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Fig. 1. Purely thermal noise formulation, such as the one in BSIM3 model, op-
I. INTRODUCTION timistically predicts the minimum noise figure NF of a 120-nm nMOSFET
measured at the University of Illinois at Urbana-Champaign.
(4)
(3)
(8)
NGUYEN AND FENG: DDN MODEL OF MOSFETs FOR MICROWAVE CIRCUIT DESIGN 3435
where is the built-in potential of the drain-to-substrate junc- where is the voltage drop across the resistance of the
tion, is accounted for surface potential at strong inversion in infinitesimal segment in Region I.
(5b), and is given by In Appendix A, we give the derivation of the noise fluctuation
at the drain terminal as a consequence of the thermal
(9) noise generated in Region I. The result is
B. Low-Field Enhanced Channel Noise at the Drain Terminal At the drain terminal, the total contribution of all noise
Generated by Fluctuation in Region I sources along the channel in Region I is therefore a straight
integration of (16) between the limits of and .
In this section, we evaluate the open-circuit noise voltage at The final result is
the drain due to voltage fluctuation of an infinitesimal seg-
ment within the channel of Region I. First of all, under the ap-
plied -field, carriers in the region gain energy and their effec-
tive temperature may increase above the ambient temperature
according to the relation [22]
(10)
(17)
where the hot electron temperature coefficient is an empir-
ical parameter. When the device is under strong inversion, the The drain noise model in (17) represents the “enhancement”
current is dominated by drift current. Using piece-wise ap- of thermal noise contributed by carriers in Region I through the
proximation of the carrier velocity as described by (2), the I–V “hot carrier” effect and the hyperbolic factor , which accounts
relation in Region I of the channel can be derived, as seen by for the noise-induced CLM.
[12]
C. High-Field Channel Noise at the Drain Terminal Generated
(11) by Drifting Dipoles in Region II
Under strong applied -field at the drain side, Region II is
clearly in a nonequilibrium condition. As stated earlier by (1),
At the end of Region I, where and , we obtain there should be a displacement noise current associated
with carriers drifting at due to their own rapid random mo-
(12) tion. At any position within the spatial interval , the noise
current consists of short impulses, uncorrelated from one
Since the current in the channel is continuous, from (11) and instant of time to the next. Comparing (1) to the shot noise ex-
(12) we can calculate the ratio and re-express (10) as a pression, at rate , the sequence of current
function of the quasi-Fermi potential impulses is clearly generated at the rate
(13) (18)
Although carriers in the channel become “hot” as the applied In addition, each of the current impulses displaces a charge
field increases, the average velocity of the carriers is still smaller across the interval , thus resulting in an electric dipole layer
than their thermal velocity. Hence, the equilibrium condition of charge density at and at . Since
still holds, and the voltage fluctuation can be modeled by the carriers in the saturation velocity region do not respond to
thermal noise with mean square value the applied -field, the resulting dipole layers are unable to re-
cover and drift unchanged to the drain terminal. In this section,
we directly apply Statz’s analytical treatment of high-field noise
(14) [10] to calculate the perturbation effect of the dipole potential
3436 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 58, NO. 12, DECEMBER 2010
difference on a MOSFET drain terminal under open-circuit con- Next, let the random process be the sum of all indepen-
ditions. As shown in Appendix B, the dipole potential difference dent events occurring at different time , then its spectral den-
at position can be approximated by sity is calculated using Carson’s rule as seen by
(24)
(21)
(27)
(22) where is considered the effective junction depth at which
most of the carriers are collected by the drain terminal.
where .
Since the noise contributions of Regions I and II are uncorre-
For , the dipole layers directly affect the drain voltage.
lated, the total open-circuit noise voltage at the drain is given by
However, their potential contribution get canceled by the corre-
sponding image dipole layers mirrored at plane .
