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School of Electrical Engineering and Computer Science, University of Central Florida, Orlando, FL 32816, USA
Tel: 407-823-0379 Fax: 407-823-5835 Email: johnshen@mail.ucf.edu
Abstract- In this paper, a novel concept of on-chip bondwire structures. However, the high dc resistance and poor Q factor
transformer with ferrite epoxy glob is proposed for power system of the MEMS inductors/transformers severely limit the current
on chip (SOC) applications. We have theoretically and
experimentally proven the concept of the bondwire transformer handling capability and efficiency of the power SOC. More
and demonstrated that its performance can be improved using critically, the large increase of fabrication complexity and cost
ferrite polymer epoxy glob. Transformer parameters including associated with the MEMS post-processing approach raises
self- and mutual inductance, and coupling factors are extracted questions on its feasibility to facilitate large scale
from both modeled and measured S-parameters. It is expected commercialization of the power SOC concept into the
that the bondwire transformers can be easily integrated into
power SOC manufacturing processes with minimal changes in extremely cost-sensitive power supply market. We previously
processes, and open enormous possibilities for realizing cost- reported a study on bondwire inductors with ferrite epoxy
effective, high current, high efficiency power SOC’s coating which offers significant improvement in Q factor over
the state-of-the-art MEMS micromachined inductors [9], [10].
In this paper, we will investigate the concept of bondwire
Index Terms—On-chip transformer, wirebond, ferrite, SOC transformers with and wihtout ferrite epoxy glob.
I. INTRODUCTION
II. CONCEPT
System on Chip (SOC) is an emerging trend of integrating all
components of an electronic system into a single integrated Wirebonding is commonly used in nearly all power
circuit. The SOC concept embodies what many believe to be management IC packages today. Thin aluminum or gold
the ultimate level of integration: an entire system on one chip. bondwires of 1-15 mils (25 to 380 µm) in diameter are used to
Since its emergence in the 1990’s, the SOC concept has provide necessary electrical interconnection between the
gained wide acceptance in a broad range of applications from silicon chip and the package leads. It is well known that the
supercomputing to embedded systems. The proliferation of the bondwires of IC packages typically exhibit a parasitic
SOC concept into power management systems has also inductance of a few nH and a resistance of several to several
generated a great deal of interest in the electronics industry. tens of mΩ. On-chip bondwire inductors were first explored
Power management SOCs that monolithically integrate all in RF integrated circuits by Craninckx et al in 1995 [11].
active and passive components using low cost semiconductor Although bondwires act as natural inductors thus can be
manufacturing processes will provide an extremely attractive
solution with significant improvement in performance and Ferrite epoxy core
unprecedented reduction in board space, parts count, and time-
to-market. The power SOC concept is particularly well Bondwire windings
received in several fast growing power management markets
such as point of load (POL) dc/dc converters, LED drivers,
and battery-powered mobile applications.
However, the development of power management SOC’s is
seriously hindered by the difficulty of integrating magnetic
passive components. Current research work on integrated
magnetics for power SOC’s has predominantly focused on
utilizing MEMS (micro-electro-mechanical-system)
micromachining technology as a post-processing step after the Chip
completion of the CMOS chip containing all power switching
devices and control circuitry [1]-[8]. Sophisticated MEMS
technology allows sequential deposition and patterning of
numerous layers of conductor, insulator, permalloy or ferrite Fig. 1: Proposed on-chip transformer made of two or more sets of
thin films to form desirable inductor and transformer wirbonds sharing a ferrite epoxy glob core on a chip.
M = k ⋅ Lp
Port 1
Substrate
L p (leakage) _ = L p − M = L p ⋅ (1 − k )
M
Ls (leakage) = Ls − = Ls ⋅ (1 − k )
T2 Port 2
where k is the coupling coefficient ( 0 ≤ k ≤ 1) and can be Fig. 3: 2-port transformer modeling with HFSS.
extracted from modeling and measurement data.
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Fig. 4: Simulated self inductance, mutual inductance and quality factor of Fig. 5: Coupling coefficient k for variable bonding spacing
a 15mil spacing bondwire transformer
IV. EXPERIMENTAL
We have conducted experimental investigation of the
proposed on-chip bondwire transformer concept with and
without the ferrite epoxy composite materials. The material is
Fig. 7: Fabricated bondwire transformer (Np:Ns=9:1)
a custom formulated magnetic epoxy comprised of
manganese-zinc (MgZn) ferrite powder with an average
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Primary
Primary
Secondary Secondary
Fig. 8: Measured primary and secondary voltage waveforms without Fig. 9: Measured primary and secondary voltage waveforms with ferrite
ferrite epoxy core (9:1). epoxy core (9:1).
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Fig. 13: Self inductance and mutual inductance measurement data for
bondwire 2:1 transformers with and without ferrite core. Fig. 15: Measured k-factor of a 2:1 bondwire transformer before and
after applying ferrite epoxy.
It is very difficult to characterize transformers in time
domain at high frequencies due to the parasitic effects. We use
a S-parameter network analyzer to extract all transformer
parameters such self- and mutual inductances, k-factor, and
S21 parameter. Fig. 11 shows two transformers with 1:1 and
2:1 turn ratio on specially designed PCB substrate. Fig. 12
shows their PCB substrate design that are essentially 50Ω
transmission lines to reduce the input reflection to the
minimum. A Cascade Microtech's M150 probe station is used
to test the bondwire transformers on PCB substrates. Two
FPC-1000 probes are used for two port measurement. The
FPC-Series (Fixed-Pitch Compliant) fixtures are high
frequency 50Ωcoaxial probe that offers a signal line with two
low-inductance fixed-pitch ground contacts (GSG). The PCB
designs in Fig. 11 are based on detailed HFSS simulation, and
work well with the FPC-1000 probes. A PNA E8361A
Network Analyzer receive input from the two FPC-1000
probes and is used to measure the S-parameters of the Fig. 16: Measured k-factor of a 1:1 bondwire transformer before and
transformers. after applying ferrite epoxy.
