Fanuc Lazer PDF

FANUC LASER C2000+-MODEL C

MAINTENANCE MANUAL
B-70475EN/01
• No part of this manual may be reproduced in any form.
• All specifications and designs are subject to change without notice.
The products in this manual are controlled based on Japan’s “Foreign Exchange and
Foreign Trade Law”. The export from Japan may be subject to an export license by the
government of Japan.
Further, re-export to another country may be subject to the license of the government of
the country from where the product is re-exported. Furthermore, the product may also be
controlled by re-export regulations of the United States government.
Should you wish to export or re-export these products, please contact FANUC for advice.
In this manual we have tried as much as possible to describe all the various matters.
However, we cannot describe all the matters which must not be done, or which cannot be
done, because there are so many possibilities.
Therefore, matters which are not especially described as possible in this manual should be
regarded as ”impossible”.
B-70475EN/01 SAFETY PRECAUTIONS
SAFETY PRECAUTIONS
This manual contains precautions which must be observed during operation and maintenance of the laser
oscillator to ensure the safety of the operator and maintenance personnel and prevent damage to the
oscillator.
Maintenance involves a variety of risks and, therefore, must be conducted by those personnel who have
sufficiently trained in maintenance and safety.
Besides the laser oscillator, the laser machining system contains a machine, power magnetics cabinet,
servo system, CNC, and operator's panel. This manual describes the laser oscillator. For a description of
notes other than those on the oscillator, refer to the corresponding manuals, supplied by the machine tool
builder and FANUC.
Contents
DEFINITION OF WARNING, CAUTION, AND NOTE.........................................................................s-1

WARNINGS AND CAUTIONS ON EXPOSURE ...................................................................................s-2
WARNINGS AND CAUTIONS ON MAINTENANCE...........................................................................s-3
WARNINGS AND CAUTIONS ON HANDLING ...................................................................................s-4
WARNINGS AND CAUTIONS ON MACHINING.................................................................................s-5
WARNING LABELS AND STICKERS ...................................................................................................s-6
DEFINITION OF WARNING, CAUTION, AND NOTE

To ensure the safety of maintenance personnel (referred to as users) and prevent damage to the machine,
this manual indicates each precaution on safety with "Warning" or "Caution" according to its severity.
Supplementary information is indicated by "Note".
Read the contents of each "Warning", "Caution", and "Note" before attempting to use the oscillator.
WARNING
Applied when there is a danger of the user being injured or when there is a
danger of both the user being injured and the equipment being damaged if the
approved procedure is not observed.
CAUTION
Applied when there is a danger of the equipment being damaged, if the
approved procedure is not observed.
NOTE
Notes are used to indicate supplementary information other than Warnings and
Cautions.
• Read this manual carefully, and store it in a safe place.
s-1
SAFETY PRECAUTIONS B-70475EN/01
WARNINGS AND CAUTIONS ON EXPOSURE

WARNING
1 It is extremely dangerous to expose your eyes to direct, scattered, or reflected
CO2 laser light. Always wear protective glasses(over OD7 recommended) while
the laser is operating.
Exposure to laser light can cause blindness. If your eyes are accidentally
exposed, seek medical advice immediately.
2 Do not turn on the laser oscillator while a panel is removed or a door is open.
Operating the laser with a door open or panel removed may result in the
operator being directly exposed to CO2 laser radiation. Exposure to laser light
can cause blindness and/or severe burns. If your eyes are accidentally exposed
to laser light, seek medical advice immediately.
Before turning on the power during maintenance if absolutely necessary, wear
protective glasses and clothing to prevent accidents. If you wear protective
glasses, don’t look at the laser light directly.
3 Surround the laser machining tool with a fence made of a material which absorbs
laser light well (such as acrylic). Place appropriate warning notices on the fence.
The door in the safety fence shall be fitted with an interlock switch such that
opening the door stops the laser.
Failure to provide such a fence exposes persons in the vicinity of the machine
tool to the danger of being exposed to CO2 laser radiation and the associated
risk of blindness. If a person is accidentally exposed to laser light, seek medical
advice immediately.
4 If the laser oscillator is operated with a panel open, ultraviolet radiation is emitted
from the high-frequency discharge section. Gazing the discharge section for a
long time can cause visual disturbances such as impaired eyesight.
Always wear protective glasses during work. If you feel trouble with your eyes,
seek medical advice immediately.
5 Open beam paths should be located above or below eye level where practical.
Enclose the path of the laser beam with covers. Do not leave the end of the
beam path open. Place laser- absorbing material at the end of the beam path to
absorb the beam's energy.
A CO2 laser beam is directional and has a high energy density. Exposure to
laser light can cause blindness. Flammable material may burn or explode if
exposed to the laser beam. If your eyes are accidentally exposed to laser light,
seek medical advice immediately.
6 If there is a possibility of being exposed to CO2 laser radiation exceeding the
maximum permissible exposure (MPE) level for skin, wear protective clothing.
Otherwise, there is a danger of being burnt.
7 The oscillator is fitted with a red semiconductor laser to indicate the approximate
position of invisible CO2 laser beam. Do not look directly at the semiconductor
laser beam. Otherwise, your eyes may be injured.
s-2
NOTE
1 Warning labels are affixed to those parts of the laser oscillator where there is a
danger of exposure to laser radiation. Observe the precautions given on the
labels.
2 During installation or maintenance necessitating the opening of an oscillator door
or the removal of a panel, only persons who have undergone maintenance
training should operate the laser. In such a case, extreme caution must be
exercised.
3 Laser products shall conform to the regulations laid down in the laser safety
standard, including that stipulating control using a key.
The oscillator start signal (RUN ON) shall be controlled with a key switch such
that the oscillator cannot be turned on without a specific key.
Control using a key ensures that other than the authorized personnel cannot
operate the laser oscillator. It is extremely dangerous if a person who is
unfamiliar with the equipment attempts to operate the laser oscillator.
4. The shutter shall be unlocked only while a beam is being output. Otherwise,
keep the shutter locked to provide protection should the laser accidentally be
turned on.
The laser oscillator is equipped with a warning light as an option. The warning
light blinks while discharge is in progress or whenever laser radiation is possible.
While the warning light is blinking, pay careful attention to laser radiation and
high voltages.
WARNINGS AND CAUTIONS ON MAINTENANCE

WARNING
1 A high voltage of 3 to 4 kV0-p is applied to some places in the laser oscillator
cabinet. Therefore, do not turn the power to the oscillator on or operate the
oscillator when an oscillator panel is open. Operating the laser oscillator with a
panel open can cause a touch on a high-voltage place, resulting in electric
shock.
2 Before daily inspection, the replacement of a maintenance part or maintenance,
open the main circuit breaker and turn the power supply off (double power-off).
To prevent the power from being inadvertently turned on, lock the circuit breaker
open, and affix an indication of work in progress. Before turning on the power
during maintenance if absolutely necessary, take measures for safety.
3 The gas circulating system in the oscillator becomes very hot.
Do not touch the gas pipes, turbo blower, heat exchanger, or exhaust pump,
until they have cooled down sufficiently after the oscillator has been turned off.
Otherwise, you may be burnt.
4 The oscillator contains cooling fan units. Although the fan units are fitted with a
finger guard, to prevent injury, keep your hands well away from the fans.
5 Laser oscillator is equipped with the warning light, optionally. The warning light is
blinking continuously during the system in the discharging mode. Please make
sure that the blinking function is working properly for the safety purpose, and
change immediately in case of any functional failure.
s-3
WARNINGS AND CAUTIONS ON HANDLING

WARNING
1 The oscillator output mirror and focusing lens on the machining head both have
a substrate made of ZnSe (zinc selenide), a toxic substance. Therefore, do not
touch the mirror or lens with your bare hands if it is damaged.
ZnSe is not poison, but inhaling ZnSe dust may cause difficulty in breathing,
completely stopping the breathing of the victim in the worst case.
If you accidentally touch the mirror or lens with your bare hands, wash your
hands well under running water.
If you accidentally inhale ZnSe dust or debris, seek medical advice immediately.
2 If the laser oscillator must be moved, entrust the work to the machine tool builder
whenever possible. If performed by inexperienced personnel, the oscillator may
topple or be dropped, resulting in a potentially fatal accident.
When the machine tool builder is not available to move the oscillator, follow the
procedure described on the hanging method label. While moving the oscillator,
stand well clear and never pass under the oscillator.
3 Do not allow any dangerous or high-pressure gas to get into the oscillator
housing. The oscillator cabinet has a hermetic structure (dustproof and
dripproof), it cannot be ventilated easily.
1) Flammable gases such as oxygen can cause a fire or explosion.
2) Toxic gases can harm operators during maintenance.
3) Organic gases can degrade machining performance.
4) High-pressure gases can damage a panel or the cabinet, resulting in injury
from flying matters.
If such a gas accidentally gets into the oscillator housing, remove a panel for
ventilation. The installation room must be also well ventilated.
To purge the oscillator housing, use purified, low-pressure air or nitrogen.
4 Those who use a cardiac pacemaker must avoid maintenance and inspection
work during the discharge of the oscillator because the electromagnetic waves
generated during the discharge may affect the operation of the pacemaker.
If you feel sick or out of condition, either immediately leave the spot or stop
operation.
CAUTION
1 The oscillator is controlled according to the CNC internal parameter settings. If a
numeric value different from a setting is entered and the oscillator is operated,
the oscillator may malfunction. In the worst case, the oscillator may be damaged.
2 Use laser gas with the specified correct composition ratios.
If you use laser gas with different specifications by mistake, performance
degradation or an alarm will result. In the worst case, the oscillator may be
damaged.
3 If storing the laser oscillator for a long time or leaving it unused for a long time,
drain the inside of the oscillator. Otherwise, corrosion and clogging may result.
Also drain the oscillator if it is likely to freeze in winter. If it freezes, the water
piping and cooling system components will be damaged.
s-4
NOTE
Do not discard a used output mirror or focusing lens together with regular waste.
If the output mirror or focusing lens is replaced, return the original to the supplier
or entrust it to a specialized disposal company.
WARNINGS AND CAUTIONS ON MACHINING

WARNING
1 Do not look at the machining point without eye protection. Otherwise, your eyes
may be exposed to reflected laser light, resulting in blindness.
If your eyes are accidentally exposed to laser light, seek medical advice
immediately.
2 Before attempting to machine any material for the first time, consult with the
manufacturer of the material.
Some materials generate toxic gases when cut or drilled by a laser beam.
Should you accidentally inhale any toxic gas, seek medical advice immediately.
3 The workpiece becomes very hot during machining. Never touch the workpiece
with your bare hands. Otherwise, you may be burnt.
4 During machining, extremely hot chips are likely to be generated.
Unless sufficient caution is exercised, there is a danger of the operator being
burnt, or of a fire being started.
5 Some materials may burn or explode when laser machined. Before attempting to
machine any material for the first time, consult with the manufacturer of the
material.
NOTE
1 Do not place any flammable material (such as paper, cloth, or wood) near the
workpiece table.
2 Keep a fire extinguisher beside the unit.
s-5
WARNING LABELS AND STICKERS

The oscillator uses high voltages and laser beam radiation. Such hazards are indicated with warning labels
attached to the positions. In addition, there are some stickers for the explanation. This section describes
the warning labels, stickers and their positions.
(1) Standards
Fig.S.1 (a) The positions of warning labels and stickers for C2000i-C
(Short optical path length type)
Fig.S.1 (b) The positions of warning labels and stickers for C2000i-C
(Short optical path length type: rear view)
s-6
Fig.S.1(c) The positions of warning labels and stickers for C2000i-C

(Long optical path length type)
Fig.S.1 (d) The positions of warning labels and stickers for C2000i-C
(Long optical path length type: rear view)
s-7
Fig.S.1 (e) The positions of warning labels and stickers for C4000i-C
Fig.S.1 (f) : The positions of warning labels and stickers for C4000i-C
s-8
Fig.S.1 (g) The positions of warning labels and stickers for C4000i-C
Fig.S.1 (h) The positions of warning labels and stickers for C4000i-C
s-9
Fig.S.1 (i) The positions of warning labels and stickers for C6000i-C
Fig.S.1 (i) The positions of warning labels and stickers for C6000i-C (Rear view)
(a) Warning labels

① Class identification label (FDA)
s-10
Model Maximum output Gas composition

C2000i-C 5KW CO2: N2: He=5:35:60%
C4000i-C 8KW CO2: N2: He=5:35:60%
C6000i-C 12KW CO2: N2: He=5:35:60%
② Class identification label (FDA)
Model Maximum output Gas composition

C2000i-C 5KW CO2: N2: He=5:35:60%
C4000i-C 8KW CO2: N2: He=5:35:60%
C6000i-C 12KW CO2: N2: He=5:35:60%
③ Laser mark
④ Aperture label
s-11
⑤ Lifting method label
⑥ Access label
⑦ Label inside the access panel
⑧ Discharge section label
⑨ Label for regulating the atmospheric gasses in the oscillator housing
s-12
⑩ Ascent/Descent prohibited label
(b) Stickers
⑪ Maintenance label
C2000i-C, C4000i-C
C6000i-C
⑫ Certification label
s-13
⑬ SCCR
C2000i-C
C4000i-C
C6000i-C
⑭ Equipment name plate
⑮ Address label
⑯ Cooling water and gas maintenance label
s-14
⑰ Inlet / outlet of water and gas
(2) CE Marking
Fig.S.1 (a) The positions of warning labels and stickers for C2000i-C
Fig.S.1 (b) The positions of warning labels and stickers for C2000i-C
s-15
Fig.S.1(c) The positions of warning labels and stickers for C2000i-C

Fig.S.1 (d) The positions of warning labels and stickers for C2000i-C
s-16
Fig.S.1 (e) The positions of warning labels and stickers for C4000i-C
Fig.S.1 (f) The positions of warning labels and stickers for C4000i-C
s-17
Fig.S.1 (g) The positions of warning labels and stickers for C4000i-C
Fig.S.1 (h) The positions of warning labels and stickers for C4000i-C
s-18
Fig.S.1 (i) The positions of warning labels and stickers for C6000i-C
Fig.S.1 (i) The positions of warning labels and stickers for C6000i-C (Rear view)
s-19
(a) Warning labels

① Class identification label
C2000i-C
C4000i-C
s-20
C6000i-C
② Laser mark
③ Access label
④ Label inside the access panel
s-21
⑤ Lifting method label
⑥ Aperture label
⑦ Discharge section label
⑧ Label for regulating the atmospheric gasses in the oscillator housing
s-22
⑨ Ascent/Descent prohibited label
s-23
B-70475EN/01 PREFACE
PREFACE
Contents of the manual
This manual consists of the following chapters and appendixes:
Chapter 1 : Internal Structure

Chapter 1 describes the beam path, the structure, the operation and the internal connection of the
laser oscillator.
Chapter 2 : Installation
Chapter 2 describes the installation and checking of the laser oscillator.
Chapter 3 : Maintenance
Chapter 3 describes daily maintenance and periodic maintenance.
Chapter 4 : Troubleshooting
Chapter 4 describes the actions to be applied in the event of a fault occurring in the laser oscillator.
Chapter 5 : Units
Chapter 5 describes how to replace and adjust internal units of the laser oscillator.
Chapter 6 : Laser Software Function
Chapter 6 describes the software functions for controlling the laser oscillator.
Appendix
A. External View of Oscillator
B. Specifications
C. Laser Alarm List
D. Diagnosis Screen Information
E. Parameter List
F. Control Sequences in Laser Oscillator
G. External Gas Leakage Recording Table
H. Glossary
Applicable models
This manual covers the following models. The following abbreviations may be used in the text of this
manual.
Model Abbreviation
FANUC LASER C2000i-MODEL C C2000i-C
Related manuals
The following manuals are available for the FANUC LASER C2000i /C4000i /C6000i-MODEL C.
FANUC Series 30i/31i-LB DESCRIPTIONS B-64492EN
CONNECTION MANUAL B-64493EN
OPERATOR’S MANUAL B-64494EN
MAINTENANCE MANUAL B-64495EN
PARAMETER MANUAL B-64500EN
FANUC LASER C2000i /C4000i /C6000i OPERATOR’S MANUAL B-70474EN
-MODEL C MAINTENANCE MANUAL (this manual) B-70475EN
p-1
B-70475EN/01 TABLE OF CONTENTS
TABLE OF CONTENTS
SAFETY PRECAUTIONS............................................................................s-1
DEFINITION OF WARNING, CAUTION, AND NOTE ............................................. s-1
WARNINGS AND CAUTIONS ON EXPOSURE ..................................................... s-2
WARNINGS AND CAUTIONS ON MAINTENANCE ............................................... s-3
WARNINGS AND CAUTIONS ON HANDLING....................................................... s-4
WARNINGS AND CAUTIONS ON MACHINING..................................................... s-5
WARNING LABELS AND STICKERS ..................................................................... s-6
PREFACE ....................................................................................................p-1
1 INTERNAL STRUCTURE........................................................................ 1
1.1 OUTLINE ....................................................................................................... 1
1.2 INTERNAL STRUCTURE .............................................................................. 2
1.3 OPTICAL PATHS IN THE OSCILLATOR ...................................................... 8
1.4 INTERNAL CONNECTION .......................................................................... 10
1.4.1 Electrical Connections............................................................................................10
1.4.2 Cooling Water Piping.............................................................................................16
1.4.3 Vacuum Gas Connection........................................................................................19
2 INSTALLATION .................................................................................... 20
2.1 INSTALLATION PROCEDURE ................................................................... 20
2.2 OSCILLATOR CONNECTIONS................................................................... 28
2.2.1 Laser Gas................................................................................................................28
2.2.1.1 Laser gas specification....................................................................................... 28
2.2.1.2 Gas pipe ............................................................................................................. 28
2.2.1.3 Leakage in external piping................................................................................. 29
2.2.1.4 Replacing the laser gas cylinder ........................................................................ 29
2.2.2 Cooling Water ........................................................................................................29
2.2.2.1 Specification of the cooling water ..................................................................... 30
2.2.2.2 Pure water supply unit ....................................................................................... 30
2.2.2.3 Anticorrosive ..................................................................................................... 30
2.2.2.4 Cleaning agent ................................................................................................... 30
2.2.2.5 Antifreezing ....................................................................................................... 31
2.2.3 Electrical Connections............................................................................................31
2.3 DETAILS OF CHECKING ............................................................................ 40
2.3.1 Power Supply Checking .........................................................................................40
2.3.1.1 Checking the power supply ............................................................................... 40
2.3.1.2 Phase rotation .................................................................................................... 40
2.3.1.3 Setting the frequency of the power supply of the hour meter............................ 41
2.3.1.4 Measurement of voltage of DC power supply unit............................................ 41
2.3.1.5 Checking of jumper pins on the interface PCB ................................................. 42
2.3.1.6 Checking the interface PCB signals................................................................... 43
2.3.2 External Laser Gas Piping Leakage Check (Clamp Test) ......................................43
2.3.3 Checking Cooling Water ........................................................................................44
2.3.4 Check for Leakage within the Oscillator................................................................44
2.3.5 Locating Internal Leakage......................................................................................44
2.3.6 Discharge Aging.....................................................................................................45
2.3.7 Beam Mode Check .................................................................................................46
2.3.8 Oscillation Characteristics......................................................................................47
2.3.9 Discharge Margin Check........................................................................................48
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TABLE OF CONTENTS B-70475EN/01
2.3.10 Power Supply Margin Check (Pulse Check) ..........................................................48

2.4 PREPARATION PRIOR TO SHIPMENT ..................................................... 49
2.4.1 Packing for Transportation .....................................................................................49
2.4.2 Removing Cooling Water.......................................................................................50
3 MAINTENANCE .................................................................................... 52
3.1 DAILY INSPECTION ................................................................................... 52
3.2 PERIODIC MAINTENANCE ........................................................................ 53
3.3 DETAILS OF MAINTENANCE..................................................................... 54
3.3.1 Turbo Blower Oil ...................................................................................................54
3.3.1.1 Check method .................................................................................................... 54
3.3.1.2 Replacement method.......................................................................................... 55
3.3.1.3 Storage and expiration date of turbo blower oil ................................................ 56
3.3.2 Exhaust Pump Oil...................................................................................................56
3.3.2.1 Check method .................................................................................................... 56
3.3.3 Exhaust Pump Filter ...............................................................................................57
3.3.4 Laser Optical Parts .................................................................................................58
3.3.4.1 Cleaning and Replacing the Optical Parts ......................................................... 58
3.3.4.2 Cleaning and Replacing the Output Coupler and Rear Mirror .......................... 59
3.3.4.3 Cleaning and Replacing the Folding Mirrors .................................................... 61
3.3.4.4 Cleaning and Replacing the Beam Folding Unit ............................................... 64
3.4 MAINTENANCE PARTS.............................................................................. 64
4 TROUBLESHOOTING .......................................................................... 70
4.1 TROUBLESHOOTING PROCEDURE......................................................... 71
4.2 RESPONDING TO ALARM MESSAGES ON THE SCREEN ...................... 71
4.3 MAJOR FAULTS ....................................................................................... 110
4.3.1 Laser Output Just after Switch On Is Low ...........................................................110
4.3.2 Circuit Breaker for Cooling Fan, Solenoid Valve, and 24V Power Supply Trips110
4.3.3 Motor starter of Exhaust Pump Trips Thermally..................................................110
4.3.4 Main Breaker Trips ..............................................................................................110
4.3.5 Excessive Laser Gas Consumption ......................................................................111
5 UNITS .................................................................................................. 112

5.1 UNIT CONFIGURATION ........................................................................... 113
5.1.1 C2000i-C INPUT UNIT .......................................................................................113
5.1.2 C4000i-C INPUT UNIT .......................................................................................115
5.1.3 C6000i-C INPUT UNIT .......................................................................................117
5.1.4 Replacement Method............................................................................................119
5.1.4.1 Breaker............................................................................................................. 119
5.1.4.2 Motor starter .................................................................................................... 120
5.1.4.3 Magnetic contactor .......................................................................................... 120
5.2 LASER POWER SUPPLY UNIT ................................................................ 121
5.2.1.1 Replacing the power supply unit ..................................................................... 121
5.2.1.2 Replacing a high-speed diode.......................................................................... 122
5.2.1.3 Replacing an RF FET PCB.............................................................................. 123
5.2.2 Adjustment Method ..............................................................................................123
5.2.2.1 Preparation....................................................................................................... 124
5.2.2.2 Perform laser power supply automatic adjustment .......................................... 125
5.2.2.3 Check ............................................................................................................... 125
5.3 MATCHING BOX ....................................................................................... 126
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5.4 DISCHARGE TUBE................................................................................... 126
5.4.1 Placement Numbers..............................................................................................127
5.5 TRIGGER ELECTRODE ........................................................................... 128
5.6 TURBO BLOWER...................................................................................... 129
5.6.2 Leakage Check and Discharge Aging ..................................................................131
5.7 INVERTER................................................................................................. 131
5.7.1 Operation of the Digital Operator.........................................................................131
5.7.2.1 Inverter............................................................................................................. 134
5.7.2.2 Cooling Fan in the Inverter.............................................................................. 135
5.8 EXHAUST PUMP ...................................................................................... 138
5.8.2 Parts of Exhaust Pump .........................................................................................138
5.9 GAS CONTROLLER.................................................................................. 138
5.9.1 Configuration .......................................................................................................138
5.9.2.1 Charge unit ...................................................................................................... 140
5.9.2.2 Exhaust unit ..................................................................................................... 140
5.9.3.1 Setting the gas supply pressure sensor............................................................. 141
5.9.3.2 Setting the atmospheric pressure sensor .......................................................... 141
5.9.3.3 Operating the gas supply pressure sensor and atmospheric pressure sensor ... 142
5.9.3.4 Adjusting the exhaust unit (adjusting the laser gas consumption)................... 143
5.10 THE WATER DISTRIBUTION UNIT .......................................................... 144
5.10.2 Replacement of the Flow Sensor Unit..................................................................147
5.10.3 Adjustment of the Flow Sensor Unit ....................................................................147
5.11 SHUTTER UNIT ........................................................................................ 148
5.11.1.1 Shutter unit ...................................................................................................... 148
5.11.1.2 Shutter mirror .................................................................................................. 149
5.11.1.3 Shutter switch (thermal and photoelectric switches) ....................................... 149
5.12 BEAM ABSORBER.................................................................................... 150
5.12.1.1 Beam absorber ................................................................................................. 150
5.12.1.2 Beam absorber mirror ...................................................................................... 150
5.12.2 Adjusting the Position ..........................................................................................151
5.13 GUIDE LASER (SEMICONDUCTOR LASER)........................................... 151
5.14 FAN ........................................................................................................... 152
5.14.1 Replacement of Fan..............................................................................................153
5.14.2 Detachment and Attachment of a Fan Unit ..........................................................153
5.14.3 Detachment and Attachment of Fan-assisted Radiator.........................................154
5.15 POWER SENSOR ..................................................................................... 154
5.16 THE DEW SENSOR .................................................................................. 155
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5.17 PCB ........................................................................................................... 155

5.17.1.1 Interface PCB .................................................................................................. 155
5.17.1.2 24V power supply............................................................................................ 155
5.17.1.3 Shutter PCB ..................................................................................................... 156
5.17.1.4 Safety circuit PCB ........................................................................................... 156
5.18 OIL MIST DECOMPOSING ELEMENT ..................................................... 157
5.19 GAS DUST COLLECTION UNIT ............................................................... 159
5.19.1 Cleaning ...............................................................................................................159
5.20 LOW TEMPERATURE SENSOR UNIT ..................................................... 159
5.21 OXYGEN SENSOR UNIT .......................................................................... 160
5.22 WARNING LIGHT UNIT ............................................................................ 161
5.23 GAS FITTING AND WATER FITTING....................................................... 162
5.23.1 Gas Fitting ............................................................................................................162
5.23.1.1 Tightening method........................................................................................... 162
5.23.1.2 Re-installing..................................................................................................... 162
5.23.2 WATER FITTING ...............................................................................................163
5.23.2.1 Tightening method........................................................................................... 163
5.23.2.2 Re-installing..................................................................................................... 163
5.23.3 Fittings and Tube Ordering Information ..............................................................163
5.24 ALIGNMENT OF THE RESONATOR ........................................................ 166
5.24.1 Alignment Procedure during Installation after Transportation.............................168
5.24.1.1 Preparation....................................................................................................... 168
5.24.1.2 Adjustment method.......................................................................................... 169
5.24.2 Alignment Procedure at Mirror Cleaning Time ...................................................170
5.24.2.1 Preparation....................................................................................................... 170
5.24.3 Alignment Procedure for Adjusting All Mirrors ..................................................171
5.24.3.1 Preparation....................................................................................................... 171
5.24.4 Obtaining a Maximum Power ..............................................................................172
5.24.4.1 Preparation....................................................................................................... 172
5.24.4.2 Procedure ......................................................................................................... 173
5.25 POWER CALIBRATION METHOD............................................................ 175
5.25.1 Setting a Power Input Compensation Coefficient ................................................175
5.26 ALIGNMENT OF THE BEAM FOLDING UNIT
(C2000i-C, C4000i-C SHORT OPTICAL PATH LENGTH TYPE).............. 175
5.27 HEAT EXCHANGER ................................................................................. 176
5.27.1 Replacement .........................................................................................................176
5.27.1.1 C2000i-C ......................................................................................................... 177
5.27.1.2 C4000i-C and C6000i-C .................................................................................. 179
6 LASER SOFTWARE FUNCTION........................................................ 183

6.1 MAINTENANCE SCREEN......................................................................... 183
6.1.1 Overview ..............................................................................................................183
6.1.2 Method of Operation ............................................................................................184
6.1.3 Display Information .............................................................................................184
6.1.3.1 Compensation coefficient history display........................................................ 184
6.1.3.2 Parts run time display ...................................................................................... 185
6.1.3.3 Discharge-related alarm history display .......................................................... 185
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6.1.3.4 Laser alarm history screens.............................................................................. 187
6.1.3.5 Pulse power feedback screens ......................................................................... 188
6.1.3.6 Power sensor time constant measurement screen ............................................ 188
6.1.3.7 Leak check screen............................................................................................ 189
6.1.3.8 Laser tuning screen .......................................................................................... 190
6.1.3.9 Command of running beam internally with shutter closed .............................. 192
6.1.3.10 Input and output of saved maintenance data.................................................... 192
6.2 POWER FEEDBACK FUNCTION BASED ON THE ACTUAL OUTPUT
ESTIMATION METHOD ............................................................................ 193
6.2.1 Overview ..............................................................................................................193
6.2.2 Data Table ............................................................................................................193
6.2.2.1 Method of registration ..................................................................................... 193
6.2.2.2 Data table structure .......................................................................................... 194
6.2.3 Compensation for Power Sensor Response Speed ...............................................195
6.2.3.1 Time constant measurement method................................................................ 195
6.2.4 Bell-shaped Filter for Power Feedback Gain .......................................................196
6.3 OIL EXCHANGE TIME LIMIT ALARM MONITOR FOR TURBO BLOWER197
6.3.1 Overview ..............................................................................................................197
6.3.2 Function................................................................................................................197
6.3.3 Setting...................................................................................................................198
6.3.4 Release of alarm ...................................................................................................199
6.4 LASER POWER SUPPLY AUTOMATIC ADJUSTMENT FUNCTION ....... 199
6.4.1 Overview ..............................................................................................................199
6.4.2 Setting...................................................................................................................199
6.4.3 Operation of Laser Power Supply Automatic Adjustment ...................................200
6.5 TURBO BLOWER OIL ABNORMALLY TEMPERATURE DETECT
FUNCTION ................................................................................................ 201
6.5.1 Overview ..............................................................................................................201
6.5.2 Setting...................................................................................................................201
6.5.3 Operation ..............................................................................................................201
6.5.4 Alarm....................................................................................................................201
6.6 SUPPORT FUNCTION FOR START-UP AFTER TURBO OIL
EXCHANGE............................................................................................... 202
6.6.1 Setting...................................................................................................................202
APPENDIX
A EXTERNAL VIEW OF LASER OSCILLATOR .................................... 205
B SPECIFICATIONS............................................................................... 208
C LASER ALARM LIST .......................................................................... 209
D DIAGNOSIS SCREEN INFORMATION .............................................. 212
D.1 INFORMATION DISPLAYED ON THE DIAGNOSIS SCREEN ................. 212
D.2 LASER OSCILLATOR STATUS DISPLAY ................................................ 215
E PARAMETER LIST ............................................................................. 223
E.1 PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS.... 223
E.2 PARAMETERS FOR DISCHARGE TUBE SELECTION............................ 226
E.3 PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION
FUNCTIONS.............................................................................................. 227
E.4 PARAMETERS FOR THE OSCILLATOR.................................................. 228
c-5
E.5 PARAMETERS FOR DISCHARGE ........................................................... 230

E.6 PARAMETERS FOR GAS CONTROL ...................................................... 231
E.7 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS.......... 233
E.8 PARAMETERS FOR LASER POWER / VOLTAGE DROP ....................... 233
E.9 PARAMETERS FOR POWER TABLE SETTING ...................................... 234
E.10 PARAMETERS FOR AUTOMATIC AGING FUNCTION ........................... 235
E.11 PARAMETERS FOR POWER FEEDBACK BASED ON THE ACTUAL
OUTPUT ESTIMATION METHOD............................................................. 237
E.12 PARAMETERS FOR PROCESSING MODE CHANGE FUNCTION ......... 239
E.12.1 Setting for Fine Mode...........................................................................................239
E.12.2 Setting for Alarm Monitor (Alarm No.4125) .......................................................242
E.12.3 Setting for Automatic Aging Function (Fine Mode) ............................................243
E.13 PARAMETERS FOR THE GAS PRESSURE CHANGE WARM UP
FUNCTION ................................................................................................ 244
E.14 PARAMETERS FOR PREHEAT FUNCTION ............................................ 245
E.15 PARAMETERS FOR POWER COMMAND ............................................... 246
E.16 PARAMETERS FOR GAS PRESSURE ANALOG MONITOR................... 248
E.17 PARAMETERS FOR TURBO BLOWER ................................................... 249
E.18 PARAMETERS FOR LASER PSU INDIVIDUAL DRIVING........................ 250
E.19 PARAMETERS FOR WATER FLOW RATE MONITOR............................ 250
E.20 PARAMETERS FOR POSITIVE PRESSURE LEAK CHECK
FUNCTIONS.............................................................................................. 252
E.21 PARAMETERS FOR LASER POWER SUPPLY AUTOMATIC
ADJUSTMENT........................................................................................... 252
E.22 PARAMETERS FOR GAS PRESSURE INCREASE ................................. 255
E.23 PARAMETERS FOR PREPARATION 1C ................................................. 255
E.24 PARAMETERS FOR TURBO BLOWER START....................................... 256
E.25 PARAMETERS FOR AUTOMATIC AGING 2 ............................................ 256
E.26 PARAMETERS FOR CALIBRATION AND PEPARATION ........................ 257
E.27 PARAMETERS FOR TURBO BLOWER RUN........................................... 258
E.28 PARAMETERS FOR POWER SAVING .................................................... 258
F CONTROL SEQUENCES IN LASER OSCILLATOR.......................... 261
F.1 OUTLINE OF LASER OSCILLATION SEQUENCES ................................ 261
F.2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES ...................... 263
F.2.1 RUN ON...............................................................................................................263
F.2.2 HV ON .................................................................................................................264
F.2.3 RUN OFF .............................................................................................................264
F.3 WARM UP IN START UP SEQUENCE ..................................................... 264
F.4 POWER SAVING....................................................................................... 264
F.4.1 Quick Power Saving State ....................................................................................264
F.4.1.1 Start quick power saving state ......................................................................... 264
F.4.1.2 Quick power saving state................................................................................. 264
F.4.1.3 Stop quick power saving state ......................................................................... 265
F.4.2 ECO Power Saving State......................................................................................265
F.4.2.1 Start ECO power saving state .......................................................................... 265
F.4.2.2 ECO Power Saving State ................................................................................. 265
F.4.2.3 Stop ECO power saving state .......................................................................... 265
F.4.2.4 ECO power saving state intra-tube gas pressure ............................................. 266
c-6
G EXTERNAL GAS LEAKAGE RECORDING TABLE .......................... 267

H GLOSSARY......................................................................................... 269
c-7
B-70475EN/01 1.INTERNAL STRUCTURE
1 INTERNAL STRUCTURE
Chapter 1, “INTERNAL STRUCTURE” consists of the following contents:
1.1 OUTLINE .............................................................................................................................................1

1.2 INTERNAL STRUCTURE...................................................................................................................2
1.3 OPTICAL PATHS IN THE OSCILLATOR.........................................................................................8
1.4 INTERNAL CONNECTIONS............................................................................................................10
1.1 OUTLINE
Fig. 1.1 shows an outline of the structure of the oscillator.
Part of Housing
200 VAC Discharge power supply
Input unit
24V PSU Laser power Laser power

supply supply
Signal
(to CNC) Interface
PCB Matching Matching
box box Dew Low
Part of Interface tempera-
sensor ture Beam
Part of sensor
Guide folding unit
Folding mirror Laser laser
resonator Output
mirror
Folding Discharge Discharge

tube tube
mirror Shutter unit
Discharge Discharge
tube Power
tube sensor
Rear
Outlet mirror Beam absorber
Inlet H/E
Part of Pressure control
H/E
Exhaust Gas dust To parts From parts
collection
control unit
Hour Turbo Water

Exhaust Pressure blower Flow
meter pump control
Turbo PCB
distributor sensor
Water-
Inverter cooled
Part of Gas circulating part
Exhaust gas Laser gas
Fig.1.1 Outline of structure
(1) Part of Laser resonator

The resonator consists of an output coupler, a rear mirror, folding mirrors, discharge tubes, a power
sensor unit etc., has the function to transform the electrical energy to the optical energy which is
single mode laser beam as 10.6μm. Several discharge tubes are connected in series using folding
mirrors, with an output coupler and a rear mirror placed at the open ends of the discharge tubes, thus
sealing the tubes.
The resonator is fitted with a gas pipe connecting port through which laser gas is fed into the
discharge tubes. A discharge from the electrodes of the discharge tubes energizes CO2 molecules,
which emit light. This light is amplified by the stimulated emission that takes place while the light
travels back and forth between the output coupler and the rear mirror. The resonator is capable of
converting electrical energy to optical energy (10.6-μm single-wavelength laser beam).
-1-
1.INTERNAL STRUCTURE B-70475EN/01
(2) Part of discharge power supply

This consists of laser power supply and matching box. This has the function that generates the high
frequency discharge in the discharge tubes, and supplies the energy to laser gas.
(3) Part of gas circulating

A gas circulating system is configured by connecting the resonator and the fan (turbo blower) with a
circulating pipe. Laser gas runs through the discharge tubes at a high speed. Two kinds of the heat
exchange are placed between the resonator and the fan (turbo blower). The one cool the laser gas
heated by discharge, another cools the laser gas heated by the fan (turbo blower).
(4) Part of pressure control

This controls the gas pressure of the part of gas circulating from start-up to the end of laser oscillator.
During the normal working, a part of laser gas is replaced to the fresh laser gas to interrupt the
degradation of laser gas.
(5) Part of Interface

This is the input unit connecting the interface PCB and outside power supply to connect CNC. The
laser oscillator is controlled by CNC through the interface PCB. The outside electrical power is
supplied to some units in the oscillator through the input unit.
(6) Water-cooled part

This part supplies the cooling water to every unit in laser oscillator.
(7) Housing
The laser oscillator is covered with the metal panel, and protects the humans from exposure to a laser
beam exceeding an accessible emission level or strong collateral radiation. All panels are
screw-fixed and cannot be removed without an appropriate tool.
1.2 INTERNAL STRUCTURE

This section describes the internal structure of the oscillator more specifically. Fig.1.2 (a) to (f) are
internal structural drawing.
(30)（Short optical path length type）（Long optical path length type）(30) （Short optical path length type）(28)
(3) (29) (31) (4) (5) (7) (2) (6) (21)
(23)
(17)
(24)
(25)
(20) (34) (11) (8) (9) (10) (12) (16) (15) (22)
Fig.1.2 (a) Internal structural drawing for C2000i-C (front view)
-2-
(27) (18) (1) (26) (32) (3)
(19)
(33) (14) (13)
Fig.1.2 (b) Internal structural drawing for C2000i-C (rear view)
(3) (31) (4) (5) (3) (28)（短光路型）
(30)
(21)
(23)
(24)
(25)
(20) (34) (11) (8) (9) (10) (12) (16) (17) (15) (22)
Fig.1.2(c) Internal structural drawing for C4000i-C (front view)
-3-
(2) (26)
(27) (18) (6) (1) (29) (7) (32) (3)
(16)
(33) (14) (13)
Fig.1.2 (d) Internal structural drawing for C4000i-C (rear view)
(23) (24) (6) (2) (7) (31) (4) (5) (29) (3) (27)
(18)
(21)
(19)
(25) (30)
(22) (17) (8) (9) (10) (12) (11) (16) (15)
Fig.1.2 (e) Internal structural drawing for C6000i-C (front view)
-4-
(1) (26) (7) (32) (3)
(20) (33) (14) (13) (34)
Fig.1.2 (f) Internal structural drawing for C6000i-C (rear view)
(1) Output coupler

A ZnSe (zinc selenide) substrate coated with dielectric. The output coupler is a transmission-type
reflecting mirror used to output the laser beam amplified inside the resonator.
(2) Rear mirror

A reflecting mirror consisting of a Ge (germanium) substrate, coated with dielectric. The rear mirror
is used to reflect the laser beam within the resonator while transmitting part of the laser light to the
outside to obtain the monitor light for laser output measurement.
(3) Folding mirror

A mirror with a Si (silicon) substrate coated with dielectric to reflect the laser beam.
It linearly polarizes the laser beam.
(4) Discharge tube

A pair of electrodes is metallized on the surface of a hollow quartz glass tube. A high-frequency
discharge between these electrodes injects electrical energy into the laser gas.
(5) Trigger electrode

This electrode is capable of pre-discharging outside the laser oscillation area so that the laser output
becomes completely zero when the beam is off.
(6) Power sensor

An optical sensor which detects the intensity of the laser beam, transmitted through the rear mirror,
thus enabling monitoring of the laser output level.
(7) Oil mist decomposing element

This element is capable of decomposing the organic matter that gets into the part of laser gas
circulating, with photo catalytic effect, using the ultraviolet rays generated from the discharge tubes.
(8) Laser power supply

This power supply outputs high-frequency power (2 MHz) according to a specified output with
commands from the CNC and supplies it to the discharge tubes via the matching box.
(9) Matching box

The matching box contains a matching circuit, which ensures that power is effectively input to the
discharge tubes.
-5-
(10) Turbo blower

This fan circulates the laser gas in the gas circulating system at high speed. It rotates at a high speed
of 60,000 revolutions per minute (min-1).
(11) Inverter
This inverter drives the turbo blower. It is responsible for acceleration/deceleration control and
issuing alarms during start and stop of the blower.
(12) Gas dust collection unit

This unit is a cyclone dust collector that removes dust that gets in the gas circulating system.
(13) Heat exchanger (inlet)

Water-cooled heat exchanger used to cool the laser gas that has been heated by discharge, before it is
drawn into the turbo blower.
(14) Heat exchanger (outlet)

Water-cooled heat exchanger used to cool the laser gas that has been heated by compression in the
turbo blower, before being forced into the discharge tubes.
(15) Gas controller

This gas controller constantly monitors the gas pressure in each discharge tube and supplies fresh
laser gas to the part of laser gas circulating to keep the pressure constant while exhausting degraded
laser gas. It also monitors the supply status of the laser gas, purge check for the part of laser gas
circulating and other items and has a function of adjusting the amount of flow of the gas to be
exhausted.
(16) Exhaust pump

This pump is used to vacuum-exhaust laser gas from the gas circulating system such that its pressure
falls to that used for laser oscillation. In addition, it exhausts part of the degraded gas in the gas
circulating system.
(17) Hour meter

The hour meter records the total number of hours that the laser oscillator has operated (how many
hours the exhaust pump has operated) to indicate whether maintenance or inspection is necessary.
(18) Shutter
The shutter is normally closed to keep the laser beam inside, and can be opened and closed with
CNC commands. It is equipped with a position sensor and a temperature sensor and constantly
monitors the open/close status and the shutter mirror temperature.
(19) Beam absorber

To perform laser oscillation without emitting the laser beam to the outside, the laser beam is
reflected on the shutter mirror and guided into the beam absorber. The absorber, which is
water-cooled, absorbs the laser beam. The absorber is equipped with a temperature sensor, which
allows the system to constantly monitor the temperature of the absorber.
(20) Water distribution unit

This unit distributes temperature-regulated external cooling water to each unit inside the laser
oscillator. The unit is equipped with a flow sensor, which allows the system to constantly monitor
the flow rate of the cooling water.
(21) Shutter PCB

This PCB relays signals collected into the shutter section, such as those from the limit switch,
absorber temperature sensor, power sensor, and dew sensor, to the interface PCB.
-6-
(22) Input unit

This unit distributes the power supplied to the oscillator to each unit in the laser oscillator. It also
protects each unit from overcurrents.
(23) Safety circuit PCB

This PCB has the relays that intercept the source of laser beam by the action of safety circuit
(Emergency stop circuit etc.). This PCB also has the relay to make the contactor and the valve for
AC200V to action by the command from CNC.
(24) Interface PCB (IF PCB)

This PCB communicates with the CNC via the FANUC I/O LINK (serial interface).
(25) 24-V power supply

This unit supplies DC power (24 VDC) to the interface PCB and various units.
(26) Dew sensor

This sensor is mounted to the output mirror holder to monitor the output mirror for condensation. It
prevents faults from occurring due to condensation.
(27) Guide laser (red semiconductor laser)

A diode laser is overlaid on the same optical axis as a guide beam for checking the optical axis
because the CO2 laser beam is invisible to the unaided eye. The guide beam is emitted in
synchronization with the mechanical shutter only when the shutter is closed. The guide laser can be
used for roughly adjusting the optical path of an external optical system and for obtaining a guide for
the machining point.
(28) Beam folding unit (C2000i-C, C4000i-C)

This unit extends the optical path length by folding back the laser beam output from the output
mirror in the oscillator and outputting the beam from the outlet of the oscillator. It consists of one
circular polarization mirror and one zero shift mirror or of two zero shift mirrors. It is provided in an
oscillator of short optical path length type; it is not provided in an oscillator of long optical path
length type.
(29) Low temperature sensor

This sensor measures the temperature of cooling water. When the temperature in the laser oscillator
is 20℃ or less in start-up of the oscillator, warm-up driving is executed by software. Therefore, it
prevents output power decrease.
(30) Oxygen sensor

A sensor for measuring the concentration of oxygen in the oscillator cabinet. This oxygen sensor is
placed near the beam exit to detect an inflow of oxygen from the outside. When the concentration of
oxygen has increased beyond the specified value, an alarm is issued, the oscillator is stopped, and a
purge operation is performed.
(31) Fan unit

Fan motors release the heat that is generated by discharge from the discharge tubes.
(32) Radiator fan unit (resonator)

The atmospheric temperature rises due to the heat generated by discharge from the discharge tubes.
This water-cooled heat exchanger is used to cool the heated air before circulated in the oscillator.
(33) Radiator fan unit (power supply)

The heat by the laser power supply unit is exhausted to outside of the power supply unit. This
water-cooled heat exchanger is used to cool the heated air before circulated in the oscillator.
-7-
(34) Noise filter

This noise filter for turbo blower reduces normal mode noise between power wires that is generated
from the inverter and common mode noise between the power supply and ground.
1.3 OPTICAL PATHS IN THE OSCILLATOR

The figures below show the laser optical paths inside the oscillator.
Safety cover Discharge tube Discharge tube Safety cover
Beam
Beam
For
Short optical
For Path length
Short optical type
Path length
type
Discharge tube Discharge tube
Beam Beam
For For
Short optical Short optical
Path length Path length
type type
Fig.1.3 (a) Optical paths in the C2000i-C
-8-
Safety cover Discharge tube Discharge tube Safety cover
Beam
Beam
For
For Long optical
Short optical path length
Path length type
type
Discharge tube Discharge tube
Beam
Beam For
Short optical
For
Path length
Short optical
type
Path length
type
Fig.1.3 (b) Optical paths in the C4000i-C
Discharge tube Discharge tube Discharge tube Discharge tube Safety cover
Beam
Beam
Fig.1.3(c) Optical paths in the C6000i-C
-9-
1.4 INTERNAL CONNECTION
1.4.1 Electrical Connections

The following show electrical connection diagrams of the individual models.
Fig.1.4.1 (a) Electrical connection diagram for C2000i-C (Standard)
- 10 -
Fig.1.4.1 (b) Electrical connection diagram for C2000i-C (CE Marking)
- 11 -
Fig.1.4.1(c) Electrical connection diagram for C4000i-C (Standard)
- 12 -
Fig.1.4.1 (d) Electrical connection diagram for C4000i-C (CE Marking)
- 13 -
Fig.1.4.1 (e) Electrical connection diagram for C6000i-C (Standard)
- 14 -
Fig.1.4.1 (f) Electrical connection diagram for C6000i-C (CE Marking)
- 15 -
1.4.2 Cooling Water Piping

The following show cooling water flow diagrams for the individual models.
Fig.1.4.2 (a) Water flow diagram for C2000i-C
- 16 -
Fig.1.4.2 (b) Water flow diagram for C4000i-C
- 17 -
Fig.1.4.2(c) Water flow diagram for C6000i-C
- 18 -
1.4.3 Vacuum Gas Connection

The following show vacuum system diagrams for the individual models.
Fig.1, 4.3(a) Vacuum system diagram for C2000i-C and C4000i-C
Fig.1.4.3 (b) Vacuum system diagram for C6000i-C
- 19 -
2.INSTALLATION B-70475EN/01
2 INSTALLATION
Chapter 2, “INSTALLATION” consists of the following contents:
3.1 INSTALLATION PROCEDURE .......................................................................................................20

3.2 OSCILLATOR CONNECTIONS.......................................................................................................28
3.3 DETAILS OF CHECKING ................................................................................................................40
3.4 PREPARATION PRIOR TO SHIPMENT .........................................................................................49
2.1 INSTALLATION PROCEDURE

Use the following procedure to make adjustments and checks during installation.
As soon as the oscillator is delivered, loosen the clamps of the resonator described in (3) below.
CAUTION
If the clamps of the resonator are left fastened for a long time, the resonator can
deform. As a result, a problem such as a failure in beam mode adjustment or
insufficient laser output can arise.
(1) Check the environment at the installation location.

[Environmental conditions]
1 Ambient temperature +5 to 35°C without condensation
2 Temperature variation 1.1°C /minute maximum
3 Humidity 75% or below (relative humidity)
Acceleration not to exceed 0.05G.
4 Vibration
Vibration amplitude not to exceed 5μm.
Dust must be minimized.
5 Atmosphere There must be no organic volatile components. There must be no
flammable gas or dangerous gas such as dense oxygen.
(2) Adjust the table horizontally where the oscillator is installed, and then put the oscillator on, and fix it
by the bolts.
The C6000i-C has adjustable feet for fixing with bolts. Use the following procedure to install the
C6000i-C.
Fig. 2.1(a) External view of C6000i-C
- 20 -
B-70475EN/01 2.INSTALLATION
Fixed foot (a: Its height is fixed.) Adjustable foot (b: Its height can be fine-adjusted.)
Fig. 2.1(b) Details of feet
(a) Installing the oscillator (putting the oscillator on or putting it on again after moving it)
<1> Adjust the machine table horizontally.
<2> Before installing the oscillator on the machine table, tighten all adjustable feet (at the three
places marked with b) on the oscillator as shown below so that their height is shorter than
the height of the fixed feet (at the three places marked with a).
Oscillator frame
Adjustable foot
Tighten
Machine table
<3> Lift the oscillator by a crane using the four eyebolts on the top of the oscillator.
Lifting
<4> Keep lifting the oscillator by a crane, set the fixed feet (at the three places marked with a)
on the oscillator on the machine table until they slightly touch the machine table as shown
below, and attach the fixed feet using the bolts securing them temporarily.
Oscillator frame
Slightly
touches the Fixed foot
Keep lifting the machine table.
oscillator Machine table
Bolt securing the foot (M20)
- 21 -
NOTE
When setting each fixing foot, keep lifting the oscillator by a crane and the status
in which the fixing feet slightly touch the machine table (slings are strained)
without securing the oscillator on the machine table completely.
If the oscillator is completely secured on the machine table only with the fixed
feet, the cabinet can deform.
<5> Turn each adjustable foot on the oscillator as long as it turns with hand, and then make it
touch the machine table.
Oscillator frame
Loosen the
foot until it
Keep lifting the Adjustable foot
touches the
oscillator. table. Machine table
Turn the foot in the arrow

direction.
<6> Set down the oscillator on the machine table completely.
Set down the

oscillator
completely.
<7> Fully tighten the fixed and adjustable feet on the oscillator with the bolts securing them.
Oscillator frame
Fixed foot Adjustable foot
Machine table
Bolt securing the Bolt securing the foot (M20)

foot (M20)
(b) Moving the oscillator (moving the oscillator installed on the machine table)
<1> Install the machine table together with the oscillator.
<2> Remove the bolts securing the fixed and adjustable feet on the oscillator.
<3> Lift only the oscillator by a crane using the four eyebolts on the top of the oscillator again.
(The oscillator is required to be lifted just slightly off the machine table.)
<4> Tighten all adjustable feet on the oscillator as shown below so that their height is shorter
than the height of the fixed feet.
- 22 -
Oscillator frame
Tighten
Machine table
<5> Adjust the machine table horizontally.

<6> After that, follow steps <4> to <7> in (a).
(3) Remove resonator and shutter clamps.

The clamp locations are shown in Figs.3.1(c) to (e).
Keep the detached parts for clamp
Resonator clamp Shutter clamp
Fig. 2.1(c) Clamp locations of C2000i-C
- 23 -
Shutter clamp
Resonator clamp
Resonator clamp
Fig. 2.1(d) Clamp locations ofC4000i-C
- 24 -
Resonator clamp Resonator clamp Shutter clamp
Fig. 2.1(e) Clamp locations of C6000i-C
Shutter unit Mirror holder
Beam cover pipe
Space <2> between beam

flange and beam cover pipe
Beam flange
Bolt <1>
Safety cover Beam cover

pipe
Fig. 2.1(f) Safety cover for shutter unit Fig. 2.1(g) Details of Safety cover
- 25 -
(4) Check the safety cover of shutter unit

The beam flange of the safety cover is fixed with a small space <2> exists between the beam cover
pipe installed in output mirror holder. Check whether the interference with the beam flange and the
beam cover pipe, and loosening of beam flange installation bolt <1>. When there is interference of
loosening, adjust and tighten according to procedure below.
(a) Before alignment, loose bolt <1>.
NOTE
Loose the bolt <1> absolutely. If not, it is possible that it contaminated with the
alignment.
(b) After the alignment, adjust to keep a small space <2> between the hole of beam flange and the
beam cover pipe. In addition, keep a small space <2>, and fix the beam flange with bolt <1>.
(5) Check the outsides of units installed in the oscillator as follows:

Check items
1 Check whether any printed circuit boards are loose or removed.
2 Check whether any cables are damaged (such as damaged sheathing).
3 Check whether any connectors are loose or detached.
4 Check that the discharge tubes are neither cracked nor damaged.
5 Check that the turbo blowers and other units are neither loose nor missing.
6 Check that the power supply units and matching boxes are neither loose nor missing.
7 Check that the input unit is neither loose nor missing.
8 Check that the connection to the electrode of each discharge tube is not loose.
9 Check whether any fittings part of the water piping and gas piping is loose.
10 Check all screw terminals in the units.
11 Check the oil level in the turbo blowers. (See Subsection 3.3.1 for details.)
12 Check the oil level in the exhaust pump, and check for oil contamination. (See Subsection 3.3.2 for details.)
(6) Connect the power and signal lines to the oscillator. (See Subsection 2.2.3 for details.)
Check items
1 Oscillator power cable
2 Ground cable of 10Ω or less (Class-A ground: For Japan, Protection Class 1: For foreign country)
3 Communication cable between the CNC and oscillator (I/O Link, FSSB)
4 Signal cables
(7) Check the input power supply voltage, frequency and phase rotation. (See Subsection 2.3.1 for
details.)
Set the frequency of the power supply to the hour meter. (See Subsection 2.3.1 for details.)
CAUTION
In the installing, the moving or the construction of electrical facility, it is possible
that the phase rotation is incorrect. Be sure to check the phase rotation, and
then start the exhaust. If the gas pressure does not fall after one minute, stop the
exhaust, and then check it. Check the gas pressure on PSW2 of gas controller
or DGN No.905.
(8) Connect the laser gas and cooling water pipes. (See Subsections 2.2.1, 2.2.2, and 2.3.2 for details.)
Check items
1 Check the laser gas composition and purity (check whether the specifications are satisfied).
2 Check the laser gas piping status.
3 Check that there is no gas leakage in the external piping between the gas cylinder and oscillator.
- 26 -
Check items
4 Check the quality of the cooling water (use of tap water passed through an ion exchanger).
(9) Check the supply gas pressure.

Check that the secondary pressure of the gas regulator is 0.175±0.025 MPa.
(10) Check the parameters and setting data.

A parameter table for the laser oscillator is attached to the oscillator. Some machine builders prepare
a parameter table including parameters for the laser oscillator. If data sheets are not found, contact
the machine tool builder.
(a) On the setting screen of the CNC, set the parameter write enable state.
(b) Check the parameters, and enter the same values as specified in the parameter table.
(c) On the setting screen of the CNC, set the parameter write protected state, and press the reset
button.
CAUTION
1 If the oscillator is started with an incorrect parameter value specified, the
oscillator may fail in the worst case. Be particularly careful when entering and
checking parameter values.
2 Some parameters may require modification to, for example, suit the operating
state of the oscillator or enable maintenance. When parameters are modified, it
is recommended that modification history (date, parameters before modification,
parameters after modification, and reason for modification) be recorded so that
old parameters and invalid parameters are not used.
3 Be careful not to lose the attached data sheets, and keep them safely.
(11) Check that cooling water is supplied normally, and that there is no water leakage inside the oscillator
or at any external connection points. (See Subsection 2.3.3 for details.)
Check that the temperature of the cooling water is set to 25 to 30°C.
Normally, it is recommended that the temperature be set to 27°C.
(12) Turn on the power and RUN switch, and then check the operation of the fan motors in the laser
oscillator after SEQ1500. Note, however, that the fan motor installed in the laser power supply does
not start until the oscillator sequence starts the turbo blower operation (SEQ1700).
(13) Conduct an oscillator vacuum leakage test.