Equation (22) represents one of the many dipole layers ran-
domly generated at the plane at different times . We (28)
obtain the spectral density of each of these potential differences
by applying Fourier transform Under short-circuit conditions, the voltage fluctuations are
transformed into the drain noise currents, as seen by
(29)
has a very wide spectrum, which exponentially decays to- III. INDUCED GATE NOISE MODELING
ward infinity. However, the operating frequency of a nanometer
MOSFET is much smaller than the inverse of the carrier transit A. Gate Noise Current Induced by Fluctuations in Region I
time through Region II, THz. In (23), we only In low-field Region I, any noise voltage caused by in-
evaluate in the limit of . finitesimal ohmic segments will produce fluctuation charges on
NGUYEN AND FENG: DDN MODEL OF MOSFETs FOR MICROWAVE CIRCUIT DESIGN 3437
(30) (38)
Then, from (16), (29), and (35), the mean square value of the
In (30), we use as a new lateral axis, and is the begin- fluctuation charge on the gate due to an infinitesimal noise
ning of Region I. Under short-circuit condition at the drain, the voltage in Region I can be expressed by
noise voltage also creates a fluctuation in the channel
current, as described by (29). In high-field Region II, the appear-
ance of the fluctuation current requires additional charges
to the channel current and, hence, induced charges on the gate
with opposite sign, as seen by
(31)
(39)
where is the transit time through Region II. The total induced
Integrating (39) over from to , we obtain the
fluctuation charge on the gate is, therefore,
total charge fluctuation on the gate
(32)
(36) (44)
3438 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 58, NO. 12, DECEMBER 2010
(45)
Inserting (26) into (45) and using (29), we then obtain its spec-
tral density
(46)
IV. CORRELATION COEFFICIENT OF DRAIN NOISE AND Finally, using (49) and (51), the correlation coefficient de-
INDUCED GATE NOISE CURRENTS IN MOSFETs fined by (47) can be calculated. Its value is purely imaginary
due to the fact that the gate noise and drain noise currents are
The drain noise and the induced gate noise have some coupling through the gate–oxide capacitor.
correlation since parts of them generated from the same noise
sources in the channel. Due to the independence of noise mech-
anisms in Regions I and II, the pair of noise currents V. EXPERIMENTAL RESULTS AND DISCUSSION
and are uncorrelated. Hence, the correlation of In this section, we verify the proposed DDN model with
and can be defined as [10] experimental data of the 120-nm MOSFET technology. An
ATN automated noise-figure measurement system is employed
(47) to carry out the high-frequency on-wafer measurements in the
range of 2–26 GHz at different biasing conditions. Collected
data, including noise parameters and
In Region I, the cross-correlation of noise sources is ex-
-parameters, are then de-embedded using “Open” and “Short”
pressed by
techniques to remove the effects of the probing pads and in-
terconnections [23], [24]. For nanometer MOSFETs that have
(48) small-signal models described in Fig. 3, the noise contributions
from extrinsic components such as drain/source terminal re-
sistances , gate electrode resistance , and bulk
Inserting (35) into (48), then using (16) and (29) to carry out the impedance become very important. Hence, to
integration, we obtain extract the noise sources accurately, we further de-embed the
measured data from extrinsic to intrinsic level using Engberg’s
approach [25]. Finally, we obtain the intrinsic drain noise
and induced gate noise based on the well-known correlation
matrix method [24].
The devices-under-test (DUTs) are n-channel MOSFETs that
(49) have the dimensions of m nm. The effective
channel length, oxide thickness, effective junction depth, and
where is given in Appendix D. In (49), we have also em- threshold voltage of the DUTs are determined to be
ployed the approximation given by (41) to simplify the integral nm, nm, nm, and V,
calculation. respectively. As mobile carriers in the DUTs are electrons, sat-
Similarly, in Region II, we can evaluate the cross-correlation uration velocity of 8 10 cm/s and low-field mobility
using (43). The result is of 360 cm Vs were used to achieve best fitting results in the
– characteristic. The selection of saturation velocity is
in agreement with published results in [26]. For noise simula-
(50)
tion, we have set the high-field diffusion coefficient and the hot
NGUYEN AND FENG: DDN MODEL OF MOSFETs FOR MICROWAVE CIRCUIT DESIGN 3439
electron temperature parameter to cm s and , Fig. 7 illustrates the measured versus modeled correlation co-
respectively. These values are within the range of the data re- efficient between drain noise and induced gate noise .
ported in [27] and [28]. Also plotted in Fig. 7 are the regional correlation coefficients
It is shown in Fig. 4 that the measured noise sources of the and of noise sources in Region I and Region II. Note that to
DUT, and , are in excellent agreement with their modeled keep the DUTs within normal operating condition as specified
results at V and V over the frequency by the process, no measured values of at high beyond
range of 2–26 GHz. Next, we investigate the dependences of 1.2 V are taken in our experiments. The coefficient of the
these noise sources on lateral electric field in the device channel. low-field region has a similar shape to the ones of long-channel
The achieved results, including the total noise as well as re- MOSFETs [29]. Meanwhile, the coefficient of the high-field
gional noise contributions, are illustrated in Figs. 5 and 6 at region contributes to form a more general pattern of the total cor-
GHz, the middle point of the measured frequency range. As relation . As increases, increases to reach its peak, and
the drain voltage increases for a fixed gate voltage , the then gradually reduces at high bias conditions. In addition, we
thermal noise in Region I starts to decrease while the high-field observe that noise sources in Region II are more correlated than
noise in Region II continues to increase to keep the total mea- the ones originated from Region I. The data shown in Fig. 8 is
sured noise sources unchanged or even increase slightly at cer- consistent with the results presented in [30] and [31].
tain biasing conditions. Furthermore, at high , we observe an For microwave circuit design purpose, we have incorporated
interesting feature that the DDN contributed by Region II actu- the DDN model with two noise sources— and —into the
ally becomes dominant over the thermal noise originated from large-signal model BSIM3 using a sub-circuit technique [32].
