3.155J/6.

152J Spring Term, 2005

Preview and preparation for Lecture 5, Feb.16: Oxidation

In this lecture we will go over the oxidation of Si. It requires that you understand most of
the issues covered in lectures 3 and 4 (listed below in Blue).

New concepts you are expected to know in advance of this lecture on oxidation are listed
below in Red.

1. Flux, J, of particles: the number of particles flowing through a unit area per
unit time.

2. Concept of flux, J, of a species diffusing down the concentration gradient,

∂c/∂x (c = number /volume), in a solid. J is proportional to diffusion constant
D (cm2/s):
∂c
J x = -D
∂x
3. Mean free path, l: the average distance a particle travels between collisions,
i.e. events that change its momentum.

4. Ideal gas law relating†pressure, volume, temperature, and number of particles:

pV = NkB T (or pV = NRT )
or p = nkB T , i.e. n = N/V

5. The flux of species proceeding from a chemical reaction is proportional to the

†
reaction rate constant, † units of velocity: J = k c
k which has
†
6. You’ll need laminar flow and dead layer analysis.

7. Chemical reaction rate constant has an Arrhenius-like dependence on

Ê DG ˆ †
temperature: k µ expÁ- ˜.
Ë kB T ¯
NEW for oxidation:
DG
-
8. Solid state diffusion is also an activated process: D = D0e kT
.
†