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This article has been accepted for publication in a future issue of this journal, but has not been

fully edited. Content may change prior to final publication. Citation information: DOI 10.1109/TPEL.2017.2764632, IEEE
Transactions on Power Electronics

Measurement Methodology for Accurate


Modeling of SiC MOSFET Switching Behavior
over Wide Voltage and Current Ranges
Hiroyuki Sakairi, Tatsuya Yanagi, Member, IEEE, Hirotaka Otake,
Naotaka Kuroda, Hiroaki Tanigawa, and Ken Nakahara, Member, IEEE
 high-frequency, and high-speed switching, as well as in
Abstract— This paper presents two novel measurement operation at high temperatures beyond the operating range of
methods to characterize SiC MOSFET devices. The resulting Si devices [1], [2]. Especially, the high-frequency and
data are utilized to significantly improve the extraction of a high-speed operation capability of SiC and GaN devices
custom device model that can now accurately reproduce device expands the possibility of miniaturizing power electronics
switching behavior. First, we consider the Id–Vds output
systems [3]. However, these high-speed operations increase
characteristics of power devices such as SiC transistors. These
are typically measured using traditional curve tracers, but the the time derivatives of voltage (dv/dt) and current (di/dt) and
characterization of the high-voltage and high-current region is deteriorate the conducted and/or radiated emissions [4]. This
very challenging because of device power compliance and makes it difficult to ensure electromagnetic compatibility
self-heating. In this paper, we introduce a measurement (EMC). Experimental approaches for improving EMC
technique that overcomes self-heating and derives the require multiple rounds of testing, which inevitably delays
high-voltage and high-current region from switching product launch. Thus, the front-loading design should be
waveforms. The switching transient characteristics of devices established for achieving EMC by maximizing the features of
are used to determine drain current (Id) as a function of power devices built using the new materials.
drain-source voltage (Vds) in the high-voltage and high-current
To this end, it is crucial to establish a simulation
range. Second, we consider another challenging
characterization area: measurement of nonlinear capacitances environment that accurately predicts the electromagnetic
when device is turned on. These capacitance characteristics of (EM) noise in the investigated systems. This means that the
on-state devices are important for correcting disagreements simulation has to reproduce the transient waveforms of
between simulations and measurements in turn-off switching power device switching as accurately as possible, because the
transient waveforms and cannot be measured using a switching process generates high-frequency electric signal
conventional C−V meter. We introduce S-parameter components, which mainly generate EM noise. Accordingly,
measurements as an effective method to obtain the capacitance the quality of the switching device model used in the
characteristics of both off-state devices and on-state devices. simulation significantly influences simulation quality.
These novel measurement techniques have been applied to the
The power device modeling methods previously reported,
modeling of an SiC device. The extracted device model, a
modified version of the popular Angelov−GaN HEMT model, however, include insufficient experimental data on the range
shows significant improvement in terms of the accuracy of of drain current (Id) and drain-source voltage (Vds). Measured
switching waveforms of devices over a wide range of operating data of several tens of amperes for Id and ~20 V for Vds are
conditions. conventionally used for extracting the parameters of a device
model. However, these values are far less than the Id and the
Index Terms—Semiconductor device modeling, Circuit Vds, values used commonly in the power applications in
simulation, MOSFETs, Semiconductor device measurements, which SiC and GaN are expected to be applied [3], [5].
Semiconductor switches, SPICE Consequently, it is necessary to measure the Id−Vds
characteristics in higher current and voltage regions than
usual to develop high-quality power device simulation
I. INTRODUCTION models.
Another problem is measuring the capacitance-voltage
W IDE-BAND-GAP semiconductors such as silicon
carbide (SiC) and gallium nitride (GaN) are promising
candidate materials for power devices because they
(C−V) characteristics of power devices. The commonly used
C−V meter is capable of measuring device capacitance in the
show excellent performance in low on-resistance, off-state. However, the on-state C−V curve of a MOSFET
heavily affects its switching transient behavior, especially in
Hiroyuki Sakairi is with the research and development division, ROHM the turning-off transition, but this type of measurement has
Co., Ltd., Kyoto, Japan. (e-mail: hiroyuki.sakairi@dsn.rohm.co.jp). not yet been established.
Tatsuya Yanagi is with the research and development division, ROHM The last issue we discuss here is determining how to
Co., Ltd., Kyoto, Japan. (e-mail: tatsuya.yanagi@dsn.rohm.co.jp).
include the parasitic impedance of a measurement system
Hirotaka Otake is with the research and development division, ROHM
Co., Ltd., Kyoto, Japan. (e-mail: hirotaka.otake@dsn.rohm.co.jp). into switching simulation because the system itself has
Naotaka Kuroda is with the research and development division, ROHM non-negligible effects on switching waveforms. One
Co., Ltd., Kyoto, Japan. (e-mail: naotaka.kuroda@dsn.rohm.co.jp). approach is to measure parasitic impedances, for which
Hiroaki Tanigawa is with the EEsof EDA division, Keysight
circuit simulation is performed [6]; another is to model the
Technologies Japan G.K., Tokyo, Japan. (e-mail: hiroyuki.sakairi@
dsn.rohm.co.jp). system by calculating the S-parameters [7], [8]. We do not
Ken Nakahara is with the research and development division, ROHM Co., choose the first option because it requires measurements, thus
Ltd., Kyoto, Japan. (e-mail: ken.nakahara@dsn.rohm.co.jp).

