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  • Electronic Devices 05-08-2014: BITS Pilani, K K Birla Goa Campus

    Transféré par

    Jeswin Eldho
    12 vues23 pages
    This document summarizes key points about semiconductor materials and silicon wafers. It discusses how silicon replaced germanium as the most important semiconductor material due to its properties and abundance. The document also describes the crystal structure of silicon, including its unit cell and common crystal planes such as (100) and (111). It provides an overview of how silicon crystals are grown from metallurgical to electronic grade silicon and cut into wafers for integrated circuit fabrication.

    Description originale:

    Solid state electronic devices.

    Titre original

    Lecture2_05082014

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    This document summarizes key points about semiconductor materials and silicon wafers. It discusses how silicon replaced germanium as the most important semiconductor material due to its properties and abundance. The document also describes the crystal structure of silicon, including its unit cell and common crystal planes such as (100) and (111). It provides an overview of how silicon crystals are grown from metallurgical to electronic grade silicon and cut into wafers for integrated circuit fabrication.

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    © All Rights Reserved
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    12 vues23 pages

    Electronic Devices 05-08-2014: BITS Pilani, K K Birla Goa Campus

    Transféré par

    Jeswin Eldho
    This document summarizes key points about semiconductor materials and silicon wafers. It discusses how silicon replaced germanium as the most important semiconductor material due to its properties and abundance. The document also describes the crystal structure of silicon, including its unit cell and common crystal planes such as (100) and (111). It provides an overview of how silicon crystals are grown from metallurgical to electronic grade silicon and cut into wafers for integrated circuit fabrication.

    Droits d'auteur :

    © All Rights Reserved
    Téléchargez comme PDF, TXT ou lisez en ligne sur Scribd
    Signaler comme contenu inapproprié
    sur 23

    Electronic Devices

    Lecture 2
    05-08-2014

    BITS Pilani, K K Birla Goa Campus


    BITS Pilani, K K Birla Goa Campus
    Periodic Table

    BITS Pilani, K K Birla Goa Campus


    Semiconductor materials

    • If we look at the periodic table, the element


    semiconductors, such as silicon (Si) or germanium
    (Ge), can be found in column IV of the table.

    • In the early 1950s, Ge was the most important


    semiconductor material, but, since the early 1960s,
    Si has played a major role and virtually displaced
    Ge as the main material for semiconductor material

    BITS Pilani, K K Birla Goa Campus


    Semiconductor materials
    • The reasons of that are:
    – Better properties at room temperature
    – High-quality silicon dioxide (SiO2) can be
    grown thermally.
    – Si is second only to oxygen in great quantity.
    – Devices made from Si cost less than any other
    semiconductor material
    – Silicon technology is by far the most advanced
    among all semiconductor technologies.

    BITS Pilani, K K Birla Goa Campus


    Significance of Si

    1. Easily oxidized to form SiO2, a high quality electrical


    insulator

    2. Oxide layer provides an excellent barrier layer for the


    selective diffusion steps needed in integrated-circuit
    fabrication

    3. Abundant element in nature, providing the possibility of a


    low-cost starting material

    4. Wider bandgap than Ge and operate at higher


    temperature than Ge
    BITS Pilani, K K Birla Goa Campus
    BITS Pilani, K K Birla Goa Campus
    BITS Pilani, K K Birla Goa Campus
    Crystal structures

    BITS Pilani, K K Birla Goa Campus


    Unit cell

    BITS Pilani, K K Birla Goa Campus


    Cubic unit cell

    BITS Pilani, K K Birla Goa Campus


    FCC structure

    BITS Pilani, K K Birla Goa Campus


    Miller Indices

    BITS Pilani, K K Birla Goa Campus


    BITS Pilani, K K Birla Goa Campus
    BITS Pilani, K K Birla Goa Campus
    Crystallographic Notation

    Miller Indices Notation Interpretation


    (hkl) crystal plane
    {hkl} equivalent planes
    [hkl] crystal direction
    <hkl> equivalent directions
    h: inverse x-intercept of plane
    k: inverse y-intercept of plane
    l: inverse z-intercept of plane
    (h, k and l are reduced to 3 integers
    having the same ratio.)

    BITS Pilani, K K Birla Goa Campus


    Crystallographic Planes

    _
    (632) plane (001) plane (221) plane

    BITS Pilani, K K Birla Goa Campus


    Crystallographic Planes

    BITS Pilani, K K Birla Goa Campus


    Crystal Growth CZ Method

    BITS Pilani, K K Birla Goa Campus


    Crystal Growth Until Device Fabrication

    BITS Pilani, K K Birla Goa Campus


    Metallurgical grade silicon - MGS
    Electronic Grade Silicon - EGS

    BITS Pilani, K K Birla Goa Campus


    Crystallographic Planes of Si Wafers

     Silicon wafers are usually cut along a {100} plane with a flat or notch to orient the
    wafer during integrated-circuit fabrication.
     The facing surface is polished and etched yielding mirror-like finish.

    BITS Pilani, K K Birla Goa Campus


    Crystallographic Planes of Si

    Unit cell:

    View in <111> direction

    View in <100> direction View in <110> direction

    BITS Pilani, K K Birla Goa Campus

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