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F26_001_EFK_PUE_02

Creator

Elektro Kreutzpointner GmbH

Burgkirchener Straße 3 Phone +49 / (0) 8677 / 8703 - 0 elektro@kreutzpointner.de

D-84489 Burghausen / Germany Fax +49 / (0) 8677 / 8703 - 7300 www.kreutzpointner.de

Customer

Puerstinger High Purity Systems GmbH

Gewerbepark Lindach B3-B4

D-84489 Burghausen / Germany

end customer

SIX Semicondutores Group EBX

Praia do Flamengo 66, 14° andar


Elektro Kreutzpointner GmbH

22210-903 Rio de Janeiro


02.08.2013

Location / Structure: Brasilien


Project: chemical supply system
Plant designation: PCCBC Developer TMAH- 0.26N (2,38%) with surfactant

Created on 20.06.2013 Creator: j.doetzlhofer EPLAN Project name: SIX SEMICONDUTORES Total number: 1792
FOR RELEASE

Modification date: 01.08.2013 Last Edited by: j.doetzlhofer EPLAN version: 2.2.5

=PCCB0/1 &INHVZ=ANL_01/1
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & DECKBL
Ed. j.doetzlhofer Mounting
location: + Cover sheet
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Title page/cover sheet Page: 1
1 2 3 4 5 6 7 8 9 10

Table of contents F06_003

Page Page type Page description Date Edited by


&STRPL=PCCBC+ELEKTRO/1 Power supply AC230V 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/3 Enclosure light with female receptacle 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/4 Outgoing lines AC230V 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/5 Plantlighting 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/10 Direct current power supply DC24V 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/11 Protective switch and Potential distributor DC24V 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/15 Fuse triggered AC230V / DC24V 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/20 Indicator/operator element 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/25 Plant Stop External 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/31 PLC - Rack 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/32 PLC - Central processing module 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/33 PLC - Central processing module AI / AO / PT100 / DI 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/34 PLC - Central processing module DI / DO 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/35 PLC - Digital output module 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/41 PLC - Panel Overview 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/42 PLC - Panel 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/45 Interface FMCS 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/46 Interface FMCS 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/48 Interface TMAH Blending System 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/51 Valve Cluster Overview 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/52 Valve Cluster, Valve QM05 01.08.2013 j.doetzlhofer
Elektro Kreutzpointner GmbH

&STRPL=PCCBC+ELEKTRO/53 Valve Cluster, Valve QM09 01.08.2013 j.doetzlhofer


&STRPL=PCCBC+ELEKTRO/54 Valve Cluster, Valve QM12 01.08.2013 j.doetzlhofer
02.08.2013

&STRPL=PCCBC+ELEKTRO/55 Valve Cluster, Valve QM14 01.08.2013 j.doetzlhofer


&STRPL=PCCBC+ELEKTRO/56 Valve Cluster, Valve QM16 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/57 Valve Cluster, Valve QM20 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/58 Valve Cluster, Valve QM23 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/59 Valve Cluster, Valve QM25 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/60 Valve Cluster, Valve fast GP02/1 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/61 Valve Cluster, Valve fast GP01/1 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/62 Valve Cluster, Valve slow GP02/2 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/63 Valve Cluster, Valve slow GP01/2 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/80 Initiator Terminals Supply 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/81 Door sensor Drum door GSO01 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/82 Door sensor Drum door GSO02 01.08.2013 j.doetzlhofer
FOR RELEASE

&STRPL=PCCBC+ELEKTRO/83 Door sensor cabinet GSO03 01.08.2013 j.doetzlhofer


&STRPL=PCCBC+ELEKTRO/84 Filling level LALL01 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/85 Filling level LSL01 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/86 Filling level LSH01 01.08.2013 j.doetzlhofer

=PCCB0/2 2
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & INHVZ
Ed. j.doetzlhofer Mounting
location: + Table of contents
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Table of contents Page: 1
1 2 3 4 5 6 7 8 9 10

Table of contents F06_003

Page Page type Page description Date Edited by


&STRPL=PCCBC+ELEKTRO/87 Filling level LAHH01 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/88 Membrane monitoring XSAH01 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/89 Membrane monitoring XSAH02 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/90 leak LSAH01 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/91 DESCRIPTION1 FISA±01 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/92 Pressure transmitter PISA±01 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/120 VMB BOX 1, leak LSAH01 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/121 VMB BOX 2, leak LSAH01 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/122 Spare Initiator Terminals 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/123 Spare Initiator Terminals 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/124 Spare Initiator Terminals 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/180 Valve Cluster Spare 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/181 Valve Cluster Spare 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/182 Valve Cluster Spare 01.08.2013 j.doetzlhofer
&STRPL=PCCBC+ELEKTRO/183 Valve Cluster Spare 01.08.2013 j.doetzlhofer
Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

1 &PRJSTD=/1
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & INHVZ
Ed. j.doetzlhofer Mounting
location: + Table of contents
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Table of contents Page: 2
1 2 3 4 5 6 7 8 9 10

Enclosure Type label


Standard EFK CE - Sticker Environmental conditions and Operating conditions:
degree of pollution: ___

Environment temperature: ___


Elektro Kreutzpointner
Burgkirchenerstrasse 3 ___
D-84489 Burghausen
Tel.: +49 8677 8703-0
Fax.: +49 8677 8703-7300
www.kreutzpointner.de ___

___ ___
Customer: SIX Semicondutores Group EBX
Developer TMAH- 0.26N (2,38%) with surfactant ___ ___
Plant: =PCCBC
Elektro Cabinet
Type: +ELEKTRO

Serial number: 400013152_016/E

Rated voltage: AC230V

Control voltage: DC24V Maintenance Instructions


Max. Rated current: 25A
maintenance free ___
Degree of protection: IP54
Elektro Kreutzpointner GmbH

Protection class: I ___ ___


Manufacturing date: 2013
02.08.2013

___ ___

Niederspannungs-Richtlinie
2006/95/EG
EMV-Richtlinie 2004/108/EG
FOR RELEASE

=PCCB0/4 2
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & AUFPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Layout diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Enclosure Type label Page: 1
1 2 3 4 5 6 7 8 9 10

Engraving data
für Einlegeschilder Anzeige-/Bedienelement (TYP 4.1) Sondertyp (Typ 10.x)

TYP 4.1 TYP 10.1


(Siemens)

-20S1 -5S1 -1Q1

17,5 mm

17,5 mm
Alarm Illumination

20 mm
quit Plant
Cabinet Main switch
27 mm 27 mm
70 mm

Schriftgröße 1-3.ZEILE: 6mm


anz. Zeichen einpassen
Material Kunststoff
Farbe Rot
Klebeband JA
Loch NEIN

TYP 10.2
Elektro Kreutzpointner GmbH
02.08.2013

-20S2

20 mm
Plant Stop
70 mm

Schriftgröße 1-3.ZEILE: 2,5mm Schriftgröße 1-3.ZEILE: 6mm


anz. Zeichen 1-3.ZEILE: 10 anz. Zeichen einpassen
FOR RELEASE

Material Kunststoff Material Kunststoff


Farbe Weiß Farbe Weiß
Klebeband JA Klebeband JA
Loch NEIN Loch NEIN

1 3
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & AUFPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Layout diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Engraving data Page: 2
1 2 3 4 5 6 7 8 9 10

Developer TMAH- 0.26N (2,38%) with surfactant


+ELEKTRO
Elektro Cabinet

-45A1

SIEMENS SIMATIC HMI

-20S1 -5S1

Alarm Illumination
quit Plant
-20S2 Cabinet
Elektro Kreutzpointner GmbH

Plant
Stop
02.08.2013

-1Q1

Main switch
FOR RELEASE

2 4
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & AUFPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Layout diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Enclosure Door Page: 3
1 2 3 4 5 6 7 8 9 10

Developer TMAH- 0.26N (2,38%) with surfactant


+ELEKTRO
Elektro Cabinet

75
-X22.1

-X20.1

-X21.1

-X23.1
-XPA

-X20.4
-20H1-H4

150
PE
-20H1-H3

50
-20H1-H2

-X20.2
-X1.0

-X1.1

-XPE
-XN
-20H1-H1

115
PE
-20H1

50
-45K1
-45K2
-45K3
-45K4
-45K5
-46K1
-46K2
-46K3
-46K4
-46K5
-48K1
-X20.3
-X0V

951
100
PE

37
-10F1

-11F1

-11F2

-11F3

-11F4

-11F5
-3F1

-4F1

-5F1

-X3.1

-X3.2

-X3.3

-X3.4

-X3.5

125
Elektro Kreutzpointner GmbH

PE
02.08.2013

37
-10G1
-31A1

-31A2

-25K1
AI5x DI8x +2 DI16x DO16x +0 +0
AO2x DC24V DC24V DC24V 2L+
12 Bit 0,5A
PWR 1L+

RUN .0 .0
1L+
STOP .1 .1
0
SF
.2 .2
1
FRCE
.3 .3
MCC

A
MCC .4 .4
2

3
PHÖNIX
S
.5 .5 4 PILZ
.6 .6 5
PNOZ
.7 .7 6
RUN
-31A0

175
7
STOP F
DI DI DO F
MRES

PE
+1 +1

QUINT POWER
2L+
3L+
+ 0
.0
- 1
.1
X1 X5 2
.2 3
.3 4

.4 5

.5 6

.6 7

F
X2 X3 .7

MPI PtP F
DI DO

37
50 443 37

530
FOR RELEASE

3 &STRPL=ANL_01+EBO_02/100
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & AUFPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Layout diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Enclosure Mounting panel Page: 4
1 2 3 4 5 6 7 8 9 10

AC230V
-1Q1/L1 / 3.2

1 3 5
-1Q1
25A 2 4 6
Main switch

-XN 1 2 3 4
ZDU 2.5 BL

N
-XN/01

-XN/02

-XN/03
3.2 /

4.2 /

10.2 /
Elektro Kreutzpointner GmbH
02.08.2013

-XPA
-X1.0 1 N PE PA ZPE 16
ZDU 4

-X0V = DC0V - Potential distributor


-X1.0 = Power supply AC230V
-X1.1 = Outgoing lines AC230/400V
-X3.1 = Potential distributor DC24V
-X3.2 = Potential distributor DC24V
-X3.3 = Potential distributor DC24V
-X3.4 = Potential distributor DC24V
-X3.5 = Potential distributor DC24V
-X20.1 = Signal column
=EXT+EXT
-X20.2 = Interface FMCS
-X20.3 = Plant Stop External
FOR RELEASE

-BMK x x x -X20.4 = Interface TMAH Blending System


equipotential bonding rail
-X21.1 = Valve Cluster
-X22.1 = Digital Sensors
-X23.1 = analog Sensors
-XN = N - Potential distributor
-XPE = PE - Terminal strip
Power supply from Customer
-XPA = PA - Terminal
Max. back up fuse
25A N - Potential distributor
=PCCB0/183 3
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Power supply AC230V Page: 1
1 2 3 4 5 6 7 8 9 10

AC230V AC230V
1.9 / -1Q1/L1 -1Q1/L1 / 4.2
N
1.7 / -XN/01

1 N
FI/LS 13 21

-3F1 14 22

/15.3
B10A/0,03A

2 N'

-X1.1 1 N PE
ZDU 2.5

-PCCBC_3E1 BR BU GNYE
RITTAL ANSCHLUSSLEITUNG
3G1

-3E1
AC100-240V L N PE L'
N'
PE'
Elektro Kreutzpointner GmbH

Lamp

I-0-II
Female receptacle
02.08.2013

AC230V / 10A

S
S'
Enclosure light with female receptacle

-3S1 L
Door switch

no nc
FOR RELEASE

Enclosure light with female receptacle


1 4
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Enclosure light with female receptacle Page: 3
1 2 3 4 5 6 7 8 9 10

AC230V AC230V
3.9 / -1Q1/L1 -1Q1/L1 / 5.2

1 14 21
-4F1
B10A 2 13 22

/15.3

N N
1.7 / -XN/02 -XN/02 / 5.2
Elektro Kreutzpointner GmbH

-X1.1 2 N PE
02.08.2013

ZDU 2.5
FOR RELEASE

Outgoing line AC230V


Spare
3 5
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Outgoing lines AC230V Page: 4
1 2 3 4 5 6 7 8 9 10

