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a r t i c l e i n f o a b s t r a c t
Article history: Photovoltaic technology is used worldwide to provide reliable and cost-effective electricity for industrial,
Received 16 August 2009 commercial, residential and community applications. The average lifetime of PV modules can be
Accepted 18 November 2009 expected to be more than 25 years. The disposal of PV systems will become a problem in view of the
Available online 1 December 2009
continually increasing production of PV modules. These can be recycled for about the same cost as their
disposal.
Keywords:
Photovoltaic modules in crystalline silicon solar cells are made from the following elements, in order of
Silicon
mass: glass, aluminium frame, EVA copolymer transparent hermetising layer, photovoltaic cells, instal-
Recycling
Photovoltaic cells lation box, TedlarÒ protective foil and assembly bolts. From an economic point of view, taking into
Etching account the price and supply level, pure silicon, which can be recycled from PV cells, is the most valuable
Renewable energy sources construction material used.
Solar energy Recovering pure silicon from damaged or end-of-life PV modules can lead to economic and envi-
ronmental benefits. Because of the high quality requirement for the recovered silicon, chemical pro-
cessing is the most important stage of the recycling process. The chemical treatment conditions need to
be precisely adjusted in order to achieve the required purity level of the recovered silicon. For PV systems
based on crystalline silicon, a series of etching processes was carried out as follows: etching of electric
connectors, anti-reflective coating and n-p junction. The chemistry of etching solutions was individually
adjusted for the different silicon cell types. Efforts were made to formulate a universal composition for
the etching solution. The principal task at this point was to optimise the etching temperature, time and
alkali concentration in such a way that only as much silicon was removed as necessary.
Ó 2009 Elsevier Ltd. All rights reserved.
0960-1481/$ – see front matter Ó 2009 Elsevier Ltd. All rights reserved.
doi:10.1016/j.renene.2009.11.031
1752 E. Klugmann-Radziemska, P. Ostrowski / Renewable Energy 35 (2010) 1751–1759
Metal Glass
Recycling Recycling
Hazardous Chemical
gas emission Processes
Silicon
plates
Silicon
Use of silicon powder as a Powder
technological component Production
Fig. 1. Thermal and chemical processes in PV crystalline cell and PV module recycling.
strength), and as a material for ceramics, based on the manufacture PV cells are silicon-based. Depending on the manufacturing tech-
of non-metal powders. nology, however, monocrystalline, polycrystalline and, occasion-
ally, amorphous cells are produced.
Several types of PV cells manufactured by different producers
2. Recycling of crystalline silicon photovoltaic cells and
and distinguished by the type of AR coating and electric contact
modules
material applied are available on the market. The front-side elec-
trodes are most commonly made from silver, while the ones located
The PV module production process involves laminating single
on the rear surface of the cell frequently have an additional thin
cells (after the formation of the n-p connector layer) and mounting
coating of aluminium.
them in aluminium frames. That is why the recycling process
Because of the high light reflection index of silicon (33–54%),
requires the disassembly of the modules according to the flow chart
a layer decreasing that value needs to be incorporated – that is why
shown in Fig. 1.
the front surface of the cell is covered with an anti-reflective layer,
A thermal process enabling the quick, simple and economically
which changes the colour of the cell (it usually turns blue). AR
efficient disassembly of the module is the first stage in PV module
coatings are made from substances such as:
recycling. Firstly, the EVA-laminated cells (EVA – Ethylene and
Vinyl Acetate copolymer) are separated. Tests have been conducted
Ta2O5 – tantalum pentoxide;
on chemical EVA layer removal: the results show that thermal
TiO2 – titanium dioxide;
separation is, from an economic and ecological point of view, the
SiO – silicon monoxide;
more favourable alternative when compared to chemical processes,
SiO2 – silicon dioxide;
which require the use of expensive and toxic reagents.
Si3N4 – silicon nitride;
The second primary process carried out in PV module recycling
Al2O3 – aluminium oxide;
is the chemical treatment of the solar cell.
ITO (Indium-Tin-Oxide) – Tin-doped In2O3.
In order to recover the silicon powder or plates for re-use in new
photovoltaic cell production, the metal electrodes, AR coating and
n-p connector layer have to be removed. These operations can be
performed by dissolution in acidic or basic solutions.
