Leica EM CED030

Operating Manual
Version 167050032 04/2009
Important Note

Leica reserves the right to change technical specifications as well as manufacturing

processes without prior notice. Only in this way is it possible to continuously improve
the technology and manufacturing techniques used to provide our customers with
excellent products.

Any copyrights of this document are retained by Leica Mikrosysteme GmbH, Vienna.
Any reproduction of text and illustrations (or any parts thereof) by printing, photocopy-
ing, or other methods (including electronic systems and media) requires express prior
permission in writing.

Issued by:

Leica Mikrosysteme GmbH

Hernalser Hauptstrasse 219
A-1170 Vienna
Leica EM CED030
Operating Manual

Leica EM CED030 Serial Number:

Date of purchase:

For the instrument serial number, please refer to the name type label on the
back of the instrument!

Please read this instruction manual carefully

before operating the instrument.
Table of contents

1. Application ............................................................................................................ 3
2. Description of the unit.......................................................................................... 3
2.1. Scope of Delivery ............................................................................................. 3
2.2. Front view of the unit........................................................................................ 4
2.3. Back view of the unit ........................................................................................ 5
2.4. High current supply .......................................................................................... 6
2.5. Carbon thread evaporator flange ..................................................................... 6
3. Technical Data ...................................................................................................... 7
4. Installation............................................................................................................. 8
4.1. Setting up the unit ............................................................................................ 8
4.2. Connection the vacuum pump ......................................................................... 8
4.3. Venting connection........................................................................................... 8
4.4. Power connection ............................................................................................ 9
4.5. Connecting the film thickness monitor.............................................................. 9
5. Start up .................................................................................................................11
5.1. Preparing the evaporator ................................................................................11
5.2. Adjusting the working distance........................................................................12
5.3. Mounting the glass cylinder.............................................................................12
5.4. Connecting the carbon thread evaporator.......................................................13
5.5. Evacuating the specimen chamber .................................................................13
5.6. Venting the specimen chamber.......................................................................13
6. Evaporation with the Unit ...................................................................................14
6.1. Mounting the specimen ...................................................................................14
6.2. Degassing the carbon thread ..........................................................................14
6.3. Evaporating the carbon thread........................................................................14
6.4. Determining the thickness of the carbon film ..................................................15
7. Maintenance.........................................................................................................17
8. Troubleshooting ..................................................................................................17

Page 2 Leica EM CED030 Operating Manual 03/09

1. Application

The EM CED030 carbon thread evaporation unit can be used for:

 Reinforcing collodion or Formvar coated specimen support grids with

evaporated carbon films.

 The production of conductive films on specimens to be investigated in the

scanning electron microscope and in microanalysis.

The carbon thread evaporator unit is not suited for making carbon support films
because it is only connected to a roughing pump, and carbon films evaporated under
fore-vacuum conditions are not mechanically stable enough to serve as specimen
support films.

2. Description of the unit

2.1. Scope of Delivery

Included in the scope of delivery for the EM CED030 are:

 Unit housing with vacuum chamber base, integrated measurement current

feed through for the connection of a quartz crystal film thickness monitor,
vertically adjustable specimen table, vacuum line, LED bar graph vacuum
display, vacuum gauge, automatic venting valve, high current transformer and
regulating device.

 Pyrex vacuum chamber with scale for indication of the working distance.

 Evaporator flange with tow high current feed throughs, clamping devices for
holding the carbon thread and pivoting shutter.

 Two high current cables with plug connectors at both ends, for connecting the
evaporator flange to the high current supply.

 Set of accessories consisting of a mesh cover to protect the pumping port, 2

holder springs for the specimen table, hose nipple for the venting connection,
hose clamp for the vacuum connection line, 2mm hex socket head wrench, a
spool with 3.5. meters of carbon thread, spare fuses and a mains power
connector (for vacuum pump).

