step anodic method to fabricate self-organized nanopore arrays on 316L stainless
Received 18 December 2014 steel surface, with the initial anodization in perchloric acid-based electrolyte followed by the second
Received in revised form 29 May 2015 anodization in sodium dihydrogen phosphate-based electrolyte. The morphology and chemical analysis
Accepted 16 June 2015
of anodic overlayers after the first and second anodizations were explored by AFM, SEM and XPS. The
Available online 22 June 2015
influence of various applied voltages, current density, various anodization times and temperatures on
nanoscaled morphology was investigated in the process of the second anodizing step. As a result, the
Keywords:
dimension of the nanopores depends linearly on the anodization time and was controlled by the applied
Two-step anodic method
Self-organization
voltage and current density in a certain range. At the premise of no appreciable expansion in the mean
Nanopore arrays pore size after the second step in contrast to the initial pores, the depth of nanopores could reach seven
Stainless steel times of the previous depth of 10 nm. The analysis of XPS spectrum performed on the nanostructure,
the energy shifts of Cr 2p3/2 , Fe 2p3/2 , O 1s, and Ni 2p3/2 levels showed that principal constituents of the
anodic overlayer are chromium and iron components. No metallic Fe, Cr, and Ni peaks were detected
on the surface after the second anodization. The depth of nanopores was roughly in agreement with the
thickness estimations obtained from depth profiling data and different chemical compositions that exist
at different depths of even a thin anodic overlayer.
© 2015 Elsevier B.V. All rights reserved.
http://dx.doi.org/10.1016/j.apsusc.2015.06.083
0169-4332/© 2015 Elsevier B.V. All rights reserved.
1162 B. Zhang et al. / Applied Surface Science 351 (2015) 1161–1168
[11]. The mouse pre-osteoblasts cell attachment, proliferation and determined by argon-ion sputtering for different time intervals.
prominent proteins can be modulated on nanometer-sized grains The reference sputtering rate was 0.78 nm/s. An inductively cou-
structure on the 316L stainless steel surface [16]. pled plasma emission spectrometer (ICP-AES, IRIS Advantage ER/S,
In the case of stainless steel, few researches have been devoted Thermo Elemental, USA) was employed to determine the compo-
to the surface of stainless steel after its anodization. Vignal et al. nents of the precipitate formed during the second anodization, the
[17] have reported that brightening of AISI 316L stainless steel precipitate was centrifuged out from the electrolyte and dried in
in perchloric acid-based electrolytes can form a quasi-hexagonal the air.
arrangement of 10 nm depth pores at the sample surface. Martin
et al. [18] have shown the chemical and periodic nanostructures of
the films growing during the electropolishing treatment of 304L 3. Results and discussion
stainless steel and duplex stainless steel (Uranus 50). Zhan and
coworkers [19] have reported that during the process of the direct 3.1. 316L stainless steel surface morphology after the first
anodization after the achievement of a microscopically smooth sur- anodizaton
face by electropolishing irregular and undesired patterns appear on
the surface of 316L stainless steel. Surface morphology after the initial anodization was character-
In spite of recent progress, some difficulties still exist in con- ized using SEM and AFM. The surface appeared smooth without
trolling important structural parameters. Fabrication of regular and defects and exhibited a quasi-periodic arrangement of pores. The
deep pores on stainless steel requires new anodic methods con- pores indeed self-organize locally in a perfect honeycomb lattice.
trast to traditional anodization. From the technical point of view, to As in images of AFM and SEM in Fig. 1, the applied voltages are
remedy these problems on stainless steel, we designed a two-step 40 V (Fig. 1a) and 50 V (Fig. 1b), respectively, which gives rise to the
anodic method: the use of perchloric acid-based electrolyte fol- nanopore’s mean dimensions of 85 nm and 120 nm, respectively.
lowed by dihydrogen phosphate-based electrolyte to form a deeper They have a depth of about 10 nm (Fig. 1c and d). The hexagonal
self-organized nanopore arrays on 316L stainless steel substrate. pattern is sensitive to the applied voltage and the hexagons size
The results of studies on the morphology and chemical analysis increases with the rise of applied voltage. Indeed, these results are
of the anodic overlayers after the first and second anodization are similar to those previously reported [17].
specified. Furthermore, the influence of several parameters such Similar to the mechanism of hexagonal pores appears on Al,
as current density, applied voltage and anodization time on the the formation of hexagonal structure on stainless steel is due to a
morphology of the surface patterns will be discussed. cracking and self-healing of the oxide layer atop preexisting ridges
on the stainless steel surface and that this forms a barrier layer of
nonuniform thickness [20].