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Transactions on Power Electronics

conflicting with the main research focus of front-loading Angelov−GaN HEMT model equation [9] to better represent
design. the actual Id−Vds characteristics of the SiC MOSFET in the
In this study, we propose experimental procedures for HVHC range.
extracting an accurate device model. A commercially The drain current equations are given below.
available SiC MOSFET is examined as the research object. 𝐼ds = 0.5 × (𝐼dsp − 𝐼dsn ) (1)
The characterization process is as follows:
𝐼dsp = 𝐴 × 𝑔1 (𝑉gs ) × (1 + 𝑓1 (𝑉gs , 𝑉ds )) × (1 + 𝑔3 (𝑉gs ) ×
1. Static Id−Vds characteristics of the SiC device are
obtained in a high-voltage and high-current (HVHC) 𝑓2 (𝑉gs , 𝑉ds ) + 𝐵 × 𝑔4 (𝑉ds )) (2)
range by performing switching measurements.
2. The C−V curves of the SiC device with a forward bias 𝐼dsn = 𝐴 × 𝑔1 (𝑉gd ) × (1 + 𝑓1 (𝑉gd , 𝑉ds )) × (1 +
applied to its gate are acquired by S-parameter 𝑔3 (𝑉gd ) × 𝑓2 (𝑉gd , 𝑉ds )) (3)
measurements.
𝑔2 (𝑉i ) −𝑔2 (𝑉i )
3. EM simulation is performed to determine the 𝑔1 (𝑉i ) = 1 + 𝑡𝑎𝑛ℎ (0.5 × (𝑒 −𝑒 )) (4)
S-parameter describing the measurement system and the
𝑔2 (𝑉i ) = 𝐶1 × (𝑉i −𝑓3 (𝑉dg , 𝑉ds ) + 𝐶2 × (𝑉i −
device package, and this result can be used directly in an
2 3
S-parameter-based circuit simulation. 𝑓3 (𝑉dg , 𝑉ds )) + 𝐶3 × (𝑉i − 𝑓3 (𝑉dg , 𝑉ds )) ) (5)
The above modeling procedure is applied to a modified
version of the Angelov−GaN high-electron-mobility 𝑔3 (𝑉i ) = 𝐺1 + 𝐺2 × 𝑔1 (𝑉i ) (6)
transistor (HEMT) model, which serves as an example of a 𝑔4 (𝑉ds ) = 𝑒 𝐽 × (𝑉ds − 𝐾) (7)
state of the art model capable of incorporating key effects. 𝑓1 (𝑉i , 𝑉ds ) = 𝑡𝑎𝑛ℎ ((𝐸 + 𝐹 × 𝑔1 (𝑉i )) × 𝑉ds ) (8)
However, the procedure can be applied to any compact
model. 𝑓2 (𝑉i , 𝑉ds ) = 𝑡𝑎𝑛ℎ ((𝐻1 × 𝑡𝑎𝑛ℎ(1 + 𝐻2 × 𝑉i )) × 𝑉ds ) (9)
In each characterization step, a subset of related model 𝑓3 (𝑉dg , 𝑉ds ) = 𝐷 − 𝐿 + 𝐿 × 𝑡𝑎𝑛ℎ(𝐹 × 𝑉ds ) − 𝑀 ×
parameters of the modified Angelov−GaN HEMT was 2
(𝑉dg − 𝐾) (10)
extracted by comparing measured and simulated data. Finally,
the measured and the simulated switching waveforms of The term added for the current equation is an equation (9). H1
gate-source voltage (Vgs), Vds, and Id were compared, and very and H2 are channel length modulation parameters, and they
good agreement was found over a wide operation range. are used for fitting the SiC MOSFET model to measurements.
your conference editor concerning acceptable word H2 is an added parameter for describing the dependence of
processor formats for your particular conference. output conductance on Vgs in the large 𝑉gs × 𝑉ds region. A, B,
C1, C2, C3, D, E, F, G1, G2, H1, H2, J, K, L, and M are fitting
II. SELECTED DEVICE AND MODEL parameters in the SiC MOSFET model, and Vi is Vgs or Vgd.

The examined device was a SiC MOSFET (SCT2080KE B. Charge equations


made by ROHM; Rated voltage = 1200 V; Rated current = 40 We modified the charge equations of the SiC MOSFET
A). The Angelov−GaN HEMT model was employed as the model. The parasitic capacitances of the SiC MOSFET were
base model for the SiC MOSFET model used in this work [9]. modeled using the following mathematical scheme.
Fig. 1 shows an equivalent circuit schematic of the device First, the charge between the gate and the source Qgs is
model used. The original Angelov−GaN HEMT topology expressed as follows.
was modified by adding a pn-diode model between the source
𝑄gs = (𝐶gs0 + 𝐶gs1 × 𝑓32 (𝑉gs , 𝑉ds )) + (𝐶gs0 +
and the drain. The current and charge model equations were
modified to better represent the I-V and the C-V (𝐶gs1 × 𝑓31 (𝑉gs , 𝑉ds ) + 𝐶gs2 × 𝑓33 (𝑉gs , 𝑉ds )) ×
characteristics of the SiC MOSFET. The modified parts of
the equations are explained in this chapter. 𝑓32 (𝑉gs , 𝑉ds )) (11)
Cgdpe 𝑓3i (𝑉gs , 𝑉ds ) = 1 + 𝑡𝑎𝑛ℎ(𝐿i + 𝑁i × 𝑉gs + 𝑃i × 𝑉ds )
Rgd
Igd
Drain (𝑖 = 1~6) (12)
Rgp1 Cgs0 is a gate-source pinch-off capacitance, and Cgs1 and Cgs2
Gate Rg Lg Rd Ld
Igs Cgd Crf are gate-source capacitance parameters. Cgs0, Cgs1, Cgs2, Li, Ni,
Ri Ids Cds Pi are fitting parameters of the SiC MOSFET model. As for
Rgp2 Cgp2 Cgs Qgs, capacitances with two types of dependence on the
Rc Body diode
Rdel gate-source voltage can be expressed by using f31 to express a
Cdel
positive bias dependence on the gate-source voltage and f33 to
express a negative bias dependence.
Crfin Rcin Rs
Second, the charge between the gate and the drain Qgd is
Ls
expressed as follows.
Source
When Vds is greater than −𝐹cp ,
Fig. 1. Equivalent circuit of the original Angelov model that was adapted to
add a pn-diode as the body diode of a SiC MOSFET. 𝑄gd = 𝐶gd1 + 𝑔5 (𝑉ds ) × 𝑓34 (𝑉gs , 𝑉ds ) + 𝐶gd2 × 𝑔5 (𝑉ds ) ×
𝑓35 (𝑉gs , 𝑉ds ) + 𝐶gd3 + 𝐶gd4 × 𝑓36 (𝑉gs , 𝑉ds ) (13)
A. Drain current equations −𝑀𝑚
𝑉ds
As shown in Fig. 7 in chapter III, we found that the drain 𝑔5 (𝑉ds ) = 𝐶gd0 × (1 + ) (14)
𝑉j
current of the SiC MOSFET at each Vgs was not saturated in
When Vds is smaller than −𝐹cp ,
the measured HVHC range (so-called saturation region), and
the gradient of the drain current depended on Vgs. Therefore, 𝑄gd = 𝐶gd1 + 𝑔6 (𝑉ds ) × 𝑓34 (𝑉gs , 𝑉ds ) + 𝐶gd2 × 𝑔6 (𝑉ds ) ×
we added a gate bias-dependent term to the original 𝑓35 (𝑉gs , 𝑉ds ) + 𝐶gd3 + 𝐶gd4 × 𝑓36 (𝑉gs , 𝑉ds ) (15)

