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Thin Solid Films 511 – 512 (2006) 654 – 662

www.elsevier.com/locate/tsf

Silicon nanostructures for third generation photovoltaic solar cells


Gavin Conibeer a,*, Martin Green a, Richard Corkish a, Young Cho a, Eun-Chel Cho b,
Chu-Wei Jiang a, Thipwan Fangsuwannarak a, Edwin Pink a, Yidan Huang a, Tom Puzzer a,
Thorsten Trupke a, Bryce Richards c, Avi Shalav a, Kuo-lung Lin d
a
Centre of Excellence for Advanced Silicon Photovoltaics and Photonics, University of New South Wales, UNSW Sydney, NSW 2052, Australia
b
Corporate R&D Center Samsung SDI Co., Ltd. 428-5 Gong-se-ri, Giheung-eup, Youngin-Si, Gyeonggi-do 449-577, Korea
c
Centre for Sustainable Energy Systems, Australian National University, Canberra, ACT 0200, Australia
d
Origin Energy, Adelaide, SA, Australia
Available online 20 January 2006

Abstract

The concept of third generation photovoltaics is to significantly increase device efficiencies whilst still using thin film processes and abundant
non-toxic materials. This can be achieved by circumventing the Shockley – Queisser limit for single band gap devices, using multiple energy
threshold approaches.
At the University of NSW, as part of our work on Third Generation devices, we are using the energy confinement of silicon based quantum dot
nanostructures to engineer wide band gap materials to be used as upper cell elements in Si based tandem cells. HRTEM data shows Si nanocrystal
formation in oxide and nitride matrixes with a controlled nanocrystal size, grown by layered reactive sputtering and layered PECVD. Photoluminescence
evidence for quantum confinement in the Si quantum dots in oxide agrees with the calculated increase in PL energy with reduction in dot size. Resistivity
measurements with temperature give tentative proof of conduction and we are investigating junction formation in these materials.
We are also using similar Si quantum dot structures in double barrier resonant tunneling structures for use in hot carrier solar cell contacts.
These must collect carriers over a limited energy range. Negative differential resistance has been observed in room temperature I – V on these
samples, a necessary proof of concept for selective energy filter contacts.
D 2006 Elsevier B.V. All rights reserved.

Keywords: Nanostructure; Photovoltaic; Third generation

1. Introduction implementation of photovoltaics. The twin effects of increased


efficiency and low cost thin film processes has the potential to
In parallel with the current boom in first generation wafer reduce costs per peak Watt of generating capacity very
based photovoltaic technologies and the rise of second significantly, perhaps by more than a factor of 10 to less than
generation thin film approaches that have the potential to 0.20/Wp [1].
reduce material and deposition costs, research is proceeding To achieve such efficiency improvements the Shockley–
on future technologies. These approaches, termed ‘‘third Queisser limit for single band gap materials must be
generation,’’ aim to reduce the cost (per Watt peak) of ‘‘thin circumvented. This requires multiple energy threshold devices
film’’ second generation technologies by increasing the such as the tandem or multi-colour solar cell. We are
efficiency of the photovoltaic devices with only a small investigating a number of approaches based on nanostructures
increase in areal costs [1]. Also, in common with the silicon to achieve such multiple energy threshold devices [1,2].
based second generation thin film technologies, these will use
abundant and non-toxic materials. Thus, these ‘‘third gener- 2. Third generation approaches
ation’’ technologies will be compatible with large scale
The two most important power loss mechanisms in single-
bandgap cells are the inability to absorb photons with energy
* Corresponding author. Tel.: +61 2 93857858; fax: +61 2 93855412. less than the bandgap (1 in Fig. 1), and thermalisation of
E-mail address: g.conibeer@unsw.edu.au (G. Conibeer). photon energy exceeding the bandgap, (2 in Fig. 1). There have
0040-6090/$ - see front matter D 2006 Elsevier B.V. All rights reserved.
doi:10.1016/j.tsf.2005.12.119
G. Conibeer et al. / Thin Solid Films 511 – 512 (2006) 654 – 662 655

