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SPECIAL ISSUE PAPER 1697

Miniaturization of injection abrasive


water jet machining process
H Orbanic1, B Jurisevic1,2 , D Kramar1, M Grah2, and M Junkar1
1
Laboratory for Alternative Technologies, University of Ljubljana, Ljubljana, Slovenia
2
Litostroj E.I., Production of Power Generation and Industrial Equipment, Ljubljana, Slovenia

The manuscript was received on 28 October 2005 and was accepted after revision for publication on 20 February 2006.

DOI: 10.1243/09544062JMES217

Abstract: This contribution presents the possibilities of applying abrasive water jet (AWJ)
technology for multi-material micromanufacture. The working principles of injection and
suspension AWJ systems are presented. Characteristics of this technology, such as the ability
to machine virtually any kind of material and the absence of a relevant heat-affected zone,
are given, especially those from which the production of microcomponents can benefit. A few
attempts to miniaturize the AWJ machining process are described in the state-of-the-art pre-
view. In order to develop and improve the AWJ as a microtool, a numerical simulation based
on the finite element analysis is introduced to evaluate the effect of the size abrasive particles
and the process efficiency of microsized AWJ. An ongoing project in which an improved mini
AWJ cutting head is being developed, is presented. Finally, the possible fields of application
are given, including a case study on the machining of miniaturized heat sinks.

Keywords: abrasive water jet machining, process miniaturization, finite element analysis

1 INTRODUCTION and the small forces involved during machining is a


good motivation to adapt the presented technology
Abrasive water jet (AWJ) is a non-conventional to multi-material micromanufacture.
machining process. There are two AWJ methods: Nowadays, AWJ technology is applied in many
injection AWJ systems, in which the hard abrasive fields, such as the automotive and aerospace indus-
particles are accelerated up to supersonic velocities try, construction engineering, mining, food proces-
by a high-speed water jet (WJ) that is generated by sing, and even medicine. For typical AWJ cutting
pressing water at high pressures through an orifice, applications, the water pressure is between 300 and
and suspension AWJs, in which a slurry of water and 600 Mpa, the jet diameter roughly between 0.5 and
abrasive is pressed though the nozzle at much lower 1.2 mm, and the abrasive particle size between 100
pressures. In both cases, the workpiece material is and 200 mm. Although the size of the jet is too large
removed mainly due to the erosion of abrasive par- for micromachining, e.g. machining of slots, it is
ticles. AWJ is distinguished from other machining possible to produce thin-walled parts like honey-
processes by its ability to machine practically any combs, as shown in Fig. 1. This is possible because
kind of material, regardless of the material compo- the jet exerts very low side forces on the workpiece
sition, structure, and mechanical and physical prop- and does not bend the wall. In order to make AWJ
erties. Additionally, no relevant heat-affected zone is technology more desirable and applicable in the
produced in the proximity of the machining area on field of micromanufacturing, the first step isto mini-
the workpiece. From the point of micromachining, mize the jet diameter by downsizing the nozzles and
the possibility to machine almost any kind of material other cutting-head components. This means that the
abrasive particle size has to be reduced as well.
According to the laws of hydrodynamics, when the

Corresponding author: Laboratory for Alternative Technologies, size is reduced, the velocity of the fluids has to be
University of Ljubljana, Askerceva 6, Ljubljana SI-1000, Slovenia. increased in order to maintain similarity, which can
email: bostjan.jursevic@fs.uni-lj.si be achieved by using higher water pressures. Also,

JMES217 # IMechE 2006 Proc. IMechE Vol. 220 Part C: J. Mechanical Engineering Science
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1698 H Orbanic, B Jurisevic, D Kramar, M Grah, and M Junkar

