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Materials Today: Proceedings 4 (2017) 10803–10809 www.materialstoday.com/proceedings

AMMMT 2016

Analysis of MEMS Piezoelectric Hydrophone at High Sensitivity

for underwater application
Rudra Naik.Ma, U.N. Kempaiahb, U. K. Kushalc
a
Department of Mechanical Engineering, NitteMeenakshi Institute of Technology, Bangalore, 560064,India
b
Department of Mechanical Engineering, University Visvesvaraya College of Engineering, Bangalore,56001,India
c
Department of Mechanical Engineering,BMS College of Engineering, Bangalore, 560019,India

Abstract

Micro-electromechanical systems (MEMS), is a technology that is used to design small integrated devices that combines both electrical (voltage,
resistance) and mechanical components (stress, displacement). These devices are assembled using integrated circuit batch processing methods
and their size can vary from Micrometers (µm) to Millimeters (mm). MEMS devices have the capability to sense and control the environment.
These devices are fabricated using System Integrated chip technology and micro-level segments are manufactured using silicon. To remove the
selective parts of silicon i.e. extra silicon parts, Processes such as back etching, high-aspect-ratio micromachining are used to remove selective
parts of silicon or to add the extra layers to form the electromechanical components. The study is concerned to design a T- Shape vector
Hydrophone using MEMS Technology and to analyses mechanical properties like induced stresses, deformation and to analyses the piezoelectric
hydrophone characteristics like frequency response, sensitivity and Voltage to achieve improved sensitivity. MEMS Directional Hydrophone PZT
is simulated. Both the structure resembles the fish lateral line and auditory cilia system which converts acoustic pressure into voltage
© 2017 Elsevier Ltd. All rights reserved.
Selection and Peer-review under responsibility of Advanced Materials, Manufacturing, Management and Thermal Science (AMMMT 2016).

Keywords: MEMS;Hydrophone; PZT:Comsol Multiphysics

1. Introduction

MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-
mechanical elements (i.e., devices and structures) that are made using the techniques of micro fabrication. The
critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the
dimensional spectrum, all the way to several millimetersPen Wang et.all [1] proposed the bio-mimetic MEMS
hydrophone based on piezo-resistive effect is introduced and hydrophone with root music algorithm is proposed
.This gives the better output performance in terms of low signal to noise in the direction of incoming and is applied

2214-7853 © 2017 Elsevier Ltd. All rights reserved.

Selection and Peer-review under responsibility of Advanced Materials, Manufacturing, Management and Thermal Science (AMMMT 2016).
10804 Rudra Naik. M / Materials Today: Proceedings 4 (2017) 10803–10809

in lakes for trailing the hydrophone. So this hydrophone gives higher direction receptiveness and gives maximum
information. So it improves the direction of arrival without any.

Nomenclature

MEMS Microelectromechanical system

PZT Lead Zirconium titanium
Wmax Maximum displacement of diaphragm
σvm Vonmises stress
V Electric voltage
D Charge density
C Dielectric constant
σ Mechanical stress
mm mille meter
Mag magnification
μm’ micro meter
The frequency band is found to be 0.5 KHz and X channel receptiveness is 3 KHz and Y channel receptiveness is 4
KHz which gives the direction pattern of ‘8’ but withstand pressure up to 4 MPa. The application of this is fishery
detection.. Panpan Wang et all [3] proposed the hydrophone that is aimed at reducing the surface noise in finding out
the underwater targets and passive underwater detection. These hydrophone works on the principle of piezo resistive
effect. Linggang guan et.all [4] proposed the design and fabrication of T-shape hydrophone based on fish sensory
(lateral) line. The resonant frequency is found to be 2 KHz. The receptiveness of the hydrophone is found to be
around -180 dB displaying the polar plot pattern of ‘8’. [5] Qi li and wen-zhi Wang in “Study on high receptiveness
polarised pressure hydrophone” proposed the hydrophone which will have significant impact on reception
improvement. The cylindrical hydrophone has reliable directivity, the maximum receptiveness and has a simple
structure. Application of this include in marine field, acoustic technology and ultrasound technology.