Page 3 Leica EM CED030 Operating Manual 03/09

2.2. Front view of the unit

Fig.1 Front View of the unit

1/1 Vacuum chamber baseplate

1/2 Vacuum chamber
1/3 Scale for evaporation distance
1/4 Evaporator flange
1/5 High current connection cable
1/6 Specimen table
1/7 Main power switch
1/8 LED bar graph vacuum display
1/9 UP current set point key
1/10 DOWN current set point key
1/11 HIGH CURRENT impulse key
1/12 RESET current cutoff key

Page 4 Leica EM CED030 Operating Manual 03/09

 2.3. Back view of the unit

2/2 2/3 2/4 2/14 2/15

2/6

2/18
2/7

2/16
2/1

2/8
2/17

2/9

2/5 2/11 2/10 2/13

2/12

Fig.2 Back view of the unit

2/1 Power distributor

2/2 VS010 power supply card
2/3 PP010 vacuum measurement card
2/4 CE010 high current supply module
2/5 Power connection cable, 2.5m, (max. 16A)
2/6 Power connection for vacuum pump
2/7 Power connection for film thickness monitor
2/8 Fuses F1 and F2 for control (1 A slow blowing for 220 V, 2A
slow blowing for 115 V)
2/9 Fuses F3 and F4 for power section (2.5A slow blowing for
220 V, 5A slow blowing for 115 V)
2/10 0-10 V recorder connection for the fore vacuum
2/11 Trimmer potentiometer for full scale adjustment
2/12 Trimmer potentiometer for offset adjustment
2/13 0-10 V recorder connection for high current (0-20A)
2/14 High current connection for evaporator (0 to 16 V)
2/15 Grounding screw for high current cable shielding
2/16 26mm Ø vacuum connection port
2/17 Venting connection G 1/8” (with 6mm Ø adapter)
2/18 Connection for QSG 301 quartz crystal measurement
head/oscillator

Page 5 Leica EM CED030 Operating Manual 03/09

2.4. High current supply

The high current supply is separate module (2/4) containing a 300 VA power switch
supply with a 20 V secondary connection voltage. The required evaporation current
value is entered on the two current set point keys UP (1/9) and DOWN (1/10). The
HIGH CURRENT key (1/11) allows the carbon thread to be evaporated with pulses of
current at full transformer power.

2.5. Carbon thread evaporator flange

Fig.3 Evaporator flange

3/1 Basic flange

3/2 High current feedthrough
3/3 Contact for plug-in connection
3/4 Clamping spring
3/5 Clamping disk
3/6 Shutter
3/7 Activation knob for shutter

Page 6 Leica EM CED030 Operating Manual 03/09

3. Technical Data

Dimensions

Basic unit: Width 490mm

Depth 510mm
Height without chamber 260mm
Height with chamber 330mm

Vacuum chamber: Inner diameter 110mm

Height 170mm

Evaporation distance: min. 25mm

max. 90mm

Weight net 21.5kg

Electrical data

Voltage (L+N+E) 220V (115V)

Frequency 50Hz (60Hz)
Power consumption without vacuum pump max. 420 VA
with 16DU0004B vacuum pump max. 710 VA
Control fuse 2A slow
blowing (115V)
1A slow
blowing (220V)
Power fuse 5A slow
blowing (115V)
2,5A slow
blowing (220V)

Venting connection Screw coupling G 1/8”

Hose nipple (alternative) Ø 6mm

Vacuum connection Hose nipple Ø 26mm

The evacuation time and the ultimate vacuum depend on the vacuum pump used,
the length and diameter of the vacuum line, the degree of contamination of the
vacuum chamber and the type of specimens being inserted for coating. It is therefore
not possible to give generally valid evacuation times and ultimate vacuum pressures.

We recommend using the BLAZERS 16DU0004B (pumping speed 4 m3/h) vacuum

pump for this unit.

Page 7 Leica EM CED030 Operating Manual 03/09

4. Installation

Unpacking the unit:

 Remove the unit from its packing and check for mechanical damage. Report
any damage to the shipping company.

 Compare the items actually delivered with the items listed in the shipping
papers. Report any missing items to the supplier.

 Save the packaging! Whenever possible the unit should be returned for
overhaul or repair in the original packaging.

4.1. Setting up the unit

The EM CED030 can be set up free standing on a laboratory bench without any
special fixation. A vacuum pump connection and possibly a venting connection, as
well as a mains power connection are required for operation.