AC230V AC230V
4.9 / -1Q1/L1 -1Q1/L1 / 10.2

1 13 21
-5F1
B10A 2 14 22

/15.3

1.3
-5S1
Illumination 1.4
Plant
Cabinet

N
4.9 / -XN/02
Elektro Kreutzpointner GmbH

-X1.1 3 N PE -X1.1 4 N PE -X1.1 5 N PE


02.08.2013

ZDU 2.5 ZDU 2.5 ZDU 2.5

-PCCBC_5H1 1 2 GNYE -PCCBC_5H2 1 2 GNYE


ÖLFLEX CLASSIC 110 G ÖLFLEX CLASSIC 110 G
3G1 3G1

L1 PE L1 PE
+FLUID

-5H1 -5H2
AC230V AC230V
FOR RELEASE

N N

Spare
Plantlighting Plantlighting Outgoing line AC230V
4 10
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Plantlighting Page: 5
1 2 3 4 5 6 7 8 9 10

AC230V
5.9 / -1Q1/L1
N
1.7 / -XN/03

1 13 21
-10F1
B10A 2 14 22

-XPE
PE ZPE 2.5

-10G1 L N PE
1~AC230V/DC24V
10A
QUINT-PS/1AC/24DC/10A

DCOK
I<IN
+'' +' + - -' -'' 13 14
-X0V 1 2 3 4 5
ZDU 2.5
PE
-XPE
ZPE 2.5

0V CPU AI / AO / PT100 / DI
0V Potential distributor

0V Potential distributor

0V Potential distributor

0V Potential distributor

0V Potential distributor
Elektro Kreutzpointner GmbH

0V analog Inputs

0V Valve Cluster
0V Link relay
DC24V
02.08.2013

-10G1/L24/01

-X0V/01

-X0V/02

-X0V/03

-X0V/04

-X0V/05

-X0V/06

-X0V/07

-X0V/08

-X0V/09
11.1 /

11.3 /

11.5 /

11.7 /

11.9 /

33.2 /

45.1 /

33.2 /

183.2 /
11.1 /
FOR RELEASE

5 11
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Direct current power supply DC24V Page: 10
FOR RELEASE 02.08.2013
Elektro Kreutzpointner GmbH

10

Modification
10.3 /
1

10.6 /

Date
-X0V/01
-10G1/L24/01

0V

Name
C4A
-11F1
DC24V

-X3.1
ZDK 2.5
-X3.1

0V CPU DC24V CPU


32.2 / -11F1/L0/10 32.2 / -11F1/L24/10
2
1

2
1
2

Ed.
Date

Appr
Original
/15.5
14
13

0V CPU DI / DO DC24V CPU DI / DO


34.2 / -11F1/L0/11 34.2 / -11F1/L24/11

4
3
22
21

0V CPU DI / DO DC24V CPU DI / DO

t.starka
34.2 / -11F1/L0/12 34.2 / -11F1/L24/12

01.08.2013
j.doetzlhofer
0V CPU DI / DO DC24V CPU DI / DO
34.2 / -11F1/L0/13 34.2 / -11F1/L24/13

6
5

Potential distributor DC24V


10.6 /

Name:
Project-
3

-X0V/02
0V
C4A
-11F2

-X3.2
ZDK 2.5
-X3.2

SIX SEMICONDUTORES
0V DO DC24V DO

chemical supply system


35.2 / -11F2/L0/20 35.2 / -11F2/L24/20
2
1

2
1

/15.5

drawing
number:
13
14
4

0V DO DC24V DO
35.2 / -11F2/L0/21 35.2 / -11F2/L24/21

4
3
22
21

Puerstinger High Purity Systems GmbH


0V Panel DC24V Panel
42.2 / -11F2/L0/23 6 42.2 / -11F2/L24/23
5

Potential distributor DC24V


10.6 /
-X0V/03
5

0V
C2A
-11F3

-X3.3
ZDK 2.5
-X3.3

DC24V Fuse triggered


15.2 / -11F3/L24/30
2
1

2
1

Page
Plant:

location:
Mounting
/15.5

description.:
14
13

0V Indicator/operator element DC24V Indicator/operator element


20.5 / -11F3/L0/31 20.2 / -11F3/L24/31
4
3
22
21
6

0V analog sensors DC24V analog sensors


92.2 / -11F3/L0/33 92.2 / -11F3/L24/33
6
5

Potential distributor DC24V

Elektro Cabinet
10.6 /
-X0V/04
0V
7

C2A
-11F4

-X3.4
ZDK 2.5
-X3.4

0V Digital Sensors DC24V Digital Sensors


80.2 / -11F4/L0/40 80.2 / -11F4/L24/40
2
1

2
1

Developer TMAH- 0.26N (2,38%) with surfactant

Protective switch and Potential distributor DC24V

/15.5
13
14

4
3
22
21
8

6
5

Potential distributor DC24V


10.7 /
-X0V/05
0V
C2A
-11F5

-X3.5
ZDK 2.5
-X3.5
9

0V Relay Safety DC24V Relay Safety


25.2 / -11F5/L0/50 25.2 / -11F5/L24/50
2
1

2
1

= PCCBC
+ ELEKTRO

/15.5
14
13

DC24V Message Relay Safety


25.8 / -11F5/L24/51
4
3
22
21

6
5

Potential distributor DC24V

Page:
10

& STRPL
Circuit diagram

11
15
1 2 3 4 5 6 7 8 9 10

DC24V
11.5 / -11F3/L24/30

Protective switch AC230V Protective switch DC24V


Fuse triggered = 0 Fuse triggered = 0

-31A1 LSS_AC230V/SIF LSS_DC24V/SIF


VIPA CPU313SC VIPA CPU313SC
/33.7 /33.7

E0.0 E0.1
-X11 22 -X11 23

13 13
-3F1 -11F1
/3.2 14 /11.2 14

14 14
-4F1 -11F2
/4.2 13 /11.4 13

13 13
-5F1 -11F3
/5.2 14 /11.5 14
Elektro Kreutzpointner GmbH

14
-11F4
02.08.2013

/11.7 13

13
-11F5
/11.9 14
FOR RELEASE

11 20
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Fuse triggered AC230V / DC24V Page: 15
1 2 3 4 5 6 7 8 9 10

DC24V
11.6 / -11F3/L24/31

Control Control Control Control


Signal column Green = 1 Signal column Yellow = 1 Signal column Red = 1 Signal column Buzzer = 1

-31A1 20H1-H1/L-GRÜN 20H1-H2/L-GELB 20H1-H3/L-ROT 20H1-H4/MEL-SUMMER


VIPA CPU313SC VIPA CPU313SC VIPA CPU313SC VIPA CPU313SC
/34.7 /34.7 /34.7 /34.7

A0.0 A0.1 A0.2 A0.3


-X12 22 -X12 23 -X12 24 -X12 25

1.3 1.1
-20S1 -20S2
bk 1.4 bk 1.2
Alarm Plant
quit Stop

0V
11.6 / -11F3/L0/31
Elektro Kreutzpointner GmbH

-X20.1 1 2 3 4 5 6 PE PE
ZDK 2.5
02.08.2013

-31A1
-PCCBC_Q20H1 1 2 3 4 5 6 GNYE
-X11 24 -X11 25
ÖLFLEX CLASSIC 110 G
7G0,75
E0.2 E0.3
/33.7 /33.7
VIPA CPU313SC VIPA CPU313SC

20S1/T-QUI HZ01

Alarm acknowledge = 1 Plant Stop = 0


-20H1 0 1 2 3 4 5 PE

x1
x1 x1 x1
-H1 -H2 -H3 -H4
AC/DC 12-240V x2 AC/DC 12-240V x2 AC/DC 12-240V x2 DC24V
grün gelb rot schwarz x2
DC24V, 5W DC24V, 5W DC24V, 5W
FOR RELEASE

Signal column
15 25
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Indicator/operator element Page: 20
1 2 3 4 5 6 7 8 9 10

DC24V
11.9 / -11F5/L24/51

Attention:
automatic start

-25K1
DC 24V, 6A, 150W A1 Y1 Y2

A1 13 23 33 41 41
-25K1
PNOZ X1P A2 14 24 34 42 /25.3 42

/35.3

/35.3

/25.9
A2

0V
11.9 / -11F5/L0/50
Elektro Kreutzpointner GmbH
02.08.2013

-31A1
-X12 19
DC24V
11.9 / -11F5/L24/50
E2.7
/34.4
VIPA CPU313SC
-X20.3 1 2 PE -X20.3 3 4 PE -X20.3 5 6 PE -X20.3 7 8 PE
ZDU 2.5 ZDU 2.5 ZDU 2.5 ZDU 2.5 25K1/MEL

Message
Plant Stop
External
OK = 0

Attention:
Representation of the
systems-stop-loop
only schematically
FOR RELEASE

Spare Spare Spare


Plant Stop Plant Stop Plant Stop Plant Stop
External External External External
20 31
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Plant Stop External Page: 25
1 2 3 4 5 6 7 8 9 10

-31A1
/32.5
/33.4 -31A2
/34.4 /35.4
313-5BF13 322-1BH01

AI5x DI8x +2 DI16x DO16x +0 +0


AO2x DC24V DC24V DC24V 2L+
-31A0 12 Bit 0,5A
1L+
PWR
300S, Profile rail
Length 480mm

RUN .0 .0
1L+
STOP .1 .1
0
SF
.2 .2
1
FRCE
.3 .3 2
MCC
MCC .4 .4 3
A
.5 .5 4
S
.6 .6 5

.7 .7 6
RUN
7
STOP F
DI DI DO F
MRES

+1 +1
2L+
PE 3L+
+ 0
.0
- 1
Elektro Kreutzpointner GmbH

.1
X1 X5 2
.2 3
.3
02.08.2013

4
-XPE PE
.4 5

.5 6

.6 7

F
X2 X3 .7

MPI PtP F
DI DO

VIPA VIPA
CPU313SC SM322 Spare Spare
300S, Central processing module 300S, Digital output module Slot / module Slot / module
DI24/DO16/AI4+1/AO2 DO16xDC24V/0,5A, 20-pol.
FOR RELEASE

25 32
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: PLC - Rack Page: 31
1 2 3 4 5 6 7 8 9 10

-31A1
/31.2

CPU313SC VIPA

MPI Interface X2:MPI


Buchse 9-Pol.

PtP Interface X3:PtP


Buchse 9-Pol.

ETHERNET
X5:PG/OP
Interface RJ45

-X1:+
SUPPLY
Elektro Kreutzpointner GmbH

DC24V

DC24V
-X1:-
0V
02.08.2013

313-5BF13
FOR RELEASE

DC24V
11.2 /-11F1/L24/10
0V
11.2 / -11F1/L0/10

31 33
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: PLC - Central processing module Page: 32
1 2 3 4 5 6 7 8 9 10

0V
10.7 / -X0V/06

-31A1
/31.2

CPU313SC VIPA

-X11:1 -X11:21

-X11:2 -X11:22
E0.0 /15.4 -LSS_AC230V/SIF Protective switch AC230V Fuse triggered = 0
U
V
-X11:3 CH 0 -X11:23
Pressure transmitter PISA±01 = 4...20mA -PISA±01 /92.3 PEW256 E0.1 /15.6 -LSS_DC24V/SIF Protective switch DC24V Fuse triggered = 0
I
A
-X11:4 -X11:24
/92.3 E0.2 /20.2 -20S1/T-QUI Alarm acknowledge = 1
M
-X11:5 -X11:25
E0.3 /20.3 -HZ01 Plant Stop = 0
U
V DC 24V
-X11:6 CH 1 -X11:26
PEW258 E0.4 /81.3 -GSO01 Door sensor Drum door GSO01 OK = 1
I
A
-X11:7 -X11:27
E0.5 /82.3 -GSO02 Door sensor Drum door GSO02 OK = 1
M
-X11:8 -X11:28
E0.6 /83.3 -GSO03 Door sensor cabinet GSO03 OK = 1
U
V
-X11:9 CH 2 -X11:29
PEW260 E0.7 /84.3 -LALL01 Filling level LALL01 OK = 1
I
A
-X11:10 -X11:30

M M
-X11:11 -X11:31

U n.c.
V
-X11:12 CH 3 -X11:32
PEW262
I n.c.
A
-X11:13 -X11:33
Elektro Kreutzpointner GmbH

M n.c.
-X11:14 -X11:34
PEW264 Pt100
PT100 n.c.
-X11:15 CH 4 -X11:35
02.08.2013

0V
10.7 / -X0V/08
M n.c.
-X11:16 U -X11:36
PAW256
U n.c.
-X11:17 I CH 0 -X11:37

I n.c.
-X11:18 U -X11:38
PAW258
U n.c.
-X11:19 I CH 1 -X11:39

I n.c.
-X11:20 -X11:40

M n.c.

