Loading Procedure for Hitachi 4500

1) login the computer with your active directory passwd, this is to track the usage of the
machine, write you name to the logsheet.
2) Turn on the display toggle switch (up)

Sample loading
1) Mount your sample to sample holder and check height (make sure it is lower than
the standard height)
2) Check the computer monitor to make sure the stage is at exch (exchange position
X=25 Y=25, Z=15, R=T=0)

3) Press AIR button to vent the SEC (specimen exchange chamber)

4) After about 10 sec, open the load-lock door (Do Not use the loading stick to open
the door to avoid bending)
 5) Push the loading stick out a little bit and mount your sample holder to the loading
stick. (Do Not touch the loading stick to avoid removing the grease on it, Do Not
over tightens the holder to the rod.)
6) Pull back the loading stick all the way out to avoid it get suck in when start
pumping later.
7) Close the load-lock door (Do Not use the loading stick to close the door to avoid
bending)
8) Press green button EVAC to pump the load-lock
9) After SEC Vacuum reach high, lift the gate valve (MV1) handle.

10) After the gate valve open, push the loading stick in while looking at the window.
After the sample holder engaged to the stage, unscrew (turn counter-clockwise) the
loading stick and pull back the loading stick all the way out.
11) Close the gate valve by turning the gate valve handle clockwise.

Sample imaging

1. Make sure both SC and SEC are in High Vacuum and set S.C. Air Lock valve at Auto.
Ready light should be on

2. Turn on the high voltage button and write down the Extraction voltage to the logsheet.
3. Press PF1 to change the Vacc.
 4. Turn on the IR camera to see the sample holder
5. Press the green button for Low Mag to find the area you
need to look at
6. Go back to High Mag after locating the area.
7. Adjust “focus”, “astigmatism”, “brightness/contrast”,
“Mag”
8. To capture image, start PCI software
9. Click single capture
10. Press “Direct” button.

Sample unloading
1) Turn off High voltage from the computer

2) Close the SC airlock valve

3) Move the stage back to exch (exchange position)
4) Open the gate valve
5) Push the loading stick in. Turn clockwise to tighten the sample holder to the
loading stick, pull back the loading stick all the way out.
6) Close the gate valve.
7) Press AIR button to vent the load-lock (make sure the switch is at SEC).
8) After AIR button stop flashing (indicating vent complete), open the load-lock door
(Do Not use the loading stick to open the door to avoid bending)
9) Remove the sample holder from the loading stick
10) Close the load-lock door (Do Not use the loading stick to close the door to avoid
bending)
11) Press EVAC to pump the load-lock

Access SEM image over network

1. Right click “My computer”

2. Select “Map Network Drive”
3. Choose any unused Drive letter
4. Enter \\mntl-S4500.mntl.uiuc.edu\image for folder
5. when enter your login name, you may need to put uiuc\ before your username
6. uncheck Reconnect at logon
7. Click “Finish”