4.2. Connection the vacuum pump

A two-stage rotary vane pump with a pumping speed of at least 4 m3/h is

recommended (refer to Section 9 ACCESSORIES). To prevent vibrations from being
transferred from the pump to the evaporation unit, we recommend setting the pump
up on the floor. When setting up the pump, keep the vacuum line as short as possible
to avoid longer evacuation times. The vacuum line is connected to the 26mm Ø hose
nipple (2/16) connection on the back of the unit. The pump exhaust is to be either
conducted off into an appropriate exhaust line or outside. If this is not possible, we
recommend mounting an oil mist filter on the vacuum pump (refer to Section 9
ACCESSORIES).

The power connection is made to socket 2/6 located on the back of the unit (connect
the protective ground to the middle pin!).

4.3. Venting connection

To shorten the time required for subsequent evacuations, we recommend venting the
chamber with predried air or an appropriate inert gas (e.g. nitrogen).

The venting line should be made of flexible tubing. To make the connection, first
mount the 6mm Ø hose nipple included in the accessories to the screw coupling
(2/17) located on the back of the unit, and then attach the line to the hose nipple.

Page 8 Leica EM CED030 Operating Manual 03/09

4.4. Power connection

A 2.5m power cable (2/5) is permanently attached to the back of the EM CED030.
The other end of this cable must be fitted with a mains plug connection conforming to
local standards (L+N+E).

Wire colours:

Brown or black live

Blue neutral
Green/yellow protective ground

4.5. Connecting the film thickness monitor

Fig.4 Connection diagram for the QSG301 film thickness monitor

4/1 EM CED030 carbon thread evaporator

4/2 QSG301 film thickness monitor
4/3 Mains power connection
4/4 Cable (30cm) to EM CED030 oscillator
4/5 Oscillator
4/6 Cable oscillator QSG301

Page 9 Leica EM CED030 Operating Manual 03/09

Connect the QSG301 film thickness monitor (accessory) as shown in Fig. 4. As
shown, cable 4/4 to oscillator 4/5 is connected to the QSK coupling (2/18) on the
back of the EM CED030, and cable 4/6 from the oscillator to the QSG301 is
connected to the CRYSTAL HEAD screw coupling on the back of the QSG301 (note
connection direction for the oscillator). The power connection for the film thickness
monitor is made with cable 4/3 to socket 2/7 on the EM CED030.

Fig.5 Connecting the QSK301 crystal measurement head

5/1 Specimen table

5/2 Quartz crystal measurement head
5/3 Clamping screw
5/4 Measurement current feedthrough
5/5 Connection cable
5/6 Holder spring for specimen holder

Mount the quartz crystal measurement head (5/2) in the slit provided for it in the
specimen table (5/1) and secure it with the set screw (5/3). Use cable 5/5 to connect
the measurement head to the measurement current feedthrough in the vacuum
chamber base. The line from the measurement current feedthrough to the QSK
coupling on the back of the EM CED030 is a standard part of the equipment.

Page 10 Leica EM CED030 Operating Manual 03/09

5. Start up

5.1. Preparing the evaporator

Fig.6 Mounting the carbon thread

6/1 Holder recess

6/2 Evaporator flange
6/3 Clamping head
6/4 Clamping disk
6/5 Holder spring
6/6 Carbon thread
6/7 High current cable

To mount the carbon thread in the evaporation flange (6/2), first place the flange in
the holder recess (6/1) on behind the vacuum chamber provided for this purpose.
The high current cables (6/7) can be left on the flange if they have been attached to
the feedthroughs.

Page 11 Leica EM CED030 Operating Manual 03/09

Either single or double carbon threads can be used to apply carbon films by
evaporation.

Variant 1:
Single carbon thread

Variant 2:
Double carbon thread

Fig.7: Carbon thread variants

Prepare a sufficiently long carbon thread (for Variant 1; approx. 40mm, for Variant 2:
approx. 80mm). To mount the thread in the clamping head, push the clamping spring
(6/5) up from behind, place the carbon thread under the clamping disk (6/4) and
release the clamping spring. We recommend mounting the carbon thread as shown
in Fig. 4. Be sure there is no slack in the carbon thread when you are mounting it.
Also be sure that the surfaces that come into contact with the carbon thread are as
clean as possible, particularly that there is no residue from previously evaporated
carbon thread.

