Microvision MEMS Technology

Microvision, a leading developer of scanned light beam technology, has unveiled a new
laser bar code scanner, incorporating the company’s unique silicon MEMS scanning
mirror technology. The product, named ROV™ Scanner, is a fashionably sleek, hand-
held, Bluetooth enabled laser bar code scanner aimed at mobile workers who need simple
and affordable data collection.

The MEMS scanner

MEMS (Micro- Electro-Mechanical Systems) is the integration of mechanical elements

and electronics on a common silicon substrate. Inherent advantages of MEMS devices are
high reliability, low power operation, small size, low cost to manufacture, and high
scalability to volume production. Microvision has utilized these advantages to advance its
2D light scanning and image capture technology into a number of next generation
products for pico projectors, vehicles displays, and wearable displays that interface to
mobile devices. Microvision has also leveraged these same advantages into its bar code
scanner products with the design and introduction of the ROV Scanner, a 1-D
MEMSbased bar code scanner. With over 100 patents issued and 80 pending,
Microvision has proven expertise in MEMS technology.

MEMS devices have proven their value and reliability in other markets and products such
as projection display systems, consumer electronics and medical applications in imaging
and blood pressure monitoring. They are also a key element in the highly demanding
automotive market’s safety restraint system (air bags) and suspension control systems.

Improved reliability is a key benefit of a MEMS-based bar code scanner technology

compared to other laser bar code scanner technologies. Even after millions of scans, the
integrity of the MEMS-engine does not degrade due to the inherent properties of silicon.
The oscillating silicon mirror is extremely small and lightweight, reducing susceptibility
to performance degradation resulting from bumps and vibrations often experienced with a
handheld device. Integrating all moving parts onto a low mass MEMS engine eliminates
parts that wear out or fatigue with use.

Laser bar code scanning engines provide advantages over other scanning methods such as
greater scan distance, larger bar code capability, reduced ambient light susceptibility, and
ability to read on irregular surfaces. Further, a MEMS-based laser bar code scanner
provides these same advantages with higher reliability at a lower cost. The manufacturing
techniques for fabricating MEMS devices enable lower cost of production. By utilizing
well established semiconductor processes and producing many devices on a single silicon
wafer, MEMS part price is kept low. As well as being cost effective, these design and
manufacturing practices are easily scaled to high volume production.

The Scan Engine Assembly

At the heart of the ROV™ Scanner is the MEMS-based scan engine subsystem. This
subsystem is well suited for a stand alone product with potential as an embedded
component extending functionality of other devices such as cell phones, mobile
computers, or kiosks. MEMS technology is an exciting new field which continues to
yield promising developments of higher levels of integration and increased
performance at lower costs.

Microvision continues to forge ahead with its product vision of providing simple and
affordable data collection for price sensitive applications. Leveraging its expertise in
MEMS-based light scanning into its own scan engine further enables this promise.