Check the oscillator for any internal leakage.
When performing the leakage check, use the automatic leakage check function.
If there is internal leakage, locate the leakage according to the leakage location method described in
Subsection 2.3.5.
(14) Check that the laser gas pressure is controlled normally.
(a) Set all bits of parameter No. 15027 to 0 because only the pressure control operation is to be
checked, without causing discharge.
Check that alarm Nos. 4073 and 4078 are not issued. If one of the alarms is issued, see the
solution in Section 4.2, and take appropriate action.
(b) After completing the checking, reset the changed parameters to their original settings.
(15) Start the laser oscillator to perform discharge aging. See Subsection 2.3.6 to start the aging function.
If the oscillator is left unused for two weeks or more), perform discharge aging for at least 8 hours.
(16) Check the laser beam mode.
- 27 -
CAUTION
A beam mode deviation may occur depending on the transportation method and
storage condition. When installing the oscillator, be sure to perform this step. A
mode deviation does not mean a failure. Perform alignment by following the
procedure described in Subsection 5.24.1.
(a) Record the value of the micrometer of OC, RM and FM.
(b) Take the power max by FM. referring to subsection 5.24.4.
C2000i-C:FM1, C4000i-C:FM4, C6000i-C:FM1 and FM4
(c) Check the below items referring to subsection 4.3.7
(i) No difference between the taken mode and the mode attached to the oscillator.
(ii) Mode shape is the circular symmetry.
(iii) No fringe pattern around the mode.
(d) If it is abnormal, execute the alignment referring to subsection 5.24.1.
(17) Check the oscillation characteristics and output. See Subsections 2.3.8, 2.3.9, and 2.3.10 for details
of the check method.
(a) Check that the correction coefficient is 1100 or less.
(b) Oscillation characteristic check :
Check that the discharge voltage during base discharge and when a rated output is specified is
within the factory-set value plus 200 V.
If the correction coefficient or discharge voltage exceeds the maximum, repeat discharge aging.
(c) Discharge margin check : Check that a margin is provided.
(d) Voltage margin check : Check that no alarm is issued.
2.2 OSCILLATOR CONNECTIONS

The oscillator has connections for laser gas piping, cooling water piping, and power and signal cables.
For details of the electrical connections for the CNC and machine, refer to the corresponding connection
manual.
2.2.1 Laser Gas
2.2.1.1 Laser gas specification

Supply the laser oscillator with a mixture of gases that satisfy the conditions listed below.
(1) Composition ratio and accuracy
(For the composition ratio, check the label and specifications of the oscillator.)
CO2 5±0.25％ : He 60±3％(He balance) : N2 35±1.75％
(2) Water (H2O) : 5 ppm or less
(3) Hydrocarbon (CnHm) : 1 ppm or less
(4) Gas purity : 99.99% or higher
2.2.1.2 Gas pipe

Observe the following cautions for piping between the laser gas cylinder and laser oscillator.
(1) It is recommended that a polyethylene tube E series (E-64-Y-0100: 3/8 inches, Yellow) having an
inside diameter of 6 mm or larger (manufactured by Parker Hanniffin Corporation) be used. Do not
use a nylon, rubber, or urethane tube.
(2) Use swage-lock vacuum fittings. Do not use a one-touch coupler, quick coupler, or hose-band
fittings.
- 28 -
(3) Minimize the length of tubing. It should be kept within 5 m. Never exceed 15 m. For a length of 15
m or more, use stainless bright-annealed piping, but do not use a copper piping. In this case, do not
extend piping over 30 m.
(4) Minimize the number of fittings used. Connect pipes, if necessary, using a swage-lock vacuum
fittings or by TIG welding.
Piping should be installed by a vacuum piping specialist.
(5) Always keep the piping materials clean. Do not allow foreign matter to get in the pipe.
(6) Use a regulator that has been degreased and is free from gas leakage.
(7) Please set the exhaust time of external piping (parameter No.15260) long when the piping distance is
5m or more. The standard value of the parameter is two seconds every 5m.
(8) The gas used by the laser oscillator is exhausted from the GAS OUT port. Though the exhausted
amount of gas is very small, do not exhaust the amount of the exhausted gas in the room with
airtight, Lay pipes from the GAS OUT port and exhaust laser gas to outdoors.
2.2.1.3 Leakage in external piping

After installing the piping, see Subsection 2.3.2, and be sure to conduct a clamp test to check for gas
leakage.
If the rate of change in primary pressure over eight hours exceeds 10%, or if the rate of change in
secondary pressure over eight hours exceeds 10% for a polyethylene tube or 6% for a stainless pipe,
leakage that prevents normal oscillator operation is present. Use the helium leakage detector to locate the
leakage and eliminate it.
2.2.1.4 Replacing the laser gas cylinder

(1) If the primary pressure of the regulator installed in the laser gas cylinder is 1 MPa or less, replace the
laser gas cylinder with new one.
(2) When laser gas runs out during oscillator operation, the oscillator stops automatically. In this case,
after the oscillator stops, replace the gas cylinder.
(3) When replacing the gas cylinder, close the main plug of the gas cylinder, completely loosen the
adjustment valve of the regulator, then remove the regulator.
If the adjustment valve of the regulator is left tightened, external air will enter the piping. When the
oscillator is started after the replacement of the cylinder, the external piping exhaust operates to
remove gas inside the piping, and the oscillator starts in the normal sequence.
When laser gas runs out during purging, a stop occurs while the inside of the piping is in the
negative pressure state. If the gas cylinder is replaced in this state, the atmosphere is sucked.
Therefore, be sure to loosen the adjustment valve of the regulator before removing the regulator.
Before the oscillator starts, the external piping exhaust operation takes place then the automatic
aging function operates to perform aging in the oscillator to prevent possible troubles from occurring
if the atmosphere should be sucked.
2.2.2 Cooling Water

CAUTION
To prevent that the cooling water flows in to the oscillator by the irregular driving
of the chiller in the oscillator off, install the valve on the cooling water inlet of the
oscillator.
- 29 -
2.2.2.1 Specification of the cooling water

The quality of cooling water is specified in the table below. Use pure water or tap water passed through
an ion exchanger.
pH (25°C) 6.0 to 8.0
Conductivity (25°C) 200μS/cm or less
Chlorine ion Cl- 20mg/L or less
Standard item
Sulfate ion SO42- 50mg/L or less
M alkalinity 50mg/L or less
Total hardness CaCO3 50mg/L or less
Iron Fe 0.3mg/L or less
Sulfur ion S2- Not to be detected
Reference item
Ammonia ion NH4+ 0.2mg/L or less
Ionic silica SiO2 30mg/L or less
ppm = mg/L
2.2.2.2 Pure water supply unit

Install a pure water supply unit (ion-exchange region) at the water inlet of the chiller. The pure water
supply unit can prevent problems with the oscillator from occurring due to corrosion or a clogged pipe.
Replace the water periodically after every 1,500 hours because the quality of the circulating cooling water
is lowered.
Product name : Pure Water Supply Cartridge
Manufacturer : ORUGANO Co. Ltd.
Use : Refer to the description indicated on the product.
2.2.2.3 Anticorrosive
Add the following anticorrosive to cooling water immediately after installation to prevent problems due
to corroding cooling water and to decrease the frequency of replacement of cooling water.
Consult the chiller manufacturer for use of the anticorrosive.
Product name Manufacturer
1 CONTLIME K-6000 Mitsubishi Gas Chemical Company, Inc.
2 Kurilex L-111 Kurita Water Industries Ltd.
Use : Add the anticorrosive above to cooling water initially so that the concentration is within 1000 to
2000 ppm. (100 to 200 cc/100 liters). Monthly check the concentration of the anticorrosive using
concentration check paper dedicated to anticorrosive and adds the anticorrosive to cooling water
until the concentration reaches about 1000 ppm.
Concentration check paper :
Purchase a concentration check set (50 sheets of check paper, a dropping pipette, etc.) together with
CONTLIME K-6000 (manufactured by Mitsubishi Gas Chemical Inc).
CAUTION
If the above anticorrosive is added to cooling water and the concentration is
controlled, also be sure to replace the cooling water every year.
2.2.2.4 Cleaning agent

To remove foreign matters such as fur that have adhered to the inside of the cooling water circulating path,
wash the cooling water circulating path using the following detergent. Consult the chiller manufacturer
for use of the detergent.
- 30 -
Product name Manufacturer

1 DESLIME Mitsubishi Gas Chemical Company, Inc.
2 Kuridine I-302 Kurita Water Industries Ltd.
Use: Add the detergent of 10% of the amount of cooling water, circulate the water for an hour, and then
drain the water. After that, rinse the cooling water circulating path thoroughly. Do not touch a stock
solution of DESLIME with your bare hands because the solution is a strong chemical. If a stock
solution accidentally contacts your skin, wash the stock solution off your skin well under running
water.
If waste water used for washing is left standing, the main ingredient, hydrogen peroxide, is
decomposed. Wait until hydrogen peroxide is decomposed, or dilute wastewater with water to
reduce the concentration, and then flush the wastewater down the drain.
2.2.2.5 Antifreezing
If the chiller is used in a cold district, it should be provided with an antifreezing function. When the air
temperature falls, the water supply pump should be kept running. In a very cold district, incorporate a
heater into the chiller to prevent the water temperature to drop too much. A chiller with a built-in heater is
recommended because the water temperature must reach 20°C or greater to start the oscillator.
2.2.3 Electrical Connections

Connect the cables to the laser oscillator as described below.
(1) Specifications of the circuit breakers for the factory facilities and power cables
The maximum current supplied to the laser oscillator are as follows:
Maximum current : C2000i-C 110A
C4000i-C 190A
C6000i-C 255A
Seeing the table below for the specifications of the circuit breakers for the factory facilities and
power cables, select the appropriate them.
It is recommended to use a UL cable for North America.
Allowable cable
Model Circuit breaker for factory facilities Minimum cable size
clamp diameter
2
38mm
C2000i-C Rated current: 150Ａ or more φ31mm to φ37mm
(UL cable:AWG1)
2
100mm
(UL cable:AWG4/0)
2
125mm
(UL cable:350MCM)
- 31 -
(2) Power cable

L1(U), L2(V), L3(W)
Recommended power cables
(a) If placing the cable in the duct
If laying the power cable by placing it in the duct between the power board and the laser
oscillator, use a single-core cable.
OSC Recommendation Cross section Diameter Max current Type Layout
Hitachi Cable： 600V MLFC 50mm2 φ14.4mm 124A
C2000i-C Furukawa： 600V LMFC 50mm2 φ14.4mm 124A
LAPP：Multi standard single core 50mm2 φ14mm 120A

Cross section Diameter
Single core
C4000i-C
3 pieces
Furukawa： 600V LMFC 150mm2 φ22.2mm 250A

C6000i-C
Furukawa： 600V LMFC 200mm2 φ26.9mm 304A
(b) If not placing the cable in the duct

If not placing the power cable in the duct between the power board and the laser oscillator, you
can use a heavy-duty power cord cable.
OSC Recommendation Cross section Diameter Max current Type Layout
2
Hitachi cable： 600 V 2PNCT 38mm φ34mm 124A ４ Core Cross section Diameter
C2000i-C Sheathed
Portable
LAPP ： OLFLEX 100 50mm2 φ34.5mm 146A １ piece
Hitachi cable： 600 V 2PNCT 100mm2 φ24mm 253A

C4000i-C
Cross section Diameter
LAPP ： OLFLEX FD 90 120mm2 φ23.8mm 219A １ Core
Sheathed
Hitachi cable： 600 V 2PNCT 125mm2 φ26mm 291A Portable
3 pieces
C6000i-C
LAPP ： OLFLEX FD 90 185mm2 φ28.9mm 285A
-
(c) Recommended cable suppliers

Hitachi Cable : Hitachi Cable, Ltd.
Furukawa : The Furukawa electric Co., Ltd.
LAPP : U.I. Lapp GmbH
(d) Crimp terminal connectors
Use ring crimp terminal connectors listed in the table below or their equivalents.
Spec.No. of crimp Size of Tightening
Model Size of cable Manufacture terminal terminal torque for
connector screw terminal
C2000i-C 38 mm2 38-S8 M8 8 to 13N⋅m
JAPAN
In case of
C4000i-C SOLDERLESS CB100-S8 M8 8 to 13N⋅m
100 mm2
TERMINAL MFG
C6000i-C In case of
Co., Ltd. CB150-S12 M12 40 to 50N⋅m
150 mm2
(3) Ground cable

Use a cable having a cross section of at least half of the cross section of the power cable that fits the
size of the cable clamp.
The allowable diameter for the cable clamp for the ground cable of the C6000i-C is φ14 to φ25 mm.
- 32 -
Perform grounding so that the resistance is 10 Ω or less (Class-A ground: For Japan, Protection
Class 1: For foreign country) and connect the ground cable to the ground connection section (M8)
on the oscillator.
Power cable
Cable clamp
Cable inlet
Shield earth connection

For only CE Marking
(M4)
Earth connection
(M8)
View A L1 L2 L3
(U) (V) (W)
Power cable connection
Fig. 2.2.3(a) Connection of power cable and ground cable of C2000i-C
Power cable
Cable inlet
Cable clamp

for only CE Marking
(M4)
Earth connection
(M8)
L1 L2 L3
(U) (V) (W)
View A
Fig. 2.2.3(b) Connection of power cable and ground cable ofC4000i-C
- 33 -
Power cable
Cable clamp
Cable inlet

for only CE Marking
(M4)
Earth connection
(M8)
L1 L2 L3
(U) (V) (W) View A
Fig. 2.2.3(c) Connection of power cable and ground cable of C6000i-C
- 34 -
(4) Signal cables
• Signal cable connection with Interface PCB of laser oscillator
Laser oscillator
Interface PCB
JD1B I/O LINK Connection of the JD1A to I/O unit and others
JD1A I/O LINK Connection of the JD1B to I/O unit and others
COP10B FSSB Connection of the last unit for FSSB

（When the FSSB is used）
・Laser oscillator ON/OFF signal（A1,A2）

・OFF Interlock signal（OFI1,OFI2）
CNL ・Trip signal of main breaker（PF1,PF2）
・Shutter Interlock signal（SHL1,SHL2）
・Guide laser Interlock signal（IB1,IB2）
・Emergency stop signal（EMS1-1,EMS1-2,EMS2-1,EMS2-2）
・Shutter open state signal（SO1,SO2）：only CE
Fig. 2.2.3(d) Connection of Signal cable
(a) When a metallic cable is used:

Use a metallic cable for connections over a distance of less than 10 m.
(b) When an optical fiber cable is used:

It is not possible to connect an optical fiber cable directly with Interface PCB.
The following optical I/O Link adaptor units are necessary.
• I/O Link
A04B-0800-J002 IN （For connection of CNC and laser oscillator）
• A04B-0800-J003 OUT（For connection of laser oscillator and external equipment）
• I/O Link i
A04B-0800-J004 IN（For connection of CNC and laser oscillator）
• A04B-0800-J005 OUT（For connection of laser oscillator and external equipment）
Use the optical fiber cable with the laser oscillator for the I/O link when corresponding to either
the following.
• When the length of connected cable is 10m or more
• When it is not possible to connect it with the ground cable of 5.5mm2 between the cabinet,
which is install, the I/O units or between the laser oscillator and CNC control unit.
• When the noise might strongly influence the cable
For instance, when there is a strong electromagnetic noise source such as the welding
machines by the cable or when the cable is installed long in parallel with the power line,
etc.
- 35 -
• When connecting with the laser oscillator of the CE specification
Refer to the following figures for the connection of the optical fiber cable.
• Connect the optical fiber cable to the optical connecter COP10B on the optical I/O Link
adapter unit.
• Connect the optical fiber cable to the optical connecter COP10B on the optical I/O Link
adapter unit.
Optical I/O Link adapter unit

A04B-0800-J002 A04B-0800-J003
A04B-0800-J004 A04B-0800-J005
A04B-0800-J002
A04B-0800-J004
Connection of the Connection of the

A04B-0800-J003 optical fiber cable optical fiber cable
A04B-0800-J005 for COP10B for COP10A
Fig. 2.2.3(e) Mounting location of the Optical I/O Link adapter unit of C2000i-C

A04B-0800-J002 A04B-0800-J003
A04B-0800-J004 A04B-0800-J005
A04B-0800-J002
A04B-0800-J004

Fig. 2.2.3(f) Mounting location of the high-speed I/O unit ofC4000i-C
- 36 -
A04B-0800-J002 Optical I/O Link adapter unit

A04B-0800-J004
A04B-0800-J002
A04B-0800-J004
Connection of the
optical fiber cable
for COP10B
A04B-0800-J003
A04B-0800-J005
Connection of the
optical fiber cable
A04B-0800-J003 for COP10A
A04B-0800-J005
Fig. 2.2.3(g) Mounting location of the Optical I/O Link adapter of C6000i-C
(c) Other signal cables (connection to CNL)

Laser oscillator interface PCB
CNL
A1 IB1 B1 IB2
A2 B2
A3 SHL1 B3 SHL2
Machine
A4 EMS2-1 B4 EMS2-2
A5 EMS1-1 B5 EMS1-2
A6 24V B6 0V
A7 OFI1 B7 OFI2
A04B-0800-K153
A8 PF1 B8 PF2 Tyco electronics:178289-8(housing)
A9 SO1 B9 SO2 Tyco electronics:1-175218-2(Contact)
A10 24V-4 B10 24V-2
Fig. 2.2.3(h) CNL Signal
• IB1⋅IB2:
Guide light interlock signal output
The guide laser lights by the short circuit between IB1 and IB2.
DC30V and 10mA or more
Interlock switch
IB1
To Guide laser
IB2
To LD
Laser oscillator machine

Fig. 2.2.3(i) Guide laser Interlock signal
• SHL1⋅SHL2:
Shutter interlock signal input
The shutter opens by the short circuit between SHL1 and SHL2.
- 37 -
DC24V and 1.2A or more
Interlock switch
SHL1
To Shutter solenoid
SHL2
To shutter
Fig. 2.2.3(j) Shutter Interlock signal
• EMS1-1⋅EMS1-2, EMS2-1⋅EMS2-2:
Emergency stop signal input
The emergency stop signal is a doubling signal. (Dual chain)
Connect the normal close signal that synchronizes with each terminal of EMS1-1･
EMS1-2 and EMS2-1･EMS2-2. Contact capacity: DC24V and 1.2A Connect with each
terminal of EMS1-1･EMS1-2 and EMS2-1･EMS2-2 dividing the two signals when
consisting of the emergency stop by one signal (Single chain). It doesn't operate normally
in the one signal input.
Emergency stop switch
EMS1-1
DC24V
EMS1-2
To Emergency stop circuit
EMS2-1
DC24V
EMS2-2
To Emergency stop circuit
Fig. 2.2.3(k) Emergency stop signal
• 24V⋅0V:
ON/OFF signal of laser oscillator input
The laser oscillator starts when DC24V that synchronizes with CNC is input between 24V
and 0V. The maximum current consumption is about 100mA in the standard specification,
and are a sum total of 120mA and the load current connected with SO1 and SO2 in the CE
specification.
ON/OFF Switch 24V

24V
To ON/OFF circuit
0V
0V
Fig. 2.2.3(l) Laser oscillator ON/OFF signal
• OFI1⋅OFI2:
Off interlock signal output
This terminal is for the interlock of power supply OFF switch. Connect with the ON/OFF
circuit of an external power supply.
- 38 -
OFF Switch
OFI1
OFI2
Fig. 2.2.3(m) OFF Interlock signal
• PF1⋅PF2:
Trip signal input for the main breaker of the laser oscillator
The main breaker trips by supplying DC24V between PF1 and PF2. This power
consumption is 50W.
24V
Switch
PF1
To main Breaker
PF2
Laser oscillator machine 0V
Fig. 2.2.3(n) Trip signal of main breaker
• SO1⋅SO2:
Shutter open signal output (only CE specification)
It is a signal that outputs the shutter open form. When the shutter doesn't shut completely,
DC24V is output. (Maximum current : 100mA)
It is possible to output the one serial signal or two parallel signals by the connection
method of the two shutter position detection switches output.
The signal is output from SO1 and SO2 in parallel by connecting 24V-2 pin with 24V-4
pin. In addition, the signal is output from the SO2 pin to the serial by connecting the SO1
pin with 24V-4 pin.
Serial connection
24V-2
Parallel connection
Output 1 of
Shutter position SO1
detection switch
24V-2
Shutter open signal
Output 2 of 24V-4
Shutter position
detection switch SO2
Fig. 2.2.3(o) Shutter open state signal
(7) Emergency stop signal connection

Connect the emergency stop signal with the laser oscillator and the I/O unit of machine cable. Refer
to the connection manual of CNC to connect the emergency stop signal with the I/O unit.
It is possible to automatically stop emergency by PMC signal F221#0(LARM) when some troubles
occur on laser oscillator.
- 39 -
The specification of contact capacity between EMS1-1･EMS1-2 and EMS2-1･EMS2-2 is DC24V

1.2A or more.
I/O unit DC24V
CNC *ESP
I/Ounit LARM
Laser oscillator Emergency

InterfacePCB Stop
Switch
Relay
24V
Safety circuit PCB
EMS1-1
EMS2-1
Relay EMS1-2
Relay EMS2-2
0V
To Guide laser Laser PSU To shutter Solenoid

200V supply
Fig. 2.2.3(p) Emergency stop signal connection
2.3 DETAILS OF CHECKING
2.3.1 Power Supply Checking

2.3.1.1 Checking the power supply
Check whether the power supply satisfies the following specifications:
200VAC+10%,-15%, 50/60Hz±1Hz, 3φ
or 220VAC+10%,-15%, 60Hz±1Hz, 3φ
or 230VAC+5%,-10%, 60Hz±1Hz, 3φ
2.3.1.2 Phase rotation

Connect input terminals L1(U), L2(V), and L3(W) to R, S, and T of the phase rotation sensor,
respectively, and check that the disk of the phase rotation sensor turns clockwise.
- 40 -
Input terminal
L1 L2 L3
(U) (V) (W) G
Phase rotation
sensor
T
Fig. 2.3.1(a) Phase rotation sensor Fig. 2.3.1(b) Phase rotation sensor connection
2.3.1.3 Setting the frequency of the power supply of the hour meter
Use the frequency switch on the back of the hour meter to set the frequency of the power supply. The
frequency is factory set to 50 Hz.
Frequency switch
50Hz 60Hz
Fig. 2.3.1(c) Hour meter (rear view)
2.3.1.4 Measurement of voltage of DC power supply unit

Check that the DC voltages output from the interface PCB and 24-V power supply are within their
allowable ranges.
(1) Interface PCB : See Fig. 2.3.1(d)
Specification : A16B-3100-0070
Rated output voltage
Terminal name Rated voltage Voltage error allowance Application
1R5V +1.5V ±5% Logic circuit
3R3V +3.3V ±5% Logic circuit
33V2 +3.3V ±5% Logic circuit
P5V +5V ±5% Logic circuit
24V +24V ±5% Input, output signal
24V3 +24V ±5% Input, output signal
P15 +15V ±5% Analog circuit
N15 -15V ±5% Analog circuit
Fuse : FU1,2 :A60L-0001-0290#LM50C for AC/DC48V 5.0A (2 pieces are used.)
- 41 -
-15V +15V
+24V
Fuse
ヒューズ +24V
+5V
+1.5V +3.3V +3.3V

Fig. 2.3.1(d) Out line of Interface PCB
(2) 24-V power supply unit : See Fig. 3.3.1(d).

This unit supplies +24 V to the Interface PCB.
Specification : A20B-1005-0124
Fuse : FU :A60L-0001-0175#3.2 3.2A (2 pieces are used.)
Fuse
Fig. 2.3.1(e) 24V power supply
2.3.1.5 Checking of jumper pins on the interface PCB

Jumper pin Setting
EXT When the pulse output command is used by external signal (EXTP, EXTN)
SH1
INT Setting usually
- 42 -
2.3.1.6 Checking the interface PCB signals

The following table provides reference information for checking signals on the interface PCB: Refer to
Fig. 2.3.1(d) for the check part of the signal.
Signal name Signal function
COR1-8 Command voltage 0 to 8.75V to each laser power supply
GPC Voltage of gas pressure control command 0 to –12.7V
LPW Monitoring of laser output power 0 to 10V
LTP1 Monitoring of pressure inside discharge tube 0 to 5V
VOM1, 2 Monitoring of water flow sensor 0 to 10V
GSP Laser gas supply pressure monitor 0 to 5V
AP Laser gas pressure (atmospheric pressure) monitor 0 to 5V
TOL1, 2 Turbo Blower oil level 0 to 24V
COI Monitor current of inverter 0 to 10V
GND1, …, 4,
0V
10, …, 16
2.3.2 External Laser Gas Piping Leakage Check (Clamp Test)

When you have installed or modified laser gas piping, conduct a clamp test that checks for any leakage by
sealing laser gas inside the piping and observing the pressure change after a specified period.
(1) Measurement
Measure and record the gas pressure as described below.
For recording measured data, use the external leakage record table presented in Appendix G.
(a) Stop the oscillator. At least five minutes after purging is completed, turn the secondary pressure
adjustment handle of the regulator in the pressure-reducing direction to completely close the
adjustment nozzle, then close the main plug of the gas cylinder.
(b) Record the primary pressure (P1S), secondary pressure (P2S), and start time (tS) of the regulator
connected to the cylinder.
(c) When about eight hours have passed, record the primary pressure (P1E), secondary pressure
(P2E), and end time (tE) of the regulator.
(d) Open the main plug of the gas cylinder(Note), and measure and record the primary pressure (P1ST)
of the regulator.
NOTE
When opening the main plug of the gas cylinder, you should stand at an oblique
position to the regulator. Never stand just in front of the pressure gauge. If
significant leakage is present, opening the main plug causes an abrupt pressure
to be applied to the regulator, which can damage the regulator.
(2) Determination
Calculate the change ratio from measured values by using the equation below to determine the
leakage state.
(a) Primary pressure change ratio
(P1ST - P1E) 8 hours × 100
Primary pressure change ratio= ×
P1ST (tE - tS) hours
If the primary pressure change ratio is 10% or less, no leakage is assumed on the primary side.
When the fluctuation of air temperature is remarkable, it is possible that the primary pressure
change ratio fluctuates.
(b) Secondary pressure change ratio
(P2S - P2E) 8 hours × 100
Secondary pressure change ratio= ×
P2S (tE - tS) hours
If the secondary pressure change ratio is not greater than the following value, no leakage is
assumed on the secondary side:
- 43 -
• 10% when a polyethylene tube is used for piping

• 6% when a metallic pipe such as a stainless pipe is used for piping
2.3.3 Checking Cooling Water

(1) Turn off the main circuit breaker of the oscillator and the power supply.
(2) Check that the water piping is connected to the water inlet (IN) and outlet (OUT) of the oscillator in
the correct direction.
(3) Completely open the water piping of the outlet to let water flow without any obstacle. Move the
chiller unit manually to let cooling water to flow at a rate of about 10 liters per minute.
In this condition, check for water leakage in the following:
• Water inlet (IN) and outlet (OUT) of the oscillator
• Water piping (tubes, fittings, and so on) inside the oscillator
(4) If the above checking shows that there is no water leakage, feed cooling water to the oscillator at the
specified flow rate. Set the output pressure of the cooling water circulating unit to 0.5 Mpa (5 bar) or
less.
In this condition, check for water leakage in the following:
• Water inlet (IN) and outlet (OUT) of the oscillator
• Water piping (tubes, fittings, and so on) inside the oscillator
MODEL Rated flow rate
C2000i-C 75 liters/min
C4000i-C 160 liters/min
C6000i-C 125 liters/min x2
(5) Stop the chiller unit, and change the operation mode from manual (local) to automatic (remote).
(6) If there is no water leakage, turn on the oscillator. Check that the start command from the CNC to
cooling water circulating unit causes the cooling water circulating unit to operate as specified by the
command. If the flow rate is insufficient, alarm No. 4121 (CHILLER WATER FLOW 1) or No.
4122 (CHILLER WATER FLOW 2) is issued soon after the chiller unit is started. If the alarm is
issued, check the pipe diameter, piping route, and the circulating unit installation position, and take
measures to reduce the pressure loss.
(7) Check that the cooling temperature of cooling water is set to 25 to 30°C.
Normally, 27°C is recommended.
(8) Wait for the water temperature to reach 20°C or higher before starting the oscillator.
2.3.4 Check for Leakage within the Oscillator

(1) Use the automatic leakage check function.
2.3.5 Locating Internal Leakage

When gas leakage is present inside the oscillator, use a helium leakage detector or liquid leakage checker
to locate the leakage.
CAUTION
Because the oscillator is not designed to withstand pressure increase, do not
increase pressure beyond 0.08 MPa. Applying a high pressure may damage the
connector, oil gage of turbo blower, and so on. To prevent the connector from
being damaged, apply pressure with the cable left attached to the turbo blower.
(1) Turn on the power to the oscillator, then open the valve of the gas cylinder.
(2) Set the secondary pressure of the regulator of the laser gas cylinder to 0.05 MPa (0.5kgf / cm2).
- 44 -
(3) Set parameter No. 29350 to 20.
Use the positive pressure leakage check function in the automatic leakage check function to make
the pressure in the oscillator higher than the atmospheric pressure.
(4) Apply the helium leakage detector to a possibly faulty position. If there is a leakage, the checker
indicates it by display or sound. When using the liquid leakage checker, drip the liquid on a possibly
faulty position. If gas leaks, bubbles appear, so you can determine the location of a leakage. After
using the liquid leakage checker, wipe off the checker, and clean the position with alcohol.
2.3.6 Discharge Aging

If the oscillator is left unused for a long time (three days or more), or if the laser gas circulating system
has been opened to the atmosphere (for example, to clean the mirrors or replace gas system components),
aging is required. This involves warming up the discharge tubes and circulating gas by performing
internal discharge to output absorbent contaminants as gas. If the laser gas circulating system has been
opened to the atmosphere, perform a leakage check before attempting aging.
(1) When the laser gas circulating system has been opened to the atmosphere
When the laser gas circulating system has been opened to the atmosphere, perform discharge aging
by using the automatic aging function.
(a) Set bit 6 (EGE) of parameter No. 15008 to 1 to enable the automatic aging function.
(b) Check and set the following parameters:
Parameter No.15320, 29060 Laser output at power calibration
Parameter No.15321, 29061 Oscillating frequency command at power calibration
Parameter No.15322, 29062 Pulse duty command at power calibration
Parameter No.15323, 29063 Correction time at power calibration
Parameter No.15242, 29023 Gas pressure setting at power calibration
Parameter No.15326, 29066 Laser output at aging
Parameter No.15327, 29067 Oscillating frequency command at aging
Parameter No.15328, 29068 Pulse duty command at aging
Parameter No.15329, 29069 Time per operation at aging
Parameter No.15330 Gas pressure setting at aging
(c) Turn on the oscillator start switch (RUN) to enter the discharge ready (LRDY) state. In this
state, set the number of aging operations in parameter No. 15334, and turn on the discharge
start switch (HVON). Aging is then performed as many times as specified.
(d) After completing aging, the power calibration coefficient is obtained, and the oscillation ready
state (LSTR) is entered, which makes the system ready for processing.
(2) When the oscillator is left unused for a long time (3 days to 2 weeks)
When the oscillator is started with the automatic aging function, the function determines the unused
period and performs aging as many times as required.
(a) Set bit 6 (EGE) of parameter No. 15008 to 1 to enable the automatic aging function.
(b) Turn on the oscillator start switch.
(c) The automatic aging function operates to perform aging.
(d) After aging is performed as many times as required, the oscillation ready state (LSTR) is
entered, and automatic aging ends.
(3) When the oscillator is left unused for two weeks or more
Use the manual aging function to perform discharge aging for at least 8 hours.
- 45 -
2.3.7 Beam Mode Check

WARNING
A beam mode deviation may occur depending on the transportation method and
storage condition. When installing the oscillator, be sure to perform this step. A
mode deviation does not mean a failure. Perform alignment by following the
procedure described in Subsection 5.24.1.
CAUTION
1 “KEEP OUT” on the area where the laser beam is irradiated. Make the “KEEP
OUT” area with the plastic chain, the stand and “KEEP OUT” sign.
2 There are not the flammable thing or the explosive around the area where the
laser beam is irradiated.
3 Set the table for mode taken or the power probe table, just behind them, put the
mask for the laser beam. Put on the iron plate or the firebrick behind the acrylic
resin. Fix the blower or power probe with the magnetic stand.
Acrylic resin or Iron plate Y-direction

Power probe Fireblick
Laser oscillator
Laser beam
X-direction
Fan:
Stirring the air in the space
passing the laser beam
Blower
Mode taken table or Power probe table
(1) Make sure the optical path length for picking mode. Set the table for mode taken which has the mask
(iron plate, fire brick).
(2) Remove the guide pipe or the first bend mirror located between the exit of the laser beam of the
oscillator and machine.
(3) Start the oscillator.
(4) Set to acrylic block with red guide laser. Make sure the red guide laser does not interfere with
something.
(5) Output a laser beam by using programmed commands with the output set to the rated output, a duty
cycle set to 100%, and the output duration set to 0.1 second. At this time, blow air with a drier or the
like.
(6) Make sure red guide laser and burned acrylic is on same position. If it is not so, adjust it.
- 46 -
CAUTION
1 First, check the beam position. Laser light, if allowed to penetrate the acrylic
material because of incorrect operation, is very dangerous. The paint of the
machine is also likely to be damaged. So, attach as feel plate, then an acrylic
plate, about 30cm × 30cm × 3mm in size.
If a guide laser is used, confirm that CO2 gas laser light is directed to the same
spot as the guide laser.
2 Ventilate the optical path. Acrylic gas staying around the optical path can
increase the mode diameter or cause shape deformation, which prevents correct
mode checking.
(7) Next, attach an acrylic block (with a thickness of 30 mm or more) to the position indicated by the
white acrylic mark. Ensure that the surface of the acrylic block is perpendicular to the direction of
CO2 gas laser light. The perpendicularity of the acrylic block surface can be checked by adjusting
the block such that the guide laser is reflected from the acrylic block surface and returns to the beam
outlet.
(8) Set the conditions of the beam output program as follows:
Output = Rated output
Duty = 100 %
Duration = See the following table.
Perform internal discharge with a rated output specified. If actual output Pa differs from the
specified output, mode shape comparison becomes difficult. So, modify the command so that the
output difference is suppressed to within ±2%.
Example
With the C4000i-C, setting is made to output 4080 W to 3920 W.
Model Duration
C2000i-C 4 sec
C4000i-C 2.5 sec
C6000i-C 2.5 sec
(9) Direct the drier so that it blows air at 45° to the acrylic block, then output the beam. If air is not
provided correctly, the acrylic vapor will catch fire. If fire occurs, the mode depth may become
shortened.
The following two types of mode patterns are collected:
Cold mode:
A pattern is obtained after the oscillator is left in the base discharge state for at least five
minutes to let the resonator cool down.
Hot mode:
A pattern is obtained immediately after internal discharge with the rated output is performed for
two to three minutes.
(10) Record the directions (up, down, right and left), output conditions, beam path length, and drier
blowing direction for the burn pattern.
From the hot mode pattern, check for output coupler deformation and dirt in the internal mirrors.
If there is a problem, align the resonator of the oscillator, or clean or replace mirrors by following
the procedure described in Section 5.24.
2.3.8 Oscillation Characteristics

(1) Modify the parameters listed below.
Parameter No.15000#4(CLB): 1 (enables power calibration)
(2) Turn on the oscillator start switch to place the oscillator in the discharge state.
(3) When the oscillator starts discharge, power calibration is performed, and the rated output is specified
automatically.
- 47 -
(4) After power calibration ends, record the compensation coefficient (parameter No. 15204).
(5) Record the output, discharge voltage (RFV), current (RFI), DCV, and DCI in the base discharge
state when three minutes has elapsed after power calibration.
(6) Specify the rated output then record the discharge voltage (RFV), current (RFI), DCV, and DCI.
Compare the values measured in (4), (5), and (6) above with the values on the data sheets. If the discharge
voltage (RFV) is high, check the external laser gas piping and laser gas composition, or perform
discharge aging.
2.3.9 Discharge Margin Check

Parameter No.15000#4(CLB): 0 (disable power calibration)
Parameter No.15223, No.29022: Setting value -60 (bias command value)
(2) After the setting of parameter No. 15223 and No.29022 is changed, warning message "Parameter
was changed" is displayed when the LRDY state is entered. Release the message by a reset
operation.
(3) Remove the top panel of the oscillator so that the discharge tube and trigger electrode can be
checked.
(5) Check that discharge of the trigger electrode does not disappear in 5 minutes after start of discharge.
(6) After checking ends, reset the parameters set in (1) to their original settings.
If discharge disappears in (5), check the external laser gas piping and laser gas composition, or perform
discharge aging.
2.3.10 Power Supply Margin Check (Pulse Check)

Parameter No.15000#2(AGA): 1 (Use of assist gas is disabled at beam-on.)
Parameter No.15000#3(BMO): 1 (Internal discharge is enabled in manual mode.)
PRM.No.15008#6(EGE): 0 (Automatic aging is disabled.)
Parameter No.15002#0(BMA): 1 (Internal discharge is enabled in automatic operation
mode.)
Parameter No.15000#4(CLB): 0 (Power calibration is disabled.)
Parameter No.15208 0 (Output feedback is turned off.)
Parameter No.15210, No.29049
Value in Parameter No.15207 (maximum output power)
(3) Set the manual mode, and perform internal discharge operation under the following conditions.
Output = Value in parameter No.15207, No.29048
Duty = 5%
Frequency = 5Hz
(4) Check that no alarm occurs for 10 minutes after beam-on.
If an alarm is issued, check the external laser gas piping and laser gas composition, or perform
discharge aging.
(5) Upon the completion of the check, restore the parameters modified in step (1) to their original
values.
- 48 -
2.4 PREPARATION PRIOR TO SHIPMENT

For shipment and transportation, follow the steps explained below.
(1) Disconnect all CNC connecting cables.
(2) Disconnect the power cable and ground cable. Cover the cable inlet holes with tape or the like.
CAUTION
At first, remove the terminals of the side of panel, after that, remove the
terminals of the side of the oscillator. When it keeps connecting only the
terminals of the side of the panel, it is possible that you get electric shock.
(3) Remove the laser gas pipes, and attach caps to the pipes to prevent dust from entering.
Caps
Fig. 2.4 Caps of gas pipes
(4) Detach the cooling water piping, and remove the water. For details of how to remove the cooling
water, see subsection 2.4.2.
CAUTION
Any residual cooling water may result in corrosion or clogging; furthermore, if
any residual cooling water freezes, a pipe or the oscillator itself may be
damaged.
(5) Install the resonator clamp and shutter clamp referring to Fig.2.1(c) to (e), and fit a lid onto the beam
outlet.
(6) Check the security of all connectors and printed circuit boards. Install protective covers.
(7) Check that all removed mounting screws are reinstalled.
(8) Install the cabinet mounting panel.
2.4.1 Packing for Transportation

Prior to shipment and transportation, the packing and checking operations described below must be
performed.
(1) External dimensions of laser oscillator : See the Appendix A.
(2) Weight of laser oscillator:
Model Weight
C2000i-C Approx. 700kg
C4000i-C Approx. 900kg
C6000i-C Approx. 1,300kg
(3) Maximum allowable impact : 2G

Note that the maximum impact in transit depends greatly on the means of transport employed, as
indicated in Table 3.4.1.
- 49 -
Table 3.4.1 Maximum impacts according to means of transport

Means of transport
Airplane Ship Railroad Truck
Forwards/backwards 6G 15G 12G 5G
Direction Left/right 2.5G 12G 5G 4G
Up/down 2.5G 12G 5G 4G
(4) Notes on transportation

When lifting the oscillator for transportation, pass wires through the four eyebolts, and hook up the
oscillator by crane.
Example of lifting
2.4.2 Removing Cooling Water

Remove cooling water according to the procedure below.
(1) Open the cooling water inlet (IN) and outlet (OUT), and leave both open.
(2) Once the cooling water has stopped draining, connect a compressed air hose to the cooling water
inlet (IN). Check that the cooling water outlet is open.
(3) Gradually supply compressed air, allowing the pressure to build up to 0.1 to 0.2 MPa. Never apply
full pressure suddenly. Continue to supply compressed air at this pressure for about 5 minutes.
(4) Increase the compressed air pressure to 0.3 to 0.4 MPa, and supply air until water inside the white
water piping of the oscillator is completely removed. It takes about 10 minutes to remove water.
For C4000i-C or C6000i-C close the orange water removal valve of the water distributor unit, and
further supply compressed air for five minutes.
(5) Exchange the cooling water inlet (IN) and outlet (OUT) and supply compressed air to execute steps
(3) and (4).
(6) When the removal of cooling water is completed, detach the compressed air hose, and attach the lids
(provided with the oscillator at shipment) to the PT plugs of the cooling water inlet (IN) and outlet
(OUT).
Plugs
Fig. 2.4.2(a) Plugs of water pipes
- 50 -
CAUTION
In addition, the cooling water should be removed from the oscillator whenever
the oscillator is to be stored over the winter, when there is a danger of the
cooling water freezing. The frozen cooling water may destroy the water pipes or
heat exchangers.
Drain valve
Cock (Close)
Cock (Open)
Fig. 2.4.2(b) External view of the water distributor unit
- 51 -
3.MAINTENANCE B-70475EN/01
3 MAINTENANCE
In laser oscillator, periodic inspection items have been reduced, and adjustments have been made easy. To
keep the oscillator in a satisfactory operating condition over a long period, however, it is necessary to
carry out periodic maintenance (including daily maintenance) described in this chapter. The oscillator is
designed to maintain the same performance and reliability as it has when it is installed, provided that
maintenance is carried out as prescribed.
Chapter 3, “MAINTENANCE” consists of the following contents:
3.1 DAILY INSPECTION ........................................................................................................................52

3.2 PERIODIC MAINTENANCE ............................................................................................................53
3.3 DETAILS OF MAINTENANCE........................................................................................................54
3.4 MAINTENANCE PARTS ..................................................................................................................64
3.1 DAILY INSPECTION

Perform inspection according to the daily inspection items indicated in the table below. When parts
(including oil) have been used for a prescribed period, replace them quickly.
Table 3.1 Daily inspection items

Item Period Content and instruction
Check the primary pressure as measured at the regulator on the laser gas
1 Residual laser gas Daily cylinder. If the primary pressure is 1MPa or lower, replace the gas
cylinder.
Make sure that the oil level is between L (lower limit) and H (higher limit).
2 Exhaust pump oil Weekly If the level is L or below, replenish the oil by following the procedure
described in Subsection 3.3.2.
Make sure that no oil is leaking from the exhaust pump main body, drain
valve and their periphery. If oil is leaking, immediately replace the exhaust
3 Exhaust pump oil leak Weekly
pump filter according to Section 3.3.3, because it is likely to have been
clogged.
Make sure that the oil level is between L (minimum) and H (maximum)
4 Turbo blower oil Daily according to Fig. 3.3.1. If the oil level is below L, supply oil referring to
Subsection 3.3.1.
Make sure that no oil is leaking from the turbo blower main body, oil inlet,
5 Turbo blower oil leak Weekly cock, and their periphery. If oil is leaking, locate the leak. If oil leaks for
any reason other than a cock being open, call FANUC.
If the laser output decreases within the oscillator, warning message No.
6 Laser output Weekly 4085 is issued. If this message appears, clean or replace the mirror in the
oscillator quickly.
Check the discharge pressure of the chiller. If it is high, clean the water
path.
Daily
Wait for the water temperature to reach 20°C or greater before starting
the oscillator.
7 Cooling water
Check the amount of cooling water in the chiller and check for
contamination.
Weekly
If the amount of water is small, replenish the water. If the water is
contaminated, clean the water path and replace the water as appropriate.
- 52 -
B-70475EN/01 3.MAINTENANCE
3.2 PERIODIC MAINTENANCE

The laser oscillator contains consumables that must be replaced periodically. Table 3.2(a) or (b) lists such
consumables and the related periodic maintenance work.
Perform periodic maintenance as well as daily inspection described in Section 3.1 by using the listed
periods as guidelines.
Note, however, that the replacement and maintenance intervals are not guaranteed values.
Table 3.2(a) Periodic maintenance items and periods
Period of maintenance
Item Remarks
(operation hour)
All internal mirrors change of Every 3,000 to 4,000
1 Change when the quality has degraded
C2000i-C hours
All internal mirrors change of Every 6,000 to 8,000
2 Change when the quality has degraded
C4000i-C and C6000i-C hours
2,000 hours or 1 year Change when the exhaust power has
3 Exhaust pump oil change
whichever comes first degraded
4,000 hours or 2 years Change when the exhaust power has
4 Exhaust pump filter change
whichever comes first degraded
Change when the exhaust power has
5 Exhaust pump overhaul Every 10,000 hours
degraded
4,000 hours or 2 years at
6 Turbo blower oil change latest, whichever comes Change when oil properties have changed
first
Conduct when the power has degraded, dust
7 Turbo blower overhaul 24,000 hours at latest
is generated, or abnormal sound is generated
8 Gas controller gas filter change Every 24,000 hours Change when a pressure failure occurs
9 Discharge tube O-ring change Every 6,000 hours Change when internal leakage occurs
10 Gas pipe O-ring replacement Every 6,000 hours Change when internal leakage occurs
11 Discharge tube cleaning Every 10,000 hours Conduct if quartz powder adheres to mirror
12 Discharge tube change Every 30,000 hours Change when the quality has degraded
Cooling water change Change when cooling water properties have
13 Every 1,500 hours
changed
Cleaning of interior of cooling
14 Every 3,000 hours Change when water pipe has clogged
water system
Oil mist decomposing element
15 Every 10,000 hours Change when the power has degraded
change
16 Fan motor change Every 30,000 hours Subject to the operating environment.
17 Trigger electrode O-ring Every 6,000 hours Change when the quality has degraded
18 Trigger electrode resin bolt Every 6,000 hours Change when the quality has degraded
NOTE
1 Turbo blower is the precision machine, featuring super high speed of 60,000
min-1. When the quality of the turbo blower oil is getting bad with long time
running, it is possible that the turbo blower breaks down. So please absolutely
change the oil with provided hours or less.
2 There is the laser maintenance screen to manage the periodic maintenance. So
please use this function.
- 53 -
Model C2000i-C C4000i-C C6000i-C

Every 2,000 to
Cleaning of all internal mirrors Every 3,000 to 4,000 hours
2,600 hours
NOTE
1 If the mirror is not change, the mirror cleaning periods are 3,000 to 4,000 hours
at least.
2 The mirror cleaning periods are not guaranteed values. They are standard
values in the field.
3.3 DETAILS OF MAINTENANCE

When opening the panels and doors during maintenance, keep the power turned off. Before replacing oil,
be sure to check that purging is completed.
3.3.1 Turbo Blower Oil

NOTE
1 Use turbo oil kit (A04B-0800-K329#1) for turbo blower (A04B-0800-C019,
C025).
2 It is possible to use turbo oil kit (A04B-0800-K329#1) for all of turbo blowers
made by FANUC.
3.3.1.1 Check method

(1) Check of oil level
Check the amount of oil in the turbo blower while referring to the figure below. The oil level should
be between graduations H and L. This check should be made when the oscillator is at a rest. When
the turbo blower is running, it is impossible to check the amount of oil correctly.
Oil gauge
Oil inlet
Oil drain valve
Fig.3.3.1(a) Turbo blower oil check points Fig.3.3.1(b) Oil gauge
(2) Discoloration of the new lubricant oil

The new lubricant oil might discover as shown in following figure depending on the operational
condition of the laser oscillator. As discoloration is usable, change it on recommended interval.
If turbo blower has any damage, there are particles on the white plate of oil level window.
In this case, it is necessary to change the turbo blower.
If it is difficult to judge by the above method, drain out oil from the turbo blower, and confirm the
drained oil. If this oil contains particles, the turbo blower might have broken down.
- 54 -
Adhension of particles
Before use Discoloration Discoloration Discoloration Example of

Example 1 Example 2 Example 3 Troble
Usable Unusable
3.3.1.2 Replacement method

(1) Before replacing the oil, be sure to stop the oscillator according to the correct procedure and turn off
the power. Remove the hexagonal-head screw from the oil inlet of the turbo blower with a 17 mm
wrench. Be careful not to lose the O-ring on the hexagonal-head screw or contaminate it.
CAUTION
If the oscillator is not stopped with the correct procedure, the pressure in the
vacuum system in the oscillator becomes negative. Opening the oil inlet under
such a condition lets air get in the turbo blower. This flow of gas causes oil mist
to get into the vacuum system of the oscillator, resulting in contamination of
internal mirrors.
(2) Get a container for oil drain on hand, and put the tip of the drain tube into the container.
Turn the oil drain cock through 90 degrees, and the oil will start draining.
(3) After draining all oil, return the oil drain cock and shut it.
(4) Remove the inner lid from the oil bottle. Attach a new pouring tube to the nozzle then insert the
nozzle into the oil inlet and pour oil. At this time, use care to prevent foreign matter from getting
into the turbo blower.
Pour oil while checking the oil level from the oil level window until the oil level reaches the
three-quarter position from L between L and H. Either superfluous or insufficient oil can be a cause
of trouble.
(5) Wipe the area around the oil inlet, hexagonal-head screw on the oil inlet, and O-ring with a clean
cloth or paper, and then check that there is no dust. Dust getting into oil may cause a turbo blower
fault. Check that the O-ring is fit to the hexagonal-head screw on the oil inlet, and then tighten the
screw (recommended torque: 800N⋅cm)
CAUTION
If the O-ring at the inlet is damaged, gas leakage will result.
(6) If oil has spilled over, wipe it up.

(7) After replacing the oil for the turbo blower, be sure to conduct “Support function for start-up after
turbo oil exchange “.
- 55 -
CAUTION
If you do not conduct “Support function for start-up after turbo oil exchange “after
replacing the oil for the turbo blower, correct discharge is not possible, which can
become a cause of trouble.
3.3.1.3 Storage and expiration date of turbo blower oil

Use the turbo blower within expiration date, which is showed on sticker. Use a clean supply tube when
you pour the oil and be careful not to put dust in turbo blower. Keep away from direct sunlight and keep
in a cool, dry and well-ventilated place. Keep as much as possible in a clean environment.
Fig.3.3.1(c) Expiration date
Fig.3.3.1 (d) Explanation of using turbo blower oil
3.3.2 Exhaust Pump Oil

Spec. of Exhaust pump oil: A98L-0040-0093#1.0L1
3.3.2.1 Check method

Watch the oil gauge, and check that the oil level is between graduations Low and High. Also, check
whether the oil is dark.
If the oil level is below L, add oil to the turbo blower or replace the oil in it. If the oil level is above H,
drain until the oil level becomes below H.
- 56 -
Oil inlet
H
Drain cock Oil gauge
L
Drain tube
Fig.3.3.2 (a) Front view of exhaust pump Fig.3.3.2 (b) Enlarged view of oil gage

(1) Stop the laser oscillator with the correct procedure, and turn the power off.
(2) Remove the oil inlet plug. There is an O-ring on it. Be careful not to damage it. A missing or
damaged O-ring can lower the exhaust capacity of the pump.
(3) Insert the drain tube into a drain oil vessel, and then open the drain cock. After the oil has been
drained up, close the cock.
(4) Pour new oil into the oil inlet, while checking the oil gauge.
(5) Attach the oil inlet plug.
3.3.3 Exhaust Pump Filter

Spec. of Exhaust pump filter: A90L-0001-0911

When the operation time reaches every 4,000 hours or 2 years whichever comes first, or the exhaust
capacity is lowered, replace the filter. A clogged filter may cause a whitish smoke of oil mist to come out
of the pump or lower the exhaust capacity.
Stopper
Exhaust filter cartridge
Spring
with washer
Cartridge
cover
O-ring
Oil level gauge
Nut
Fig. 3.3.3 Exchange of exhaust pump filter
- 57 -
(1) Stop the laser oscillator with the correct procedure, and turn the power off. The pump is hot
immediately after it has stopped. Start the work after the pump has cooled down.
(2) Remove the black nut from the exhaust pump unit, then remove the filter cover and O-ring.
(3) Remove the spring and washer.
(4) Pull out the exhaust filter element.
(5) Check the mounting orientation of a new exhaust filter element, then insert the filter. A filter
element mounted improperly may cause oil mist (whitish smoke) to come out of the gas outlet.
Therefore, check again that the filter is mounted properly.
3.3.4 Laser Optical Parts

Table 3.3.4 lists the optical parts and their features.
Table 3.3.4 Optical parts and their features

Substrate Color
Name Specification Marking Application
material (front/rear)
1 A04B-0813-D200 C2000i-C
Amber
2 Output coupler A04B-0815-D202 ZnSe C4000i-C
(Transparent)
3 A04B-0818-D207 C6000i-C
4 A04B-0813-D201 C2000i-C
Rear mirror Ge Silver/silver C4000i-C
5 A04B-0818-D201
C6000i-C
C2000i-C
6 A04B-0817-D202 202
Folding mirror Si Gold/gray C4000i-C
7 A04B-0818-D202 202 C6000i-C
C2000i-C
C4000i-C
8 0 shit mirror A98L-0001-0616#C Si λ/0-45°
(Short optical
path length type)
C2000i-C
Circular C4000i-C
9 A98L-0001-0617#C Si λ/4
polarizer mirror (Short optical
path length type)
3.3.4.1 Cleaning and Replacing the Optical Parts

The output coupler, rear mirror, and folding mirrors of the laser oscillator must be cleaned or replaced
periodically. Similarly, if the laser output or beam mode becomes abnormal, the optical parts must be
cleaned or replaced. When the optical parts are cleaned or replaced, the vacuum system is open to the
atmosphere. So, ensure that dust does not enter the vacuum system.
Use the specified mirror cleaning liquid (A98L-0001-0856#1).
Clean the mirrors according to the following procedure:
- 58 -
Clean the output coupler (See Subsection 3.3.4.2)
Clean the rear mirror (See Subsection 3.3.4.2)
Leakage check (See Subsection 2.3.4)

Discharge aging (See Subsection 2.3.6)
Alignment (See Subsection 5.24.2)
Clean two or three folding mirrors (See Subsection 3.3.4.3)

Alignment (See Subsection 5.24.2) C2000i-C
Clean two folding mirrors (See Subsection 3.3.4.3)

Clean two folding mirrors (See Subsection 3.3.4.3)

3.3.4.2 Cleaning and Replacing the Output Coupler and Rear Mirror
(a) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser
oscillator.
(b) Before starting cleaning, wipe away any foreign matter from around the mirror holder. Then, remove
the mirror cover or the power sensor.
(c) When the pressure of the vacuum system of the oscillator is lower than the atmospheric pressure, the
output coupler or the rear mirror may be sucked, making it difficult to remove the output coupler or
the rear mirror. Check that the oscillator is in the purge state, and loosen the blind joint on the top of
the turbo blower to allow the internal pressure of the vacuum system to equalize with the
atmospheric pressure.
(d) Loosen the mirror holding screw, then remove the mirror holder from the mirror stage.
- 59 -
for C2000i-C, C4000i-C

for C6000i-C
Fig.3.3.4 (a) Exploded view of the output coupler or the rear mirror
(e) Remove the output coupler or the rear mirror from the mirror holder, then place the output coupler
on lens cleaning paper. Check the removed O-rings. Replace an O-ring that is damaged or has lost
elasticity.
Proceed to step (l) to replace the mirror.
(f) Gently blow clean air by using a camera blower across the mirror surface to remove dust and dirt.
(g) Drip ethyl alcohol or lens cleaner onto the mirror surface, and gently wipe dirty areas by using a
cotton swab moistened with the fluid.
(h) Place lens cleaning paper on the mirror, then spray ethyl alcohol or lens cleaner over the paper and
mirror. Then, move the lens cleaning paper horizontally to and from across the mirror.
(i) Remove any fiber dust by blowing clean air with a camera blower.
(j) Repeat Steps (g) through (i) until all dirt on the mirror surface is removed. Finally, clean the mirror
surface with ethyl alcohol.
(k) Clean the back surface of the mirror similarly.
(l) Wipe the mirror holder and O-rings with ethyl alcohol.
(m) An arrow mark is provided on the side of the output coupler or the rear mirror, and a line is drawn
above the mark with a felt-tipped marker. If the line has disappeared, look for a mark-off line. Place
the output coupler or the rear mirror on the holder. At this time, ensure that the reflecting plane (the
plane indicated by the arrow on the side of the mirror) of the output coupler or the rear mirror does
not face the holder but faces the opposite direction, and that the arrow on the side of the output
coupler or the rear mirror is aligned with the round mark of the mirror holder. Insert the O-rings
evenly so that the mirror does not float.
- 60 -
Output coupler or rear mirror
O-ring
Mark
Mirror holder
Arrow mark
Fig.3.3.4 (b) Method of installing the mirror holder
(n) Install the mirror holder by reversing steps (b) through (d). The mark on the mirror holder is
provided on the bottom for C2000i-C or C6000i-C, and is provided on the side for C4000i-C.
Tighten the mirror holding screw then loosen it. Next, turn it by fingers. After feeling a resistance,
retighten the screw by 30 degree. When the mirror holding screw is tough, spread the vacuum grease
on O-ring as ⑦ in Fig.3.3.4(a).
(o) Close the main circuit breaker or turn on the power supply of the laser oscillator, then turn on the
power to the CNC. Perform evacuation. When the gas pressure (DGN No.905) reaches 100 or less,
retightens the mirror holding screw.
(p) Perform a leakage check.
(q) Install the beam cover or the power sensor. This completes cleaning and replacement work.
(r) When the rear mirror is replaced, set a power input compensation coefficient (parameter No.15215)
again according to Section 5.25.
3.3.4.3 Cleaning and Replacing the Folding Mirrors

(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser
oscillator.
(2) Before starting cleaning, wipe away any foreign matter from around the mirror holder.
(3) Loosen the mirror holder mounting screw, and remove the mirror holder. Vacuum grease is applied
to the rear of the folding mirror. Therefore, the mirror does not come off easily from its holder.
Clean the folding mirror without removing it from its holder. To replace the mirror, proceed to step
(9).
- 61 -
Fig.3.3.4(c) Exploded view of the holding mirror
(4) Gently blow clean air by using a camera blower across the mirror surface to remove dust and dirt.
(5) Drip ethyl alcohol or lens cleaner onto the mirror surface, and gently wipe dirty areas by using a
(6) Place lens cleaning paper on the mirror, then spray ethyl alcohol or lens cleaner over the paper and
(7) Remove any fiber dust by blowing clean air with a camera blower.
(8) Repeat Steps (5) through (7) until all dirt on the mirror surface is removed. Finally, clean the mirror
surface with ethyl alcohol. Proceed to step (12).
(9) When replacing the mirror, first remove the mirror from its holder. Vacuum grease is applied to the
rear of the mirror. So, insert the tip of a standard screwdriver into the hole on the side of the mirror
holder to push up the mirror for removal. At this time, do not apply an excessive force to the mirror
holder and the spring section of the mirror holder. If the mirror cannot be removed, blow warm air
onto the holder to warm it by using a drier.
(10) Apply a thin coat of vacuum grease (A98L-0004-0628) to the rear of a new mirror. Take care not to
apply 5mm periphery of rear of a new mirror. When it is cold, vacuum grease becomes stiff. In such a
case, please warm up vacuum grease by drier.
- 62 -
Fig.3.3.4(d) suitable quantity of vacuum grease Fig.3.3.4(e) Method of applying vacuum grease
Fig.3.3.4(f) Before applying vacuum grease Fig.3.3.4(g) After applying vacuum grease
(11) Place the mirror in its holder, and blow warm air onto the holder to warm it by using a drier. This
will soften the vacuum grease and bond the mirror onto the holder. Check for excessive vacuum
grease, if any, around the mirror. If the mirror is dirty, clean the mirror according to steps (4) through
(8).
Fig.3.3.4 (h) Method of rotating mirror
- 63 -
(12) By using a cotton swab moistened with ethyl alcohol, clean the part of the mounting section that
touches the mirror. Flakes of coating may remain in this area. Those flakes can cause the mirror to
be misaligned.
(13) Install the mirror holder by reversing steps (2) through (3). At this time, insert the holder
perpendicular to the alignment unit so that the mirror touches the mirror holder evenly. When
tightening the fixing screws, tighten each screw evenly.
(14) Turn on the main circuit breaker and the power supply of the laser oscillator, then turn on the power
to the CNC. Next, make a leakage check.
3.3.4.4 Cleaning and Replacing the Beam Folding Unit

oscillator.
(2) Before starting cleaning, wipe away any foreign matter from around the mirror holder.
(3) Loosen the mirror holder mounting screw, and remove the mirror holder. Do not detach the cable
connected to the holder, but loosen the clamp of the cable.
Vacuum grease is applied to the rear of the mirror. Therefore, the mirror does not come off easily
from its holder. Clean the mirror without removing it from its holder. To replace the mirror, proceed
to step (9).
(4) Gently blow clean air by using a camera blower across the mirror surface to remove dust and dirt.
(5) Drip ethyl alcohol or lens cleaner onto the mirror surface, and gently wipe dirty areas by using a
(6) Place lens cleaning paper on the mirror, then spray ethyl alcohol or lens cleaner over the paper and
(7) Remove any fiber dust by blowing clean air with a camera blower.
(8) Repeat Steps (5) through (7) until all dirt on the mirror surface is removed. Finally, clean the mirror
surface with ethyl alcohol. Proceed to step (12).
(9) When replacing the mirror, remove the mirror by sliding it from the mirror holder.
(10) Apply a thin coat of vacuum grease to the rear of a new mirror.
(11) Slide the mirror into the mirror holder so that it bonds onto the holder. This will soften the vacuum
grease and bond the mirror onto the holder. Check for excessive vacuum grease, if any, around the
mirror. If the mirror is dirty, clean the mirror according to steps (4) through (8).
(12) By using a cotton swab moistened with ethyl alcohol, clean the part of the mounting section that
touches the mirror. Flakes of coating may remain in this area. Those flakes can cause the mirror to
be misaligned.
(13) Install the mirror holder by reversing steps (2) through (3). At this time, ensure that the mirror
touches the mirror holder evenly. When tightening the fixing screws, tighten each screw evenly.
(14) Ensure that, in the coil section of the water tube connected to the holder, another tube is not caught.
Adjust the clamping of the cable. This completes cleaning and replacement work.
(15) Adjust the optical axis according to Section 5.26 so that a beam is output at the center of the
oscillator beam outlet.
3.4 MAINTENANCE PARTS