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Transactions on Power Electronics

𝐶gd0 𝑀𝑚 The switching data acquired with Id = 20 A are plotted as a


𝑔6 (𝑉ds ) = (1−𝐹 )𝑀𝑚 × (1 + ( ) × (−𝑉ds − 𝐹c × 𝑉j )) trajectory curve in the Id−Vds plane (pale orange line) in Fig. 3.
c 𝑉j (1−𝐹c )

(16) This figure includes the red lines denoting the Id−Vds
Here, 𝐹cp is defined as follows: characteristics measured using a curve tracer (CT).
𝐹cp = 𝐹c × 𝑉j (17)
where Fc is a forward bias junction parameter of Cgd, and Vj is
the junction potential of Cgd0.
Where Cgd1 is a gate-drain pinch-off capacitance, Cgd0 is a
gate-drain capacitance parameter, Mm is a grading coefficient
for Cgd0, and Cgd2 is a gate-drain capacitance parameter. Cdg0,
Cdg1, Cdg2, Cdg3, Cdg4, Vj, Mm, and Fc are fitting parameters of
the SiC MOSFET model. Qgd consists of two numerical
expressions with junction capacitance, which results in more
accurate drain voltage dependence. The f36 function provides
a good fit of the simulation data to the experimental data in
the low drain voltage region. Fig. 2. Schematic diagram of clamped inductive load circuit used to acquire
C. Body-diode model switching behavior of SiC MOSFET. The direction of the arrows shows the
high-side of the voltage and the positive direction of the flowing current.
The SiC MOSFET has a body diode in its device structure,
which is not considered in the original Angelov−GaN HEMT
model because GaN HEMTs have dissimilar structures.
Therefore, we adapted this model to create the SiC device
SW
model by adding a pn-diode model between its drain and C B
source electrode to reproduce the Cds−Vds capacitance
characteristics, as shown in Fig.1. In this work, the I−V
characteristics of the body diode were not used in the CT
inductive load switching circuit that we used for model
validation because the high-side device in the switching
circuit is a Schottky barrier diode and the low-side device A
does not use the reverse current characteristics. Therefore, we
fitted the reverse I−V characteristics of the SiC MOSFET
very roughly. More accurate modeling of the reverse Id−Vds Fig. 3. Id−Vds plane including switching trajectory of SiC MOSFET (solid
characteristics could be a topic for a future investigation. pale orange line “SW”), and curve tracer measurement results (red solid lines
The most important part in this study was establishing a “CT”). A, B, and C denote the discriminative switching points detailed in the
main text.
measurement procedure to obtain accurate experimental data
so that the model can predict device behavior in a circuit. The First, Fig. 3 shows that the CT data do not cover the actual
details of the developed measuring techniques are described operating area at all. The Id−Vds characteristics region
in the following chapters. delineated by the switching trajectory in this figure is the
least data necessary to predict the switching behavior of this
III. ID−VDS CHARACTERISTICS MEASUREMENT power device.
A. Principle of measuring static Id−Vds characteristics Second, the switching trajectory (SW) line indicates the
based on switching behavior method of measuring the Id−Vds characteristics in real
operating ranges by obtaining switching measurements.
Previous static Id−Vds characteristic measurements, as
When the DUT was switched on, the track shifted from A
described in the introduction, did not cover the voltage and
(off-state) through B to C (on-state). Id cannot increase
current areas where SiC MOSFETs are expected to be
beyond the load current determined by the high-side closed
applied. Self-heating of the device under test (DUT) cannot
loop composed of an inductor and diodes. Therefore, at this
be avoided when using the conventional methodology.
moment, the direction of the Id−Vds trajectory must be
Therefore, we developed a new method to measure the Id−Vds
changed. Point B in Fig. 3 denotes the moment at which Vgs
characteristics by utilizing switching transient behavior
reaches a so-called gate plateau voltage (Vp). This means that
measurements. A similar method has already been proposed
point B in Fig. 3 identifies the Id−Vds characteristics specified
elsewhere [9], but we improved it to acquire the Id−Vds
by Vgs = Vp in a high-Vds region. Our measurement method,
characteristics over wider voltage and current regions than
which allows for the determination of Id−Vds over wider
those in the reference. The main differences from the
voltage and current regions without self-heating of the DUT,
previous study [10] pertain to the method of measuring Ig and
is based on this experimental observation, and details of the
the gate plateau voltage used to derive Vgs.
associated procedures are given in the following two
A clamped inductive load switching circuit (Fig. 2) allows
sections.
for the characterization of the switching transient waveforms
Fig. 4 shows the switching waveforms of a SiC MOSFET in
of a SiC MOSFET. Three SiC Schottky barrier diodes
the turn-on transient, as measured using the circuit displayed
(SCS240KE2 made by ROHM) were connected in parallel
in Fig. 2. The operating conditions are as follows: E = 600 V,
and used as the high-side device. E, Cf, L, and Rg denote a
Rg = 240 Ω, and L = 500 μH. The symbols A, B, and C in the
power source (600 V), film capacitor (160 μF), load
figure denote the respective operation points, as in Fig. 3. The
inductance (500 μH), and gate resistance (240 Ω),
plateau region must be long to improve the accuracy of the
respectively.