A very important issue is the correct identification of the
materials used in silicon PV cell production (Fig. 2). Over 90% of all
Anti-reflecting coating
Ag Metallization
n-p junction
Silicon base
Ag/Al Metallization
Fig. 2. Types of materials used in PV cell production. Fig. 3. Recovery of the silicon base from silicon PV cells.
E. Klugmann-Radziemska, P. Ostrowski / Renewable Energy 35 (2010) 1751–1759 1753
4 60
10 20
20stoCC
30
30stoCC
H 2O content: HF+HNO 3+H 2O=100 % 50 40stoCC
40
50stoCC
50
E tc h in g r a te [µ m /m in ]
0%
60stoCC
60
3
10 40 70stoCC
70
5%
Concentration [%]
80stoCC
80
10% 30
2
15%
10 20
10
10 0
0 5 10 15 20 25 30 35
0 50 100
Process time [min]
% HNO 3 (volumetric)
Fig. 6. Efficiency of removal of the rear-side Al metal coating .
Fig. 4. Etching rate as a function of the etching solution composition [5].
20 2.5
NaOH 10% HNO3 30%
NaOH 20% HNO3 40%
KOH 10%
15 KOH 20%
2
µm/min
10 1.5
5 1
0 0.5
20 30 40 50 60 70 80 20 30 40 50 60 70 80
T [ oC] T [ oC]
Fig. 5. Temperature and concentration dependence of the removal rate of the rear-side Fig. 7. Temperature and concentration dependence of the removal rate of the Ag metal
Al metal coating. coating with HNO3.
1754 E. Klugmann-Radziemska, P. Ostrowski / Renewable Energy 35 (2010) 1751–1759
Fig. 8. Temperature dependence of the AR coating and n-p junction/metal coating removal time.
hydrogen peroxide – H2O2; steps: oxidation and reduction, followed by dissolution of the
distilled water – H2O. oxidation products to form a soluble ion complex.
The causative role of oxidant is usually played by nitric acid
Experiments have also been conducted with solutions enriched (HNO3), but the faster for the formation of soluble salts is mostly
with: hydrofluoric acid (HF). Both of these reactions take place in almost
the same time, and they result in a uniform etching; but in the case
potassium iodide – KI; of n-p junction etching (as in the case of silicon recovered from
silver nitrate – AgNO3; recycled PV modules) the oxidation and reduction reaction rates
copper nitrate – Cu(NO3)2; should be markedly different. During silicon etching, hexa-
bromine – Br. fluorosilicic acid (H2SiF6) is produced. It is formed in a formalised
two-step-process during the dissolution of silicon in the HF/HNO3
The specifications of some solutions used for silicon etching are mixture. In the first step silicon is formally oxidised by HNO3 to
given below: SiO2. In the second, the oxide reacts with HF to yield SiF4, i.e., it is
complexed in excess HF as SiF2 6 . The overall reaction is written as
HNO3(70%)/HF(48%) (2:1); follows [4]:
HNO3(70%)/HF(48%) (1:100);
HNO3(70%)/HF(48%)/CH3COOH þ Br2(250:150:150:3); 3Si D 4HNO3 D 18HF / 3H2 SiF6 D 4NO D 8H2 O (1)
HNO3(70%)/HF(48%)/CH3COOH (5:3:3), (5:1:2);
The degree of selectivity and the etching rate are functions of the
H2O2(30%)/HF(48%)/H2O (1:1:4);
crystallographic orientation, surface and volumetric structural
H2SiF6/HNO3/CH3COOH (1:1:1);
defects in the silicon and the temperature of the etching mixture,
HNO3(70%)/HF(48%)/H2O (1:2:2) þ AgNO3 (1 g).
as well as the hydrodynamics of the boundary layer between the
Röver et al. [2] have reported some results of texture etching mixture and semiconductor. The temperature affects the etching
with the use of HF/HNO3/H2O solution. The chemical etching of rate, the dependence being exponential. The etching process can
semiconductors with HF/HNO3/H2O solution is divided into two be limited by the chemical reaction rate or by the diffusion
rate of the etching mixture through the surface layer of
semiconductor.
Stirring of the etching mixture accelerates etching and promotes
uniform dissolution.