313-5BF13
FOR RELEASE

32 34
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: PLC - Central processing module AI / AO / PT100 / DI Page: 33
1 2 3 4 5 6 7 8 9 10

DC24V
11.2 /-11F1/L24/11
0V
11.2 / -11F1/L0/11

-31A1
/31.2

CPU313SC VIPA

DC24V -X12:1 -X12:21


11.2 / -11F1/L24/12
1L+ 2L+
-X12:2 -X12:22
Filling level LSL01 OK = 1 -LSL01 /85.3 E1.0 A0.0 /20.6 -20H1-H1/L-GRÜN Control Signal column Green = 1

-X12:3 -X12:23
Filling level LSH01 OK = 1 -LSH01 /86.3 E1.1 A0.1 /20.7 -20H1-H2/L-GELB Control Signal column Yellow = 1

-X12:4 -X12:24
Filling level LAHH01 OK = 1 -LAHH01 /87.3 E1.2 A0.2 /20.8 -20H1-H3/L-ROT Control Signal column Red = 1

-X12:5 -X12:25
Membrane monitoring XSAH01 OK = 1 -XSAH01 /88.3 E1.3 A0.3 /20.9 -20H1-H4/MEL-SUMMER Control Signal column Buzzer = 1

DC 24V
-X12:6 -X12:26
Membrane monitoring XSAH02 OK = 1 -XSAH02 /89.3 E1.4 A0.4 /45.2 -45K1/ANS Interface FMCS System leak = 0

-X12:7 -X12:27
leak LSAH01 OK = 1 -LSAH01 /90.3 E1.5 A0.5 /45.4 -45K2/ANS Interface FMCS transport container empty = 0

-X12:8 -X12:28
Strömungssensor FISA±01 OK = 1 -FISA±01 /91.3 E1.6 A0.6 /45.5 -45K3/ANS Interface FMCS System In Operation = 1

-X12:9 -X12:29
VMB BOX 1 leak LSAH01/VMB1 OK = 1 -LSAH01/VMB1 /120.3 E1.7 A0.7 /45.6 -45K4/ANS Interface FMCS System faulty = 0

-X12:10 -X12:30

DC 24V
n.c. 2M
-X12:11 -X12:31

n.c. 3L+
-X12:12 -X12:32
VMB BOX 2 leak LSAH01/VMB2 OK = 1 -LSAH01/VMB2 /121.3 E2.0 A1.0 /45.8 -45K5/ANS Interface FMCS System will serviced = 0

-X12:13 -X12:33
Spare Initiator Terminals -RES_E2.1 /122.3 E2.1 A1.1 /46.2 -46K1/ANS Interface FMCS VMB 1 leak = 0
Elektro Kreutzpointner GmbH

-X12:14 -X12:34
Spare Initiator Terminals -RES_E2.2 /123.3 E2.2 A1.2 /46.4 -46K2/ANS Interface FMCS VMB 2 leak = 0

-X12:15 -X12:35
02.08.2013

Spare Initiator Terminals -RES_E2.3 /124.3 E2.3 A1.3 /46.5 -46K3/ANS Spare Relay for Interface

DC 24V
-X12:16 -X12:36
E2.4 A1.4 /46.6 -46K4/ANS Spare Relay for Interface

-X12:17 -X12:37
E2.5 A1.5 /46.8 -46K5/ANS Spare Relay for Interface

-X12:18 -X12:38
E2.6 A1.6

-X12:19 -X12:39
Message Plant Stop External OK = 0 -25K1/MEL /25.9 E2.7 A1.7 /48.2 -48K1/ANF Interface TMAH Blending System Requirements = 1

0V -X12:20 -X12:40
11.2 / -11F1/L0/12
M 3M

313-5BF13
FOR RELEASE

DC24V
11.3 /-11F1/L24/13
0V
11.3 / -11F1/L0/13

33 35
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: PLC - Central processing module DI / DO Page: 34
1 2 3 4 5 6 7 8 9 10

Plant Stop External


-25K1
DC24V 13 14
11.4 /-11F2/L24/20
0V /25.3
11.4 / -11F2/L0/20

-31A2
/31.5

SM322 VIPA

-X1:1

1L+
-X1:2
A2.0 /52.2 -QM05 Valve Cluster Valve QM05 Control = 1

-X1:3
A2.1 /53.2 -QM09 Valve Cluster Valve QM09 Control = 1

-X1:4
A2.2 /54.2 -QM12 Valve Cluster Valve QM12 Control = 1

-X1:5
A2.3 /55.2 -QM14 Valve Cluster Valve QM14 Control = 1

DC 24V
-X1:6
A2.4 /56.2 -QM16 Valve Cluster Valve QM16 Control = 1

-X1:7
A2.5 /57.2 -QM20 Valve Cluster Valve QM20 Control = 1

-X1:8
A2.6 /58.2 -QM23 Valve Cluster Valve QM23 Control = 1

-X1:9
A2.7 /59.2 -QM25 Valve Cluster Valve QM25 Control = 1

-X1:10

1M
-X1:11

2L+
-X1:12
A3.0 /60.2 -GP02/1 Valve Cluster Valve fast GP02/1 Control = 1

-X1:13
A3.1 /61.2 -GP01/1 Valve Cluster Valve fast GP01/1 Control = 1
Elektro Kreutzpointner GmbH

-X1:14
A3.2 /62.2 -GP02/2 Valve Cluster Valve slow GP02/2 Control = 1

-X1:15
02.08.2013

A3.3 /63.2 -GP01/2 Valve Cluster Valve slow GP01/2 Control = 1

DC 24V
-X1:16
A3.4 /180.3 -RES_A3.4 Valve Cluster Valve RESERVE/01 Control = 1

-X1:17
A3.5 /180.5 -RES_A3.5 Valve Cluster Valve RESERVE/02 Control = 1

-X1:18
A3.6

-X1:19
A3.7

-X1:20

2M

322-1BH01
FOR RELEASE

Plant Stop External


-25K1
DC24V 23 24
11.4 /-11F2/L24/21
0V /25.3
11.4 / -11F2/L0/21

34 41
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: PLC - Digital output module Page: 35
1 2 3 4 5 6 7 8 9 10

-45A1
/42.4
6AV2124-0JC01-0AX0

SIEMENS SIMATIC HMI


Elektro Kreutzpointner GmbH
02.08.2013

SIEMENS
FOR RELEASE

6AV2124-0JC01-0AX0
SIMATIC HMI
SIMATIC TP900 COMFORT Panel, WINDOWS CE 6.0, 9" WIDESCREEN-TFT-DISPLAY, 12 MB PROJECTING STORAGE, PROJECTABLE AB WINCC V11

35 42
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: PLC - Panel Overview Page: 41
1 2 3 4 5 6 7 8 9 10

-45A1
/41.2

6AV2124-0JC01-0AX0 SIEMENS

X1:P1
RJ45

PROFINET

X1:P2
RJ45

SIMATIC Memory Card X50:SMC

SD - Card X51:SC

-X80:1
SUPPLY
Elektro Kreutzpointner GmbH

L+

DC24V
-X80:2
L-
02.08.2013

PE

PE

PE
-XPE
ZPE 2.5
6AV2124-0JC01-0AX0
FOR RELEASE

DC24V
11.4 /-11F2/L24/23
0V
11.4 / -11F2/L0/23

41 45
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: PLC - Panel Page: 42
1 2 3 4 5 6 7 8 9 10

Interface FMCS Interface FMCS Interface FMCS Interface FMCS Interface FMCS
System leak = 0 transport container empty = 0 System In Operation = 1 System faulty = 0 System will serviced = 0

-31A1 45K1/ANS 45K2/ANS 45K3/ANS 45K4/ANS 45K5/ANS


VIPA CPU313SC VIPA CPU313SC VIPA CPU313SC VIPA CPU313SC VIPA CPU313SC
/34.7 /34.7 /34.7 /34.7 /34.7

A0.4 A0.5 A0.6 A0.7 A1.0


-X12 26 -X12 27 -X12 28 -X12 29 -X12 32

A1 A1 A1 A1 A1
-45K1 -45K2 -45K3 -45K4 -45K5
DC24V A2 DC24V A2 DC24V A2 DC24V A2 DC24V A2

0V 0V
10.7 / -X0V/07 -X0V/07 / 46.1
Elektro Kreutzpointner GmbH

11 11 11 11 11
02.08.2013

-45K1 -45K2 -45K3 -45K4 -45K5


/45.2 12 14 /45.4 12 14 /45.5 12 14 /45.6 12 14 /45.8 12 14

OR OR OR OR OR OR OR OR OR OR OR OR OR OR OR

-X20.2 1 2 3 PE -X20.2 4 5 6 PE -X20.2 7 8 9 PE -X20.2 10 11 12 PE -X20.2 13 14 15 PE


ZDU 2.5 ZDU 2.5 ZDU 2.5 ZDU 2.5 ZDU 2.5

ACHTUNG FREMDSPANNUNG

14 14 14 14 14
11 /45.2 11 /45.4 11 /45.5 11 /45.6 11 /45.8
FOR RELEASE

12 12 12 12 12
24 24 24 24 24
21 21 21 21 21
22 22 22 22 22

Interface FMCS Interface FMCS Interface FMCS Interface FMCS Interface FMCS
System leak transport container empty System In Operation System faulty System will serviced
42 46
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Interface FMCS Page: 45
1 2 3 4 5 6 7 8 9 10

Interface FMCS Interface FMCS Spare Relay Spare Relay Spare Relay
VMB 1 leak = 0 VMB 2 leak = 0 for Interface for Interface for Interface

-31A1 46K1/ANS 46K2/ANS 46K3/ANS 46K4/ANS 46K5/ANS


VIPA CPU313SC VIPA CPU313SC VIPA CPU313SC VIPA CPU313SC VIPA CPU313SC
/34.7 /34.7 /34.7 /34.7 /34.7

A1.1 A1.2 A1.3 A1.4 A1.5


-X12 33 -X12 34 -X12 35 -X12 36 -X12 37

A1 A1 A1 A1 A1
-46K1 -46K2 -46K3 -46K4 -46K5
DC24V A2 DC24V A2 DC24V A2 DC24V A2 DC24V A2

0V 0V
45.9 / -X0V/07 -X0V/07 / 48.1
Elektro Kreutzpointner GmbH

11 11 11 11 11
02.08.2013

-46K1 -46K2 -46K3 -46K4 -46K5


/46.2 12 14 /46.4 12 14 /46.5 12 14 /46.6 12 14 /46.8 12 14

OR OR OR OR OR OR OR OR OR OR OR OR OR OR OR

-X20.2 16 17 18 PE -X20.2 19 20 21 PE -X20.2 22 23 24 PE -X20.2 25 26 27 PE -X20.2 28 29 30 PE


ZDU 2.5 ZDU 2.5 ZDU 2.5 ZDU 2.5 ZDU 2.5

ACHTUNG FREMDSPANNUNG

14 14 14 14 14
11 /46.2 11 /46.4 11 /46.5 11 /46.6 11 /46.8
FOR RELEASE

12 12 12 12 12
24 24 24 24 24
21 21 21 21 21
22 22 22 22 22

Interface FMCS Interface FMCS Spare Relay Spare Relay Spare Relay
VMB 1 leak VMB 2 leak for Interface for Interface for Interface
45 48
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Interface FMCS Page: 46
1 2 3 4 5 6 7 8 9 10