The following lists the maintenance parts with maintenance units and part specification information.
Maintenance parts [Non-repairable parts]

Qty
C2000i-C C4000i-C C6000i-C
Name Specification
CE CE CE
Standard Standard Standard
Marking Marking Marking
1 A04B-0813-D200 1 1 0 0 0 0
2 Output coupler A04B-0815-D202 0 0 1 1 0 0
3 A04B-0818-D207 0 0 0 0 1 1
- 64 -
Qty
C2000i-C C4000i-C C6000i-C
Name Specification
CE CE CE
4 A04B-0813-D201 1 1 0 0 0 0
Rear mirror
5 A04B-0818-D201 0 0 1 1 1 1
6 A04B-0817-D202 3 3 6 6 0 0
Folding mirror
7 A04B-0818-D202 0 0 0 0 4 4
Zero shift mirror
8 A98L-0001-0616#C (2) (2) (1) (1) 0 0
(l/0)
9 Retarder (l/4) A98L-0001-0617#C 0 0 (1) (1) 0 0
10 A98L-0001-0619#2030 2 2 2 2 0 0
11 O-ring for output A98L-0001-0619#2031 0 0 0 0 2 2
12 mirror and rear JB-OR4D-P34 2 2 2 2 2 2
13 mirror JB-OR4D-P38 2 2 2 2 2 2
14 JB-OR4D-P41 2 2 2 2 2 2
15 O-ring for folding JB-OR4D-G55 3 3 6 6 0 0
16 mirror JB-OR4D-G65 0 0 0 0 4 4
2 2
17 A290-4533-T001 DT1 DT1 0 0 0 0
DT4 DT4
Discharge tube 2 2
18 A290-4540-T001 DT2 DT2 8 8 0 0
DT3 DT3
19 A290-4562-T002 0 0 0 0 12 12
20 A98L-0003-0004#P26S 8 8 16 16 0 0
A98L-0003-0004
21 O-ring for 0 0 0 0 24 24
#P30.6S
discharge tube
22 A98L-0004-0737#P26 (8) (8) (16) (16) 0 0
23 A98L-0004-0737#P30.6 0 0 0 0 (24) (24)
24 Trigger electorode A98L-0005-0187 4 4 8 8 12 12
O ring for Trigger
25 JB-OR4D-P10 4 4 8 8 12 12
electorode
Bolt for Trigger
26 A98L-0004-0801#4-15 8 8 16 16 24 24
electorode
27 Oil mist A290-4523-V170 2 2 0 0 0 0
28 decomposing A290-4540-V170 0 0 2 2 0 0
29 element A290-4562-V170 0 0 0 0 2 2
O ring for oil mist
30 decomposing JB-OR4D-G45 2 2 2 2 2 2
element
31 Exhaust pump A90L-0001-0425 1 1 1 1 1 1
32 Exhaust pump filter A98L-0001-0911 1 1 1 1 1 1
33 Exhaust pump oil A98L-0040-0093#1.0L1 2 2 2 2 2 2
Nut for Exhaust A90L-0001-0425
34 1 1 1 1 1 1
pump #71244351
Cartridge cover for A90L-0001-0425
35 1 1 1 1 1 1
Exhaust pump #71231470
O ring for Exhaust A90L-0001-0425
36 1 1 1 1 1 1
pump #71237142
Spring with washer A90L-0001-0425
37 1 1 1 1 1 1
for Exhaust pump #71233500
Stopper for A90L-0001-0425
38 1 1 1 1 1 1
- 65 -
Qty
C2000i-C C4000i-C C6000i-C
Name Specification
CE CE CE
Oil level gauge for A90L-0001-0425
39 1 1 1 1 1 1
40 Turbo blower oil A04B-0800-K329#1 1 1 1 1 2 2
O-ring for TB oil
41 JB-OR4D-P10A 1 1 1 1 2 2
inlet
42 Dew sensor unit A04B-0800-D005 1 1 1 1 1 1
43 Temperature A57L-0001-0095#B080 1 1 1 1 1 1
switch
44 A57L-0001-0095#B090 1 1 1 1 1 1
for absorber
Shutter thermal
45 A57L-0001-0057#090 1 1 1 1 1 1
switch
46 A04B-0813-D020 1 1 1 1 0 0
Shutter sensor unit
47 A04B-0818-D033 0 0 0 0 1 1
48 Flow sensor unit A04B-0815-D421 1 1 1 1 2 2
Low temperature
49 A04B-0800-D004 1 1 1 1 1 1
sensor unit
50 Oxygen sensor unit A04B-0800-C342 1 1 1 1 1 1
Micro switch A55L-0001-0225
51 (2) (2) (2) (2) 0 0
for beam path unit #01CBS
Beam folding
52 switch unit A04B-0800-D011 (1) (1) (1) (1) 0 0
for beam path unit
53 Diode laser unit A04B-0800-D400 1 1 1 1 1 1
54 A90L-0001-0455 1 1 0 0 0 0
Fan for shutter
55 A90L-0001-0335#B 0 0 1 1 1 1
56 A90L-0001-0396 16 16 37 37 0 0
Fan
57 A90L-0001-0396#T 0 0 0 0 38 38
58 Hour meter A91L-0001-0219 1 1 1 1 1 1
A60L-0001-0508 1
59 0 0 0 0 0
#B150BEJ1 QF1
A60L-0001-0508 1
60 0 0 0 0 0
#B225BEJ1 QF1
A60L-0001-0494 1
61 0 0 0 0 0
#B300AAA1 QF1
A60L-0001-0512 1
62 0 0 0 0 0
#D150EJ3 QF1
A60L-0001-0512 1
63 0 0 0 0 0
#D225EJ3 QF1
A60L-0001-0495 1
64 0 0 0 0 0
#B300AA1 QF1
Breaker
2 2 4 4 6 6
65 A60L-0001-0464#A050
QF2,3 QF2,3 QF2-5 QF2-5 QF2-7 QF2-7
1 1 1 1
66 A60L-0001-0464#A040 0 0
QF4 QF4 QF6 QF6
1 1
67 A60L-0001-0464#B010 0 0 0 0
QF5 QF5
1 1
68 A60L-0001-0425#K060 0 0 0 0
QF8 QF8
1 1 1 1
69 A60L-0001-0464#B015 0 0
QF7 QF7 QF9 QF9
1 1
70 A60L-0001-0314#GBA 0 0 0 0
QF8 QF10
- 66 -
Qty
C2000i-C C4000i-C C6000i-C
Name Specification
CE CE CE
1
71 Breaker A60L-0001-0314#GCA 0 0 0 0 0
QF12
1 1
72 A60L-0001-0389#FT 0 0 0 0
QF7 QF9
1
73 Motor starter A60L-0001-0389#HT 0 0 0 0 0
QF11
1 1 1 1 1 1
74 A60L-0001-0493#6P3
QF6 QF6 QF8 QF8 QF10 QF10
A58L-0001-0539 3 3 5 5 7 7
75
#BSN38B KM1-3 KM1-3 KM1-5 KM1-5 KM1-7 KM1-7
Magnetic contactor
A58L-0001-0540 2 2 2 2 2 2
76
#BSN10BB KM4-5 KM4-5 KM6-7 KM6-7 KM8-9 KM8-9
A58L-0001-0539
77 Assistance 2 2 4 4 6 6
#BAX202
contactor
78 A60L-0001-0493#W1A 1 1 1 1 1 1
1 1 1 1 1 1
79 Absorber unit A04B-0800-D009
Z110 Z110 Z110 Z110 Z110 Z110
80 Noise filter A70L-0001-0103 1 1 1 1 1 1
81 Gas filter A97L-0203-0208#A 1 1 1 1 1 1
Brass ferrule 1/4
82 A98L-0004-0348#2-B 12 12 18 18 4 4
inches
Brass ferrule 3/8
83 A98L-0004-0348#3-B 6 6 4 4 6 6
inches
Brass ferrule 1/2
84 A98L-0004-0348#4-B 4 4 4 4 4 4
inches
85 Shutter mirror A290-4516-X204 1 1 1 1 1 1
Shutter mirror
86 A98L-0001-0708 1 1 1 1 1 1
for guide laser
Heat exchanger
87 A97L-0201-0556#B 1 1 0 0 0 0
(out)
88 Heat exchanger A97L-0201-0691#B 0 0 1 1 2 2
89 (in) A97L-0201-0828 1 1 0 0 0 0
90 Heat exchanger A97L-0201-0439#B 0 0 1 1 2 2
91 for cabinet A97L-0200-0849 2 2 4 4 10 10
92 A97L-0201-0588 2 2 4 4 2 2
Beam absorber
93 A97L-0200-0872#E 1 1 0 0 0 0
94 A97L-0201-0972 0 0 1 1 0 0
Warning light
95 A97L-0203-0206#A 0 0 0 0 1 1
(Standard)
96 A49L-0001-0086 (1) (1) (1) (1) (1) (1)
Warning light
97 A49L-0001-0086#L (1) (1) (1) (1) (1) (1)
(with pole)
Warning light
98 A49L-0001-0086#2L (1) (1) (1) (1) (1) (1)
(with long pole)
99 RF FET PCB1 A20B-1007-0140 2 2 4 4 6 6
100 RF FET PCB2 A20B-1007-0150 2 2 4 4 6 6
Step-up Trans.
101 A20B-1008-0150 2 2 4 4 6 6
PCB
Three-phases
102 A50L-2001-0342 2 2 4 4 6 6
diode module
High-speed diode
103 A50L-2001-0439 16 16 32 32 48 48
module
104 Fan for laser PSU A90L-0001-0396 4 4 8 8 12 12
- 67 -
Qty
C2000i-C C4000i-C C6000i-C
Name Specification
CE CE CE
Fan for matching
105 A90L-0001-0396#T 2 2 4 4 6 6
box
Mirror cleaning
106 A98L-0001-0857#1 1 1 1 1 1 1
liquid
107 Inverter A90L-0001-0574#8LF 1 1 1 1 0 0
108 A90L-0001-0574#16LFF 0 0 0 0 1 1
Fan for inverter A90L-0001-0574
109 1 1 1 1 0 0
#8LF-FAN
A90L-0001-0574
110 0 0 0 0 2 2
Water coupler for #16LFF-FAN
Laser PSU (Plug) A97L-0201-0927
111 4 4 8 8 9 9
#2P-N10
Water coupler for A97L-0201-0927
112 4 4 8 8 9 9
Laser PSU (Socket) #2S-N10
113 A04B-0815-D030 0 1 0 1 0 0
Proximity switch
114 A04B-0818-D034 0 0 0 0 0 1
115 Charge unit A04B-0815-D406 1 1 1 1 0 0
116 (Gas controller) A04B-0818-D404 0 0 0 0 1 1
117 Exhaust unit A04B-0815-D405 1 1 1 1 0 0
118 (Gas controller) A04B-0818-D405 0 0 0 0 1 1
119 Pressure sensor A91L-0001-0256#200 1 1 1 1 1 1
Damping Rubber A98L-0004-0772
120 4 4 4 4 8 8
for Turbo blower #382ZN-60
A97L-0200-0872
121 1 1 0 0 0 0
Mirror for Beam #MIRROR
absorber A97L-0201-0972
122 0 0 1 1 0 0
#MIRROR
Maintenance parts [Repairable parts]

Qty
C2000i-C C4000i-C C6000i-C
Name Specification
CE CE CE
1 A14B-0082-B211 2 2 4 0 6 0
Laser PSU
2 A14B-0082-B212 0 0 0 4 0 6
3 A14B-0082-B328 2 2 0 0 0 0
4 A14B-0082-B326 0 0 4 4 0 0
4 4
5 Matching box A14B-0082-B331 0 0 0 0 No.1,3 No.1,3
4,6 4,6
2 2
6 A14B-0082-B332 0 0 0 0 No.2,5 No.2,5
7 Interface PCB A16B-3100-0070 1 1 1 1 1 1
8 Safety circuit PCB A16B-1300-0300 1 1 1 1 1 1
9 Shutter PCB A16B-1700-0520 1 1 1 1 1 1
10 Gas control PCB A16B-1700-0490 1 1 1 1 1 1
11 24V PSU A20B-1005-0124 1 1 1 1 2 2
12 A04B-0807-D001 1 1 1 1 0 0
Power sensor
13 A04B-0809-D001 0 0 0 0 1 1
14 A04B-0813-C413 1 1 1 1 0 0
Shutter unit
15 A04B-0818-C414 0 0 0 0 1 1
- 68 -
Qty
C2000i-C C4000i-C C6000i-C
Name Specification
CE CE CE
16 A04B-0800-C019 1 1 0 0 0 0
Turbo blower
17 A04B-0800-C025 0 0 1 1 2 2
18 Control valve A04B-0815-D402 1 1 1 1 1 1
19 Sensor base A290-4540-V051 1 1 1 1 0 0
20 (Gas controller) A290-4562-V042 0 0 0 0 1 1
21 Water distributor A04B-0813-C421 1 1 0 0 0 0
22 unit A04B-0815-C421 0 0 1 1 0 0
Water distributor
23 A04B-0818-C422 0 0 0 0 1 1
unit A (OUT)
Water distributor
24 A290-4562-V800 0 0 0 0 1 1
unit A (IN)
Water distributor
25 A04B-0818-C423 0 0 0 0 1 1
unit B (OUT)
Water distributor
26 A290-4562-V801 0 0 0 0 1 1
unit B (IN)
27 A04B-0813-C450 1 1 0 0 0 0
Beam folding unit
28 A04B-0815-C450 0 0 1 1 0 0
- 69 -
4.TROUBLESHOOTING B-70475EN/01
4 TROUBLESHOOTING
Chapter 4, “TROUBLESHOOTING” consists of the following contents:
4.1 TROUBLESHOOTING PROCEDURE .............................................................................................71

4.2 RESPONDING TO ALARM MESSAGES ON THE SCREEN
ALM No.4061...................................................................................................................................72
ALM No.4063...................................................................................................................................72
ALM No.4065...................................................................................................................................75
ALM No.4066...................................................................................................................................76
ALM No.4068...................................................................................................................................77
ALM No.4069...................................................................................................................................78
ALM No.4070...................................................................................................................................79
ALM No.4071...................................................................................................................................79
ALM No.4073...................................................................................................................................80
ALM No.4074...................................................................................................................................80
ALM No.4075...................................................................................................................................81
ALM No.4076...................................................................................................................................82
ALM No.4077...................................................................................................................................83
ALM No.4078...................................................................................................................................84
ALM No.4079...................................................................................................................................85
ALM No.4080...................................................................................................................................85
ALM No.4081...................................................................................................................................87
ALM No.4082...................................................................................................................................88
ALM No.4085...................................................................................................................................88
ALM No.4087...................................................................................................................................89
ALM No.4088...................................................................................................................................89
ALM No.4089...................................................................................................................................90
ALM No.4090...................................................................................................................................91
ALM No.4094...................................................................................................................................91
ALM No.4095...................................................................................................................................91
ALM No.4099...................................................................................................................................92
ALM No.4100...................................................................................................................................93
ALM No.4101...................................................................................................................................96
ALM No.4105...................................................................................................................................96
ALM No.4106...................................................................................................................................97
ALM No.4107...................................................................................................................................98
ALM No.4108...................................................................................................................................98
ALM No.4115...................................................................................................................................98
ALM No.4116...................................................................................................................................99
ALM No.4118...................................................................................................................................99
ALM No.4119...................................................................................................................................99
ALM No.4120...................................................................................................................................99
ALM No.4121...................................................................................................................................99
ALM No.4122...................................................................................................................................99
ALM No.4125.................................................................................................................................103
ALM No.4127.................................................................................................................................104
ALM No.4128.................................................................................................................................104
ALM No.4129.................................................................................................................................104
ALM No.4132.................................................................................................................................105
ALM No.4135.................................................................................................................................105
ALM No.4400.................................................................................................................................105
ALM No.4401.................................................................................................................................105
- 70 -
B-70475EN/01 4.TROUBLESHOOTING
ALM No.4402.................................................................................................................................105
ALM No.4403.................................................................................................................................105
ALM No.4404.................................................................................................................................105
4.3 MAJOR FAULTS .............................................................................................................................110
4.1 TROUBLESHOOTING PROCEDURE

The troubleshooting procedure to be applied depends on the failure occurrence status as indicated below.
Perform checking according to the items listed below.
(1) Action in response to alarm screen display (See Section 4.2.)

In “(3) Investigation and measure”, the item number with slant is for the service person or the
educated person at FANUC school. User except them can execute only no slant item. If problems are
solved, call our service.
(2) Major faults

(d) The laser output level is low immediately after the power is turned on. (See Section 4.3.1.)
(f) A cooling fan circuit breaker trips. (See Section 4.3.2.)
(g) The magnetic contactor for an exhaust pump causes thermal trip. (See Section 4.3.3.)
(h) The main circuit breaker trips. (See Section 4.3.4.)
(i) Excessive laser gas consumption. (See Section 4.3.5.)
CHECKING ON FAULTS
After identifying the following items, call the service center.

(1) General information on a fault
(a) Date and time of occurrence
(b) State of operation
(c) Timing of a fault (alarm)
(d) Alarm number
(e) How often the fault occurs
(2) Other information

(a) Oscillator and CNC unit names
Check the attached datasheet.
(b) Oscillator serial number
Check the attached datasheet.
(c) Machine tool builder name, machine type
(c) Software series and edition indicated on the LCD screen when power is turned on
Example: G4C1-01
Series Edition
(e) Parameter settings;
Check the current parameter settings with the corresponding values indicated on the unit, and
report your finding to the service center.
4.2 RESPONDING TO ALARM MESSAGES ON THE SCREEN

Alarm numbers, as well as DGN. No. and parameter No. are those of the FS30i/31i-LB.
See the conceptual diagram of alarm processing and a list of alarms in an appendix of this manual.
- 71 -
Sequence of Sequence after

Alarm No. Alarm message
alarm detecting alarm detecting
4061 A/D CONVERTER–1 SEQ1000 and after SEQ1000
(1) Content and condition of alarm

This alarm is issued when the A/D converter on the Interface PCB does not return the conversion
completion signal in the specified time after the start of conversion. This A/D converter is designed
to read gas pressure, power data and voltage and current of laser PSU.
(2) Investigation and measure

No. Cause of trouble Solution
1 Short circuit of DC24V line on On machine side, check if there is failure of PCB which generate
machine side DC24Vk or there is short circuit on cable for DC24V
2 Breaker trip Check if the breaker for DC24V trips on machine side.
3 Short circuit of DC24V between Check if DC24V between CNC and oscillator short-circuits.
CNC and laser oscillator
4 Fuse blowing Replace the fuse.
5 Failure of I/O PCB Replace I/O PCB.
6 Anomaly of Interface PCB Replace the Interface PCB.
(3) Parameters and data

DGN. No.981 Data when A/D1 conversion becomes abnormal.

4063 LASER GAS OR PSU SEQ2000 and after SEQ2000
(1) Content
This message appears when the laser power supply unit becomes abnormal or performs protective
operation.
(2) Condition of alarm

When alarms (DCI1, DCI2, etc.) showed below table occur on each laser power supply,
DGN.No.974 change to 1, and then this alarm occurs. However, laser power supply, which is not,
chose by parameter No.15027 is not checked.
Alarm Content Upper
Condition Cause
Name limit
DC over momentary 1) Short circuit of
DCI1 120A
current the load
In discharge at CW or Pulse, when there is
DC over peak current 2) Electric break
DCI2 much DC current, this alarm is issued. 78.8A
(DC over power alarm) down on
DCI3 DC over average current 55A discharge tube
1) Short circuit of
load for power
When there is anomaly in discharge tube or
RFF RFF alarm - supply
matching box, this alarm is issued.
2) Abnormal
discharge
This alarm is issued by overcurrent and
Anomaly of control
VC Ref. Voltage abnormal overvoltage of power supply to control in laser -
circuit
power supply.
- 72 -
Alarm Content Upper

Condition Cause
Name limit
1) This alarm is issued when cooling water 1) Failure of
does not flow in heatsink of laser power chiller
supply. 2) Water jam
OH Over heat alarm 60℃
2) This alarm is issued that fan motor in 3) Failure of fan
laser power supply or matching box stop, motor
and temperature rises.
1) Load infinity
2) Broken
In discharging at CW or Pulse, if discharge
RFV RF over voltage alarm 5.8 to 6kV discharge tube
voltage is higher, this alarm is issued.
3) No connection
of feeder
In discharging at CW or Pulse, if discharge Anomaly of
RFI RF over current alarm 3.78A
current is higher, this alarm is issued. feedback circuit

(a) Check below items with power off (All breaker for power supply off)
No. Check item Cause of trouble, Solution
1 Checking the Check the alarm code for every power supply on discharge-rated alarm
discharge-rated alarm history display. Refer to Subsection 6.1.3.3.
history display
2 Checking parameters Check that parameters (discharge, oscillator control, gas pressure control,
laser power supply and power table) are same as parameter sheet attached
to the oscillator.
3 Use of un-specified laser Un-specified laser gas is below:
gas 1) The composition in gas cylinder is different.
2) The actual composition ratio is different from the one described on laser
gas cylinder.
If these laser gas is used, below phenomenon occurs, so replace to
specified laser gas.
a) Much N2
RF voltage of all power supply becomes high. Actual power
becomes high in high power command, and low in low power
command than standard. (DCI alarm)
b) Much He
RF voltage of all power supply becomes low, and discharge area
enlarges. Actual power becomes low in high power command, and
high in low power command than standard.
4 Checking external gas leak RF voltage of all power supply becomes high, and actual laser power
becomes low. (DCI alarm). RF voltage falls down by repetition of purge, and
power is recovered. This phenomenon is remarkable after stopping for a
long time.
Check the external gas piping and leak rate, and treat it according to
subsection 2.3.2
5 Checking the cooling water Check that the cooling water temperature is within the range from 25 to
30°C.
In case of OH alarm, supply water flow is shortage, so remove the water jam
in water tube.
In case of DCI alarm, cooling water temperature of the chiller is lower, and
this alarm sometimes occurs in start-up. When the actual water temperature
is different from the temperature setting of chiller, it is possible that chiller is
failure. Call the chiller maker to fix.
6 Checking the internal gas Check if there is gas leak by automatic leak check function.
leak
- 73 -

7 Gas leak in the oscillator RF voltage of all power supply becomes high, and laser power becomes
low. (DCI alarm) If the purge is repeated, this state is not changed.
Find the gas leak point, and treat it.
1) Check if any joints in the gas circulating system are loose. If a loose joint
is found, tighten the joint firmly.
2) Check if any components of the gas circulating system are cracked. If a
cracked component is found, replace that component.
3) Check that the discharge tubes are free from any hole or crack and that
the O-rings are not degraded. If a cracked or damaged component is
found, replace it.
4) Check if trigger electrode or O-rings of circulating system are degraded. If
it is degraded, replace it.
5) Check if the mirrors are damaged. If it is damaged, replace it.
6) Check if gas tube and gas ferrule is damaged. If it is damaged, replace it.
8 Water leak to vacuum Check if there is water leak from heat exchanger or nozzle for discharge
system tube. If they have faulty, replace it.
9 Checking of laser power 1) Check if high speed diode has faulty according to subsection 5.2.1.2. If
supply it has faulty, replace it.
2) Check if RF FET PCB has faulty according to subsection 5.2.1.3. If it
has faulty, replace it.
3) Measure the resistance between phases of the terminal block for
AC200V. Check if they are short-circuited. If it is so, replace laser
power supply. In this case, it is possible that magnetic contactor for
laser power supply is deposited, and check it.
4) If there is other faulty in laser power supply, replace it.
10 Checking of matching box 1) Check if fan in matching box stops. If it stops, replace it.
2) Check if coil in matching box becomes black. If it becomes black,
replace matching box.
3) Check if capacitor in matching box is cracked. If it is cracked, replace
matching box.
11 Checking of discharge tube 1) Check for looseness or positional deviation in the fixtures for mounting
the discharge tubes, and if any problem is found, take appropriate
action.
Check whether the inside and outside of each discharge tube is dirty,
and clean it.
2) Check if the inside and outside of each discharge tube is dirty, and
clean it
3) Check each discharge tube for a crack, and replace it.
4) Check the O-ring of each discharge tube for damage, and replace it.
(b) Confirming operation and investigating the cause of a fault

Switch on the laser oscillator. If it occurs same phenomenon again, treat it as below.
1 Faulty of gas pressure Below phenomenon occurs by abnormal output voltage from gas pressure
sensor sensor. In this case, replace gas pressure sensor.
1) Tube pressure becomes high, and RF voltage of all power supply
becomes high. The actual power is high in high power command, lower
than standard in low power command. (DCI alarm)
2) Tube pressure becomes low, RF voltage of all power supply becomes
low, and discharge area enlarges. The actual power is low in high
power command, higher than standard in low power command.
2 Wrong action of alarm Replace laser power supply.
circuit of laser power supply
- 74 -

3 Faulty of interface PCB or Replace Interface PCB or cable between laser power supply and interface
faulty of contact or short PCB
circuit of cable

Parameters Nos.15025, 15027 Power supply selection
DGN. No.966 Power supply unit operation status
DGN. No.970 Power supply unit selection signal
DGN. No.974 Power supply unit alarm display
“Maintenance screen”

4065 SHUTTER ACTION SEQ2000 and after SEQ2000
(1) Content
Shutter action is abnormal.

When the shutter open command DGN.No.973 does not match the shutter state
DGN.No.961#4(SON) and No.961#5(SOF), this alarm is issued. However, when shutter open
command changes, the alarm monitor is masked for the time set in parameter No. 15152 (default:
3000 msec).

See the following table, and check the operation status.
[Open] command [Close] command
DGN. No.973 #0=1 DGN. No.973 #0=0
Shutter open state signal
1 1 0 0 1 1 0 0
DGN. No.961 #4
Shutter close state signal
0 1 0 1 0 1 0 1
DGN. No.961 #5
Normal/Abnormal O X X X X X X O

1 Shutter clamp not removed. Remove the shutter clamp.
Eliminate the cause of the problem. If the problem
2 Shutter arm section caught
cannot be solved, replace the shutter unit.
Check if DC24V is added to shutter solenoid with
shutter open command (DGN.No.973#0=1). If DC24V
3 Anomaly of shutter solenoid
is added to it and shutter cannot open, replace shutter
unit.
Check the connection between connectors, if it is
4 Anomaly of shutter PCB
abnormal, replace shutter PCB.
Check connection, short circuit, if it is abnormal,
5 Anomaly of connection cable to PCB
replace the cable.
Check if output of shutter position detector by shutter
open/close changes. If the voltage of connector
6 Anomaly of shutter position detector
CN231#1 and #2 changes (5V⇔0V), it is normal. If it is
not so, replace shutter position detector.
- 75 -

Check if DC24V is added to shutter solenoid with
shutter open command. If DC24V is not added,
interface PCB has faulty. If shutter position detector is
7 Anomaly of interface PCB normal, and open/close state signal
DGN.No.961#4(SON)/ DGN.No.961#5(SON) is
abnormal, interface PCB has faulty.
In this case, replace interface PCB.

DGN. No.961 #4 (SON) Shutter open state
DGN. No.961 #5 (SOF) Shutter closed state
DGN. No.973 #0 (SOP) Shutter open command
F220 #4 (SHTONL) Shutter ON signal
F220 #3 (SHTOFL) Shutter OFF signal

4066 DISCHARGING SEQ2600 and after SEQ2000
(1) Content
When the HVON signal is turned on, the discharge starts. This alarm is issued if the voltage of at
least one discharge tube exceeds the setting of the parameter.

(ParameterNo.15221) > (DGN No.909(RFV1)) or
(ParameterNo.15221) > (DGN No.923(RFV8))

Check that parameter No.15223, No.15242, No.29022, No.29023
1 Invalid parameter setting
are same as parameter sheet attached to the oscillator.
Un-specified laser gas is below:
1) The composition in gas cylinder is different.
2 Use of un-specified laser gas 2) The actual composition ratio is different from the one
described on laser gas cylinder.
In this case, replace to specified laser gas.
Check that the cooling water temperature is within the range from
25 to 30°C.
3 Checking the cooling water When the actual water temperature is different from the
temperature setting of chiller, it is possible that chiller is failure.
Call the chiller maker to fix.
Check the external gas piping and leak rate, and treat it
4 Checking external gas leak
according to subsection 2.3.2
5 Checking the internal gas leak Check if there is gas leak by automatic leak check function.
- 76 -

1) Check if any joints in the gas circulating system are loose. If a
loose joint is found, tighten the joint firmly.
2) Check if any components of the gas circulating system are
cracked. If a cracked component is found, replace that
component.
3) Check that the discharge tubes are free from any hole or crack
6 Gas leak in the oscillator and that the O-rings are not degraded. If a cracked or
damaged component is found, replace it.
4) Check if trigger electrode or O-rings of circulating system are
degraded. If it is degraded, replace it.
6) Check if gas tube and gas ferrule is damaged. If it is damaged,
replace it.
Check if there is water leak from heat exchanger or nozzle for
7 Water leak to vacuum system
discharge tube. If they have faulty, replace it.
If high speed diode and RF FET PCB are normal, and working of
8 Anomaly of parts in laser power supply
laser power supply is abnormal, replace laser power supply.
If above items does not problem, it is anomaly of gas pressure
9 Anomaly of gas pressure sensor sensor (offset and abnormal fluctuation of monitor value from gas
pressure sensor). In this case, replace gas pressure sensor.

Parameter No.15221 Discharge starts check voltage
Parameter No.15222 Discharge waits time
Parameter No.15223, No.29022 Bias command
Parameter No.15242, No.29023 Tube pressure for oscillation
DGN. Nos.909-914 Discharge tube voltage and current
G222 #7 (HVON) Discharge start signal

4068 BEAM REFLECTION SEQ3000 and after SEQ3000, BEAM OFF
(1) Content
This alarm is issued, if a work piece reflects laser beam more than the rating to the laser oscillator.
This can happen when the laser beam is used to drill, cut, or welds materials (such as copper, brass,
and aluminum) having a high reflectivity to the laser beam (10.6 μm).

When one condition of below is satisfied, alarm is issued.
(a) The actual power is bigger than setting of parameter No.15226.
(b) When the pulse power feedback is enable, and the reflected laser beam power which is
calculated with the difference of power command and actual power after feedback is bigger than
the parameter No.15265 and No.15269, this alarm is issued
(c) When the pulse power feedback is enable, and the actual power is bigger than the parameter
No.15265.
However, when BEAM ON or power command condition is changed, the alarm monitor is masked
for the time set in parameter No.15268.

1 Excessive returning beam back Lower the output specified in the command, or take an action to reduce
into the resonator the reflected laser beam.
- 77 -

2 Anomaly of parameter for alarm Check the values set in parameters Nos. 15265 and 15266 against the
detection corresponding values in the parameter table attached to the unit.
3 Anomaly of output table Check the values set in parameters Nos. 15280 to 15308 against the
parameter corresponding values in the parameter table attached to the unit.
4 Anomaly of input compensation Check the value set in parameter No. 15215 against the corresponding
coefficient parameter value in the parameter table attached to the unit.
After replacing the rear mirror or power sensor, it is necessary to change
this parameter setting.
5 Anomaly of Time constant 1 for Check the value set in parameter No. 29005 against the corresponding
Power sensor response delay value in the parameter table attached to the unit.
compensation filter After replacing power sensor, it is necessary to change this parameter
setting.

Parameter No.15215 Power input compensation coefficient
Parameter No.15265 Allowable output increase value
Parameter No.15266 Output limit
Parameter No.15268 Mask time for beam reflection alarm monitor
Parameter No.15269 Permissible value for beam reflection warning signal
Parameter No.29005 Time constant 1 for Power sensor response delay compensation filter
DGN. No.906 Actual output
“Data table to estimate the actual power”

4069 LASER IF PCB SEQ1500 and after SEQ1000
(1) Content
When the signal watch signal, which is send to CNC, is abnormal, this alarm is issued.

(a) CNC sends gas press/power select signal DGN.No.968#7(SLO) to interface PCB via I/O Link,
and watches the added gas press/power signal (toggle signal) from interface PCB. If the state of
this added signal is not changed at four times continuously, this alarm is issued.
(b) When DGN.No.960#4(FBD)=1 and parameter No.15018#6(FSB)=1, if the toggle signal
DGN.No.960#1(WDI) from interface PCB is not changed at four times continuously, this alarm
is issued.

1 Fuse blowing Correct the cause of the blown fuses, and then replace the fuse.
2 Anomaly of 24V power source unit Check the output voltage (24V ±10%) of the 24V power source
unit. If the allowable voltage range is exceeded, replace the unit.
3 Laser oscillator main circuit breaker Check whether the main circuit breaker is conducting (ON) for all
abnormal three phases.
4 Anomaly of power unit of Interface PCB Replace the Interface PCB.

DGN. No.960#1 (WDI) Signal watch signal
DGN. No.964#4 (FBD) FSSB LSI mount
DGN. No.968#7 (SLO) Power or gas pressure select signal
- 78 -

4070 CHILLER NOT READY SEQ1500 and after SEQ1000
(1) Content
Turning on the oscillator start switch causes the system to output a chiller start request signal to the
machine. After a chiller ready signal is received from the chiller unit, this signal is monitored, and if
this signal is interrupted, this alarm is issued.

G221#6(CLRDY)=0
or
Power off of power supply for the chiller

1 No power supply to chiller unit Check if power cable is connected to chiller unit and power is
supplied to it.
2 Anomaly of chiller unit Check that chiller unit works. If power is supplied to chiller and
chiller does not work, chiller unit has faulty. Call chiller maker.
3 Anomaly of connection of signal cable If chiller works and there is not chiller ready signal, connection
of cable between chiller and CNC is faulty. Check and treat it.
4 Anomaly of PCB If above items have no problem, PCB of CNC has faulty. Check
it and treat it.

G221 #6 (CLRDY) Chiller ready signal
F221 #4 (CLON) Chiller start request signal

4071 ASSIST GAS NOT READY SEQ3000 and after SEQ3000, BEAM OFF
(1) Content
When starting machining, the CNC monitors the assist gas ready signal from the assist gas supply
unit in the machine. If this signal is interrupted, this alarm is issued.

When G221#7(AGRDY)=0 during command of assist gas output, or when α or βis 0 during
executing the program, this alarm is issued

Check the PMC parameter state, and check the signal from the assist gas supply unit. If the signal is
abnormal, check the assist gas supply unit.
Check α is 1 to 7 and β is 1 to 3 in G32PαQβ during program execution.

1 Failure in assist gas supply unit Check the assist gas supply unit.
2 Poor connection Check the connection between the assist gas supply unit and
CNC.
3 Setting failure of signal and parameter Check G221#7 is 0, or that setting of flow gas and assist gas
on laser setting screen is not out of range.
- 79 -

G221 #7 (AGRDY) Assist gas ready signal
G222 #5 (AGST) Assist gas start signal
F222 #0-#2 (AG1-3) Assist gas selection signal

4073 LASER GAS PRES. SEQ1500 and after PURGE
(1) Content
The pressure of the laser gas supplied to the laser oscillator is monitored. This alarm is issued, if this
pressure is out of permissible range.

(parameter No.29322) < (DGN.No.2503) < (parameter No.29323)
But the alarm monitor is masked during open of purge valve (V2) or for 5 sec after close of V2.

Adjust the secondary pressure at the regulator on the gas cylinder so that the
Abnormal supply laser gas
1 pressure of laser gas supplied to the laser oscillator is 0.175MPa±0.025MPa
pressure setting
(rating) as measured at the entry of the oscillator.
2 Empty of gas cylinder Check if the gas cylinder is empty. It is so, replace the new one.
3 Valve close of gas cylinder To supply the laser gas, open the stop valve enough.
Use of un-specified gas When diameter of gas tube/pipe is small, it is possible that this alarm is issued.
4
tube/pipe Use specified gas tube/pipe shown subsection 2.2.1.2
Gas leak from gas tube/pipe Check if fitting for gas loosen or tube ruptures. If it is abnormal, replace it.
5
to oscillator
If below failure occurs, replace gas regulator.
1) When it is not able to adjust secondary gas pressure, the bigger gas
pressure than specified is added, and gas tube and gas supply pressure
6 Anomaly of gas regulator sensor sometimes are damaged.
2) Because of faulty of gauge of secondary gas pressure, if specified gas
pressure on gauge is set, the actual gas pressure sometimes is lower than
alarm level.
Invalid setting of gas supply Check if parameter setting of gas supply pressure sensor is abnormal. If it is
7
pressure sensor not correct, set parameter again according to subsection 5.9.3.1.
Anomaly of gas supply If above items have no problem, gas supply pressure is failure, so replace the
8
pressure sensor charge unit..

Parameter No.29322 Upper level of the alarm of gas supply pressure
Parameter No.29323 Lower level of the alarm of gas supply pressure
DGN. No.2503 Laser gas supply pressure
NOTE
If this alarm occurs in purge action, after next RUN ON, the automatic aging will
be executed.

4074 OXYGEN DENSITY SEQ1500 and after SEQ1000
- 80 -
(1) Content
The oxygen density in the cabinet of the laser oscillator is monitored by sensor. When this is greater
than the allowance value, the alarm occurs.

When the oxygen density in the laser oscillator is bigger than 34%, DGN.No.961#0(OXG) becomes
0, and alarm occurs.

Check if oxygen density is bigger than 34% by oxygen density meter flowing
1 Higher oxygen density of assist gas (oxygen) to the cabinet of laser oscillator. If it exceeds, treat so
that oxygen does not flow.
Wrong action of oxygen sensor sometimes happens in the environment
2 Wrong action of oxygen sensor where exists alcohol, Freon gas and component of sulfur. Remove the factor
generated substance.
Measure the oxygen density in the oscillator by oxygen density meter. When
Anomaly of the oxygen sensor it shows less than 34%, check the voltage from oxygen sensor unit at
3
unit. connector CN216#A2-#B2 of interface PCB. If it is bigger than 370mV,
oxygen sensor unit is failure, so replace it.
4 Anomaly of interface PCB If above items have no problem, replace interface PCB.

DGN. No.961#0 (OXG) Oxygen density (0: Abnormal 1: Normal)

4075 CHILL TEMP. SEQ1500 and after SEQ1000
(1) Content
A dew sensor is mounted to the output coupler holder in the oscillator. This alarm occurs when the
sensor detects condensation. After this alarm occurs, the alarm status cannot be reset until the
condensation status is released.

When the dew sensor detects the condensation, DGN.No.961#2(WAT) becomes 0, and this alarm is
issued. It is not possible to execute alarm reset until the state of condensation is released.

Too low cooling water 1)Set the water temperature near the room temperature (plus about 1°C).
temperature (Maximum water temperature: 30°C)
1
2) When the cooling water temperature is less than temperature setting of
chiller, chiller has failure. Call the maker of chiller.
Connecting anomaly of dew Check whether the cable is securely connected to the dew sensor. If not,
2
sensor cable reattach the cable.
Anomaly of dew sensor If the sensor operates when there is no condensation around the sensor, the
3
sensor is abnormal. Replace the sensor.
Sensor in condensation When drying the sensor that is in the condensation state, do not blow on the
4
state sensor with hot wind whose temperature is 60°C or higher.

DGN. No.961#2 (WAT) Condensation (0: Abnormal 1: Normal)
- 81 -

4076 LASER POWER DOWN SEQ3000 and after SEQ1000
(1) Content
This alarm is issued if the monitored laser output is lower than the specified laser output by at least
the allowable value.

(a) The actual laser power is less than (average power (power x duty) – (Parameter No.15271)) in
power output, this alarm is issued. Bu the alarm monitor is masked in BEAM ON or for 3 sec
after changing power command condition
(b) In calibration preparation 0C, when the laser power is less than parameter No.29506, this alarm
is issued.
(c) In calibration preparation 0C, when the laser power is less than parameter No.29507 after aging
for times of parameter No.29511.
(d) In calibration preparation 1C, when the laser power is less than parameter No.29202 after gas
exchanging for times of parameter No.29203
“Calibration preparation 0C, 1C” is one of the warm-up sequence which is automatically executed in
laser start-up.

Check that parameter No.15223, No.15242, No.29022, No.29023 are same as
parameter sheet attached to the oscillator.
Use of un-specified laser
2 2) The actual composition ratio is different from the one described on laser
gas
gas cylinder.
Check that the cooling water temperature is within the range from 25 to 30°C.
3 Checking the cooling water When the actual water temperature is different from the temperature setting of
chiller, it is possible that chiller is failure. Call the chiller maker to fix.
In install of oscillator or after stopping for a long time, this alarm is sometime
4 Shortage of aging
issued by shortage of aging. Execute aging enough.
subsection 2.3.2
Checking the internal gas Check if there is gas leak by automatic leak check function.
6
leak
Lack of output from laser The thermocouple inside the power sensor unit may be damaged, or there may
power sensor unit be a poor terminal connection. Measure the direct current resistance between
the terminals of the power sensor unit, and check that the measured value falls
7
within 200 to 800 ohms for C2000i-C and C4000i-C or 1,000 to 3,000 ohms for
C6000i-C. If the measured value falls outside this range, replace the power
sensor unit.
1) Check if the cable to power sensor unit is connected certainly. If it is not
Connecting anomaly of the
enough, connect it certainly.
8 cable of laser power sensor
2) If output voltage from power sensor fluctuates touching to the cable, cable
unit.
has failure. So, replace it.
- 82 -

1)Check if the mirrors are dirty, degraded, or damaged, and clean or replace
faulty mirrors.
2) Check the breakage of turbo blower. If it has failure, change it.
3) Align the mirrors.
Decrease in actual output
9 4) Check for internal gas leak due to a damaged discharge tube or degraded
level
-ring for discharge tube, trigger electrode or circulating system, and
replace any faulty part.
5) Check if there is water leak by parts in the gas circulating system , and if
any problem is found, take appropriate action.
Check the connection between connectors, if it is abnormal, replace shutter
PCB.
1) If the time until it arrives parameter No.15240 is shorter or longer, gas
Anomaly of gas pressure pressure sensor has offset in monitor value. In this case, replace gas
11
sensor pressure sensor.
2) If monitor of gas pressure fluctuates, it has problem, so replace it.

Parameter No.15242, 29023 Tube pressure for oscillation
Parameter No.15271 Allowable output drop value
Parameter No.29202 Output judgment value in calibration preparation 1C
Parameter No.29203 Upper limit of number of repetition in calibration preparation 1C
Parameter No.29506 Output judgment value 2 in calibration preparation 0C
Parameter No.29507 Output judgment value 3 in calibration preparation 0C
Parameter No.29511 Upper limit of number of repetition in calibration preparation 0C
DGN. No.906 Actual output

4077 ABSORBER TEMP. SEQ1500 and after SEQ2000
(1) Content
In the usual operation, this beam absorber is irradiated by the rated output only during the laser
output compensation conducted after the start of the oscillator.

When the temperature switch of absorber detects is bigger than 90℃ at the bottom of absorber or
80℃ at the side of absorber, DGN.No.961#7(ABT) becomes 0, and then, this alarm is issued.

1 Invalid setting of water Check that the cooling water temperature is within the range from 25 to 30°C.
temperature of chiller, or When the actual water temperature is higher than the temperature setting of
anomaly of chiller chiller, it is possible that chiller is failure. Call the chiller maker to fix.
2 Shortage of water flow Check if there is water jam in the water tube between distribution unit and beam
absorber. If it so, replace it.
3 Anomaly of absorber 1) When cooling water is flowing, if water temperature rises, replace
absorber.
2) If there is water leak from absorber, replace absorber.
4 Anomaly of temperature Temperature switch acts when temperature is higher than specified one.
switch If it acts by lower, replace temperature switch (A57L-0001-0095#B080 and
A57L-0001-0095#B090).
- 83 -

5 Cut the cable or contact Check if cables between Temperature switch and shutter PCB, and between
failure shutter PCB and interface PCB is connected certainly, if it is not so, connect it
certainly. Also, check if cable is cut.
6 Anomaly of shutter PCB Check the connection between connectors, if it is abnormal, replace shutter
PCB.

DGN.No.961#7 (ABT) Absorber temperature
DGN.No.2500, No.2501 Cooling water temperature 1, 2

4078 LASER TUBE PRES. SEQ2000 and after SEQ1000
(1) Content
The gas pressure is monitored after the discharge start ready condition (SEQ2000) or eco power
saving is established.

(a) When the gas pressure deviates by ±(Parameter No.15251) from the set gas pressure, this alarm is
issued.
(b) When the gas pressure exceeds the specified upper lever or lower level in eco power saving
mode, on the way to or from eco power saving mode, this alarm is issued.

Invalid setting of parameters for gas Check that parameter No.15244, No.15251, No.29403 are same as
1
pressure control parameter sheet attached to the oscillator.
Adjust the secondary pressure at the regulator on the gas cylinder so
Abnormal supply laser gas pressure that the pressure of laser gas supplied to the laser oscillator is
2
setting 0.175MPa±0.025MPa (rating) as measured at the entry of the
oscillator.
subsection 2.3.2
cracked. If a cracked component is found, replace that component.
3) Check that the discharge tubes are free from any hole or crack and
that the O-rings are not degraded. If a cracked or damaged
5 Gas leak in the oscillator
component is found, replace it.
replace it.
Adjust the gas flow control valve to supply gas at the specified flow
6 The gas flow control valve is closed. rate.
C2000i-C, C4000i-C : 10 Litter / h、C6000i-C : 20 Litter / h
- 84 -

Measure gas pressure control voltage (0V to –12.7V at GPC check
terminal) and tube pressure monitor voltage (0V to 5V at LTP check
7 Anomaly of interface PCB terminal) on interface PCB. When control valve is all closed, GPC=0V,
and when it is all opened, approximately GPC=-12.7V. Tube pressure
is 40Torr per 1V. If it is abnormal, replace interface PCB.
If gas pressure control voltage GPC is always 0V or approximately
8 Anomaly of control valve
–12.7V, control has problem, so replace it.
9 Anomaly of pressure sensor If above items have no problem, replace the pressure sensor.

Parameter No.15244 Gas pressure control gain
Parameter No.15251 Maximum allowable gas pressure deviation
Parameter No.29403 Gas pressure limit in Power Saving
DGN. No.905 Actual gas pressure

4079 PUSH RESET KEY SEQ2000 and after SEQ2000
(1) Content
At the same time, the shutter is closed and discharge stops

When the emergency stop button is pressed in SEQ2000 to 3000 ,during eco power mode, on the
way to or from eco power mode, this alarm is issued.

Remove the failure. Relies the emergency stop button, push the reset
1 Emergency stop button is pressed.
key on the panel.
When you touch the limit switch on machine side, or exceed the limit
Working of safety limit switch on
2 during working, it is possible to issue this alarm. Work safety not to
machine side
exceed limit.
Anomaly of emergency stop signal If there is anomaly of connection of emergency stop signal line on
3
line on machine side machine side, or cutting of line, adequately treat it.
When alarm is issued on machine side, it is possible to issue this
4 Anomaly of machine
alarm. Remove the factor of machine alarm.
Anomaly of emergency stop signal Check if cable between machine and laser oscillator connect. If it is not
5 cable between machine and laser connect or cut, adequately treat it.
oscillator
6 Anomaly of I/O unit Replace I/O unit.

F221#0 (LARM) Laser alarm signal

4080 LASER TUBE EXHAUST SEQ1500 and after SEQ1000
(1) Content
When the oscillator start switch is turned on, the exhaust pump starts evacuating the gas in the
circulating system to place the oscillator in the low-pressure state. At this time, this alarm is issued if
the pressure does not reach the prescribed vacuum pressure when the specified time has elapsed after
the start of exhaust.
- 85 -

(a) Evacuation is started in SEQ1500 with RUN ON. After that, when the gas pressure does not
arrive setting of parameter No.15240 over the time of setting of parameter No.15259, this alarm
is issued.
(b) When the gas pressure exceeds (parameter No.29386 + No.29387), this alarm is issued.

1 Invalid setting of parameter Check parameters No.15240, No.15259.
1) Check if specified oil is provided at an appropriate level between
H and L for gauge shown subsection 3.3.2.1. If it is not so, refill
or exhaust oil.
2) Check if the exhaust filter of the pump is clogged. If it is
abnormal, replace it.
3 Abnormal of exhaust pump 3) Check whether the exhaust pump outlet is clogged to disable
exhaust operation. Remove the cause of the clogging.
4) If the pump works by counter- rotation, check the connection of
phases of power supply referring to subsection 2.3.1.2. If it is
wrong, change phase together.
5) If above items have no problem, replace exhaust pump.
component.
4 Gas leak in the oscillator and that the O-rings are not degraded. If a cracked or damaged
replace it.
When the air is charged from silencer of V3 in exhausting,
5 Anomaly of three state valve (V3) DGN.No.905 does not fall. In this case, V3 has failure, so replace
exhaust unit.
1) When exhausting is executed and DGN.No.905 does not fall, it
is possible that failure of output voltage of gas pressure sensor
(Example: always 10V). Check it by LTP check terminal on
interface PCB, if it is abnormal, replace it.
6 Anomaly of gas pressure sensor 2) If the time until it arrives parameter No.15240 is shorter or
longer, gas pressure sensor has offset in monitor value. In this
case, replace gas pressure sensor.
3) If monitor of gas pressure fluctuates, it has problem, so replace
it.
When exhausting is executed and DGN.No.905 does not fall, it is
possible that failure of interface PCB or safety circuit PCB.
Anomaly of interface PCB or safety
7 Check if connector CN239 on interface PCB or CN240 and CP226
circuit PCB.
on safety circuit PCB loosen. Check the signal in interface PCB and
safety circuit PCB, if it has problem, replace PCB.
8 Anomaly of valves on charge unit possible that failure of gas supply valve (V1), or purge valve (V2),
replace charge unit.
- 86 -
Parameter No.15240 Evacuation completion negative pressure
Parameter No.15259 RUN-ON exhausts time
Parameter No.29386 Pressure to start turbo blower
Parameter No.29387 Pressure limit after turbo blower start

4081 GAS PRES. CONTROL 45 sec after SEQ1900 SEQ1000
(1) Content
The pressure is monitored in 45 seconds after the start of gas pressure control. This alarm is issued if
the pressure falls out of the prescribed range.

(Parameter No.15240) – 20 < (DGN.No.905) < (Parameter No.15241)+20

Invalid setting of parameters for gas Check that parameter No. 15000#1(LGC), 15244, 15245, 15246 are
1
pressure control same as parameter sheet attached to the oscillator.
Adjust the secondary pressure at the regulator on the gas cylinder
Abnormal supply laser gas pressure so that the pressure of laser gas supplied to the laser oscillator is
2
setting 0.175MPa±0.025MPa (rating) as measured at the entry of the
oscillator.
component.
4) Check if trigger electrode or O-rings of circulating system is
replace it.
Measure gas pressure control voltage (0V to –12.7V at GPC check
terminal) and tube pressure monitor voltage (0V to 5V at LTP check
Anomaly of interface PCB or control terminal) on interface PCB. When control valve is all closed,
4
valve GPC=0V, and when it is all opened, approximately GPC=-12.7V.
Tube pressure is 40Torr per 1V. If it is abnormal, replace interface
PCB or control valve.
Check the cable connection between gas controller and interface
5 Anomaly of connection cable
PCB.
6 Anomaly of pressure sensor If the above items have no problem, replace the pressure sensor.

Parameter No.15241 Gas pressure at the start of discharge
- 87 -

4082 TUBE PRES. SENSOR SEQ1500 and after SEQ1000
(1) Content
This alarm appears when the signal of the pressure sensor vanishes.

DGN.No.905 ≦ 0

Open or poor contact in connection Check if the cable between (gas pressure sensor) – (interface PCB)
1 cable between pressure sensor and is not cut or short-circuited . If it is abnormal, replace the cable.
Interface PCB
Check the supply power (+15V) at the connector CN51(pin #1-#2) on
gas control PCB. If this is normal, check the signal voltage from
2 Anomaly of pressure sensor
pressure sensor. If this is zero or less , pressure sensor is
abnormal. Replace the pressure sensor.
If the signal from the pressure sensor is normal, but the output from
3 Anomaly of Interface PCB the Interface PCB is zero or less, the Interface PCB is faulty.
Replace the Interface PCB.

Parameter No.15252 Gas pressure offset

4085 MIRROR CLEANING SEQ3000 and after -
(1) Content
This alarm appears when the laser output power decreases and takes an abnormally higher
calibration coefficient.
This monitoring is executed at the start of the oscillator for checking for decreases in output due to
contamination and degradation of optical components.

(a) When parameter No.15204, No.29020 exceeds parameter No.15203, this alarm is issued.
(b) When the last laser power in internal discharge is less than parameter No.29202 after repetition
of gas exchange and internal discharge for the times of parameter No.29203 in calibration
preparation 1C
(c) Calibration preparation 1C is executed after automatic aging and manual aging for the specified
times. When the last laser power in calibration preparation 1C is less than parameter No.29202,
this alarm is issued.
“Calibration preparation 1C” is one of the warm-up sequence, which is automatically executed in
laser start-up.

1 Excess of maintenance period Check if the maintenance period for mirror does not exceed.
- 88 -

An optical part in the laser resonator
2 Align the laser resonator.
is out of position.
An optical part in the laser resonator
3 Clean or replace the optical part.
is dirty.
See the solution to the problem of laser output decrease described in
4 Other causes
alarm No. 4076.

Parameter No.15320 Command power for power calibration coefficient calculation
Parameter No.29060 Laser power in normal calibration
Parameter No.15203 Power calibration limit
Parameter No.15204, No.29020 Power calibration coefficient
Parameter No.29396 Calibration coefficient adjuster
F220#6 (MWRN) Laser power down alarm signal

4087 SHUTTER OH SEQ2000 and after SEQ2000
(1) Content
This alarm is issued when the temperature of the shutter mirror exceeds a preset maximum.

When the temperature switch on the heatsink for shutter mirror detects it is bigger than 90℃,
DGN.No.961#6(SHT) becomes zero, and then this alarm is issued.

1 Anomaly of cooling fan When the cooling fan stops, replace it.
Clean the shutter mirror. If this alarm recurs after the shutter mirror is
cleaned, replace the mirror.
2 Contamination of shutter mirror
Anomaly of absorber sometimes causes contamination of shutter.
Check absorber.
Check if cables between Temperature switch and shutter PCB, and
3 Cut the cable or contact failure between shutter PCB and interface PCB is connected certainly, if it is
not so, connect it certainly. Also, check if cable is cut.
Check the connection between connectors, if it is abnormal, replace
shutter PCB.
Temperature switch acts when temperature is higher than specified
5 Anomaly of temperature switch
one (90℃). If it acts by lower, replace temperature switch.
6 Anomaly of interface PCB If the above items have no problem, replace interface PCB.

DGN. No.961#6 (SHT) Shutter temperature

4088 LASER VOLTAGE DOWN SEQ2000 and after SEQ1000
(1) Content
This alarm is issued, if the voltage applied to the discharge tube drops largely.
- 89 -

When parameter No.29016#0(CTA) is 0 (high power mode or normal mode),
(Parameter No.15270) – (Parameter No.15272) > DGN.No.909 (note 1)
When parameter No.29016#0(CTA) is 1 (fine mode),
(Parameter No.29025) – (Parameter No.15272) > DGN.No.909 (note 1)
(Note 1)
However, when No.1 laser power supply is disable with parameter No.15027, DGN is RFV of
the youngest No. of laser power supply, which is, enable.

1 Invalid parameter setting Check parameters No. 15242, No.15270, No.15272 and No.29023.
Use of un-specified laser
2 2) The actual composition ratio is different from the one described on laser
gas
gas cylinder.
3 Check if phases of AC200V terminal block of laser power supply is
Anomaly of laser power
short-circuited. If it is so, laser power supply has problem. Replace it. In this
supply and magnetic
case, it is possible that magnetic contactor for power supply is deposited.
contactor
If it is so, replace it.
4 Trip of breaker for laser When breaker is tripped, turn on.
power supply
1) Measure the resistance of high speed diode and RF FET PCB according to
Anomaly of parts in laser subsection 5.2.1. If it is faulty, replace it.
5
power supply 2) If high speed diode and RF FET PCB are normal, and working of laser
power supply is abnormal, replace laser power supply.
Anomaly of discharge tube When it is discharged, if detected voltage of discharge tube is very low, replace
6 voltage detect circuit of matching box.
matching box

Parameter No.15242, No.29023 Tube pressure for oscillation
Parameter No.15270, No.29025 Discharge tube voltage in normal condition
Parameter No.15272 Allowable discharge tube voltage drop
Parameter No.29016#5 (CTA) Processing mode 0:High power mode or normal mode 1:Fine mode
DGN. Nos.909-924 Discharge tube voltage and current

4089 ASSIST GAS NO SELECT SEQ3000 and after SEQ3000
(1) Content
When the assist gas is not chosen or not set the condition of assist gas, this alarm is issued.

When there are no parameters for assist gas on processing program in parameter
No.15000#2(AGA)=0, this alarm is issued.

1 Failure of program Check if the setting condition of assist gas exists on processing program
- 90 -

Parameter No.15000#2(AGA) Assist gas preparation check with beam on
F222#0 to #2 (AG1 - AG3) Assist gas selection signal

4090 LASER NOT GENERATE SEQ1000 and after -
(1) Content
This alarm is issued if an attempt is made to radiate a laser beam when the laser is not in the
oscillation ready (SEQ3000) state.

When an attempt is made to radiate a laser beam in F226#6(LSTR)=0, this alarm is issued.

1 Failure of program Set the program to radiate a laser beam in F221#6(LSTR).

F221#6 (LSTR) Oscillation ready signal

4094 VANE PUMP SEQ1500 and after SEQ1000
(1) Content
This alarm occurs when the thermal switch of the motor starter for the exhaust pump is tripped.