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Transactions on Power Electronics

transient response measurement. Thus, gate resistance was indicated in the figure, the output voltage of the gate driver
set to a large value of 240 Ω. (VGD) decreases due to Rg and the internal gate resistance
(Rg,in) when Ig flows in the manner shown in this figure. Thus,
Vgs differs from Vgo.

Fig. 5. Equivalent gate-driving circuit; Rg,in denotes internal gate resistance


of SiC MOSFET die, and VGD is output voltage of gate driver.
Vp
As described in detail in section A, we collect Id and Vgs at
various E to acquire the Id−Vds characteristics, but it is very
difficult to specify Id, Ig, and Vgo from the measured data due
to non-negligible jitter (Fig. 4). Thus, the mean value over the
plateau region is used to obtain the Id−Vds characteristics.
The measured Vp and Ig data in the plateau region of a
A B C switching waveform are averaged (Vp,ave and Ig,ave) to
eliminate jitter in the data. This is validated by the facts that Ig
is constant in the plateau region because Ig can be simply
Fig. 4. Experimental switching waveforms of SiC MOSFET in inductive calculated by
load switching using circuit shown in Fig. 2. VGD − Vgs
Ig = , (18)
Rg
Id remains zero from the beginning of switching to the
and VGD and Rg are constant with Vgs being fixed at Vp.
operation point A, when the time zone Vgs does not exceed the
Accordingly, Vgo is computed as
threshold voltage (Vth) of the DUT. In the operating region
Vgo =Vp,ave − Rg,in Ig,ave . (19)
from A to B, Id increases while Vds remains constant. When Id
reaches the load current, Vds starts to decrease while Id This Vgo corresponds to the Vgs conventionally obtained by
remains constant [11], [12], and Vgs is pinned to Vp. As the CT.
explained above, this data point provides the static Id−Vds Furthermore, we should consider that the SiC MOSFET
characteristics specified by point B. If this process is repeated has positive Id−Vds curves, even in the saturation region,
with different E and Id, the obtained dataset including Vgs, Id, owing to its short channel effect [11], [13]. Consequently, Vp
and Vds allows us to determine the Id−Vds characteristics in the depends on Vds even at the same Id; therefore, Vp must be
HVHC region. measured under different Vds and Id. Accordingly, in this
In addition, device self-heating is negligible when using study, the switching characteristics are measured at E = 30,
this method. The energy equivalent to the heat generated 100, 200, 400, and 600 V, and Eq. (19) provides Vgo, which is
during one switching process is calculated to be 6.6 mJ when regarded as Vgs in the conventional context. The measured Id
Vds = 600 V and Id = 20 A. By contrast, when using the values are plotted as a function of Vgo at each Vds (= E),
conventional method, it can be as much as 1.2 J when the CT leading to the Id−Vgo characteristics. Fig. 6 shows the Id−Vgo
pulse width is 100 μs, which is the general setup for the CT characteristics at Vds = 100, 200, 400, and 600 V, as
measurements. This finding validates that our method is examples.
appropriate for obtaining the true static Id−Vds characteristics
of a DUT at room temperature. Therefore, we used the
switching behavior data to acquire the static Id−Vds
characteristics over a wide Id−Vds range.
B. Adapting Vgs and RT static Id−Vds curves
We should note, however, that the Vgs measured using our
method is not the same as that captured using the CT. The CT
measures Id at Ig = 0 A because the measurement is performed
after adequate time elapses for Vgs to become constant. Thus,
the conventionally measured Vgs is always equal to the
voltage applied to the gate oxide layer of a MOSFET (Vgo),
which determines the Id−Vds curves. As shown in Fig. 4,
however, Ig is not 0 A with this method, and Vgo ≠ Vgs.
Accordingly, the Vgs measured by this method must be Fig. 6. RT Id−Vgo characteristics obtained by multitudinous switching
adapted to obtain the static Id−Vds curves. measurements.
The equivalent gate-driving circuit is shown in Fig. 5. As

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Transactions on Power Electronics

In the switching measurements, Vds and Id can be specified HVHC region were accurately fitted. Finally, the Id–Vds
intentionally, whereas Vgo cannot be. The Id and Vds values at characteristics in the CT measurement region were fitted
a specific Vgo, however, are necessary to draw an Id−Vds curve, once again with increased accuracy; however, in this step, we
and, thus, a number of measured Id−Vgo curves are fitted by considered only the accuracy of the linear region (Ron) of the
polynomial approximation by using the least squares method. Id–Vds curves.
The function used is a polynomial expression as follows: The parameter extraction results are shown in Fig. 9. Fig. 9
𝑛
(a) and (b) show the fitted results of Id–Vds characteristics in
y = ∑ 𝑎𝑖 𝑋 𝑖 (20) the CT measurement region and the HVHC region,
𝑖=0 respectively. We compared the two types of device models.
We chose a value of n between 3 and 6 to obtain the best fit. One was fitted with model A using only the I–V data from CT
These fitted curves provide the dataset of Id and Vds at a measurements, which is plotted with dotted blue lines in Fig.
specific Vgo, and finally the static Id–Vgs characteristics are 9. The other was fitted with model B using datasets from both
shown in Fig. 7, wherein Vgs is used as Vgo to place the curves the CT measurements and the HVHC switching
in the conventional context. In this figure, the plotted points measurements, which is plotted with solid blue lines in Fig. 9.
are the measured data. In Fig. 9 (a), models A and B both agree well with the
experimental curve obtained with the CT. Conversely, in Fig.
9 (b), although model A does not agree with the experimental
data, model B agrees well with it. In this case, because the
slope of Id–Vds characteristics in the HVHC region is
important for the modeling, a few points from the HVHC
region were used to fit the simulated curve to the
experimental data.