Interface
TMAH Blending System
Requirements = 1

-31A1 48K1/ANF
VIPA CPU313SC
/34.7

A1.7
-X12 39

A1
-48K1
DC24V A2

0V
46.9 / -X0V/07
Elektro Kreutzpointner GmbH

11
02.08.2013

-48K1
/48.2 12 14

OR OR OR

-X20.4 1 2 3 PE
ZDU 2.5

14
11 /48.2
FOR RELEASE

12
24
21
22

Interface
TMAH Blending System
46 51
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Interface TMAH Blending System Page: 48
1 2 3 4 5 6 7 8 9 10

Valve Cluster MPA-L


-FESTO_MPAL electircal Connection point Type Module Type Module Type Module Type Module Type Module Type Module Type Module Type Module Type Module Type Module
MS1 U A A A A A D D D D
2 x Address 2 x Address 2 x Address 2 x Address 2 x Address 1 x Address 1 x Address 1 x Address 1 x Address

Type Valve Type Valve Type Valve Type Valve Type Valve Type Valve Type Valve Type Valve Type Valve
KS KS KS KS KS X X X X
3/2-way solenoid valves 3/2-way solenoid valves 3/2-way solenoid valves 3/2-way solenoid valves 3/2-way solenoid valves 3/2-way solenoid valves 3/2-way solenoid valves 3/2-way solenoid valves 3/2-way solenoid valves

Plug
-X1
X2:1 X2:5 X2:9 X2:13 X2:17 X2:21 X2:23 X2:25 X2:27

X2:2 X2:6 X2:10 X2:14 X2:18 X2:22 X2:24 X2:26 X2:28


PE
+FLUID

-QM05 -QM12 -QM16 -QM23 -RESERVE/01 -GP02/1 -GP01/1 -GP02/2 -GP01/2


/52.2 /54.2 /56.2 /58.2 /180.3 /60.2 /61.2 /62.2 /63.2
Solenoid: 14 Solenoid: 14 Solenoid: 14 Solenoid: 14 Solenoid: 14 Solenoid: 14 Solenoid: 14 Solenoid: 14 Solenoid: 14
Pneumatics Output signal: 4 Pneumatics Output signal: 4 Pneumatics Output signal: 4 Pneumatics Output signal: 4 Pneumatics Output signal: 4 Pneumatics Output signal: 2 Pneumatics Output signal: 2 Pneumatics Output signal: 2 Pneumatics Output signal: 2
Address: 0 Address: 2 Address: 4 Address: 6 Address: 8 Address: 10 Address: 11 Address: 12 Address: 13

X2:3 X2:7 X2:11 X2:15 X2:19

X2:4 X2:8 X2:12 X2:16 X2:20


Elektro Kreutzpointner GmbH

-QM09 -QM14 -QM20 -QM25 -RESERVE/02


/53.2 /55.2 /57.2 /59.2 /180.5
Solenoid: 12 Solenoid: 12 Solenoid: 12 Solenoid: 12 Solenoid: 12
Pneumatics Output signal: 2 Pneumatics Output signal: 2 Pneumatics Output signal: 2 Pneumatics Output signal: 2 Pneumatics Output signal: 2
Address: 1 Address: 3 Address: 5 Address: 7 Address: 9
02.08.2013

-XPE PE
FOR RELEASE

48 52
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster Overview Page: 51
1 2 3 4 5 6 7 8 9 10

Valve Cluster
Valve QM05
Control = 1

-31A2 QM05
VIPA SM322
/35.5

A2.0
-X1 2
Elektro Kreutzpointner GmbH

-X21.1 1
02.08.2013

-PCCBC_FESTO_MPAL WH
FESTO KABEL
KMP6-25P-20-2,5

-FESTO_MPAL
MS1 -X1 1

X2:1
+FLUID

-QM05
/51.3
FOR RELEASE

Solenoid: 14
X2:2
Pneumatics Output signal: 4
Address: 0
0V

Valve Cluster
Valve QM05
51 53
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster, Valve QM05 Page: 52
1 2 3 4 5 6 7 8 9 10

Valve Cluster
Valve QM09
Control = 1

-31A2 QM09
VIPA SM322
/35.5

A2.1
-X1 3
Elektro Kreutzpointner GmbH

-X21.1 2
02.08.2013

-PCCBC_FESTO_MPAL BN
FESTO KABEL
KMP6-25P-20-2,5

-FESTO_MPAL
MS1 -X1 2

X2:3
+FLUID

-QM09
/51.3
FOR RELEASE

Solenoid: 12
X2:4
Pneumatics Output signal: 2
Address: 1
0V

Valve Cluster
Valve QM09
52 54
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster, Valve QM09 Page: 53
1 2 3 4 5 6 7 8 9 10

Valve Cluster
Valve QM12
Control = 1

-31A2 QM12
VIPA SM322
/35.5

A2.2
-X1 4
Elektro Kreutzpointner GmbH

-X21.1 3
02.08.2013

-PCCBC_FESTO_MPAL GN
FESTO KABEL
KMP6-25P-20-2,5

-FESTO_MPAL
MS1 -X1 3

X2:5
+FLUID

-QM12
/51.4
FOR RELEASE

Solenoid: 14
X2:6
Pneumatics Output signal: 4
Address: 2
0V

Valve Cluster
Valve QM12
53 55
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster, Valve QM12 Page: 54
1 2 3 4 5 6 7 8 9 10

Valve Cluster
Valve QM14
Control = 1

-31A2 QM14
VIPA SM322
/35.5

A2.3
-X1 5
Elektro Kreutzpointner GmbH

-X21.1 4
02.08.2013

-PCCBC_FESTO_MPAL YE
FESTO KABEL
KMP6-25P-20-2,5

-FESTO_MPAL
MS1 -X1 4

X2:7
+FLUID

-QM14
/51.4
FOR RELEASE

Solenoid: 12
X2:8
Pneumatics Output signal: 2
Address: 3
0V

Valve Cluster
Valve QM14
54 56
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster, Valve QM14 Page: 55
1 2 3 4 5 6 7 8 9 10

Valve Cluster
Valve QM16
Control = 1

-31A2 QM16
VIPA SM322
/35.5

A2.4
-X1 6
Elektro Kreutzpointner GmbH

-X21.1 5
02.08.2013

-PCCBC_FESTO_MPAL GY
FESTO KABEL
KMP6-25P-20-2,5

-FESTO_MPAL
MS1 -X1 5

X2:9
+FLUID

-QM16
/51.4
FOR RELEASE

Solenoid: 14
X2:10
Pneumatics Output signal: 4
Address: 4
0V

Valve Cluster
Valve QM16
55 57
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster, Valve QM16 Page: 56
1 2 3 4 5 6 7 8 9 10

Valve Cluster
Valve QM20
Control = 1

-31A2 QM20
VIPA SM322
/35.5

A2.5
-X1 7
Elektro Kreutzpointner GmbH

-X21.1 6
02.08.2013

-PCCBC_FESTO_MPAL PK
FESTO KABEL
KMP6-25P-20-2,5

-FESTO_MPAL
MS1 -X1 6

X2:11
+FLUID

-QM20
/51.4
FOR RELEASE

Solenoid: 12
X2:12
Pneumatics Output signal: 2
Address: 5
0V

Valve Cluster
Valve QM20
56 58
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster, Valve QM20 Page: 57
1 2 3 4 5 6 7 8 9 10

Valve Cluster
Valve QM23
Control = 1

-31A2 QM23
VIPA SM322
/35.5

A2.6
-X1 8
Elektro Kreutzpointner GmbH

-X21.1 7
02.08.2013

-PCCBC_FESTO_MPAL BU
FESTO KABEL
KMP6-25P-20-2,5

-FESTO_MPAL
MS1 -X1 7

X2:13
+FLUID

-QM23
/51.5
FOR RELEASE

Solenoid: 14
X2:14
Pneumatics Output signal: 4
Address: 6
0V

Valve Cluster
Valve QM23
57 59
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster, Valve QM23 Page: 58
1 2 3 4 5 6 7 8 9 10

Valve Cluster
Valve QM25
Control = 1

-31A2 QM25
VIPA SM322
/35.5

A2.7
-X1 9
Elektro Kreutzpointner GmbH

-X21.1 8
02.08.2013

-PCCBC_FESTO_MPAL RT
FESTO KABEL
KMP6-25P-20-2,5

-FESTO_MPAL
MS1 -X1 8

X2:15
+FLUID

-QM25
/51.5
FOR RELEASE

Solenoid: 12
X2:16
Pneumatics Output signal: 2
Address: 7
0V

Valve Cluster
Valve QM25
58 60
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster, Valve QM25 Page: 59
1 2 3 4 5 6 7 8 9 10

Valve Cluster
Valve fast GP02/1
Control = 1

-31A2 GP02/1
VIPA SM322
/35.5

A3.0
-X1 12
Elektro Kreutzpointner GmbH

-X21.1 11
02.08.2013

-PCCBC_FESTO_MPAL GY PK
FESTO KABEL
KMP6-25P-20-2,5

-FESTO_MPAL
MS1 -X1 11

X2:21
+FLUID

-GP02/1
/51.6
FOR RELEASE

Solenoid: 14
X2:22
Pneumatics Output signal: 2
Address: 10
0V

Valve Cluster
Valve fast GP02/1
59 61
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster, Valve fast GP02/1 Page: 60
1 2 3 4 5 6 7 8 9 10

Valve Cluster
Valve fast GP01/1
Control = 1

-31A2 GP01/1
VIPA SM322
/35.5

A3.1
-X1 13
Elektro Kreutzpointner GmbH

-X21.1 12
02.08.2013

-PCCBC_FESTO_MPAL RT BU
FESTO KABEL
KMP6-25P-20-2,5

-FESTO_MPAL
MS1 -X1 12

X2:23
+FLUID

-GP01/1
/51.7
FOR RELEASE

Solenoid: 14
X2:24
Pneumatics Output signal: 2
Address: 11
0V

Valve Cluster
Valve fast GP01/1
60 62
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster, Valve fast GP01/1 Page: 61
1 2 3 4 5 6 7 8 9 10

Valve Cluster
Valve slow GP02/2
Control = 1

-31A2 GP02/2
VIPA SM322
/35.5

A3.2
-X1 14
Elektro Kreutzpointner GmbH

-X21.1 13
02.08.2013

-PCCBC_FESTO_MPAL WH GN
FESTO KABEL
KMP6-25P-20-2,5

-FESTO_MPAL
MS1 -X1 13

X2:25
+FLUID

-GP02/2
/51.7
FOR RELEASE

Solenoid: 14
X2:26
Pneumatics Output signal: 2
Address: 12
0V

Valve Cluster
Valve slow GP02/2
61 63
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster, Valve slow GP02/2 Page: 62
1 2 3 4 5 6 7 8 9 10

Valve Cluster
Valve slow GP01/2
Control = 1

-31A2 GP01/2
VIPA SM322
/35.5

A3.3
-X1 15
Elektro Kreutzpointner GmbH

-X21.1 14
02.08.2013

-PCCBC_FESTO_MPAL BN GN
FESTO KABEL
KMP6-25P-20-2,5

-FESTO_MPAL
MS1 -X1 14

X2:27
+FLUID

-GP01/2
/51.8
FOR RELEASE

Solenoid: 14
X2:28
Pneumatics Output signal: 2
Address: 13
0V

Valve Cluster
Valve slow GP01/2
62 80
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster, Valve slow GP01/2 Page: 63
1 2 3 4 5 6 7 8 9 10

DC24V
-11F4/L24/40 / 81.2
0V
-11F4/L0/40 / 81.2
Elektro Kreutzpointner GmbH

-X22.1 1+ 1- 1 1x
02.08.2013

ZIA 1.5/4L-1S

DC24V
11.7 /-11F4/L24/40
0V
11.7 / -11F4/L0/40
FOR RELEASE

power Supply
63 81
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Initiator Terminals Supply Page: 80
1 2 3 4 5 6 7 8 9 10

Door sensor Drum door


GSO01
OK = 1

-31A1 GSO01
VIPA CPU313SC
/33.7

E0.4
-X11 26

DC24V DC24V
80.4 / -11F4/L24/40 -11F4/L24/40 / 82.2
0V 0V
80.4 / -11F4/L0/40 -11F4/L0/40 / 82.2
Elektro Kreutzpointner GmbH