DGN.No.972#2(RPA)=0

1)Check if specified oil is provided at an appropriate level between H and
L for gauge shown subsection 3.3.2.1. If it is not so, refill or exhaust oil.
2) Check if the exhaust filter of the pump is clogged. If it is abnormal,
replace it.
3) Check whether the exhaust pump outlet is clogged to disable exhaust
1 Abnormal of exhaust pump
operation. Remove the cause of the clogging.
4) If the pump works by counter- rotation, check the connection of phases
of power supply referring to subsection 2.3.1.2. If it is wrong, change
phase together.
5) If above items have no problem, replace exhaust pump.
1) Measure resistance of three phases. If it shows some ohm, it is normal.
2) Check if three phases is not short-circuited measuring of resistance
2 Anomaly of exhaust pump
between each phase and frame earth. If the result is abnormal, replace
exhaust pump.
Missing phase of three phases Check if there is no lack of contact, cutting or missing phase because of
3
of AC200V faulty of install of cable to breaker.
Check if exhaust pump normally works removing hour meter, which is
4 Anomaly of hour meter connected to exhaust pump. If it so, hour meter has problem. Replace hour
meter.
- 91 -

Anomaly of connection or Check that connection and cutting of cable to thermal relay.
5
cutting of cable
If above items is normal and thermal relay is not tripped, interface PCB is
6 Anomaly of interface PCB
abnormal. Replace interface PCB.

DGN. No.972 (RPA) Exhaust pump start
DGN. No.961#3 (FAL) Exhaust pump alarm

4095 AMU ERROR SEQ1000 and after SEQ3000
(1) Content
This alarm is issued if the reading error occurs in analogue monitor unit (AMU).

Communication state of analogue monitor unit (AMU) is watched on CNC. When CNC detects error,

1 Failure of cable Check if cable is not cut or does not have contact failure.
2 Failure of AMU Replace analogue monitor unit.

4099 GAS PRES. NOT REACH SEQ2600 and after SEQ2000
(1) Content
When the gas pressure does not rise after the discharge start signal (HV ON) is turned on in
SEQ2700, or on the way of SEQ2600 from quick power saving , this alarm is issued.

(a) When the gas pressure rises in SEQ2700, the purge valve(V2) opens, at once, control valve
(CV1) all opens. Within the time of setting of parameter No.29383) from V2 and CV1 close,
when the actual gas pressure is less than ((Parameter No.29023) – (Parameter No.29381)), this
alarm is issued.
(b) When the actual gas pressure is less than ((Parameter No.15242) – (Parameter 15251)) within
the setting of parameter No.29404 on the way of SEQ3000(LSTR) from quick power saving,

1 Invalid parameter setting Check parameters Nos. 15001#3(NGC), 15247, 15248, No.15251,
No.29380, No.29381 and No.29383
2 Abnormal supply laser gas pressure Adjust the secondary pressure at the regulator on the gas cylinder so
setting that the pressure of laser gas supplied to the laser oscillator is
0.175MPa±0.025MPa (rating) as measured at the entry of the
oscillator.
3 Empty of gas cylinder Check if the gas cylinder is empty. It is so, replace the new one.
- 92 -

4 Valve close of gas cylinder To supply the laser gas, open the stop valve enough.

Parameter No.15001#3(NGC)
Specifies whether to preset the integral value of gas pressure control.
Parameters Nos.15242, 29023
Setting of the pressure in the tube during oscillation
Parameter No.15247 Pressure control integrator element preset value
Parameter No.15248 Tolerable amount by which the target gas pressure is not reached
Parameter No.15251 Intra-tube pressure in discharge start
Parameter No.29380 Target difference of purge valve in SEQ2700
Parameter No.29381 Target difference of pressure control valve in SEQ2700
Parameter No.29383 Gas pressure increase time limit in SEQ2700

4100 INVERTER 1 SEQ1500 and after SEQ1000
(1) Content
If the inverter used to power the turbo blower is abnormal, this alarm is issued.
When this alarm is issued, check the alarm message on the digital panel. At this time, do not turn off
the power to the inverter because the alarm will be reset if the power is turned off.

When the message shown “(3) Investigation and measure” is displayed on the digital panel of
inverter, DGN.No.962#0(IA1) becomes zero, and then, this alarm is issued.

When an inverter alarm is issued, a message as shown below appears on the digital panel of the
inverter. The causes of the inverter alarms are listed below.
Display : Exx.z
Exx : Cause of alarm (Message)
z : Sequence of inverter at alarm occurred
Causes of inverter alarms

Message Contents Cause
Overcurrent protection
E01
(during turbo blower constant-speed operation)
E02 Anomaly of turbo blower
(during turbo blower deceleration)
Abrupt acceleration or abrupt deceleration
E03
(during turbo blower acceleration)
E04 Overcurrent protection (others)
Invalid inverter setting and laser gas
E05 Overload protection pressure setting
Anomaly of turbo blower, laser gas
E06 Damping resistor overload protection
Inverter faulty
E07 Overvoltage protection
Increased supply voltage
Inverter faulty
E08 EEPROM error (NOTE)
Invalid inverter setting
E09 Insufficient voltage (voltage drop) Supply voltage drop
- 93 -
Message Contents Cause

E10 CT error
E11 CPU error
Inverter faulty
E12 External trip
E13 USP error
E14 Ground protection Turbo blower or wiring ground-fault
Overvoltage protection in receiving power (supply
E15 Increased supply voltage (In stopping)
voltage increase)
E16 Protection against instantaneous power failure Momentary loss of supply voltage
E20 Temperature increase when fan motor rotation falls Fan motor faulty
Inverter faulty
E21 Abnormal temperature
Higher environmental temperature
E23 Gate array communication error Inverter faulty
E24 Protection against missing phase Missing Phase of Power supply
E25 Abnormal main circuit
E30 IGBT error
E35 Thermistor error Inverter faulty
E36 Abnormal brake
E37 Emergency interception
E38 Overload protection in low rotation Invalid inverter setting or turbo blower faulty
E41 Modbus communication error
E60 to 69 Option 1 error 1 to 9
E70 to 79 Option 2 error 1 to 9
---- Standby state because of voltage shortage Not powered.
NOTE
If E8 (EEPROM error) occurs, check parameter settings.
Sequence of inverter when the alarm was issued

Indication Status Indication Status
Operation command is input with
0 Reset 5
frequency 0.
1 Stopped 6 Being started.
2 Being decelerated. 7 DC current damping state
3 Constant speed 8 Under overload control
4 Being accelerated. ---- --------
This inverter can display information on the most recently issued six alarms as shown below. Alarm
content is held if power off. The latest alarm is indicated on trip monitor 1 (d081).
d081 : Trip monitor 1
Below data <1> to <6> is recorded in every alarm monitor.

<1> Cause of alarm (See the table of causes of inverter alarms given previously.)
<2> Frequency (Hz) when the alarm was issued
<3> Output current (A) when the alarm was issued
<4> DC voltage (V) across P and N when the alarm was issued
<5> Cumulative operation time (hours) when the alarm was issued
<6> Cumulative power-on time (hours) when the alarm was issued
- 94 -
Refer to subsection 5.7.1 about display of trip monitor.
d081
(Function/FUNC
(1) E01.3
(Up/Down keys)
(2) 1000
(Up/Down keys)
(3) 28.0
(Up/Down keys)
(4) 280
(Up/Down keys)
(5) 15
(Up/Down keys)
(6) 18
(Up/Down keys)

1 Invalid parameter setting Check parameter No. 15240, 15241, 15242 and 29023.
This occurs by momentary power failure because of lightning or decline of
Decline of supply power voltage
2 three phases power voltage because of faulty of equipment. Check if
to inverter.
equipment has problem.
3 Use of un-specified laser gas 2) The actual composition ratio is different from the one described on
laser gas cylinder.
Replace the turbo blower. The possible causes of the faulty turbo blower
are listed below. Check them.
1) Damaged impeller
2) Failed bearing
4 Anomaly of turbo blower The bearing may have failed as a result of one or more of the following
causes:
1) Deteriorated oil
2) Foreign matter in the bearing
So, always replace the oil at the recommended intervals.
5 Anomaly of inverter fan Replace of inverter fan.
Anomaly of inverter of interface If above items has no problem, it is possible that failure of inverter of
6
PCB interface PCB. Replace inverter or interface PCB.

Parameter No.15240 Negative pressure in exhaust completion
Parameter No.15241 Intra-tube pressure in discharge start
Parameter No.15242, 29023 Tube pressure for oscillation
DGN. No.962#0 (IA1) Inverter alarm
- 95 -

4101 OUT OF FREQUENCY 1 SEQ1500 and after SEQ1000
(1) Content
This alarm is issued, if a frequency reached signal is not received within the time of the parameter
No.29397 + No.29388 after the turbo blower is started.

When DGN.No.962#1(AR1) does not become 1 within the time of (Parameter No.29397 +
No.29388) after turbo blower on, this alarm is issued.

1 Invalid parameter setting Check parameters No.29388, No.29397.
Check if the cable is securely connected to the inverter. If not, reattach
2 Cable connection abnormal
the cable.
Replace the turbo blower. The possible causes of the faulty turbo blower
are listed below. Check them.
1) Damaged impeller
2) Failed bearing
3 Anomaly of turbo blower The bearing may have failed as a result of one or more of the following
causes:
1) Deteriorated oil
2) Foreign matter in the bearing
So, always replace the oil at the recommended intervals.
If above items have no problem, start-up the oscillator, and then check if it
between terminal “11” and “CM2” is short-circuited until it passed
4 Anomaly of inverter
(parameter No.29397+ parameter No.29388) after start of turbo blower. If
it is not so, inverter has problem. Replace inverter.

Parameter No.29388 Inverter frequency wait limit
Parameter No.29397 Turbo blower start up time
DGN. No.962#1 (AR1) Frequency reach signal

4105 BLOWER MOTOR TEMP. SEQ1500 and after SEQ1000
(1) Content
This alarm is issued, if the temperature of the turbo blower motor winding becomes higher than the
permissible level.

When the turbo blower motor winding exceeds 140℃, DGN.No.962#5(OH1) or No.962#4(OH2)
becomes 0, this alarm is issued.

Check that the cooling water temperature is within the range from 25 to
Invalid setting of water
30°C.
1 temperature of chiller, or anomaly
When the actual water temperature is higher than the temperature setting
of chiller
of chiller, it is possible that chiller is failure. Call the chiller maker to fix.
- 96 -

Check if there is water jam in the water tube between distribution unit and
2 Shortage of water flow
turbo blower. . If it so, replace water tube.
Check if the cable between interface PCB and turbo blower is securely
connected. If not, reattach the cable.
If oil is filled with specific quantity and there is no water jam in water tube,
4 Temperature sensor abnormal temperature sensor is abnormal. If it so, replace turbo blower because
temperature sensor is installed in turbo blower.

Parameter No.15003#6 (TR1) Number of Turbo blower
DGN. No.962#5 (OH1) Turbo motor winding temperature 1
DGN. No.962#4 (OH2) Turbo motor winding temperature 2

4106 BLOWER OIL TEMP. SEQ1500 and after SEQ1000
(1) Content
When the signal from turbo blower oil sensor falls against setting, or turbo oil temperature rises, this
alarm is issued. When the oil sensor signal line is cut, this alarm is issued.

Temperature abnormal detection
(DGN No.2505) < (Parameter No.29331)
or
(DGN No.2506) < (Parameter No.29332)
Signal line cutting detection

(DGN No.2505) > 2000
or
(DGN No.2506) > 2000

1 Invalid setting of parameterCheck parameters No.15003#6(TR1), No.29330#0(OLS), No.29331, No.29332.
The oil level is lower than Replenish the turbo blower with oil until the oil level on the oil gauge is between
2
specified. H and L.
Invalid setting of water Check that the cooling water temperature is within the range from 25 to 30°C.
3 temperature of chiller, or When the actual water temperature is higher than the temperature setting of
anomaly of chiller chiller, it is possible that chiller is failure. Call the chiller maker to fix.
4 Invalid alarm level setting Referring to turbo oil temperature alarm detect function on section 6.5.
Check if there is water jam in the water tube between distribution unit and
turbo blower. . If it so, replace water tube.
If oil is filled with specific quantity and there is no water jam in water tube,
Temperature sensor
6 temperature sensor is abnormal. If it so, replace turbo blower because
abnormal
temperature sensor is installed in turbo blower.
In some cases, turbo blower is heated.
1) Turbo blower rotates in atmospheric pressure.
2) Internal gas leak becomes bigger, and internal gas pressure becomes
Abnormal temperature rising
7 higher.
of turbo blower
3) Setting value of tube pressure is too high.
4) Turbo oil is degraded.
Investigate above, treat it.
- 97 -

Check if the cable between interface PCB and turbo blower is securely
connected. If not, reattach the cable.

Parameter No.15003#6 (TR1) Number of Turbo blower
Parameter No.29330#0 (OLS)
Automatic sequence to set the alarm judge value of turbo blower oil temperature sensor
Parameter No.29331 Judge value of turbo 1 oil temperature alarm (VA1)
Parameter No.29332 Judge value of turbo 2 oil temperature alarm (VA2)
DGN. No.2505 TB1 OIL TEMP. SENSOR VOLTAGE
DGN. No.2506 TB2 OIL TEMP. SENSOR VOLTAGE

4107 MIRROR NOT INSTALLED SEQ2000 and after SEQ2000
(1) Content
In an oscillator in which a beam folding unit is installed, this alarm is issued if this unit is not
attached with a mirror holder. This alarm is for prevention of unnecessary laser radiation to the
outside of laser oscillator.

(a) When the beam folding unit is installed, DGN.No.962#(MA) becomes 0 by dis-mount of mirror,
cable cutting and failure of micro switch
(b) When the beam folding unit is not installed, if the connector CN219#A1-#A3 does not
short-circuited, DGN NO.962#3(MA) becomes 0

1 Confirmation of mirror installation Check the correct installing of mirror on the beam folding unit.
Check if the cable is securely connected to connector of beam
folding unit and connector CN219 of interface PCB. If not, reattach
the cable. Even if the beam folding unit is not installed, the CN219 of
interface PCB should be connected by short circuit connector.
Miss-treatment of CN219 on interface When beam folding unit is not installed, check if it between
3
PCB CN219#A1 and #A3 on interface PCB is short-circuited.
When micro switch is executed on and off, if terminals of micro
4 Anomaly of micro switch switch is always open, micro switch is abnormal. Replace beam
folding sensor unit.
Check that connection between micro switch and CN219. If it is
5 Cutting of cable
abnormal, replace beam folding sensor unit.

DGN. No.962#3 (MA) External Mirror

4108 QPS DISCHARGING During QPS to LSTR SEQ2000
(SEQ7800)
- 98 -
(1) Content
This alarm is issued if discharge doesn’t light when the state of QPS(Quick Power Saving) is
released.

(a) When the main discharge lighting judgment value which measured in sequence of the quick
power saving mode off is 0 or less, this alarm is issued.
(b) When the number that RFV is measured in sequence of the quick power saving mode off is
bigger than setting of parameter No.29410, this alarm is issued.

1 Invalid parameter setting Check parameters Nos. 29406, 29407, 29408, 29409 and 29410.
There are problems in the vacuum Remove external factor of gas leak, water leak, temperature of
2 system of the oscillator, and discharge cooling water and gas composition. When vacuum system is opened
doesn’t light easily. to atmosphere, do aging enough.

Parameter No.29406 Bias command initial value
Parameter No.29407 Step time of bias command
Parameter No.29408 Step value of bias command
Parameter No.29409 Discharge judge value
Parameter No.29410 Upper limit of discharge starting detection frequency

4115 BLOWER PARAMETER SEQ1000 and after SEQ1000
(1) Content
This alarm issued if the number of turbo blower is not set correctly.
(2) When parameter No.15003#6(TR1) is 0, if DGN No.962#4(OH2) becomes 1, it is judged as failure

of number of turbo blower, and then, this alarm is issued.

1 Invalid parameter setting Set the correct value to parameter No.15003#6(TR1)

Parameter No.15003#6(TR1) Number of turbo blower
DGN.No.962#4(OH2) Turbo motor winding temperature 2

4116 BLOWER OIL TIM LIMIT SEQ1000 and after SEQ1000

When the working time exceeds setting time (4000 hours) by 500 hour in maintenance screen, this
alarm is issued.
- 99 -

1 “ACT TIME” of BLOWER OIL exceeds Exchange the turbo blower oil, display Operating Time Screen, and
“SET TIME” (4000 hours) by 500 hours set 0 at the “ACT TIME” of BLOWER OIL. Then push the reset key

Parameter No.15160#2 (OAL) Time limit of Turbo blower oil exchange
NOTE
1 When alarm is not released, it is impossible to restart.
2 When parameter No.15160#2(OAL) is “0”, the alarm is not monitored.
3 SET TIME” in Operation Time Screen of Laser Maintenance Screen Function is
“0”, the alarm is not monitored.

4118 MCC ERROR SEQ1500 SEQ1000
(1) Content
This alarm is issued when the contact of MCC for laser power supply is closed by the deposit in
RUN ON.

When the contactor is closed at SEQ1500, DGN.No.960#2(MCE) becomes 0, and then, this alarm is
issued.

1 Deposit of MCC Replace MCC.
2 Cut the cable or contact failure 1) Check the connection of the cable between CNL1 on interface
PCB and machine, and if this cable is not cut. If it has failure,
replace the cable.
2) Check the connection of the cable between CN239 on interface
PCB and CN240 on safety circuit PCB, and if this cable is not cut.
If it has failure, replace the cable.
3) Check the connection of the cable between CN245#1,#3 on safety
circuit PCB and assistant contact of MCC for each laser power
supply, and if this cable is not cut. If it has failure, replace the
cable.
3 Anomaly of Safety circuit PCB Check if DC24V is added to assistant contact of MCC for each laser
power supply. If it is not so, replace the safety circuit PCB.
4 Anomaly of Interface PCB If there are no problem on above items, and if DGN.No.960#2(MCE)=0
at SEQ1500, replace the interface PCB.

DGN.No.960#2(MCE) MCC welding detector signal

4119 A/D CONVERTER–4 SEQ1000 and after SEQ3000
- 100 -
This alarm is issued when the A/D converter on the Interface PCB does not return the conversion
completion signal in the specified time after the start of conversion. The A/D converter is designed
to read gas supply pressure, air pressure, cooling water flow, turbo oil level and inverter current
signal..

Short circuit of DC24V line on On machine side, check if there is failure of PCB which generate
1
machine side DC24Vk or there is short circuit on cable for DC24V
2 Breaker trip Check if the breaker for DC24V trips on machine side.
Short circuit of DC24V between
3 Check if DC24V between CNC and oscillator short-circuits.
CNC and laser oscillator
4 Fuse blowing Replace the fuse.
5 Failure of I/O PCB Replace I/O PCB.
6 Anomaly of Interface PCB Replace the Interface PCB.

4120 EXT,BEAM FOLDING MIRROR SEQ2000 and after SEQ2000
OH
(1) Content
In an oscillator in which a beam folding unit is installed, this alarm is issued when the temperature
of the beam folding mirror exceeds a preset maximum. This alarm is for prevention of unnecessary
laser radiation to the outside of laser oscillator.

(a) When the beam folding unit is installed, if the temperature switch on beam folding unit detects
that it is bigger than 90 ℃ , if cable is cut, or if temperature switch is failure, DGN
NO.962#2(MT) becomes 0
(b) When the beam folding unit is not installed, if contact #2-#3 on connector CN219 of interface
PCB is not short-circuited, DGN NO.962#2(MT) becomes 0

Contamination on the surface of the Clean the beam folding mirror. If this alarm recurs after the beam
1
beam folding mirror folding mirror is cleaned, replace the mirror.
Check if the cable is securely connected to connector of beam folding
unit and connector CN219 of interface PCB. If not, reattach the cable.
Even if the beam folding unit is not installed, the CN219 of interface
PCB should be connected by short circuit connector.
Miss-treatment of CN219 on When beam folding unit is not installed, check if it between CN219#B1
3
interface PCB and #B3 on interface PCB is short-circuited.
Check if there is water jam in the water tube between distribution unit
and turbo blower. . If it so, replace water tube.
Temperature switch acts when temperature is higher than specified
5 Anomaly of temperature switch
one (90℃). If it acts by lower, replace beam folding sensor unit.
Check that connection between temperature switch and CN219. If it is
6 Cutting of cable
abnormal, replace beam folding sensor unit.

DGN. No.962#2 (MT) Mirror Temperature
- 101 -

4121 CHILLER WATER FLOW-1 SEQ1500 and after SEQ1000
(1) Content
This alarm is issued when the cooling water shortage takes place.

(DGN No.2500) < (Flow rate of alarm setting)

1 Invalid setting of parameter Check parameters NO.29340, No.29341, No.29342

1) Decline of water flow due to choke of water piping cause. Therefore,
Clean the piping.
2 Shortage of cooling water 2) Check that the separation between the outside optical system and the
laser oscillator is normal. Then adjust the water flow rate so that
normal flow rate is supplied to the laser oscillator.
3 Anomaly of sensor cable Check the connection of each cable.
Anomaly of adjustment of flow
4 Execute adjustment of flow sensor unit according to subsection 5.10.3.
sensor unit
Water jam in flow sensor unit or If there is water jam in flow sensor, remove it. If alarm is issued after this
5
anomaly of it treatment, replace flow sensor unit.

Parameter No.29340 WTR FLW 1 COE.A
Parameter No.29341 WTR FLW 1 OFST B
Parameter No.29342 WTR FLW 1 ALARM
DGN.No.2500 WATER FLOW RATE 1

4122 CHILLER WATER FLOW-2 SEQ1500 and after SEQ1000
(1) Content
This alarm is issued when the cooling water shortage takes place.

(DGN No.2501) < (Flow rate of alarm setting)

1 Invalid setting of parameter Check parameters NO.29343, No.29344, No.29345
1) Decline of water flow due to choke of water piping cause. Therefore,
Clean the piping.
2 Shortage of cooling water 2) Check that the separation between the outside optical system and the
laser oscillator is normal. Then adjust the water flow rate so that
normal flow rate is supplied to the laser oscillator.
3 Anomaly of sensor cable Check the connection of each cable.
Anomaly of adjustment of flow
4 Execute adjustment of flow sensor unit according to subsection 5.10.3.
sensor unit
- 102 -

Water jam in flow sensor unit or If there is water jam in flow sensor, remove it. If alarm is issued after this
5
anomaly of it treatment, replace flow sensor unit.

Parameter No.29343 WTR FLW 2 COE.A
Parameter No.29344 WTR FLW 2 OFST B
Parameter No.29345 WTR FLW 2 ALARM
DGN.No.2500 WATER FLOW RATE 2

4125 LASER GAS SPEC/MIX SEQ2600 and after SEQ1000
(1) Content
The composition(mixture) of laser gas is not correct for set processing mode.

When the actual gas pressure reaches to value of parameter No.29046 in gas pressure control, if DCI
(DGN.No.926 to No.940) is bigger than value of parameter No.29049, this alarm is issued.
If parameter No.29046, No.29047 or No.15008#5(DCW) is zero, this alarm is not detected.

1 Invalid setting of parameter Check parameters NO.15008#5(DCW), No.29046, No.29047.
2 Use of un-specified laser gas 2) The actual composition ratio is different from the one described
on laser gas cylinder.
subsection 2.3.2
Check that the cooling water temperature is within the range from 25
to 30°C.
Invalid setting of water temperature of
4 When the actual water temperature is higher than the temperature
chiller, or anomaly of chiller
setting of chiller, it is possible that chiller is failure. Call the chiller
maker to fix.
component.
replace it.

Parameter No.15008#5 (DCW) Power calibration
Parameter No.29046 In-tube pressure to check gas spec.
Parameter No..29047 DCI maximum value to check gas spec.
- 103 -
“Processing mode change function”

4127 WARM UP ERROR SEQ2600 and after SEQ1000
(1) Content
In internal discharge extension of calibration preparation 2C, when the cooling water temperature is
less than 20℃ after executing of warm-up sequence for specified time, this alarm is issued.

When the number of internal discharge extension of calibration preparation 2C exceeds parameter
No. 29524, if cooling water temperature is less than 20℃, DGN.No.961#1(CAT) becomes 0,
and then, this alarm is issued.
“Calibration preparation 2C” is one of the warm-up sequence, which is automatically executed in
laser start-up.

Check that the cooling water temperature is within the range
1 Invalid setting of water temperature of chiller
from 25 to 30°C.
When the actual water temperature is different from the
2 Anomaly of chiller temperature setting of chiller, it is possible that chiller is
failure. Call the chiller maker to fix.
Check if cables between low temperature sensor and
3 Cut the cable or contact failure interface PCB is connected certainly, if it is not so, connect it
certainly. Also, check if cable is cut.
When water temperature is higher than 20℃, if resistance of
4 Anomaly of low temperature sensor low temperature sensor exceeds 13K ohm, low temperature
sensor is faulty, so replace it.

DGN. No. 961 #1 (CAT) Cooling water temperature

4128 GAS LEAK RATE EXCESS SEQ5100 SEQ1000
(1) Content
This alarm is issued if the rise in the sampled gas pressure is bigger than leak judge value on
automatic leak check function.

(DGN.No.957) – (DGN.No.954) > (Parameter No.15156)

1 Invalid parameter setting Check parameter No.15156.
- 104 -

1) Check if any joints in the gas circulating system are
loose. If a loose joint is found, tighten the joint firmly.
2) Check if any components of the gas circulating system
are cracked. If a cracked component is found, replace
that component.
3) Check that the discharge tubes are free from any hole or
crack and that the O-rings are not degraded. If a
cracked or damaged component is found, replace it.
4) Check if trigger electrode or O-rings of circulating
system is degraded. If it is degraded, replace it.
5) Check if the mirrors are damaged. If it is damaged,
replace it.
6) Check if gas tube and gas ferrule is damaged. If it is
damaged, replace it.

Parameter No.15156 Leak judge value
DGN. No.954 – 957 Negative pressure leak check
“Automatic Leak Check Function”

4129 SHUTTER OPEN IN DISCHARGE SEQ3000 SEQ3000
(1) Content
This alarm is issued if the shutter opened during the internal discharge.

When shutter has opened in internal discharge command by soft-key [DISC.2] on laser tuning screen,

Check if DC24V is added to rotary solenoid of shutter unit. If
1 Failure of interface PCB DC24V is always added, interface has the failure. Replace
interface PCB.

“Maintenance screen”

4132 PARAMETER WAS CHANGED SEQ2000 and after SEQ2000
(1) Content
When parameters about discharge are changed, or processing mode is changed in power saving
mode, this alarm is issued.

(a) After SEQ2000, when parameter No.15223, No.15242, No.29022, No.29023, No.29300 to
No.29316 are changed, this alarm is issued.
(b) In SEQ6000 to SEQ7800, when processing mode is changed, this alarm is issued.
- 105 -

Before turning on the discharge start signal (HV ON), press
1 Changing parameters
the <RESET> key to release this alarm.

Parameter No.15027 Power supply selection
Parameter No.15223, No.29022 Bias command
Parameters No.15242, No.29023 Tube pressure for oscillation
Parameter No.29300#0 (PAJ) Laser power supply adjustment mode
Parameters No.29301, 29303, 29305, 29307, 29309, 29311, 29313, 29315
Laser power supply offset
Parameters No.29302, 29304, 29306, 29308, 29310, 29312, 29314, 29316
Laser power supply gain

4135 PULSE PFB DATA ERROR SEQ1000 SEQ1000
(1) Content
Reading the table data of the pulse power feed back from the memory card or the reader puncher
interface was stopped because of the data error.

1 Invalid parameter setting Check parameter No.29010, No.29011, No.29012.

Parameter No.29000#0(PFB) Pulse power feedback 0: disable 1:enable
Parameter No.29010 Laser model applied to data table
Parameter No.29011 Model code
Parameter No.29012 Edition

4400 EVACUATION IMPOSSIBLE SEQ5100 SEQ1000
(1) Content
During negative pressure leak check, or after positive pressure leak check finished, if the actual gas
pressure is bigger than the value of parameter No.15242 in all valve close state, this alarm is issued.

When F224#3(AVCL)=1, if (DGN No.905) > (Parameter No.15242), this alarm is issued.

- 106 -

replace it.
possible that failure of output voltage of gas pressure sensor (Example:
3 Anomaly of gas pressure sensor
always 10V). Check it by LTP check terminal on interface PCB, if it is
abnormal, replace it.
If above items have no problem, execute negative leak check removing
connector CP85 and CN52 on gas control PCB. At this time, if alarm is
4 Anomaly of valves on charge unit
issued, gas supply valve (V1) or purge valve (V2) is faulty. So, replace
charge unit.

Parameter No.15155 Evacuation time in Leak check sequence
Parameter No.15242 Tube pressure for oscillation
DGN.No.905 Actual gas pressure
F224#3(AVCL) Valve close signal 0:Normal state 1: All valve closed state

4401 POSITIVE PRES. LEAKAGE SEQ5300 SEQ1000
(1) Content
If leak rate in positive pressure leak check exceed the threshold, this alarm is issued.

During positive pressure leak check, if (DGN No.2516) – (DGN No.2513) > (Parameter
No.29353), this alarm is issued.

replace it.
- 107 -

If above items have no problem, remove connector CP85 and CN52 on
gas control PCB during executing positive leak check At this time, if
alarm is issued, gas supply valve (V1) or purge valve (V2) is faulty. So,
replace charge unit.

Parameter No.29352 Positive pressure leak judge time
Parameter No.29353 Positive pressure leak judge value
DGN. No.2502 laser tube pressure
DGN. No.2517 to 2520 Positive pressure during leak check
“Automatic Leak Check Function”

4402 PRESSURIZING IMPOSSIBLE SEQ5300 SEQ1000
(1) Content
After actual gas pressure arrives atmospheric pressure in positive pressure leak check, if the time,
which arrives at positive pressure setting, exceeds positive pressure time limit, this alarm is issued.

In SEQ5300, if (Time from atmospheric pressure to positive pressure setting) > (Parameter
No.29351), this alarm is issued.

replace it.
If above items have no problem, purge valve (V2) is faulty. So, replace
charge unit.

Parameter No.29350 Positive pressure setting
Parameter No.29351 Positive pressure time limit

4403 POSITIVE PRES. LIMIT SEQ5200 SEQ1000
(1) Content
If the tube pressure exceeds the threshold (60kPa) in positive pressure leak check, this alarm is
issued.
- 108 -

(DGN No.2502) > 60

Remove connector CP85 and CN52 on gas control PCB during
1 Anomaly of valves on charge unit executing positive leak check At this time, if alarm is issued, gas supply
valve (V1) or purge valve (V2) is faulty. So, replace charge unit.


During laser power supply
4404 ABNORMAL LASER PSU ADJ. automatic adjustment SEQ2000
function

This alarm is issued when laser power supply automatic adjustment function is did not end normally.

When number of DGN.No2509 is 3,4,5,7,9,check for setting of VR11 and
VR13 of laser power supply. If setting of laser power supply is different, adjust
Anomalous setting of laser
1 it again. Thereafter, when you start up the oscillator again, the values of
power supply
parameters No. 29301 to 29316 are set before laser power supply automatic
adjustment function.
When number of DGN.No2509 is 2 or 8,check for the pressure of the laser
The pressure of the laser gas is steady at the parameters No. 15242. Thereafter, when you start up the
2
gas is not steady. oscillator again, the values of parameters No. 29301 to 29316 are set before
laser power supply automatic adjustment function.
Check whether the values of parameters No. 29361, 29362, 29363, 29364,
29365, 29366, 29367, 29368, 29369, 29370, 29371, 29372, 29375, 29376,
29377 and 29378 are set as indicated in the attached parameter table. If a
different value is set, set the value specified in the datasheets.

Parameter No.29301 to 29316 Output command parameters to laser power supply
Parameter No.29360 Laser power supply automatic adjustment 0:not execute 1:execute
Parameter No.29361 to 29372, 29375 to 29378
Parameters for laser power supply automatic adjustment
Parameter No.15242 Setting of the pressure in the tube during oscillation
DGN.No.905 Actual gas pressure
DGN.No.2509 Laser power supply adjustment status.
“Laser power supply automatic adjustment function”
- 109 -
4.3 MAJOR FAULTS
4.3.1 Laser Output Just after Switch On Is Low

(1) The cooling water temperature is not normal, although the chiller unit is operating. This
phenomenon may be caused when the ambient temperature is low. In such a case, the specified
temperature will be set in five to ten minutes after the unit starts. So, perform activation again.
(2) Slight leakage exists in the tube between laser oscillator and gas cylinder. If the laser output in the
first run after a long halt is low and becomes normal after the second run, slight leakage may be
present in the tube between the laser oscillator and gas cylinder. (See Subsection 3.3.2.)
Check for leakage in the gas piping system, for looseness in joints, and for any crack in the tube. If
any problem exists, eliminate the leakage, additionally tighten the joint, or replace the tube.
4.3.2 Circuit Breaker for Cooling Fan, Solenoid Valve, and 24V
Power Supply Trips
If a load short-circuits such as a burn-in of a fan motor coil occurs in the cooling fan, solenoid valve, or
24V power supply, the circuit breaker (NBK1) trips. Replace the component in which the load
short-circuit occurred, and check the cabling to the component. Replace a cable if it is abnormal.
4.3.3 Motor starter of Exhaust Pump Trips Thermally

Possible causes are listed below. Take appropriate action.
Check if the thermal setting of the electromagnetic contactor or
1 Anomalous setting of thermal relay motor starter for the exhaust pump is made correctly. If not so,
correct it. (Setting value B= 5.5A)
1) Check if the room temperature is lower than 5 degree. If so,
raise it.
2 Too high viscosity of oil
2) Check the deterioration of oil, which causes the viscosity
increase. If so, change it.
The normal direction is counterclockwise when seen from the side
3 Reverse rotation direction of pump
of motor fan. If not so, correct it at the terminal.
During pump operation, check the oil level through the oil check
4 Excessive oil window. If the oil level is between L and H, the oil level is
regarded as normal.
5 Undesignated oil is used. Use the designated oil.
6 Exhaust filter choked. Replace it.
7 Loosened terminal of connecting cable Fix it tightly.
8 Vane damaged Replace the exhaust pump.
4.3.4 Main Breaker Trips

Check for loose terminals. If the circuit breaker is burned black,
1 Damaged circuit breaker
replace it.
Check whether the power magnetics cabinet in the oscillator is
abnormal. Turn off the circuit breakers connected to the power
2 Beyond rated current
supply and inverter sequentially to determine the unit that caused
excessive current.
- 110 -

When the circuit breaker has an electric leakage breaker function,
there is an electric leakage in the oscillator. Locate the leakage,
3 Electric leakage
such as the power supply, turbo blower, or fan, and replace the
faulty component.
4.3.5 Excessive Laser Gas Consumption

Ascertain the following.
Gas leakage between gas cylinder and 1) Anomalous mounting of regulator.
1
oscillator 2) Anomalous connection between tube and regulator.
3) Anomalous connection of gas inlet fitting of oscillator.
Make adjustments according to the adjustment method described
2 Anomalous adjustment of gas controller
in Chapter 5.
When there is no gas leakage between the gas cylinder and
oscillator and the laser gas consumption is still excessive even
3 Turbo blower abnormal after the adjustment valve of the gas controller is completely
closed, the turbo blower may be faulty. Replace the turbo
blower.
- 111 -
5.UNITS B-70475EN/01
5 UNITS
This chapter explains the units inside the oscillator.
The following provides information that you should bear in mind when performing replacement work.
WARNING
1 Before replacing a unit, be sure to turn off the main power supply to the control
unit. In addition, perform replacement work in a safe place where there is no
machine operating nearby.
2 When handling a heavy component or unit, use a support device such as a
crane not to apply excessive load to the maintenance personnel. Incorrect
handling can results in serious injury to the personnel.
CAUTION
Note that components inside the oscillator heat up. If you have to touch a heated
component, wear heat-proof gloves and so forth to protect you.
Before starting work, read "SAFETY PRECAUTIONS" in this manual.
Chapter 5, “UNITS” consists of the following contents:
5.1 UNIT CONFIGURATION ...............................................................................................................113

5.2 LASER POWER SUPPLY UNIT.....................................................................................................113
5.3 MATCHING BOX............................................................................................................................126
5.4 DISCHARGE TUBE ........................................................................................................................126
5.5 TRIGGER ELECTRODE .................................................................................................................128
5.6 TURBO BLOWER ...........................................................................................................................129
5.7 INVERTER .......................................................................................................................................131
5.8 EXHAUST PUMP ............................................................................................................................138
5.9 GAS CONTROLLER .......................................................................................................................138
5.10 THE WATER DISTRIBUTION UNIT ............................................................................................144
5.11 SHUTTER UNIT ..............................................................................................................................148
5.12 BEAM ABSORBER .........................................................................................................................150
5.13 GUIDE LASER (SEMICONDUCTOR LASER) .............................................................................151
5.14 FAN...................................................................................................................................................152
5.15 POWER SENSOR ............................................................................................................................154
5.16 THE DEW SENSOR.........................................................................................................................155
5.17 PCB ...................................................................................................................................................155
5.18 OIL MIST DECOMPOSING ELEMENT ........................................................................................157
5.19 GAS DUST COLLECTION UNIT...................................................................................................159
5.20 LOW TEMPERATURE SENSOR UNIT.........................................................................................159
5.21 OXYGEN SENSOR UNIT ...............................................................................................................160
5.22 WARNING LIGHT ..........................................................................................................................161
5.23 GAS FITTING AND WATER FITTING .........................................................................................162
5.24 ALIGNMENT OF THE RESONATOR ...........................................................................................166
5.25 POWER CALIBRATION METHOD .............................................................................................175
5.26 ALIGNMENT OF THE BEAM FOLDING UNIT
(C2000i-C, C4000i-C SHORT OPTICAL PATH LENGTH TYPE) ...............................................175
5.27 HEAT EXCHANGER.......................................................................................................................176
- 112 -
B-70475EN/01 5.UNITS
5.1 UNIT CONFIGURATION

The input unit consists of power control cabinet, safety circuit PCB, and 24V power supply.
5.1.1 C2000i-C INPUT UNIT
QF1 QF2 KM1 To Laser PSU No.1
QF3 KM2 To Laser PSU No.2
QF4 KM3 To Inverter
QF6 KM5 To Exhaust pump
Z110
QF5 KM4 To Fan
Safety circuit PCB To Gas controller
24V PSU To interface PCB
QF1: A60L-0001-0505#B150BEJ1
QF1 QF2, QF3: A60L-0001-0464#A050
QF4: A60L-0001-0464#A040
QF5: A60L-0001-0464#B010
QF6: A60L-0001-0493#6P3
Safety circuit PCB
KM1-KM3: A58L-0001-0539#BSN38B
KM4,KM5: A58L-0001-0540#BSN10BB
Assistance contactor for KM1,KM2:
24V PSU
A58L-0001-0539#BAX202
Assistance contactor for QF6:
Z110 A60L-0001-0493#W1A
QF2 QF3 QF4 QF5
QF6 Z110: A04B-0800-D009
24V PSU: A20B-1005-0124
Safety circuit PCB: A16B-1300-0300
Thermal setting of QF6: 5.5A
KM1 KM2 KM3 KM4 KM5
Fig.5.1.1(a) The structure of INPUT UNIT (C2000i-C Standard)
- 113 -
QF4 KM3 To Inverter
Z110
QF5 KM4 Z102 To Fan
QF7 TC1 QF8
24V PSU To Interface PCB
QF1: A60L-0001-0512#D150EJ3
QF1 QF2, QF3: A60L-0001-0464#A050
QF4: A60L-0001-0464#A040
QF5: A60L-0001-0464#B010
QF6: A60L-0001-0493#6P3
Safety circuit PCB
QF7: A60L-0001-0389#FT
QF8: A60L-0001-0314#GBA
KM1-KM3: A58L-0001-0539#BSN38B
24V PSU
KM4,KM5: A58L-0001-0540#BSN10BB
Assistance contactor for KM1,KM2:
Z110 A58L-0001-0539#BAX202
QF2 QF3 QF4 QF5
QF6 QF7 QF8 Assistance contactor for QF6:
A60L-0001-0493#W1A
Z110: A04B-0800-D009
Z102: A70L-0001-0064#10
TC1: A44L-0001-0162
24V PSU: A20B-1005-0124
KM1 KM2 KM3 KM4 KM5
Z102 TC1 Thermal setting of QF6: 5.5A

Fig.5.1.1(b) The structure of INPUT UNIT (C2000i-C CE Marking)
- 114 -
Z110
QF6 QF8 KM7 To Exhaust pump
KM5 To Inverter
QF7 KM6 To Fan
QF1: A60L-0001-0508#B225BEJ1
QF2-QF5: A60L-0001-0464#A050
QF6: A60L-0001-0464#A040
QF1 QF7: A60L-0001-0464#B015
QF8: A60L-0001-0493#6P3
Safety circuit PCB
KM1-KM5: A58L-0001-0539#BSN38B
KM6-KM7:A58L-0001-0540#BSN10BB
Assistance contactor for KM1-KM4:
24V PSU
A58L-0001-0539#BAX202
Z110 A60L-0001-0493#W1A
QF2 QF3 QF4 QF5 QF6 QF7
Z110: A04B-0800-D009
QF8
24V PSU: A20B-1005-0124
KM1 KM2 KM3 KM4 KM5 KM6 KM7
- 115 -
Z110
QF6 QF8 KM7 To Exhaust pump
KM5 To Inverter
QF7 KM6 To Fan
Safery circuit PCB To Gas controller
Transformer unit
QF9 TC1 QF10
QF1: A60L-0001-0512#D225EJ3
QF2-QF5: A60L-0001-0464#A050
QF6: A60L-0001-0464#A040
QF7: A60L-0001-0464#B015
QF1
QF8: A60L-0001-0493#6P3
Safety circuit PCB QF9: A60L-0001-0389#FT
QF10: A60L-0001-0314#GBA
KM1-KM5: A58L-0001-0539#BSN38B
24V PSU KM6-KM7:A58L-0001-0540#BSN10BB
A58L-0001-0539#BAX202
Z110
QF2 QF3 QF4 QF5 QF6 QF7 Assistance contactor for QF8:
QF8 A60L-0001-0493#W1A
Z110: A04B-0800-D009
24V PSU: A20B-1005-0124
KM1 KM2 KM3 KM4 KM5 KM6 KM7 Thermal setting of QF8: 5.5A
- 116 -
TC1 TC1: A44L-0001-0162

QF9: A60L-0001-0389#FT
QF10: A60L-0001-0314#GBA
QF9 QF10
Fig.5.1.2(c) The structure of Transformer unit (C4000i-C CE Marking)
QF8 KM7 To Inverter
Z110
QF9 KM9 To Fan
- 117 -
QF1: A60L-0001-0494#B300AAA1
QF2 QF3 QF4 QF5 QF6 QF7 QF9
QF8 QF2-QF7: A60L-0001-0464#A050
QF8: A60L-0001-0425#K060
QF9: A60L-0001-0464#B015
QF10: A60L-0001-0493#6P3
QF1 KM1-KM7: A58L-0001-0539#BSN38B
KM1 KM2 KM3 KM4 KM5 KM6 KM7 QF10
KM8, KM9:A58L-0001-0540#BSN10BB
A58L-0001-0539#BAX202
A60L-0001-0493#W1A
Z110
Z110: A04B-0800-D009
KM8 KM9
QF8 KM7 To Inverter
Z110
QF9 KM9 To Fan
QF11 TC1 QF12
- 118 -
QF2 QF3 QF4 QF5 QF6 QF7 QF9

QF1: A60L-0001-0494#B300AA1
QF8
QF2-QF7: A60L-0001-0464#A050
QF8: A60L-0001-0425#K060
QF9: A60L-0001-0464#B015
QF10: A60L-0001-0493#6P3
QF1 QF11: A60L-0001-0389#HT
KM1 KM2 KM3 KM4 KM5 KM6 KM7 QF10 QF12: A60L-0001-0314#GCA
KM1-KM7: A58L-0001-0539#BSN38B
KM8, KM9:A58L-0001-0540#BSN10BB
A58L-0001-0539#BAX202
Z110
QF12 KM8 KM9 A60L-0001-0493#W1A
QF11 Z110: A04B-0800-D009
TC1 TC1: A44L-0001-0161

24V PSU:A20B-1005-0124
24V PSU
Safety circuit PCB
24V PSU
Fig.5.1.3(c) The structure of INPUT UNIT2 (C6000i-C Standard, CE Marking)
5.1.4 Replacement Method
5.1.4.1 Breaker
(5) Stop the laser oscillator with normal procedure, and turn off the main circuit breaker.
(6) Remove the cables connected to the breaker.
(7) Remove the breaker from the rail, pulling down the knob under the breaker with the screw drivers
(8) Install a new breaker on the rail with below procedure.
(a) Insert the groove of the breaker to the rail seeing Fig.5.1.4.1.
(b) Attach the groove of the breaker to the rail, pulling down the knob under the breaker with the
screwdrivers.
(9) Connect the removed cables in (2) to a new breaker.
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Knob Groove
Pull down
(a) (b) (c)

Fig.5.1.4.1 Replacement of the breaker
5.1.4.2 Motor starter

(2) Remove the cables connected to the motor starter.
(3) Remove the motor starter from the rail, pulling down the knob under the motor starter with the screw
drivers
(4) Install a new motor starter on the rail with below procedure
(a) Insert the groove of the motor starter to the rail seeing Fig.5.1.4.2.
(b) Attach the groove of the motor starter to the rail, pulling down the knob under the motor starter
with the screwdrivers.
(5) Connect the removed cables in (2) to a new motor starter.
Knob
Pull down
(a) (b)
Fig.5.1.4.2 Replacement of the motor starter
5.1.4.3 Magnetic contactor

(2) Remove the cables connected to the magnetic contactor.
(3) Remove the magnetic contactor from the rail, pulling down the knob under the magnetic contactor
with the screw drivers
(4) Install a new magnetic contactor on the rail with below procedure.
(a) Insert the groove of the magnetic contactor to the rail seeing Fig.5.1.4.3.
(b) Attach the groove of the magnetic contactor to the rail, pulling down the knob under the
magnetic contactor with the screwdrivers.
(5) Connect the removed cables in (2) to a new magnetic contactor.
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Knob
Pull down
(a) (b)
Fig.5.1.4.3 Replacement of the magnetic contactor
5.2 LASER POWER SUPPLY UNIT

Spec. No. of Laser power supply unit: A14B-0082-B211 C2000i-C, C4000i-C (Standard)
C6000i-C (Standard)
A14B-0032-B212 C4000i-C (CE Marking)
C6000i-C (CE Marking)

5.2.1.1 Replacing the power supply unit
(1) Turn off the power to the CNC, and turn off the main circuit breaker of the oscillator. Turn off the
power to the chiller unit.
(2) Remove the water fittings, and power and signal cables.
Water fitting
XT21
CP73
Ground
CP51 XT22
LED Water fitting
Water coupler (Plug):

A97L-0201-0927#2P-N10
Bolts
Water coupler (Socket):

A97L-0201-0927#2S-N10
- 121 -
(3) Remove the bolts for mounting the power supply unit, and pull out the power supply unit while
sliding it right and left.
(4) After replacing the power supply unit with a new one, tighten the mounting bolts, and attach the
water fittings and the power and signal cables.
When attaching the water fittings, loosen portion A shown in the figure, determine the orientation of
the fittings, tighten portion A by your fingers, and then additionally tighten the portion by 60° with a
wrench.
(5) Then, make power supply adjustments. (See Subsection 5.2.2.)
5.2.1.2 Replacing a high-speed diode

(1) Turn off the power to the CNC, and turn off the main circuit breaker of the oscillator.
(3) Remove the mounting screws on the top plate of the laser power supply unit, and remove the top
plate.
(4) As shown in Fig. 5.2.1, you can see the two RF FET PCBs and the diode unit.
(5) Check for a damaged element, and replace it.
(a) Checking the high-speed diode
Measure the resistance across the anode and cathode of the diode with a tester. If the resistance
is several ohms, the diode is regarded as being damaged. (The resistance of a normal diode is
several mega-ohms.)
To measure the resistance of a diode, touch the positive probe of the tester to the cathode of the
diode, and touch the negative probe to the anode.
(b) Remove the damaged diode, and replace it.
(6) After diode replacement, power supply adjustment is unnecessary.
- 122 -
RF FET PCB2: A20B-1007-0150 RF FET PCB 1: A20B-1007-0140

SD SD
4 3
D2 2 1
Diode unit
D2 2 1
D1
4 3
Diode unit Cathode Anode
D1
K1 A1
K2 A2
DS Connector side DS High speed diode module:
STEPUP TRANS PCB: A20B-1008-0150 A50L-2001-0439
Fig. 5.2.1 Layout of diodes and RF FET PCBs
5.2.1.3 Replacing an RF FET PCB

(1) Turn off the power to the CNC, and turn off the main circuit breaker of the oscillator.
(3) Remove the mounting screws on the top plate of the laser power supply unit, and remove the top
plate.
(4) As shown in Fig. 5.2.1, you can see the two RF FET PCBs and the diode unit.
(5) Check for a damaged element, and replace it.
(a) Checking an RF FET PCB
Measure the resistance across check pins D and S shown in Fig. 5.2.1. If the resistance is
several kilo-ohm, the PCB is regarded as being damaged. (The resistance of a normal RF FET
PCB is several tens kilo-ohms to several mega-ohms.)
(6) After PCB replacement, power supply adjustment is unnecessary.
5.2.2 Adjustment Method

Laser power supply is adjusted by laser power supply automatic adjustment function. The sequences of
laser power supply automatic adjustment function consist of two steps (The base adjustment and The
power supply output (DCW) adjustment). For the base adjustment, it finds the offset parameter of laser
power supply where the trigger discharge is maintained for the discharge beginning. For the power supply
output (DCW) adjustment, it finds the gain parameter of laser power supply where the power supply
output (DCW) come to adjustment target value (parameter No.29374), when laser power command is
parameter No.29373.
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5.2.2.1 Preparation
To adjust the laser power supply by the automatic adjustment function, the initial setting of VR11 for the
base discharge adjustment and VR13 for he maximum power supply output adjustment are necessary
beforehand. When the laser power supply is shipped, it is set usually. The laser power supply is adjusted
according to the following procedures if not set.
(1) Prepare the following tools:

(a) A cable to be connected to CN18 to measure RFI. (Cable specification: A04B-0800-K147)
* See NOTE1
(b) Precise screwdriver for trimmer adjustments
(c) Digital tester
(2) Check that S2 jumper pin setting (setting of the VR13 adjustment range) is “B201”.
(3) Check that S5 jumper pin setting (setting of the matching box temperature sensor) is “USUAL”.
* The S2 and S5 settings are initialized at the shipment of the laser power supply
(4) Connect the cable for measuring RFI to CN18.
(5) Rewrite the following parameters: (After the end of adjustment, return the parameters to the original
values.)
CNC parameters Settings
1 Parameter No.15000#4(CLB), parameter No.15201 (Output compensation disable) 0
2 Parameter No.15000#3(BMO) Beam on only with beam off is valid 1
Parameter No.15006#5(PCN) 0
3
Rewrites the power calibration factor with 1024 when power calibration is not performed.
4 Parameter No.15208 (Laser power feedback disable) 0
Parameters
5 Parameters No.15207, 15210, 15212(Maximum output power clamp)
No.15308
6 Parameter No.15223 (Bias command value) 2850
7 Parameter No.15213 (Enhanced pulse disable) 32000
8 Parameter No.29000#0 (PFB) (Pulse power feedback control function is disable) 0
9 Parameter No.29016#0 (CTA) (High power mode) 0
10 Parameter No.29395#0 (PWC) (Laser power check disable) 0
Parameter No. 29301,29303,29305,29307,29309,29311,29313,29315
11 2048
Offset of Laser power supply
Parameter No.29302,29304,29306,29308,29310,29312,29314,29316
12 1561
Gain of Laser power supply
* The offset and gain parameter change only the corresponding the laser power supply.
(6) Start up to the state of the base discharge of sequence 3000(LSTR).

(7) Turn Trimmer VR11 of the corresponding laser power supply and adjust RFI to “700mA”.
(8) Perform internal discharge with the laser power command of parameter No.15308 and duty 100%.
(9) Turn Trimmer VR13 of the corresponding laser power supply and adjust RFI to “1600mA”.
(10) Disconnect the cable.
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5.2.2.2 Perform laser power supply automatic adjustment

(1) Set the parameter in the following table. Sets parameter No.29360 to 1 in the adjusted power supply.
For the power supply output (DCW) adjustment, the laser power command is set to parameter
No.29373, and the target DCW set to parameter No.29374 (As for this parameter, the value of the
data sheet is set usually). When DCW cannot be adjusted by the maximum power supply output by
the situation of the discharge tubes and laser power supply, the setting can be arbitrarily changed, But
DCW must not over the maximum power supply output in the following table.
CNC parameters C2000i-C C4000i-C C6000i-C
Parameter No.15000#4 (CLB) 0(Output compensation disable)
Parameter No.15008#6 (EGE) 0(Automatic aging disable)
Parameter No.15223 2850(Bias command)
Parameter No.15242 920 1030 820
Parameter No.29395#0 (PWC) 0(Laser power check disable)
Parameter No.29360 1(Only the adjusted power supply)
Parameter No.29373 Parameter No.15308 Parameter No.15308 Parameter No.15307
8800W(Maximum power 8800W(Maximum power 7900W(Maximum power
Parameter No.29374
supply output) supply output) supply output)
* DCW is adjusted from parameter No.29377 between parameter No.29378 for parameter
No.29374 of the adjustment target DCW value.
(2) When turn on the discharge start signal (HV ON), the laser power supply automatic adjustment
function is enable. This function end normally, and state of base discharge of laser sequence 3000.
The progress of this function is displayed on DGN. No.2509 by the value from 1 to 10. The following
tables show the state number from 1 to 10 and the relation of the operation content.
DGN.No.2509
ADJUSTMENT Content of laser power supply automatic adjustment
STATUS
1 Laser sequence 2000(LRDY) to sequence 3000(LSTR)
2 Check the stability of the gas pressure before the base adjustment
3 Measure the judgment value of the discharge beginning of the base adjustment
4 Detect the discharge beginning state of the base adjustment
5 Adjust the base discharge
6 Prepare the adjustment of the power supply output
7 Increase the power command gradually
8 Warm-up and Check the stability of the gas pressure
9 Adjust the power supply output
10 End the laser power supply automatic adjustment function
(3) The parameter No.15000#4 (CLB), No.15008#6 (EGE), No.29395#0 (PWC) is returned to original
value. For the parameter No.29360, it is written 0 by the automatic after this function ends.
5.2.2.3 Check
(1) Check trigger electrode discharge
Turn off the discharge start signal (HV OFF), then set parameter No.15223 to “2650”. Check that
trigger electrode discharge in the base discharge state.
(2) Pulse output test

Set the parameter No.29000#0 (PFB) to 0, perform the pulse test internal discharge by outputting on
the pulse test power command (power (Parameter No.15308), frequency 5 Hz and duty 5%) for 10
min.
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Check that no alarm is issued. If alarm is issued, there is possibility of the power supply adjustment
mistake or the damage of the laser power supply unit. When it is necessary, the laser power supply is
adjusted again.
NOTE
1 Measuring method of power supply monitor
If the CNC monitor is located in a place distant from the oscillator, record and
adjust the monitor voltage value on the CN17, CN18 connector for RFV, RFI,
DCV, DCI monitoring on the power supply unit instead of the displayed on
DGN.No.909 to 948. Use the conversion formula presented.
(a) DCW(Power supply output)=DCI×DCV
DCI= (Voltage between DCI-N and DCI-P of CN17)×5,
DCV= (Voltage between DCV-N and DCV-P of CN17)×30
(b) RFI= (Voltage between RFI-N and RFI-P of CN18)/2,
RFV= (Voltage between RFV-N and RFV-P of CN18)×1000
2 ALM.4132 processing
When parameters No.15223, No.15242 and No.29301 to No.29316 is changed,
the ALM.4132 is issued. Reset the alarm, and turn on the discharge start signal
(HV ON).
3 ALM.4404 processing
When ALM.4404 is issued, check DGN.No.2509. If this number is 2 or 4, check
for the pressure of the laser gas is steady at the parameters No. 15242. If this
number is 3,4,5,7,9, check for the parameters No.29301 to No.29316. This
parameter is about 0 or 4095 due to set mistake of adjusting the base discharge
with trimmer VR11 and adjusting the maximum power supply output with trimmer
VR13. Adjust it again. Thereafter, when you start up the laser oscillator again
after generating this alarm, the values of parameters No. 29301 to 29316 are set
before laser power supply automatic adjustment function.
5.3 MATCHING BOX

Spec. No. of the matching box: A14B-0082-B328 C2000i-C
A14B-0082-B326 C4000i -C
A14B-0082-B331 C6000i -C (No.1, 3, 4, 6)
A14B-0082-B332 C6000i -C (No.2, 5)

(1) Turn off the power to the CNC, then turn off the power to the laser oscillator. In addition, open the
main circuit breaker for the laser oscillator.
(2) Disconnect the power, signal, and fan cables from the matching box.
(3) Remove the resonator fan unit, and remove the rod or cable attached to the matching box.
(4) Remove the two mounting screws, and remove the matching box by slightly pulling it toward you
while swinging it right and left.
(5) Mount a new matching box by reversing steps (4) to (2).
5.4 DISCHARGE TUBE

Spec. No. of discharge tube: A290-4533-T001 C2000i-C (DT1, 4)
A290-4540-T001 C2000i-C (DT2, 3) , C4000i -C
- 126 -
A290-4562-T002 C6000i -C
5.4.1 Placement Numbers

The identification numbers of the discharge tubes when viewed from the maintenance side of the
oscillator are indicated below.
DT2 DT1
DT3 DT4
Fig.5.4.1 (a) Identification numbers (C2000i-C)
DT7 DT8
DT6 DT5
DT2 DT1
DT3 DT4
Fig.5.4.1 (b) Identification numbers (C4000i-C)
DT4 DT3 DT2 DT1
DT5 DT6 DT7 DT8
DT12 DT11 DT10 DT9
Fig.5.4.1(c) Identification numbers (C6000i-C)

(1) Turn off the power to the CNC, then turn off the power to the laser oscillator.
(2) Remove the top cover of the oscillator.
(3) Detach the cable and feeder connecting the discharge tube with the matching box, by loosening the
thumbscrew.
Remove all the screws from the flange, which secures the discharge tube.
(4) Move the discharge tube toward the output, rear, and folding mirrors, while rotating it. If the O-ring
is too tight to allow the discharge tube to be moved, lubricate the O-ring with alcohol. Before
attempting to move the discharge tube, however, move the flange to the center of the tube. Then,
hold the supported end of the discharge tube, leaving a gap of 5 mm, and then push the discharge
tube while rotating it. At this time, be careful not to damage the end of the discharge tube.
- 127 -
(5) Move the O-ring to the center of the discharge tube, then remove the discharge tube. If the O-ring is
at the end of the discharge tube, the end of discharge tube may be damaged while it is being
removed.
(6) Remove the copper plate (or feeder) from the removed discharge tube, then mount it on a new
discharge tube.
(7) Mount the flange onto the new discharge tube, then mount a new O-ring. Before mounting the
O-ring, wipe it with alcohol. A Teflon O-ring is hard, and must be expanded slightly (by hand)
before being mounted.
(8) Insert the new discharge tube into the discharge tube holder by reversing step (4), then perform
assembly by reversing steps (3) and (5).
(9) Attach the cable or feeder between the matching box and discharge tube. Note that the cable or
feeder must not be placed closely to other cables, feeders, and metal plates.
(10) After the replacement, start the oscillator, check for leakage, and perform discharge aging.
If the discharge area of the new discharge tube greatly differs from those of the other discharge tubes,
adjust the power supply.
5.5 TRIGGER ELECTRODE

Spec. No. of Trigger electrode: A98L-0005-0187
Spec. No. of O-ring: JB-OR4D-P10
Spec. No. of Resin bolt: A98L-0004-0801#4-15

oscillator.
(2) Remove the cable connected to the trigger electrode.
(3) The mounting bolts of the trigger electrode are made of resin. With a 3-mm non-ball-point
hexagonal wrench, remove the screw. If the screw head is damaged, use needle-nose pliers to loosen
the screw.
(4) Replace the O-ring with a new one, and mount a new trigger electrode with the attached screw.
Replace the O-ring or a resin bolt if damaged. Never use a metal screw.
(5) Tighten the resin bolts with a tightening torque of 0.5 N⋅m. If you cannot prepare a torque wrench,
use a small L wrench (64 mm × 23 mm). Hold the shorter side, and tighten the bolt as far as you do
not feel a pain in your fingers. Use a wrench having a hexagonal end; never use a ballpoint type
wrench.
(6) Fix the cable to the trigger electrode with a tightening torque of 1.3 N⋅m.
(7) After the replacement, start the oscillator, check for leakage, and perform discharge aging.
- 128 -
Cable
Resin bolt
5.6 TURBO BLOWER

When the turbo blower is replaced, the gas circulating system is open to the atmosphere for a long time.
Pay particular attention to the immediate surroundings to ensure that dust and other contaminants do not
enter the gas circulating system.
Clean the flanges of the turbo blower and the pipe flanges before replacing the turbo blower.
Do not incline the turbo blower while transporting and installing it. If the turbo blower is tilted, it is
possible for the lubricating oil to enter to the laser gas circulating system, and to contaminate the laser gas
circulating system and optical mirrors. In this case, the turbo blower can no longer be used.
Spec. No. of Turbo blower: A04B-0800-C019 C2000i-C

A04B-0800-C025 C4000i-C, C6000i-C

oscillator. Turn off the power to the chiller unit.
(2) Drain the cooling water from the oscillator, disconnect the cooling water tube, gas tube, power cable
connector, and ground cable from the turbo blower, then, drain the oil from the turbo blower.
(3) For C4000i-C or C6000i-C, remove the conduit cable for the power supply.
(4) Detach the gas tube (gas dust collector) from the turbo blower outlet. Cover the openings of the
removed gas tube and the turbo blower with masking tape to prevent foreign matter from entering
them.
(5) Detach all the tubes connected to the piping on the inlet side of the turbo blower, and then remove
the piping. (If piping is difficult to remove, remove only the top screws, and remove piping together
with the turbo blower.)
(6) Remove the hexagon headed bolt, which secures the turbo base, and remove the turbo blower
together with the turbo base. The turbo blower weighs about 30 kg, so special care should be taken.
(7) Remove the two metal brackets from the removed turbo blower, and mounts them on a new turbo
blower, then mount the new turbo blower on the turbo base with the damping rubber. Also, remove
the filter from the inlet of the old turbo blower, and attach the filter to the new turbo blower.
(8) Mount the turbo blower on the oscillator. Fasten the turbo base temporarily. Then, secure the gas
tube temporarily. Be careful not to damage the O-ring, and be sure to insert the O-ring. Adjust the
position of the turbo blower not to apply excessive force to the bellows pipe.
- 129 -
(9) Fasten the turbo base and secure the piping.

