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FIG. 1.
I.
Atomic force microscopy (AFM) is a technique for cantilevers with lower spring constants. The dimensions
analyz- ing the surface of a rigid material all the way of the cantilever are very important as they dictate its
down to the level of the atom. AFM uses a mechani- spring constant or stiffness; this stiffness is fundamen-
cal probe to magnify surface features up to 100,000,000 tal to governing the interaction between the tip and the
times, and it produces 3-D images of the surface. The in- sample and can result in poor image quality if not chosen
formation is gathered by feeling or touching the surface carefully.
with a mechanical probe. Piezoelectric elements that fa- The experiment was performed on microstructured sili-
cilitate tiny but accurate and precise movements on (elec- con dioxide. The apparatus was set up and a set of pa-
tronic) command enable precise scanning. The AFM has rameters specified. The tip was carefully advanced and
three major abilities: force measurement, imaging, and approached to the sample. Various parameters such as
manipulation. In force measurement, AFMs can be used the set-in voltage, number of points scanned per line and
to measure the forces between the probe and the sam- the time per line were varied in order to obtain the best
ple as a function of their mutual separation. This can possible image.
be applied to perform force spectroscopy, to measure the
mechanical properties of the sample, such as the samples
Youngs modulus, a measure of stiffness. For imaging,
the reaction of the probe to the forces that the sample
imposes on it can be used to form an image of the three-
dimensional shape (topography) of a sample surface at a
high resolution. The AFM probe interacts with the sub-
strate through a raster scanning motion. The up/down
and side to side motion of the tip as it scans along the sur-
face is monitored through the beam deflection method.
The beam deflection method consists of a laser that is
reflected off the back end of the cantilever and directed
towards a position sensitive detector that tracks the ver-
tical and lateral motion of the probe. The deflection
sensitivity of these detectors has to be calibrated. There
are three basic modes of operation with an AFM: con-
tact mode, non-contact mode and tapping mode. AFM
cantilevers are typically made of either silicon or sili-
con nitride, where silicon nitride is reserved for softer FIG. 2.
IISERTVM 2
II. REFERENCES
2. http://uni-obuda.hu/users/grollerg/Electronic-
technology/3-Thin
3. http://lpc1.clpccd.cc.ca.us/lpc/tswain