Energy 3.1. Silicon based tandem cells


2

3 Tandem cells are stacks of individual cells with different


energy thresholds each absorbing a different band of the solar
4
5 spectrum, usually connected together in series. We aim to
engineer a new silicon-based material to form a top cell above a
qV silicon cell, see Fig. 2.
5 The main challenge for a nanostructure engineered material
4
1 for a tandem cell is to achieve sufficient carrier mobility and
2
hence a reasonable conductivity. For a nanostructure this
Fig. 1. Loss processes in a standard solar cell: (1) non-absorption of below band generally requires formation of a true superlattice with overlap
gap photons; (2) lattice thermalisation loss; (3) and (4) junction and contact of the wavefunction for adjacent quantum wells or quantum
voltage losses; (5) recombination loss. dots; which in turn requires either close spacing between QWs
or QDs or low barrier height.
Another requirement for a tandem cell element is the
been proposed three families of approaches for tackling them presence of some form of junction for carrier separation. This
[2]: (a) increasing the number of bandgaps; (b) capturing can either be a grown or diffused p – n junction or a p –i– n
carriers before thermalisation; and (c) multiple carrier pair junction with the superlattice as the i-region. The latter requires
generation per high energy photon or single carrier pair careful control of the workfunctions (and therefore doping) of
generation with multiple low energy photons. Of these, tandem the p and n-regions but also means that it is not essential for the
cells, an implementation of strategy (a), are the only ones superlattice itself to be doped.
which have been realised with efficiencies exceeding the
Shockley –Queisser limit. 3.2. Hot carrier cells
There are several nanostructured cell proposals that aim at
higher efficiency than is possible using a single p– n junction. The concept underlying the hot carrier solar cell is to slow
Among these ideas are quantum well [3], and quantum dot the rate of photoexcited carrier cooling, caused by phonon
solar cells and impurity band cells relying on interpenetrating interaction in the lattice, to allow time for the carriers to be
networks of quantum dots [4], all of which use strategy (a). collected whilst they are still at elevated energies (‘‘hot’’), and
However in addition to the more efficient utilization of above thus allowing higher voltages to be achieved from the cell [6].
and below band gap photons the Third Generation Strand of the It thus tackles the major PV loss mechanism of thermalisation
Centre of Excellence at UNSW aims at approaches that also use of carriers (loss (2) in Fig. 1 and strategy (b) in Section 2).
abundant, non-toxic materials (such as silicon) and processes Such slowing of carrier cooling only occurs at very high
that are amenable to large scale production (i.e. thin film intensities in bulk semiconductors — for example equivalent to
processes). 250 to 2500 suns in reference [7]. However, the reduced
We aim to implement strategy (a) by fabricating a tandem dimensionality in nanostructures offers a promising route for
cell based on silicon and its oxides and nitrides using reduced such a role as they restrict the number of acoustic phonon
dimension silicon nanostructures to engineer the band gap of modes available because of the Brillouin zone folding that
an upper cell material. We are also tackling strategy (b) by occurs as a result of the periodicity of the superlattice. Slowed
investigating the ‘‘Hot Carrier solar cell’’ in which carrier carrier cooling in QW superlattices has been demonstrated
cooling is slowed such that carriers can be extracted before experimentally [7,8] and is described as an enhancement of the
thermalisation. This requires both an absorber with slowed phonon bottleneck effect. Some of the current authors describe
carrier cooling properties and collection of carriers over a the likelihood of an increased effect in QD superlattices in [9].
limited range of energies, such that cold carriers in the external However, this work is principally theoretical at present and is
contacts do not cool the hot carriers to be extracted. Finally we unlikely to involve Si based nanostructures for some time,
are investigating implementation of strategy (c) either by hence it is not considered further here.
down-conversion in a layer on the front of the cell or by
application of an up-converter to the rear of a Si cell. Rare earth Wide bandgap material Silicon quantum dots
doped phosphors in the up-converter absorb below band gap (SiO2, Si3N4 or SiC)

photons and up-convert two or more to above band gap


photons which are then incident on the Si cell [5].

3. Implementation of third generation strategies

There are various challenges for implementation of the third Engineered band gap Engineered band gap Silicon cell
generation strategies mentioned above. We have identified upper cell middle cell

various mechanisms that can be utilised in nanostructures to Fig. 2. Si based tandem solar cell with one or two upper cells with wider
address these challenges. effective bandgaps made by varying the layer thickness in Si QD superlattices.
656 G. Conibeer et al. / Thin Solid Films 511 – 512 (2006) 654 – 662