(10) Attach the cooling water tube, gas tube, cable connector, and ground cable.
For C4000i-C and C6000i-C, connect the conduit cable for the power supply.
Connect the cooling water tube, gas tube, power cable connector, and ground cable.
If the sleeve or ferrule of the cooling water tube or gas tube is deformed, replace it with the attached
sleeve or ferrule.
(11) Supply turbo blower oil.
Water tube Gas tube Damping rubber (A98L-0004-0772#38ZN-60

Hexagon
headed bolt
(A30L-0010-0083)
Metal bracket
Power cable Turbo base
Damping rubber assembly

Connection of TB
Inlet pipe
Dust
collector
Dust
collector
PSU output cables
Maintenance Side Back Side
- 130 -
Filter
Inlet side
Fig.5.6.1 Turbo blower
5.6.2 Leakage Check and Discharge Aging

(1) See the oil window of the turbo blower to check whether the oil level is in the 3/4 positions between
Hi and Low.
(2) Check for leakage.
(3) Perform discharge aging.
(4) When the turbo blower is changed, the consumption of laser gas varies. Adjust the consumption of
laser gas referring to subsection 5.9.3.4.
(5) Adjust the detect signal using “The turbo blower temperature abnormally detect function”, referring
to Section 6.5
(a) Set the parameter No.29330#0(OLS) to “1” to the automatic sequence to set the turbo blower
temperature abnormal alarm judgment value start.
(b) When the discharging starts, that sequence is automatically starts.
(c) The internal discharge last for 15 minutes with the power for power calibration, and then the
judging value for alarm, and that sequence ends.
NOTE
In this function the internal discharge is executed with the power for power
calibration, so it is necessary to execute the gas leakage check and the
discharge aging.
5.7 INVERTER
5.7.1 Operation of the Digital Operator

It is possible to check the detail of the inverter’s alarm with the digital operator.
Operate the digital operator with the power to the oscillator turned on.
The parameters of an inverter purchased by FANUC are set before shipment from the factory. Therefore,
usually, the parameters need not be changed.
- 131 -
(1) Names and descriptions of the digital operator
Name Description
Monitor Displays settings such frequency and output current values.
RUN (operation) lamp Turned on when the inverter is running.
Program lamp Turned on when the monitor displays the setting of each function.
Blinks when a warning is given (when a setting is incorrect).
POWER lamp Power lamp of the control circuit
ALARM lamp Turned on when the inverter trips
Monitor lamp Lamp for indicating the display status of the monitor.
Hz: Frequency, V: Voltage, A: Current, kW: Power, %: Ratio
Operation command Turned on when the operation command destination is set to the operator.
indication lamp
Operation key Key for stopping the motor.
This key, however, is enabled only when the operation command destination is set to
the operator. (Check that the operation command indication lamp is on.)
STOP/RESET key Used to stop the motor or reset an alarm.
FUNC (function) key Used to enter the monitor mode, basic setting mode, extended function mode, and
function mode.
STR (store) key Used to store set values. (Be sure to press this key when changing set values.)
Up/down key Used to change the extended function mode, function mode, or set values.
- 132 -
(2) Method of operation

Pressing the (△1) key or (▽2) key scrolls the code when the code No. is displayed. When the data is displayed,
pressing the (△1) key increases the value and pressing the (▽2) key decreases it.
Press the (△1) or (▽2) key to correspond to the target code or data. When the key is kept pushing, the monitor is
fast-forwarded.
Monitor mode
When the code No. is displayed, the monitor of the code is displayed by pressing
the (FUNC) key.
FUNC
Display of monitor
FUNC STR
*Note 1
When the monitor of the code is displayed, the code No. is displayed by
pressing the (FUNC) key or (STR) key.
In the initial state, 0.00 is played on the 4-digits-LED.

At this time, pressing the (FUNC) key displays d001 on it.
Function / Extended function mode

When the code No. is displayed, the monitor of the code is displayed by
pressing the (FUNC) key.
(Display of data) *Note 1, *Note 2

Upper limit Data setting
Pressing the (△1) key increases the value and
pressing the (▽2) key decreases it.
When the data is displayed, pressing the (STR) key

stores the value and displays the code No.. When
the data is displayed, pressing the (FUNC) key
FUNC
does not store the value and displays the code No..
FUNC
STR
Lower limit
Note 1)
The different content is displayed depending on the
parameter setting.
Note 2)
Press the (STR) key in case of the data changing.
(3) Monitor mode

Code Name of function Remarks
d001 Output frequency monitor Hz
d002 Output current monitor A
d003 Rotation direction monitor F (forward rotation)/o (stop)/r (reverse rotation)
d004 PID feedback monitor
- 133 -
Code Name of function Remarks

d005 Intelligent input monitor
d006 Intelligent output monitor
Frequency conversion
d007
monitor
Real Frequency conversion
d008 Hz
monitor
d009 Torque command monitor %
d010 Torque bias monitor %
d012 Output torque monitor %
d013 Output voltage monitor V
d014 Input power monitor kW
d015 Integrated power monitor
d016 Cumulative run time monitor
hr
d017 Power ON time monitor
Cooling fan temperature
d018 ℃
monitor
d019 Motor temperature monitor ℃
d022 Life time diagnosis monitor
d023 Program counter
d024 Program No. monitor
d025 User monitor 0
d026 User monitor 1
d027 User monitor 2
d028 Pulse counter monitor
d029 Position command monitor
d030 Current position monitor
d080 Trip count monitor Times
d081 Trip history monitor 1
d083 Trip history monitor 3 Cause, frequency (Hz), current (A), voltage (V), run time (hr), power ON time
d084 Trip history monitor 4 (hr)
d090 Warning monitor
d102 DC voltage monitor V
d103 BRD load factor monitor ％
Electric thermal load factor
d104 ％
monitor

Spec. No. of Inverter: A90L-0001-0574#8LF C2000i-C, C4000i-C
A90L-0001-0574#16LFF C6000i-C
5.7.2.1 Inverter
Exchange the inverter according to the following procedures. Figure 5.7.2 shows outside view of the
inverter. This figure is A90L-0001-0574#8LF.
The exchange method is the same for A90L-0001-0574#16LFF.
oscillator. Start work when 10 minutes or more has elapsed after the power is turned off. Otherwise,
an electric shock can occur.
(2) Detach the cable (outside) connected to the connector (CN138) located under the inverter. Detach
connector CN138 (inside) from the plate. Take care not to damage the housing by the edge when
you remove the connector from the plate.
(3) Remove the front cover (by removing 2 set screws), then detach the cables from the terminal block
of the main circuit.
- 134 -
The following cables are connected to the terminal block of the main circuit:
The following cables are connected to the inverter:
R, S, and T : Main power supply input
U, V, and W : Inverter output
G : Ground
(4) Remove the inverter (by removing the four set screws).
(5) Detach the signal cable (inside) connected with the control circuit terminal block from the detached
inverter.
Terminal block Terminal symbol 1 : Reset signal
Terminal symbol 2 : Soft lock signal
Terminal symbol 8 : Drive command signal
Terminal symbol 11 : Frequency arrival signal
Terminal symbol 14 : Fan lifetime signal
Terminal symbol 15 : Capacitor lifetime signal
Terminal symbols AL0, AL1 : Alarm output (relay contact output: Normal if ON)
Terminal symbol AM : Output current analog monitor signal
Terminal symbol L : Analog common
Terminal symbol CM1,CM2 : Common
(6) The cover of the new inverter is removed, and connects the signal cable (inside) to the control circuit
terminal block.
(7) Install the new inverter in the laser oscillator.
(8) Install connector CN138 of the signal cable (inside) in the plate under the inverter.
(9) Connect the cable with the main circuit terminal block.
(10) Install the cover, and connect the cable to the connector (CN138).
Terminal block of
the control circuit
Terminal block of
the main circuit
CN138
Terminal
Cover
Cover set screw

M4×8: 2 place Signal Cable(outside) Signal Cable(inside)
Fig.5.7.2 Inverter
5.7.2.2 Cooling Fan in the Inverter

Spec.No. of Inverter fan: A90L-0001-0574#8LF-FAN C2000i-C, C4000i-C
A90L-0001-0574#16LFF-FAN C6000i-C
Exchange the cooling fan according to the following procedures. Figure 5.7.3 shows details of fan
exchange. Figure is A90L-0001-0574#8LF. The exchange method is the same as # 8LF though the
inverter has two cooling fan in A90L-0001-0574#16LFF.
- 135 -
oscillator.
Begin working after ten minutes or more have passed since it shut off because there is danger of the
electric shock.
(2) Remove the inverter from the oscillator referring to 5.7.2
(3) Remove the cooling fan with the procedure below:
(a) Detach the terminal cover. (M4:1 screw)
(b) Detach the digital operator’s panel and the spacer.
(c) Detach the front cover. (M4:2 screws)
(d) Detach up the cooling fan holder plate while pressing the tabs on both side of the cooling fan
holder plate.
(e) Detach the connector (#8LF:J21, #16LFF;J21, J22) from the power PCB. Pull out the
connector to the direction of figure. At this time, do not pull the cable.
(f) Detach the cooling fan from the cooling fan holder plate. Remove the cable clamp when it has
adhered
(4) Install the new cooling fan with the procedure below:
(a) Install the new cooling fan in the cooling fan holder plate. Confirm the wind direction. (Cooler
fan's label side is direction of the vomit.)
(b) Connect the fan connector to (#8LF:J21, #16LFF;J21, J22) on the power PCB.
(c) Fix the cooling fan holder plate to the inverter main body.
(d) Install the front cover. (M4:2 screws)
(e) Install the digital operators panel and the spacer.
(f) Install the terminal cover. (M4:2 screws)
(5) Install the inverter to the oscillator referring to 5.7.2
- 136 -
Terminal cover Digital operator’s panel

Spacer
Front cover
Screw × 2 Screw × 2
Tab
Cooling fan ConnectorJ21

holder plate Power PCB
Label side of
Cooling fan
Fig.5.7.3 Cooling fan replacement
- 137 -
5.8 EXHAUST PUMP

Spec.No. of Exhaust pump: A90L-0001-0425

(2) Drain the cooling water from the oscillator, then disconnects the two water tubes.
(3) Disconnect the tubes from the pump outlet and inlet. Then, disconnect the heavy-duty power cables
from the terminal block on the side of the pump.
(4) Remove the bolts securing the exhaust pump unit, then remove the pump unit. Remove the bolts
securing the pump to the mounting plate, and then remove the pump.
(5) Position the new exhaust pump on the mounting plate, then secure the pump unit by reversing steps
(2) to (4). The new pump may not be fitted with gas and water fittings. Remove them from the old
pump, bind seal tape on the threaded part, and install them in the original positions.
(6) Pumps are shipped without lubricating oil. Add oil to the pumps. Operating the pump without
lubricating oil will cause the thermal switch to trip, and will ultimately damage the pump.
(7) Start the oscillator, perform leakage tests for the laser oscillator, and check the operation of the
exhaust pump.
When the power is first turned on, check that gas is output from the gas outlet of the oscillator. The
pump starts after gas has been discharged from the external pipes for a few seconds. If no gas is
discharged, or the pump sounds abnormally, the pump turns reversely. Check the cabling.
5.8.2 Parts of Exhaust Pump

Each part can be replaced. The table below indicates the specifications of the parts.
Name Specification Remark
Nut A90L-0001-0425#71244351
Cartridge cover A90L-0001-0425#71231470 With O-ring
O-ring A90L-0001-0425#71237142 For cartridge cover
Spring with washer A90L-0001-0425#71233500
Stopper A90L-0001-0425#71066848 With O-ring
Oil level gauge A90L-0001-0425#71231020 With O-ring and screws
Replace each part by using the same procedure as described in Subsection 3.3.3.1. (See Fig. 3.3.3.)
5.9 GAS CONTROLLER

Spec.No. of Charge unit: A04B-0815-D406 C2000i-C, C4000i-C
A04B-0818-D404 C6000i-C
Spec.No. of Exhaust unit: A04B-0815-D405 C2000i-C, C4000i-C
A04B-0818-D405 C6000i-C
Spec.No. of Pressure sensor: A91L-0001-0256#200
Spec.No. of Pressure control valve: A04B-0816-D402
Spec.No. of Gas filter: A97L-0203-0208#A
Spec.No. of Gas control PCB: A16B-1700-0490
5.9.1 Configuration
The gas controller consists of a charge unit, an exhaust unit, pressure sensors, and so on. Fig. 5.9 shows
an installation photo of the gas controller. The following outlines the functions of components shown in
the figure:
- 138 -
(1) Pressure sensor
This sensor monitors the pressure in the pipe on the turbo blower inlet side.
(2) Atmospheric pressure sensor
This sensor monitors whether the pressure in the oscillator has reached atmospheric pressure.
(3) Filter
This filter prevents impurities from entering the oscillator.
(4) Gas supply pressure sensor
This sensor continuously monitors the pressure of the laser gas supplied from an external source (gas
cylinder).
(5) Purge valve
When the machine operation stops, this valve supplies laser gas to the oscillator until the pressure in
the oscillator reaches atmospheric pressure.
(6) External pipe exhaust valve
When the oscillator starts, this valve opens for a certain period to allow laser gas in the laser gas pipe
between the oscillator and gas cylinder to escape.
(7) Gas supply valve
When the machine is operating, this value opens to supply laser gas to the oscillator.
(8) Pressure control valve
According to the command issued from the CNC, this valve controls the flow rate of the laser gas
supply to maintain a specified laser gas pressure in the oscillator.
(9) Exhaust flow rate adjustment valve
This valve adjusts the flow rate of laser gas released from the oscillator during normal operation.
(10) Exhaust valve
When the oscillator starts, this valve opens to allow laser gas to escape from the oscillator. During
normal operation, this valve is closed, and a constant amount of gas escapes through the exhaust
flow rate adjustment valve connected in parallel.
(11) Three way valve
This valve connects the exhaust pump to the oscillator to discharge laser gas from the oscillator
during exhaust pump operation. When the exhaust pump is stopped, this valve switches to the
atmosphere to open the exhaust pump to atmospheric pressure.
(12) Bypass valve
This valve connects the motor chamber of the turbo blower to the exhaust pump. When the oscillator
starts, this valve opens to release laser gas from the motor section. During normal operation, this
valve is closed, and a constant amount of gas is released through the orifice connected in parallel.
- 139 -
Gas supply Purge valve(V2)

pressure sensor(PSW1) External pipe exhaust valve(V6)
Pressure Gas supply valve(V1)
sensor Charge unit
(PS)
Gas control PCB
Exhaust unit
Atmospheric pressure Silencer Bypass valve(V5)

sensor (PSW2)
Pressure control Exhaust flow rate Three way valve(V3)
valve (CV1) adjustment valve
Filter(F1) Exhaust valve(V4)
(CV2)
Fig.5.9 Installation of the gas controller

5.9.2.1 Charge unit
oscillator.
(2) Close the valve of the external laser gas supply (for example, a gas cylinder).
(3) Disconnect tubes and cables from the charge unit. Pressurized laser gas may remain in the control
unit. Discharge this gas by loosening the nut on the fittings.
(4) Remove the unit securing screws, then remove the unit.
(5) Mount a new unit by reversing steps (3) and (4).
(6) Adjust the charge unit by following the adjustment procedure described in Subsection 5.9.3.
(7) Turn on the oscillator, then perform a gas leakage check and discharge aging.
5.9.2.2 Exhaust unit

oscillator.
(2) Disconnect the tubes and cables from the exhaust unit.
(3) Remove the screws that secure the unit, and remove the unit to replace it with a new one.
(5) Turn on the oscillator, then perform a gas leakage check and discharge aging.
(6) Perform all settings as described in Subsection 5.9.3.4, and then check the operation.
- 140 -
5.9.3.1 Setting the gas supply pressure sensor

The gas supply pressure sensor is a sensor labeled PSW1 in the gas controller.
(1) Turn on the main circuit breaker and power supply, then turn on the power to the CNC. Then, power
is supplied to the sensor. Never turn on the gas pressure control start signal (RUN).
CAUTION
Be sure to pull out the key switch beforehand so that the oscillator start signal
(RUN) is not turned on.
(2) Remove the gas tube connected to the gas supply pressure sensor. This causes the gas supply pressure
sensor detect the atmospheric pressure.
(3) For how to operate the sensor, see the procedure described in Subsection 5.9.3.3. Set to the unlock
mode, and then enter settings.
To clear the initial offset value of the sensor, press the UP(△) and DOWN(▽) button simultaneously
more than 1 second.
Moreover, adjust DGN. No. 2503 for the parameter No. 29321 set to be 0±1 kPa.
(4) Attach and secure the removed gas tube again.
(5) Adjust the secondary pressure of the regulator of the external laser gas supply unit (gas cylinder, for
example) to 0.1 MPa.
(6) Check that DGN No. 2503 shows a value of the secondary pressure of the regulator ± 12 kPa.
(7) After the check described in (6), set the lock mode again.
5.9.3.2 Setting the atmospheric pressure sensor

The gas supply pressure sensor is a sensor labeled PSW2 in the gas controller.
(1) Turn on the main circuit breaker and power supply, then turn on the power to the CNC. Then, power
is supplied to the sensor. Never turn on the gas pressure control start signal (RUN).
CAUTION
Be sure to pull out the key switch beforehand so that the gas pressure control
start signal (RUN) is not turned on.
(2) Remove the gas tube connected to the gas pressure sensor and the atmospheric pressure sensor. This
causes the atmospheric pressure sensor to detect the atmospheric pressure.
(3) For how to operate the sensor, see the procedure described in Subsection 5.9.3.3. Set to the unlock
mode, and then enter settings.
To clear the initial offset value of the sensor, press the UP(△) and DOWN(▽) button simultaneously
more than 1 second.
Moreover, adjust DGN. No. 2502 for the parameter No. 29325 set to be 0±1 kPa.
(4) Attach and secure the removed gas tube again.
(5) Turn on the gas pressure control start signal (RUN), and check that DGN. No. 2502 display a
negative value after the exhaust pump starts exhaust operation.
(6) After the check described in (5), set the lock mode again.
- 141 -
5.9.3.3 Operating the gas supply pressure sensor and atmospheric

pressure sensor
The sensors operate in one of four modes. In the measurement mode, a pressure value being measured is
indicated. In the function setting mode, basic parameters are set. In the pressure setting mode, switching
pressures are set. In the key lock mode, key operation is locked. Moreover, the sensors have a zero-clear
function for canceling an initial offset value. For mode switching, press or hold down the SET key as
indicated below. (When the power is turned on, the measurement mode is set.)
Measurement SET (< 2 seconds) Pressure setting mode SET
mode
SET (≥ 2 seconds) Function setting mode SET
SET (≥ 5 seconds) Key lock mode SET
Note) Zero-clear operation is performed in the measurement mode.
M easurement Pressure setting Function setting Key lock mode

mode mode (disuse) mode (disuse)
CAUTION
Be sure to set to RUN OFF state for setting pressure sensor.
(1) Names of Components
Fig.5.9.3.3 Details of the gas supply pressure sensor and the atmospheric pressure sensor
Indicator section:
Indicates a measured pressure value, settings, and error code.
UP ( ) and DOWN ( ) buttons:
Used to change the mode and settings.
SET button:
Used to change the mode and set a value finally.
The indicator section of the sensor indicates a pressure value as a gauge pressure in MPa (the gas supply
pressure sensor) and kPa (the atmospheric pressure sensor). If the pressure value is beyond the pressure
range, "---" appears in the indicator.
Sensor name Unit Range (Gauge unit) Example
Gas supply pressure sensor [MPa] -0.1MPa to 1.0 MPa 0.175 0.175MPa 175kPa
Atmospheric pressure sensor [kPa] -100.0kPa to 100.0kPa -50.0 -0.05MPa -50kPa
- 142 -
(2) Zero clear

Zero clear modifies the initial offset value of the sensor. This setting can be made in the measurement
mode.
Remove the gas tube connected to the gas supply pressure sensor or the atmospheric pressure sensor. This
causes the sensor to detect the atmospheric pressure.
Press the UP(△) and DOWN(▽) button simultaneously more than 1 second. Then a measurement value
of the atmospheric pressure set to be zero.
Attach and secure the removed gas tube again.
(3) Key lock mode

Key lock mode consists of two modes, the unlock mode (display: UnL) and the lock mode (display:
LoC).
In the unlock mode, parameters of the sensor can change.
The lock mode protects against an inadvertent modification to the setting of the sensor.
This setting is common to the gas supply pressure sensor and the atmospheric pressure sensor.
The key lock mode is set by holding down the SET key for 5 seconds or more in the measurement mode.
Set to the lock mode, after the setting of the sensor is finished.
SET button
△▽ button
(＞5 sec.)
M easurement UnLock mode Lock mode

mode
5.9.3.4 Adjusting the exhaust unit (adjusting the laser gas

consumption)
(1) Detach the tube from the filter of the gas controller, and attach a gas flow meter with laser gas
specifications.
(2) Set 30 in parameter No. 15260, and start the oscillator. Air entered when the oscillator is open to the
atmosphere in (1) above is released. After 30 seconds, turn off the oscillator start switch (RUN).
(3) Restart the laser oscillator, and place the oscillator in the oscillation ready state (LSTR).
(4) Perform internal discharge with a low output level specified first. Increase the output command level
gradually to the rated output. If the discharge voltage is high, perform purging, then, increase the
output command level again.
(5) While observing the flow rate on the gas flow meter when internal discharge is performed with the
rated output, turn the exhaust flow rate adjustment valve to adjust the flow rate to the setting.
(6) Purge the oscillator.
(7) Detach the gas flow meter, and attach the tube again. Perform the operation described in (2) to
replace gas in the tube.
(8) Reset the modified parameter to its original value.
• Predetermined flow rate

Oscillator model Flow rate
C2000i-C, C4000i-C 10 liters/hour (0.166 liters/minute)
C6000i-C 20 liters/hour (0.332 liters/minute)
- 143 -
5.10 THE WATER DISTRIBUTION UNIT

Replace the water distributor unit as follows.
(2) See Subsection 2.4.2, and remove water from the oscillator by supplying compressed air.
(3) Mark the water pipes connected to the distribution unit, then disconnects the pipes.
(4) Remove the bolts securing the distribution unit, then remove the unit.
(5) Mount a new distribution unit by reversing steps (3) and (4). Connect the water pipes correctly,
noting the alignment marks.
(6) Operate the chiller unit manually to circulate the cooling water. Check that no water leaks from the
fittings that were disconnected during the replacement. After checking, restore the original chiller
setting. Check the amount of water in the chiller unit, and add water if necessary.
Spec.No. of Distribution unit: A04B-0813-C421 C2000i-C
Fig.5.10 (a) Detail of water distributor unit (C2000i-C)
- 144 -
Spec.No. of Distribution unit: A04B-0815-C421 C4000i-C
Cock (close)
Removing water
Cock (open)
Normal
Fig.5.10 (b) Detail of water distributor unit (C4000i-C)
Spec.No. of Distribution unit: A04B-0818-C422 C6000i-C (Distribution unit A OUT side)

A290-4562-V800 C6000i-C (Distribution unit A IN side)
A04B-0818-C423 C6000i-C (Distribution unit B OUT side)
A290-4562-V801 C6000i-C (Distribution unit B IN side)
Fig.5.10(c) Detail of water distributor unit (C6000i-C)
- 145 -
Cock (close)
Removing water
Cock (open)
Normal
Fig.5.10 (d) Detail of water distributor unit A (C6000i-C)
Fig.5.10 (e) Detail of water distributor unit B (C6000i-C)
Table 5.10 Spec.No. of water fittings of distribution unit

Quantity
Spec.No. Mark C6000i-C C6000i-C
C2000i-C C4000i-C
Distribution unit A Distribution unit B
1 A97L-0200-0651#N-16D-B a 0 3 2 2
2 A97L-0200-0651#N-12C-B b 3 1 1 1
3 A97L-0200-0651#N-10B-B c 4 3 0 0
4 A97L-0200-0651#N-08A-B d 1 0 0 0
5 A97L-0200-0651#N-06A-B e 2 0 0 0
6 A97L-0200-0651#L-16D-B f 0 3 2 2
7 A97L-0200-0651#L-12C-B g 3 7 7 7
8 A97L-0200-0651#L-10B-B h 4 5 4 2
9 A97L-0200-0651#L-08A-B i 3 0 2 2
10 A97L-0200-0651#L-06A-B j 2 0 0 0
- 146 -
5.10.2 Replacement of the Flow Sensor Unit

Spec.No. of Flow sensor unit: A04B-0815-D421
Spec.No. of Tube kit: A04B-0813-C421-KA C2000i-C
A04B-0815-C421-KA C4000i-C
A04B-0818-C422-KA C6000i-C/1unit
NOTE
Never push the internal of flow sensor with thin sticks in checking water jam.
If it is done, the detector is destroyed.
Detector Karman vortex generator
Fig. 5.10(e) Flow sensor unit
For replacement, use the procedure below.

(2) Remove the cooling water in the oscillator with the supply compressed air, referring to subsection
2.4.2.
(3) Disconnect the tubes and cables from the flow sensor unit.
(4) Remove the screws that secure the unit, and remove the unit to replace it with a new one.
(5) Mount a new unit by reversing steps (3) and (4). Be careful of the arrow direction (points upward).
(6) Operate the chiller unit manually to circulate cooling water then check for water leakage. Upon
completion of checking, return the setting of the chiller unit to the original one. Check the water
level of the chiller unit and add water if necessary.
(7) Adjust the flow sensor unit by following the adjustment procedure described in Subsection 5.10.3.
5.10.3 Adjustment of the Flow Sensor Unit

(1) Turn the CNC on. Never turn on the oscillator start signal (RUN) at this stage. Therefore, drive the
chiller unit in the manual operation.
(2) Adjust the flow rate of cooling water flowing into the oscillator to an alarm setting flow rate. Use a
flow meter with a proper and accurate rated flow rate.
Adjust the setting parameter to the value that the display of flow rate shows a same value of a flow
meter (accuracy 5L/min).
- 147 -
Alarm setting Setting

Model Rated flow rate Flow rate [0.1L/min]
flow rate parameter
C2000i-C 55 L/min 75 L/min No.29340 DGN.2500
C4000i-C 120 L/min 160 L/min No.29340 DGN.2500
C6000i-C (A: Rear side) 95 L/min 125 L/min No.29340 DGN.2500
C6000i-C
95 L/min 125 L/min No.29343 DGN.2501
(B: Maintenance side)
(3) Check that the display of flow rate shows a value of a flow meter rate ± 5L/min at an alarm setting
flow rate.
(4) Check that the display of flow rate shows a value of a flow meter rate ± 5L/min at a rated flow rate.
If the flow sensor unit cannot adjust correctly by above adjustment procedure, or lose parameters,
adjust the unit by following the adjustment procedure.
(5) Input following temporary setting parameters.
Model Setting parameter A Input value A Setting parameter B Input value B

C2000i-C No.29340 3000 No.29341 0
C4000i-C No.29340 3000 No.29341 0
C6000i-C
No.29340 3000 No.29341 0
(A: Rear side)
C6000i-C
No.29343 3000 No.29344 0
(B: Maintenance side)
(6) Measure the flow rates (DNG. 2500 or DGN. 2501) and flow meter rates at an alarm setting flow rate
and rated flow rate.
(7) Adjustment of setting parameters uses four-measured value.
Calculate corrected setting parameters by following equations.
Correction coefficient C = ( x1 − x 2) /( y1 − y 2) X1：flow meter rate(1) (0.1L/min)
X2：flow meter rate(2) (0.1L/min)
Corrected setting parameters A' = C × A Y1：flow rate(1) (0.1L/min)

B' = x 2 − C × y 2 + C × B Y2：flow rate(2) (0.1L/min)
(8) Check that the display of flow rate shows a value of a flow meter rate ± 5L/min at an alarm setting
flow rate.
(9) Check that the display of flow rate shows a value of a flow meter rate ± 5L/min at a rated flow rate.
5.11 SHUTTER UNIT

Spec.No. of Shutter unit: A04B-0813-C413 C2000i-C, C4000i-C
A04B-0818-C414 C6000i-C

5.11.1.1 Shutter unit
oscillator.
(2) Disconnect the cables from the shutter PCB.
(3) Remove the bolts, which secure the unit, then remove the unit.
- 148 -
(5) After the shutter unit is replaced, the CO2 laser beam and guide laser beam may be misaligned with
each other. In such a case, align the CO2 laser beam and guide laser beam with each other according
to Subsection 5.13.2.
Shutter temperature switch

Screws to fix shutter mirror Shutter mirror
Wiring to shutter Photo switch

temperature switch
Fig.5.11 External view of shutter unit
5.11.1.2 Shutter mirror

Spec.No. of Shutter mirror: A290-4516-X204
For C2000i-C and C4000i-C, remove the shutter unit referring to Subsection 5.11.1.2
Replace the shutter mirror as follows. Be careful not to leave fingerprints on the shutter mirror.
(1) Remove the thermal switch from the heat sink.
(2) For C2000i-C and C4000i-C, remove the three bolts on the side of the heatsink. For C6000i-C,
remove the three bolts from the reflective surface side of the shutter mirror. Then, you can remove
the shutter mirror with the heat sink to which the shutter mirror is attached.
(3) Apply a minute amount of thermal compound (Ryosan Company 910-50) to the rear of a new shutter
mirror, then mount the new shutter mirror by reversing steps (1) to (2).
5.11.1.3 Shutter switch (thermal and photoelectric switches)

Spec.No. of Shutter sensor unit: A04B-0813-D020 C2000i-C, C4000i-C
A04B-0818-D033 C6000i-C
(1) Remove connector CN249 from shutter PCB, then disconnect its cable.
(2) The shutter thermal switch and photoelectric switch are integrated into a sensor unit. So, remove
both switches.
(3) Install a new sensor unit. At this time, ensure that the wire mark of the photoelectric switch matches
the label indication (OPEN, CLOSE) of the shutter unit. The replacement is completed by
reconnecting to shutter PCB
NOTE
To prevent stress caused by shutter open/close operation from being imposed
on the cable, the cable must be run with a sufficient allowance as shown in Fig.
5.11.
- 149 -
5.12 BEAM ABSORBER

Spec.No. of Beam absorber: A97L-0200-0872#E C2000i-C
A97L-0201-0972 C4000i-C
A97L-0203-0206#A C6000i-C
Spec.No. of Beam absorber mirror: A97L-0200-0872#MIRROR C2000i-C
A97L-0201-0972#MIRROR C4000i-C
5.12.1.1 Beam absorber

(2) Drain the cooling water from the oscillator, then disconnects the water pipes.
(3) Remove the safety cover.
(4) Disconnect the temperature sensor Fasten terminal.
(5) Remove the bolts, then remove the absorber. Before removing the absorber, mark the position of the
absorber or mounting metal bracket. If the position of the absorber is shifted because of the
replacement, the laser beam is not directed to the center of the absorber. In such a case, the absorber
must be adjusted.
(6) Mount a new absorber, aligning it with the marked position.
(7) Connect the water tubes and temperature sensor cable.
setting.
(9) Start the oscillator, and check the absorber position as described in the next subsection.
(10) Install the safety cover according to (4) of Section 2.1 after absorber position adjustment.
5.12.1.2 Beam absorber mirror

(1) Execute (1) to (4) of Subsection 5.12.1.2.
(2) Remove the four bolts of mirror, and then remove the beam absorber mirror. If it is necessary to
remove the beam absorber to remove the absorber mirror, mark at the position of the absorber or the
plate.
- 150 -
Beam
Check burning in tube inside
Temperature
Switch
Four bolts
Mirror
Fig.5.12(a) Beam absorber Fig.5.12(b) Beam absorber mirror Fig.5.12(c) mirror attached direction
(3) Make sure that there is not the burning in the tube inside or the peeling of the coating. If they exist,
change the beam absorber.
(4) Install the mirror to the beam absorber with four bolts. Refer to Fig.5.12(c) about the direction of the
mirror.
(5) Install the absorber noting the position to fit.
(6) Execute the subsection 5.12.1.1(7) to (10).
5.12.2 Adjusting the Position

(1) Draw a cross on an acrylic plate, then fix the plate such that the center of the cross is aligned with
the center of the absorber aperture.
(2) Provide a flow of cooling air to the acrylic plate, using a drier, for example.
(3) Start the oscillator, and turn on the discharge start switch (HV ON). As soon as the output starts
increasing on the output display screen, turn off the discharge start switch (HV ON). Laser
oscillation starts, and a round beam mark is left on the acrylic plate.
(4) Adjust the absorber such that the mark on the acrylic plate is aligned with the center of the absorber.
(5) Repeat step (3), then check the position of the absorber. If the mark is still not aligned with the
center of the absorber, adjust the absorber again.
(6) In step (3), soot from the burnt acrylic plate may adhere to the shutter mirror. Check whether the
shutter mirror has been contaminated with soot or other particles, and clean the mirror if necessary.
5.13 GUIDE LASER (SEMICONDUCTOR LASER)

Spec.No. of Guide laser: A04B-0800-D400

oscillator.
(2) Remove connector CN248 from shutter PCB, then disconnect the cable.
(3) Remove the three screws securing the laser unit, then replace the laser unit with a new one.
(4) Insert the cable of the guide laser into the connector on shutter PCB, then secure the cable.
- 151 -
CN248
Fig. 5.13.1 Guide laser

Make an adjustment so that the center of the CO2 laser beam is aligned with the center of the guide laser
beam.
(1) Attach an acrylic plate at about 3 to 10 m away from the beam outlet of the laser oscillator, and
collect the burn pattern of the CO2 laser beam (rated output, CW, irradiation period of 0.1 second).
Do not attempt to touch the acrylic plate after beam pattern collection.
(2) By turning the X-axis and Y-axis adjustment screws, align the guide laser beam with the center of
the burn pattern obtained in step (1). Turn the adjustment screws using a 2-mm hexagon wrench.
(3) Compare the optical axis of the guide laser beam with the center of the burn pattern of the CO2 laser
beam, obtained approximately 1 m from the laser oscillator outlet. If the difference between the two
beam centers is within ±2 mm, the optical axis adjustment can be regarded as being successful.
(4) If an optical axis mismatch is detected in step (3), adjust the optical axis of the guide laser beam by
moving the plate and stage of the guide laser unit. Then, repeat the adjustment procedure from step
(2).
Fig.5.13.2 Guide laser adjustment position
5.14 FAN
This section describes the replacement of the fan on the fan unit. (See Subsection 5.14.1)
If it is necessary to remove the fan unit from the laser oscillator in changing discharge tubes, remove and
attach it referring to Subsection 5.14.2 or 5.14.3.
Spec.No. of Fan motor: A90L-0001-0396 C2000i-C, C4000i-C
A90L-0001-0396#T C6000i-C
- 152 -
5.14.1 Replacement of Fan

Remove the cables pushing this part
Screw
Finger
guard
Fan Cable
Cable Terminal block
Fig.5.14.1 (a) Fan Fig.5.14.1 (b) Terminal block
(1) Turn off the power to the CNC, and then turn off the main circuit breaker and power supply for the
laser oscillator.
(2) Remove the power cable for fan from the terminal block for C2000i-C and C4000i-C.
Remove the power cable from the fan. It is not necessary to remove it from terminal block for
C6000i-C.
(3) Remove screws, and then, remove fan, finger guard and earth cable.
(4) Cut the cable which attached to new fan with same length as old one, and treat the end for C2000i-C
and C4000i-C
Attach the original cable to a new fan for C6000i-C.
(5) Attach the earth cable to the new fan, and fix the fan and the finger guard at the original place.
(6) Close the main circuit breaker, turn on the power to the oscillator, and then turn on the power to the
CNC. Then, check that the fans rotate.
5.14.2 Detachment and Attachment of a Fan Unit

oscillator.
(2) Detach the power supply cable connected to the connector and disconnect the ground cable.
(3) Remove the fan unit from the oscillator.
(4) Mount a new fan unit, then secure it by tightening the screws.
(5) Attach the power supply cable to the connector and connect the ground cable.
(6) Close the main circuit breaker, turn on the power to the oscillator, then turn on the power to the
Power supply cable connected

to the connector
Fig.5.14.2 Fan unit cable connection
- 153 -
5.14.3 Detachment and Attachment of Fan-assisted Radiator

(2) Cooling water is passed through the radiator of the fan unit. Drain the cooling water from the
radiator, and then disconnect the water pipes.
(3) Detach the power supply cable connected to the connector and disconnect the ground cable.
(4) Remove the fan unit from the oscillator. At this time, the radiator may still contain water. Therefore,
plug the radiator fittings with rag to prevent water being spilled on the other units.
(5) Mount a new fan unit, then secure it by tightening the screws.
(6) Connect the water tubes.
(7) Attach the power supply cable to the connector and connect the ground cable.
setting.
(9) Close the main circuit breaker, turn on the power to the oscillator, then turn on the power to the
Power supply cable connected

to the connector
Fig.5.14.3 Fan-assisted radiator cable connection
5.15 POWER SENSOR

Be careful not to touch or apply force to the black, light-sensitive surface. Also, ensure that no dust enters
the sensor.
Spec.No. of Power sensor: A04B-0807-D001 C2000i-C, C4000i-C

A04B-0809-D001 C6000i-C

oscillator.
(2) Disconnect the coaxial cable from the power sensor unit.
(3) Remove the mounting screws of the power sensor unit, and remove the unit.
(5) Turn on the laser, and then check that the laser output indication appears.

See the setting of the power input compensation coefficient in Section 8.5, and check the compensation
coefficient.
- 154 -
5.16 THE DEW SENSOR

Spec.No. of Dew sensor: A04B-0800-D005

oscillator.
(2) Disconnect the dew sensor cable from the connector.
(3) Remove the screws securing the dew sensor, then replace the sensor with a new one.
(4) Connect the dew sensor cable to the connector.
(5) After the replacement, no adjustment is needed.
Fig. 5.16.1 Dew Sensor
5.17 PCB

5.17.1.1 Interface PCB
Spec.No. of Interface PCB: A16B-3100-0070
oscillator.
(2) Disconnect all cables from the interface PCB.
(3) Remove the screws or edge supports, then remove the interface PCB.
(4) Mount a new PCB by reversing steps (2) and (3). Connect the cables, noting the alignment marks.
Ensure that no terminals are loose. Check that the connectors are connected firmly.
(5) Set the jumper pins SH1 to the same status as present before the replacement.
SH1
Fig. 5.17.1 Interface PCB
5.17.1.2 24V power supply

Spec.No. of 24V Power Supply: A20B-1005-0124
- 155 -
oscillator.
(2) Remove the interface PCB.
(3) Disconnect all cables from the 24V power supply.
(4) Remove the four edge supports, then remove the 24V power supply.
(5) Mount a new 24V power supply by reversing steps (2) and (4). Connect the cables, noting the
alignment marks. Ensure that no terminals are loose.
Fig. 5.17.2 24V power Supply
5.17.1.3 Shutter PCB

Spec.No. of Shutter PCB: A16B-1700-0520
oscillator.
(2) Detach all cables connected with shutter PCB.
(3) Remove the four screws or four edge supports, and remove shutter PCB.
(4) Install new PCB in the order of (3)→(2). Confirm the mark of the cable, and connect the cable.
(5) After it exchanges shutter PCB, it is not necessary to adjust it.
Fig. 5.17.3 Shutter PCB
5.17.1.4 Safety circuit PCB

Spec.No. of Safety circuit PCB: A16B-1300-0300
oscillator.
(2) Detach interface PCB.
(3) Detach all cables connected with safety circuit PCB.
(4) Remove six edge supports, and remove safety circuit PCB.
(5) Install new PCB in the order of (3)→(2). Confirm the mark of the cable, and connect the cable.
(6) After it exchanges safety circuit PCB, it is not necessary to adjust it.
- 156 -
Fig. 5.17.4 Safety Circuit PCB
5.18 OIL MIST DECOMPOSING ELEMENT

Spec.No. of Oil Mist Decomposing Element: A290-4523-V170 C2000i-C
A290-4540-V170 C4000i-C
A290-4562-V170 C6000i-C

oscillator.
(2) Remove the mounting screws, pull out the element while tilting it.
(3) Insert a new element in the reverse orders, and fastens it with the screws.
(4) Check for leakage, and perform aging.
* Pay attention to the installation orientation of the oil mist decomposing element.
Mounting location Mounting location

(Output coupler side) (Rear mirror side)
S S’
Fig.5.18.1(a) Mounting locations of oil mist decomposing elements (C2000i-C)
- 157 -
Rear mirror holder

Mounting location
(Rear mirror side)
S
S’
S
S’
Mounting location
Output coupler holder (Output coupler side)
Fig.5.18.1(b) Mounting locations of oil mist decomposing elements (C4000i-C)
Mounting location
(Near output coupler or Rear mirror)
S’
Fig.5.18.1(c) Mounting locations of oil mist decomposing elements (C6000i-C)
Oil mist decomposing element Bolts
Output coupler
Discharge
or tube
Rear mirror
Fig.5.18.2 Mounting orientation of oil mist decomposing element (section S-S’)
- 158 -
Fig.5.18.1(e) oil mist decomposing element
5.19 GAS DUST COLLECTION UNIT
5.19.1 Cleaning
oscillator.
(2) Remove the mounting screws, and remove the dust box.
(3) Detach the dust box slits and wipe them with a clean clothe moistened with alcohol. Also, clean the
inside of the dust box.
(4) The slit on the maintenance side differs from the slit on the rear side. If these blades are installed on
these sides reversely, the dust collection capability lowers. The slits and the dust collector have the
marking “A” or “B”, and match the markings each other.
(5) Check for leakage, and perform discharge aging.
Bolt 2 pieces
Bolt 6 pieces
Slit
Dust box
Fig. 7.19 Gas dust collection unit
5.20 LOW TEMPERATURE SENSOR UNIT

oscillator.
(2) Disconnect the cable from the connector on the unit.
- 159 -
(3) Remove the screws securing the unit, then replace the unit with a new one.
(4) Connect the cable the connector.
Screw
Low
temperature
sensor
Fig. 7.20 Low temperature sensor unit
5.21 OXYGEN SENSOR UNIT

oscillator.
(2) Remove the cover on the shutter PCB for C2000i-C(Short optical path length type and CE Marking).
(3) Detach the cable from the connector (XS30) installed at the top of the oxygen sensor.
(4) Remove the screws at the four locations shown in the figure below.
(5) Install a new oxygen sensor.
(6) Attach the cable to the connector (XS30).
(7) Install the cover on the shutter PCB.
- 160 -
Connector Connector
(XS30) (XS30)
Screws
Screws
(M4×10)
(M4×10)
* Fixed from the
back
C4000i-C, C6000i-C C2000i-C

Fig. 5.21 Oxygen sensor unit
5.22 WARNING LIGHT UNIT

The warning light unit is composed of the warning light and the plate for installation. Therefore, maintain
by exchanging only warning lights.
Spec.No. of Warning light unit: A49L-0001-0086 Standard

A49L-0001-0086#L with pole
A49L-0001-0086#2L with long pole

Exchange the warning light according to the following procedures. Figure 5.22 shows out view of the
warning light. This figure is a standard type. The exchange method is the same with pole type and the
long pole type.
oscillator.
(2) Remove the four screws (M4) fixed the warning light unit. Disconnect the cable from the connector
(CN255), and detach the warning light unit from the oscillator.
(3) Remove the four screws (M5) fixed the warning light, and detach the warning light from the plate.
(4) Install a new warning light on the plate removed by (3) with packing and the attached screws. (Put
on the attached spring washer, washer and O ring to the screws.)
(5) Fix the cable to connector (CN255) and fix the warning light unit. In that case, install the warning
light unit so that the volume adjustment lever may turn inside of the oscillator.
(6) After it exchanges warning light unit, it is not necessary to adjust it.
- 161 -
Volume lever
(not sound) M5×4
(attachment)
Spring washer(attachment)
washer(attachment)
packing(attachment) O ring(attachment)
M4×4
Plate
Connector
Fig.5.22 Warning light unit (Standard)
5.23 GAS FITTING AND WATER FITTING
5.23.1 Gas Fitting

5.23.1.1 Tightening method
(1) Cut the end face of the tube at right angles, then installs a box nut, back ferrule, and front ferrule on
the tube as shown below. At this time, pay attention to their directions.
(2) Insert the tube through the fittings all the way through, then tightens the box nut until you feel a
resistance with fingers. Next, tighten the box nut further by one and a quarter turns with a wrench.
Back ferrule Front ferrule
Gas tube Nut Fitting
Fig.5.23.1 Gas tube and Fitting
(3) After the work above, mark the box nut and the main fittings as shown in the figure.
5.23.1.2 Re-installing
(1) Before removing the tube, provide marks so that the positions of the box nut and the main fittings
can be identified.
(2) Remove the tube.
- 162 -
(3) When installing the tube, ensure that the mark on the box nut of the fittings matches the position
marked in step (1).
(4) If the same marked position is reached just by gently turning the box nut by fingers, cut the tube area
where the old ferrule was installed, then install a new ferrule according to the procedure described in
Subsection 5.23.1.1.
5.23.2 WATER FITTING
5.23.2.1 Tightening method

(1) Cut the end face of the tube at right angles, then installs a box nut and sleeve on the tube as shown
below. At this time, pay attention to their directions.
(2) Insert the tube through the fittings all the way through, then tightens the box nut until you feel a
resistance with fingers. Next, tighten the nut further by one and a half turns with a wrench.
Nut Sleeve
Water tube Water fitting
Fig.5.23.2 Water tube and Fitting
(3) After the work above, mark the box nut and the main fittings as shown in the figure.
5.23.2.2 Re-installing
(1) Before removing the tube, provide marks so that the positions of the box nut and the main fittings
can be identified.
(2) Remove the tube.
(3) When installing the tube, ensure that the mark on the box nut of the fittings matches the position
marked in step (1).
(4) If the same marked position is reached just by gently turning the box nut by fingers, cut the tube area
where the old sleeve was installed, then install a new sleeve according to the procedure described in
Subsection 5.23.2.1.
5.23.3 Fittings and Tube Ordering Information

The ordering information of the fittings, ferrules, sleeve, and box nut is provided below.
(A sleeve and box nut is delivered together with fittings.)
Table 5.23.3 (a) Gas fittings

Tube diameter Screw section Ordering information
1/4” A97L-0200-0648#H-2B-B
1/4”
3/8” A97L-0200-0648#H-2C-B
1/4” A97L-0200-0648#H-3B-B
Nipple 3/8”
3/8” A97L-0200-0648#H-3C-B
3/8” A97L-0200-0648#H-4C-B
1/2”
1/2” A97L-0200-0651#N-16D-B
- 163 -

1/4” A97L-0200-0648#L-2B-B
1/4”
3/8” A97L-0200-0648#L-2C-B
1/4” A97L-0200-0648#L-3B-B
Elbow 3/8”
3/8” A97L-0200-0648#L-3C-B
3/8” A97L-0200-0648#L-4C-B
1/2”
1/2” A97L-0200-0648#L-4D-B
1/4” - A98L-0004-0348#2-B
Ferrule
3/8” - A98L-0004-0348#3-B
(Brass)
1/2” - A98L-0004-0348#4-B
1/4” - A97L-0200-0648#UN-2-B
Box nut 3/8” - A97L-0200-0648#UN-3-B
1/2” - A97L-0200-0648#UN-4-B
Table 5.23.3 (b) Gas tube

Ordering information
Diameter Color Material (x: Specifies a length not longer than 10 m in
steps of 1 m.)
Yellow Polyethylene A98L-0004-0261#4-Y-x
1/4” Blue Polyethylene A98L-0004-0261#4-BU-x
Transparent PFA A98L-0004-0435#8-x
Yellow Polyethylene A98L-0004-0261#6-Y-x
3/8” Blue Polyethylene A98L-0004-0261#6-BU-x
Transparent PFA A98L-0004-0435#4-x
1/2” Transparent PFA A98L-0004-0435#5-x
Table 5.23.3 (c) Water fittings (Material: Brass)

1/8” A97L-0200-0651#N-06A-B
6mm
1/4” A97L-0200-0651#N-06B-B
1/4” A97L-0200-0651#N-08B-B
8mm
3/8” A97L-0200-0651#N-08C-B
1/4” A97L-0200-0651#N-10B-B
Nipple
10mm 3/8” A97L-0200-0651#N-10C-B
1/2” A97L-0200-0651#N-10D-B
3/8” A97L-0200-0651#N-12C-B
12mm
1/2” A97L-0200-0651#N-12D-B
16mm 1/2” A97L-0200-0651#N-16D-B
1/8” A97L-0200-0651#L-06A-B
6mm
1/4” A97L-0200-0651#L-06B-B
1/4” A97L-0200-0651#L-08B-B
8mm
3/8” A97L-0200-0651#L-08C-B
1/4” A97L-0200-0651#L-10B-B
Elbow
10mm 3/8” A97L-0200-0651#L-10C-B
1/2” A97L-0200-0651#L-10D-B
3/8” A97L-0200-0651#L-12C-B
12mm
1/2” A97L-0200-0651#L-12D-B
16mm 1/2” A97L-0200-0651#L-16D-B
6mm - A97L-0200-0651#U-06-B
8mm - A97L-0200-0651#U-08-B
Union 10mm - A97L-0200-0651#U-10-B
12mm - A97L-0200-0651#U-12-B
16mm - A97L-0200-0651#U-16-B
- 164 -

6mm - A97L-0200-0651#LU-06-B
8mm - A97L-0200-0651#LU-08-B
Union elbow 10mm - A97L-0200-0651#LU-10-B
12mm - A97L-0200-0651#LU-12-B
16mm - A97L-0200-0651#LU-16-B
6mm - A97L-0200-0651#S-06
8mm - A97L-0200-0651#S-08
Sleeve 10mm - A97L-0200-0651#S-10
12mm - A97L-0200-0651#S-12
16mm - A97L-0200-0651#S-16
6mm - A97L-0200-0651#UN-06-B
8mm - A97L-0200-0651#UN-08-B
Box nut 10mm - A97L-0200-0651#UN-10-B
12mm - A97L-0200-0651#UN-12-B
16mm - A97L-0200-0651#UN-16-B
Table 5.23.3 (d) Water tube

Ordering information
Diameter Color Material
(x: Specifies a length not longer than 10 m in steps of 1 m.)
White Nylon A98L-0004-0263#8-W-x
6mm
Black Nylon A98L-0004-0263#8-BA-x
8mm
10mm
12mm
White Nylon A98L-0004-0263#6A-W-x
16mm
Black Nylon A98L-0004-0263#6A-BA-x
- 165 -
5.24 ALIGNMENT OF THE RESONATOR

The theory of alignment is such that while monitoring the laser output signal with a tester, you adjust the
angle of each mirror to obtain a maximum output power. Once this adjustment is made, all mirrors are set
for maximum output. So, if a mirror is cleaned or replaced, the original state or original beam mode can
be restored by adjusting only that mirror to maximize its output power.
Fig.5.24(a) Position of adjustment micrometer for alignment (C2000i-C)
- 166 -
Fig.5.24(b) Position of adjustment micrometer for alignment (C4000i-C)
- 167 -
Fig.5.24(c) Position of adjustment micrometer for alignment (C6000i-C)
5.24.1 Alignment Procedure during Installation after Transportation

Misalignment can occur due to transportation or storage state (as in the case where a clamp is not
removed). Be sure to make an alignment according to the procedure described in this subsection at the
first installation.
5.24.1.1 Preparation
(1) Record the adjustment screw readings of the output coupler (O.C.), rear mirror (R.M.), and folding
mirrors (F.M.).
(2) Obtain a maximum power with the folding mirrors.
C2000i-C: FM1, C4000i-C: FM4, C6000i-C: FM1 and FM4
- 168 -
(3) Collect a burn pattern, and use it as the start state for alignment.
Near (3m) : Cold mode or Hot mode (Internal discharge for three minutes)
Far : Cold mode or Hot mode (Internal discharge for three minutes)
(4) If the mode is finally good, end this procedure. If it is not so, perform Subsection 5.24.1.2
5.24.1.2 Adjustment method

(1) For C2000i-C
(a) Obtain a maximum power based on FM1 by using O.C. as the reference.
(b) Obtain a maximum power based on FM1 by using R.M. as the reference.
(c) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from
step (a). At this time, collect a burn pattern in each step.
FM1 OC
FM2
FM3 RM
(2) For C4000i-C

(a) Obtain a maximum power based on FM4 by using R.M. as the reference.
(b) Obtain a maximum power based on FM4 by using O.C. as the reference.
(c) Obtain a maximum power based on FM2 by using O.C. as the reference.
(d) Obtain a maximum power based on FM6 by using R.M. as the reference.
(e) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from
step (a). At this time, collect a burn pattern in each step. If the mode is finally good, end this
procedure.
RM
FM6
FM5 FM4
OC
FM1
FM2 FM3
(3) For C6000i-C

(a) Obtain a maximum power based on FM1 by using FM4 as the reference.
(b) Obtain a maximum power based on FM1 by using O.C. as the reference.
(c) Obtain a maximum power based on FM4 by using R.M. as the reference.
(d) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from
procedure.
FM1 OC
FM2 FM3
RM FM4
- 169 -
5.24.2 Alignment Procedure at Mirror Cleaning Time

When cleaning or replacing mirrors of a laser oscillator already adjusted using the maximum power
method, use the alignment procedure described in this subsection. All folding mirrors need not be cleaned
each time.
mirrors (F.M.).
(2) Collect a burn pattern. This is used for checking mirror dirt. If the mode is good, end the adjustment.
Near (3m) : Cold mode or Hot mode (Internal discharge for three minutes)
Far : Cold mode or Hot mode (Internal discharge for three minutes)

(1) For C2000i-C
(a) Clean the O.C. and R.M. mirrors.
(b) Obtain a maximum power based on O.C. by using R.M. as the reference.
(c) Clean the FM1, FM2, and FM3 mirrors.
(d) Obtain a maximum power based on FM1.
FM1 OC
FM2
FM3 RM
(2) For C4000i-C

(c) Clean the FM3 and FM4 mirrors.
(e) Clean the FM1, FM2, FM5, and FM6 mirrors.
(f) Obtain a maximum power based on FM6 by using FM2 as the reference.
RM
FM6
FM5 FM4
OC
FM1
FM2 FM3
(3) For C6000i-C

(c) Clean the FM1 and FM2 mirrors.
(e) Clean the FM3 and FM4 mirrors.
(f) Obtain a maximum power based on FM4.
- 170 -
FM1 OC
FM2 FM3
RM FM4
5.24.3 Alignment Procedure for Adjusting All Mirrors

This subsection describes the procedure for readjusting a laser oscillator already installed and adjusted
using an old method, to restore its maximum output state. Use this procedure in the following cases:
• To adjust an existing oscillator that has not been adjusted using the maximum power method
• When an oscillator is disassembled because of a failure
• When all mirrors are cleaned or replaced at a time
For cleaning or replacing the mirrors, follow the procedure described in Subsection 3.3.4.1. Do not
remove all mirrors at a time inadvertently.
mirrors (F.M.).
(2) Collect a burn pattern, and use it as the start state for alignment.
Near (3m) : Cold mode or Hot mode (internal discharge for three minutes)
Far : Cold mode or Hot mode (internal discharge for three minutes)

(1) For C2000i-C
(a) Obtain a maximum power based on O.C. by using the R.M. as the reference.
(b) Obtain a maximum power based on FM1 by using the O.C. as the reference.
(c) Obtain a maximum power based on FM1 by using the R.M. as the reference.
(d) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from
procedure.
FM1 OC
FM2
FM3 RM
(2) For C4000i-C