Fig. 7. Id–Vds characteristics acquired from switching waveform data in


HVHC region.

C. Parameter extraction using Id–Vds characteristics with


high-voltage and high-current region data
Using measured Id–Vds data from HVHC region, parameter
extraction was performed with a commercially available
parameter extraction tool (IC-CAP; Keysight Technologies,
(a)
Inc.). IC-CAP includes the original and modified Angelov–
GaN model. The measured I–V and C–V data were fed into
IC-CAP, and the simulated data were fitted to the measured
data for a parameter extraction. The fitting procedure was
performed with the nonlinear least-squares-fit algorithm in
IC-CAP until the root mean squared (RMS) error was less
than 5% and 10% for the I–V and C–V curves, respectively.
Fig. 8 presents a flow chart for the parameter extraction.
S-parameter Simulation S-parameter measurement I-V, C-V measurement SW measurement

Conversion to Y- or Conversion to Y- or Id-Vgs, Id-Vds fitting High-Voltage


Z- parameter Z-parameter Large-Current
Check Id-Vds
No
Parasitic Component Parasitic Component RMS error under 5%
of the Package of the Device
Yes
Rg Cgs, Cgd Ciss, Coss, Crss fitting
(b)
Cgs-Vgs, Cgd-Vgd fitting
Fig. 9. (a) The fitted results of Id–Vds characteristics in the CT measurement
Check No
region. (b) The fitted results of Id–Vds characteristics in the HVHC region.
RMS error under 10% The red lines in (a) and the circles, triangles, and crosses in (b) are measured
data. The blue dot and solid lines show the Id–Vds curves fitted by models A
Yes
De-embedding
and B, respectively.
S-parameter fitting
IV. CAPACITANCE-VOLTAGE CHARACTERISTICS
SiC MOSFET Model
MEASUREMENT
Fig. 8. Modeling flow chart for the parameter extraction.
A. Off-state C–V measurement
In the parameter extraction for I–V characteristics, first, the
A C–V meter is used to measure the input capacitance
Id–Vds characteristics in the CT measurement region were
(Ciss), output capacitance (Coss), and reverse transfer
roughly fitted. Second, the Id–Vds characteristics in the
capacitance (Crss) of the SiC MOSFET in the off-state (Vgs = 0

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V) at Vds = 0–1200 V. The red broken lines in Fig. 10 (a) (c)


Fig. 10. (a) Ciss, Coss, and Crss of off-state SiC MOFET as a function of Vds. Vgs
represent the experimental data of Ciss, Coss, and Crss, as a
= 0 V. (b) Cgs of off-state SiC MOFET as a function of Vgs. Vds = 0 V. (c) Cgd
function of Vds. The gate bias dependence of Cgs and Cgd was of off-state SiC MOFET as a function of Vgd. Vds = 0 V. The broken red lines
also measured over the range Vgs = −5–18 V, as shown in Fig. represent experimental data, and the solid blue lines represent the simulated
10 (b) and (c). The parameters in the polynomial model were data after extracting the parameters for the applied device model.
optimized to reproduce these C-V characteristics. First, the B. S-parameter measurement
Vds dependence of Crss shown in Fig. 10 (a) was fitted with
g5(Vds) and f36(Vgs, Vds) in equation (13) and the Cgd–Vgd S-parameters of the SiC MOSFET were measured by
characteristic in Fig. 10 (c) was fitted with f34(Vgs, Vds) and mounting it on a board dedicated to high-frequency response
f35(Vgs, Vds) in equation (13). Second, the Coss was fitted with evaluation. The evaluation board comprised an insulating
the capacitance parameters of the conventional pn-diode, layer made of dielectric material (Megtron4), Copper (Cu)
which was added as a body diode, as shown in Fig. 1. Finally, micro-strip lines (characteristic impedance Z0 = 50 Ω) on the
the Ciss and Cgs–Vgs characteristics were fitted with equation surface, and a Cu ground plane on the backside. SMA
(11). The simulated C–V curves are also shown in Fig. 10 as connectors were adopted as the input and the output terminals.
pale blue solid lines. This figure shows that the simulated The configuration of the board is shown in Fig. 11, and the
capacitances agree well with the experimental data examined S-parameters were measured using a packaged discrete
over the entire range of Vds, Vgs, and Vgd. device mounted on the evaluation board, also shown in the
figure.

DUT

Gate
Input
Drain

Micro Strip Line

(a)

Output
10mm 10mm
Fig. 11. Evaluation board for measuring S-parameters of SiC MOSFET.