Selective energy contacts


Research of efficient down-conversion mechanisms is less
advanced to date, however it is conceptually easy to imagine
the inclusion of a down-converting luminescent species within
the solar cell antireflection coating [1]. Silicon nanostructures
in the form of porous silicon, have however been used for
‘‘down shifting’’ or ‘‘photon cutting’’ [15]. So far, in such
devices an incident photon is shifted in energy to a longer
wavelength with the excess energy lost non-radiatively. This
can have the advantage of tailoring the spectrum for the
Electron contact Hot carrier Hole contact
particular absorptance with wavelength of a given semicon-
ductor but does not circumvent the Shockley– Queisser limit
TA TH TA
δE and is therefore not strictly third generation. Attempts are
-
e selective underway [15] to make the energy cutting a radiative transition
energy contact Es
Ef(n) Hot carrier
and hence true down conversion but as yet this has not been
distribution achieved.
Hence, as neither up- nor true down-conversion approaches
Δμ A = qV Ef
at present use silicon nanostructures, these will not be
small Eg
discussed further in this paper.

Ef(p) 4. Silicon quantum dot nanostructures


Es h+ selective
energy contact
The concept is to engineer the band structure of silicon
Fig. 3. Schematic and band diagram of an ideal hot carrier cell. The absorber based materials either for application as wide band gap
has a hot carrier distribution at temp T H. Carriers cool isoentropically in the materials in a silicon based tandem cell (see Section 3.1) or
mono-energetic contacts to TA. The difference of the Fermi levels of these two
contacts manifests as a difference in chemical potential of the carriers at each
for hot carrier cells (see Section 3.2). The engineering takes the
contact and hence an external voltage, V. form of fabrication of silicon nanocrystals embedded in either a
SiO2 or Si3N4 matrix. Nanocrystals less than 7 nm in diameter
behave as quantum dots exhibiting quantum confinement. With
For the hot carrier cell to be effective ‘‘hot’’ carriers, as such Si quantum dots spaced sufficiently close together,
described above, must be collected from the absorber over a overlap of the wavefuctions of quantum confined carriers in
very small energy range with selective energy contacts. This is adjacent dots can allow the formation of a true superlattice with
so that only a small amount of their excess energy above the the confined states smearing out to form a mini-band. For
band edge is lost in cooling to the contact temperature. In sufficiently broad mini-bands this effectively results in a new
thermodynamic terms, the carriers are thus collected with a semiconductor material with a wider band gap than Si. This in
very small increase in entropy. Ideally this collection would be turn can be used to fabricate wide band gap p– n or p– i– n
isoentropic using mono-energetic contacts, see Fig. 3. junction solar cells that can be used as tandem cell elements on
A quantum dot approach offers potential for such contacts top of normal Si cells, thus creating an ‘‘all-Si’’ tandem cell
via a double barrier resonant tunneling structure with quantum with voltage boosted from that of a normal Si cell.
dots providing a discrete energy level between two insulating As reported elsewhere [16,17] such Si quantum dots have
barriers. This will give conduction strongly peaked at the been fabricated by co-sputtering deposition of silicon rich
discrete energy level [10]. Experimental work is focused on layers interspersed with stoichiometric SiO2 layers (an appli-
devices that demonstrate such resonant tunneling effects cation of the method of Zacharias et al. [18] to photovoltaics).
without requiring sophisticated epitaxial structures [11,12]. On annealing at 1100 -C silicon precipitates from the super-
saturated solid solution to form nanocrystals. For layers of
3.3. Up- and down-conversion thickness less than about 4 nm, the precipitation enters a
regime of 2D diffusion in which the dot size is accurately
We are also interested in nanostrutures for up-conversion of controlled by the layer thickness.
sub-band gap light normally not absorbed in a PV cell. Recent
work has shown a significant proof of concept for up- 4.1. Physical characterisation
conversion using Er3+ atoms dispersed in a phosphor matrix,
via an energy transfer mechanism. Peak external quantum Direct physical evidence of the crystallinity of these
efficiencies of over 2.5% have been achieved at a wavelength nanocrystals has been obtained from high resolution TEM
of 1523 nm [13]. This has been demonstrated to give a (see Fig. 4a and b), using an electron beam up to 300 keV [16].
corresponding increase in the spectral response in the 1480 – Crystal planes are apparent in many of the darker areas in these
1580 nm wavelength range for a bi-facial Si solar cell [14]. HRTEM images. The darker areas are denser material in a less
Techniques are being investigated to extend this increase to a dense matrix, which are attributed to silicon nanocrystals in a
wider range of absorption wavelengths. SiO2 matrix. The fact that crystal planes are not seen in all of
G. Conibeer et al. / Thin Solid Films 511 – 512 (2006) 654 – 662 657

Secondary ion mass spectrometry data have also been


obtained for several of the Si nanostructure samples, which
confirm changes in Si and O concentration on the scale of
down to 2 nm in the growth direction.