2. Experimental methods
The 316L stainless steel plates (Goodfellow, 0.015 wt.% C, 3.2. Effects of two-step anodic method on the morphology of 316L
16–18 wt.% Cr, 10–14 wt.% Ni, 0.3 wt.% Mo, and Fe balance) were cut substrate
into 10 mm × 10 mm × 1 mm size. All the specimens were mechan-
ically polished with successive grades of abrasive papers (grade Evident is the result from the micrographs in Fig. 2a that the
1000, 1500 and 2000) and smoothed with diamond pastes (from3.5 direct anodization after mechanical polish results in an irregular
to 0.25 m). After the above two processes, they were rinsed with pattern on the surface of 316L stainless steel. On the other hand,
ethanol and double-distilled water under ultrasonic for 10 min. The as shown in Fig. 2b, the two-step anodic method significantly
initial anodization of the mechanically polished specimens was improves the ordering degree of nanopore arrays compared with
performed in ethylene glycol (EG; 99.8% and anhydrous) solution the direct anodization. The observed ordered nanopore arrays
containing 5 vol% perchloric acid (HClO4 ; 70%) at a constant voltage could be attributed to the periodic pore nucleation sites formed by
of 40–50 V for 10 min. After the first anodization, the foil was then the first anodization in perchloric acid-based electrolyte. Thus, in
anodized in 0.3 M sodium dihydrogen phosphate solution with the nanoporous stainless steel, surface pretreatment prior to the actual
applied voltage ranged from 5 V to 45 V. After each anodization, the anodization plays a crucial role in the formation of nanopores,
samples were ultrasonically cleaned in acetone, ethanol, and dis- greatly influencing their size uniformity.
tilled water and dried in air. Anodization was conducted in a stirred As previously reported about Al and Ti, the formation of a bar-
two-electrode electrochemical cell by a direct current power sup- rier oxide layer or the prior formation of porous film by a different
ply (IT6154, ITECH, Nanjing, China). The electrolytic solution was electrolyte guarantees not only stable anodization but also homo-
stirred by a rotating magnet. Samples (the area of anodic electrode geneous growth of self-ordered oxide nanopore arrays. It has been
dipped in the electrolyte was about 1 cm2 ) were positioned verti- suggested that as anodization started, pores would start at cracks
cally in front of the counter electrode, which was a 9 cm2 graphite and imperfections in the surface, leaving an electric field concentra-
cathode, and the distance between both electrodes was kept at tion below the regions where the oxide film was thinner, because
about 6 cm. The electrolytic temperature was maintained between the thickness of the barrier oxide layer on a 316L stainless steel
0 and 10 ◦ C in an ice/water bath. surface is nonuniform, and the center of pores is the thinnest layer,
The morphology of the anodic films was characterized by field where the resistance is lowest and the electric field is highest. This
emission SEM (FE-SEM, FEI Nova 400 Nano) with an accelerat- leads to a temporarily increased dissolution rate at the bottom of
ing voltage of 20 kV. The micro images of the anodic films were pores [21,22]. As a consequence, pore nucleation for the porous
obtained in “tapping mode” by atomic force microscope (AFM) surface is easier than the flat ones.
Agilent 5500 (Agilent Technologies, Chandler, AZ) with a scan- Solution/oxide and oxide/metal interfaces exist in the pore
ning range of 5 m. X-ray photoelectron spectroscopy (XPS, VG channel. Field-enhanced oxidation occurs at the metal/oxide inter-
Multilab 2000, Thermo Electron Corp., America) experiments were face near the bottom of pore when the oxygen containing ions
carried out using a VG Escalab MKII spectrometer with a non- transport from electrolyte to the oxide film, along the direction
monochromatic Al K␣ X-ray source (1486.6 eV) to investigate the of the pore growth. At the same time, metal ions migrate from
chemical composition of the anodic films on stainless steel surface, metal substrate to the solution/oxide interface and dissolve into
calibrated by C 1s at 284.5 eV. The thicknesses of the films were the electrolyte [22].
B. Zhang et al. / Applied Surface Science 351 (2015) 1161–1168 1163
Fig. 1. Morphologies of 316L stainless steel surface after the first anodization at (a) 40 V and (b) 50 V. (c) Profile along the white segment in Fig. 1a and (d) profile along the
white segment in Fig. 1b showing the relief amplitude. The measured depths both are about 10 nm, a value which may depend on the tip shape. Scale bar = 500 nm.