Region I. This fact confirms the noise contribution by the ve- The approach can be applied for any other compact model. As
locity saturation region plays a very important role in studying shown in Figs. 8 and 9, the DDN model well predicts the mea-
microwave noise behavior of nanometer MOSFETs. sured minimum noise figure of a 120-nm nMOSFET in
3440 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 58, NO. 12, DECEMBER 2010
Fig. 11. Measured versus DDN modeled optimum source reflection coefficient
Fig. 8. Measured versus DDN modeled minimum noise figure NF of an 0 of an nMOSFET as a function of frequency in the range of 2–26 GHz.
nMOSFET as a function of frequency in the range of 2–26 GHz.
Fig. 12. (a) Charge sheet on top of a ground plane. (b) Drifting dipole formed
in high-field Region II.
VI. CONCLUSION
Fig. 9. Measured versus DDN modeled minimum noise figure NF of an
nMOS with different gatewidths at different biasing conditions. A high-field noise model for nanometer MOSFETs that
predicts both drain noise and induced gate noise at microwave
frequency has been developed based on Statz’s drifting dipole
theory. The proposed DDN model accurately predicts high-fre-
quency noise data of devices in 120-nm CMOS technology
under various biasing conditions. We find that the high-field
noise generated by the velocity saturation region cannot be
neglected, but is very crucial in determining the high-frequency
noise behavior of nanometer MOSFETs. The analytical formu-
lations of the proposed DDN model make it easy to incorporate
into compact models to assist microwave circuit design.
APPENDIX A
In this appendix, we derive the open-circuit noise voltage at
the drain terminal due to thermal noise generated by
an infinitesimal section in Region I. Since the drain fluctuation
current is zero under the assumed open-circuit drain conditions,
Fig. 10. Measured versus DDN modeled equivalent noise resistance R of an taking the differentiation of in (11) and neglecting second-
nMOSFET as a function of frequency in the range of 2–26 GHz.
order terms, we then obtain
the frequency range of 2–26 GHz, as well as at different bias cur- (A.1)
rent levels. In addition, the impact of induced gate noise mod-
eling can be observed in Fig. 8 at very high frequency. Finally, or
the DDN modeled results of other noise parameters such as the
(A.2)
equivalent noise resistance and optimum source reflection
NGUYEN AND FENG: DDN MODEL OF MOSFETs FOR MICROWAVE CIRCUIT DESIGN 3441
Integrating (A.2) over the length of Region I, the noise voltage depletion width , and hence, the potential of
at the critical point due to is thus seen by the charge sheet now becomes
(A.3)
(A.5) (B.6)
where is a hyperbolic function shown by If we approximate the results to the lowest order term, and
consider the potential difference distribution for both cases
and , we finally obtain (19).
(A.6)
APPENDIX C
Under short-circuit drain condition, the appearance of any
The function is always larger than 1, thus thermal noise gen- noise voltage in Region I results in a drain current fluc-
erated by Region I is enhanced at the drain terminal. As ex- tuation . Applying the – relation given in (13), we can
pected, when . Substituting (A.3) into (A.5), write
we obtain (15).
APPENDIX B (C.1)
(B.1) (C.3)
The potential satisfies the following boundary condi-
tions: Substituting (C.3) into (C.1) and neglecting high-order terms
lead to the following differential equation:
(B.2)
(B.3) (C.4)
The first condition is satisfied by choosing the functions rep- The solution of (C.4) is (33), which satisfies the conditions
resenting , while the second condition can be solved for at , and at .
using Fourier expansion, as seen by The coefficient in (33) is employed to account for the fact
that if , then it is not necessary that
at the end of Region I. At , from (33), the potential
(B.4) discontinuity is given by
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and modeling,” in Proc. ESSDERC, Sep. 2000, pp. 331–334. 2003. He was the recipient of the prestigious 1997 IEEE David Sarnoff Award
[31] T. C. Lim, R. Valentin, G. Dambrine, and F. Danneville, “MOSFETs and the 2000 Outstanding Research Award of the Dr. Pan Wen Yuan Foundation
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Lett., vol. 29, no. 1, pp. 118–121, Jan. 2008.
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