[6] Nagaya okada and shinchi takeuchi in “Design of cavitation hydrophone by reverse crystalline” proposed the
hydrophone by applying the hydrothermally [PZT- 5A] polycrystalline film made on opposite surface of titanium
layer which acts as a protection layer. Acoustic receiving layer and ground electrode is used in order to avoid the
anti-cavitation. Because the electrode of the hydrophone will get damage by erosion. In order to avoid anti-
cavitation, a hydrophone with two layers (Type -1) with thickness of 6 um and the other layer (Type -2) with
thickness of 55 um with backing material of titanium. The receiving sensitivity of type-2 has 1.5 times better than
sensitivity of type-1.It is made with thickness of 50 um and diameter of 3.6 mm. [7] Tianhui li and Mingzhe rong in
“Influence of partial discharge EM wave” depicts the effect of T-shape on partial discharge radiated electromagnetic
wave [EM]. When ultra-high frequency is applied in PD detection foe gas insulated switch gear. The rules and
regulation pertaining the diagnosis and assessment about the insulation status must be properly understood. The
author gives the clear understanding of the PD propagation and some significance towards the utilisation of ultra-
high frequency technique. Partial discharge [PD] is an effective method to find the insulate status of electric power
equipment .The ultra-high frequency which detects the EM with good characteristics of immunity to noise is widely
used to avoid insulation accidents.[8] Zhiwen zang and Hai tao liu in “EM enhancement by Nano groove” proposes
about the electromagnetic enhancement in a metallic substrate T shape Nano groove compared to other grooves. The
T- shape groove gives much better enhancement by more than five times. The Nano groove model gives the full data
and thus allows us to get the in depth analysis of field enhancement. This model uses the surface enhanced Raman
scattering which gives the applications of high receptiveness and chemical sensing. These can be done by Raman
scattering which can be enhanced by magnitude of samples. This gives the irregular structures, however these
irregular structures can be avoided with development of modern nanofabrication techniques. [9] Miyachi and Goto
in “Design of hydrophone for detecting high reaction in water” proposes about the detector fabricated with piezo
ceramic. These piezo ceramic detector was designed to obtain high sensitivity. The size was around 55 mm in
diameter and 5 mm thickness. The sensitivity was found to be around 60 KHz. The piezo ceramic has ad-on
 Rudra Naik. M / Materials Today: Proceedings 4 (2017) 10803–10809 10805

advantage over the piezo film material. Using this underwater, signals produced by electron – induced shower is
found out. Signal generated by charged particles while stopping in a medium has capability in finding calorimeter
(dust). In addition to these it is prominent to find out the macroscopic tiny particles i.e. dust using the underwater
signal.[10] Chang liu and Jonathan Engel in “From hair cell to lateral line development” proposes the artificial hair
cell which is a basic unit for sensing both in aquatic and terrestrial system. For some species, single hair acts as a
sensing element, but for other many hairs will act as a sensing element. These are man-made sensors and gives low
sensitivity compared to natural sensing elements. The author in this gives the design of artificial air flow cell sensor
which gives the resonant frequency of 1200 Hz with dimensions of 3 um thickness, width of 50 um and height of
600 um. Applications of the sensor include underwater vehicle navigation, performance etc. [11] Takashi yasuda and
yoshihiro ozaki in “Air flow receptor model on insects” proposes a model which is able to find air flow velocity
which is low. Since the viscous force is zero, the air velocity can be found out by finding the force on sensory hair.
The sensors has two degrees of freedom one is used to select the frequencies and the other has the ability to find the
air flow direction angle. Both direction of freedom has cantilevers and strain gauges. The air velocity ranges few
tens of centimetres to 2 metres. In insects, this phenomenon is like finding the danger and escaping from it. Insects
have the ability to find low air flow velocity by using its wind receptor at its back end (tail). [12] Liu yaan and zhang
guojun in “Design of array hydrophone” demonstrate the sensitivity and frequency band of micro electro mechanical
systems (MEMS) bionic hydrophone. The author depicts that single hydrophone cannot give the sensitivity and
frequency, hence 2x2 array microstructure is proposed to give the sensitivity and frequency. [13] Xue chenyang and
zhang guojun in “Package optimization of vector hydrophone” proposes the mems hydrophone of cilium type having
the drawback of low sensitivity and fluctuating frequency curve. Hence in a way to overcome this, the author comes
out with umbrella type structure which have the high sensitivity and frequency band. The simulations are carried out
in Ansys software .The performance of umbrella structure (hydrophone) is improved and have the receiving
sensitivity of -180 Db. The frequency range is found to be 25 Hz to 3 KHz and fluctuations of frequency curve is in
between +3 Db and good directivity. With further improvements the sensitivity can be improved by 20 Db and
frequency band can be broaden by one times.

The design of T-shaped vector hydrophone is inspired from a fish lateral line

Fig 1: Fish lateral line

A biological sensory structure generally gives maximum performance, which motivates engineers in designing
artificial systems. With the inspiration from a fish lateral line and auditory cilia as shown in Fig1. many institutes
10806 Rudra Naik. M / Materials Today: Proceedings 4 (2017) 10803–10809

around the world has designed MEMS bionic micro-sensor base on piezoelectric, polymers, etc. Many institutes and
scholars designed micro probe based on PZT, flow sensor by taking inspiration from the fish lateral line and
acoustic sensor by considering auditory cilia.

In the present scenario, the fabrication of biological sensors mainly focuses on the artificial that is made of fibre etc,
which is a complex process. Hence there is difficult in guaranteeing the flexibility of biological sensor.