-X22.1 2+ 2- 2 2x
02.08.2013

ZIA 1.5/4L-1S

-PCCBC_GSO01 BR BU BK
IFM PVC Kabel m. Stecker M8
3x0,34
+FLUID

1 3

+ -
-GSO01
FOR RELEASE

IFM
MS5010
4

Door sensor
Drum door
GSO01
80 82
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Door sensor Drum door GSO01 Page: 81
1 2 3 4 5 6 7 8 9 10

Door sensor Drum door


GSO02
OK = 1

-31A1 GSO02
VIPA CPU313SC
/33.7

E0.5
-X11 27

DC24V DC24V
81.4 / -11F4/L24/40 -11F4/L24/40 / 83.2
0V 0V
81.4 / -11F4/L0/40 -11F4/L0/40 / 83.2
Elektro Kreutzpointner GmbH

-X22.1 3+ 3- 3 3x
02.08.2013

ZIA 1.5/4L-1S

-PCCBC_GSO02 BR BU BK
IFM PVC Kabel m. Stecker M8
3x0,34
+FLUID

1 3

+ -
-GSO02
FOR RELEASE

IFM
MS5010
4

Door sensor
Drum door
GSO02
81 83
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Door sensor Drum door GSO02 Page: 82
1 2 3 4 5 6 7 8 9 10

Door sensor cabinet


GSO03
OK = 1

-31A1 GSO03
VIPA CPU313SC
/33.7

E0.6
-X11 28

DC24V DC24V
82.4 / -11F4/L24/40 -11F4/L24/40 / 84.2
0V 0V
82.4 / -11F4/L0/40 -11F4/L0/40 / 84.2
Elektro Kreutzpointner GmbH

-X22.1 4+ 4- 4 4x
02.08.2013

ZIA 1.5/4L-1S

-PCCBC_GSO03 BR BU BK
IFM PVC Kabel m. Stecker M8
3x0,34
+FLUID

1 3

+ -
-GSO03
FOR RELEASE

IFM
MS5010
4

Door sensor
cabinet
GSO03
82 84
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Door sensor cabinet GSO03 Page: 83
1 2 3 4 5 6 7 8 9 10

Filling level
LALL01
OK = 1

-31A1 LALL01
VIPA CPU313SC
/33.7

E0.7
-X11 29

DC24V DC24V
83.4 / -11F4/L24/40 -11F4/L24/40 / 85.2
0V 0V
83.4 / -11F4/L0/40 -11F4/L0/40 / 85.2
Elektro Kreutzpointner GmbH

-X22.1 5+ 5- 5 5x
02.08.2013

ZIA 1.5/4L-1S

-PCCBC_LALL01 BR BU BK WH
IFM PVC Kabel m. Stecker M8
4x0,34

-LALL01 1 3 4 2
+FLUID

1 3
+ -
-LALL01
FOR RELEASE

IFM
KQ6004 4

Filling level
LALL01
83 85
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Filling level LALL01 Page: 84
1 2 3 4 5 6 7 8 9 10

Filling level
LSL01
OK = 1

-31A1 LSL01
VIPA CPU313SC
/34.4

E1.0
-X12 2

DC24V DC24V
84.4 / -11F4/L24/40 -11F4/L24/40 / 86.2
0V 0V
84.4 / -11F4/L0/40 -11F4/L0/40 / 86.2
Elektro Kreutzpointner GmbH

-X22.1 6+ 6- 6 6x
02.08.2013

ZIA 1.5/4L-1S

-PCCBC_LSL01 BR BU BK WH
IFM PVC Kabel m. Stecker M8
4x0,34

-LSL01 1 3 4 2
+FLUID

1 3
+ -
-LSL01
FOR RELEASE

IFM
KQ6004 4

Filling level
LSL01
84 86
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Filling level LSL01 Page: 85
1 2 3 4 5 6 7 8 9 10

Filling level
LSH01
OK = 1

-31A1 LSH01
VIPA CPU313SC
/34.4

E1.1
-X12 3

DC24V DC24V
85.4 / -11F4/L24/40 -11F4/L24/40 / 87.2
0V 0V
85.4 / -11F4/L0/40 -11F4/L0/40 / 87.2
Elektro Kreutzpointner GmbH

-X22.1 7+ 7- 7 7x
02.08.2013

ZIA 1.5/4L-1S

-PCCBC_LSH01 BR BU BK WH
IFM PVC Kabel m. Stecker M8
4x0,34

-LSH01 1 3 4 2
+FLUID

1 3
+ -
-LSH01
FOR RELEASE

IFM
KQ6004 4

Filling level
LSH01
85 87
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Filling level LSH01 Page: 86
1 2 3 4 5 6 7 8 9 10

Filling level
LAHH01
OK = 1

-31A1 LAHH01
VIPA CPU313SC
/34.4

E1.2
-X12 4

DC24V DC24V
86.4 / -11F4/L24/40 -11F4/L24/40 / 88.2
0V 0V
86.4 / -11F4/L0/40 -11F4/L0/40 / 88.2
Elektro Kreutzpointner GmbH

-X22.1 8+ 8- 8 8x
02.08.2013

ZIA 1.5/4L-1S

-PCCBC_LAHH01 BR BU BK WH
IFM PVC Kabel m. Stecker M8
4x0,34

-LAHH01 1 3 4 2
+FLUID

1 3
+ -
-LAHH01
FOR RELEASE

IFM
KQ6004 4

Filling level
LAHH01
86 88
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Filling level LAHH01 Page: 87
1 2 3 4 5 6 7 8 9 10

Membrane monitoring
XSAH01
OK = 1

-31A1 XSAH01
VIPA CPU313SC
/34.4

E1.3
-X12 5

DC24V DC24V
87.4 / -11F4/L24/40 -11F4/L24/40 / 89.2
0V 0V
87.4 / -11F4/L0/40 -11F4/L0/40 / 89.2
Elektro Kreutzpointner GmbH

-X22.1 9+ 9- 9 9x
02.08.2013

ZIA 1.5/4L-1S

-PCCBC_XSAH01/01 1 2 3
ÖLFLEX CLASSIC 110
3X1

-ZKK/XSAH01
Zwischenklemmkasten
-X1 1 2 3

-PCCBC_XSAH01/02 BR BU BK
ALMATEC LIFFY
3x0,25
+FLUID

+ -
+ -
-XSAH01
FOR RELEASE

ALMATEC
K 605-23KL A

Membrane monitoring
XSAH01
87 89
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Membrane monitoring XSAH01 Page: 88
1 2 3 4 5 6 7 8 9 10

Membrane monitoring
XSAH02
OK = 1

-31A1 XSAH02
VIPA CPU313SC
/34.4

E1.4
-X12 6

DC24V DC24V
88.4 / -11F4/L24/40 -11F4/L24/40 / 90.2
0V 0V
88.4 / -11F4/L0/40 -11F4/L0/40 / 90.2
Elektro Kreutzpointner GmbH

-X22.1 10+ 10- 10 10x


02.08.2013

ZIA 1.5/4L-1S

-PCCBC_XSAH02/01 1 2 3
ÖLFLEX CLASSIC 110
3X1

-ZKK/XSAH02
Zwischenklemmkasten
-X1 1 2 3

-PCCBC_XSAH02/02 BR BU BK
ALMATEC LIFFY
3x0,25
+FLUID

+ -
+ -
-XSAH02
FOR RELEASE

ALMATEC
K 605-23KL A

Membrane monitoring
XSAH02
88 90
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Membrane monitoring XSAH02 Page: 89
1 2 3 4 5 6 7 8 9 10

leak
LSAH01
OK = 1

-31A1 LSAH01
VIPA CPU313SC
/34.4

E1.5
-X12 7

DC24V DC24V
89.4 /-11F4/L24/40 -11F4/L24/40 / 91.2
0V 0V
89.4 / -11F4/L0/40 -11F4/L0/40 / 91.2

-X22.1 11+ 11- 11 11x


ZIA 1.5/4L-1S
Elektro Kreutzpointner GmbH

-PCCBC_LSAH01 BN BU WH BK
VEGA ASL.2GA m. Stecker M12
4x0,34
02.08.2013

-LSAH01
VEGA
swing 51
+FLUID
FOR RELEASE

L
MAXIMUM

leak
LSAH01
89 91
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: leak LSAH01 Page: 90
1 2 3 4 5 6 7 8 9 10

Strömungssensor
FISA±01
OK = 1

-31A1 FISA±01
VIPA CPU313SC
/34.4

E1.6
-X12 8

DC24V DC24V
90.4 /-11F4/L24/40 -11F4/L24/40 / 120.2
0V 0V
90.4 / -11F4/L0/40 -11F4/L0/40 / 120.2

-X22.1 12+ 12- 12 12x


ZIA 1.5/4L-1S
Elektro Kreutzpointner GmbH

-PCCBC_FISA±01 BR BU BK WH
IFM PVC Kabel m. Stecker M12
4x0,34
02.08.2013

-FISA±01
IFM
SI5000
+FLUID
FOR RELEASE

Strömungssensor
FISA±01
90 92
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: DESCRIPTION1 FISA±01 Page: 91
1 2 3 4 5 6 7 8 9 10

Pressure transmitter
PISA±01 = 4...20mA

-31A1 PISA±01
VIPA CPU313SC
/33.4

PEW256
-X11 3 -X11 4
I M

DC24V
11.6 /-11F3/L24/33
0V
11.6 / -11F3/L0/33

-X23.1 1 2 3 PE SH
ZDK 2.5
Elektro Kreutzpointner GmbH

-PCCBC_PISA±01 1 2 GNYE SH
ÖLFLEX CLASSIC 110 CY G
3G0,75
02.08.2013

PE

-PISA±01
GEMÜ 4...20mA
C31 2 wire technology
+FLUID
FOR RELEASE

P
0...6 bar

Pressure transmitter
PISA±01
91 120
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Pressure transmitter PISA±01 Page: 92
1 2 3 4 5 6 7 8 9 10

VMB BOX 1
leak
LSAH01/VMB1
OK = 1

-31A1 LSAH01/VMB1
VIPA CPU313SC
/34.4

E1.7
-X12 9

DC24V DC24V
91.4 /-11F4/L24/40 -11F4/L24/40 / 121.2
0V 0V
91.4 / -11F4/L0/40 -11F4/L0/40 / 121.2

-X22.1 13+ 13- 13 13x


ZIA 1.5/4L-1S

-PCCBC_LSAH01/VMB1/01 1 2 3
ÖLFLEX CLASSIC 110
3X1

-ZKK/LSAH01/VMB1
Zwischenklemmkasten
Elektro Kreutzpointner GmbH

-X1 1 2 3 4
02.08.2013

-PCCBC_LSAH01/VMB1/02 BR BU BK WH
IFM PVC Kabel m. Stecker M8
4x0,34
+FLUID/VMB1

-LSAH01 1 3 4 2

1 3
+ -
-LSAH01
IFM
FOR RELEASE

KQ6004 4

VMB BOX 1
leak
LSAH01
92 121
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: VMB BOX 1, leak LSAH01 Page: 120
1 2 3 4 5 6 7 8 9 10

VMB BOX 2
leak
LSAH01/VMB2
OK = 1

-31A1 LSAH01/VMB2
VIPA CPU313SC
/34.4

E2.0
-X12 12

DC24V DC24V
120.4 /-11F4/L24/40 -11F4/L24/40 / 122.2
0V 0V
120.4 / -11F4/L0/40 -11F4/L0/40 / 122.2

-X22.1 14+ 14- 14 14x


ZIA 1.5/4L-1S

-PCCBC_LSAH01/VMB2/01 1 2 3
ÖLFLEX CLASSIC 110
3X1

-ZKK/LSAH01/VMB2
Zwischenklemmkasten
Elektro Kreutzpointner GmbH

-X1 1 2 3 4
02.08.2013

-PCCBC_LSAH01/VMB2/02 BR BU BK WH
IFM PVC Kabel m. Stecker M8
4x0,34
+FLUID/VMB2

-LSAH01 1 3 4 2

1 3
+ -
-LSAH01
IFM
FOR RELEASE

KQ6004 4

VMB BOX 2
leak
LSAH01
120 122
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: VMB BOX 2, leak LSAH01 Page: 121
1 2 3 4 5 6 7 8 9 10

