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Abstract
The concept of third generation photovoltaics is to significantly increase device efficiencies whilst still using thin film processes and abundant
non-toxic materials. This can be achieved by circumventing the Shockley – Queisser limit for single band gap devices, using multiple energy
threshold approaches.
At the University of NSW, as part of our work on Third Generation devices, we are using the energy confinement of silicon based quantum dot
nanostructures to engineer wide band gap materials to be used as upper cell elements in Si based tandem cells. HRTEM data shows Si nanocrystal
formation in oxide and nitride matrixes with a controlled nanocrystal size, grown by layered reactive sputtering and layered PECVD. Photoluminescence
evidence for quantum confinement in the Si quantum dots in oxide agrees with the calculated increase in PL energy with reduction in dot size. Resistivity
measurements with temperature give tentative proof of conduction and we are investigating junction formation in these materials.
We are also using similar Si quantum dot structures in double barrier resonant tunneling structures for use in hot carrier solar cell contacts.
These must collect carriers over a limited energy range. Negative differential resistance has been observed in room temperature I – V on these
samples, a necessary proof of concept for selective energy filter contacts.
D 2006 Elsevier B.V. All rights reserved.
There are various challenges for implementation of the third Engineered band gap Engineered band gap Silicon cell
generation strategies mentioned above. We have identified upper cell middle cell
various mechanisms that can be utilised in nanostructures to Fig. 2. Si based tandem solar cell with one or two upper cells with wider
address these challenges. effective bandgaps made by varying the layer thickness in Si QD superlattices.
656 G. Conibeer et al. / Thin Solid Films 511 – 512 (2006) 654 – 662
a
9.0
8.0
7.0
Si Dot Size [nm]
6.0
5.0
4.0
Fig. 4. Cross-sectional TEM (a) HRTEM (b) images of Si QDs in oxide. (a) 3.0
shows the layered structure and (b) shows individual nanocrystals in which 2.0
crystal planes can be seen.
1.0
0.0
0 100 200 300 400
the dark areas is thought to be due to the fact that the planes
will only be apparent for orientations that happen to be closely Deposition Time [sec]
aligned to the substrate; with the electron beam also aligned to b
18
the substrate. A study of many such images has not revealed
Number of Quantum dots [a.u.]
1.00E+04 0.030
Resistivity (Ω.cm)
0.025
0.020
0.010
resistivity
0.005
Eact
1.00E+02 0.000
2.00 4.00 6.00 8.00 10.00 12.00 14.00
1000/T (1/K)
Fig. 7. Electrical resistivity and corresponding thermal activation energy of silicon QD superlattice layers in the lateral direction for a standard sample after
hydrogenation.
where k is Boltzmann’s constant, q is resistivity and subscript heavily dependent on the height of this barrier. Si3N4 and SiC
g indicates q at a reference temperature, T g. give lower barriers than SiO2 allowing larger dot spacing for a
E act extracted from the slope of the plot in Fig. 7, is given tunnelling current.
approximately 17 meV between room temperature and 120 K The barrier to tunnelling between quantum dots is reduced
and approx. 10 meV down to 90 K before rising again around for a lower barrier height material, because that tunnelling
80 K. This is indicative of a change of mechanism at lower probability is given by, e.g. [23] p. 244:
temperatures. However these are low activation energies and it ( rffiffiffiffiffiffiffiffiffi )
is too soon to determine the mechanisms involved [21]. Further 8m4 1=2
Te ¼ 16 exp DE I d
studies, using this technique, of material prepared in different h/ 2
ways is providing information on conduction mechanisms and
their dependence on preparation conditions. The resultant data where m* is the bulk effective mass in the respective band of
on parameters such as thermal activation energies will enable the matrix, d is the spacing between dots and DE is the energy
identification of the dominant transport mechanisms. difference between this bulk band and the band formed by
quantum dot interaction (DE = E c E n). Hence the important
4.4. Alternative matrixes for Si quantum dots parameter in determining the degree of interaction between
quantum dots is m*DEId 2. As barrier height decreases the
Transport properties are expected to depend on the matrix in barrier thickness for a given probability increases, thus
which the silicon quantum dots are embedded. As shown in requiring lower dot density for a given conductivity or higher
Fig. 8, different matrixes produce different transport barriers conductivity for a given dot density. (In addition as dot size
between the Si dot and the matrix, with tunnelling probability decreases DE also decreases, thus increasing Te and enhancing
the effect further for smaller quantum dots.) [24]
Hence, transport between dots can be significantly increased
SiO2 as the barrier height decreases with alternative matrixes. The
spacing of dots would have to be closest in the oxide, nitride
Si3 N 4 and carbide, in that order. Similar deposition and quantum dot
SiC 3.2 eV
precipitation approaches should work for all.
1.9 eV
0.5 eV
4.5. Si quantum dots in a nitride matrix
c-Si 1.1 eV c-Si 1.1 eV c-Si 1.1 eV
For the above reason we have explored application of
0.9 eV similar techniques to those described in Section 4 for SiO2, to
2.3 eV the growth of Si nanocrystals in silicon nitride by both
4.7 eV
sputtering and PECVD [25]. For sputtering, growth parameters
are very similar to the oxide but with growth from a Si and
Si3N4 target rather than from an oxide one. Results from
Fig. 8. Bulk band alignments between crystalline silicon and its carbide, nitride HRTEM are very promising (see Fig. 9), which shows
and oxide. crystalline nanocrystals in the nitride matrix.
660 G. Conibeer et al. / Thin Solid Films 511 – 512 (2006) 654 – 662
Fig. 10. PECVD Si nanocrystals in silicon nitride: HRTEM showing crystal Fig. 11. (a) Device structure with single layer of Si quantum dots sandwiched
structure in nano-crystals. by SiO2; (b) HRTEM of the structure showing the Si quantum dot layer.
G. Conibeer et al. / Thin Solid Films 511 – 512 (2006) 654 – 662 661
Current density (A/m2) of the total energy filtering required; however, it is a necessary
0.8 pre-requisite for total energy filtering. Nonetheless, together
with the evidence for quantum dot formation in the structure
0.7 shown in Fig. 11b, this represents a very encouraging proof of
concept of energy filtering.
0.6 Further work is now underway on similar structures,
refining the technique to investigate local I –V curves on the
0.5 scale of a few Si quantum dots, with the intention of improving
the quality factor of the resonant peak.
0.4 In addition, modelling of the 1D resonant tunnelling has
Two different
sites on the wafer been carried out with a model developed for perturbations in
0.3 the position of a defect in an oxide barrier [10]. The theory is
being extended to a 2D model.
0.2
0.1 6. Conclusions
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Imperial College Press, London, 2001. Proc. 19th European Photovoltaic Solar Energy Conference, June 2004,
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