The measurement frequency ranged from 50 kHz to 3 GHz,


and a vector network analyzer was used for measuring the
S-parameters. Vgs was 0 to +18 V, and Vds was 0 to +3 V, and
they were biased for generating various on-states of the
device. Id = 0–8 A appeared under the measurement
conditions employed. The phase shift in the micro-strip line
was corrected by auto-port-extension through the network
analyzer. The S-parameters of the package were obtained by
using an EM simulator (EMPro; Keysight Technologies,
(b) Inc.), and the S-parameters of the bare die were finally
obtained by de-embedding the S-parameters of the package
from the measurement results.
We utilized the S-parameter data of the bare die to
acquire the parasitic capacitances not only of the off-state
devices but also of the on-state devices. S-parameter data was
also used for the confirmation of the frequency dependence
of the parasitic capacitances. As explained below in chapter
VI, Ciss of the on-state device is necessary to reproduce its
switching waveforms accurately [14]. However, capacitances
of the on-state device cannot be measured by C–V meters
because it is difficult to measure the alternating current that
1
induces the parasitic capacitance of the device when the drain
current flows. Thus, we employed S-parameter measurement
to obtain the gate-drain capacitance Cgd, gate-source
capacitance Cgs of the on-state device. This method is often

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used for determining the small-signal equivalent circuit


parameters of microwave devices [15], [16].
The resulting on-state capacitances Cgd and Cgs derived
from the S-parameters are plotted with a red broken line in
Fig. 12. In the figure, Vds = 3 V and Vgs = 3–6 V. The
simulated curves (pale blue solid lines) of the gate-drain
capacitance model Cgd = Crss and gate-source capacitance
model Cgs are also plotted in Fig. 12 (a) and (b). These
calculated capacitances are extracted solely from the off-state
C–V measurements shown in Fig.10. Because S-parameters
are measured in the frequency domain, the calculated Cgd and
Cgs were also plotted in the frequency domain, as shown in
Fig. 12. In this study, the S-parameters were measured only
under limited bias conditions because of the bias tee current
limit of 2 A (PSPL5544; TEKTRONIX). However, in the
turned-on state, the drain voltage of the device maintains
on-voltage (near 0 V), so the S-parameter data at Vds = 0 to 3 (b)
V are adequate to calculate the Cgd and Cgs of the on-state
from the S-parameters. In addition, the measured Cgd data at
Vgs > 6 V is almost overlapped on the data at Vgs = 6 V, so the
date at Vgs = 3 to 6 V are adequate. Therefore, we show Cgs
and Cgd data at Vgs = 3–6 V in Fig. 12.
From Fig. 12, although the simulated curves of the Cgs
agree well with the measured curves at frequencies under 10
MHz, the simulated Cgd curve is less than the measured data
by an order of magnitude. Fig. 12 (c) shows the Cgd model
adapted to match the on-state capacitance features.
Comparing Fig. 12 (a) and (c) clearly demonstrates that using
only off-state measurements insufficiently reproduces the
on-state capacitance characteristics. By contrast, the
S-parameter measurements explained here constitute a good
method to reproduce the on-state capacitance features of a
switching device.
The vertical lines in the experimental data in Fig.12 are (c)
likely to be caused by resonance between device capacitance Fig. 12. Cgd and Cgs as a function of input signal frequency. The red broken
and inductance of the wiring in the test fixture. We believe lines are the experimental curves, and the blue solid lines are the simulated
ones. Vds = 3 V. (a) The model expression of Cgd in Fig. 10 is used to draw the
they have nothing to do with the characteristics of the device simulation curves. (b) The model expression of Cgs in Fig. 10 is used to draw
and neglected them. the simulation curves. (c) The model of Cgd optimized to fit the on-state
experimental data is used to draw the simulation curves.

V. MODELING TEST FIXTURE


The test fixture drawn in Fig. 13 (a) shows parts of the
switching measurement circuit depicted in Fig. 2. The
parasitic components in the circuit modify the switching
waveforms. Thus, the simulation to predict the switching
waveforms must appropriately include the parasitic
components of the measurement system. The parasitic
components are usually measured using an LCR meter or
calculated using an electromagnetic simulator, and expressed
as lumped-parameter elements. However, construction of the
lumped-parameter equivalent circuit by considering all
parasitic components in the measurement system is tedious
and time consuming.
Therefore, we modeled the entire test fixture, as shown in
(a) Fig. 13 (a), calculated its S-parameters with EMPro (Finite
Element Method), and imported these S-parameters into the
circuit simulator (ADS; Keysight Technologies, Inc.). A
circuit schematic for the simulation is shown in Fig. 13 (b).
The box of blue squares in the figure show the circuit
components that describe the S-parameters of the test fixture.
The SiC MOSFET model comprise a bare die model and an
equivalent circuit for the package.
After circuit simulation in the frequency domain was
completed, S-parameters were converted to the time domain

