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PARAMETERS
14.08.92/Pit vtOO461/gh/1
ZERO COUNTING RATE
(cf. # 2.3.1)
..
Mean value below 1 particle ?; d.3 JLm/ft3 ?
Mean value: 311 particles ~ 0.3 Jl.m/ft3 X 1000 = 3.11 .105 particles ~ 0.3 Jl.m
{dilution
factor)
14.08.92/Pit vtOO461/gh/2
5.5.2 Check
(cf. Fig. 3)
I X Cu X p .. x V PC x a
vs = ~ .(cm/s)
Local excess part1cle counts
v s = 2.27 cm/s
(recommended value)
14.08.92/Pit vtOO461/gh/3
continue with point # 5.10
.
No test aerosol is required. continue with point # 5.10
Mean valu"e: 733 particles ?:; 0.3 .LLm/ft3 X 1000 = 7.33 X 105 particles ?:; 0.3 .LLm
(dilution
factor)
Scan the filter according to point 2.3.10 with the scanning velocity
obtained from point # 5.9. In case a leckage is found mark the loca-
tion and note the measured value.
14.08.92/Pit vtOO461/gh/4
6. MEASURING PROTOCOL
6 .1. PARAMETERS
Test aerosol:
Dilution factor*:
14.08.92/Pit vtO0462/gh/1
6.2 ZERO COUNTING RATE
(cf. # 2.3.1)
..
Mean value below I particle ~ 0.3 ~m/ft3 ?
factor)
14.08.92/Pit vtOO462/gh/2
6.5.2 Check
1 x Cu x p .. x V PCx a
vs = (cm/s)
Local excess partlcle c.ounts
-1 x-particles ~ 0.3 J.l.m/ft3 x 0,0006 x 1 ft3 x cm
vs
partlcles > 0.3 J.l.mx 60 s
v s = -cm/s
14.08.92/Pit vtOO46Z!gh!3
D Case 3: vs = cm/s ?- 20 cm/s:
Multiple measurements:
(dilution
factor)
vs = -cm/s
Scan the filter according to point 2.3.10 with the scanning velocity
'f.
obtained from point # 6.6 or 6.9. In case a leckage is found mark the
location and note the measured value.
14.08.92/Pit vtOO462/gh/4
$
Cleanroom
Workbench
Aerosol
Generator
rdownstream I lupstream
Probe
HEPA Filter
~
r-
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D a..
Particle Counter
o
1: 10
o
o
1:100
o
Dilution
System
.
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cn Q)
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e ta.g
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2-5cm tQi ~
-17 v s
v PC!
v s mox=
v s
-
-
LE =
\
-
-
Upstream particle concentration > 0.3JJm
per minute air tlow {particles > O.3JJm/tt 1
= Local tilter penetration rate tor leakage, i.e.
0.0006 -e:i~'
-
-
Sampling volume
a -
-
Width ot probe in