Spare
Initiator Terminals

-31A1 RES_E2.1
VIPA CPU313SC
/34.4

E2.1
-X12 13

DC24V DC24V
121.4 /-11F4/L24/40 -11F4/L24/40 / 123.2
0V 0V
121.4 / -11F4/L0/40 -11F4/L0/40 / 123.2

-X22.1 15+ 15- 15 15x


ZIA 1.5/4L-1S
Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

Spare
Initiator Terminals
121 123
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Spare Initiator Terminals Page: 122
1 2 3 4 5 6 7 8 9 10

Spare
Initiator Terminals

-31A1 RES_E2.2
VIPA CPU313SC
/34.4

E2.2
-X12 14

DC24V DC24V
122.4 /-11F4/L24/40 -11F4/L24/40 / 124.2
0V 0V
122.4 / -11F4/L0/40 -11F4/L0/40 / 124.2

-X22.1 16+ 16- 16 16x


ZIA 1.5/4L-1S
Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

Spare
Initiator Terminals
122 124
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Spare Initiator Terminals Page: 123
1 2 3 4 5 6 7 8 9 10

Spare
Initiator Terminals

-31A1 RES_E2.3
VIPA CPU313SC
/34.4

E2.3
-X12 15

DC24V
123.4 /-11F4/L24/40
0V
123.4 / -11F4/L0/40

-X22.1 17+ 17- 17 17x


ZIA 1.5/4L-1S
Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

Spare
Initiator Terminals
123 180
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Spare Initiator Terminals Page: 124
1 2 3 4 5 6 7 8 9 10

Valve Cluster Valve Cluster


Valve RESERVE/01 Valve RESERVE/02
Control = 1 Control = 1

-31A2 RES_A3.4 -31A2 RES_A3.5


VIPA SM322 VIPA SM322
/35.5 /35.5

A3.4 A3.5
-X1 16 -X1 17
Elektro Kreutzpointner GmbH

-X21.1 9 -X21.1 10 -X21.1 15 -X21.1 16


02.08.2013

-PCCBC_FESTO_MPAL BK -PCCBC_FESTO_MPAL VT -PCCBC_FESTO_MPAL WH YE -PCCBC_FESTO_MPAL YE BN


FESTO KABEL FESTO KABEL FESTO KABEL FESTO KABEL
KMP6-25P-20-2,5 KMP6-25P-20-2,5 KMP6-25P-20-2,5 KMP6-25P-20-2,5

-FESTO_MPAL -FESTO_MPAL -FESTO_MPAL -FESTO_MPAL


MS1 -X1 9 MS1 -X1 10 MS1 -X1 15 MS1 -X1 16

X2:17 X2:19
+FLUID

-RESERVE/01 -RESERVE/02
/51.5 /51.5
FOR RELEASE

Solenoid: 14 Solenoid: 12
X2:18 X2:20
Pneumatics Output signal: 4 Pneumatics Output signal: 2
Address: 8 Address: 9
0V 0V

Valve Cluster Valve Cluster Valve Cluster Valve Cluster


Valve RESERVE/01 Valve RESERVE/02 Spare Slot / module Spare Slot / module
124 181
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster Spare Page: 180
1 2 3 4 5 6 7 8 9 10

Elektro Kreutzpointner GmbH

-X21.1 17 -X21.1 18 -X21.1 19 -X21.1 20


02.08.2013

-PCCBC_FESTO_MPAL WH GY -PCCBC_FESTO_MPAL GY BN -PCCBC_FESTO_MPAL WH PK -PCCBC_FESTO_MPAL PK BN


FESTO KABEL FESTO KABEL FESTO KABEL FESTO KABEL
KMP6-25P-20-2,5 KMP6-25P-20-2,5 KMP6-25P-20-2,5 KMP6-25P-20-2,5

-FESTO_MPAL -FESTO_MPAL -FESTO_MPAL -FESTO_MPAL


MS1 -X1 17 MS1 -X1 18 MS1 -X1 19 MS1 -X1 20
+FLUID
FOR RELEASE

Valve Cluster Valve Cluster Valve Cluster Valve Cluster


Spare Slot / module Spare Slot / module Spare Slot / module Spare Slot / module
180 182
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster Spare Page: 181
1 2 3 4 5 6 7 8 9 10

Elektro Kreutzpointner GmbH

-X21.1 21 -X21.1 22 -X21.1 23 -X21.1 24


02.08.2013

-PCCBC_FESTO_MPAL WH BU -PCCBC_FESTO_MPAL BN BU -PCCBC_FESTO_MPAL WH RT -PCCBC_FESTO_MPAL BN RT


FESTO KABEL FESTO KABEL FESTO KABEL FESTO KABEL
KMP6-25P-20-2,5 KMP6-25P-20-2,5 KMP6-25P-20-2,5 KMP6-25P-20-2,5

-FESTO_MPAL -FESTO_MPAL -FESTO_MPAL -FESTO_MPAL


MS1 -X1 21 MS1 -X1 22 MS1 -X1 23 MS1 -X1 24
+FLUID
FOR RELEASE

Valve Cluster Valve Cluster Valve Cluster Valve Cluster


Spare Slot / module Spare Slot / module Spare Slot / module Spare Slot / module
181 183
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster Spare Page: 182
1 2 3 4 5 6 7 8 9 10

0V
10.7 / -X0V/09
Elektro Kreutzpointner GmbH

-X21.1 25 -X21.1 26 PE PE
02.08.2013

-PCCBC_FESTO_MPAL WH BK
FESTO KABEL
KMP6-25P-20-2,5

-FESTO_MPAL 0V

MS1 -X1 25
0V
+FLUID
FOR RELEASE

Valve Cluster
0V - Supply PE
182 &KLELUE=ANL_01+EBO_02/1
Plant:
Date 01.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & STRPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Circuit diagram
Appr t.starka chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Valve Cluster Spare Page: 183
1 2 3 4 5 6 7 8 9 10

Terminal-strip overview F14_002

Terminals
Terminal strip Function text Terminal diagram page
first last Total PE Total N Total number

-X0V DC0V - Potential distributor 1 5 0 0 5 &KLEPL=PCCBC+ELEKTRO/1

-X1.0 Power supply AC230V 1 PE 1 1 3 &KLEPL=PCCBC+ELEKTRO/2

-X1.1 Outgoing lines AC230/400V 1 PE 5 0 15 &KLEPL=PCCBC+ELEKTRO/3

-X3.1 Potential distributor DC24V 1 6 0 0 6 &KLEPL=PCCBC+ELEKTRO/4

-X3.2 Potential distributor DC24V 1 6 0 0 6 &KLEPL=PCCBC+ELEKTRO/5

-X3.3 Potential distributor DC24V 1 6 0 0 6 &KLEPL=PCCBC+ELEKTRO/6

-X3.4 Potential distributor DC24V 1 6 0 0 6 &KLEPL=PCCBC+ELEKTRO/7

-X3.5 Potential distributor DC24V 1 6 0 0 6 &KLEPL=PCCBC+ELEKTRO/8

-X20.1 Signal column 1 PE 2 0 8 &KLEPL=PCCBC+ELEKTRO/9

-X20.2 Interface FMCS 1 PE 10 0 40 &KLEPL=PCCBC+ELEKTRO/10

-X20.3 Plant Stop External 1 PE 4 0 12 &KLEPL=PCCBC+ELEKTRO/12

-X20.4 Interface TMAH Blending System 1 PE 1 0 4 &KLEPL=PCCBC+ELEKTRO/13

-X21.1 Valve Cluster 1 PE 2 0 28 &KLEPL=PCCBC+ELEKTRO/14

-X22.1 Digital Sensors 1 17x 0 0 68 &KLEPL=PCCBC+ELEKTRO/15

-X23.1 analog Sensors 1 PE 1 0 4 &KLEPL=PCCBC+ELEKTRO/17


Elektro Kreutzpointner GmbH

-XN N - Potential distributor 1 4 0 0 4 &KLEPL=PCCBC+ELEKTRO/18


02.08.2013

-XPA PA - Terminal PA PA 1 0 1 &KLEPL=PCCBC+ELEKTRO/19

-XPE PE - Terminal strip PE PE 5 0 5 &KLEPL=PCCBC+ELEKTRO/20


FOR RELEASE

=PCCB0/1 &KLEPL=ANL_01+EBO_02/1
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLELUE
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal strip overview
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal-strip overview Page: 1
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X0V
DC0V - Potential distributor

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

-10G1 - 1 -X3.1 2 &STRPL/10.6

-X3.2 2 2 -X3.3 2 &STRPL/10.6

-X3.4 2 3 -X3.5 2 &STRPL/10.6

-31A1 -X11:20 4 -45K1 A2 &STRPL/10.7

-31A1 -X11:15 5 -X21.1 25 &STRPL/10.7


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

=PCCB0/20 2
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X0V Page: 1
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X1.0
Power supply AC230V

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Power supply from Customer =EXT+EXT-BMK x 1 -1Q1 2 &STRPL/1.2

Power supply from Customer =EXT+EXT-BMK x N -1Q1 6 &STRPL/1.2

Power supply from Customer =EXT+EXT-BMK x PE -PE PE &STRPL/1.2


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

1 3
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X1.0 Page: 2
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

PCCBC_5H2

PCCBC_5H1

PCCBC_3E1
Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X1.1
Outgoing lines AC230/400V

3G1
ÖLFLEX CLASSIC 110 G

3G1
ÖLFLEX CLASSIC 110 G

ANSCHLUSSLEITUNG 3G1
RITTAL

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Enclosure light with female receptacle BR -3E1 L 1 -3F1 2 &STRPL/3.2

Enclosure light with female receptacle BU -3E1 N N -3F1 N' &STRPL/3.3

Enclosure light with female receptacle GNYE -3E1 PE PE -PE PE &STRPL/3.3

Outgoing line AC230V Spare 2 -4F1 2 &STRPL/4.2

Outgoing line AC230V Spare N -XN 2 &STRPL/4.3

Outgoing line AC230V Spare PE -PE PE &STRPL/4.3

Plantlighting 1 +FLUID-5H1 L1 3 -5S1 1.4 &STRPL/5.2

Plantlighting 2 +FLUID-5H1 N N &STRPL/5.2

Plantlighting GNYE +FLUID-5H1 PE PE -PE PE &STRPL/5.3

Plantlighting 1 +FLUID-5H2 L1 4 &STRPL/5.4

Plantlighting 2 +FLUID-5H2 N N &STRPL/5.5

Plantlighting GNYE +FLUID-5H2 PE PE -PE PE &STRPL/5.5

Spare Outgoing line AC230V 5 -5F1 2 &STRPL/5.7

Spare Outgoing line AC230V N &STRPL/5.7


Elektro Kreutzpointner GmbH

Spare Outgoing line AC230V PE -PE PE &STRPL/5.7


02.08.2013
FOR RELEASE

2 4
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X1.1 Page: 3
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X3.1
Potential distributor DC24V

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Potential distributor DC24V -31A1 -X1:+ 1 -11F1 2 &STRPL/11.2

Potential distributor DC24V -31A1 -X1:- 2 -X0V 1 &STRPL/11.2

Potential distributor DC24V -31A1 -X12:21 3 -31A1 -X12:1 &STRPL/11.2

Potential distributor DC24V -31A1 -X12:30 4 -31A1 -X12:20 &STRPL/11.2

Potential distributor DC24V -31A1 -X12:31 5 &STRPL/11.3

Potential distributor DC24V -31A1 -X12:40 6 &STRPL/11.3


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

3 5
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X3.1 Page: 4
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X3.2
Potential distributor DC24V

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Potential distributor DC24V -25K1 13 1 -11F2 2 &STRPL/11.4

Potential distributor DC24V -31A2 -X1:10 2 -X0V 2 &STRPL/11.4

Potential distributor DC24V -25K1 23 3 &STRPL/11.4

Potential distributor DC24V -31A2 -X1:20 4 &STRPL/11.4

Potential distributor DC24V -45A1 -X80:1 5 &STRPL/11.4

Potential distributor DC24V -45A1 -X80:2 6 &STRPL/11.4


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

4 6
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X3.2 Page: 5
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X3.3
Potential distributor DC24V