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via a convolution integral method included with ADS. Thus, the figures, the employed device model (model A) is
the S-parameters were analyzed as a circuit component, and optimized using the off-state capacitance properties shown in
parasitic components of the test fixture were considered in Fig. 10 and the Id–Vds properties obtained using the CT shown
the simulation of the clamped inductive load switching as dotted blue lines in Fig. 9, ignoring the data shown in Figs.
circuit shown in Fig. 2. 9 (b) and 12 (c). This means that the device model used in Fig.
Finally, to simulate the switching behavior of the SiC 14 do not follow the on-state capacitance characteristics and
MOSFET, we combined all models in ADS: the intrinsic the Id–Vds curves in the HVHC range. Consequently, this
device model extracted above, test fixture model, and SPICE device model does not present the time lags and the rise and
models of the passive circuit components. fall times; in addition, it does not show sufficiently the
ringing of the waveforms.
Next, we use the device model (model B), which
reproduces the static Id–Vds characteristics shown as blue
solid lines in Fig. 9, but follows only the off-state C–V
characteristics in Fig. 10. The results are shown in Fig. 15.
This model successfully improves the turn-on time lags, Vds
decreasing gradient, and Id increasing and decreasing
gradients in comparison with the first device model described
above. However, the turn-off time lags of the waveforms of Id
and Vds, which are about 40 ns, remain. Because the turn-off
170mm time depends on the discharge time of Ciss and the MOSFET
50mm is active (in the on-state) before the turn-off period, the
turn-off time depends on the Ciss of device when it is on. Thus,
(a)
we hypothesize that this mismatch is caused by the
Power Supply
Film Capacitor insufficient modeling of the on-state Ciss characteristics. Ciss
Gate Driver
is expressed as follows.
𝐶iss = 𝐶gs + 𝐶gd (21)
We considered that the Cgd and/or Cgs of the on-state device
Test Fixture
might be different from the Cgd and/or Cgs of the off-state
Load Inductor device measured by the C–V meter [14]. Unfortunately,
High Side
because we cannot measure the capacitance of the on-state of
Diode
the device by using a conventional C–V meter, we measured
the S-parameters of the SiC MOSFET and derived the Cgd of
the on-state device from the S-parameters by using a π–
equivalent circuit topology. From this analysis, as for Cgs, we
confirm that the modeled on-state Cgs was matched to the
measured on-state Cgs, as shown in Fig. 12 (b). Conversely,
Low Side SiC DMOS with Package we found that the modeled Cgd did not match the
(b) measurement data, as shown in Fig.12 (a). Herein, two
Fig. 13. (a) CAD model of the switching measurement circuit shown in Fig. methods are available to match the modeled Cgd to the
2. (b) Schematic for the clamped-inductive-load-switching circuit simulated measured Cgd. While one method is changing the model
via ADS.
parameters, the other is changing the model equations.
Because the simulated off-state capacitances were already
VI. MODEL VALIDATION
matched very well to the measured ones, as shown in Fig. 10,
A. Measurement vs simulation we modified the Cgd model equation without changing any
In this section, we validate SiC MOSFET model made by model parameters. However, because the Qgd equations (13)
this characterization technique. The validation was carried and (15) were already rather complex, we modified an
out clumped inductive load switching circuit in Fig. 2. existing variable in the Qgd equations (13) and (15). In
Figs. 14–16 show the experimental results obtained under concrete terms, we changed Vds to Vds−Vgs = Vdg in equations
the operating conditions of Vds = 600 V, Id = 20 A, Rg = 5.6 Ω, (14) and (16). Because Vdg = Vds in the off-state (Vgs = 0 V),
and L = 500 µH, as well as their simulated counterparts. The the off-state parameters did not need to be changed.
measurement circuit is a double pulse tester, as shown in Fig. Finally, we use the device model C that considers the
3. The switching waveform was obtained using an on-state capacitance shown in Fig. 12 (c), and the results are
oscilloscope (DL7480; YOKOGAWA). Vgs, Vds, and Id were summarized in Fig. 16. The turn-off time lags in the
measured using differential probes (701921 and 700924; waveforms of Id and Vds disappear. This shows that the
YOKOGAWA) and a current probe (model 2877; Pearson) on-state capacitance properties of the device significantly
connected to the test fixture in Fig. 13. affect the way in which the device transitions from the
In Figs. 14–16, (a) shows turn-on waveforms, and (b) on-state to the off-state. Furthermore, the change of g5(Vds) to
shows the turn-off counterparts. The broken lines denote the g5(Vdg) was sufficient to run out the turn-off time lags and
experimental data, and the solid lines show the simulated match the simulated capacitance-frequency curves to the
waveforms. measured ones under 10 MHz in Fig. 12 (b) and (c).
Furthermore, in this section, we describe the development
of our device model step-by-step. First, we summarize the
results in the simplest simulation configuration in Fig. 14. In

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(a) (b)
Fig. 14. Switching transient experimental and simulated waveforms of Vgs, Vds, and Id. The device model optimized using the Id–Vds and off-state C–V
properties was employed to obtain the simulation results. (a) Turn-on waveforms, (b) Turn-off waveforms.

(a) (b)
Fig. 15. Switching transient experimental and simulated waveforms of Vgs, Vds, and Id. The device model optimized using the Id–Vds characteristics shown in
Fig. 9 and the off-state C–V properties were employed to obtain the simulation results. (a) Turn-on waveforms, (b) Turn-off waveforms.

(a) (b)
Fig. 16. Switching transient experimental and simulated waveforms of Vgs, Vds, and Id. The device model optimized using the Id–Vds characteristics shown in
Fig. 9 and the off- and on-state C–V properties shown in Fig. 10 and 12 was employed to obtain the simulation results. (a) Turn-on waveforms, (b) Turn-off
waveforms.

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B. Comparison with conventional SPICE model


To further demonstrate the advances facilitated by the
proposed measurement and modeling techniques, we compare
the new model with the conventional SPICE model, that is, the
equation-based model published on the ROHM website [17].
Fig. 14 shows only the switching waveforms when the
device operates at Vds = 600 V, Id = 20 A, and Rg = 5.6 Ω, but the
model can also predict the switching behavior in other voltage
and current ranges. Here we verify that our model can
reproduce measurement waveforms in the operating ranges of
Vds = 200–600 V, Id = 10–40 A, and Rg = 0–20 Ω.
In addition, we use the relative RMS error to validate
quantitatively the capability and general versatility of the
model.
The RMS error used herein is given as follows:
Fig. 17. (a) RMS errors as a function of Vds
∑𝑁
𝑖=1|𝑚𝑖 − 𝑠𝑖 |
2
𝑅𝑒𝑙𝑎𝑡𝑖𝑣𝑒 𝑅𝑀𝑆 𝐸𝑟𝑟𝑜𝑟 = √ 𝑁 × 100 [%] (22)
∑𝑖=1|𝑚𝑖 | 2

where i, mi, si, and N denote the number of data, measured and
simulated values (Id, Vds, and Vgs) at the i-th data point, and total
number of data points, respectively. The time domain
calculation is defined by the switching cycle, which starts 25 ns
before Vgs starts to fall or rise and ends 25 ns after Id reaches
zero or is saturated.
Figs. 17 (a), (b), and (c) show the RMS errors as a function of
Vds, Id, and Rg, respectively. In each graph, the green squares,
red diamonds, and blue triangles indicate the RMS errors in Vds,
Id, and Vgs, respectively. The unaltered experimental settings
are also shown in the same figures. The solid lines denote the
results obtained using our device model, and the broken lines
denote the results obtained using the conventional SPICE
model.
In Fig. 17, the RMS errors obtained using the presently
Fig. 17. (b) RMS errors as a function of Id
developed device model show a rather flat dependence on Vds,
Id, and Rg, which means these device models show the same
accuracy as that of the model shown in Fig. 16, even over a
wide operation range. Furthermore, in all tested cases, the RMS
errors obtained using the presently developed device model is
smaller than the ones obtained using the conventional SPICE
models. Consequently, our model can successfully predict
voltage and current waveforms under various practical power
electronics circuit operating conditions.

