Components Division Products

Dry Vacuum Pumps

Pumping speeds: 2,000-80,000 L/min (70-2,800 cfm)

Ultimate Pressure: <0.5 Pa (5x10⁻³ mbar)
Roots and Screw technologies with corrosion resistance options
Small footprint and energy savings designs
High reliability for Semiconductor, Thin Film, PV, and R&D aplications

Air-Cooled Pumps
Pumping speeds: 50-3,000 L/min (2-100 cfm)
Ultimate pressure: <1 Pa (0.01 mbar)
Air-cooled, oil-free, multi-staged roots design
Low maintenance and high uptime
Replacement for scroll and oil pumps for clean applications

Ceramic Bearing Turbo Molecular Pumps

Pumping speeds: 70-2,400 L/min

Ultimate pressure: <1x10⁻⁶ Pa (1x10⁻⁸ mbar)
Orientation-free mounting
Water or fan cooling
Separate or integrated controller options for some models

Magnetic Levitation Turbo Molecular Pumps

Pumping speeds: 390-3,300 L/s

Ultimate pressure: <1x10⁻⁶ Pa (1x10⁻⁸ mbar)
Orientation-free mounting
Corrosion-resistant rotors
Ultra-low vibration, radiation hardened

EBARA TECHNOLOGIES, INC. 51 Main Avenue, Sacramento, CA, 95838 +1 (800) 535 - 5376 info@ebaratech.com www.ebaratech.com
 Innovators in Dry Vacuum Pumps, Turbomolecular Pumps, and Abatement Solutions for
Semiconductor, Solar, and Thin Film Technologies

Dynamic Oxidation Unit Abatement

Patented oxidation technology and wet scrubbing section

Abates Silane (SiH4) and other pyrophoric gases
Abates Ammonia (NH3) and other water soluble gases
No added fuel or active flame required
Low cost-of-ownership

Vacuum Gauges

Gauges for measuring from atmosphere to ultra-high vacuum

Pirani, Capacitance, and Ionization gauges available
Power Supply Display Units available
KF/CF flange options, with or without process control set point outputs
Ideal for a wide range of applications

Heater and Vacuum Hardware

Full range of cloth and silicone-rubber line heaters

High temperature capabilities (>250°C)
Uniform temperatures throughout
Zone and individual control systems available
Long service life of 10+ years

Service Capabilities

Dedicated applications and support teams

Worldwide field service support and capabilities
Strategically located, state of the art global EBARA service centers
Quick response and fast rebuild times
24/7 technical support hotline

USA: Ebara Technologies, Inc. INDIA: HHV Pumps Private Ltd.

51 Main Avenue, Sacramento, CA 95838 No 17, Phase 1, Peenya Industrial Area
PHONE: +1-800-533-5376 Banglalore 560 058 India
EMAIL: info@ebaratech.com PHONE: +91-70-22093009
WEB: www.ebaratech.com EMAIL: info@hhvpumps.com

0182-AS1809241, Rev B