4.2. Optical measurements

PL results indicate quantum confined properties as


evidenced by the increase in the photo-luminescent energy in
PL experiments; see Fig. 6.
Fig. 6a shows an increase in PL energy as nanocrystal size
decreases, thus demonstrating quantum confinement and hence
formation of quantum dots. It also shows a dramatic increase in
PL intensity on going from a dot diameter of 4.7 to 3.5 nm.
This correlates well with the greatly increased uniformity in
Si quantum dot size as the deposited layer goes from 4.7 to
3.5 nm, as shown in Fig. 5a on change of diffusion mechanism,
see above. The large increase in PL energy is due to the much
greater signal at a given energy with good dot size uniformity.
(The fact that this intensity drops again is discussed below.) An
increase in PL intensity is also to be expected as dot size

a
9.0

8.0

7.0
Si Dot Size [nm]

6.0

5.0

4.0

Fig. 4. Cross-sectional TEM (a) HRTEM (b) images of Si QDs in oxide. (a) 3.0
shows the layered structure and (b) shows individual nanocrystals in which 2.0
crystal planes can be seen.
1.0

0.0
0 100 200 300 400
the dark areas is thought to be due to the fact that the planes
will only be apparent for orientations that happen to be closely Deposition Time [sec]
aligned to the substrate; with the electron beam also aligned to b
18
the substrate. A study of many such images has not revealed
Number of Quantum dots [a.u.]

any alignment to the substrate within the cross-sectional plane 16

or any preferred orientation for the nanocrystals. Nor would 14


any such preferred orientation be expected, as the model of 12
nanocrystals precipitating from a super-saturated solution
10
should generate random orientation.
The data shown in Fig. 5 are measured from HRTEM 8
images for samples at several deposition times [16]. There is a 6
sharp decrease in the nanocrystal size distribution on reduction
4
in layer thickness from 4.7 to 3.5 nm. This indicates a transition
from a bulk diffusion mechanism of Si atoms during 2
precipitation to a constrained two dimensional diffusion 0
regime, such that the nanocrystal size is defined by the layer 2.5 3.5 4.5 5.5 6.5
thickness. This is an important self regulation effect which Diameter of Si quantum dots [nm]
gives much greater uniformity in nanocrystal opto-electronic Fig. 5. (a) Dependence of quantum dot size distribution on deposition time as
properties, at least in the growth direction, as indicated for measured by HRTEM (other sputtering parameters optimised). (b) QD size
photoluminescence (PL) in Fig. 6, below. distribution for deposition time of 280 s.
658 G. Conibeer et al. / Thin Solid Films 511 – 512 (2006) 654 – 662