Most etching mixtures contain hydrofluoric acid (HF) as the
oxidation product solvent and nitric acid (HNO3) as the oxidising
agent.
Two processes accompany the etching of the semiconductor
surface:
Fig. 10. Composition of the etching mixture in the HF/H2O2/HNO3, H2SiF6/H2O2/HNO3 and HF/CH3COOH/HNO3 systems.
4. Experimental results elements embedded in its walls and base. The process was carried
out over a temperature range of 20–80 C. Etching rates were
4.1. Removing the metal coating measured isothermally using mono- and polycrystalline silicon
wafers.
The metal coating is removed by a sequence of etching. The rear- Because the etching rate for the rear-side metal coating
side metal coating of older solar cells often contains silver. During depends strongly on temperature, it is beneficial to use a low-
this step, the silver is dissolved; it can be recovered from the waste concentration solution and a bath temperature of 60–80 C, which
acids by electrolysis. The yields of silver recycled with different reduces the process time. Maximum etching rates were achieved
metal concentrations in the acid and silver prices were analysed by with 30% KOH; the efficiency was optimal for 30% aq KOH at 80 C
Müller et al. [3]. (Fig. 6).
An aqueous solution of KOH and NaOH was used to remove the It is possible to dissolve the Ag metal coating with aq HNO3.
Al layer from the cell’s rear surface (Fig. 5). A Teflon bath containing Fig. 7 shows the etching rate vs. concentration of nitric acid and
the etching mixture was immersed in a water bath with heating bath temperature.
100
HNO3/HF/CH3COOH+Br2
HNO3/HF/CH3COOH
HNO3/HF(40%)/H2O+AgNO3
10 HNO3/HF/H2O+Cu(NO3)2
HF/H2O2 /H2O
H2SiF6 /HNO3/CH3COOH
[µm/s]
1 HNO3/CH3COOH/HF+KI
0.1
0.01
20 30 40 50 60 70 80
o
T [ C]
Fig. 11. Temperature dependence of n-p junction etching rate for different mixtures.
1756 E. Klugmann-Radziemska, P. Ostrowski / Renewable Energy 35 (2010) 1751–1759
Fig. 12. Microscopic view of the rear side of the PV cell after etching in KOH.
During the test carried out with 10% aq HNO3 at 20 C there The antireflective coating and n-p junction can be removed
were no observable effects of etching after 40 min, whereas during using a HF/CH3COOH/HNO3 (1:2:5) mixture. Fig. 9 illustrates the
the test at 80 C with 40% aq HNO3 the entire metal coating was change in the etching rate of the successive layers as a function of
removed within 15 min. temperature for two mixtures (H2SiF6/HNO3/H2O and H2SiF6/
HNO3/CH3COOH) in comparison with the results obtained by
Wolf [5].
5. Experimental results Mixtures containing added hydrogen peroxide were also tested:
the results are comparable to those obtained with HF/CH3COOH/
5.1. Removing the AR coating and the n-p junction HNO3 solution (see Fig. 10).
The temperature dependence of the n-p junction etching rate
Two types of mixture – H2SiF6/HNO3/CH3COOH and H2SiF6/ for the following mixtures is presented in Fig. 11. The composition
HNO3/H2O – have been tested for removing the AR coating and n-p of the mixtures is as follows:
junction. A thorough rinse in deionised water is required after
etching has been completed. 20 ml HNO3 (65%): 40 ml HF(40%): 40 ml H2O þ 2 g AgNO3
Fig. 8 presents the etching time for the AR coating (left) and the 250 ml HNO3 (65%): 150 ml HF (40%): 150 ml CH3COOH
n-p junction and metal coating (right). The left-hand graph shows (99.5%) þ 3 ml Br2
the process time, as the thickness of the layer was not measured, 250 ml HNO3 (65%): 150 ml HF (40%): 150 ml CH3COOH (99.5%)
only the disappearance of the blue coloration was followed. Fig. 9 10 ml HF (40%): 10 ml H2O2 (30%): 40 ml H2O
shows the etching rate for the same processes as presented in Fig. 8. 20 ml H2SiF6 (40%): 20 ml HNO3 (65%): 20 ml CH3COOH (99.5%)
The etching rate for different AR materials is the same or very 300 ml HNO3 (65%): 1500 ml CH3COOH (99.5%): 50 HF
similar under the chemicals studied. (40%) þ 12,5 g KI
Fig. 13. Microscopic view of the etched cell: front and rear side of the PV cell.