(b) Obtain a maximum power based on FM4 by using the R.M. as the reference.
(c) Obtain a maximum power based on FM4 by using the O.C. as the reference.
(d) Obtain a maximum power based on FM2 by using the O.C. as the reference.
(e) Obtain a maximum power based on FM6 by using the R.M. as the reference.
(f) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from
procedure.
- 171 -
RM
FM6
FM5 FM4
OC
FM1
FM2 FM3
(3) For C6000i-C

(b) Obtain a maximum power based on FM1 by using the O.C. as the reference.
(c) Obtain a maximum power based on FM4 by using the R.M. as the reference.
(d) Adjust FM1 to obtain a maximum power based on FM4.
(f) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from
procedure.
FM1 OC
FM2 FM3
RM FM4
5.24.4 Obtaining a Maximum Power

(1) Using the conditions Pc = rated output, Duty cycle = 15%, and Frequency = 100 Hz, adjust the duty
cycle to determine the actual conditions for internal discharge.
Maximum value of Duty is 25% for C2000i-C, 20% for C4000i-C and 13% for C6000i-C.
If a large output is used, the mode present when a maximum power is obtained is not always the best
due to thermal distortion of each mirror. A capability of detecting an output variation due to base
output fluctuation, tester resolution, chiller temperature, and so forth is required. If the discharge
area is narrow, the output variation dependent on a shift of the internal optical axis becomes small.
(2) Connect the tester to the BNC terminal CN59 of shutter PCB.
(3) Start internal discharge. Start adjustment when the output becomes stable after 5 minutes.
Output terminal(CN59) for Alignment
Fig.5.24.4 External view of shutter PCB

- 172 -
5.24.4.2 Procedure
By using two mirrors A and B with mirror A used as the reference, find a position where a maximum
power is obtained based on mirror B. While turning mirror A in one direction in steps of an interval of the
micrometer, for example, 1 division (10 μm) or 2 divisions (20 μm), adjust mirror B for each division,
and obtain a maximum power at each point of mirror A. Graph the data at each point of A, and determine
a mirror A position representing a maximum power. Then, by aligning mirror A at such a position, adjust
mirror B to obtain a maximum power. Two micrometers are provided for each mirror. So, be sure to
obtain a maximum power with one axis, then obtain a maximum power with the other axis. Do not move
the X-axis and Y-axis at the same time.
- 173 -
5 15
Initial setting of A = 7.590
10
5
Power
Clockwise B is adjusted to obtain a maximum power.
(1) (4) (5)

(2)
Same state as (1)
(3)
In (3), the power is decreased,
indicating that the direction is wrong.
A maximum power is obtained based on B. So, in (5), the adjustment screw is
returned to the original position.
A=7.580 A=7.570 A=7.590
Power B is adjusted to obtain a maximum power.
Counterclockwise
(7) (8)
(6) (9)
(1) (10)
A=7.590
A maximum power is obtained based on B.
A=7.600 A=7.610 A=7.620 A=7.630 A=7.640
Do not determine the maximum power position of A at the actual maximum power point (peak point).
Instead, find the first position (1)' with the same power after a peak, and set a position halfway between (1)
and (1)'. Adjust B to obtain a maximum power at that position.
Power Maximum power position of A

= (7.590+7.638) / 2
= 7.614
(7) (8) (1’)
(9)
(6)
20% below peak
(1)
(10)
A=7.590 A=7.650
A=7.614 A=7.638
- 174 -
5.25 POWER CALIBRATION METHOD
5.25.1 Setting a Power Input Compensation Coefficient

After replacing the rear mirror of the laser oscillator or replacing the power sensor unit, check and set the
power input compensation coefficient. A laser beam is directly measured. So, be sure to strictly observe
the safety precautions related to a laser beam.
(1) Set the following parameters:

Parameter No.15208 4096 (For C4000i-C or C6000i-C), 6144 (For C2000i-C)
Parameter No.15209 200 (For C2000i-C), 400 (For C4000i-C), 600 (For C6000i-C)
(2) By collecting the mode, check if the mirrors of the oscillator are aligned correctly. If the mode is
incorrect, make a readjustment.
(3) Perform internal discharge at the rated output for 1 minute or more, run the program below in the
automatic mode, and place a power probe in the middle of the optical path to measure the output
value Pr of a laser beam irradiated outside.
At this time, it is recommended to make a measurement at the beam outlet.
Record the actual output value Pa displayed on the laser setting screen simultaneously with this
measurement.
G32 P1 Q1 ;
G24 S1800 Q100 R20000 ;
G32 P0 ; (irradiation for 20 seconds)
M30
CAUTION
1) When the rated output laser beam is irradiated to the probe, the maximum
allowable laser beam strength of the probe is exceeded, resulting in a probe
surface destruction. So, when making a measurement, decrease the output to
prevent the probe surface from being destructed.
2) If dust or dirt is attached to the probe surface, the probe surface may be
destructed by a decreased output.
(4) If power input compensation coefficient K is set correctly in parameter No.15215, Pa = Pr' should
result. If the value of Pa differs from Pr' by ±5% or more, set power input compensation coefficient
K (parameter No.15215) again according to the following expression:
K (new value) = Pr' (probe-converted value)/Pa × K (old value)
(5) Make a measurement again as described in step (3) above to check that Pa = Pr'.
5.26 ALIGNMENT OF THE BEAM FOLDING UNIT (C2000i-C,

C4000i-C SHORT OPTICAL PATH LENGTH TYPE)
The beam folding unit has two mirrors. One mirror is fixed, on which laser beams from the output coupler
are reflected first. The other is movable.
(1) Start the oscillator and make sure that laser beams can be irradiated.
(2) Attach an acrylic plate at about 3 m away from the beam outlet of the oscillator, then collect the burn
pattern of the CO2 gas laser beam (rated output, CW, irradiation period of 0.1 second). Do not touch
the acrylic plate after beam pattern collection.
(3) Check if the CO2 gas laser beam and the guide laser beam are aligned with each other. If not, make
an adjustment according to Section 5.13.
- 175 -
(4) Adjust the adjustment screw of the beam folding unit so that the center of the oscillator laser beam
matches the center of the guide laser beam. Do not touch the screws at the support points. The
spacing of support points of the mirror holder is adjusted to 3 mm.
Fig.5.26(a) Beam folding unit adjustment position (C2000i-C)
A slant movement
can be made with
the adjustment
screws.
Fig.5.26(b) Beam folding unit adjustment position (C4000i-C)
5.27 HEAT EXCHANGER

Spec.No. of Heat exchanger (OUT): A97L-0201-0556#B C2000i-C
A97L-0201-0691#B C4000i-C, C6000i-C
Spec.No. of Heat exchanger (IN): A97L-0201-0828 C2000i-C
A97L-0201-0439#B C4000i-C, C6000i-C
5.27.1 Replacement
NOTE
1) Be careful not to damage the discharge tubes and the cooling water tubes
in exchanging the heat exchanger.
2) Put on gloves not to injure your hands in touching the heat exchanger.
3) Be careful for the cooling water in the heat exchanger not to scatter.
- 176 -
5.27.1.1 C2000i-C
Figures show maintenance side of C2000i-C.
(1) Replace method of inlet side heat exchanger

(a) Check gas leak rate by automatic leak check function.
(b) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the
laser oscillator. Turn off the power to the chiller unit.
(c) Drain the cooling water from the laser oscillator. (refer to subsection 2.4.2) Disconnect the
cooling water tubes and fittings from the inlet side heat exchanger.
Gas pipe 2A
Fan unit
Water fitting for inlet side
heat exchanger Outlet side heat
exchanger
Spring nut (M6)
Water fitting for outlet
side heat exchanger
Inlet side heat exchanger

Spring nut (M6)
Cooling water tube
Fig.5.27.1(a) Surround of heat exchanger of C2000i-C
(d) Disconnect all the gas tubes from joint 1D. Cover the openings of the removed gas tubes with
masking tape.
Gas pipe 1C
Joint 1D
Fig.5.27.1(b) Surround of Gas pipe 1C of C2000i-C
(e) Mark to locate and detach a pair of the gas pipe 2A, the joint 1D and the gas pipe 1C. Cover the
openings of the removed the gas pipe 2A, the joint 1D and the gas pipe 1C with masking tape.
(f) Detach the inlet side heat exchanger removing four spring nuts (M6) referring to Fig.5.27.1(a),
for the inlet side heat exchanger not to fall.
(The inlet side heat exchanger is not likely to fall by using the jack or the spacer, shown in
Fig.5.27.1(h))
(g) Attach the new inlet side heat exchanger with four spring nuts.
(It is smooth to attach the inlet side heat exchanger by using the jack or the spacer.)
- 177 -
NOTE
Use the torque wrench not to damage the stud bolt on the inlet side heat
exchanger in tightening spring nuts in connection with gas pipe 2A.(M6 spring
nut tightening torque: 5.88N･m[60kgf･cm])
(h) Detach the masking tape from and attach a pair of the gas pipe 2A, the joint 1D and the gas pipe
1C.
NOTE
exchanger in tightening spring nuts.(M6 spring nut tightening torque: 5.88N･
m[60kgf･cm])
(i) Attach the cooling water tubes and fitting to the inlet side heat exchanger.
(j) Check gas leak rate by automatic leak check function, and make sure that it is almost same as
before exchanging.
(2) Replace method of outlet side heat exchanger

(c) Drain the cooling water from the laser oscillator. (refer to Subsection 2.4.2) Disconnect the
cooling water tubes and fittings from the outlet side heat exchanger.
(d) Detach the fan unit and the fan-assisted radiator from the laser oscillator. (refer to Section 5.14
and Fig.5.27.1(a))
(e) Mark to locate and detach a pair of the gas dust collector. Cover the openings of the removed the
gas dust collection with masking tape
(f) Remove the spring nut and detach joint 2A from the outlet side heat exchanger, not to damage
discharge tubes. Cover the openings of the removed the joint 2A with masking tape. (shown in
Fig.5.27.1(c))
Joint 2A
Spring nut (M6)
Fig.5.27.1(c) Surround of outlet side heat exchanger after detaching fan unit of C2000i-C
(g) Detach the outlet side heat exchanger removing four spring nuts (M6) referring to Fig.5.27.1(a),
for the outlet side heat exchanger not to fall.
(The outlet side heat exchanger is not likely to fall by using the jack or the spacer, shown in
Fig.5.27.1(h))
(h) Attach the new outlet side heat exchanger with four spring nuts.
(It is smooth to attach the outlet side heat exchanger by using the jack or the spacer.)
- 178 -
NOTE
Use the torque wrench not to damage the stud bolt on the outlet side heat
exchanger in tightening spring nuts. (M6 spring nut tightening torque: 5.88N･
m[60kgf･cm])
(i) Detach the masking tape and attach the joint 2A to the outlet side heat exchanger with four
spring nuts (M6), not to damage discharge tubes.
NOTE
exchanger in tightening spring nuts in connection with joint 2A.(M6 spring nut
tightening torque: 5.88N･m[60kgf･cm])
(j) Detach the masking tape and attach a pair of the gas dust collector according to marking.
NOTE
exchanger in tightening spring nuts in connection with gas dust collector.(M6
spring nut tightening torque: 5.88N･m[60kgf･cm])
(k) Attach the fan unit and the fan-assisted radiator. (refer to subsection 5.14)
(l) Attach the cooling water tubes and fitting to the outlet side heat exchanger.
(m) Check gas leak rate by automatic leak check function, and make sure that it is almost same as
before exchanging.
5.27.1.2 C4000i-C and C6000i-C

Figures show maintenance side of C4000i-C.
(1) Replace method of inlet side heat exchanger

(c) Drain the cooling water from the laser oscillator. (refer to subsection 2.4.2) Disconnect the
cooling water tubes and fittings from the inlet side heat exchanger. (refer to Fig.5.27.1(d))
Gas pipe 2A
Water fitting for inlet
side heat exchanger
Fan unit
Cooling water tube for Water fitting for outlet
inlet side heat exchanger side heat exchanger
Cooling water tube for

outlet side heat exchanger
Fig.5.27.1(d) Surround of heat exchanger of C4000i-C
(d) Disconnect all the gas tubes from joint 1C. Cover the openings of the removed gas tubes with
masking tape.(refer to Fig.5.27.1(d))
- 179 -
Gas pipe 1C
Gas tube
Fig.5.27.1(e) Surround of gas pipe 1C of C4000i-C
(e) Mark to locate and detach a pair of the gas pipe 2A and the gas pipe 1C. Cover the openings of
the removed the gas pipe 2A and the gas pipe 1C with masking tape.
(f) Detach the inlet side heat exchanger, removing the six hexagon socket head cap screw (M5×16)
and loosening the four hexagon socket head cap screw (M6×30) and lower the inlet side heat
exchanger gradually, for the inlet side heat exchanger not to fall. (shown in Fig.5.27.1(e))
(The inlet side heat exchanger is not likely to fall by using the jack or the spacer, shown in
Fig.5.27.1(h))
M6×30
M5×16
Fig.5.27.1(f) Position of hexagon socket head cap screw to fasten inlet side heat exchanger.
(g) Attach the plate of the old inlet side heat exchanger to the new inlet side heat exchanger.
NOTE
Be careful not to damage the stud bolt on the inlet side heat exchanger in
tightening spring nuts in attaching the plate.
(h) Adjust the height of the new inlet side heat exchanger by tightening the four hexagon socket
head cap screw (M6×30) to attach a pair of the gas pipe 2A to the new inlet side heat
exchanger.
(i) Fasten the new inlet side heat exchanger with the six hexagon socket head cap screw (M5×16).
(It is smooth to attach the inlet side heat exchanger by using the jack or the spacer.)
(j) Detach the masking tape from and attach a pair of the gas pipe 2A and the gas pipe 1C.
NOTE
exchanger in tightening spring nuts in connection with gas pipe 2A.(M6 spring
nut tightening torque: 5.88N･m[60kgf･cm])
(k) Attach the cooling water tubes and fitting to the inlet side heat exchanger.
(l) Check gas leak rate by automatic leak check function, and make sure that it is almost same as
before exchanging.
- 180 -
(2) Replace method of outlet side heat exchanger
(c) Drain the cooling water from the laser oscillator. (refer to Subsection 2.4.2) Disconnect the
cooling water tubes and fittings from the outlet side heat exchanger.
(d) Detach the fan unit and the fan-assisted radiator from the laser oscillator. (refer to Section 5.14
and Fig.5.27.1(d))
(e) Mark to locate and detach a pair of the gas dust collector. Cover the openings of the removed the
gas dust collection with masking tape
(f) Remove the four hexagon headed bolt (M8×20) and detach the joint 2A from the outlet side
heat exchanger, not to damage discharge tubes. Cover the openings of the removed the joint 2A
with masking tape. (shown in Fig.5.27.1(g))
Joint 2A M 8×20
Spring nut (M10)
Fig.5.27.1(g) Surround of outlet side heat exchanger of C4000i-C
(g) Detach the outlet side heat exchanger, removing the four spring nuts (M10) on the four corners
of the outlet side heat exchanger (refer to Fig.5.27.1(g)), for the outlet side heat exchanger not to
fall.
(The outlet side heat exchanger is not likely to fall by using the jack or the spacer, shown in
Fig.5.27.1(h))
(h) Attach the new outlet side heat exchanger with four spring nuts (M10).
(It is smooth to attach the outlet side heat exchanger by using the jack or the spacer.)
NOTE
Be careful not to damage the stud bolt on the outlet side heat exchanger in
tightening spring nuts.
(i) Detach the masking tape from and attach the joint 2A to the outlet side heat exchanger with the
four spring nuts, not to damage discharge tubes.
(n) Detach the masking tape and attach a pair of the gas dust collector according to marking.
NOTE
exchanger in tightening spring nuts in connection with gas dust collector.(M6
spring nut tightening torque: 5.88N･m[60kgf･cm])
(j) Attach the fan unit and the fan-assisted radiator. (refer to subsection 5.14)
(k) Attach the cooling water tubes and fitting to the outlet side heat exchanger.
(l) Check gas leak rate by automatic leak check function, and make sure that it is almost same as
before exchanging.
- 181 -
Jack
Plate
Fig.5.27.1(h) Use of Jack
- 182 -
B-70475EN/01 6.LASER SOFTWARE FUNCTION
6 LASER SOFTWARE FUNCTION

Chapter 6, “LASER SOFTWARE FUNCTION” consists of the following contents:
6.1 MAINTENANCE SCREEN .............................................................................................................183

6.2 POWER FEEDBACK FUNCTION BASED ON THE ACTUAL OUTPUT ESTIMATION
METHOD..........................................................................................................................................193
6.3 OIL EXCHANGE TIME LIMIT ALARM MONITOR FOR TURBO BLOWER..........................197
6.4 LASER POWER SUPPLY AUTOMATIC ADJUSTMENT FUNCTION .....................................199
6.5 TURBO BLOWER OIL ABNORMALLY TEMPERATURE DETECT FUNCTION...................201
6.6 SUPPORT FUNCTION FOR START-UP AFTER TURBO OIL EXCHANGE.............................202
6.1 MAINTENANCE SCREEN
6.1.1 Overview
The laser maintenance screen function can display maintenance information for the preventive
maintenance and failure investigation, and operate data so that the decrease of failure rate and the
efficiency of work.
The laser maintenance screen is composed of the following screens.
Name of screen Function

Screens for power calibration coefficient History of Power calibration coefficient and RF voltage No.1
1
history can be referred.
Working time for the parts needed periodical maintenance is
2 Screens for parts working time
counted and displayed.
History screens of alarm related to electrical When the alarms related to the electrical discharge are
3
discharge generated, the related data can be logged and referred later.
Laser alarms and warnings are logged and can be referred
4 Laser alarm history screens
later.
Table data for the pulse power feedback by actual power
5 Pulse power feedback screens
presumption method can be read into CNC and edited.
Power sensor time constant measurement The time constant of laser power sensor can be measured.
6
screen
7 Leak check screen Leak of laser oscillator can be checked.
The data used at maintenance are displayed and operated in
1 screen.
8 Laser tuning screen
It is possible to command running beam internally with shutter
closed.
It has another function below:

Function
1 Output of the saved maintenance data to the memory card
Input the table data for pulse power feedback from the memory card
- 183 -
6.LASER SOFTWARE FUNCTION B-70475EN/01
6.1.2 Method of Operation

(1) Set bit 0 (MNT) of parameter No. 15160 to 1 to enable maintenance screen display.
#7 #6 #5 #4 #3 #2 #1 #0
15160 MDS MNT
MNT
0: Does not display the laser maintenance screen.
1: Displays the laser maintenance screen.
MDS
0: Disables data input on the laser maintenance screen.
1: Enables data input on the laser maintenance screen.
(2) Press the "Setting" operation key on the CNC.

Then, press the soft keys at the bottom of the CNC screen as follows:
POWER SET DATA 3D.TRN
STATUS MAINT.
PW.CLB ACT TM DISCH.

L ALM
PWR FB PS TC LEAK TUNE
6.1.3 Display Information
6.1.3.1 Compensation coefficient history display

When the power calibration coefficient setting function is operated, a power calibration coefficient and
the current RFV1 value and date/time are preserved. Up to 30 items of data can be recorded. If this limit
is exceeded, the oldest data is deleted to record new data.
Pressing the [PW.OFS] soft key displays the power calibration coefficient history screen.
This screen consists of three pages. One page displays ten compensation coefficients. Data with younger
dates is displayed in upper fields on the screen. When a new compensation coefficient is registered, it is
displayed on the top line of the first page.
- 184-
To switch pages, use the "PAGE ↑" and PAGE ↓" keys on the MDI panel. The preserved compensation
coefficient data cannot be edited.
6.1.3.2 Parts run time display

Pressing the [ACT.TM] soft key causes the operation time display screen to be displayed. To switch
pages, use the "PAGE ↑" and PAGE ↓" keys on the MDI panel.
If you enter a limit time in a set time field in advance, the operation time display will turn red when the
operation time exceeds 90% of the set time. If it exceeds the set time, the operation time display in red
reverse video.
If working time is over the limit time for any item, warning signal (F226#0) is output to PMC.
And if the following items are over the limit time, the signal (F226 #1 to #7) is output corresponding to
the each item. Please use these signals in case warning lamps are equipped on an operator’s panel.
• Turbo-blower overhaul F226#1
• Blower oil change F226#2
• Inner mirror cleaning F226#3
• Mirror cleaning of optical compensation unit F226#4
• Chiller coolant change F226#5
The set time and the operation time are in 0.1-hour units.
• Methods of entering a set time and resetting an operation time

In this normal state, this screen prohibits the entry of data so that data such as operation times is not
deleted by mistake.
To enter data, first set bit 1 of parameter No. 15610 (MDS) to 1.
To enter a set time or reset an operation time, position the cursor on the desired field, using the
arrow keys as appropriate, enter a setting from the MDI unit, and press the <INPUT> key.
No special soft keys such as all clear are not available. To reset an operation time, set 0.
6.1.3.3 Discharge-related alarm history display

When the CNC detects any of the following alarms, the CNC automatically preserves data such as power
supply operation state and displays such data on the discharge-related alarm history screen:
- 185 -
- ALM.4063 R/F power supply error

- ALM.4066 Abnormal discharge start
- ALM.4076 Decreased laser power
- ALM.4088 Abnormal discharge tube voltage
If alarms subject to data preservation are issued, up to five data items can be preserved. If an alarm is
issued besides the existing five alarms, the oldest data is deleted to preserve the new data. In addition to
five data items preserved for issued alarms, one data item collected at the end of normal power calibration
operation is preserved as normal data. Thus, data for an alarm issued can be compared with normal data.
Alarm code Content of alarm Comment
15 RFF
14 DCI2
13 DCI1
12 DCI3
Single alarm
11 RFV
10 OH
9 Vc
8 RFI
7 RFF other
6 DCI other
5 DCI1 other
4 DCI3 other
Plural alarm
3 RFV other
2 OH other
1 Vc other
0 RFI other
Pressing the [ALARM] soft key displays the discharge-related alarm history screen. This screen consists
of six pages. The first page displays data collected at the end of normal power calibration, and the second
through the sixth pages display data for alarms issued. To switch pages, use the "PAGE ↑" and PAGE ↓"
keys on the MDI panel. The discharge-related alarm history screen allows data to be referenced only. The
discharge-related alarm history screen does not allow preserved data to be modified and deleted. The
CNC preserves the data below when an alarm mentioned above is issued and when power calibration
ends.
(1) Data preserved at the end of normal compensation operation
• Compensation end date
• Compensation end time
• Output conditions (output, frequency, duty cycle)
• Actual output
• Power calibration coefficient
• Power supply data (RFV, RFI, DCV, DCI, DCW)
- 186-
(2) Data preserved when an alarm is issued
• Alarm issue date
• Alarm issue time
• Issued alarm number
• Sequence number at the time of alarm issue
• Elapsed time after switching to a sequence number at the time of alarm issue
• Output conditions (output, frequency, duty cycle)
• Actual output
• Power calibration coefficient
6.1.3.4 Laser alarm history screens

The history of only Laser alarms and warnings are displayed.
Following data can be logged 50 in all. The oldest datum is deleted and new one is logged in case of
exceeding 50 items.
• Laser warning
• Laser alarm
(1) Laser warning
Information for maintenance is logged as laser warning.
The information is only logged. So, message or PMC signal is not output.
Laser warning is only following information now.
Warning No. 0001

Message PURGE INCOMPLETE
Meaning CNC is powered off before completing purge.
(2) Reference of logged laser alarms

Pushing soft-key [L ALARM] makes displaying laser alarm history screen (9 inch CRT image).
Five Laser alarms and warnings are logged in one page and total 10 pages are included.
“PAGE ↑” and “PAGE ↓” keys on MDI panel should be used to change the pages.
Logged data cannot be deleted.
- 187 -
6.1.3.5 Pulse power feedback screens

Table data for actual power presumption that are used for pulse power feedback by actual power
presumption method can be referred and input.
Pushing soft-key [PWR.FB] with setting 1 to parameter No.29000#1(PTB) makes displaying pulse power
feedback screen.
6.1.3.6 Power sensor time constant measurement screen
A time constant of laser power sensor can be automatically measured in power sensor time constant
measurement screen.
Pushing soft-key [PW SNS] with setting 1 to parameter No.2900#2 (PTC) makes displaying power sensor
measurement screen.
CNC measures an actual delay time by measuring a power sensor output with output laser and sets the
time to the parameter as a time constant.
In practical, beam stops after running beam with shutter closed for a set time by a set power and CNC
measures the time that a monitored power of power sensor is down.
The measured time is set in parameter No.29005 as the time constant of linear delay filter.
(1) Sequence of time constant measurement

Pushing soft-key [STRT] in time constant measurement screen or setting PMC signal PTCMR to 1
makes start of measuring.
- 188-
Push soft-key [QUIT] or set PMC signal PTCMR to 0 in order to quit the measurement.
Pushing soft-key [(OPRT)] in time constant measurement screen makes displaying soft-key [STRT]
and [QUIT].
A peak laser power should be set in parameter No.29003 because of a rated power is different for
each type of oscillator.
In addition, beam output time should be set in parameter No.29004.
A beam is internally run with shutter closed in case of satisfying following conditions.
• Laser sequence No. (Diagnose No.908) is 3000.

• Shutter lock is ON. (*SHTLC signal is 0.)
• Shutter is closed.
• Beam is not output.
• Alarm does not occur.
Present status can be confirmed in power sensor time constant measurement screen.
6.1.3.7 Leak check screen
It is possible to set parameters for leak check and confirm leak check result by leak check screen.
Pushing soft-key [leak] makes displaying leak check screen.
Switching off gas control start signal G222#6 (RUN) after setting parameters for leak check causes
starting leak check.
(1) Switching bit to select leak check enable or disable

Status of parameter No.15153#0 (LCK) is displayed and it is possible to set the parameter in leak
check screen.
0 : Leak check disable
1 : Leak check enable
(2) Leak check judgment time

Setting value of leak check judgment time (parameter No.15154) is displayed and it is possible to
input a value to the parameter in the screen.
(3) Status
The status of leak checks operation is displayed. The following contents are displayed.
• STAND BY
• GAS PRES CHECK 1ST
• LAS PRES CHECK 2ND
• GAS PRES CHECK 3RD
- 189 -
• GAS PRES CHECK 4TH
(4) Time remaining

The estimated time to leak check end is displayed when all the valves are shut after completion of
evacuation.
The displayed time is deducted by passage time.
The displayed time is not guaranteed because it is rough estimated.
(5) Leak check result

Laser gas pressure 1 to 4 (Diagnose No.954 to 957) read during leak check are displayed.
The data are only displayed and cannot be reset or operated.
The data are displayed by Torr and kilo-Pascal (kPa).
6.1.3.8 Laser tuning screen

Parameters and diagnoses that are often used at maintenance are displayed in a mass.
Parameters can be set from the screen.
Running beam internally with shutter closed can be commanded from the screen
(1) Displayed data

Pushing soft-key [TUNE] makes displaying laser tuning screen (9 inch CRT image).
Laser tuning screen is composed of three pages.
“PAGE ↑” and “PAGE ↓” keys on MDI panel should be used to change the pages.
Data displayed each page are as follows.
- 190-
Page Data name Message Type No. Notice

1 Command power for running beam internally PC: WRK
Pulse Frequency for running beam internally FR: WRK
Pulse duty for running beam internally DU: WRK
Power calibration coefficient COE: PRM 15204 (Note)
Actual laser power PA: DGN 906
Laser gas pressure TP: DGN 905
Laser sequence status SEQ. DGN 908
RF voltage RFV (PSU1-PSU8) DGN 909-
RF current RFI (PSU1-PSU8) DGN 910-
DC voltage DCV (PSU1-PSU8) DGN 925-
DC current DCI (PSU1-PSU8) DGN 926-
DC wattage DCW (PSU1-PSU8) DGN 941-
2 Assist gas enable AGA PRM 15000#2
Beam on enable with shutter closed BMO PRM 15000#3
Power calibration enable CLB PRM 15000#4
Evacuation enable at RUN-OFF GVW PRM 15003#2
DCV,DCI,DCW display enable (DCW) PRM 15008#5
Power calibration command at all tubes use POWER CALIB. 4 PRM 15201
Power calibration coefficient PWR-CALIB. COE PRM 15204
Upper limit of power command PWR-COMAND LIMIT PRM 15207
Laser power feedback gain FEEDBACK GAIN PRM 15208
Maximum power command MAXIMUM POWER PRM 15210
3 Minimum power command MINIMUM POWER PRM 15211
Upper limit of power command for duty UNCLMP PC CMD-LMT PRM 15212
unclamped
Power input calibration coefficient PWR-INPUT CALIB. PRM 15215
Wait time for starting discharge WAIT DISCHARGE PRM 15222
Bias command BIAS COMMAND PRM 15223
Laser gas pressure at oscillating(50Hz) INT. PRES. OSCIL PRM 15242
Laser gas pressure at oscillating(60Hz) INT. PRES. OSCIL PRM 15243
Permission range for power down POWER DEC. LIMIT PRM 15271
Power table data for all tubes use 6 (POWER TBL ALL 6) PRM 15306
Power table data for all tubes use 7 (POWER TBL ALL 7) PRM 15307
(Note) It is not possible to set by this screen.
Type) WRK: Special parameter(Writable)

PRM: Parameter(Writable)
DGN: Diagnose(Only display)
- 191 -
Remark) Please set 1 to parameter No.15160#1(MDS) in case of writing special parameter and
parameter.
6.1.3.9 Command of running beam internally with shutter closed

It is possible to command running beam internally with shutter closed in laser tuning screen.
Pushing soft-key [(OPRT)] in laser tuning screen makes displaying soft-key [DISCH.], [DISC.2] and
[CAN]. (Refer to figure on the previous page.)
Pushing soft-key [DISCH.] or [DISC.2] with satisfying following conditions causes running beam
internally with shutter closed
• Parameter No.15160#1(MDS) is set 1.

• Laser sequence No. (Diagnose No.908) is 30.
• Shutter lock is ON.
• Beam output is not commanded.
• Laser alarm does not occur.
Pushing soft-key [CAN] during running beam internally causes stopping beam.
When soft-key [DISCH.] is pushed, the beam output condition is determined only by the command power,
the pulse frequency, and the pulse duty in the laser tuning screen.
The power calibration coefficient, the power feedback and each override-command are invalid.
When soft-key [DISC.2] is pushed, above three functions are valid.
NOTE
The running beam internally does not stop even if the RESET ( ) key or
BEAM OFF switch is pushed in case of commanding the running beam internally
on the laser tuning screen.
In addition, the running beam internally stops when the switch of the emergency
stop or HV-OFF is pushed.
6.1.3.10 Input and output of saved maintenance data

The saved data can be output to memory card or other external device via reader puncher interface
(RS-232C). In addition, some kind of the data can be input.
The format of the output data is almost the same as the display of LCD, but the comment is output only in
English.
The data that can be input and output are as follows.
Data Output Input

Power calibration coefficient history data OK NG
Parts running time data OK NG
Alarm related to discharging data OK NG
Laser alarm history data OK NG
Power feedback table data OK OK
(1) Output the data to memory card with operating the each maintenance screen
(a) The I/O channel should be switched to the memory card by setting 4 to parameter No.0020.
(b) After switching the operation mode to "EDIT", data are output by pushing the soft-key as follows.
[OPER] -> [PUNCH] -> [EXEC]
(c) The output data are saved as a text file and the file is named as follows.
- 192-
Data File name

Power calibration coefficient history data PW-OFS.DAT
Parts running time data P-ACT.DAT
Alarm related to discharging data LSALM-H.DAT
Laser alarm history data LSRALMHT.DAT
Power feedback table data LPPFBDT.DAT
(2) Data Input from and output to external device via reader puncher interface with operating the each
maintenance screen
(a) HANDY-FILE should be connected with CNC.
In addition, HANDY-FILE should be communicated with CNC by setting communication
conditions such as I/O channel, baud rate, etc to CNC parameters.
(b) Select the screen of desired data and push soft-key [(OPRT)] after switching the operation mode to
"EDIT",.
(c) Push soft-key [PUNCH] in case of data output and push soft-key [READ] in case of data input.
In addition, push soft-key [EXEC], then data can be output or input.
(d) The file name should be set by the receiver (HANDY-FILE).
(3) Data Input from and output to memory card with operating ALL-IO screen
(a) The I/O channel should be switched to the memory card by setting 4 in the parameter (No.0020).
(b) After switching the operation mode to "EDIT", ALL-IO screen should be selected, and push the
soft-key corresponding to the desired data.
(c) Push soft-key [OPER], and soft-key [PUNCH] and [F READ] are displayed.
Push soft-key [PUNCH] in case of data output. Push soft-key [F READ] in case of data input.
(d) Set an arbitrary file name set and push soft-key [EXEC].
Data Soft-key
Power calibration coefficient history data [PW.OFS]
Parts running time data [ACT.TM]
Alarm related to discharging data [DISCH.]
Laser alarm history data [L ALM]
Power feedback table data [PWR FB]
6.2 POWER FEEDBACK FUNCTION BASED ON THE ACTUAL

OUTPUT ESTIMATION METHOD
6.2.1 Overview
Based on specified output conditions, this function estimates an actual output by using the data table in
which the relationships between the specified output conditions and actual outputs are registered, and
exercises feedback control, aiming at the estimated value. Necessary data needs to be registered
beforehand in the data table.
The feedback gain and compensation clamp value are the same as used with the conventional feedback
control function. (A feedback gain is set in parameter No. 15208, and a compensation clamp value is set
in parameter No. 15209.)
6.2.2 Data Table
6.2.2.1 Method of registration

(1) Set bit 0 (MNT) of parameter No. 15160 and bit 1 (PTB) of parameter No. 29000 to 1 to enable
display of the data table screen for actual output estimation.
- 193 -
#7 #6 #5 #4 #3 #2 #1 #0
15160 MNT
MNT
0: Does not display the laser maintenance screen.
1: Displays the laser maintenance screen.
#7 #6 #5 #4 #3 #2 #1 #0
29000 PTB PFB
PFB Pulse power feedback control based on the actual output estimation method is:
0 : Not used.
1 : Used.
PTB On the data table screen for actual output estimation, data input is:
0 : Disabled.
1 : Enabled.
When this parameter is set to 0, the screen is not displayed, and data cannot be input.
Usually, set this parameter to 0 to prevent the data from being modified inadvertently.
(2) Press the operation key "Setting" of the CNC. Then, press the soft keys displayed at the bottom of
the CNC screen as shown below.
STATUS MAINT.

L ALM
Data table for actual output estimation
6.2.2.2 Data table structure

This function creates a table for each of eight specified peak powers.
For one peak power, eight frequencies and six duty cycles can be set.
Frequencies and duty cycles need not be set at equal intervals.
- 194-
Data table for actual output estimation
Peak power
Duty 1 Duty 2 Duty 3 Duty 4 Duty 5 Duty 6
Frequency 1 Actual output Actual output Actual output Actual output Actual output Actual output
1 9 17 25 33 41
2 10 18 26 34 42
3 11 19 27 35 43
4 12 20 28 36 44
5 13 21 29 37 45
6 14 22 30 38 46
7 15 23 31 39 47
8 16 24 32 40 48
Eight tables are prepared (for peak powers 1 to 8).

Data to be registered needs to satisfy the following conditions:
Peak power 1 < Peak power 2 < Peak power 3 . . < Peak power 8
Frequency 1 < Frequency 2 < Frequency 3 . . . < Frequency 8
Duty 1 < Duty 2 < Duty 3 . . < Duty 6
6.2.3 Compensation for Power Sensor Response Speed

To improve the response delay of the power sensor, the monitored value of the power sensor to be
returned in response to an output command value is estimated, and feedback control is exercised
according to the deviation between the estimated value and the monitored value of the power sensor.
Estimation processing is based on the primary delay filter to which an output command value is input.
Therefore, a time constant needs to be set beforehand.
6.2.3.1 Time constant measurement method

(1) Set bit 2 (PTC) of parameter No. 29000 to 1 to enable display of the data table screen for actual
output estimation. The rated output depends on the oscillator model. So, set a measured peak power
in parameter No. 29003 actually. In addition, set a beam output time in parameter No. 29004.
#7 #6 #5 #4 #3 #2 #1 #0
29000 PTC
PTC On the time constant measurement screen, time constant measurement is:
0 : Disabled.
1 : Enabled.
When this parameter is set to 0, the screen is not displayed, and time constant
measurement is disabled.
However, a time constant measurement can be made using an external signal.
Usually, set this parameter to 0 to prevent the time constant measurement function from
being started inadvertently.
29003 Peak power in power sensor time constant measurement
[Data type] Word

- 195 -
[Unit of data] W
[Valid data range] 0 to 32767
Set a peak power in measurement of the time constant of the power sensor.
Usually, set the rated output of the oscillator.
29004 Beam output time in power sensor time constant measurement
[Data type] Word

[Unit of data] msec
Set a period of time for which a beam is output to measure the time constant of the power
sensor.
(2) Press the operation key "Setting" of the CNC. Then, press the soft keys displayed at the bottom of
the CNC screen as shown below.
STATUS MAINT.

L ALM
Time constant
measurement screen
(3) Start a measurement by pressing the [START] soft key on the dedicated time constant measurement
screen. Perform internal discharge at the rated output for a certain time, then stop the beam
command. Next, measure the time required until the monitored value of the power sensor becomes
lower than 36.8% of the rated output. Set the measured time in parameter No. 29005 as the time
constant of the primary delay filter.
29005 Power sensor time constant
[Data type] Word

[Unit of data] msec
Set a time constant for the power sensor.
6.2.4 Bell-shaped Filter for Power Feedback Gain

To suppress output command value variation due to power feedback at the time of output command value
switching, a bell-shaped filter can be applied to the power feedback gain.
(1) Filter setting method

Set parameter No. 29001 and parameter No. 29002.
- 196-
29001 Time constant 1 (T1) for bell-shaped filter for power feedback gain
[Data type] Word

[Unit of data] msec
Set a time constant for a linear section. When 0 is set in this parameter, the bell-shaped
filter is not used.
[Data type] Word

[Unit of data] msec
Set a time constant for a round section.
A bell-shaped filter can be specified by setting two time constants: one for the linear
section T1 (parameter No. 29001) and the other for the round section T2 (parameter No.
29002).
Gain
t
T2
T1
6.3 OIL EXCHANGE TIME LIMIT ALARM MONITOR FOR

TURBO BLOWER
6.3.1 Overview
Turbo blower acting time is monitored to prevent the turbo blower from breaking down. In addition,
alarm occurs and laser oscillator is shut down to status before oscillator starts (It is purged and stops) if
turbo blower acting time exceeds time limit of oil change by 500 hours without changing the oil in the
turbo blower.
Laser oscillator cannot be started up until the oil is exchanged and the alarm is cleared.
6.3.2 Function
When “ACT TIME” of BLOWER OIL in Operation Time Screen of Laser Maintenance Screen Function
exceeds “SET TIME” by 500 hours, alarm No.4116 occurs.
However, the alarm does not occur during cycle start lamp signal F000#5 (STL) is１.
After the signal becomes 0, the alarm occurs.
When the alarm occurs, the laser status is returned to status of purge completion (status before oscillator
starts).
Moreover, if the alarm is not released, the oscillator cannot be started up again.
When the parameter No.15160#2(OAL) is 0, the alarm is not generated.
- 197 -
When the value at “SET TIME” of BLOWER OIL in Operation Time Screen is 0, the alarm is not
generated.
6.3.3 Setting
Please set the exchange cycle of the oil in the turbo blower to "SET TIME" of BLOWER OIL in the
Operation Time Screen of Laser Maintenance Screen Function. Operation Time Screen can be displayed
according to the following procedures.
(1) Set parameter No.15160#0 (MNT) to "1"

(2) Set parameter No.15160#1 (MDS) to "1"
(3) Set parameter No.15160#2 (OAL) to "1"
(4) Push the MDI key "OFFSET" several times, and the laser screen is displayed.
(5) Push the right edge soft key (continuance menu key), and the page is changed.
(6) Push soft key "MAINT.", and the screen related to the laser maintenance is displayed.
(7) Push soft key "ACT.TM", and operation time screen is displayed.
(8) Push the MDI key " PAGE↓", and the item of the blower oil is displayed.
[Transition chart of soft key ]

STATUS MAINT.
PW.OFS ACT.TM DISCH. L ALM
Operation time screen
[Operation time screen , Page-2 ]

[ CHANGE ] 2/3
SET ACT
NO. ITEM TIME TIME
1 VANE PUMP OIL 12345678 12345678
2 VANE PUMP FILTER 12345678 12345678
3 GAS FILTER 12345678 12345678
4 CHILLER WATER 12345678 12345678
5 BLOWER OIL 12345678 12345678
6 O RING(DISC.TUBE) 0 0
7 O RING(VENTILAT.) 12345678 12345678
8 WARNING LAMP 0 0
9
10
The units of “SET TIME” and “ACT TIME” are 0.1 hours.
The count of the operation time (ACT TIME) starts when a value is input at "SET TIME".
The display at “ACT TIME” reddens when “ACT TIME” exceeds 90% at “SET TIME”.
When “ACT TIME” exceeds “SET TIME”, the display at “ACT TIME” becomes a reversing display of
red.
- 198-
The alarm No.4116 occurs and the laser sequence returns to status of purge completion (status before
oscillator starts) when the operation time exceeds set time by 500 hours.
However, the alarm does not occur when Cycle Start Lamp signal F000#5 (STL) is１.
The alarm does not occur until Cycle Start Lamp signal becomes 0
Please set parameter No.15160#1 (MDS) to 0 to prevent set time being mis-input when the setting of the
alarm monitor ends.
The input to “SET TIME” is prohibited when MDS is 0.
6.3.4 Release of Alarm

Please exchange the oil in the turbo blowers when the alarm occurs.
After the oil is exchanged, please display Operating Time Screen and set 0 at the “ACT TIME” of
BLOWER OIL.
Then push the reset key.
6.4 LASER POWER SUPPLY AUTOMATIC ADJUSTMENT

FUNCTION
6.4.1 Overview
Laser power supply is adjusted by automatic adjustment function. The sequences of laser power supply
automatic adjustment function consist of 2 steps (The base adjustment and The power supply output
(DCW) adjustment). For the base adjustment, it finds the offset parameter of laser power supply where
the trigger discharge is maintained for the breakdown voltage. For the power supply output (DCW)
adjustment, it finds the gain parameter of laser power supply where the power supply output (DCW)
come to adjustment target value (parameter No.29374), when laser power command is parameter
No.29373.
6.4.2 Setting
Set bit 4 (CLB) of parameter No.15000 to 0 to disable the Power calibration
#7 #6 #5 #4 #3 #2 #1 #0
15000 CLB
CLB Power calibration is

0 : Disabled
1 : Enabled
Set bit 6 (EGE) of parameter No. 15008 to 0 to disable the automatic aging function.
#7 #6 #5 #4 #3 #2 #1 #0
15008 EGE
EGE Automatic aging function is

0 : Disabled
1 : Enabled
Set bit 0 (PWC) of parameter No.29395 to 0 to disable the output conformation.
- 199 -
#7 #6 #5 #4 #3 #2 #1 #0
29395 PWC
PWC When the power calibration is disabled, the output confirmation by the calibration 1C is
0 : Disabled
1 : Enable
Set bits 0 to 7 (PA1 to PA7) of parameter No.29360 to 1 for the power supply where the laser power
supply automatic adjustment is performed.
#7 #6 #5 #4 #3 #2 #1 #0
29360 PA8 PA7 PA6 PA5 PA4 PA3 PA2 PA1
PA1 to PA8
0 : Does not perform the laser power supply automatic adjustment.
1 : Perform the laser power supply automatic adjustment.Laser power supply
6.4.3 Operation of Laser Power Supply Automatic Adjustment

(1) When you set parameter No.29360 and turn on the discharge start signal (HV ON), the laser power
supply automatic adjustment function begins. ”PSU ADJ" is displayed on the CNC screen during
the laser power supply automatic adjustment. This function end normally, and state of base
discharge of laser sequence 3000. The progress of this function is displayed on DGN. No.2509 by
the value from 1 to 10. The following tables show the state number from 1 to 10 and the relation of
the operation content.
DGN.No.2509
Content of laser power supply automatic adjustment
ADJUSTMENT STATUS
1 Laser sequence 2000(LRDY) to sequence 3000(LSTR)
2 Check the stability of the gas pressure before the base adjustment
3 Measure the discharge beginning judgment value of the base adjustment
4 Detect the discharge beginning state of the base adjustment
5 Adjust the base discharge
6 Prepare the adjustment of the power supply output
7 Increase the power command gradually
8 Warm-up and Check the stability of the gas pressure
9 Adjust the power supply output
10 End the laser power supply automatic adjustment function
- 200-
6.5 TURBO BLOWER OIL ABNORMALLY TEMPERATURE

DETECT FUNCTION
6.5.1 Overview
This function adjusts the turbo oil temperature sensor automatically in the replacement of turbo blower.
This detects the abnormal rising of turbo oil temperature, or detects cut of the line on turbo oil
temperature sensor circuit.
6.5.2 Setting
Set the parameter No.29330#0 (OLS) to 1.
#7 #6 #5 #4 #3 #2 #1 #0
15000 OLS
OLS Automatic sequence to set the alarm judge value for the turbo oil temperature sensor is
0: Not executed.
1: Executed.
6.5.3 Operation
When the laser sequence starts setting the parameter No.29330#0 (OLS) to 1, below automatic sequence
is executed at LSTR (Sequence No.3000).
(1) Internal discharge on power calibration command (Parameter No.15320) is executed for 15 minutes.
(2) The voltage to measure the resistance of oil temperature sensor is detected.
VLD1: DGN No.2505
VLD2: DGN No.2506
Multiply these values by the coefficient 0.778, and then store the parameters.
VA1=VLD1 x 0.778 : Parameter No.29331
VA2=VLD2 x 0.778 : Parameter No.29332
(3) After the internal discharge, “1” is set to the parameter No.29330#0 (OLS)
6.5.4 Alarm
When easily below one condition is satisfied, it is issued alarm No.4106 (BLOWR OIL TEMP.).
VLD1 < VA1 or VLD2 < VA2 （Abnormal temperature detect）
VLD1 > 2000 or VLD2 > 2000 （Cut of line detect）
- 201 -
6.6 SUPPORT FUNCTION FOR START-UP AFTER TURBO

OIL EXCHANGE
This function performs negative gas leak check, positive gas leak check and exhausting with RUN ON.
After that, discharge aging is performed. Next, power calibration is performed, and it is possible to use
normally.
6.6.1 Setting
Set “1” to Parameter No.29330#0 (ATO).
#7 #6 #5 #4 #3 #2 #1 #0
29330 ATO
[Data type] Bit

ATO Automatic sequence after turbo oil exchange is
0 : Not executed.
1 : Executed.
29333 Number of aging in start-up after turbo oil exchange
[Data type] Word

[Unit of data] 10mV
This parameter sets the number of aging in start-up after turbo oil exchange.
Standard setting 2
- 202-
APPENDIX
A.EXTERNAL VIEW OF LASER
B-70475EN/01 APPENDIX OSCILLATOR
A EXTERNAL VIEW OF LASER OSCILLATOR
Fig. A(a) External view of laser oscillator (C2000i-C : short optical path length type)
Fig. A(b) External view of laser oscillator (C2000i-C : long optical path length type)
- 205 -
A. EXTERNAL VIEW OF
LASER OSCILLATOR APPENDIX B-70475EN/01
Fig. A(c) External view of laser oscillator (C4000i-C : short optical path length type)
Fig. A(d) External view of laser oscillator (C4000i-C : long optical path length type)
- 206 -
A.EXTERNAL VIEW OF LASER
B-70475EN/01 APPENDIX OSCILLATOR
Fig. A(e) External view of laser oscillator (C6000i-C)
- 207 -
B.SPECIFICATIONS APPENDIX B-70475EN/01
B SPECIFICATIONS
C2000i-C C2000i-C C4000i-C C4000i-C
Item (Short optical (Long optical (Short optical (Long optical C6000i-C
path length) path length) path length) path length)
Type C2000i-C C4000i-C C6000i-C
Method High-speed axial CO2 laser by high-frequency discharge excitation
Structure Integrated type (Oscillator and power supply)
Rated laser output 2,000 W 4,000 W 6,000W
2,500 W 4,000 W 6,000W
Maximum laser output
Continuously variable output range of 100W or greater
2,700W 4,000W 7,000W
At duty less than
Pulse peak value
For 500Hz or less and a duty cycle of 50% or less 85% in 6000W or
more
±1% ±2%
Output stability
For rated output and eight continuous operation during output feedback control
Laser wavelength 10.6μm
Beam mode Low order one
Beam diameter (at Approximately Approximately Approximately Approximately Approximately
outlet) φ27mm or less φ24mm or less φ27mm or less φ24mm or less φ28mm or less
Circular
Polarization 45° linear polarization 90° linear polarization
polarization
Angel of beam
2 mrad or less
divergence (full angle)
Pulse output command
5 to 32,767 Hz
frequency
Pulse output command
0 to 100%
duty factor
Mixture of CO2:He:N2（N2 balance）
Composition
Laser Composition ratio 5±0.25% : 60±3.00% : 35±1.75%
gas Gas pressure 0.175±0.025 MPa (0.15 to 0.20 MPa) measured on a gauge
Consumption About 10 liters/h About 20 liters/h
125 liters/min or
Amount 75 liters/min or more 160 liters/min or more more for each of
paths A and B
Temperature 20 to 30°C
Stability of
±1°C (for laser output stability of
Cooling water ±2°C (for laser output stability of 2%)
1%)
water temperature
Circulating
water 0.5 MPa or less on a gauge
pressure
Recommended
22kW or more 44kW or more 66kW or more
cooling capacity
200VAC +10%, -15%, 50/60 Hz±1Hz or 220VAC +10%, -15%, 60 Hz±1Hz
Power requirements
or 230VAC +5%,-10%, 60Hz±1Hz
Required input power 33 kVA 55 kVA 75 kVA
Maximum current 110A 190A 255A
Hour meter Total operation hours of the exhaust pump
Electric shutter Provided
Warning lamp Blinks while discharge is in progress. (option)
Mass About 700 kg About 900 kg About 1,300 kg
- 208 -
B-70475EN/01 APPENDIX C.LASER ALARM LIST
C LASER ALARM LIST

Number Message Content
This alarm is issued when the A/D converter on the Interface PCB does
4061 A/D CONVERTER–1 not return the conversion completion signal in the specified time after
the start of conversion.
This message appears when the laser power supply unit becomes
4063 LASER GAS OR PSU
abnormal or performs protective operation.
4065 SHUTTER ACTION Shutter action is abnormal.
When the HVON signal is turned on, the discharge starts. This alarm is
4066 DISCHARGING issued if the voltage of at least one discharge tube exceeds the setting
of the parameter.
This alarm is issued, if a work piece reflects laser beam more than the
4068 BEAM REFLECTION
rating to the laser oscillator.
When the signal watch signal, which is send to CNC, is abnormal, this
4069 LASER IF PCB
alarm is issued.
Turning on the oscillator start switch causes the system to output a
chiller start request signal to the machine. After a chiller ready signal is
4070 CHILLER NOT READY
received from the chiller unit, this signal is monitored, and if this signal
is interrupted, this alarm is issued.
When starting machining, the CNC monitors the assist gas ready signal
4071 ASSIST GAS NOT READY from the assist gas supply unit in the machine. If this signal is
interrupted, this alarm is issued.
The pressure of the laser gas supplied to the laser oscillator is
4073 LASER GAS PRES. monitored. This alarm is issued, if this pressure is out of permissible
range.
The oxygen density in the cabinet of the laser oscillator is monitored by
4074 OXYGEN DENSITY sensor. When this is greater than the allowance value, the alarm
occurs.
4075 CHILL TEMP. This alarm occurs when the sensor detects condensation.
This alarm is issued if the monitored laser output is lower than the
4076 LASER POWER DOWN
specified laser output by at least the allowable value.
This alarm is issued if the temperature absorber exceeds the allowable
4077 ABSORBER TEMP.
value.
This alarm is issued, if the monitored gas pressure deviates by
4078 LASER TUBE PRES.
±(Parameter No.15251) from the set gas pressure.
4079 PUSH RESET KEY If the emergency stop button is pressed, this alarm is issued.
This alarm is issued if the pressure does not reach the prescribed
4080 LASER TUBE EXHAUST vacuum pressure when the specified time has elapsed after the start of
exhaust.
4081 GAS PRES. CONTROL This alarm is issued if the pressure falls out of the prescribed range.
4082 TUBE PRES. SENSOR This alarm appears when the signal of the pressure sensor vanishes.
This alarm appears when the laser output power decreases and takes
4085 MIRROR CLEANING
an abnormally higher calibration coefficient.
This alarm is issued when the temperature of the shutter mirror
4087 SHUTTER OH
exceeds a preset maximum.
This alarm is issued, if the voltage applied to the discharge tube drops
4088 LASER VOLTAGE DOWN
largely.
When the assist gas is not chosen or not set the condition of assist
4089 ASSIST GAS NO SELECT
gas, this alarm is issued.
This alarm is issued if an attempt is made to radiate a laser beam when
4090 LASER NOT GENERATE
the laser is not in the oscillation ready (SEQ3000) state.
This alarm occurs when the thermal switch of the motor starter for the
4094 VANE PUMP
exhaust pump is tripped.
- 209 -
C.LASER ALARM LIST APPENDIX B-70475EN/01

This alarm is issued if the reading error occurs in analogue monitor unit
4095 AMU ERROR
(AMU)
When the gas pressure does not rise after the discharge start signal
4099 GAS PRES. NOT REACH (HV ON) is turned on in SEQ2700, or on the way of SEQ2600 from
quick power saving, this alarm is issued.
If the inverter used to power the turbo blower is abnormal, this alarm is
4100 INVERTER-1
issued.
This alarm is issued, if a frequency reached signal is not received
4101 OUT OF FREQUENCY-1 within the time of the parameter No.29397 + No.29388 after the turbo
blower is started.
This alarm is issued, if the temperature of the turbo blower motor
4105 BLOWER MOTOR TEMP.
winding becomes higher than the permissible level.
When the signal from turbo blower oil sensor falls against setting, or
4106 BLOWER OIL TEMP. turbo oil temperature rises, this alarm is issued. When the oil sensor
signal line is cut, this alarm is issued.
In an oscillator in which a beam folding unit is installed, this alarm is
4107 MIRROR NOT INSTALLED
issued if this unit is not attached with a mirror holder.
This alarm is issued if discharge doesn’t light when the state of QPS
4108 QPS DISCHARGING
(Quick Power Saving) is released.
4115 BLOWER PARAMETER This alarm issued if the number of turbo blower is not set correctly.
When the working time exceeds setting time(4000 hours) by 500 hour
4116 BLOWER OIL TIM LIMIT
in maintenance screen, this alarm is issued
This alarm is issued when the contact of MCC for laser power supply is
4118 MCC ERROR
closed by the deposit in RUN ON.
This alarm is issued when the A/D converter on the Interface PCB does
4119 A/D CONVERTER-4 not return the conversion completion signal in the specified time after
the start of conversion.
In an oscillator in which a beam-folding unit is installed, this alarm is
EXT.BEAM FOLDING
4120 issued when the temperature of the beam folding mirror exceeds a
MIRROR OH
preset maximum.
4121 CHILLER WATER FLOW-1 This alarm is issued when the cooling water shortage takes place.
4122 CHILLER WATER FLOW-2 This alarm is issued when the cooling water shortage takes place.
The composition (mixture) of laser gas is not correct for set processing
4125 LASER GAS SPEC/MIX
mode.
In internal discharge extension of calibration preparation 2C, when the
4127 WARM UP ERROR cooling water temperature is less than 20℃ after executing of warm-up
sequence for specified time, this alarm is issued.
This alarm is issued if the rise in the sampled gas pressure is bigger
4128 GAS LEAK RATE EXCESS
than leak judge value on automatic leak check function.
SHUTTER OPEN IN This alarm is issued if the shutter opened during the internal discharge.
4129
DICHARGE
When parameters about discharge are changed, or processing mode is
4132 PARAMETER IS CHANGED
changed in power saving mode, this alarm is issued.
Reading the table data of the pulse power feed back from the memory
4135 PULSE PFB DATA ERROR card or the reader puncher interface was stopped because of the data
error.
During negative pressure leak check, or after positive pressure leak
4400 EVACUATION IMPOSSIBLE check finished, if the actual gas pressure is bigger than the value of
parameter No.15242 in all valve close state, this alarm is issued.
If leak rate in positive pressure leak check exceed the threshold, this
4401 POSITIVE PRES. LEAKAGE
alarm is issued.
After actual gas pressure arrives atmospheric pressure in positive
PRESSURIZING
4402 pressure leak check, if the time, which arrives at positive pressure
IMPOSSIBLE
setting, exceeds positive pressure time limit, this alarm is issued.
If the tube pressure exceeds the threshold (60kPa) in positive pressure
4403 POSITIVE PRES. LIMIT
leak check, this alarm is issued.
- 210 -
B-70475EN/01 APPENDIX C.LASER ALARM LIST

ABNORMAL LASER PSU This alarm is issued when laser power supply automatic adjustment
4404
ADJ. function is did not end normally.
SQ1000(PURGE) Purge completion state
RESET ALARM?
MONITOR RUN ON
Discharge start
SQ2000(LRDY) prepared state
ALARM
MONITOR RESET ALARM?
1
HV ON=
ALARM MONITOR ON
MONITOR
2
SQ3000(LSTR)
Oscillation ready state
Alarm treatment of FANUC LASER C series
- 211 -
D.DIAGNOSIS SCREEN INFORMATION APPENDIX B-70475EN/01
D DIAGNOSIS SCREEN INFORMATION

If a fault occurs, it is necessary to determine in which of the CNC, machine, and laser oscillator the fault
occurred. In cases other than faults in which the machine seems to be faulty because it does not operate
due to an external signal waiting state, it is useful if the internal state of the CNC, the states of the
interfaces of the PMC and the laser oscillator, and other information can be confirmed easily. This section
describes the data display items of the self-diagnosis function of the CNC that indicate the states of the
faults that can occur inside the laser oscillator. For a description of the data display items of the
self-diagnosis function that are related to the states of the faults that can occur inside the CNC, PMC, and
machine, refer to the FANUC Series 30/31i-LB Maintenance Manual.
Appendix D, “DIAGNOSIS SCREEN INFORMATION” consists of the following contents:
D.1 INFORMATION DISPLAYED ON THE DIAGNOSIS SCREEN .................................................212

D.2 LASER OSCILLATOR STATUS DISPLAY ..................................................................................215
D.1 INFORMATION DISPLAYED ON THE DIAGNOSIS

SCREEN
With the diagnosis function, the information below can be displayed.
[CNC←PMC status display]

#7 #6 #5 #4 #3 #2 #1 #0
G220 *DU16 *DU8 *DU4 *DU2 *DU1
*DU1 to *DU16 Duty override signals
#7 #6 #5 #4 #3 #2 #1 #0
G221 AGRDY CLRDY
CLRDY Chiller prepared signal

AGRDY Assist gas prepared signal
#7 #6 #5 #4 #3 #2 #1 #0
G222 HVON RUN AGST BEMON SHTON SCLON *BEMLC *SHTLC
*SHTLC Shutter lock signal

*BEMLC Beam lock signal
SCLON Guide light on signal
SHTON Shutter open signal
BEMON Beam on signal
AGST Assist gas start signal
RUN Oscillator start signal
HVON Discharge start signal
#7 #6 #5 #4 #3 #2 #1 #0
G223 POV7 POV6 POV5 POV4 POV3 POV2 POV1 POV0
POV7 to POV0 Power override signals
- 212 -
B-70475EN/01 APPENDIX D.DIAGNOSIS SCREEN INFORMATION
#7 #6 #5 #4 #3 #2 #1 #0
G224 PWCLB LCKON
LCKON Leakage check signal

PWCLB Power calibration request signal
#7 #6 #5 #4 #3 #2 #1 #0
G228 *FOV7 *FOV6 *FOV5 *FOV4 *FOV3 *FOV2 *FOV1 *FOV0
*FOV7 to *FOV0 Frequency override signal
#7 #6 #5 #4 #3 #2 #1 #0
G488 PTCMR
PTCMR Power sensor time constant measure signal
#7 #6 #5 #4 #3 #2 #1 #0
G491 ATO PRHT
PRHT This external signal can activate preheat

0 : Not activated
1 : Preheat activated
ATO Support function for start-up after turbo oil exchange
#7 #6 #5 #4 #3 #2 #1 #0
G494 QPSS
QPSS Quick power saving state start/release signal

0 : Release
1 : Start
[CNC→PMC status display]

#7 #6 #5 #4 #3 #2 #1 #0
F220 MWRN SHTONL SHTOFL
SHTOFL Shutter off state signal

SHTONL Shutter on state signal
MWRN Laser power down alarm signal
#7 #6 #5 #4 #3 #2 #1 #0
F221 BEAM LSTR RFHV CLON WAIT PURGE LRDY LARM
LARM Laser alarm signal

LRDY Discharge start prepared signal
PURGE Purge completed signal
WAIT Gas pressure in-controlling signal
CLON Chiller start request signal
RFHV Base in-discharging signal
LSTR Oscillation ready signal
BEAM Beam on signal
#7 #6 #5 #4 #3 #2 #1 #0
F222 CW PULSE AG3 AG2 AG1
AG1 to AG3 Assist gas select signals

- 213 -
PULSE Pulse mode state output signal

CW Continuous wave mode state output signal
#7 #6 #5 #4 #3 #2 #1 #0
F224 AGING AVCL LCKMD
LCKMD Leakage check mode signal

0 : Normal sequence
1 : Leakage check mode
AVCL Valve close signal
0 : Normal state
1 : All valve closed state
AGING Automatic aging in progress signal
#7 #6 #5 #4 #3 #2 #1 #0
F226 LSMCW LSMBM LSMIM LSMTO LSMTM LSMNT
LSMNT Item that working time is over limit time exists or not
0 : Not exits
1 : Exist
LSMTM Request signal for turbo-blower overhaul
LSMTO Request signal for turbo-blower oil change
LSMIM Request signal for inner mirror cleaning
LSMBM Request signal for optical compensation unit mirror
LSMCW Request signal for chiller coolant change.
#7 #6 #5 #4 #3 #2 #1 #0
F487 WMUP CLNT
CLNT Coolant water temperature

0 : Normal level
1 : Lower level
WMUP Laser warm-up driving
0 : Discontinued
1 : Continuing
#7 #6 #5 #4 #3 #2 #1 #0
F488 BMRF PTCMM
PTCMM Power sensor time constant measure-in-process signal

BMRF The reflected beam power is
0 : less than the permissible value (Parameter No.15269).
1 : larger than the permissible value (Parameter No.15269).
#7 #6 #5 #4 #3 #2 #1 #0
F489 LGCG
LGCG Processing mode signal

0 : High power mode or normal mode (parameter No.29016#0(CTA)=0)
1 : Fine mode (parameter No.29016#0(CTA)=1)
- 214 -
#7 #6 #5 #4 #3 #2 #1 #0
F490 LRE LRN PRHTL
PRHTL Posts the operation status of preheat function

0: Not during preheat
1: During preheat
LRN
0:
1 : Leak rate is normal
LRE
0:
1 : Leak rate is excess
#7 #6 #5 #4 #3 #2 #1 #0
F491 ATOF ATOM QPS
QPS Quick power saving state signal

ATOF Start-up after turbo oil exchange in progress signal
ATOM Normal completion signal of start-up after turbo oil exchange
D.2 LASER OSCILLATOR STATUS DISPLAY

900 LASER POWER COMMAND
Displays a value specified in a laser output power command and sent to the D/A converter.
901 LASER BIAS COMMAND
Displays a value specified in a base discharge command and sent to the D/A converter.
902 PULSE ON TIME
Displays the ON time of an output power command pulse signal.
903 PULSE OFF TIME
Displays the OFF time period of an output power command pulse signal.
904 GAS PRES. CONTROL
Displays a value specified in a pressure command for the pressure controller that controls pressure inside
the discharge tube, and sent to the D/A converter.
905 LASER TUBE PRES.
Displays the pressure inside the discharge tube.