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Potential distributor DC24V -3F1 13 1 -11F3 2 &STRPL/11.5

Potential distributor DC24V 2 -X0V 2 &STRPL/11.5

Potential distributor DC24V -20S1 1.3 3 &STRPL/11.6

Potential distributor DC24V -X20.1 1 4 &STRPL/11.6

Potential distributor DC24V -X23.1 1 5 &STRPL/11.6

Potential distributor DC24V -X23.1 3 6 &STRPL/11.6


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

5 7
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X3.3 Page: 6
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X3.4
Potential distributor DC24V

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Potential distributor DC24V -X22.1 1+ 1 -11F4 2 &STRPL/11.7

Potential distributor DC24V -X22.1 1- 2 -X0V 3 &STRPL/11.7

Potential distributor DC24V 3 &STRPL/11.8

Potential distributor DC24V 4 &STRPL/11.8

Potential distributor DC24V 5 &STRPL/11.8

Potential distributor DC24V 6 &STRPL/11.8


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

6 8
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X3.4 Page: 7
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X3.5
Potential distributor DC24V

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Potential distributor DC24V -X20.3 1 1 -11F5 2 &STRPL/11.9

Potential distributor DC24V -25K1 A2 2 -X0V 3 &STRPL/11.9

Potential distributor DC24V -25K1 41 3 &STRPL/11.9

Potential distributor DC24V 4 &STRPL/11.9

Potential distributor DC24V 5 &STRPL/11.10

Potential distributor DC24V 6 &STRPL/11.10


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

7 9
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X3.5 Page: 8
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

PCCBC_Q20H1
Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X20.1
Signal column

7G0,75
ÖLFLEX CLASSIC 110 G

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Signal column 1 -20H1 0 1 -X3.3 4 &STRPL/20.5

Signal column 2 -20H1 1 2 -31A1 -X12:22 &STRPL/20.6

Signal column 3 -20H1 2 3 -31A1 -X12:23 &STRPL/20.7

Signal column 4 -20H1 3 4 -31A1 -X12:24 &STRPL/20.8

Signal column 5 -20H1 4 5 -31A1 -X12:25 &STRPL/20.9

Signal column 6 -20H1 5 6 &STRPL/20.9

Signal column GNYE -20H1 PE PE -PE PE &STRPL/20.9

Signal column PE -PE PE &STRPL/20.9


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

8 10
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X20.1 Page: 9
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X20.2
Interface FMCS

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Interface FMCS System leak 1 -45K1 11 &STRPL/45.2

Interface FMCS System leak 2 -45K1 12 &STRPL/45.2

Interface FMCS System leak 3 -45K1 14 &STRPL/45.2

Interface FMCS System leak PE -PE PE &STRPL/45.3

Interface FMCS transport container empty 4 -45K2 11 &STRPL/45.3

Interface FMCS transport container empty 5 -45K2 12 &STRPL/45.4

Interface FMCS transport container empty 6 -45K2 14 &STRPL/45.4

Interface FMCS transport container empty PE -PE PE &STRPL/45.4

Interface FMCS System In Operation 7 -45K3 11 &STRPL/45.5

Interface FMCS System In Operation 8 -45K3 12 &STRPL/45.5

Interface FMCS System In Operation 9 -45K3 14 &STRPL/45.5

Interface FMCS System In Operation PE -PE PE &STRPL/45.5

Interface FMCS System faulty 10 -45K4 11 &STRPL/45.6

Interface FMCS System faulty 11 -45K4 12 &STRPL/45.6


Elektro Kreutzpointner GmbH

Interface FMCS System faulty 12 -45K4 14 &STRPL/45.7

Interface FMCS System faulty PE -PE PE &STRPL/45.7


02.08.2013

Interface FMCS System will serviced 13 -45K5 11 &STRPL/45.8

Interface FMCS System will serviced 14 -45K5 12 &STRPL/45.8

Interface FMCS System will serviced 15 -45K5 14 &STRPL/45.8

Interface FMCS System will serviced PE -PE PE &STRPL/45.8

Interface FMCS VMB 1 leak 16 -46K1 11 &STRPL/46.2

Interface FMCS VMB 1 leak 17 -46K1 12 &STRPL/46.2

Interface FMCS VMB 1 leak 18 -46K1 14 &STRPL/46.2

Interface FMCS VMB 1 leak PE -PE PE &STRPL/46.3

Interface FMCS VMB 2 leak 19 -46K2 11 &STRPL/46.3

Interface FMCS VMB 2 leak 20 -46K2 12 &STRPL/46.4

Interface FMCS VMB 2 leak 21 -46K2 14 &STRPL/46.4

Interface FMCS VMB 2 leak PE -PE PE &STRPL/46.4

Spare Relay for Interface 22 -46K3 11 &STRPL/46.5

Spare Relay for Interface 23 -46K3 12 &STRPL/46.5


FOR RELEASE

Spare Relay for Interface 24 -46K3 14 &STRPL/46.5

Spare Relay for Interface PE -PE PE &STRPL/46.5

Spare Relay for Interface 25 -46K4 11 &STRPL/46.6

Spare Relay for Interface 26 -46K4 12 &STRPL/46.6

Spare Relay for Interface 27 -46K4 14 &STRPL/46.7

9 11
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X20.2 Page: 10
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X20.2
Interface FMCS

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Spare Relay for Interface PE -PE PE &STRPL/46.7

Spare Relay for Interface 28 -46K5 11 &STRPL/46.8

Spare Relay for Interface 29 -46K5 12 &STRPL/46.8

Spare Relay for Interface 30 -46K5 14 &STRPL/46.8

Spare Relay for Interface PE -PE PE &STRPL/46.8


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

10 12
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X20.2 Page: 11
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X20.3
Plant Stop External

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Plant Stop External 1 -X3.5 1 &STRPL/25.3

Plant Stop External 2 &STRPL/25.3

Plant Stop External PE -PE PE &STRPL/25.4

Spare Plant Stop External 3 &STRPL/25.5

Spare Plant Stop External 4 &STRPL/25.5

Spare Plant Stop External PE -PE PE &STRPL/25.5

Spare Plant Stop External 5 &STRPL/25.6

Spare Plant Stop External 6 &STRPL/25.6

Spare Plant Stop External PE -PE PE &STRPL/25.7

Spare Plant Stop External 7 &STRPL/25.7

Spare Plant Stop External 8 -25K1 A1 &STRPL/25.8

Spare Plant Stop External PE -PE PE &STRPL/25.8


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

11 13
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X20.3 Page: 12
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X20.4
Interface TMAH Blending System

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Interface TMAH Blending System 1 -48K1 11 &STRPL/48.2

Interface TMAH Blending System 2 -48K1 12 &STRPL/48.2

Interface TMAH Blending System 3 -48K1 14 &STRPL/48.2

Interface TMAH Blending System PE -PE PE &STRPL/48.3


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

12 14
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X20.4 Page: 13
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

PCCBC_FESTO_MPAL
Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X21.1
Valve Cluster

KMP6-25P-20-2,5
FESTO KABEL

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Valve Cluster Valve QM05 WH +FLUID-FESTO_MPAL-X1 1 1 -31A2 -X1:2 &STRPL/52.2

Valve Cluster Valve QM09 BN +FLUID-FESTO_MPAL-X1 2 2 -31A2 -X1:3 &STRPL/53.2

Valve Cluster Valve QM12 GN +FLUID-FESTO_MPAL-X1 3 3 -31A2 -X1:4 &STRPL/54.2

Valve Cluster Valve QM14 YE +FLUID-FESTO_MPAL-X1 4 4 -31A2 -X1:5 &STRPL/55.2

Valve Cluster Valve QM16 GY +FLUID-FESTO_MPAL-X1 5 5 -31A2 -X1:6 &STRPL/56.2

Valve Cluster Valve QM20 PK +FLUID-FESTO_MPAL-X1 6 6 -31A2 -X1:7 &STRPL/57.2

Valve Cluster Valve QM23 BU +FLUID-FESTO_MPAL-X1 7 7 -31A2 -X1:8 &STRPL/58.2

Valve Cluster Valve QM25 RT +FLUID-FESTO_MPAL-X1 8 8 -31A2 -X1:9 &STRPL/59.2

Valve Cluster Valve RESERVE/01 BK +FLUID-FESTO_MPAL-X1 9 9 -31A2 -X1:16 &STRPL/180.3

Valve Cluster Valve RESERVE/02 VT +FLUID-FESTO_MPAL-X1 10 10 -31A2 -X1:17 &STRPL/180.5

Valve Cluster Valve fast GP02/1 GY PK +FLUID-FESTO_MPAL-X1 11 11 -31A2 -X1:12 &STRPL/60.2

Valve Cluster Valve fast GP01/1 RT BU +FLUID-FESTO_MPAL-X1 12 12 -31A2 -X1:13 &STRPL/61.2


WH
Valve Cluster Valve slow GP02/2 +FLUID-FESTO_MPAL-X1 13 13 -31A2 -X1:14 &STRPL/62.2
GN
Valve Cluster Valve slow GP01/2 BN GN +FLUID-FESTO_MPAL-X1 14 14 -31A2 -X1:15 &STRPL/63.2
Elektro Kreutzpointner GmbH

Valve Cluster Spare Slot / module WH YE +FLUID-FESTO_MPAL-X1 15 15 &STRPL/180.7

Valve Cluster Spare Slot / module YE BN +FLUID-FESTO_MPAL-X1 16 16 &STRPL/180.9


WH
02.08.2013

Valve Cluster Spare Slot / module +FLUID-FESTO_MPAL-X1 17 17 &STRPL/181.3


GY
Valve Cluster Spare Slot / module GY BN +FLUID-FESTO_MPAL-X1 18 18 &STRPL/181.5

Valve Cluster Spare Slot / module WH PK +FLUID-FESTO_MPAL-X1 19 19 &STRPL/181.7

Valve Cluster Spare Slot / module PK BN +FLUID-FESTO_MPAL-X1 20 20 &STRPL/181.9


WH
Valve Cluster Spare Slot / module +FLUID-FESTO_MPAL-X1 21 21 &STRPL/182.3
BU
Valve Cluster Spare Slot / module BN BU +FLUID-FESTO_MPAL-X1 22 22 &STRPL/182.5

Valve Cluster Spare Slot / module WH RT +FLUID-FESTO_MPAL-X1 23 23 &STRPL/182.7

Valve Cluster Spare Slot / module BN RT +FLUID-FESTO_MPAL-X1 24 24 &STRPL/182.9

Valve Cluster 0V - Supply WH BK +FLUID-FESTO_MPAL-X1 25 25 -X0V 5 &STRPL/183.3

Valve Cluster 0V - Supply 26 &STRPL/183.3

PE PE -PE PE &STRPL/183.3

PE PE -PE PE &STRPL/183.4
FOR RELEASE

13 15
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X21.1 Page: 14
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

PCCBC_XSAH01/01

PCCBC_LAHH01

PCCBC_LSH01

PCCBC_LSL01

PCCBC_LALL01

PCCBC_GSO03

PCCBC_GSO02

PCCBC_GSO01
Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X22.1
Digital Sensors

