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Air-Cooled Pumps
Pumping speeds: 50-3,000 L/min (2-100 cfm)
Ultimate pressure: <1 Pa (0.01 mbar)
Air-cooled, oil-free, multi-staged roots design
Low maintenance and high uptime
Replacement for scroll and oil pumps for clean applications
EBARA TECHNOLOGIES, INC. 51 Main Avenue, Sacramento, CA, 95838 +1 (800) 535 - 5376 info@ebaratech.com www.ebaratech.com
Innovators in Dry Vacuum Pumps, Turbomolecular Pumps, and Abatement Solutions for
Semiconductor, Solar, and Thin Film Technologies
Vacuum Gauges
Service Capabilities
0182-AS1809241, Rev B