Fig. 17. (c) RMS errors as a function of Rg.


Fig. 17. RMS errors defined by Eq. (22) are shown as functions of Vds, Id, and Rg
in sub-panels (a), (b), and (c), respectively. The common experimental settings
for each case are described at the top right corners of the graph panels. The solid
lines denote the RMS errors obtained using the proposed device model,
whereas the broken lines denote the results obtained using the conventional
SPICE device model.

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Transactions on Power Electronics

VII. CONCLUSION
In this paper, we introduced novel measurement methods to [6] N. Bondarenko, L. Zhai, B. Xu, G. Li, T. Makharashvili, D.
characterize SiC MOSFET devices and new modeling Loken, P. Berger, T. P. Van Doren, and D. G. Beetner, “A
techniques to accurately reproduce their switching behavior. Measurement-Based Model of the Electromagnetic Emissions
The on-state transient waveforms were improved significantly from a Power Inverter,” IEEE Trans. Power Electron., vol. 30,
by using I–V data of HVHC range derived from switching No. 10, pp. 5522-5531, Oct. 2015.
waveforms of the SiC MOSFET, thereby preventing device
self-heating. The off-state time lag of the transient waveforms [7] J. S. Lai, X. Huang, E. Pepa, S. Chen, and T. W. Nehl,
was predicted accurately by measuring the capacitance “Inverter EMI modeling and simulation methodologies,”
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S-parameters of the device. EM simulations were used to 2006.
de-embed the bare die device model of the SiC MOSFET by
removing the parasitic components of the package and to [8] Z. Liu, X. Huang, F. C. Lee, and Q. Li, “Package Parasitic
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To demonstrate the validity and usefulness of the newly the High-Voltage Cascode GaN HEMT,” IEEE Trans. Power
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new measurement techniques. Rorsman and H. Zirath, “On the large-signal modeling of
The new model can predict switching waveforms of the SiC AlGaN/GaN HEMTs and SiC MESFETs,” Proc. European
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The authors are deeply grateful to Dr. Roberto Tinti and Dr. SLUP169, 2002.
David Root of Keysight Technologies, Inc. for their valuable
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This article has been accepted for publication in a future issue of this journal, but has not been fully edited. Content may change prior to final publication. Citation information: DOI 10.1109/TPEL.2017.2764632, IEEE
Transactions on Power Electronics

http://www.rohm.com/web/global/search/parametric/-/search/ Hiroaki Tanigawa received the B.S.


SiC%20MOSFET, Accessed Sep. 16, 2016. degree in electronics engineering from
Fukuoka University, Fukuoka, Japan, in
1997.
In 2001, he joined Keysight Technologies
Japan (formerly Agilent Technologies
Hiroyuki Sakairi was born in Tochigi, Japan) Tokyo, Japan, where he had a role
Japan, in 1982. He received the B.S as a semiconductor device modeling.
degree in applied physics from Tokyo He is currently a global services &
University of Science, Tokyo, Japan, in support engineer for Keysight Technologies’EEsof EDA
2007. He received the M.Eng. degree in organization and his current interests include electrical
material science from Nara Institute of characterization/modeling of III-Nitride devices and Power
Science and Technology, Nara, Japan, in Semiconductor devices.
2009.
He joined ROHM Co., Ltd., Kyoto, Japan, in 2009. From 2009
to 2012, he engaged in development of SiC power devices, and
since 2013, engaged in development of system application of
power device and modeling power device. Ken Nakahara (M’12) was born in Hyogo,
Japan, in 1972. He received the B.S
degree from Kyoto University, Kyoto,
Japan, in 1995. He received the Ph.D.
Tatsuya Yanagi (M’14) was born in Osaka, degree from Tohoku University, Sendai,
Japan, in 1985. He received the B. Eng and Japan, in 2010.
M. Eng degree from Kyoto University, He is the division manager of the Power
Kyoto, Japan, in 2010 and 2012, Application Development Division in
respectively. ROHM Co., Ltd., Kyoto, Japan. His current research focuses
He joined ROHM Co., Ltd., Kyoto, Japan, are power devices and their applications.
in 2012. His research focus is the behavior
of power devices, Si, SiC and GaN power
devices, in power converter circuit.

Hirotaka Otake was born in Chiba, Japan,


in 1981. He received the B. Eng. and M.
Eng. degrees from Waseda University,
Japan in 2004 and 2006, respectively.
He joined ROHM Co., Ltd., Kyoto, Japan.
in 2006. From 2006 to 2011, he engaged in
development of GaN power devices, and
since 2011, engaged in development of
power modules and circuits using SiC devices.

Naotaka Kuroda received the B.E. and


M.E. degrees in electrical engineering
from Kyoto University, Kyoto, Japan, in
1985 and 1987, respectively.
In 1987, he joined the Central Research
Laboratories, NEC Corporation, Kawasaki,
Japan, where he was engaged in the
research and development of compound
semiconductor devices. Since 2011, he has
been with the research and development division, ROHM Co.,
Ltd., Kyoto, Japan. His current research interests include the
modeling of power devices and simulation for the
electro-thermal and EMC design.

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