Unit: 0.1Torr (13.3Pa)
906 LASER POWER
Displays monitored laser output power values.

Unit : W
- 215 -
907 GAP DATA
Displays a value that analog signal from gap sensor is converted by A/D converter.
908 LASER SEQUENCE
Sequence No. State

1000 Purge completion state
1200 Purge being executed
1400 75 sec wait
1500 During evacuation preparation
1600 Wait gas pressure down to the gas pressure in starting turbo blower rotate
1700 Wait until specified turbo rotation is reached
1800 Wait that gas pressure reaches to evacuation completion pressure (Leak check)
1900 During gas pressure adjusting
2000 Discharge preparation completion state LRDY (discharge start ready signal waiting)
2300 During decompression from gas pressure in oscillation to gas pressure in start of discharge
2600 Start of discharge in progress
2700 During gas pressure rising after start of discharge
2800 During power calibration executing or during internal discharge
2900 During minute power calibration executing
2970 During Oscillation preparation check
3000 Oscillation preparation completion state (LSTR)
4900 RUN-OFF time evacuation in progress
5100 During negative leakage check
5200 During gas filling in the positive pressure leakage check
5300 Judging positive pressure leakage check
6000 Eco power saving state
6300 Transition from the quick power saving state to the eco power saving state
6800 Transition from the eco power saving state to the quick power saving state
7000 Quick power saving state
7200 Transition from LSTR to the quick power saving state
7700 During gas pressure rising in the transition from quick power saving state to LSTR
7800 During discharge start executing in the transition from quick power saving state to LSTR
909 RF VOLTAGE 1
910 RF CURRENT 1
911 RF VOLTAGE 2
912 RF CURRENT 2
913 RF VOLTAGE 3
914 RF CURRENT 3
915 RF VOLTAGE 4
916 RF CURRENT 4
917 RF VOLTAGE 5
918 RF CURRENT 5
919 RF VOLTAGE 6
920 RF CURRENT 6
921 RF VOLTAGE 7
922 RF CURRENT 7
923 RF VOLTAGE 8
924 RF CURRENT 8
Voltage applied to discharge tube from No. 1 to No. 8 (power supply unit, precisely) and current
Voltage (unit: V)
Current (unit: mA)
- 216 -
925 DC VOLTAGE 1
926 DC CURRENT 1
927 DC VOLTAGE 2
928 DC CURRENT 2
929 DC VOLTAGE 3
930 DC CURRENT 3
931 DC VOLTAGE 4
932 DC CURRENT 4
933 DC VOLTAGE 5
934 DC CURRENT 5
935 DC VOLTAGE 6
936 DC CURRENT 6
937 DC VOLTAGE 7
938 DC CURRENT 7
939 DC VOLTAGE 8
940 DC CURRENT 8
Injection voltage and current of power supplies 1 to 8 (valid when bit 5 of parameter No. 15008 is 1).
Voltage (unit: 0.1 V)
Current (unit: 0.1 A)
941 DCW 1
942 DCW 2
943 DCW 3
944 DCW 4
945 DCW 5
946 DCW 6
947 DCW 7
948 DCW 8
Injection power of power supplies 1 to 8 (valid when bit 5 of parameter No. 15008 is 1).
Unit : W
954 LCKMD INT. PRES. 1
In automatic leakage check function, gas tube press (DGN No.905) is saved to DGN No.954 in 30
minutes after all valves closed. Then, it is saved to DGN No.955 to DGN No.957 in interval of Parameter
No.15154/3. These data are not erased even if power is off.
Unit: 0.1Torr (1=13 Pa)
Display range: 0 to 1800
- 217 -
#7 #6 #5 #4 #3 #2 #1 #0
960 FBD MCE WDI ENB
ENB Laser Interface PCB enable signal

0 : Abnormal
1 : Normal
WDI Signal watch signal
0 : Abnormal
1 : Normal
MCE MCC welding detector signal
0 : Abnormal
1 : Normal
FBD FSSB LSI mount
0 : Not installed
1 : Installed
#7 #6 #5 #4 #3 #2 #1 #0
961 ABT SHT SOF SON FAL WAT CAT OXG
OXG Oxygen concentration

0 : Abnormal
1 : Normal
CAT Cooling water temperature is
0 : Abnormal
1 : Normal
WAT Condensation
0 : Abnormal
1 : Normal
FAL Exhaust pump alarm
0 : Abnormal
1 : Normal
SON Open shutter
The shutter is open when this bit is set to 1.
SOF Closed shutter
The shutter is closed when this bit is set to 1.
SHT Shutter temperature
0 : Abnormal
1 : Normal
ABT Absorber temperature
0 : Abnormal
1 : Normal
#7 #6 #5 #4 #3 #2 #1 #0
962 IVF IVC OH1 OH2 MA MT AR1 IA1
IA1 Inverter alarm

0 : Abnormal
1 : Normal
AR1 Frequency signal
0 : Mismatch
1 : Match
MT Mirror temperature
0 : Abnormal
1 : Normal
- 218 -
MA External mirror
0 : Mirror not mounted
1 : Normal
OH2 Turbo motor winding temperature 2
0 : Abnormal
1 : Normal
OH1 Turbo motor winding temperature 1
0 : Abnormal
1 : Normal
IVC Inverter capacitor lifetime premonition
0: Normal
1: Lifetime is run.
IVF Inverter fan lifetime premonition
0: Normal
1: Lifetime is run.
#7 #6 #5 #4 #3 #2 #1 #0
966 *PSA08 *PSA07 *PSA06 *PSA05 *PSA04 *PSA03 *PSA02 *PSA01
*PSA01 to *PSA08
Displays the operating states of power supply units No. 1 to 8.
0: Abnormal
1: Normal
#7 #6 #5 #4 #3 #2 #1 #0
967 PC4 PC3 PC2 PC1 PI3 PI2 PI1
PI1-PI3 Power supply unit that alarm issued.

PC1-PC4 Content of the power supply unit alarm
0: Abnormal
1: Normal
#7 #6 #5 #4 #3 #2 #1 #0
968 SLO ACS SL3 SL2 SL1 SL0
SL0-SL3 Select signal for discharge tube monitor data

ACS Signal that it is possible to select all power supply unit
0: Disable
1: Enable
SLO Power or gas pressure select signal
0: Laser gas pressure
1: Laser power
#7 #6 #5 #4 #3 #2 #1 #0
970 RP8 RP7 RP6 RP5 RP4 RP3 RP2 RP1
RP1-RP8Laser power unit No.1 to 8 select signal

0 : Not selected
1 : Selected
#7 #6 #5 #4 #3 #2 #1 #0
971 AO3 AO2 AO1 PO3 PO2 PO1
PO1-PO3 Power supply unit that alarm issued

AO1-AO3 Analog monitor select
- 219 -
#7 #6 #5 #4 #3 #2 #1 #0
972 TWV BPV PTL GRY VEN RPA PWS PUG
PUG Purge valve (V2)

0 : Closed
1 : Open
PWS All MCC for the laser PSU is
0 : OFF
1 : ON
RPA Exhaust pump activation
0 : Stopped
1 : Started
VEN Exhaust valve (V4)
0 : Closed
1 : Open
GRY Laser gas supply valve (V1)
0 : Closed
1 : Open
PTL Warning light
0 : Off
1 : On
BPV Bypass valve (V5)
0 : Closed
1 : Open
TWV Three-way valve (V3)
0 : Air release
1 : Open
#7 #6 #5 #4 #3 #2 #1 #0
973 FAN OPV FW IB PCL OFS SOP
SOP Shutter open command

0 : Closed
1 : Open
OFS Off sequence
0 : at sequence 1000
1 : after sequence 1000
PCL DC24V to the laser Power supply unit is
0 : Not supplied
1 : Supplied
IB Semiconductor laser-on command
0 : OFF
1 : ON
FW Inverter start signal
0 : Stopped
1 : Started
OPV External piping exhaust valve (V6)
0 : Closed
1 : Open
FAN Cooling fan
0 : OFF
1 : ON
- 220 -
#7 #6 #5 #4 #3 #2 #1 #0
974 PSAR8 PSAR7 PSAR6 PSAR5 PSAR4 PSAR3 PSAR2 PSAR1
PSAR1 to PSAR8 Power supply unit that alarm has occurred

0 : Normal
1 : Abnormal
980 GAS PRES. SENSOR ALM
When alarm No.4078(LASER TUBE PRESS.) is issued, gas pressure data at that time is stored and
displayed.
Unit: 0.1Torr (1=13Pa)
Display range: -32767 to 32767
983 VOLTAGE DOWN
When alarm No.4088(LASER VOLTAGE DOWN) is issued, discharge tube voltage at that time is stored
and displayed.
Unit: V
984 POWER DOWN
When alarm No.4076(LASER POWER DOWN) is issued, power sensor monitor value at that time is
stored and displayed.
Unit: W
985 BEAM REFLECTION
When alarm No.4068(BEAM REFLECTION) is issued, power sensor monitor value at that time is stored
and displayed.
Unit: W
2500 WATER FLOW RATE 1
Display the flow rate of laser oscillator.

Unit: 0.1L/min
2501 WATER FLOW RATE 2
Display the flow rate of laser oscillator.

Unit: 0.1L/min
2502 LASER TUBE PRESURE(KPA）
Display the gas pressure in the oscillator.

Unit: 0.1L/min
2503 LASER GAS SUPPLY PRESSURE
Display the gas pressure to supply to the oscillator

Unit: kPa
- 221 -
2504 TB INVERTER CURRENT
Display the output voltage of inverter to drive the turbo blower.

Unit: 10mA
2505 TB1 OIL TEMP. SENSOR VOLTAGE
Display the voltage of turbo blower oil temperature sensor.

Unit:: 10mV
2506 TB2 OIL TEMP. SENSOR VOLTAGE
Display the voltage of turbo blower oil temperature sensor.

Unit:: 10mV
2508 TARGET GAS PRESSURE
Display the target gas pressure for stand-by function.

Unit: 0.1Torr (1=13Pa)
2509 PSU ADJUSTMENT SEQUENCE
Display the sequence No. for automatic power supply adjustment.
2513 NEGATIVE PRS LEAK CHECK 1
In automatic negative leakage function, gas tube press (DGN No.905) is saved to DGN No.2513 in 30
minutes after all valves closed. Then, it is saved to DGN No.2513 to DGN No.2514 in interval of
Parameter No.15154/3. These data are not erased even if power is off.
Unit: 0.1Torr(1=13Pa）
2517 POSITIVE PRS LEAK CHECK 1
In automatic positive leakage function, gas tube press (DGN No.905) is saved to DGN No.2517 to DGN
No.2520. These data are not erased even if power is off.
Unit: 0.1kPa
- 222 -
B-70475EN/01 APPENDIX E.PARAMETER LIST
E PARAMETER LIST
In this chapter, parameters for only oscillator maintenance are mentioned. Refer to “Parameter manual”
for other parameters.
Appendix E, “PARAMETER LIST” consists of the following contents:
E.1 PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS..................................223

E.2 PARAMETERS FOR DISCHARGE TUBE SELECTION..............................................................226
E.3 PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION FUNCTIONS.............227
E.4 PARAMETERS FOR THE OSCILLATOR .....................................................................................228
E.5 PARAMETERS FOR DISCHARGE................................................................................................230
E.6 PARAMETERS FOR GAS CONTROL...........................................................................................231
E.7 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS .......................................233
E.8 PARAMETERS FOR LASER POWER / VOLTAGE DROP..........................................................233
E.9 PARAMETERS FOR POWER TABLE SETTING .........................................................................234
E.10 PARAMETERS FOR AUTOMATIC AGING FUNCTION............................................................235
E.11 PARAMETERS FOR POWER FEEDBACK BASED ON THE ACTUAL OUTPUT
ESTIMATION METHOD ................................................................................................................237
E.12 PARAMETERS FOR PROCESSING MODE CHANGE FUNCTION...........................................239
E.13 PARAMETERS FOR THE GAS PRESSURE CHANGE WARM UP FUNCTION ......................244
E.14 PARAMETERS FOR PREHEAT FUNCTION ...............................................................................245
E.15 PARAMETERS FOR POWER COMMAND ..................................................................................246
E.16 PARAMETERS FOR GAS PRESSURE ANALOG MONITOR.....................................................248
E.17 PARAMETERS FOR TURBO BLOWER .......................................................................................249
E.18 PARAMETERS FOR LASER PSU INDIVIDUAL DRIVING .......................................................250
E.19 PARAMETERS FOR WATER FLOW RATE MONITOR .............................................................250
E.20 PARAMETERS FOR POSITIVE LEAK CHECK FUNCTIONS ...................................................252
E.21 PARAMETERS FOR LASER POWER SUPPLY AUTOMATIC ADJUSTMENT .......................252
E.22 PARAMETERS FOR GAS PRESSURE INCREASE .....................................................................255
E.23 PARAMETERS FOR PREPARATION 1C .....................................................................................255
E.24 PARAMETERS FOR TURBO BLOWER START .........................................................................256
E.25 PARAMETERS FOR AUTOMATIC AGING 2..............................................................................256
E.26 PARAMETERS FOR CALIBRATION AND PREPARATION .....................................................257
E.27 PARAMETERS FOR TURBO BLOWER RUN..............................................................................258
E.28 PARAMETERS FOR POWER SAVING ........................................................................................258
E.1 PARAMETERS FOR ENABLING/DISABLING VARIOUS

FUNCTIONS
#7 #6 #5 #4 #3 #2 #1 #0
15000 CLB BMO AGA LGC
[Data type] Bit

LGC Two stage gain selection of intra-tube pressure control is
0 : Invalid
1 : Valid (standard)
(When this bit is 1, parameter No. 15245 becomes valid.)
AGA Assist gas preparation check with beam on is
0 : Valid (standard)
1 : Invalid (for maintenance)
- 223 -
E.PARAMETER LIST APPENDIX B-70475EN/01
BMO Beam on only with beam off is

0 : Invalid (standard)
1 : Valid (for manual only and maintenance)
CLB Power calibration is
0 : Disabled
1 : Enabled (standard)
#7 #6 #5 #4 #3 #2 #1 #0
15001 LHC NGC
[Data type] Bit

NGC
0 : Presets an integral gas pressure control value.
1 : Does not preset an integral gas pressure control value.
LHC
0 : Does not control the oscillator with external signals (standard).
1 : Controls the oscillator with external signals.
In the automatic operation mode, external signals are used to turn on and off the shutter
and beam output.
#7 #6 #5 #4 #3 #2 #1 #0
15002 BMA
[Data type] Bit

BMA
0 : Disables beam output with the shutter closed in the automatic operation mode
(standard).
1 : Enables beam output with the shutter closed in the automatic operation mode (for
maintenance).
#7 #6 #5 #4 #3 #2 #1 #0
15003 GVW
[Data type] Bit

GVW
0 : Disables evacuation when RUN is turned off (for maintenance).
1 : Enables evacuation when RUN is turned off (standard).
#7 #6 #5 #4 #3 #2 #1 #0
15004 STC
[Data type] Bit

STC
0 : Controls the shutter with a G code.
1 : Controls the shutter with an external signal.
#7 #6 #5 #4 #3 #2 #1 #0
15005 BPV
[Data type] Bit

BPV
0: Opens the bypass valve during power calibration.
1: Closes the bypass valve during power calibration..
- 224 -
#7 #6 #5 #4 #3 #2 #1 #0
15006 PCN
[Data type] Bit

PCN
0 : Rewrites the power calibration factor with 1024 when power calibration is not
performed.
1 : Does not rewrite the power calibration factor and retains the previous value when
power calibration is not performed.
#7 #6 #5 #4 #3 #2 #1 #0
15008 EGE DCW
[Data type] Bit

DCW
0: Does not display the DCV, DCI, and DCW values on the diagnostic display.
1: Displays the DCV, DCI, and DCW values on the diagnostic display.
EGE
0: Disables the automatic aging function.
1: Enables the automatic aging function.
#7 #6 #5 #4 #3 #2 #1 #0
15010 TRG
[Data type] Bit

TRG
0 : Disables the trigger pulse command control function.
1 : Enables the trigger pulse command control function.
#7 #6 #5 #4 #3 #2 #1 #0
15011 OPV
[Data type] Bit

OPV
0 : The external piping exhaust valve operates only once after power-on. (standard)
1 : The external piping exhaust valve always operates when RUN is turned on.
#7 #6 #5 #4 #3 #2 #1 #0
15013 IVA
[Data type] Bit

IVA Evacuation is performed:
0 : Only when RUN is turned off after the LSTR state is set (standard).
1 : At all times when RUN is turned off.
#7 #6 #5 #4 #3 #2 #1 #0
15014 BOV GAG MAG
[Data type] Bit

MAG In automatic aging function setting screen,
0 : Only Page 1 can be displayed and only item “Manual mode” can be set.
1 : All the items of all the pages can be displayed.
- 225 -
GAG In re-starting after Alarm No.4073 on Purge sequence,

0 : No executing the automatic aging
1 : Executing the automatic aging at two times.
BOV In piercing, override function (power override, pulse frequency override, pulse duty
override) of beam output condition is
0 : Invalid (standard)
1 : Effective
#7 #6 #5 #4 #3 #2 #1 #0
15015 TPS
[Data type] Bit

TPS Low temperature sensor is
0 : Not installed.
1 : Installed.
Regularly set to “1”.
#7 #6 #5 #4 #3 #2 #1 #0
15016 GG8
[Data type] Bit

GG8 In the laser gas pressure control, the difference of gas pressure is magnified eight times
0 : Between starting gas pressure control and arriving at parameter No.15242, 15243.
1 : Always
#7 #6 #5 #4 #3 #2 #1 #0
15018 FSB
[Data type] Bit

FSB Laser power control function with FSSB I/O is
0 : Invalid
1 : Effective
E.2 PARAMETERS FOR DISCHARGE TUBE SELECTION

#7 #6 #5 #4 #3 #2 #1 #0
15025 PS8 PS7 PS6 PS5 PS4 PS3 PS2 PS1
[Data type] Bit

PS1 to PS8 Power supply selection when the minute laser output control function is used
Set the bit for each power supply to be used for the minute laser output control function
to 1, and set the other bits to 0.
Power supply, which is set to 0, keeps base discharge in the minute laser output control.
#7 #6 #5 #4 #3 #2 #1 #0
15027 PS8 PS7 PS6 PS5 PS4 PS3 PS2 PS1
[Data type] Bit

PS1 to PS8 Power supply selection when the discharge tubes are used in normal diving.
Set the bit for each discharge tube to be used to 1, and set the other bits to 0.
Power supply, which is set to 0, does not discharge.
Parameter No.15028 is for expansion of quantity of discharge tube in the future, and is
not used at present. So, set to “0” at the all bit.
- 226 -
E.3 PARAMETERS FOR LASER MAINTENANCE TIMING

INDICATION FUNCTIONS
15152 Shutter alarm mask time
[Data type] Word

[Unit of data] msec
Set a time from when shutter operation is directed until shutter alarm monitoring starts.
#7 #6 #5 #4 #3 #2 #1 #0
15153 LCK
[Data type] Bit

LCK
0 : Disables the automatic leakage check function.
1 : Enables the automatic leakage check function.
15154 Leakage judgment time
[Data type] Word

[Unit of data] sec
In automatic leak check function, set the time during which the valve is closed and the
internal pressure of a discharge tube is kept for leakage check. The internal pressure of a
discharge tube is measured four times within the specified time. If a value of 0 to 2 is set,
the automatic leakage check function does not operate.
15155 Evacuation time in Leak check sequence
[Data type] Word

[Unit of data] sec
[Valid data range] 0 to 32767 (standard setting 600)
Evacuation time when the oscillator start signal is turned off in Leak check sequence is
set in this parameter. When a set value is 0. Evacuation time operates as 600(10 minutes).
In edition to which this parameter is not added, Evacuation is operated according to the
parameter No.15256.
15156 Leak judge value
[Data type] Word

[Unit of data] 0.1Torr (1=13Pa)
[Valid data range] 1 to 8 (standard setting 4)
The value to judge whether leak or not is set in this parameter. When a set value is 0,
Leak judge value operates as 4 (0.4Torr).
When leak rate is judged as normal, the leak judge value is changed to (gas pressure at
the 4th time – gas pressure at the 1st time + 0.1Torr)
#7 #6 #5 #4 #3 #2 #1 #0
15160 OAL MDS MNT
[Data type] Bit
- 227 -
MNT
0 : Does not display the laser maintenance screen.
1 : Displays the laser maintenance screen.
When the value indicating that the laser maintenance screen is not displayed is specified,
the compensation factor is also stored and the cumulative operating time is set. You can
display the laser maintenance screen to check the data when required.
MDS Data input on laser maintenance screen
0 : For user mode.
1 : For service mode.
Data input on the laser maintenance screen is disabled to prevent the end user from
entering data such as the operating time unintentionally. (The data can only be
referenced.)
Setting this parameter to 1 enables data input.
On laser tuning screen, internal discharge is enable when MDS is set to 1.
OAL Specifies whether Oil exchange time limit alarm monitor for turbo blower is enabled or
disabled.
0 : Disabled
1 : Enabled
E.4 PARAMETERS FOR THE OSCILLATOR

15203 Power calibration limit
[Data type] Word

[Unit of data]
If the power calibration factor exceeds this value, the low output alarm signal (F220#6
MWRN) is output to notify the user of the time to clean or replace the mirror.
15204 Power calibration coefficient
[Data type] Word

[Unit of data]
This is to calibrate command power for real power. This parameter is automatically set at
power calibration after the oscillator start signal (G222#6 RUN) is turned on.
15206 Time constant for the power sensor input filter
[Data type] Word

[Unit of data] msec
This time constant is used when the laser power monitor value input from the power
sensor is multiplied by the primary delay filter.
When the setting value is lower than 8, this value is regarded as 8.
15207 Maximum specifiable power
[Data type] Word

[Unit of data] W
If the power setting after power calibration or power feedback addition exceeds this value,
the power output is clamped to this value.
- 228 -
15208 Laser power feedback gain
[Data type] Word

[Unit of data]
Set the laser power feedback gain.
15209 Power feedback clamp
[Data type] Word

[Unit of data]
This clamp value is used to prevent the excess power setting from being made during
power feedback.
15210 Maximum command power
[Data type] Word

[Unit of data] W
This is power clamp when peak power command is greater than this value. This is
clamped to the value that override worked.
15211 Minimum command power
[Data type] Word

[Unit of data] W
This is power clamp when power command is smaller than this value.
This is clamped to the value that override worked.
15212 Maximum specifiable power when the duty ratio is not clamped
[Data type] Word

[Unit of data] W
If parameter No. 15213 does not clamp the duty ratio to the value of parameter No.15226,
and a specified power after power calibration and power feedback processing exceeds the
setting in this parameter, the power is clamped to the setting. If a value of 0 is set, the
setting of parameter No. 15207 is set.
15213 Duty ratio clamp criterion
[Data type] Word

[Unit of data] W
When a specified power multiplied by an override value exceeds the value set in this
parameter, the duty ratio is clamped to the value of parameter No.15226, and the peak
value is clamped to the value set in parameter No. 15210. If a value of 0 is set, the setting
of parameter No. 15210 is set.
15215 Power input calibration coefficient
[Data type] Word

- 229 -
[Unit of data] W
[Valid data range] 102(0.1×210) to 10240(10×210)
(If 0 is specified, 1024 (1×210) is assumed.)
Set the power input compensation factor.
15216 Power display filter time constant
[Data type] Word

[Unit of data] msec
This is the filter time constant with which fluctuation in power display is suppressed.
E.5 PARAMETERS FOR DISCHARGE

15221 Discharge start decision voltage
[Data type] Word

[Unit of data] V
This parameter is set the voltage of discharge starting. If the discharge voltage is not
lower than this voltage after discharge waiting time (Parameter No.15222), it is issued
Alarm No.4066 (Discharging).
15222 Discharge waiting time
[Data type] Word

[Unit of data] 10msec
Set a wait time after the specification of the start of discharge until the discharge start
command value is set.
15223 Bias command
[Data type] Word

[Unit of data] mV
Set a bias command value for the oscillation preparation completion state (LSTR).
15224 Modulation voltage
[Data type] Word

[Unit of data] mV
Set the voltage to which the normal bias value is lowered during modulation by the base
modulation function.
15225 Modulation time
[Data type] Word

[Unit of data] 10msec
Set a time required usually to decrease the bias value with the base modulation function at
the time of modulation.
- 230 -
15226 Clamped duty ratio for the enhanced pulse function
[Data type] Word

[Unit of data] %
[Valid data range] 0 to 65535 (range of valid settings: 0 to 100)
If the setting is 0, internal processing assumes the value to be 50.
If it is 100 or more, internal processing assumes the value to be 100.
E.6 PARAMETERS FOR GAS CONTROL

15240 Negative pressure in exhaust completion
[Data type] Word

This pressure is used for evacuating the discharge tubes in laser start-up sequence.
15241 Intra-tube pressure in discharge start
[Data type] Word

Internal gas pressure of the discharge tubes at the start of discharge
15242 Tube pressure for oscillation
[Data type] Word

Internal gas pressure of the discharge tubes during laser oscillation.
15244 Gas pressure control gain
[Data type] Word

[Unit of data]
This is the gain to feedback control the intra-tube laser gas pressure.
15245 Intra-tube pressure control gain 2
[Data type] Word

[Unit of data]
Set the gas pressure control gain during base discharge.
When bit 1 of parameter No.15000 (LGC) is 1, this parameter is valid.
15246 Pressure control integration gain
[Data type] Word

[Unit of data]
This is feedback integration gain for gas pressure control.
- 231 -
15247 Pressure control integral element preset value
[Data type] Word

[Unit of data]
[Valid data range] -32768 to 32767
Integral element preset value for gas pressure control
This is enable when parameter No.15001#3(NGC) is set to 1.
15251 Maximum allowable gas pressure deviation
[Data type] Word

If the difference between the tube pressure for oscillation and actual pressure is greater
than this setting, laser tube pressure alarm (No.4078) is issued.
When setting value is set to 0, this is regarded as 50.
15252 Gas pressure offset
[Data type] Word

[Valid data range] -50 to +50
Add this offset value to actual gas pressure from gas pressure sensor. Standard value is 0.
15255 RUN ON evacuation time
[Data type] Word

[Unit of data] sec
Set an evacuation time to be applied at oscillator start time (RUN).
15256 RUN OFF evacuation time
[Data type] Word

[Unit of data] sec
When bit 2 of parameter No. 15003 (GVW) is set 1 and the oscillator start signal
(G222#6 RUN) is set to "0," evacuation is performed according to this time setting.
15258 Time constant of the filter used for laser gas pressure variation suppression
[Data type] Word

[Unit of data] msec
[Valid data range] 17 to 32767 (If a value less than 16 is specified, the filter does not function.)
Set this parameter when the monitored gas pressure fluctuation of laser gas pressure
grows bigger.
15259 Exhaust time when RUN is ON
[Data type] Word

[Unit of data] sec
Set an exhaust time to be applied at oscillator start time (RUN).
- 232 -
15260 Period when the exhaust value of the external pipe is open
[Data type] Byte

[Unit of data] sec
[Valid data range] 0 to 60 (When a time beyond 60 sec is specified, the time is clamped to 60 sec.)
Set the time the exhaust valve of the external pipe is open.
E.7 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL

ALARMS
15265 Maximum allowable power increase
[Data type] Word

[Unit of data] W
If the difference between the specified power and actual output power is greater than this
value, beam reflection error alarm (No.4068) is issued.
15266 Maximum allowable power
[Data type] Word

[Unit of data] W
If the actual output exceeds this value, beam reflection error alarm (No.4068) is issued.
15268 Mask time for beam reflection error alarm
[Data type] Word

[Unit of data] msec
The mask time for monitoring beam reflection alarm (No.4068) and warning signal
(F488#7) when beam is started to output or average command power is changed is set in
this parameter. This parameter is used when pulse power feedback by actual power
presumption method.
Mask time works as 5000msec when setting value is 0.
15269 Threshold for generating the beam reflection error warning signal
[Data type] Word

[Unit of data] W
When the difference between power command and actual power is bigger than this
parameter, beam reflection warning signal (F488#7) is output to PMC.
This parameter is used when pulse power feedback by actual power presumption method
is enabled (Parameter No.29000#0(PFB)=1).
E.8 PARAMETERS FOR LASER POWER / VOLTAGE DROP

15270 Discharge tube voltage in normal operation
[Data type] Word

[Unit of data] V
- 233 -
Set the discharge tube voltage during normal base discharge.

This parameter is automatically rewritten after the discharge start signal (G222#7 HVON)
is turned on.
15271 Power decrease limit
[Data type] Word

[Unit of data] W
If the difference between the specified output and actual output is greater than this setting,
laser power down alarm (No.4076) is issued.
15272 Discharge tube voltage decrease limit
[Data type] Word

[Unit of data] V
If the difference between the discharge tube voltage during use of the laser and that at the
start-up of the laser is greater than this setting, laser voltage down alarm (No.4088) is
issued.
E.9 PARAMETERS FOR POWER TABLE SETTING

15280 Table interval when the minute laser output control is used
15281 Table interval when normal driving is done
[Data type] Word

[Unit of data]
[Standard setting value] Refer to the parameter data sheet delivered with the machine.
Set the increment in watts used for the setting in the output command.
h
15290 Power command 0 when the minute laser output control is used
[Data type] Word

[Unit of data]
- 234 -
Sequentially set the output setting starting from 0 for each table interval when the minute
laser output control is used.
15300 Power command 0 when normal driving is done
[Data type] Word

[Unit of data] W
Sequentially set the output setting starting from 0 for each table interval when normal
driving is done.
E.10 PARAMETERS FOR AUTOMATIC AGING FUNCTION

15320 Command power for power calibration coefficient calculation
[Data type] Word

[Unit of data] W
This parameter sets command power for getting power coefficient value.
15321 Oscillation frequency command for power calibration coefficient
[Data type] Word

[Unit of data] Hz
This parameter sets pulse frequency command for getting power calibration coefficient.
15322 Pulse duty cycle command for power calibration coefficient
[Data type] Word

[Unit of data] %
This parameter sets pulse duty command for getting power calibration coefficient.
- 235 -
15323 Command time for power calibration coefficient calculation
[Data type] Word

[Unit of data] sec
This parameter sets command time for getting power calibration coefficient.
15326 Power command when aging is performed with the automatic aging
[Data type] Word

[Unit of data] W
This is power command in aging with automatic aging function.
15327 Oscillation frequency command for aging
[Data type] Word

[Unit of data] Hz
This is pulse frequency command in aging with automatic aging function.
15328 Pulse duty cycle command for aging
[Data type] Word

[Unit of data] %
This is pulse duty command in aging with automatic aging function.
15329 Power command time for aging
[Data type] Word

[Unit of data] sec
This is command time per one aging in aging with automatic aging function.
15330 Gas pressure setting (50 Hz) for aging
[Data type] Word

This parameter sets gas pressure in aging with automatic aging function.
15334 Number of aging operations
[Data type] Word

[Unit of data]
[Valid data range] 0 to 32767 (Automatically set by the CNC)
This is the number for execution of aging.
When automatic aging function is enable, set the value(0 or 2 to 7) automatically
according to stop time.
15335 Time data 1 when the HV is turned off after LSTR
[Data type] 2-word

[Unit of data] Year
- 236 -
[Valid data range] 0 to 99999999 (Automatically set by the CNC)
When automatic aging function is enabled, last HVOFF “Year” is recorded.
[Data type] 2-word

[Unit of data] Month
[Valid data range] 1 to 12 (0 to 99999999) (Automatically set by the CNC)
When automatic aging function is enabled, last HVOFF “Month” is recorded.
[Data type] 2-word

[Unit of data] Day
When automatic aging function is enabled, last HVOFF “Day” is recorded.
[Data type] 2-word

[Unit of data] Hour
When automatic aging function is enabled, last HVOFF “Hour” is recorded.
15339 Stop time for the oscillator requiring aging operation
[Data type] Word

[Unit of data] hour
[Valid data range] 0 to 32767 (range of valid settings: 30 to 120)
If the setting is less than 30, internal processing assumes the value to be 60. If the setting
is bigger than 121, internal processing assumes the value to be 120.
15340 Number of manual aging operations
[Data type] Word

[Unit of data]
This parameter set number of aging for manual.
When parameter No.15014#4(MAG) is 0, this is set to 2 automatically.
When parameter No.15014#4(MAG) is 1, 2 to 255 are enabled.
E.11 PARAMETERS FOR POWER FEEDBACK BASED ON THE

ACTUAL OUTPUT ESTIMATION METHOD
#7 #6 #5 #4 #3 #2 #1 #0
29000 FGB PTC PTB PFB
[Data type] Bit

PFB Power feedback control based on the actual output estimation method is:
0 : Disabled.
1 : Enabled.
- 237 -
PTB On the data table screen for actual output estimation, data input is:
0 : Disabled.
1 : Enabled.
When this parameter is set to 0, the cursor is not displayed on the screen, and data input is
disabled.
PTC On the time constant measurement screen, time constant measurement is:
0 : Disabled.
1 : Enabled.
When this parameter is set to 0, no time constant measurement is made even when the
[EXEC] soft key is pressed.
However, a time constant measurement can be started by using an external signal.
FGB On the pulse power feedback function, this parameter changes the calculating method of
the calibration of the power feedback.
0 : Gain x (feedback target value - power monitor value)
1 : Gain x (feedback target value – power monitor value)
NOTE
If it is set 1 to parameter No.29000#3(FGB), the controllability is
improved. However, power command sometimes oscillates when
the difference between command peak power and estimated real
output power is bigger.
[Data type] Word

[Unit of data] msec
Set a time constant for a linear section. When 0 is set in this parameter, the bell-shaped
filter is not used.
[Data type] Word

[Unit of data] msec
Set a time constant for a round section.
29003 Peak power in power sensor time constant measurement
[Data type] Word

[Unit of data] W
Set a peak power in measurement of the time constant of the power sensor.
Usually, set the rated output of the oscillator.
29004 Beam output time in power sensor time constant measurement
[Data type] Word

[Unit of data] msec
Set a period of time for which a beam is output to measure the time constant of the power
sensor.
- 238 -
29005 Time constant 1 for Power sensor response delay compensation filter
[Data type] Word

[Unit of data] msec
The time constant to compensate for the response delay of the power sensor should be set.
This parameter is used with the parameter No.29006. The value to the parameter
No.29005 should be set with using the time constant measurement screen usually. The
compensation operation is not executed in case of 0 in this parameter.
29006 Time constant 2 for Power sensor response delay compensation filter
[Data type] Word

[Unit of data] msec
The time constant to compensate for the response delay of the power sensor should be set.
This parameter is used with the parameter No.29005. The compensation operation is not
executed when the value of parameter No.29005 is less than the value of this parameter.
The standard value for each model of the laser should be used usually. Refer to the data
sheet attached to the laser oscillator for standard value.
29007 Laser power feedback gain in pulse wave mode
[Data type] Word

[Unit of data] 1/1024 (1024=1 time)
The laser power feedback gain in the pulse wave mode should be set.
Parameter No.15208 is used in the continuous wave mode (pulse duty =100%).
Parameter No.15208 is used at the pulse wave if this parameter is 0.
This parameter is also invalid when the pulse power feedback by actual power
presumption method is invalid. The standard value for each model of the laser should be
used usually. Refer to the data sheet attached to the laser oscillator for standard value.
E.12 PARAMETERS FOR PROCESSING MODE CHANGE

FUNCTION
E.12.1 Setting for Fine Mode

#7 #6 #5 #4 #3 #2 #1 #0
29016 CCM FTN CTA
[Data type] Bit

CTA The processing mode of laser oscillator is :
0 : High power mode or normal mode.
1 : Fine mode.
FTN For the parameter No.29016#0=0, on the setting screen of the processing mode change
function
0 : “High power mode” is displayed.
1 : “Normal mode” is displayed.
- 239 -
CCM Processing mode change function is :

0 : Not available.
1 : Available.
NOTE
Parameter CTA can't be turned on when parameter CCM is off.
Even if CTA is set to “1” in case of CCM=0, the setting of CTA
returns to zero. If parameter CCM is turned off in case of CTA=1,
CTA returns to zero and thus processing mode is changed. To
prevent unexpected operation, parameter CCM should be set when
laser oscillator is in PURGE state. Don’t set parameter CCM except
for PURGE state
29020 Power calibration coefficient（Fine mode）
[Data type] Word

[Unit of data]
The coefficient is used to calibrate the specified power according to the actual power.
This parameter is automatically specified during power calibration.
29022 Bias value（Fine mode）
[Data type] Word

[Unit of data] mV
Specify a bias value.
29023 In-tube pressure during oscillation(Fine mode)
[Data type] Word

The discharge tube has the gas pressure during laser oscillation
29025 Normal discharge tube voltage（Fine mode）
[Data type] Word

[Unit of data] V
Specify a discharge tube voltage in normal reference discharge. This parameter is
automatically rewritten after the discharge start signal (G222#7/HVON) turned “ON”.
- 240 -
29026 Power command 0 when the minute laser output control is used(Fine mode)
[Data type] Word

[Unit of data] W
Refer to the parameter data sheet delivered with the machine.
In fine mode, sequentially set the output setting starting from 0 for each table interval
when the minute laser output control is used.
29037 Power command 0 when normal discharge is done(Fine mode)
[Data type] Word

[Unit of data] W
Refer to the parameter data sheet delivered with the machine.
In fine mode, Sequentially set the output setting starting from 0 for each table interval
when normal driving is done.
29048 Upper limit on power（Fine mode）
[Data type] Word

[Unit of data] W
When the specified power value exceeds this setting after power calibration and power
feedback addition, the actual power is clamped to this setting.
- 241 -
29049 Maximum peak power（Fine mode）
[Data type] Word

[Unit of data] W
When a peak power higher than this setting is specified, the actual power is clamped to
this setting. (The value obtained by applying power override is clamped.)
29050 Upper limit on power when the duty ratio is not clamped（Fine mode）
[Data type] Word

[Unit of data] W
When the duty ration is not clamped to 50% according to parameter No.29051 and when
the specified power exceeds this setting after power calibration and power feedback
addition, the actual power is clamped to this setting. When 0 is specified, the value of
parameter No.29048 is assumed.
29051 Criterion for clamping the duty ratio（Fine mode）
[Data type] Word

[Unit of data] W
If the value obtained by multiplying the specified peak power value by the power
override value is greater than the value set in this parameter, the duty ratio is clamped at
50% (fixed value), and the specified peak power value is clamped at the value set in
parameter No.29049. When 0 is specified, the value of parameter No.29049 is assumed.
E.12.2 Setting for Alarm Monitor (Alarm No.4125)

Alarm No.4125 is not detected, when Parameter No.15008#5(DCW)=0, or No.29045 or No.29407. If it is
necessary to detect the alarm, set parameter No.15008#5(DCW) to 1 and No.29046 or No.29047 to
proper value.
29046 In-tube pressure to check gas spec.
[Data type] Word

In the laser oscillator start up sequence, alarm No.4125 happens if DCI value of laser
power supply is equal to or higher than parameter No.29047 when in-tube pressure
reaches this parameter value after HVON(G222#7)=1. Alarm No.4125 can’t be monitored
if this parameter value is zero.
29047 DCI maximum value to check gas spec.
[Data type] Word

[Unit of data] 0.1A
In the laser oscillator start up sequence, alarm No.4125 happens if DCI value of laser
power supply is equal or higher than this parameter value when in-tube pressure reaches
parameter No.29046 after HVON(G222#7)=1. Alarm No.4125 can’t be monitored if this
parameter value is zero
- 242 -
E.12.3 Setting for Automatic Aging Function (Fine Mode)

29060 Laser power in normal calibration（Fine mode）
[Data type] Word

[Unit of data] W
Set the power specified for obtaining the power calibration coefficient.
NOTE
When manually performing the aging operation by changing the
setting, set the same value in parameter No.29060 and No.15201
29061 Oscillation frequency in normal calibration（Fine mode）
[Data type] Word

[Unit of data] Hz
Set the frequency specified for obtaining the power calibration coefficient.
NOTE
setting, set the same value in parameter No.29061 and No.29072.
29062 Pulse duty ration in normal calibration（Fine mode）
[Data type] Word

[Unit of data] %
Set the pulse duty specified for obtaining the power calibration coefficient.
NOTE
29063 Calibration time of normal calibration（Fine mode）
[Data type] Word

[Unit of data] sec
Set the time specified for obtaining the power calibration coefficient.
NOTE
- 243 -
E.13 PARAMETERS FOR THE GAS PRESSURE CHANGE

WARM UP FUNCTION
29202 Power calibration value in calibration preparation 1
[Data type] Word

[Unit of data] W
In calibration preparation 1, after the gas pressure rises, if the laser power at the
determined point during internal discharge is lower than this setting, discharge is stopped.
The gas pressure is reduced and internal discharge is repeated.
29203 Maximum number of repetitions in calibration preparation 1
[Data type] Word

[Unit of data]
Maximum number of repetitions in calibration preparation 1
29204 Internal discharge value 1 in calibration preparation 2
[Data type] Word

[Unit of data] W
Internal discharge value at the first level in calibration preparation 2. The upper limit
value is the setting of parameter No. 15201. If the setting is 0, the setting of parameter No.
15201 is assumed.
[Data type] Word

[Unit of data] W
Internal discharge value at the second level in calibration preparation 2. The upper limit
15201 is assumed
[Data type] Word

[Unit of data] W
Internal discharge value at the third level in calibration preparation 2. The upper limit
15201 is assumed
29207 Internal discharge period in calibration preparation 2
[Data type] Word

[Unit of data] sec
- 244 -
Internal discharge period at the first, second, and three levels in calibration preparation 2.
At each level, internal discharge is performed for the period set for this parameter. When
the setting is 0, a value of 5 is assumed. The upper value is 900.
29208 Maximum number of repetitions in calibration preparation 2
[Data type] Word

[Unit of data]
Maximum number of repetitions of extension in calibration preparation 2. If the number
of repetitions exceeds this setting, alarm No. 4127 is issued. When the setting is 0, a value
of 240 is assumed.
29210 Internal discharge period in calibration operation B
[Data type] Word

[Unit of data] sec
Internal discharge period in calibration operation B. When the setting is 0, a value of 100
is assumed. The upper value is 900.
29211 Number of repetitions in calibration operation B
[Data type] Word

[Unit of data]
Number of repetitions of calibration operation B when the warm-up period is extended in
calibration preparation 2. Warm-up operation is performed and the calibration coefficient
is not calculated in the repeated calibration operation B other than the last one. The
calibration coefficient is calculated in the last calibration operation B. If a large value is
set for this parameter, the accuracy of the laser power is degraded, but the oscillator is
started quickly when it is started in a low-temperature environment.
E.14 PARAMETERS FOR PREHEAT FUNCTION

#7 #6 #5 #4 #3 #2 #1 #0
29016 PRH
[Data type] Bit

PRH Laser preheat function is :
0 : Disable
1 : Enable
29221 Peak power during preheating
[Data type] Word

[Unit of data] W
Set the peak power of the beam output during preheating.
29222 Pulse frequency during preheating
[Data type] Word

[Unit of data] Hz
- 245 -

Set the pulse frequency of the beam output during preheating.
29223 Pulse duty during preheating
[Data type] Word

[Unit of data] %
Set the pulse duty of the beam output during preheating.
E.15 PARAMETERS FOR POWER COMMAND

#7 #6 #5 #4 #3 #2 #1 #0
29300 PAJ
[Data type] Bit

PAJ
0 : Laser power supply unit adjustment mode. ALM4132 is issued when offset and gain
parameter is changed.
1 : Displays the laser maintenance screen. ALM4132 is not issued when offset and gain
parameter is changed.
29301 LSR PSU1 OFFSET
[Data type] Word

[Unit of data]
Set offset value of laser power supply No.1.
29302 LSR PSU1 GAIN
[Data type] Word

[Unit of data]
Set gain value of laser power supply No.1.
[Data type] Word

[Unit of data]
29304 LSR PSU2 GAIN
[Data type] Word

[Unit of data]
[Data type] Word

[Unit of data]
- 246 -
29306 LSR PSU3 GAIN
[Data type] Word

[Unit of data]
[Data type] Word

[Unit of data]
29308 LSR PSU4 GAIN
[Data type] Word

[Unit of data]
[Data type] Word

[Unit of data]
29310 LSR PSU5 GAIN
[Data type] Word

[Unit of data]
[Data type] Word

[Unit of data]
29312 LSR PSU6 GAIN
[Data type] Word

[Unit of data]
[Data type] Word

[Unit of data]
- 247 -
29314 LSR PSU7 GAIN
[Data type] Word

[Unit of data]
[Data type] Word

[Unit of data]
29316 LSR PSU8 GAIN
[Data type] Word

[Unit of data]
E.16 PARAMETERS FOR GAS PRESSURE ANALOG MONITOR

29320 GAS SUPPLY PRESSURE CONVERSION COEFFICIENT A
[Data type] Word

[Unit of data] 1/1000
This is a parameter to change the monitor value from gas supply pressure sensor to the
gas pressure.
29321 GAS SUPPLY PRESSURE CONVERSION COEFFICIENT B
[Data type] Word

[Unit of data]
This is a parameter to change the monitor value from gas supply pressure sensor to the
gas pressure.
29322 UPPER LEVEL OF THE ALARM OF GAS SUPPLY PRESSURE
[Data type] Word

[Unit of data] kPa
If the gas supply pressure is bigger than the value of this parameter, alarm occurs
29323 LOWER LEVEL OF THE ALARM OF GAS SUPPLY PRESSURE
[Data type] Word

[Unit of data] kPa
If the gas supply pressure is smaller than the value of this parameter, alarm occurs
29324 GAS TUBE PRESSURE CONVERSION COEFFICIENT A
[Data type] Word

- 248 -
[Unit of data] 1/1000
This is a parameter to change the monitor value from atmospheric pressure sensor to the
gas pressure.
29325 GAS TUBE PRESSURE CONVERSION COEFFICIENT B
[Data type] Word

[Unit of data]
This is a parameter to change the monitor value from atmospheric pressure sensor to the
gas pressure.
E.17 PARAMETERS FOR TURBO BLOWER

#7 #6 #5 #4 #3 #2 #1 #0
15003 TR1
[Data type] Bit

TR1 Number of turbo blower
0 : Two turbo blowers
1 : One turbo blower
29327 Conversion coefficient of inverter output current
[Data type] Word

[Unit of data]
29328 Time constant for display filter of inverter output current
[Data type] Word

[Unit of data] sec
This parameter is the time constant of the primary delay filter of the inverter output
current. This prevents for the flicker of the display. When 0 is set, the primary delay filter
is invalid.
#7 #6 #5 #4 #3 #2 #1 #0
29330 ATO OLS
[Data type] Bit

OLS Automatic sequence to set the alarm judge value of turbo blower oil temperature sensor is
0 : Not executed.
1 : Executed.
ATO Automatic sequence after turbo oil exchange is

0 : Not executed.
1 : Executed.
29331 Judge value of turbo 1 oil temperature alarm (VA1)
[Data type] Word

[Unit of data] 10mV
- 249 -
This parameter is to judge whether the oil temperature of turbo blower 1 is normal or not.
When the output voltage VL1 of oil temperature sensor is less than this parameter, alarm
occurs.
When the automatic sequence to set the alarm judge value stopped abnormally, this
parameter set to 800.
29332 Judge value of turbo 2 oil temperature alarm (VA2)
[Data type] Word

[Unit of data] 10mV
This parameter is to judge whether the oil temperature of turbo blower 2 is normal or not.
When the output voltage VL2 of oil temperature sensor is less than this parameter, alarm
occurs.
When the automatic sequence to set the alarm judge value stopped abnormally, this
parameter set to 800.
29333 Number of aging in start-up after turbo oil exchange
[Data type] Word

[Unit of data] 10mV
This parameter sets the number of aging in start-up after turbo oil exchange.
Standard setting 2
E.18 PARAMETERS FOR LASER PSU INDIVIDUAL DRIVING

29337 POWER COMMAND MUXIMUM VALUE
[Data type] Word

[Unit of data] W
If the power command is bigger than the value of this parameter added power calibration
and power feedback, the power command is cramped with this parameter.
29338 POWER COMMAND MUXIMUM VALUE (FINE MODE)
[Data type] Word

[Unit of data] W
If the power command is bigger than the value of this parameter added power calibration
and power feedback, the power command is cramped with this parameter.
E.19 PARAMETERS FOR WATER FLOW RATE MONITOR

29340 CONVERSION COEFFICIENT A FOR WATER FLOW METER 1
[Data type] Word

[Unit of data]
When DI select signal is 000, data is converted to water flow rate(L/min). When no use,
set to 0.
- 250 -
29341 CONVERSION COEFFICIENT B FOR WATER FLOW METER 1
[Data type] Word

[Unit of data]
set to 0.
29342 ALARM SETTING VALUE FOR WATER FLOW METER 1
[Data type] Word

[Unit of data]
This parameter sets the alarm setting value for water flow meter 1. If the monitor value is
less than alarm setting, alarm issues.
29343 CONVERSION COEFFICIENT A FOR WATER FLOW METER 2
[Data type] Word

[Unit of data]
set to 0.
29344 CONVERSION COEFFICIENT B FOR WATER FLOW METER 2
[Data type] Word

[Unit of data]
set to 0.
29345 ALARM SETTING VALUE FOR WATER FLOW METER 2
[Data type] Word

[Unit of data]
This parameter sets the alarm setting value for water flow meter 2. If the monitor value is
less than alarm setting, alarm issues.
29346 TIME CONSTANT OF SCREEN FILTER OF WATER FLOW METER
[Data type] Word

[Unit of data] msec
This parameter sets the time constant of screen filter of water flow meter
29347 RE-CHECK TIME OF WATER FLOW RATE
[Data type] Word

[Unit of data] msec
Each flow rate is checked again after that either flow rate was less than alarm setting.
This parameter is time until check is done again. If either flow rate is less than alarm
setting again, alarm issues.
Default setting 5000(msec) If 0 is set, it is regarded as 5000msec.
- 251 -
E.20 PARAMETERS FOR POSITIVE PRESSURE LEAK CHECK

FUNCTIONS
29350 Positive pressure leak check pressure
[Data type] Word

[Unit of data] kPa
Defines the pressure where positive pressure leak check starts. If this parameter is set
larger than 50, it compulsory be set to 50. If this parameter is set smaller than 0, it
compulsory is set to 0.
29351 Increase pressure time limit
[Data type] Word

[Unit of data] sec
Defines time limit between the start of pressure increase just before the positive pressure
leak check, and termination of pressure increase.
29352 Positive pressure leak judge time
[Data type] Word

[Unit of data] sec
Define time to hold valves close, when positive pressure leak. If set in the range:0 to 2,
the positive pressure leak check will not be executed.
29353 Positive pressure threshold
[Data type] Word

[Unit of data] kPa
Defines a standard value to check leak.
E.21 PARAMETERS FOR LASER POWER SUPPLY

AUTOMATIC ADJUSTMENT
#7 #6 #5 #4 #3 #2 #1 #0
29360 PA8 PA7 PA6 PA5 PA4 PA3 PA2 PA1
[Data type] Bit

PA1 to PA8
0 : Does not perform the laser power supply automatic adjustment.
1 : Perform the laser power supply automatic adjustment.
29361 WAIT TIME AT OFFSET PRE-ADJ.
[Data type] Word

[Unit of data] sec
Set of the gas pressure stability judgment time before the base adjustment.
- 252 -
29362 PRS.JUDGE VALUE
[Data type] Word

Set judgment value of the gas pressure stability before the base adjustment.
29363 OFFSET INCREMENT
[Data type] Word

[Unit of data] mV
Set the offset increment value.
29364 DISCHARGE JUDGE VALUE
[Data type] Word

[Unit of data]
Set the discharge beginning judgment value
29365 PSU1 OFFSET ADJ.
[Data type] Word

[Unit of data]
Set the offset parameter adjustment value for laser power supply unit No.1.
[Data type] Word

[Unit of data]
[Data type] Word

[Unit of data]
[Data type] Word

[Unit of data]
[Data type] Word

[Unit of data]
- 253 -
[Data type] Word

[Unit of data]
[Data type] Word

[Unit of data]
[Data type] Word

[Unit of data]
29373 PWR CMD AT GAIN ADJ.
[Data type] Word

[Unit of data] W
Set power command at gain parameter adjustment.
29374 TARGET DCW AT GAIN ADJ.
[Data type] Word

[Unit of data] W
Set target power supply output (DCW) at gain parameter adjustment.
29375 GAIN INCREMENT
[Data type] Word

[Unit of data]
Set the gain parameter increment value.
29376 WAIT TIME AT GAIN ADJ.
[Data type] Word

[Unit of data] sec
Set a wait time before gain parameter adjustment.
29377 MIN. DCW AT GAIN ADJ.
[Data type] Word

[Unit of data] W
Set lower limit value of target power supply output (DCW) at gain parameter adjustment.
- 254 -
29378 MAX. DCW AT GAIN ADJ.
[Data type] Word

[Unit of data] W
Set upper limit value of target power supply output (DCW) at gain parameter adjustment.
E.22 PARAMETERS FOR GAS PRESSURE INCREASE

29380 Target difference of purge valve in SEQ2700
[Data type] Word

In SEQ 2700, after the purge valve opens and pressure control valve opens fully, gas
pressure goes up. When the gas pressure reach (target gas pressure - this parameter),
purge valve will be closed. The target gas pressure is the gas pressure set in No.15242 or
No.29023.
29381 Target difference of pressure control valve in SEQ2700
[Data type] Word

In SEQ 2700, after the purge valve opens and pressure control valve opens fully, gas
pressure goes up. When the gas pressure reach (target gas pressure - this parameter),
pressure control valve will be closed. The target gas pressure is the gas pressure set in
No.15242 or No.29023.
29382 Wait after pressure control valve close in SEQ2700
[Data type] Word