Fig. 2 OMAX mini-abrasive jet cutting head [2]

generating of jets smaller than 400 mm [1]. OMAX


Corporation is the only manufacturer of AWJ
machines, which commercially offers mini-AWJ
nozzle, shown in Fig. 2, which is able to produce
cuts with widths between 0.5 and 0.6 mm [2].
Fig. 1 Honeycomb structure cut with AWJ
In contrast, because of the small side forces
accompanying the cutting process, it is possible
the movement of the cutting head and the turning on to cut sections with thicknesses around 200 mm or
and off of the jet have to be more precisely con- less. This will be explained in detail in section 4:
trolled. The control of the movement can be easily in the manufacture heat sinks, afin thickness of
achieved by using more precise gantry system. Jet 150 mm was achieved.
on/off control, however, is more complicated as it Drilling holes is also an area where AWJ is a pro-
depends on the AWJ generation system. The injec- spective machining technology to produce holes of
tion system develops problem due to the delay in diameter under 1 mm. Drilling with AWJ depends
turning on the WJ and later the abrasive supply, on the jet diameter, the time of drilling, and type of
and the same when turning them off. That is why material used. Usually, the commercially available
some suggest using suspension AWJ, where this con- injection cutting head can produce 0.9 mm wide
trol is almost instantaneous [1]. This type of system holes in a 6 mm thick workpiece before the backflow
can also achieve smaller diameters of jets (down to can significantly increase the diameter of the hole
50 mm), but there is a greater wear of parts, which [22]. By optimizing the machining parameters and
usually have to be made of diamond. with 0.38 and 0.51 mm diameter focusing tubes,
The goal of this paper is to present current work Hashish [3] obtained holes with diameters between
on utilizing AWJ for micromachining. The state- 0.5 and 0.6 mm and a depth of 12.5 mm, which
of-the-art AWJ micromachining processes will be gives an aspect ratio of around 20 [3].
presented in section 2. In the next section, some More suitable for micromachining is the appli-
theoretical ground work for describing the AWJ cation of the abrasive suspension jet (ASJ) in which,
machining and how this data can be used for in contrast to the injection AWJ, a suspension of
improving the ‘micromachinability’ of AWJ will be water and abrasive is premixed and passed through
presented. Because the injection system is widely a diamond nozzle. This method was also found to
used and is easier to implement than the suspension be five times more effective than injection AWJ [4].
system, the work on the miniaturized injection cut- Miller reports of using ASJ operating at 70 MPa and
ting head for producing smaller diameter jets will with nozzle diameters between 40 and 60 mm [1].
be given. In the end, some case studies of using The ASJ machine is presented in Figs 3 and 4. The
AWJ for producing miniaturized parts and possible machine has a special on/off valve with diamond
areas of application are described. seats, which is installed upstream of the cutting
nozzle to allow multiple features to be cut per
2 STATE-OF-THE-ART PREVIEW second. The diamond seats prevent the abrasion of
the seats as the suspension passes through [1].
The injection AWJ system is not widely used in Figure 4 shows a flow circuit for a micromachining
micromachining, as the diameter of the jet pro- ASJ. Pressurized water from a pumping unit is fed
duced by current cutting heads does not allow the to a flow controller, which controls the flow of

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Miniaturization of injection AWJ process 1699