5.2. Adjusting the working distance

The working distance is chosen according to the heat resistance of the specimen to
be coated: if the specimen is very sensitive to heat, as long a distance as possible is
chosen and the final carbon film will be correspondingly thin. For specimens able to
withstand more heat, shorter working distances can be chosen according to how
thick the final film is to be (refer to curve in Section 6.4.). The height of the specimen
table can be adjusted simply by pushing it down or pulling it up (remove the vacuum
chamber for access). The distance from the specimen table to the evaporation
source can be taken form the scale (1/3) on the vacuum chamber.

5.3. Mounting the glass cylinder

Before mounting the glass cylinder, check the specimen chamber baseplate seal for
cleanliness and clean with an alcohol soaked, lintfree cloth if necessary. Also check
the galss cylinder, and especially its sealing surface, for cleanliness.

Page 12 Leica EM CED030 Operating Manual 03/09

5.4. Connecting the carbon thread evaporator

Check the seal and the sealing surface of the cylinder for contamination and set the
evaporator flange prepared as described in Section 5.1. on the glass cylinder.
Connect the evaporator the high current supply via the tow high current cables (plug
connectors at both ends) supplied with the unit, and connect the cable shielding to
the grounding screw (2/15) on the back of the unit.

5.5. Evacuating the specimen chamber

The specimen chamber is closed when the evaporator flange is mounted on the
glass cylinder. The next step is to switch on the unit from the MAINS switch (1/7),
which also starts the vacuum pump. The chamber is then evacuated to as good a
vacuum as possible (e.g. 0.02 mbar) because the quality of the carbon film is largely
dependent on the working pressure. This vacuum has been reached when KED to
the left of the 0.02 mark on the vacuum display (1/8) lights. You can connect a
voltmeter to the recorder output (2/10) on the vacuum measurement module (2/3) for
exact pressure indication. The following table gives which pressures effect which
voltages at this output.

5 x 10-1 mbar 4,96 V 5 x 10-2 mbar 2,72 V

4 x 10-1 4,72 4x 10-2 2,58
3 x 10-1 4,50 3 x 10-2 2,38
2 x 10-1 4.14 2 x 10-2 2,09
1 x 10-1 3,60 1 x 10-2 1,52
9 x 10-2 3,44 9 x 10-3 1,36
8 x 10-2 3,29 8 x 10-3 1,19
7 x 10-2 3,12 7 x 10-3 1,04
6 x 10-2 2,97 6 x 10-3 0,90

5.6. Venting the specimen chamber

The vacuum chamber is vented automatically via the opened venting valve when the
evaporation process has finished and the evaporator unit has been turned off from
the MAINS switch (1/7).

Page 13 Leica EM CED030 Operating Manual 03/09

6. Evaporation with the Unit

6.1. Mounting the specimen

The specimens to be coated are preferably first affixed to the SEM specimen
supports with silver print or another suitable adhesive after which the supports are
mounted in the specimen table bores provided for them. We recommend using the
special tweezers for picking up SEM specimen supports (refer to Section 9
ACCESSORIES) for transferring the supports to the table.

Larger specimens, or Formvar or collodion coated specimen support grids can be

simply laid on the specimen table and secured there with the spring holders (5/6) if
they are still on filter paper or glass slides.

6.2. Degassing the carbon thread

 Evacuate the chamber until the vacuum display is in the green area.

 Close the shutter on the evaporator flange to protect the specimen to be

coated from the evaporation source.

 Press the UP key (1/9) until the carbon thread begins to glow red (to increase
the current carefully, we recommend tapping the UP key instead of holding it
down). If necessary reduce the current using the DOWN key (1/10).

 The degassing process takes 15 to 20 seconds and causes the pressure in

the vacuum chamber to rise. When it is finished, the pressure will return to
close its initial value.

 Press the RESET key (1/12) to end the degassing process.

6.3. Evaporating the carbon thread

 After the degassing process has been completed, evacuate the specimen
chamber to approx. 1 x 10-2 mbar or better ( refer to Section 5.5.).

 Open the shutter on the evaporator flange.

 Evaporate the carbon thread by pushing the HIGH CURRENT (1/11) key. It
takes a single carbon thread approx. 3 seconds to burn through, and a double
carbon thread approx. 6 seconds.

 Vent the vacuum chamber as described in Section 5.6. by turning off the unit.