Fig. 14: Measured transmission coefficient S21 of a 1:1 bondwire Fig. 17: Measured transmission coefficient S21 of a 2:1 bondwire
transformer before and after applying ferrite epoxy. transformer before and after applying ferrite epoxy.
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Figs. 12 and 13 show the extracted primary self inductance VI. ACKNOWLEDGMENT
Lp, secondary self inductance Ls and mutual inductance L This work was supported in part by the U.S. National
with and without the ferrite epoxy core for the 1:1 and 2:1 Science Foundation under Award ECS-0454835. The authors
transformers respectively. The dc resistance of each bondwire would like to thank Dr. Thomas Wu at University of Central
is around 7 mΩ. It is observed that all inductances increase Florida for his valuable input on the HFSS simulation work.
after ferrite epoxy glob is applied. The authors also wish to thank Methode Technology Inc. for
Figs. 14 and 15 show the extracted k-factor with and providing the ferrite epoxy samples.
without the ferrite epoxy core for the 1:1 and 2:1 transformers
respectively. It is observed that the k-factor increased from
0.34 to 0.53 (56% improvement) for the 1:1 transformer and REFERENCES
from 0.46 to 0.6 (30% improvement) for 2:1 transformer [1] S. C. Mathuna et al, “Magnetics on silicon: an enabling technology for
respectively. This shows the effectiveness of the use of ferrite power supply on chip,” IEEE Trans. Power Electron., Vol. 20, No. 3,
May, 2005, pp. 585-592.
epoxy core. Figs. 16 and 17 illustrate the transmission [2] T. Sato, “Planar power inductor using FeCoBN magnetic film with high
coefficient S21of both transformers. S21 is a critical saturation magnetization and high electrical resistivity, ,” et al, IPEC’00,
parameter which determines the transformer’s power 2000, pp. 303-308.
[3] C. Ahn et al, “Micromachined planar inductors on silicon wafers for
transferring capability. In very high frequency span, since the MEMS applications, ”IEEE Trans. Ind. Electron., Vol. 45, No. 6, Dec.
coupling coefficient k is no longer meaningful, S21 is the only 1998, pp. 866-875.
performance parameter for the transformer. [4] Y. Fukuda et al, “Planar inductor with ferrite layers for DC-DC
converter, ”IEEE Trans. Magn., Vol. 39, No. 4, July 2003, pp. 2057-
The most important finding from this experiment is that the 2061.
coupling effect of the bondwire transformers can be [5] E. J. Brandon et al, “Fabrication and characterization of microinductors
significantly improved with the application of ferrite epoxy for distributed power converters, ”IEEE Trans. Magn., Vol. 39, No. 4,
July 2003, pp. 2049-2056.
core glob. Not only can we increase the k-factor, but also can [6] J. Y. Park et al, “Batch-fabricated microinductors with electroplated
we boost the transmission coefficient S21. We experimentally magnetically anisotropic and laminated alloy cores, ”IEEE Trans. Magn.,
demonstrated that we can improve the performance of the on- Vol. 35, No. 5, Sept. 1999, pp. 4291-4300.
[7] Y. Katayama et al, “High-power-density MHz-switching monolithic
chip bondwire transformer with ferrite polymer epoxy globe in DC-DC converter with thin-film inductor, ”PESC’00, 2000, pp. 1485-
a frequency range of 10 MHz to 300 MHz, which is of interest 1490.
for future-generation, high frequency, high density switching [8] K. H. Kim et al, “A megahertz switching DC/DC converter using FeBN
thin film inductor, ” IEEE Trans. Magn., Vol. 38, No. 5, Sept. 2002, pp.
power converters. 3162-3164.
V. CONCLUSION [9] Z.J. Shen et al, “On-Chip Bondwire Inductor with Ferrite-Epoxy Coating:
A Cost-Effective Approach to Realize Power Systems on Chip”,
In this paper, a novel concept of on-chip bondwire PESC’07, 17-21 June, 2007, pp. 1599-1604
[10] Z. J. Shen, patent pending, US provisional patent filed on Aug. 20, 2006.
transformer with ferrite epoxy glob is proposed for power [11] J. Craninckx et al, “A 1.8-GHz CMOS low-phase-noise voltage-
system on chip (SOC) applications. We have theoretically and controlled oscillator with prescaler,” IEEE J Solid State Circuits., Vol.
experimentally proven the concept of the bondwire 30, No. 12, Dec. 1995, pp. 1474-1482.
[12] E. J. Brandon et al, “Printed Microinductors on Flexible Substrates for
transformer and demonstrated that its performance can be Power Applications,” IEEE Trans. Comp. Pkg. Tech., Vol. 26, No. 3,
improved using ferrite polymer epoxy globe. It is expected Sept. 2003, pp. 517-523.
that the bondwire transformers can be easily integrated into [13] John R. Long “Monolithic Transformers for Silicon RF IC Design”,
IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 35, NO. 9,
power SOC manufacturing processes with minimal changes in SEPTEMBER 2000
processes, and open enormous possibilities for realizing cost- [14] HFSS user’s guide, Ansoft Corporation.
effective, high current, high efficiency power SOC’s.
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