Fig. 3 Picture of ASJ micromachining system [1] Fig. 5 Example of cutting thin sections, where the
smallest division is 0.1 mm [1]
water and abrasive suspension towards the cutting
nozzle. The machine utilizes a plunger pump, which Drilling or piercing tests were also performed on
provides for a 50 mm nozzle 70 MPa of water pressure 50 mm thick stainless steel by using 58 mm diameter
and a flow rate of 2.5 l/h. nozzle and 8 mm garnet abrasive [1]. Figure 7 shows
The abrasive that is mostly used in ASJ is garnet, part of a 33  33 array of holes with mean diameter
but aluminium oxide (Al2O3) can also be used. The of 85 mm, drilled on a 250 mm pitch. The drilling
size of abrasive grains has to be accordingly much rate was 2.5 holes/s, which was limited by the valve
smaller than the cutting nozzle diameter. The noz- actuator response. When piercing with AWJ, the jet
zles themselves are made from industrial diamond is stationary and the piercing velocity is, depending
or high wear resistant silicon carbide [1]. on the thickness of material, not very high. By
Miller performed cutting and drilling tests with the moving or oscillating the jet, the process can be
ASJ machine, in which he used nozzle diameters speeded up; the process is then called slotting.
between 40 and 60 mm and water pressure of
70 MPa. He used different types and sizes of abra-
sives. For successful cutting tests, he used a garnet 3 DEFINITION OF THE REQUIRED MICRO
abrasive of mean grain diameter 8 mm and Al2O3 of AWJ ATTRIBUTES USING FINITE
300 nm mean diameter grains. In Fig. 5(a), a butterfly ELEMENT ANALYSIS
motif is presented that illustrates the reproducing of
thin features with 8 mm abrasive grains. The thinnest In order to predict the performance of micro-AWJ
section of the butterfly wing is around of 200 mm. machining, a finite element analysis (FEA) method
For cutting with 300 nm mean diameter Al2O3, used to simulate single abrasive particle impacts
Miller used a 40 mm nozzle. Figure 6 shows a 1 cm was adopted [5]. For the simulation of the AWJ
long dragon cut out of 50 mm thick stainless steel machining process, several issues have to be taken
by using 300 nm abrasive. The cutting with sub- into account. The highspeed of the abrasive particles
micron abrasives gives good results, but they are (vA) up to few 100 m/s, small dimension of the
quite problematic because of agglomeration, which particle (dA) in the range of some 100 mm and the
can cause a decrease in jet effectiveness or can
cause the nozzle to jam.

Fig. 6 Dragon cut with 300 nm abrasive out of 50 mm


Fig. 4 Schematic of the flow circuit for the ASJ [1] thick stainless steel [1]

JMES217 # IMechE 2006 Proc. IMechE Vol. 220 Part C: J. Mechanical Engineering Science
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1700 H Orbanic, B Jurisevic, D Kramar, M Grah, and M Junkar