Page 14 Leica EM CED030 Operating Manual 03/09

6.4. Determining the thickness of the carbon film

The values given in the following film thickness curves only apply when the carbon
thread has been sufficiently degassed, and the working pressure and working
distance are held constant. For this reason the operating conditions must be closely
reproduced if the desired film thickness is to be achieved. The film thickness is also a
function of factors such as the transfer resistance at the clamping head and the
resistance of the carbon thread itself (which can differ slightly). Thus even when the
operating conditions mentioned above are precisely reproduced, deviations from the
ranges given in Figs. 8 and 9 can occur.

The indications concerning the film thickness values refer to a distance of 20mm from
the centre of the specimen table.

We recommend using a quartz crystal film thickness monitor for exact film thickness
measurement (see Section 9 ACCESSORIES). However, with this monitor it is only
possible to measure the finished film. Before reading the display, wait approx. 15
second to be sure that the crystal is no longer affected by the heat given off during
the evaporation.

Fig.8: Film thickness for a single carbon thread

Page 15 Leica EM CED030 Operating Manual 03/09

Fig.9: Film thickness for a double carbon thread

Page 16 Leica EM CED030 Operating Manual 03/09

7. Maintenance

The EM CED030 carbon thread evaporator needs no special maintenance. All that is
necessary is to be sure that the specimen chamber with its glass cylinder, the
specimen table and particularly the evaporator flange are kept clean. To clean the
metal parts we recommend using a Scotch-Brite cloth and/or the metal cleaning
agent “Wenol plus K”. An appropriate substrate cleaner (refer to Section 9
ACCESSORIES) is recommended for the glass cylinder. In both cases the cleaned
parts should be wiped with an alcohol soaked cloth after cleaning and dried well. The
silicone rubber seal for the vacuum chamber baseplate and the evaporator flange
should be cleaned with a lint-free cloth that has been drenched in alcohol.

The vacuum pump should be maintained according to its operating instructions

(Operating instructions Nr. 16PK800102BN for the 16DU0004B pump). The same
applies to the TPR010 vacuum gauge (Operating instructions Nr. 16BG800310BE).

8. Troubleshooting

The carbon thread evaporator is not subject to malfunction except when it is used for
a purpose other than that for which it was intended. When more than double ply
carbon thread is used or if the flange is used to mount a metal evaporation source,
the evaporator flange current feedthroughs can be damaged if subjected to an
excessive heat load.

If the vacuum pump does not run and no pressure is displayed on the bar graph (1/8)
when the main switch (1/7) has been turned on, then either the unit is not plugged
into the mains power, or fuse F1 and/or F2 (1 A slow blowing for 220 V, or 2 A slow
blowing for 115 V) has responded.

If the evaporator equipment does not function when the unit has been turned on, the
vacuum pump is running and the evaporator flange (1/4) is connected, fuse F3
and/or F4 (2.5 A slow blowing for 220V, 5 A slow blowing for 115 V) have most
probably responded and must be replaced.

Page 17 Leica EM CED030 Operating Manual 03/09

EC Declaration
EC Declaration of Conformity
EG Konformitäts-Erklärung
Déclaration CE de Conformité

We/Wir/Nous Leica Mikrosysteme GmbH

Hernalser Hauptstrasse 219
A-1170 Wien, Austria

declare in exclusive responsibility that the product

erklären in alleiniger Verantwortung, dass das Produkt
déclarons sous notre seule responsabilité que le produit

Model EM CED030

Modell EM CED030

modèle EM CED030

Type/Typenbezeichnung/type CED030
to which this declaration relates is in conformity with the following standards:
auf das sich diese Erklärung bezieht, mit den folgenden Normen übereinstimmt:
auquel se réfère cette déclaration est conforme aux normes :
EN 61010-1
EN 61326-1

following the provisions of directive

gemäss den Bestimmungen der Richtlinie
conformément aux dispositions de directive

2004/108/EC (Electromagnetic compatibility)

(Elektromagnetische Verträglichkeit)
2006/95/EC (Low Voltage Equipment)
(Niederspannungsrichtlinie)
2006/42/EC (Machinery)
(Maschinen)

Wien, 15. Februar 2008 Dr. Reinhard Lihl

Entwicklungsleiter
R & D Manager
Chef du service développement

Leica Microsysteme GmbH Tel. +43 1 48899

Hernalser Hauptstrasse 219 Fax +43 1 48899-350
A-1170 Wien www.leica-microsystems.com
www.leica-microsystems.com
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