3.3. Morphology of 316L stainless steel surface after the second surface, but the pores are deeper. The domain boundaries are also
anodization shown in Fig. 3, as indicated by the white arrows. The domains grew
by alignments and the mergers of pores were regular at domain
Because of the nanopore diameter’s decrease toward the sub- boundaries. Maybe the bottoms of the pores could move around
strate, it is hard to define accurately the diameter and the wall [22]. As the pores moved and merged, the orientation of adjacent
thickness of the nanopores. Therefore, we will concentrate on domains could change gradually, so domains matched each other.
reporting the influence of the growth parameters on the inner In contrast to the polished 316L stainless steel, no color change
diameter measured from SEM images and the depth of pores. appears on the sample surface after anodization.
We used nanoporous surface which was generated by the ini- For a better understanding of this nanostructured surface, AFM
tial anodization to fabricate deeper self-organized nanopores in observations in air have been performed. With the AFM, the mea-
0.3 M sodium dihydrogen phosphate-based electrolyte. A perfect sure may depend on the geometry of the tip and its apex. As
self-organized nanopore arrays were obtained through the second revealed in pictures of SEM (Fig. 4a) and AFM (Fig. 4b), the voltage
anodization under suitable conditions. Similar to the first anodiza- applied at the first anodizing step was 40 V after 10 min anodiza-
tion results, the distribution of the pores was uniform on the tion in sodium dihydrogen phosphate-based electrolyte at 15 V. The
Fig. 2. SEM images of 316L surface after two different treatments: (a) the direct anodization after mechanical polish and (b) the nanopore arrays that formed through
two-step anodic method. The inset in (a) is the image of mechanically polished surface. Samples were anodized at 25 V.
1164 B. Zhang et al. / Applied Surface Science 351 (2015) 1161–1168
Fig. 4. (a) SEM and (b) AFM images of stainless steel anodized at 15 V. (c) Profile along the white segment in Fig. 4b showing the relief amplitude, the measured depth is
about 30–40 nm. (d) SEM and (e) AFM images show the surface morphology anodized at 20 V for 15 min after the first anodization at 50 V. (f) Profile along the white segment
in Fig. 4e showing the relief amplitude, the measured depth is about 70–80 nm, a value which may depend on the tip shape. Scale bar = 500 nm.
B. Zhang et al. / Applied Surface Science 351 (2015) 1161–1168 1165
Fig. 5. (a) The XPS depth profiles and high resolution XPS spectra of (c) Cr 2p3/2 , (e) Fe 2p3/2 , and (g) O 1s peaks collected from the anodic films that formed after the first
anodization at 50 V for 10 min. (b) The XPS depth profiles and detailed XPS spectra of (d) Cr 2p3/2 , (f) Fe 2p3/2 , and (h) O 1s peaks collected from the anodic films that formed
after the second anodization at 20 V for 15 min, the first anodization was performed at 50 V for 10 min.
in Fe 2p3/2 peaks after 45 s etching. These two components corre- composition exist at different depths of even a thin anodic overlayer
spond to Fe oxide stoichiometry changing with depth from FeOOH [31].
to FeO and Fe2 O3 . As showed in Fig. S2, nickel existing in different depth of the
Fig. 5g and h displays the detailed XPS spectra of O 1s generated anodic films that formed during the process of the first or the second
from anodic films that formed during the first and second anodizing anodization in the form of metallic nickel and NiO. No metallic Ni
steps. The O 1s spectra show two types of bonds in Fig. 5g, such as 2p peak was detected on the surface after the second anodization
O2− in oxide species and OH− in hydroxide species. Fig. 5b shows [30]. During the first step of anodization, the formation of oxides is
the spectra of O 1s fitted by OH− in hydroxide species on the surface. described as the following reactions [32]:
After 45 s or 90 s etching, two peaks of O 1s correspond to O2− in
oxide species at binding energies of 530.2 eV and OH− in hydroxide 2H2 O → O2 + 4H+ + 4e−
species at binding energies of 531.5 eV, respectively [30]. It appears
that the nanostructured surface was consistent with a mixture of y
Cr and Fe components. This may suggest that different chemical xM(Fe, Cr, Ni) + O2 → Mx Oy (FeO, Fe2 O3 , Cr2 O3 , NiO)
2
1166 B. Zhang et al. / Applied Surface Science 351 (2015) 1161–1168
Fig. 6. (a) Examples of j–t curves characteristic of nanopores that formed and morphology evolution of the anodized 316L stainless steel surface upon the experimental
conditions. (b) Relationship between the applied voltages and pore dimensions during the second anodizing step after the first anodization at 40 V and 50 V, respectively.
(c) Inner dimension-time anodization curve during the second anodizing step. The dimension increases linearly with bias voltage in a certain range. Scale bar = 500 nm. The
error bars represent the standard deviations from the mean of each measured quantity.
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