[Unit of data] 0.1sec
In SEQ 2700, the gas pressure control will restart after the pressure control valve closed
and the time defined by this parameter has passed.
29383 Gas pressure increase time limit in SEQ2700
[Data type] Word

[Unit of data] sec
In SEQ 2700, after the purge valve opens and pressure control valve opens fully. From
this point, if the gas pressure does not reach (target gas pressure - parameter No.29381),
in the time defined by this parameter, alarm (No.4099) occurs.
E.23 PARAMETERS FOR PREPARATION 1C

29384 Power in Preparation 1C
[Data type] Word

[Unit of data] W
- 255 -
Defines internal discharge power in Preparation 1C, after the gas pressure goes up.
29385 Preparation 1C power judge time
[Data type] Word

[Unit of data] sec
Defines internal discharge time in Preparation 1C, after the gas pressure goes up.
E.24 PARAMETERS FOR TURBO BLOWER START

29386 Pressure to start turbo blower
[Data type] Word

Defines a pressure to start turbo blower in SEQ 1600.
29387 Pressure limit after turbo blower start
[Data type] Word

Between turbo blower start in SEQ 1600 and the gas pressure reach parameter
(No.15240), if the gas pressure exceed [parameter (No.29386)+this parameter], an alarm
No.4080 occurs.
29388 Inverter frequency wait limit
[Data type] Word

[Unit of data] sec
If a frequency reached signal is not received after the desired time and the time defined
by this parameter have passed, alarm No. 4101 occurs.
E.25 PARAMETERS FOR AUTOMATIC AGING 2

29389 Minimum repeat before automatic aging 2
[Data type] Word

[Unit of data]
In automatic aging, minimum internal discharge time to go into step 2 is defined by this
parameter.
29390 Threshold to automatic aging 2
[Data type] Word

[Unit of data] W
In automatic aging, minimum power at Preparation 1C to go into step 2 is defined by this
parameter.
- 256 -
29391 Power in automatic aging 2
[Data type] Word

[Unit of data] W
This parameter is referred no matter which processing mode is selected.
29392 Frequency in automatic aging 2
[Data type] Word

[Unit of data] Hz
29393 Duty in automatic aging 2
[Data type] Word

[Unit of data] %
29394 RFV to terminate aging
[Data type] Word

[Unit of data] V
Defines the RF voltage threshold to terminate automatic aging. The RF voltage of
smallest number of PSUs is referred among some PSUs.
E.26 PARAMETERS FOR CALIBRATION AND PEPARATION

#7 #6 #5 #4 #3 #2 #1 #0
29395 D2C PWC
[Data type] Bit

PWC When power calibration is not performed, output power check in Calibration 1C is ,
0 : Disabled.
1 : Enabled.
D2C Internal discharge extension in Preparation 2C is,
0 : Disabled.
1 : Enabled.
29396 Calibration coefficient adjuster
[Data type] Word

[Unit of data] 0.1%
This parameter defines how much the calibration coefficient is adjusted.
The calibration coefficient
=1024 × laser output power command value × [Duty(%) / 100]
× (this parameter / 1000) / the laser output power when calibration is finished.
- 257 -
E.27 PARAMETERS FOR TURBO BLOWER RUN

29397 Turbo blower start up time
[Data type] Word

[Unit of data] sec
Input the turbo blower start up time set on the inverter.
29398 Turbo blower stop time
[Data type] Word

[Unit of data] sec
Input the turbo blower stop up time set on the inverter.
29399 Turbo blower stop wait
[Data type] Word

[Unit of data] sec
Defines how long to wait after turbo blower stop command. The wait limit is (Parameter
No.29398 + this parameter)
E.28 PARAMETERS FOR POWER SAVING

29400 Power Saving gas pressure ratio
[Data type] Word

[Unit of data]
(The gas pressure in Eco Power Saving state)
= (The gas pressure in Quick Power Saving state) × (this parameter) / 1024
29401 Pressure difference of Quick Power Saving (Normal mode or High power mode)
[Data type] Word

(The gas pressure in Quick Power Saving state (Normal mode or High power mode))
=(No.15242) － (this parameter)
29402 Pressure difference of Quick Power Saving (Fine mode)
[Data type] Word

(The gas pressure in Quick Power Saving state (Fine mode))
=(No.29023) － (this parameter)
29403 Gas pressure limit in Power Saving
[Data type] Word

- 258 -
Defines the gas pressure lower limit both in Quick Power Saving state and Eco Power
Saving state.
29404 Time limit of pressure adjustment after Quick Power Saving
[Data type] Word

[Unit of data] 0.1sec
Defines time limit of gas pressure adjustment after Quick Power Saving state.
29405 Base command rise time
[Data type] Word

[Unit of data] 10ms
The rise time of the base command is set.
29406 Bias command initial value
[Data type] Word

[Unit of data] mV
Set the bias command initial value when discharge starting is detected.
29407 Step time of bias command
[Data type] Word

[Unit of data] msec
Set the step time of bias command when discharge starting is detected.
29408 Step value of bias command
[Data type] Word

[Unit of data] mV
Set the step value of bias command when discharge starting is detected.
29409 Discharge judge value
[Data type] Byte

[Unit of data] %
Set the discharge judge value.
29410 Upper limit of discharge starting detection frequency
[Data type] Byte

[Unit of data]
Set upper limit value of number in which discharge starting is detected.
- 259 -
29411 Fan operation time in Eco Power Saving
[Data type] Word

[Unit of data] sec
Set fan operation time after Eco Power saving mode signal is 1 (EPS=1).
- 260 -
F.CONTROL SEQUENCES IN
B-70475EN/01 APPENDIX LASER OSCILLATOR
F CONTROL SEQUENCES IN LASER

OSCILLATOR
Appendix F, “CONTROL SEQUENCES IN LASER OSCILLATOR” consists of the following contents:
F.1 OUTLINE OF LASER OSCILLATION SEQUENCES ..................................................................261

F.2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES .......................................................263
F.3 WARM UP IN START UP SEQUENCE .......................................................................................264
F.4 POWER SAVING.............................................................................................................................264
F.1 OUTLINE OF LASER OSCILLATION SEQUENCES

This section describes sequence of oscillator start up and set down.
The laser oscillation sequences can be divided roughly into five steps.
［SEQ 1000］Initial state (purge completion state)
After power is turned on, the oscillator comes into this state.
［SEQ 2000］Discharge preparation completion state (LRDY)

When the oscillator start signal (RUN) is turned from 0 to 1, evacuation is carried and turbo blower will
start after the gas pressure become lower than “Pressure to start turbo blower”. Then gas pressure control
begins. When the gas pressure reaches the set pressure, the discharge preparation completion state
(LRDY) is set to enable the discharge start HVON.
When the oscillator start signal (RUN) is turned to 0, the oscillator will go to SEQ1000.
［SEQ 3000］Oscillation preparation completion state (LSTR)

When the discharge start signal (HVON) turned from 0 to 1, a high voltage is applied to the discharge
tube to start discharge. Next, the intra-tube gas pressure is controlled at the pressure at oscillation time,
and a calibration coefficient is set. Then, the base discharge state is set, and the oscillation preparation
completion state is set.
When the discharge start signal (HVON) is turned to 0, the oscillator will go to SEQ2000.
［SEQ 6000］Eco Power Saving state

No discharge with stopped turbo blower.
［SEQ 7000］Quick Power Saving state

No discharge with running turbo blower.
When the discharge start signal (HVON) is turned to 0, the oscillator will go to SEQ2000.
- 261 -
F. CONTROL SEQUENCES IN
SEQ1000 Initial state RUN=0→1

SEQ1400, SEQ1200, SEQ4900, SEQ1400
SEQ5100, SEQ5200, SEQ5300 SEQ1200 RUN=1
RUN=0 SEQ4900 SEQ1500
SEQ5100 SEQ1600
SEQ6000 Eco Power Saving state (EPS) SEQ5200
EPSS=0 SEQ1700
SEQ5300 SEQ1800
EPSS=0 SEQ1900
SEQ6300 SEQ6800
EPSS=1 HVON=0 or RUN=0 RUN=0

SEQ7000 Quick Power Saving state (QPS) SEQ SEQ2000 Discharge preparation
QPSS=0 & EPSS=0 & HVON=1 2300 completion state (LRDY)
HVON=0→1
SEQ7700 SEQ2600
SEQ7200 SEQ7800 HVON=0 HVON=0
SEQ2700
or SEQ or
SEQ2800
QPSS=1 or EPSS=1 RUN=0 2300 RUN=0
SEQ2900
SEQ2970
QPSS=1 or EPSS=1 HVON=0 or RUN=0
SEQ3000 Oscillation preparation completion state (LSTR)
QPSSEQuick power saving state start/release signal
EPSS: Eco power saving state start/release signal
Fig. F.1 (a) Sequence
The sequences for starting the oscillator are as follows:

Sequence number Meaning
1000 Initial state (purge completed state)
1500 Exhaust pump being started
1600 State waiting for the pressure is low enough to start turbo blower.
1700 State waiting for the turbo blower frequency arrival signal (AR) to be turned on
1800 State waiting for a negative pressure to be reached upon completion of exhaust operation
1900 Adjusting gas pressure.
2000 Discharge preparation completion state (LRDY) (waiting for discharge to be started)
2600 Discharge being started
2700 State waiting for the base discharge state to be set after the start of discharge
2800 Power calibration being performed
2900 Minute Laser Output calibration.
2970 Checking oscillation.
The sequences for stopping the oscillator are as follows:

2300 State waiting for setting from gas pressure during laser oscillation to discharge start time
gas pressure
2000 Discharge preparation completion state (LRDY) (waiting for discharge to be started)
1400 Stopping turbo blower
1200 Purge operation being performed
1000 Initial state (purge completed state)
- 262 -
The sequences for Power Saving are as follows:

6000 Eco Power Saving state (EPS)
7000 Quick Power Saving state (QPS)
6300 Transition from Quick Power Saving state to Eco Power Saving state
6800 Transition from Eco Power Saving state to Quick Power Saving state
7200 Transition from LSTR to Quick Power Saving state
7700 Transition from Quick Power Saving state to LSTR
7800 Transition from Quick Power Saving state to LSTR, starting discharge
In addition, the following sequences are used:

4900 Vacuum being drawn with RUN turned off
5100 Negative leak check
5200 Increasing pressure for positive leak check
5300 Positive leak check
F.2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES
F.2.1 RUN ON
When the oscillator start signal (RUN) is turned to 1 in sequence 1000, the oscillator executes pumping,
starting turbo blower, gas pressure check, power sensor calibration and reach sequence 2000(LRDY).
↓SEQ1000
↓RUN ON
↓SEQ1500
↓RUN OFF
↓SEQ1700 　　　　　　↓SEQ2300 ↓SEQ1400
↓SEQ1800
↓SEQ1900 ↓SEQ1200
Atmospheric ↓SEQ1000
↓SEQ2000
pressure→
Parameter No.15242→
1000Hz
Parameter No.15241→ ↑
Turbo
blower
0Hz inverter
↑Gas
↑HVON ↑SEQ2800 frequency
pressure
↑SEQ2800 ↑SEQ3000 (broken line)
Fig. F.2.1 (a) Gas pressure

(RUN ON, HV ON and RUN OFF)
- 263 -
F.2.2 HV ON
In sequence 2000(LRDY), when the discharge start signal (HVON) is changed from 0 to 1, HV ON
sequence will start, if with the original parameters as shipment and power calibration has not been
executed, the Start up sequence will start. In the Start up sequence, the oscillator executes aging or warm
up, in case of necessity, and reach sequence 3000(LSTR).
F.2.3 RUN OFF

When the oscillator start signal (RUN) is turned to 0, the oscillator executes stopping turbo blower,
pumping, purge and reach sequence 1000.
F.3 WARM UP IN START UP SEQUENCE

In Start up sequence, if get started in cold condition, warm up internal discharge is automatically executed
if necessary until it get enough performance. It follows that for example ambient temperature is lowest of
the specification, no alarm occur, and after the Start up sequence finished, the calibration coefficient will
be calculated properly.
NOTE
If the cooling water temperature is less than 20℃, it takes times until start-up
sequence finishes because of automatic warm up sequence. For quick start-up,
please keep proper water temperature with warm-up function of the chiller.
The letters ”WARM UP” on CNC screen indicates that warm up is underway. At the same time, the
warm up signal F487#7(WMUP) is 1.
F.4 POWER SAVING

Powers saving functions are for saving power in waiting condition. There is Quick Power Saving state
and Eco Power Saving state.
F.4.1 Quick Power Saving State

In Quick Power Saving state, both 0W laser PSU emission and no discharge is kept.
F.4.1.1 Start quick power saving state

Input 1 to Quick power saving state start/release signal (QPSS), in order to go to Quick Power Saving
state from LSTR.
If both Quick power saving state start/release signal (QPSS) and Eco power saving state start/release
signal (EPSS) are 1, Eco power saving state start/release signal (EPSS) has a priority.
F.4.1.2 Quick power saving state

The letters ”QPS” will appear on CNC screen. It indicates Quick Power Saving state. At that time,
Quick Power Saving state signal F491#1(QPS) is 1.
- 264 -
F.4.1.3 Stop quick power saving state

When Quick power saving state start/release signal (QPSS) is changed from 1 to 0, Quick Power Saving
state will be finished, and it go to LSTR.
After LSTR, the letters “QPS” on CNC screen will disappear, and Quick Power Saving state signal F491#
1 (QPS) will be 0.
F.4.2 ECO Power Saving State

In Eco Power Saving state, both 0W laser PSU emission and no discharge is kept. Turbo blower will be
stopped.
F.4.2.1 Start ECO power saving state

Input 1 to Eco power saving state start/release signal (EPSS), in order to go to Eco Power Saving state.
The turbo blower frequency will decrease. After it stops, the oscillator will reach Eco Power Saving state.
If both Quick power saving state start/release signal (QPSS) and Eco power saving state start/release
signal (EPSS) are 1, Eco power saving state start/release signal (EPSS) has a priority.
F.4.2.2 ECO power saving state

The letters ”EPS” will appear on CNC screen. It indicates Eco Power Saving state. At that time, Eco
Power Saving state signal F491# 3(EPS) is 1.
F.4.2.3 Stop ECO power saving state

When Eco power saving state start/release signal (EPSS) is changed from 1 to 0, Eco Power Saving state
will be finished and the turbo blower will start. After the frequency reach, if Quick power saving state
start/release signal (QPSS) is 0, it will go to LSTR, else (Quick power saving state start/release signal
(QPSS) is 1) go to Quick Power Saving state.
- 265 -
F.4.2.4 ECO power saving state intra-tube gas pressure

Intra-tube gas pressure in Eco power saving state is shown below.
↓SEQ3000
↓EPSS=1
↓SEQ6300
↓SEQ6000
↓EPSS=0
↓SEQ6800
↓SEQ3000
1000Hz
↑
Turbo
blower
↑Gas 0Hz inverter
frequency
pressure
(broken line)
Fig. F.4.2.4 (a) Gas pressure
- 266 -
H.EXTERNAL GAS LEAKAGE
B-70475EN/01 APPENDIX RECORDING TABLE
G EXTERNAL GAS LEAKAGE RECORDING

TABLE
External Gas Leakage Recording Table
Date: / /
Customer Name
Customer Staff in Charge
Record necessary data according to the procedure below.

Secondary Primary pressure gage
pressure gage (D) (C)
Main cylinder valve

(B)
To laser oscillator
Gas cylinder
Secondary pressure
adjustment handle (A)
Fig. H Gas regulator

Recording procedure
<1> Stop the oscillator, and complete purging. Then, turn off the power.
<2> When 5 minutes or more has elapsed after the power is turned off, turn the secondary pressure
adjustment handle (A) of the gas regulator in the depressurization direction, and close the main cylinder
valve (B) after closing all adjustment nozzles.
<3> Record the readings of the primary pressure gauge (C) and secondary pressure gauge (D) together with
start time and ambient temperature data.
Primary pressure gauge Secondary pressure
Start time (t1) Ambient temperature
(C1) gauge (D1)
(kgf/cm2,MPa) (kgf/cm2,MPa) Day hours minutes °C

(After recording the data above, leave the oscillator for 8
hours as it is, then record the data below.)
<4> Record the readings of the primary pressure gauge (C) and secondary pressure gauge (D) together with
start time and ambient temperature data after a certain time (8 hours as standard, but desirably a period
of time a little bit longer than 8 hours).
Primary pressure gauge Secondary pressure
End time (t2) Ambient temperature
(C2) gauge (D2)
(kgf/cm2,MPa) (kgf/cm2,MPa) Day hours minutes °C

(Note)
<5> Open the main cylinder valve (B) slowly . After the main cylinder valve is fully opened, record the
reading of the primary pressure gauge (C).
Primary pressure gauge (C3)
(kgf/cm2,MPa)
- 267 -
H. EXTERNAL GAS LEAKAGE
RECORDING TABLE APPENDIX B-70475EN/01
NOTE
When opening the main cylinder valve, do not stand in front of the regulator but
stand slantwise relative to the regulator. When the main cylinder valve is opened
if there is a large amount of leakage, the regulator may be destructed because
an abrupt pressure is applied to the regulator, and broken pieces can scatter.
<6> End of measurement
Decision
Whether there is a leakage can be determined from the results of measurement as described below. If you
send your recording table via FAX to the FANUC service center, the service center will check if there is a
leakage.
(1) Leakage on the primary piping

Calculate the primary pressure variation rate according to the expression below to determine the
leakage state.
The unit of t1 and t2 is the hour.
C3 – C2 8
Primary pressure variation rate (%)= × × 100
C3 t2 – t1
If the calculated primary pressure variation rate is 10% or less, the presence of no leakage is
determined.
When the fluctuation of air temperature is remarkable, it is possible that the primary pressure change
ratio fluctuates.
(2) Leakage on the secondary piping

Calculate the secondary pressure variation rate according to the expression below to determine the
leakage state.
The unit of t1 and t2 is the hour.
D1 – D2 8
Secondary pressure variation rate (%)= × × 100
D1 t2 – t1
The presence of no leakage is determined if the calculated primary pressure variation rate is as
follows:
- 10% or less when the piping is a polyethylene tube
- 6% or less when the piping is a stainless tube
- 268 -
B-70475EN/01 APPENDIX H.GLOSSARY
H GLOSSARY
Name Meaning
Part of the protective housing or enclosure that, when removed or moved, will permit
Access panel
exposure to laser radiation or collateral radiation beyond an allowable value.
AEL : Accessible
Maximum accessible emission level set up for each class of laser products
Emission Limit
Alignment Optical axis adjustment
Aperture Iris, or stop
Beam Aggregate of unidirectional, diverging, or conversing rays
Defined as the distance between two symmetrical points on a beam cross section at
Beam diameter which the power per unit area is 1/e2 of the maximum power per unit area. At FANUC,
however, the diameter measured with an acrylic burn pattern.
Beam divergence Angle through which a beam spreads
Laser beam mode pattern generated on a plate such as an acrylic plate for
Burn pattern
confirmation purposes
Polarization in which a plane of polarization rotates about the axis along which the light
Circular polarization progresses and does not have directivity; an electric or magnetic field based on circular
polarization has a constant intensity.
CO2 laser Laser that uses a carbon dioxide gas as a laser medium
CW : Continuous wave Continuously radiated laser output
dielectric An electric insulator.
Discharge excitation Realization of inverted population by means of discharge
Enhanced pulse Greatly amplified peak output of a pulse
Transition of atoms or molecules to a higher energy level by supplying them with
Excitation
external energy
Exposure time Duration through which laser radiation is emitted
Fast axial flow laser Laser in which gas flows rapidly in the same direction as the laser beam
Control in which the controlled amount is compared with the target value through
Feedback control
feedback and corrective operation is performed to make them match.
Laser Device for generating light by stimulated emission
Area in which activities are controlled or monitored for protection from hazards resulting
Laser controlled area
from laser radiation
Laser Diode Laser that uses a semiconductor as an exciting medium
Laser mirror Reflecting mirror used in a laser resonator
Person having sufficient knowledge about evaluation and management of hazards of
Laser safety officer
lasers and in charge of safety management of lasers
Standard to protect human bodies from hazards resulting from laser beams in view of
Laser safety standard
use of lasers and about laser products for sale
Polarization in which a plain of polarization is at a constant angle with the axis along
Linear polarization
which the light progresses
Action taken by a user to preserve normal operation of a product, such as adjustment
Maintenance
or other measures specified in documents created by the manufacturer for users
If power is to be transmitted by connecting two different electric circuits, maximum
Matching circuit power can be sent by setting the circuits to appropriate conditions. A matching circuit is
a circuit that sets the circuits to appropriate conditions.
Maximum radiation power or maximum radiation energy per pulse that a laser product
Maximum output outputs in all directions where there is a hazard of exposure in view of operational
capacity in every area at any point of time after the production of the laser product
Mode State of a resonant system in which an electromagnetic field has a specific distribution
MPE : Maximum Maximum laser radiation level that can be radiated onto human bodies without harmful
Permissible Exposure influence to them in an ordinary environment
Optical density This means the transmittance of light.
OD
Over OD7 means that the transmittance of light is below 1/107.
- 269 -
H.GLOSSARY APPENDIX B-70475EN/01
Name Meaning
Laser product's action covering all intended functions, not including maintenance or
Operation
service.
Device in which stimulated emission of light is used for a laser and which consists of a
Optical resonator
pair of reflecting mirrors facing each other
Variable that is assigned a given value for a specific purpose and indicates that
Parameter
purpose
Amount representing a positional relationship between two adjacent highest or lowest
Phase
points on a wave
Power density Energy per unit area
Laser product housing or its part designed to protect humans from exposure to a laser
Protective housing
beam exceeding an accessible emission level or strong collateral radiation
Pulse duration The time from the rise half-value point of a pulse to the fall half-value point.
Pulse duty Ratio (%) of a duration in which a pulsating laser output is on, to its entire cycle
Pulse frequency Repetition frequency at which pulsating laser beams are radiated from an oscillator
Pulse laser Laser that outputs energy in the form of a single pulse or a pulse train
Pulse output Laser output radiated in the form of a pulse train
Radian Measurement unit of angle; 1 radian equals 360°/2p
Radiant energy Energy emitted, transmitted, or received (measured in joules, or J)
Device combined with the protective housing of a laser product to stop its operation
Safety interlock
automatically when part of the housing is removed
Sequence A succession of steps carried out in a prescribed order
The emission of light by atoms and molecules at a certain energy level, induced by
Stimulated emission incident light, at the same frequency, in the same phase, and in the same polarized
state, thereby shifting the atoms and molecules to a lower energy level.
Target Jig used to radiate and position a laser beam
Threshold Physical quantity necessary to generate laser beams
- 270 -
B-70475EN/01 INDEX
INDEX
Compensation for Power Sensor Response Speed .......195
<Number> Configuration ...............................................................138
24V power supply ........................................................155 CONTROL SEQUENCES IN LASER OSCILLATOR261
Cooling Fan in the Inverter ..........................................135
<A> Cooling Water................................................................29
Adjusting the exhaust unit (adjusting the laser gas Cooling Water Piping.....................................................16
consumption) ............................................................143
Adjusting the Position ..................................................151 <D>
Adjustment Method............ 123,141,152,154,169,170,171 DAILY INSPECTION ...................................................52
Adjustment of the Flow Sensor Unit ............................147 Data Table....................................................................193
Alarm ...........................................................................201 Data table structure ......................................................194
ALIGNMENT OF THE BEAM FOLDING UNIT DEFINITION OF WARNING, CAUTION, AND
(C2000i-C, C4000i-C SHORT OPTICAL PATH NOTE ........................................................................ s-1
LENGTH TYPE)......................................................175 Detachment and Attachment of a Fan Unit ..................153
ALIGNMENT OF THE RESONATOR.......................166 Detachment and Attachment of Fan-assisted Radiator.154
Alignment Procedure at Mirror Cleaning Time ...........170 DETAILS OF CHECKING ...........................................40
Alignment Procedure during Installation after DETAILS OF MAINTENANCE...................................54
Transportation ..........................................................168 DIAGNOSIS SCREEN INFORMATION ...................212
Alignment Procedure for Adjusting All Mirrors ..........171 Discharge Aging ............................................................45
Anticorrosive..................................................................30 Discharge Margin Check................................................48
Antifreezing ...................................................................31 DISCHARGE TUBE ...................................................126
Discharge-related alarm history display.......................185
<B> Display Information .....................................................184
BEAM ABSORBER ....................................................150
Beam absorber mirror...................................................150 <E>
Beam Mode Check.........................................................46 ECO Power Saving State .............................................265
Bell-shaped Filter for Power Feedback Gain ...............196 ECO power saving state intra-tube gas pressure ..........266
Breaker.........................................................................119 Electrical Connections ..............................................10,31
Excessive Laser Gas Consumption ..............................111
<C> EXHAUST PUMP .......................................................138
C2000i-C......................................................................177 Exhaust Pump Filter.......................................................57
C2000i-C INPUT UNIT...............................................113 Exhaust Pump Oil ..........................................................56
C4000i-C and C6000i-C...............................................179 Exhaust unit .................................................................140
C4000i-C INPUT UNIT...............................................115 EXTERNAL GAS LEAKAGE RECORDING TABLE267
C6000i-C INPUT UNIT...............................................117 External Laser Gas Piping Leakage Check (Clamp Test)
Charge unit...................................................................140 ....................................................................................43
Check ...........................................................................125 EXTERNAL VIEW OF LASER OSCILLATOR ........205
Check for Leakage within the Oscillator........................44
Check method ...........................................................54,56 <F>
Checking Cooling Water................................................44 FAN .............................................................................152
Checking of jumper pins on the interface PCB ..............42 Fittings and Tube Ordering Information ......................163
Checking the interface PCB signals ...............................43 Function .......................................................................197
Checking the power supply ............................................40
Circuit Breaker for Cooling Fan, Solenoid Valve, and <G>
24V Power Supply Trips ..........................................110 GAS CONTROLLER ..................................................138
Cleaning .......................................................................159 GAS DUST COLLECTION UNIT ..............................159
Cleaning agent................................................................30 Gas Fitting....................................................................162
Cleaning and Replacing the Beam Folding Unit ............64 GAS FITTING AND WATER FITTING ....................162
Cleaning and Replacing the Folding Mirrors .................61 Gas pipe .........................................................................28
Cleaning and Replacing the Optical Parts ......................58 GLOSSARY ................................................................269
Cleaning and Replacing the Output Coupler and Rear GUIDE LASER (SEMICONDUCTOR LASER) ........151
Mirror .........................................................................59
Command of running beam internally with shutter <H>
closed........................................................................192 HEAT EXCHANGER .................................................176
Compensation coefficient history display ....................184 HV ON.........................................................................264
i-1
INDEX B-70475EN/01
<I> Oscillation Characteristics .............................................47

INFORMATION DISPLAYED ON THE DIAGNOSIS OSCILLATOR CONNECTIONS..................................28
SCREEN...................................................................212 OUTLINE ........................................................................1
Input and output of saved maintenance data ................192 OUTLINE OF LASER OSCILLATION SEQUENCES261
INSTALLATION...........................................................20 Overview.......................................... 183,193,197,199,201
INSTALLATION PROCEDURE ..................................20 OXYGEN SENSOR UNIT ..........................................160
Interface PCB...............................................................155
INTERNAL CONNECTION .........................................10 <P>
INTERNAL STRUCTURE...........................................1,2 Packing for Transportation.............................................49
INTRA-TUBE GAS PRESSURE CONTROL PARAMETER LIST ....................................................223
SEQUENCES...........................................................263 PARAMETERS FOR AUTOMATIC AGING 2 .........256
INVERTER...........................................................131,134 PARAMETERS FOR AUTOMATIC AGING
FUNCTION..............................................................235
<L> PARAMETERS FOR CALIBRATION AND
Laser alarm history screens ..........................................187 PEPARATION .........................................................257
LASER ALARM LIST ................................................209 PARAMETERS FOR DISCHARGE ...........................230
Laser Gas .......................................................................28 PARAMETERS FOR DISCHARGE TUBE
Laser gas specification ...................................................28 SELECTION ............................................................226
Laser Optical Parts .........................................................58 PARAMETERS FOR ENABLING/DISABLING
LASER OSCILLATOR STATUS DISPLAY..............215 VARIOUS FUNCTIONS .........................................223
Laser Output Just after Switch On Is Low ...................110 PARAMETERS FOR GAS CONTROL ......................231
LASER POWER SUPPLY AUTOMATIC PARAMETERS FOR GAS PRESSURE ANALOG
ADJUSTMENT FUNCTION ...................................199 MONITOR ...............................................................248
LASER POWER SUPPLY UNIT ................................121 PARAMETERS FOR GAS PRESSURE INCREASE.255
LASER SOFTWARE FUNCTION..............................183 PARAMETERS FOR HIGHLY REFLECTIVE
Laser tuning screen ......................................................190 MATERIAL ALARMS............................................233
Leak check screen ........................................................189 PARAMETERS FOR LASER MAINTENANCE
Leakage Check and Discharge Aging ..........................131 TIMING INDICATION FUNCTIONS ....................227
Leakage in external piping .............................................29 PARAMETERS FOR LASER POWER / VOLTAGE
Locating Internal Leakage..............................................44 DROP .......................................................................233
LOW TEMPERATURE SENSOR UNIT ....................159 PARAMETERS FOR LASER POWER SUPPLY
AUTOMATIC ADJUSTMENT ...............................252
<M> PARAMETERS FOR LASER PSU INDIVIDUAL
Magnetic contactor.......................................................120 DRIVING .................................................................250
Main Breaker Trips ......................................................110 PARAMETERS FOR POSITIVE PRESSURE LEAK
MAINTENANCE ..........................................................52 CHECK FUNCTIONS .............................................252
MAINTENANCE PARTS .............................................64 PARAMETERS FOR POWER COMMAND..............246
MAINTENANCE SCREEN ........................................183 PARAMETERS FOR POWER FEEDBACK BASED
MAJOR FAULTS ........................................................110 ON THE ACTUAL OUTPUT ESTIMATION
MATCHING BOX.......................................................126 METHOD.................................................................237
Measurement of voltage of DC power supply unit.........41 PARAMETERS FOR POWER SAVING....................258
Method of Operation ....................................................184 PARAMETERS FOR POWER TABLE SETTING.....234
Method of registration..................................................193 PARAMETERS FOR PREHEAT FUNCTION...........245
Motor starter.................................................................120 PARAMETERS FOR PREPARATION 1C.................255
Motor starter of Exhaust Pump Trips Thermally..........110 PARAMETERS FOR PROCESSING MODE
CHANGE FUNCTION ............................................239
<O> PARAMETERS FOR THE GAS PRESSURE
Obtaining a Maximum Power ......................................172 CHANGE WARM UP FUNCTION.........................244
OIL EXCHANGE TIME LIMIT ALARM MONITOR PARAMETERS FOR THE OSCILLATOR ................228
FOR TURBO BLOWER ..........................................197 PARAMETERS FOR TURBO BLOWER...................249
OIL MIST DECOMPOSING ELEMENT....................157 PARAMETERS FOR TURBO BLOWER RUN .........258
Operating the gas supply pressure sensor and PARAMETERS FOR TURBO BLOWER START .....256
atmospheric pressure sensor .....................................142 PARAMETERS FOR WATER FLOW RATE
Operation......................................................................201 MONITOR ...............................................................250
Operation of Laser Power Supply automatic Parts of Exhaust Pump .................................................138
adjustment ................................................................200 Parts run time display...................................................185
Operation of the Digital Operator ................................131 PCB..............................................................................155
OPTICAL PATHS IN THE OSCILLATOR....................8 Perform laser power supply automatic adjustment ......125
i-2
B-70475EN/01 INDEX
PERIODIC MAINTENANCE .......................................53 Start ECO power saving state ......................................265
Phase rotation.................................................................40 Start quick power saving state......................................264
Placement Numbers .....................................................127 Stop ECO power saving state.......................................265
POWER CALIBRATION METHOD ..........................175 Stop quick power saving state......................................265
POWER FEEDBACK FUNCTION BASED ON THE Storage and expiration date of turbo blower oil .............56
ACTUAL OUTPUT ESTIMATION METHOD ......193 SUPPORT FUNCTION FOR START-UP AFTER
POWER SAVING........................................................264 TURBO OIL EXCHANGE ......................................202
POWER SENSOR........................................................154
Power sensor time constant measurement screen.........188 <T>
Power Supply Checking .................................................40 THE DEW SENSOR....................................................155
Power Supply Margin Check (Pulse Check) ..................48 THE WATER DISTRIBUTION UNIT........................144
PREFACE .................................................................... p-1 Tightening method ................................................ 162,163
Preparation ....................................... 124,168,170,171,172 Time constant measurement method............................195
PREPARATION PRIOR TO SHIPMENT.....................49 TRIGGER ELECTRODE ............................................128
Procedure .....................................................................173 TROUBLESHOOTING .................................................70
Pulse power feedback screens ......................................188 TROUBLESHOOTING PROCEDURE ........................71
Pure water supply unit....................................................30 TURBO BLOWER ......................................................129
Turbo Blower Oil ...........................................................54
<Q> TURBO BLOWER OIL ABNORMALLY
Quick Power Saving State............................................264 TEMPERATURE DETECT FUNCTION................201
<R> <U>
Re-installing ..........................................................162,163 UNIT CONFIGURATION ..........................................113
Release of alarm...........................................................199 UNITS..........................................................................112
Removing Cooling Water...............................................50
Replacement.................................................................176 <V>
Replacement method ...... 55,57,119,121,126,127,128,129, Vacuum Gas Connection................................................19
.....134,138,140,144,148,150,151,154,155,157,159,160,
..................................................................................161 <W>
Replacement of Fan......................................................153 WARM UP IN START UP SEQUENCE ....................264
Replacement of the Flow Sensor Unit..........................147 WARNING LABELS AND STICKERS ...................... s-6
Replacing a high-speed diode ......................................122 WARNING LIGHT UNIT ...........................................161
Replacing an RF FET PCB ..........................................123 WARNINGS AND CAUTIONS ON EXPOSURE....... s-2
Replacing the laser gas cylinder.....................................29 WARNINGS AND CAUTIONS ON HANDLING ...... s-4
Replacing the power supply unit ..................................121 WARNINGS AND CAUTIONS ON MACHINING .... s-5
RESPONDING TO ALARM MESSAGES ON THE WARNINGS AND CAUTIONS ON MAINTENANCE
SCREEN.....................................................................71 ................................................................................... s-3
RUN OFF.....................................................................264 WATER FITTING .......................................................163
RUN ON ......................................................................263
<S>
Safety circuit PCB........................................................156
SAFETY PRECAUTIONS ...........................................s-1
Setting ..................................................... 198,199,201,202
Setting a Power Input Compensation Coefficient ........175
Setting for Alarm Monitor (Alarm No.4125) ...............242
Setting for Automatic Aging Function (Fine Mode) ....243
Setting for Fine Mode ..................................................239
Setting the atmospheric pressure sensor.......................141
Setting the frequency of the power supply of the hour
meter...........................................................................41
Setting the gas supply pressure sensor .........................141
Shutter mirror ...............................................................149
Shutter PCB..................................................................156
Shutter switch (thermal and photoelectric switches) ....149
SHUTTER UNIT .........................................................148
Specification of the cooling water..................................30
SPECIFICATIONS ......................................................208
i-3
Revision Record
FANUC LASER C2000i/C4000i/C6000i-MODEL C MAINTENANCE MANUAL (B-70475EN)
01 Sep., 2010
Edition Date Contents Edition Date Contents

Revision of the Maintenance Manual
for FANUC LASER C series
1.Type of applied technical documents
FANUC LASER C2000i/C4000i/C6000i -MODEL C

Name
MAINTENANCE MANUAL
Spec.No./Ed. B-70475EN/01
2.Summary of Change
New, Add Applicable

Group Name/Outline
Correct, Del Date
Basic
Function
Optional
Function
Unit
Maintenance
Parts
Notice
The optical connector name of I/O Link described
in section 2.2.3(4) is corrected as follows.
Correction Before：COP10A ⇒ After ：COP1A Correct Immediately
Before：COP10B ⇒ After ：COP1B
Another
TITLE

DRAW.NO. CUST.
01 10/11/25 S.Kagiwada First issue Kobayashi B-70475EN/01-02
SHEET
EDIT DATE DESIG. DESCRIPTION 1/5
P36（b）When an optical fiber cable is used:
Correct the description of “Refer to the following figures for the connection of the optical fiber
cable.” as follows.
Before）Refer to the following figures for the connection of the optical fiber cable.
・ Connect the optical fiber cable to the optical connecter COP10B on the optical I/O Link adapter
unit.
・ Connect the optical fiber cable to the optical connecter COP10B on the optical I/O Link adapter
unit.
After）Refer to the following figures for the connection of the optical fiber cable.
・ Connect the optical fiber cable to the optical connecter COP1B on the optical I/O Link adapter unit.
・ Connect the optical fiber cable to the optical connecter COP1A on the optical I/O Link adapter unit.
P36, P37 figure 2.2.3(e), 2.2.3(f), 2.2.3(g)：
Correct the figure 2.2.3(e), 2.2.3(f), 2.2.3(g) as follows.

A04B-0800-J002 A04B-0800-J003
A04B-0800-J004 A04B-0800-J005
A04B-0800-J002
A04B-0800-J004

Fig. 2.2.3(e) Mounting location of the Optical I/O Link adapter unit of C2000i-C（Before）
TITLE

DRAW.NO. CUST.
01 10/11/25 S.Kagiwada First issue B-70475EN/01-02
SHEET
A04B-0800-J002 A04B-0800-J003
A04B-0800-J004 A04B-0800-J005
A04B-0800-J002
A04B-0800-J004

Fig. 2.2.3(f) Mounting location of the high-speed I/O unit ofC4000i-C（Before）

A04B-0800-J004
A04B-0800-J002
A04B-0800-J004
Connection of the
optical fiber cable
for COP10B
A04B-0800-J003
A04B-0800-J005
Connection of the
optical fiber cable
A04B-0800-J005
Fig. 2.2.3(g) Mounting location of the Optical I/O Link adapter of C6000i-C（Before）
TITLE

DRAW.NO. CUST.
SHEET
True）

A04B-0800-J002 A04B-0800-J003
A04B-0800-J004 A04B-0800-J005
A04B-0800-J002
A04B-0800-J004
COP1A

Fig. 2.2.3(e) Mounting location of the Optical I/O Link adapter unit of C2000i-C（After）

A04B-0800-J002 A04B-0800-J003
A04B-0800-J004 A04B-0800-J005
A04B-0800-J002
A04B-0800-J004
COP1A

Fig. 2.2.3(f) Mounting location of the Optical I/O Link adapter of C4000i-C（After）
TITLE

DRAW.NO. CUST.
SHEET
A04B-0800-J004
A04B-0800-J002
A04B-0800-J004
Connection of the
optical fiber cable
for COP1B
A04B-0800-J003
A04B-0800-J005
COP1A
Connection of the
optical fiber cable
A04B-0800-J005
Fig. 2.2.3(g) Mounting location of the Optical I/O Link adapter of C6000i-C（After）
TITLE

DRAW.NO. CUST.
SHEET
FANUC LASER C2000i/C4000i/C6000i -MODEL C

Name
MAINTENANCE MANUAL
Spec.No./Ed. B-70475EN/01
2.Summary of Change
New, Add Applicable

Group Name/Outline
Correct, Del Date
Parameter 29412 is added to appendix E.28.
Basic The description is added to appendix F.4.1.3
Add Immediately
Function about the transition from sequence 7000(Quick
Power Saving state) to sequence 3000(LSTR).
Optional
Function
Unit
Maintenance
Parts
Notice
Correction
Another
TITLE
Addition of the Maintenance Manual for

FANUC LASER C series
DRAW.NO. CUST.
01 11.1.18 Ikemoto New registration Andou B-70475EN/01-03
Edit Date Design Description FANUC LTD 1/3

E.28 PARAMETER FOR POWER SAVING
29412 Gas pres down DCI value
[Data type] Word

[Unit of data] 0.1A
[Valid data range] 0～32767
When the DC current(DCI) of the laser power supply becomes more than the
value of this parameter when transiting from sequence 7000(Quick Power
Saving state) to sequence 3000(LSTR), the discharge is light after reducing
the gas pressure.
Note) Only the name of this parameter changed since software G4C1-03 and
G3C1-03. The operation of this function doesn't change.
F.4.1.3 Stop quick power saving state

When Quick Power Saving start/release signal(QPSS) is changed from 1 to 0, sequence 7000(Quick Power
Saving state) will be stopped, and it transit sequence 3000(LSTR).
After sequence 3000(LSTR), the letters “QPS” on CNC screen is disappeared, and Quick Power Saving state
signal F491#1(QPS) is 0. When transiting from sequence 7000(Quick Power Saving state) to sequence
3000(LSTR), the discharge is light safely after reducing the gas pressure if the DC current of the laser power
supply is the value of parameter 29412 or more. Therefore, the transition time becomes long. Though the
transition time is 2±0.5 seconds when the DC current of the laser power supply is smaller than the value of
parameter 29412, the transition time becomes long ten times or more when the oscillator extremely gets cold
and the DC current of the laser power supply is the value of parameter 29412 or more.
TITLE
Addition of the Maintenance Manual for

FANUC LASER C series
DRAW.NO. CUST.
B-70475EN/01-03
Edit Date Design Description FANUC LTD 2/2

Power consumption monitor for FANUC LASER C series
FANUC LASER C2000i/C4000i/C6000i-MODEL C

Name
MAINTENANCE MANUAL
Spec. No. /Ed. B-70475EN/01
2.Summary of Change
New, Add Applicable

Group Name/Outline
Correct, Del Date
Basic The following function was added
Add Immediately
Function ・Power consumption monitor
Optional
Function
Unit
Maintenance
Parts
Applied software version：
・FS30i-LB：G3C1 Version 3.0 or later
Notice
G3D1 Version 3.0 or later
・FS31i-LB：G4C1 Version 3.0 or later
Correction
Another
TITLE
Power consumption monitor
DRAW.NO. CUST.
01 100117 S.Kagiwada First issue Kobayashi B-70475EN/01-04
SHEET
1. General
This function is for displaying the power consumption and integral power consumption of laser
oscillator C2000i/C4000i/C6000i-MODEL C for FANUC series 30i/31i-LB.
Moreover, this function can save the integral power consumption in the parameter.
2. Diagnosis data
Diagnosis data for power consumption is as follows.
・Present power consumption of laser oscillator
Diagnosis 2523 LASER ELECTRIC PWR CONSUMPTION

[Data type] 2-word
[Unit of data] 0.001kW
The power consumption of laser oscillator is displayed.
・Integral power consumption of laser oscillator
Diagnosis 2524 INTEGRAL POWER CONSUMPTION

[Data type] 2-word
The integral power consumption of laser oscillator is displayed.
This value is saved in the PRM29466 (SAVED INTEGRAL PWR
CONSUMPTION) every 60 seconds when PRM29465#6 (SPC) is 1.
When 1 is input to PRM29465#7 (IPC), this value is reset.
NOTE
The calculation of this value starts after the CNC control power is turned on.
TITLE
DRAW.NO. CUST.
01 100117 S.Kagiwada First issue B-70475EN/01-04
SHEET
3. Parameter
Parameter for power consumption is as follows.
#7 #6 #5 #4 #3 #2 #1 #0
No.29465 IPC SPC FRQ
[Data type] Bit
FRQ（#0）：Frequency of the applied power supply is
0：50Hz
1：60Hz
Please set this bit according to frequency of the applied power supply of
laser oscillator.
SPC（#6）：The value of integral power consumption is

0：not saved.
1：saved.
The value of DGN2524 (INTEGRAL POWER CONSUMPTION) is saved in
the PRM29466 (SAVED INTEGRAL PWR CONSUMPTION) every 60
seconds when this bit is 1.
When this bit is 0, PRM29466 is not updated.
IPC（#7）：When 1 is input to this bit, the value of DGN2524 (INTEGRAL POWER

CONSUMPTION) and PRM29466 (SAVED INTEGRAL PWR
CONSUMPTION) are reset. After reset, this bit becomes 0 automatically.
No.29466 SAVED INTEGRAL PWR CONSUMPTION

[Data type] 2-word
The value of DGN2524 (INTEGRAL POWER CONSUMPTION) is saved
in this parameter every 60 seconds when PRM29465#6 (SPC) is 1.
When the CNC control power is turned on, the value of this parameter is
displayed in DGN2524. And the value of DGN2524 is updated from the
value.
4. Application
This function is applied from the following software.
Series System Version
G3C1
FS30i-LB Version 3.0 or later
G3D1
FS31i-LB G4C1 Version 3.0 or later
TITLE
DRAW.NO. CUST.
01 100117 S.Kagiwada First issue B-70475EN/01-04
SHEET
Laser oscillator control sequence
FANUC LASER C2000i/C4000i/C6000i-MODEL C

Name
MAINTENANCE MANUAL
Spec. No. /Ed. B-70475EN/01
New, Add Applicable

Group Name/Outline
Correct, Del Date
“E.29 PARAMETERS FOR POWER
Basic
CALIBRATION” is added to Appendix E. Add, Correct Immediately
Function
Appendix F.2.2 and F.3 are corrected.
Optional
Function
Unit
Maintenance
Parts
Applied software version
-FS30i-LB G3C1 Version 6.0 or later
Notice
G3D1 Version 6.0 or later
-FS31i-LB G4C1 Version 6.0 or later
Correction
Another
Title
Draw. No.
B-70475EN/01-05
01 110628 A. NISHIO New registrarion
Sheet 1/11
Edit. Date Design Description FANUC CORPORATION
E.29 PARAMETERS FOR POWER CALIBRATION
#7 #6 #5 #4 #3 #2 #1 #0
29500 S0C TAS QCA
[Input type] Parameter input

[Data type] Bit
#0 QCA Aging in power calibration sequence is
0 : Disabled.
1 : Enabled.
#1 TAS The function of setting the number of aging operations by the halt period of the laser is
0 : Disabled.
1 : Enabled.
If “Disabled”, power calibration after automatic aging will not be performed.
If “Enabled”, power calibration after automatic aging will be performed as a rule.
#2 S0C The function of setting parameters for warm up 0C judging in power calibration sequence is
0 : Disabled.
1 : Enabled.
If “Enabled”, actual laser power will get recorded in Power Calibration Preparation 0C.
Parameter No.29508 is calculated as described in parameter No.29509.
Besides, parameter No.29523 will be set after power calibration coefficient is determined.
Lastly, this parameter will be set to zero.
This parameter is set to zero just after CNC start up.
29501 Power Calibration Preparation 0C power command

[Data type] Word path
[Unit of data] W
[Valid data range] 0 7000
29502 Power Calibration Preparation 0C frequency command

[Unit of data] Hz
29503 Power Calibration Preparation 0C duty command

[Unit of data] %
Title
Draw. No.
B-70475EN/01-05
Sheet 2/11
29504 Power Calibration Preparation 0C internal discharge time

[Data type] Byte path
[Unit of data] sec
Defines internal discharge time in Power Calibration Preparation 0C.
29505 Power Calibration Preparation 0C power reference value

[Unit of data] W
In Power Calibration Preparation 0C, if actual laser power is lower than this parameter,
internal discharge will get continued (warm up 0C), gas will get replaced and Power
Calibration Preparation 0C will be executed.
Parameter No.29507 will be applied as a judgment value, instead of this parameter, only
when warm up 0C is repeated by parameter No.29511 times.
29506 Power Calibration Preparation 0C power decrease judgment value

[Unit of data] W
In Power Calibration Preparation 0, if actual laser power is lower than this parameter, alarm
(DS4076) will be active.
29507 Power Calibration Preparation 0C last time power reference value

[Unit of data] W
When warm up 0C is repeated by parameter No.29511 times, in Power Calibration
Preparation 0, if actual laser power is lower than parameter No.29507, alarm (DS4076) will
be active.
Title
Draw. No.
B-70475EN/01-05
Sheet 3/11
29508 Power Calibration Preparation 0C comparative power reference value

[Unit of data] W
This must be set to zero. This defines the comparative power judgment value.
In Power Calibration Preparation 0, if actual laser power is lower than the comparative
power judgment value, which is calculated by this parameter, as a general rule, internal
discharge will get continued (warm up 0C), gas pressure will get reduced, and internal
discharge Power Calibration Preparation 0C will get repeated.
The comparative power judgment value
=this parameter×
[Parameter No.29523 / the latest power calibration coefficient]
29509 Calculation coefficient of Power Calibration Preparation 0C comparative power reference value

[Unit of data]
Defines how the Power Calibration Preparation 0C comparative power judgment value
[parameter No.29508] is automatically calculated.
If parameter No.29500#2 equals one, by actual laser power in Power Calibration
Preparation 0C, the parameter No.29508 will be set automatically. The calculation is as
follows.
No.29508=actual laser power in Power Calibration Preparation 0C
×No.29509/1000
29510 Warm up 0C internal discharge time

[Unit of data] sec
Defines how long warm up 0C internal discharge is performed.
29511 Warm up 0C upper limit of repetition

[Unit of data]
Defines warm up 0C repeat upper limit.
Title
Draw. No.
B-70475EN/01-05
Sheet 4/11

[Unit of data] sec
Defines how long warm up 1C internal discharge is performed.
29513 Reference regulation of Power Calibration coefficient (Power calibration termination condition 1)

[Unit of data]
[Valid data range] -200 200
If the difference between power calibration coefficient (this time) and power calibration
coefficient (the medium of latest five times) is not more than the ratio set by parameter
No.29513, power calibration will be terminated.
[power calibration coefficient (this time) - power calibration coefficient (the medium of
latest five times)] / power calibration coefficient (the medium of latest five times)
parameter No.29513 / 1000
29514 Power difference in Power Calibration (Power calibration termination condition 2)

[Unit of data]
After warm up 3C is performed, meeting the following condition is Power calibration
termination condition 2.
The last actual laser power of internal discharge in power calibration
- The last actual laser power of internal discharge in previous power calibration
[parameter No.29514 /1000]×Power calibration 4C power command
× [Power calibration 4C Duty command(%) / 100]
Where the difference ratio of Power calibration coefficient must be inside the range
designated by parameter No. 29515. “The last actual laser power of internal discharge in
power calibration” stands for the last actual laser power of the latest internal discharge in
power calibration. The last actual laser power of internal discharge in previous power
calibration stands for the last actual laser power of the latest power calibration internal
discharge before Warm up 3C.
Title
Draw. No.
B-70475EN/01-05
Sheet 5/11
29515 Reference regulation 2 of Power Calibration coefficient (Power calibration termination condition 2)

[Unit of data]
[Valid data range] -200 200
The following condition is necessary condition of Power calibration termination condition
2.
[power calibration coefficient (this time) - power calibration coefficient (the medium of
latest five times)] / power calibration coefficient (the medium of latest five times)
parameter No.29513 / 1000
Where the possible power calibration coefficient get calculated by the actual laser power at
the last of power calibration.
29516 Power calibration 3C power command (Normal mode or High power mode)

[Unit of data] W
In Power calibration 3C, an internal discharge is perfumed by this parameter.
29517 Power calibration 3C power command (Fine mode)

[Unit of data] W
In Power calibration 3C, an internal discharge is perfumed by this parameter.
29518 Power calibration 3C power reference value (Normal mode or High power mode)

[Unit of data] W
At the last of Power calibration 3C, if actual laser power is lower than this parameter, warm
up 3C will be executed.
Title
Draw. No.
B-70475EN/01-05
Sheet 6/11
29519 Power calibration 3C power reference value (Fine mode)

[Unit of data] W
At the last of Power calibration 3C, if actual laser power is lower than this parameter, warm
up 3C will be executed.
29520 Power calibration 3C internal discharge time

[Unit of data] sec
Defines Power calibration 3C internal discharge time.
29521 Warm up 3C upper limit of repetition

[Unit of data]
Defines warm up 3C repeat time upper limit.

[Unit of data] sec
Defines warm up 3C internal discharge time.
29523 Power Calibration coefficient for Power Calibration Preparation 0C comparative power reference value

[Unit of data]
The comparative power judgment value in Power Calibration Preparation 0C is calculated
as follows.
The comparative power judgment value
=parameter No.29508×
[parameter No.29523 /the power calibration coefficient at the previous time]
Title
Draw. No.
B-70475EN/01-05
Sheet 7/11
29524 Power Calibration Preparation 2C upper limit of repetition

[Unit of data]
The upper limit repeat time of Power Calibration Preparation 2C, if the repeat time exceed
this, the alarm (DS4127) will be active.
F.2.2 Discharge start (HV ON)

In SEQ2000, when the discharge start signal (HVON) is changed from 0 to 1, discharge will start, if with
the original parameters as shipment, the oscillator executes Power Calibration Preparation 1C, Power
Calibration Preparation 2C, Power Calibration 3C, and Power Calibration 4C, then calculate Power
Calibration coefficient, and reach SEQ3000. These , Power Calibration Preparation 1C, Power Calibration
Preparation 2C, Power Calibration 3C, and Power Calibration 4C are internal discharges. At , Power
Calibration Preparation 1C, Power Calibration 3C, and Power Calibration 4C, actual laser power will be
judged by each power reference value. If actual laser power is low, warm up will be executed.
HV ON
Power
Calibration
Preparation
Power judge, 1C
and warm up
in Power Calibration
Preparation 2C
Gas replacement
Power
Calibration 3C
Power judge,
and efficient
warm up 4C
in Power Calibration
Termination of start up
Fig. F.2.2 (a) Discharge start (HV ON)
Title
Draw. No.
B-70475EN/01-05
Sheet 8/11
F.3 WARM UP IN START UP LASER OSCILLATOR CONTROL
SEQUENCE
In laser oscillator control sequence, if get started in cold condition or after long unused time, warm up
internal discharge is automatically executed if necessary until it get enough actual laser power. It follows
that for example ambient temperature is lowest of the specification, no alarm will be active, and after the
laser oscillator control sequence finished, the Power Calibration coefficient will be calculated properly.
NOTE
If the cooling water temperature is less than 20 , it takes time until laser oscillator control sequence finishes
because of automatic warm up sequence. For quick start-up, please keep proper water temperature with
anti-freeze function or warm-up function of the chiller.
After Power Calibration Preparation 1C, if actual laser power is lower than reference value, Warm up 1C
and gas replacement will be repeated.
The letters WARM UP on CNC screen indicates that warm up is underway.
HV ON
Power
Calibration
Preparation
Power judge,
and warm up
in Power
Calibration
Preparation
1C
WARMUP
Discharge
Warm up
2C 1C
Gas replacement
Actual laser power

Gas replacement <parameter No.29202
Power Calibration
Fig. F.3 (a) Warm up 1C
Title
Draw. No.
B-70475EN/01-05
Sheet 9/11
In Power Calibration Preparation 2C, if the resonator plate temperature is lower than standard, Warm up 2C
will be extended until the temperature reaches the standard. Then Warm up 2.1C will be executed
designated times and go on Power Calibration.
HV ON
Power Resonator Temperature
<20 degree C
Calibration
Preparation
1C
WARMUP
2C Warm up 2C
Warm up
Gas replacement
Gas replacement
Warm up 2.1C
No.29211 times
3C
Gas replacement
4C
Power
Calibration Power Calibration
Termination of start up Termination of start up
Fig. F.3 (b) Warm up 2C
Title
Draw. No.
B-70475EN/01-05
Sheet 10/11
If actual laser power is lower than reference value in Power Calibration 3C or Power Calibration 4C, Warm up
3C will be repeated. If actual laser power is very low, Power Calibration Preparation will be executed.
HV ON
Power Calibration Preparation

Power monitor
during Power
Calibration Gas replacement
and warm up
3C Condition 1
Condition
3
4C Condition 2
WARMUP
Discharge
Power
Calibration Warm up 3C
Internal discharge
time
Termination of start up No. 29522
Fig. F.3 (c) Warm up 3C
Condition 1: If actual laser power is lower than parameter Mo.29518.

Condition 2: If the Power Calibration coefficient is higher than,
the medium of latest five Power Calibration coefficient records X 1.053.
Condition 3: If the actual laser power goes lower than, power command minus allowance
(parameter No.15271).
Title
Draw. No.
B-70475EN/01-05
Sheet 11/11

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FANUC LASER C2000+-MODEL C

FANUC LASER C4000+-MODEL C

DEFINITION OF WARNING, CAUTION, AND NOTE.........................................................................s-1

DEFINITION OF WARNING, CAUTION, AND NOTE

• Read this manual carefully, and store it in a safe place.

WARNINGS AND CAUTIONS ON EXPOSURE

WARNINGS AND CAUTIONS ON MAINTENANCE

WARNINGS AND CAUTIONS ON HANDLING

WARNINGS AND CAUTIONS ON MACHINING

WARNING LABELS AND STICKERS

Fig.S.1(c) The positions of warning labels and stickers for C2000i-C

(a) Warning labels

Model Maximum output Gas composition

② Class identification label (FDA)

Model Maximum output Gas composition

⑤ Lifting method label

⑦ Label inside the access panel

⑧ Discharge section label

⑨ Label for regulating the atmospheric gasses in the oscillator housing

⑩ Ascent/Descent prohibited label

⑭ Equipment name plate

⑯ Cooling water and gas maintenance label

⑰ Inlet / outlet of water and gas

Fig.S.1(c) The positions of warning labels and stickers for C2000i-C

(a) Warning labels

④ Label inside the access panel

⑤ Lifting method label

⑦ Discharge section label

⑧ Label for regulating the atmospheric gasses in the oscillator housing

⑨ Ascent/Descent prohibited label

Chapter 1 : Internal Structure

2.3.10 Power Supply Margin Check (Pulse Check) ..........................................................48

5 UNITS .................................................................................................. 112

5.17 PCB ........................................................................................................... 155

6 LASER SOFTWARE FUNCTION........................................................ 183

E.5 PARAMETERS FOR DISCHARGE ........................................................... 230

G EXTERNAL GAS LEAKAGE RECORDING TABLE .......................... 267

1.1 OUTLINE .............................................................................................................................................1

24V PSU Laser power Laser power

Folding Discharge Discharge

Hour Turbo Water

Exhaust gas Laser gas

Fig.1.1 Outline of structure

(1) Part of Laser resonator

(2) Part of discharge power supply

(3) Part of gas circulating

(4) Part of pressure control

(5) Part of Interface

(6) Water-cooled part

1.2 INTERNAL STRUCTURE

(3) (29) (31) (4) (5) (7) (2) (6) (21)

Fig.1.2 (a) Internal structural drawing for C2000i-C (front view)

(27) (18) (1) (26) (32) (3)

(33) (14) (13)

Fig.1.2 (b) Internal structural drawing for C2000i-C (rear view)

(3) (31) (4) (5) (3) (28)（短光路型）

Fig.1.2(c) Internal structural drawing for C4000i-C (front view)

(27) (18) (6) (1) (29) (7) (32) (3)

(33) (14) (13)

Fig.1.2 (d) Internal structural drawing for C4000i-C (rear view)

(22) (17) (8) (9) (10) (12) (11) (16) (15)

Fig.1.2 (e) Internal structural drawing for C6000i-C (front view)

(1) (26) (7) (32) (3)