E. Klugmann-Radziemska, P. Ostrowski / Renewable Energy 35 (2010) 1751–1759 1757
Fig. 14. Polycrystalline structure of PV cells: a – front face before etching (magnification 25), b – front face after etching (magnification 100).
20 ml HNO3 (65%): 40 ml HF (40%): 40 ml H2O þ 2 g Cu(NO3)2. Fig. 13 presents the front face of a monocrystalline cell and the
rear face with an Ag metal coating. After etching for 15 min in
The etched cells were made from polycrystalline silicon. a 1:1:1.66 mixture of HF/CH3COOH/HNO3 at 20 C the metal
coating, the AR coating and the n-p junction were completely
removed.
6. Examination of the etched cells Fig. 14 presents the front face of a polycrystalline silicon solar
cell with an AR coating, fingers and bus bar (Ag) before and after
A change in the surface structure of the wafers could be etching in HF/CH3COOH/HNO3 (1:1:1.66) for 3 min at 20 C. The
observed in all the different baths after a certain number of etching right-hand photograph shows the imprint of the Ag finger.
runs. The etched cells were examined under a metallographic In the next step the recycled wafers were characterised by
microscope (Leica Reichert MEF4M) with a dual reflex module, a resistivity measurement and determination of thickness.
a beam splitter prism and a TV CCD camera for digital image Removal of the n-p semiconductor junction continued until the
acquisition and computer image analysis (MultiScan SoftwareÒ) diffusion layer dissolved, with simultaneous control of the sheet
(Figs. 12–14). This optical microscope is an inverted wide field resistance Rs ½U=, (ohms per square) using a four-point probe.
Metallograph with a high degree of automation and is equipped The resistivity of a semiconducting material, a direct function of
with IMIX (Integrated Microanalyser for Images and X-rays) soft- dopant concentration, is one of the basic parameters characterising
ware for image analysis and offers versatility in the following silicon PV cell bases, allowing the dopant concentration in the base,
techniques: Bright Field Imaging, Differential Interference Contrast, the homogeneity of the dopant surface concentration, the depth of
Digital Image Acquisition, Field Imaging, Interferometry, Polarised the n-p junction, and the distribution of dopant concentration in
Light and Polarisation Contrast. different layers to be determined.
Fig. 12 presents the rear face of a monocrystalline cell after The sheet resistance is a measure of the resistance of thin films
etching in KOH; after 15 min at 80 C the Al contact was removed with a uniform thickness. It is commonly used to evaluate the
completely. outcome of semiconductor doping, metal deposition and resistive
paste printing. The utility of sheet resistance, as opposed to resis-
tance or resistivity, is that it is measured directly using a four-point
probe measurement. Sheet resistance is measured in ohms/square,
and is applicable to two-dimensional systems where the thin film is
considered to be a two-dimensional entity. It is equivalent to
resistivity as used in three-dimensional systems. When the term
‘sheet resistance’ is used, the current must be flowing along the
plane of the sheet, not perpendicular to it. In a regular three-
dimensional conductor, the resistance can be expressed as [6]:
Table 1
Sheet resistance and etching depth as a function of etching time.
Acknowledgements photovoltaics. In: 22nd European Photovoltaic Solar Energy Conference, Milan,
Italy 2007.
[2] Röver I., Wambach K., Weinreich W., Roewer G., Bohmhammel K., Process
This work was partly supported by the Human Capital Opera- Controlling of the Etching System HF/HNO3/H2O. In: 20th European Photovol-
tional Programme (European Social Fund in Poland for the years taic Solar Energy Conference 2005, Barcelona, Spain.
2007–2013). [3] Müller A., Röver I., Wambach K., von Ramin-Marro D.W., Recovery of high value
material of different photovoltaic technologies. In: 22nd European Photovoltaic
Solar Energy Conference, 3-7 September, Milan, Italy 2007.
[4] Acker J, Henssge A. Chemical analysis of acidic silicon etch solutions II. Determi-
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