were ground prior to the experiment and the average


surface roughness Ra ¼ 0.83 mm was achieved. The
craters’ shapes after impact at different impact
angles and water pressures were observed and
compared with those simulated at different impact
angles and abrasive particles velocities (Fig. 8).
As described before, the impacts were numerically
simulated at different impact angles of abrasive
particles and its velocities. In the experimental
validation, the samples were exposed to the jet at
different impact angles using a specially developed
workpiece holder, which allowed us to expose the
workpiece surface at impact angles between 08 and
908. In contrast, it is extremely difficult to define
Fig. 7 85 mm diameter holes drilled in a 50 mm thick the actual velocity of abrasive particles. The only
stainless steel [1] practical way to do this is to find a relation between
the water pressure ( pW) and the abrasive particle
fact that the impact takes place in a very short time velocity. For injection AWJ systems, it is known
(in the range of few ms) represents important that the abrasive particle velocity depends on the
issues in terms of time interval, which inevitably velocity of the WJ, which accelerates the abrasive
lead to a numerical stability problem. The selected particles in the cutting head. During the experi-
set of units has to fulfil the condition in order that mental validation, a shallow trace was engraved
no numerical instability begins. using the high traverse rate (vT) of the cutting head
Because of contact problems between the abrasive in order to observe the shape of single, isolated
particle and the workpiece material, and because of craters on the sample surface, as shown in Fig. 8.
the small duration of the impact, an implicit numeri- All the experiments were performed on the
cal code could not be applied. Therefore, ANSYS/ OMAX type 2652A/20HP cutting system, with a
LS-DYNA was chosen, as it is an explicit numerical Böhler cutting head. The high-pressure water
program, designed to solve different types of impacts. was supplied from a hydraulic intensifier (Böhler
Compared to other attempts to simulate the AWJ Ecotron 403).
process with the FEA, some improvements were From Fig. 9, it can be observed that the simulated
implemented in the presented method. The material craters are more spherical than the measured one.
model for the workpiece material was based on This can be explained by the fact that in the FEA
the true stress – true strain curve, as it was an simulations, the abrasive particles are modelled
elasto-plastic material, and it took into account the as perfect spherical bodies, while the measured
hardening of the material due to plastic defor- sphericity of the abrasive material used for the
mations. Additionally, dynamic properties, such as experimental validation is about 0.6884. This differ-
velocity and gravity were considered. The abrasive ence between the modelled and actual abrasive
particles are taken as rigid spherical objects with a particles sphericity causes a drift between the
predefined mass and initial velocity that was the simulation and the experiment.
same as the velocity of abrasive particles after the In Fig. 10, the results of the FEA simulation show
acceleration process. the influence of the abrasive particle diameter on
During the FEA simulation in ANSYS/LS-DYNA, it the removed workpiece material. It can be observed
was verified, after each time interval, if the contact that smaller abrasive particles remove less work-
between the abrasive particle and the workpiece piece material. The initial velocity for all abrasive
surface had taken place. The selected type of the con- particles was set at 200 m/s.
tact had to fulfil two conditions. In the first place, the The FEA simulation results are predictable: if
contact has to be a surface-to-surface type. Next, the abrasive particles of different sizes impact with the
contact type had to allow a surface to experience same velocity on the workpiece material, the
material failure during the contact. Both demands specific amount of material removed is proportional
were fulfilled in the case, when an Eroding surface- to the size of the particles. This can be attributed to
to-surface type of contact was chosen [5]. The local the fact that when the size of the particles is
fracture of workpiece material was thus correctly decreased, the impact surface decreases slower
modelled. than the kinetic energy of abrasive particles,
The applied FEA method has been recently and, therefore, in case of smaller abrasives, the
experimentally validated for stainless steel 1.4301 energy concentration at the interface between the
(AISI 304) as a workpiece material [5]. All the samples abrasive particle and the workpiece surface is

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Miniaturization of injection AWJ process 1701

Fig. 8 Proposed approach of FEA simulation and experimental validation [5]

smaller. It can be concluded that in the case of 4 DEVELOPMENT AND DESIGN OF MAWJ
micro-AWJ machining, where finer abrasive is CUTTING HEAD COMPONENTS
used, the velocity has to be increased, otherwise it
could be that no material removal would take On the basis of equipment currently available on
place. Consequently, because the abrasive particle the market, it was decided to develop a miniaturized
velocity is proportional to the water pressure, cutting head based on the abrasive injection prin-
higher water pressure will be required in micro- ciple with a centrally located WJ. The requirements
AWJ machining. for this cutting head are high cutting efficiency,

JMES217 # IMechE 2006 Proc. IMechE Vol. 220 Part C: J. Mechanical Engineering Science
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1702 H Orbanic, B Jurisevic, D Kramar, M Grah, and M Junkar