a ideal bandgap for a 2-cell tandem on bulk silicon but 2 nm QDs


Si nanocrystal size [nm]
PL energy [eV] Integrated PL should be much easier to fabricate than the 1 nm quantum well
intensity [a.u.]
2.0 3.0 3.4 4.6 5.0 required for such a bang gap.
1.80 30000
Referring again to Fig. 6a, the fact that the PL intensity
1.70 25000 decreases again for nanocrystal sizes less than 3.5 nm requires
some discussion. One would expect an increase in PL intensity
1.60 20000 due to localisation as nanocrystal size decreases or for it to
remain constant. However, as the nanocrystal size decreases
1.50 15000
there is a reducing overall volume of crystalline Si, because the
1.40 10000 number of layers is the same in all the samples measured.
Hence, PL absorption and hence total emission also decreases.
1.30 5000 The data in Fig. 6b shows a normalisation for the volume
effect distorting the PL intensity data in Fig. 6a. It shows a
1.20 0
100 150 200 250 300 350 curve normalised to the Si volume for 2 nm dots. The result of
Deposition times [sec] this normalisation is a flatter curve but not one that is constant
b for data below 3.5 nm dot size, as would be expected. This
Photo-luminescence at 15K PL intensity
and normalised data
could be due to two additional effects:
Normalised to volume of 2nm QDs
PL intensity [a.u.]
1. There is an increasing surface area to volume ratio as the
nanocrystals shrink, which increases the chance of recom-
bination of photogenerated pairs at surface states, which
would require a further normalisation to surface area to
volume ratio. (Or more precisely to interfacial volume, i.e.
that containing defects.) However, at present there is an
insufficient number of data points to attempt such a
normalisation.
2. It is assumed that all excess Si in the Si rich oxide
2 2.5 3 3.5 4 4.5 5 5.5 6 precipitates to nanocrystals on annealing. This assumption
QD dia (nm) may become increasingly less valid as dot size decreases.
Fig. 6. (a) PL energy ? and integrated intensity n (15 K) as a function of The annealing time required for complete 2D precipitation is
deposition time, showing quantum confined energy in silicon quantum dots. likely to increase as layer thickness decreases and it is quite
Deposition time is also calibrated for dot diameter by TEM. (b) PL intensity possible that this is not yet long enough for small dots.
data normalised for decreasing volume.
4.3. Electrical measurements
decreases because of the increase in spatial localisation of
electrons and holes that will increase the probability of The small thicknesses relax the requirements on carrier-
recombination. mobility within the films. Carriers transfer between the dots by
The expected increase in PL energy with quantum confine- quantum-mechanical tunnelling, enhanced by resonance effects
ment as dot size decreases can in principle be estimated most that are strongest when dots have periodic spacing. Initial
simply using ‘‘effective mass’’ solutions for electrons confined results of the transport properties within these nanostructured-
in a quantum dot. However work on this is as yet at an early semiconductor materials using temperature-dependent conduc-
stage; the proportions of increases in confined energy level tivity measurements are shown in Fig. 7 [21].
with reducing nanocrystal size are well modelled but calcula- Fig. 7 shows data for a Si QD sample that has been annealed
tion of the actual values requires further development of the and has undergone hydrogenation in a hydrogen plasma.
theory. Other authors have found that other factors are required Before hydrogenation resistivity at room temperature is about
than the simple application of effective mass theory for silicon 105 V cm, after hydrogenation it decreases dramatically to
nanocrystals, such as the effect of oxygen double bonds at the about 200 V cm. This could be due to passivation of traps on
interface between nanocrystals and the matrix, e.g. [19]. the surface or in the bulk of the QDs or to an increase in the
Some of the current authors have demonstrated sufficient number of defects in the oxide allowing transport by hopping.
confinement in a Si quantum well in SiO2 of 1 nm width to More data is required to determine the mechanisms involved.
give a band edge of 1.7 eV (as measured by PL) [20]. For a Resistivity in both cases is seen to increase with decreasing
quantum dot the confinement is in 3D instead of just 1D, hence temperature, consistent with reducing thermal carrier concen-
the same confined energy level would be expected for a larger trations [21].
nanocrystal size. The data in Fig. 6a show that a level of 1.7 eV The activation energy (E act) for thermal activation of defects
is observed for a nanocrystal diameter of 2 nm — i.e. twice the is given by an Arrhenius relation, e.g. [22] p. 285:
width of that observed in the quantum well. This proportion is  m
supported by the effective mass theory. 1.7 eV is close to the qðT Þ=qc ¼ Tc =T expðEact =kT Þ
G. Conibeer et al. / Thin Solid Films 511 – 512 (2006) 654 – 662 659

1.00E+04 0.030
Resistivity (Ω.cm)

0.025

0.020

1.00E+03 0.015 Activation energy, Eact (eV)

0.010

resistivity
0.005

Eact
1.00E+02 0.000
2.00 4.00 6.00 8.00 10.00 12.00 14.00
1000/T (1/K)

Fig. 7. Electrical resistivity and corresponding thermal activation energy of silicon QD superlattice layers in the lateral direction for a standard sample after
hydrogenation.