Hence a MEMS hydrophone is designed based on fish lateral line patterned by a straight forward process to achieve
the flexibility. The mems hydrophone gives the vector direction of underwater signal and mainly to low frequency
signal. The sensory organ of fish is the lateral (sensory) line consists of hair type receptors covered with cupola
which is like jelly located on the skin. When there is movement the fluid goes into pore through the lateral (sensory)
line causing displacement of the hair cell. Hence sensory cells senses the signal is sent to the medulla oblongata
through the nerve fibre.

Fig 2: Schematic of MEMS hydrophone

Based on the structure of fish lateral (sensory) line, the hydrophone is designed in such a way that sensory hair is
replaced with beam and sensory cells are replaced with piezo resistors as shown in Fig 2. The hydrophone will
works on the principle of fish lateral (sensory) line, i.e. when a signal (pressure) is applied to the beam, there will be
a change in resistance of piezo resistors, and in turn there will be a change in voltage also.

The model consists of four resistors R1, R2 (piezo resistors) and reference resistors R3, R4 to get output. To
increase the receptiveness (sensitivity), single beam is displaced with double beams as shown in Fig 2. The
mechanical properties like stress, displacement is analysed using Comsol Multiphysics.

2. Design specifications:

Directional Hydrophone structures are designed using SOIMUMPs process and simulated using Coventorware 2010
by applying a pressure of 1 Pa. The SOIMUMPS process includes.

A silicon-on-insulator (SOI) wafer is used as the initial material. The substrate has the following parameters:
Dope the silicon layer, then patterned by straight forward process and forming of Oxide layer by etching. This layer
can be used for resistor contacts, mechanical structures. The Substrate can be patterned by straight forward process
and removed from the “bottom” side to the Oxide layer. A thermal oxide layer is patterned by straight forward
process and then it is etched to provide contact in between the Silicon on insulator (SOI) layer, metal wires and
Patch layers. A piezoelectric layer, Aluminium layer (metal layer), allows for the development of piezoelectric
sensors. A pad-metal layer feature that makes to do finer metal features and correct placement but has limitations to
areas not etched in the silicon layer.
 Rudra Naik. M / Materials Today: Proceedings 4 (2017) 10803–10809 10807

2.1 MODAL ANALYSIS:

In Eigen frequency analysis, six modes of frequencies are obtained which is Shown in the Fig 3. Taking the two
values from the six modal values gives the frequency response of hydrophone with respect to voltage.

Fig: 3 Eigen frequencies

Since the hydrophone resonates at frequencies of 1500 Hz. Later on the model deforms in negative direction

Fig 4: (a) Stress and frequency and (b) Voltage v/s applied pressure
The frequency at which the Hydrophone will responds is 1577 Hz. The stress around this frequency is 6.99 N/m^2
as shown in Fig 4

Fig5 : (a) Frequency v/s Displacement and (b) Frequency v/s Voltage
10808 Rudra Naik. M / Materials Today: Proceedings 4 (2017) 10803–10809

From the simulations results shown Fig 5. The maximum stress will be at the beam intersection point and maximum
displacement will be at the first modal frequency .The maximum voltage will be at the maximum frequency in
which the model resonates. The displacement of the model due to the material properties of the model and the
physical change in parameters given to the model. In this section, the T-Shaped Directional Hydrophone were
designed using SOIMUMPs process and were simulated using Coventorware 2010 tool. It was observed that T-
shaped directional hydrophone structure showed good sensitivity and frequency response

2.2 ANALYTICAL MODELLING

F (l − x ) a
Stress (σ ) = (1)
l
= 8.33324 N / m2
3
 pb   b 
Displacement = α  ×  (2)
 e  h

= 3.91 µm
A
Voltage V = D × (3)
C

= 1.7 V

0.55966 ek 2
Frequency F1 = × (4)
l2 p

= 1689 Hz ≈ 1.7 KHz

3. CONCLUSION

The Directional Hydrophone takes inspiration from the fish lateral line have been designed and simulated for
different pressure. The work contains mainly two structures i.e. design of beam and piezo electric material in
relevance to artificial hair and hair cells. Both the structures use the concept of lateral line of fish. The first structure
is based on directional hydrophone structure with horizontal beam, then variation in the structure is brought in
second structure by introducing piezoelectric material, this structure minimizes the damping effect thereby results in
broader frequency response curve and higher amplitude at resonant frequencies. All the structures were designed
using silicon–on- insulator (SOIMUMPs) process. The parameters such as frequency, displacement, stress and
voltage are calculated analytically and compared with the theoretical results to on simulated results. From the
simulation results it has been verified that the hydrophone structures can be designed for a given resonant frequency
and sensitivity depending on the application it is used.

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