high quality of the cut, and narrow kerf widths and it


should be easy to change and adapt on any commer-
cially available AWJ cutting machine.
After evaluation of industrial cutting heads (jet
diameter dj 5 0.8 mm) and its components geo-
metry, it is not clear that the parameters are the
most important for the design of the cutting head.
Because no useful rule for miniaturization was
derived, the influences of several design parameters
on the cutting efficiency of MAWJ were evaluated in
practice. For this purpose, a modular cutting head
shown in Figs 11(a) and (b), was constructed. Such
construction allows exchanging of several orifice
inserts and mixing chambers with different
geometries. The self alignment cutting-head body
Fig. 9 Numerical and experimental results in the case was made out of the conventional mixing chamber
of stainless steel 1.4301 (AISI 304) [5] by using electrical discharge machining (EDM). To
provide good sucking properties, a smaller abrasive
inlet was eroded with the inner diameter of 1.6 mm.
At water pressure of 350 MPa, the water flow rate
through a smaller orifice, whose diameter is approxi-
mately half of the conventional one, is less than 0.5 l/
min. This is about a quarter of the normal volume at
the same water pressure of 350 MPa. This means
that only a quarter of the usual abrasive mass flow
rate is applied. Also, the abrasive feeding system that
allows precise delivery of abrasive in quantities
between 10 and 100 g/min was developed. Another
feeding system for even finer abrasive dosage is
currently under construction, as such systems are cur-
rently not available on the market.
As the 0.3 mm focusing tube is used, finer abrasive
has to be utilized. The abrasive mesh 200, in which
grains have a mean diameter of 75 mm, was used
Fig. 10 FEA results for different abrasive particle for the first tests. The tests with the new cutting-
diameter head configuration for cutting of the 6 mm thick

Fig. 11 Modular cutting head for MAWJ with a 0.3 mm diameter focusing tube. (a) Schematics
and (b) bottom view of the cutting head

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Miniaturization of injection AWJ process 1703

Fig. 13 (a) The first thinning of the test workpiece and


(b) the second thinning

AWJ for micromachining is in producing thin


structures. In this section, two case studies will be
presented, where a commercial grade cutting head
was used for producing test shapes of thin EDM
electrodes or micropunches and for producing
miniaturized heat sinks.
For producing thin EDM electrodes, a cutting
head with an 0.8 mm diameter focusing tube and
an abrasive garnet with mean diameter of 100 mm
was used. The workpiece material was mild steel,
while the test workpiece had a square profile with
an edge length of 7.3 mm. The workpiece was
sequentially rotated by 908 and thinned in-between
Fig. 12 Cutting of aluminium AL6061-T6 with MAWJ. with AWJ. This was done in two steps, as shown in
(a) Top view and (b) bottom view Fig. 13(a) for the first step and in Fig. 13(b) for the
second step.
aluminium AL-6061 showed promising results. The cut in the first step was 3.3 mm from the
Figure 12 shows the top and bottom views of cuts centre line, while the cut in the second step were
made by MAWJ. Because of the characteristics of 0.5 mm from the centre line. Cutting velocities vt
cutting with AWJ, such as the taper of cut and the and water pressure p was varied (vt ¼ 0.5, 1, 2, 4,
increased surface roughness with the depth of the 8 mm/s; p ¼ 180, 280 MPa) in order to obtain the
cut, the bottom of the cut (Fig. 12(b)) is narrower thinnest shape. The best results were achieved at
and more wavy. Also, because aluminium is a ductile the lowest velocity of 0.5 mm/s and pressure of
material, the existence of burr at the bottom of cut 280 MPa. The resulting part, whose width is 350 mm,
can be seen. The average surface roughness achieved is shown in Fig. 14.
with abrasive mesh 200 was Ra ¼ 3 mm. In spite of In the second case study, the manufacture of
these promising results, the improvement and heat sinks of aluminium by AWJ was studied. Two
development of MAWJ continues, as the stability of designs were tested. The first one was a plate fin
performance has to be improved. design and the second one was a square pin design.
An engraving regime was used on the AWJ machine,
in which the cutting head moves so fast that the jet
5 APPLICATIONS OF AWJ IN does not have the time to cut through the workpiece.
MICROMACHINING In this way, the distance between fins or pins is fixed
by the diameter of the jet. The height of fins can be
Apart from drilling holes in hard-to-machine controlled by the cutting velocity, as lower velocity
materials, one of the main possible areas of using means higher fins.