where k is Boltzmann’s constant, q is resistivity and subscript heavily dependent on the height of this barrier. Si3N4 and SiC
g indicates q at a reference temperature, T g. give lower barriers than SiO2 allowing larger dot spacing for a
E act extracted from the slope of the plot in Fig. 7, is given tunnelling current.
approximately 17 meV between room temperature and 120 K The barrier to tunnelling between quantum dots is reduced
and approx. 10 meV down to 90 K before rising again around for a lower barrier height material, because that tunnelling
80 K. This is indicative of a change of mechanism at lower probability is given by, e.g. [23] p. 244:
temperatures. However these are low activation energies and it ( rffiffiffiffiffiffiffiffiffi )
is too soon to determine the mechanisms involved [21]. Further 8m4 1=2
Te ¼ 16 exp  DE I d
studies, using this technique, of material prepared in different h/ 2
ways is providing information on conduction mechanisms and
their dependence on preparation conditions. The resultant data where m* is the bulk effective mass in the respective band of
on parameters such as thermal activation energies will enable the matrix, d is the spacing between dots and DE is the energy
identification of the dominant transport mechanisms. difference between this bulk band and the band formed by
quantum dot interaction (DE = E c  E n). Hence the important
4.4. Alternative matrixes for Si quantum dots parameter in determining the degree of interaction between
quantum dots is m*DEId 2. As barrier height decreases the
Transport properties are expected to depend on the matrix in barrier thickness for a given probability increases, thus
which the silicon quantum dots are embedded. As shown in requiring lower dot density for a given conductivity or higher
Fig. 8, different matrixes produce different transport barriers conductivity for a given dot density. (In addition as dot size
between the Si dot and the matrix, with tunnelling probability decreases DE also decreases, thus increasing Te and enhancing
the effect further for smaller quantum dots.) [24]
Hence, transport between dots can be significantly increased
SiO2 as the barrier height decreases with alternative matrixes. The
spacing of dots would have to be closest in the oxide, nitride
Si3 N 4 and carbide, in that order. Similar deposition and quantum dot
SiC 3.2 eV
precipitation approaches should work for all.
1.9 eV
0.5 eV
4.5. Si quantum dots in a nitride matrix
c-Si 1.1 eV c-Si 1.1 eV c-Si 1.1 eV
For the above reason we have explored application of
0.9 eV similar techniques to those described in Section 4 for SiO2, to
2.3 eV the growth of Si nanocrystals in silicon nitride by both
4.7 eV
sputtering and PECVD [25]. For sputtering, growth parameters
are very similar to the oxide but with growth from a Si and
Si3N4 target rather than from an oxide one. Results from
Fig. 8. Bulk band alignments between crystalline silicon and its carbide, nitride HRTEM are very promising (see Fig. 9), which shows
and oxide. crystalline nanocrystals in the nitride matrix.
660 G. Conibeer et al. / Thin Solid Films 511 – 512 (2006) 654 – 662

these nanocrystals are quantum dots is demonstrated by the PL


data of Fig. 6. Methods to decrease the currently high
annealing temperatures for Si QD formation are also under
investigation, so as to increase compatibility with standard
solar cell fabrication. Those data in Fig. 7 show tentative
progress towards reasonable conduction, with a significant
increase on passivation of defects by hydrogenation. These
being the first challenges for a Si nanostructure tandem cell.
We have also made some progress on the other requirement
for a tandem cell element, that of junction formation in Si
nanostructures, with implementation of a Si QD SL/Si
anisotype heterojunction [17]. V OC was low and current very
low from this device and in itself it is not useful as a device
because any carriers generated in the high band gap region will
Fig. 9. Sputtered Si nanocrystals in silicon nitride: HRTEM showing crystal lose energy down to the Si band edge in the Si region. However
structure in nano-crystals.
it is a useful proof of concept of junction formation.
The increased strength of optical processes in confined
In addition PECVD has been used for the growth of Si structures due to localisation of electrons and holes, is highly
nanocrystals in nitride with a similar regime of growing advantageous for solar cell structures, as it means that only
alternate Si rich and stoichiometric nitride layers. Annealing very thin layers of these dots are required for strong absorption.
is carried out again at 1100 -C but with a pre-anneal at 500 -C With an appropriate light-trapping scheme, thin films of
to drive off hydrogen incorporated from the PECVD process. unconfined Si of 1000 nm of Si give high solar absorption.
Again HRTEM images showing even clearer nanocrystals have Quantum dot devices of only 100 nm thickness seem feasible
been obtained; see Fig. 10 [25]. given the increased optical strength of the confined processes.
Further optical and electrical characterisation is underway
on these nitride materials. Other authors [26] have published 5.2. Hot carrier cell
data on Si QD in Si3N4 demonstrating crystallinity and
increased PL energy but not using the close control of QD As discussed in Section 3.2, Si nanostructures are applicable
size that we have employed using the layering method. to selective energy contacts but are as yet not being looked at
for hot carrier absorber materials.
5. Third generation application of Si nanostructures

As discussed in Section 3, silicon nanostructures are being


applied to Si based tandem cells and hot carrier cells.