ÖLFLEX CLASSIC 110 3X1

M8 4x0,34
IFM PVC Kabel m. Stecker

M8 4x0,34
IFM PVC Kabel m. Stecker

M8 4x0,34
IFM PVC Kabel m. Stecker

M8 4x0,34
IFM PVC Kabel m. Stecker

M8 3x0,34
IFM PVC Kabel m. Stecker

M8 3x0,34
IFM PVC Kabel m. Stecker

M8 3x0,34
IFM PVC Kabel m. Stecker

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

power Supply 1 &STRPL/80.3

power Supply -X3.4 1 1+ &STRPL/80.3

power Supply -X3.4 2 1- &STRPL/80.3

power Supply 1x &STRPL/80.3

Door sensor Drum door GSO01 BK +FLUID-GSO01 4 2 -31A1 -X11:26 &STRPL/81.3

Door sensor Drum door GSO01 BR +FLUID-GSO01 1 2+ &STRPL/81.3

Door sensor Drum door GSO01 BU +FLUID-GSO01 3 2- &STRPL/81.3

Door sensor Drum door GSO01 2x &STRPL/81.3

Door sensor Drum door GSO02 BK +FLUID-GSO02 4 3 -31A1 -X11:27 &STRPL/82.3

Door sensor Drum door GSO02 BR +FLUID-GSO02 1 3+ &STRPL/82.3

Door sensor Drum door GSO02 BU +FLUID-GSO02 3 3- &STRPL/82.3

Door sensor Drum door GSO02 3x &STRPL/82.3

Door sensor cabinet GSO03 BK +FLUID-GSO03 4 4 -31A1 -X11:28 &STRPL/83.3

Door sensor cabinet GSO03 BR +FLUID-GSO03 1 4+ &STRPL/83.3


Elektro Kreutzpointner GmbH

Door sensor cabinet GSO03 BU +FLUID-GSO03 3 4- &STRPL/83.3

Door sensor cabinet GSO03 4x &STRPL/83.3


02.08.2013

Filling level LALL01 BK +FLUID-LALL01 4 5 -31A1 -X11:29 &STRPL/84.3

Filling level LALL01 BR +FLUID-LALL01 1 5+ &STRPL/84.3

Filling level LALL01 BU +FLUID-LALL01 3 5- &STRPL/84.3

Filling level LALL01 WH +FLUID-LALL01 2 5x &STRPL/84.3

Filling level LSL01 BK +FLUID-LSL01 4 6 -31A1 -X12:2 &STRPL/85.3

Filling level LSL01 BR +FLUID-LSL01 1 6+ &STRPL/85.3

Filling level LSL01 BU +FLUID-LSL01 3 6- &STRPL/85.3

Filling level LSL01 WH +FLUID-LSL01 2 6x &STRPL/85.3

Filling level LSH01 BK +FLUID-LSH01 4 7 -31A1 -X12:3 &STRPL/86.3

Filling level LSH01 BR +FLUID-LSH01 1 7+ &STRPL/86.3

Filling level LSH01 BU +FLUID-LSH01 3 7- &STRPL/86.3

Filling level LSH01 WH +FLUID-LSH01 2 7x &STRPL/86.3

Filling level LAHH01 BK +FLUID-LAHH01 4 8 -31A1 -X12:4 &STRPL/87.3

Filling level LAHH01 BR +FLUID-LAHH01 1 8+ &STRPL/87.3


FOR RELEASE

Filling level LAHH01 BU +FLUID-LAHH01 3 8- &STRPL/87.3

Filling level LAHH01 WH +FLUID-LAHH01 2 8x &STRPL/87.3

Membrane monitoring XSAH01 3 +FLUID-ZKK/XSAH01-X1 3 9 -31A1 -X12:5 &STRPL/88.3

Membrane monitoring XSAH01 1 +FLUID-ZKK/XSAH01-X1 1 9+ &STRPL/88.3

Membrane monitoring XSAH01 2 +FLUID-ZKK/XSAH01-X1 2 9- &STRPL/88.3

14 16
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X22.1 Page: 15
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

PCCBC_LSAH01/VMB2/01

PCCBC_LSAH01/VMB1/01

PCCBC_FISA±01

PCCBC_LSAH01

PCCBC_XSAH02/01
Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X22.1
Digital Sensors

ÖLFLEX CLASSIC 110 3X1

ÖLFLEX CLASSIC 110 3X1

M12 4x0,34
IFM PVC Kabel m. Stecker

M12 4x0,34
VEGA ASL.2GA m. Stecker

ÖLFLEX CLASSIC 110 3X1

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Membrane monitoring XSAH01 9x &STRPL/88.3

Membrane monitoring XSAH02 3 +FLUID-ZKK/XSAH02-X1 3 10 -31A1 -X12:6 &STRPL/89.3

Membrane monitoring XSAH02 1 +FLUID-ZKK/XSAH02-X1 1 10+ &STRPL/89.3

Membrane monitoring XSAH02 2 +FLUID-ZKK/XSAH02-X1 2 10- &STRPL/89.3

Membrane monitoring XSAH02 10x &STRPL/89.3

leak LSAH01 WH +FLUID-LSAH01 2 11 -31A1 -X12:7 &STRPL/90.3

leak LSAH01 BN +FLUID-LSAH01 1 11+ &STRPL/90.3

leak LSAH01 BU +FLUID-LSAH01 3 11- &STRPL/90.3

leak LSAH01 BK +FLUID-LSAH01 4 11x &STRPL/90.3

Strömungssensor FISA±01 BK +FLUID-FISA±01 4 12 -31A1 -X12:8 &STRPL/91.3

Strömungssensor FISA±01 BR +FLUID-FISA±01 1 12+ &STRPL/91.3

Strömungssensor FISA±01 BU +FLUID-FISA±01 3 12- &STRPL/91.3

Strömungssensor FISA±01 WH +FLUID-FISA±01 2 12x &STRPL/91.3

VMB BOX 1 leak LSAH01 3 +FLUID/VMB1-ZKK/LSAH01/VMB1-X1 3 13 -31A1 -X12:9 &STRPL/120.3


Elektro Kreutzpointner GmbH

VMB BOX 1 leak LSAH01 1 +FLUID/VMB1-ZKK/LSAH01/VMB1-X1 1 13+ &STRPL/120.3

VMB BOX 1 leak LSAH01 2 +FLUID/VMB1-ZKK/LSAH01/VMB1-X1 2 13- &STRPL/120.3


02.08.2013

VMB BOX 1 leak LSAH01 13x &STRPL/120.3

VMB BOX 2 leak LSAH01 3 +FLUID/VMB2-ZKK/LSAH01/VMB2-X1 3 14 -31A1 -X12:12 &STRPL/121.3

VMB BOX 2 leak LSAH01 1 +FLUID/VMB2-ZKK/LSAH01/VMB2-X1 1 14+ &STRPL/121.3

VMB BOX 2 leak LSAH01 2 +FLUID/VMB2-ZKK/LSAH01/VMB2-X1 2 14- &STRPL/121.3

VMB BOX 2 leak LSAH01 14x &STRPL/121.3

Spare Initiator Terminals 15 -31A1 -X12:13 &STRPL/122.3

Spare Initiator Terminals 15+ &STRPL/122.3

Spare Initiator Terminals 15- &STRPL/122.3

Spare Initiator Terminals 15x &STRPL/122.3

Spare Initiator Terminals 16 -31A1 -X12:14 &STRPL/123.3

Spare Initiator Terminals 16+ &STRPL/123.3

Spare Initiator Terminals 16- &STRPL/123.3

Spare Initiator Terminals 16x &STRPL/123.3

Spare Initiator Terminals 17 -31A1 -X12:15 &STRPL/124.3


FOR RELEASE

Spare Initiator Terminals 17+ &STRPL/124.3

Spare Initiator Terminals 17- &STRPL/124.3

Spare Initiator Terminals 17x &STRPL/124.3

15 17
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X22.1 Page: 16
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

PCCBC_PISA±01
Strip

Cable name

Cable name
=PCCBC+ELEKTRO-X23.1
analog Sensors

3G0,75
ÖLFLEX CLASSIC 110 CY G

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Pressure transmitter PISA±01 1 +FLUID-PISA±01 1 1 -X3.3 5 &STRPL/92.3

Pressure transmitter PISA±01 2 +FLUID-PISA±01 2 2 -31A1 -X11:3 &STRPL/92.3

Pressure transmitter PISA±01 -31A1 -X11:4 3 -X3.3 6 &STRPL/92.3

Pressure transmitter PISA±01 GNYE +FLUID-PISA±01 PE PE -PE PE &STRPL/92.3


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

16 18
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-X23.1 Page: 17
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-XN
N - Potential distributor

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

N - Potential distributor -3F1 N 1 -1Q1 5 &STRPL/1.7

N - Potential distributor -X1.1 N 2 -10G1 N &STRPL/1.7

N - Potential distributor 3 &STRPL/1.7

N - Potential distributor 4 &STRPL/1.8


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

17 19
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-XN Page: 18
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-XPA
PA - Terminal

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

Power supply from Customer =EXT+EXT-PE PA -PE PE &STRPL/1.3


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

18 20
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-XPA Page: 19
1 2 3 4 5 6 7 8 9 10

Terminal diagram F13_001_EFK_01

Strip

Cable name

Cable name
=PCCBC+ELEKTRO-XPE
PE - Terminal strip

Connection

Connection
cable type

cable type
terminal

jumper
point

point
function text Target designation Target designation Page / column

-PE PE PE -10G1 -' &STRPL/10.3

-10G1 PE PE -PE PE &STRPL/10.4

-PE PE PE -31A0 PE &STRPL/31.1

-PE PE PE -45A1 PE &STRPL/42.6

-PE PE PE +FLUID-FESTO_MPAL PE &STRPL/51.1


Elektro Kreutzpointner GmbH
02.08.2013
FOR RELEASE

19 &STKL=ANL_01+EBO_02/1
Plant:
Date 02.08.2013 Puerstinger High Purity Systems GmbH Developer TMAH- 0.26N (2,38%) with surfactant = PCCBC & KLEPL
Ed. j.doetzlhofer Mounting
location: Elektro Cabinet + ELEKTRO Terminal diagram
Appr chemical supply system Page

Modification Date Name Original


Project-
Name: SIX SEMICONDUTORES
drawing
number:
description.: Terminal diagram =PCCBC+ELEKTRO-XPE Page: 20
1 2 3 4 5 6 7 8 9 10

Parts list F01_002_EFK_01

device tag Quantity designation 1 manufacturer Artikel wird beigestellt durch Artikel wird
function text designation 2 Description Voltage Power Beigestellt
Placement Designation 3 Order number Current Tripping current
-31A0 Programmable logic operator PLANUNG
1
300S, Profile rail Length 480mm
VIPA
X
&STRPL/31.2 390-1AE80
-31A1 Programmable logic operator PLANUNG
1
300S, Central processing module DI24/DO16/AI4+1/AO2
VIPA
DC 24V X
&STRPL/31.2 313-5BF13
-31A1 Programmable logic operator PLANUNG
2
300S, Front connector
VIPA
X
&STRPL/31.2 392-1AM00
-31A2 Programmable logic operator PLANUNG
1
300S, Digital output module DO16xDC24V/0,5A, 20-pol.
VIPA
DC 24V X
&STRPL/31.5 322-1BH01
-31A2 Programmable logic operator PLANUNG
1
300S, Front connector
VIPA
X
&STRPL/31.5 392-1AJ00
-45A1 TP900 COMFORT PLANUNG
1
SIMATIC HMI
SIMATIC TP900 COMFORT Panel, WINDOWS CE 6.0, 9"
WIDESCREEN-TFT-DISPLAY, 12 MB PROJECTING STORAGE,
SIEMENS
X
&STRPL/41.2 Comfort Panel 6AV2124-0JC01-0AX0
-3E1 Enclosure, System accessory RITTAL
1
Enclosure light with female receptacle Enclosure light AC 100-240V 14W
&STRPL/3.2 Comfort, Length 452mm 4139140
-3E1 Enclosure, System accessory RITTAL
1 Connecting cable, for Power supply (with Female pin, without
Enclosure light with female receptacle Enclosure light, Accessories
Plug), Description: for Power supply or Feed-through wiring. 4315100
&STRPL/3.2 Connecting cable, Cable length 3000mm
-3F1 Earth leakage circuit breaker SIEMENS
1
Enclosure light with female receptacle 2TE
&STRPL/3.2 5SU1354-6KK10 B10A/30mA 30mA
-3F1 Miniature circuit-breaker SIEMENS
1
Enclosure light with female receptacle Norm, Accessories, Auxilary switch 0,5TE, m. 1S1Ö
&STRPL/3.2 f. 5SY2 u. 5SY4 5ST3010
-3F1 Earth leakage circuit breaker
Elektro Kreutzpointner GmbH

1 SIEMENS
Enclosure light with female receptacle FI/Circuit breaker, Accessories Handle connector
&STRPL/3.2 5ST3805-1
-4F1 Miniature circuit-breaker
02.08.2013

1 SIEMENS
Outgoing line AC230V Spare 1TE
&STRPL/4.2 5SY4110-6 B10A
-4F1 Miniature circuit-breaker SIEMENS<