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Fig. 16 The plate fin heat sinks produced by AWJ

Fig. 17 Tool path for cutting square pin heat sinks

When producing plate fins, the cutting velocity was


fixed at 5.5 mm/s, which gave approximately 15 mm
high fins. The focusing nozzle was 0.6 mm diameter
and water pressure 300 MPa. The tool path for cut-
ting plate fins is shown in Fig. 15. Four different
heat sinks were produced, and distance between
two passing tool paths was changed from 0.9 mm

Fig. 14 (a) The thinned test part for mini EDM


electrode. (b) The comparison of the thinned
part with a 1 mm measuring gauge

Fig. 15 Tool path for cutting plate fin heat sinks Fig. 18 The square pin heat sink produced by AWJ

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Miniaturization of injection AWJ process 1705

to 1.5 mm. The workpiece was 10 mm wide and micromachining and some of possible parts were
50 mm high. The heat sink was manufactured on presented in this paper. The major problem that
area of 10  10 mm. The results of the experiment was addressed for this technique is the cleanness of
are shown in Fig. 16. The achieved thicknesses at the process and manipulation of small parts. The
the top of the heat sinks were from 700 mm for the presented FEA simulation of the erosion process
thickest fins to 150 mm for the thinnest fins. that takes place during AWJ machining, confirmed
In the case of square pin design, a smaller focusing that in order to miniaturize the AWJ process, it is
nozzle was used and the velocity was increased necessary to reduce the abrasive size in the first
to 10 mm/s. The focusing nozzle was 0.5 mm in place and consequentially to increase the water
diameter and the water pressure was 400 MPa. The pressure. The new MAWJ cutting head follows these
workpiece was of the same material as that of the conclusions and thus gave promising results for
plate fin design, but the machining was performed future work.
on the wider side of the workpiece. The distance
between two parallel passing tool paths was
ACKNOWLEDGEMENTS
1.1 mm, which gave in the end a 450 mm wide
square pin. The tool path for cutting the pins is
shown in Fig. 17 and the resulting heat sink is This work is supported by the ‘Multi-Material Micro
presented in Fig. 18. Manufacture: Technology and Applications (4M)’
The heat sinks took little time to produce, as Network of Excellence, Contract Number NMP2-
the process is quite fast. By downsizing the nozzle CT-2004-500274 and by the ‘Virtual Research Lab
diameter and parameter optimization, smaller for a Knowledge Community in Production
dimensions of fins, around 100 mm, could be (VRL-KCiP)’ Network of Excellence, Contract
achieved. Number NMP2-CT-2004-507487, both within the
Although the previous pictures of the heat EU 6th Framework Program.
sinks produced do not show them as finished
products, the AWJ can be used to cut the heat sink
out of the main workpiece body, but in this case REFERENCES
better manipulation of the workpiece would be
required. 1 Miller, D. S. Micromachining with abrasive waterjets.
J. Mater. Process. Technol., 2004, 149(1 – 3), 37– 42.
2 www.omax.com, accessed 19 April 2005.
6 CONCLUSIONS 3 Hashish, M. Drilling deep, small-diameter holes using
abrasive-waterjets. In 16th International Conference on
The AWJ machining technology is a promising Water jetting, Aix-en-Provence (Ed. P. Lake), France,
technique in the area of micromachining because 2002, pp. 103 – 118.
4 Kovacevic, R., Hashish, M., Mohan, R., Kim, T. J.,
the current trend in this field is to downsize the jet
Ramulu, R., and Geskin, E. S. State of the art of research
diameter and to improve the accuracy of the process.
and development in abrasive waterjet machining.
By exploiting the advantages, such as multi-material ASME J. Manuf. Sci. Eng., 1997, 119, 776 – 785.
machining, no thermal effects, and small forces 5 Junkar, M., Jurisevic, B., Fajdiga, M., and Grah, M.
involved, some problematic areas of micromachin- Finite element analysis of single-particle impact in
ing could be solved. There already exist possibilities abrasive water jet machining. Int. J. Impact Eng., 2006,
of machines and machine parts specialized in 32(7), 1095– 1112.

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