5.1. Si based tandem cell

The data above show the significant progress made towards


formation of Si QD nanostructures and superlattices with
enhanced band gap (Figs. 4– 6 for oxide and Figs. 9 and 10 for
nitride), with good nanocrystal size control demonstrated. That

Fig. 10. PECVD Si nanocrystals in silicon nitride: HRTEM showing crystal Fig. 11. (a) Device structure with single layer of Si quantum dots sandwiched
structure in nano-crystals. by SiO2; (b) HRTEM of the structure showing the Si quantum dot layer.
G. Conibeer et al. / Thin Solid Films 511 – 512 (2006) 654 – 662 661

Current density (A/m2) of the total energy filtering required; however, it is a necessary
0.8 pre-requisite for total energy filtering. Nonetheless, together
with the evidence for quantum dot formation in the structure
0.7 shown in Fig. 11b, this represents a very encouraging proof of
concept of energy filtering.
0.6 Further work is now underway on similar structures,
refining the technique to investigate local I –V curves on the
0.5 scale of a few Si quantum dots, with the intention of improving
the quality factor of the resonant peak.
0.4 In addition, modelling of the 1D resonant tunnelling has
Two different
sites on the wafer been carried out with a model developed for perturbations in
0.3 the position of a defect in an oxide barrier [10]. The theory is
being extended to a 2D model.
0.2

0.1 6. Conclusions

0 Third generation photovoltaic devices aim to tackle the


0 0.25 0.5 0.75 1 1.25 1.5 1.75
losses associated with the non-absorption of below band gap
Gate Voltage (V) photons and the thermalisation of above band gap photons to
Fig. 12. I – V behaviour at 300 K of double barrier Si QD layer mesas, showing the band edge. We are using nanostructures for the three main
NDR for two different devices on one wafer. approaches that have been suggested: tandem cells, hot-carrier
cells and up-conversion. For the first two of these, we are
investigating silicon based nanostructures for a Si based
Double barrier resonant tunnelling contacts are being
tandem cell and selective energy contacts for a hot carrier cell.
investigated as selective energy contacts. Total energy filtering
We have also made progress towards up-conversion using Er
is required of a selective energy contact rather than 1D energy
based phosphor nanostructures and the theory of hot carrier
filtering. This is because the energy filtering in a quantum well
cooling but as these are not Si based nanostructures they are
resonant tunnelling device (1D) is only effective for carriers
not discussed here in detail.
with momenta entirely perpendicular to the plane of the well
For the Si based tandem, the formation of Si QDs in oxide
[11]. Carriers with components of momenta away from this
and nitride matrixes has been demonstrated, with good dot size
normal can be transmitted even if their total energy is outside
control and observed nano-crystallinity, using cross-sectional
the range of the energy filter. Hence work in the Centre is
high resolution TEM. For the oxide, quantum confinement has
focussed on resonant tunnelling structures using quantum dots
been demonstrated by photoluminescence, with PL energy
or other discrete total energy confined centres as the resonant
increasing as dot size decreases in agreement with effective
centres. These would give the required total energy filtering.
mass calculations. Initial resistivity measurements and early
Such a filter should exhibit negative differential resistance
attempts at junction formation are giving promising results.
(NDR) in all directions.
For the hot carrier cells a significant proof of concept has
A significant proof of concept has been achieved with
been achieved with double barrier Si QD resonant tunnelling
negative differential resistance observed at room temperature
structures, which have exhibited negative differential resistance
for a double barrier quantum dot structure [12]. The device
at room temperature, a necessary pre-requisite for selective
structure is based on our Si quantum dot technology discussed
energy contacts.
above in Section 4 and is shown in Fig. 11.
The device uses a degenerately doped wafer and highly
doped capping layer to provide the conducting contacts either Acknowledgments
side of the resonant structure. The layer of Si quantum dots and
oxide layers are grown by the reactive sputtering technique The Centre of Excellence for Advanced Silicon Photo-
discussed above in Section 4. 1 mm2 mesas were defined on voltaics and Photonics is supported by the Australian Research
the sample surface before contacts were applied. The room Council.
temperature I –V behaviour of two of these mesas is shown in We acknowledge work in the SIMS Facility of the
Fig. 12. Australian Nuclear Science and Technology Org. Lucas
Fig. 12 shows definite evidence for NDR in this structure at Heights, Sydney.
room temperature — a very encouraging result. The data are as
yet preliminary, only show limited repeatability and are not
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