LEVIFLOW ® Ultrasonic Flowmeters

Ultraclean Fluid Handling

LEVIFLOW ® Integrated Flowmeter LFIF

LFIF-06: 10 l/min

Ultraclean Non-Invasive Flow Measurement!

ULTRASONIC FLOW MEASUREMENT

INTRODUCTION

The LEVIFLOW® LFIF flowmeter is designed for non-invasive flow

measurements of high purity fluids. Figure 1 illustrates the
operating principle. Two piezoelectric transducers, mounted at
both sides of the measuring tube of the fluid stream, generate
and receive an ultrasonic wave. The wave going in direction of the
flow (with-stream wave) is accelerated and the wave going
against (against-stream wave) the flow direction is slowed down.
The two waves are processed by a signal converter. The
difference of the transmit time of both waves is proportional to the
velocity of the fluid.
Figure 1: Operating principle of LFIF ultrasonic flowmeter.

The standard configuration of the LEVIFLOW® LFIF flowmeter

consists of a flow sensor and an integrated converter with a
digital signal processor (DSP) for processing the sensor signals.
The compact integration of flow-sensor and converter reduces
cabling effort and setup significantly. An analog and digital output
is provided and can be configured with a PC software. A two wire
2 RS485 bus allows communication and configuration with a PC.
1

SYSTEM BENEFITS

 No contamination due to non-invasive measurement.

3b
 No moving parts -> no particle generation.
3c
 Straight through flow path with no corners and dead
zones.
3a  Easy configurable flow sensor parameters (PC software).
 Improved signal stability (viscosity change and bubble
robustness) compared to flowmeters like vortex types.
Figure 2: System Overview
 Simple and compact design with one connection cable.
 Low pressure loss.
 Excellent price/performance ratio.

APPLICATIONS
1

 Flow monitoring of high purity liquid processes in

Semiconductor manufacturing.
 CMP slurry flow measurement.

2
 Flow measurement in chemical manufacturing.
 Flow control in combination with Levitronix MagLev
pump systems.
 Flow switch applications.
Figure 3: Flowmeter components
SPECIFICATIONS

Characteristics Specification Characteristics Specification

Flow Range [l/min] 0 – 10 l/min Weight ~ 80 g for flowmeter and ~ 180 g for 5m extension cable
Accuracy of Reading For > 1.7 l/min: ± 2% Housing Materials PPS for housing body, FKM for sealing gaskets
@ 20 °C Water For < 1.7 l/min: ± 34 ml/min PEEK for screws, PET for label
Kinematic Viscosity 0.36 – 1.3 mm2/s (0.36 – 1.3 cSt) IP Classification IP-65 (indoor)
Sound Speed 1450 – 1550 m/s (water) Electrical Connector Circular type (IP-65), lock-release mounting
Fluid Temperature 10 – 80 oC (50 – 176 oF ) Cables Separate extension cable with connector (see Figure 4)
Ambient must be < 40 °C at 80 °C fluid temperature
Interfaces RS485 with Modbus protocol
Ambient Temperature 0 – 50 oC (32 - 122 oF) (see also Figure 4)
Analog Output with 0-20 mA (4-20mA configurable)
Maximum Fluid Pressure 0.5 MPa = 5 bar Digital Output:
Power Supply 24 VDC ±10%,  38 mA Measurement Error, Flow Alarm, Volume Counter Pulse,
Inrush (start-up) current Peak < 690 mA during < 1 ms Pulsed Flow Output (0-1000Hz)

Pressure Drop 380 mbar at 10 l/min and 20 °C water Configuration Viscosity Linearization (up to 10 points)
Parameters Low Cutoff Alarm Outputs (low and high)
Wet Parts / Fittings PFA / Tube 3/8” (OD = 9.52, ID = 6.38 mm) (Levitronix Config. SW) Damping Time (filter) Volume Counter

Table 1: Specifications of flowmeter LFIF-06 (all data based on calibration with water at 20 oC with zeroing and ambient at 25°C)

Wire Wire Standard

Pin # Description Specification
Color Size Designation
AWG26
6 Brown DC24V-
0.18 mm2 Supply Voltage: 24 VDC ±10%
Power Supply
Open Wires AWG26 DC24V- to be connected to earth.
5 Red DC24V+
0.18 mm2
Connector Type: AWG28
Hirose HR-30-6P-6S 4 Yellow RS485-
0.11 mm2
Field Bus Modbus protocol for communication with PC
AWG28
3 Orange RS485+
0.11 mm2
Current: 0 – 20 mA (load resistance < 500 Ohm)
AWG28 Reference is DC24V-
2 Green Analog Out+ Flow Value
0.11 mm2 Note: Cable LFE-E.3 contains integrated resistor for
conversion to 0 – 10V output.
Open collector with nominal load DC 30V/10mA
AWG28 Reference is DC24V-
1 Blue Digital Out+ Error
0.11 mm2 Note: Cable LFE-E.2 contains integrated pull-up
resistor for electrical definition of default signal.

Figure 4: Basic dimensions of flowmeter LFIF-06 and LFE-E cables with interface specifications

Pos. Article Name Part # Feature/Description Note

1 LFIF-06 100-30393 Integrated Flowmeter for 10 l/min Calibration parameters are stored in flowmeter.
Waterproof lock-release mounting connector type for flowmeter connection.
2a LFE-E.1-50 190-10371 Extension Cable 5m PVC
Open wires at cable end for connecting to other equipment.
Waterproof lock-release mounting connector type for flowmeter connection.
2b LFE-E.2-50 190-10372 Extension Cable 5m PVC
Open wires at cable end, integrated pull-up resistor on digital output (flow switch app.).
Waterproof lock-release mounting connector type for flowmeter connection.
2c LFE-E.3-50 190-10383 Extension Cable 5m PVC
Open wires at cable end, integrated conversion for analog output from current to voltage.
Structure/Design USB connector with termination resistor (3a) and cable with connector pair (3 b+c) for
YN-485I-TR, USB to RS485 external RS485 wire connection. Magnetically isolated. Cable length is 2m.
3 100-30392
Adaptor-TR Isolated
Purpose Communication over fieldbus of flowmeter with PC.

Table 2: Order information for standard components and accessories

 LEVITRONIX® THE COMPANY

Levitronix is the world-wide leader in magnetically levitated bearingless motor technology. Levitronix was the first company to introduce
bearingless motor technology to the Semiconductor, Medical and Life Science markets. The company is ISO 9001 certified. Production
and quality control facilities are located in Switzerland. In addition, Levitronix is committed to bring other highly innovative products like the
LEVIFLOW® flowmeter series to the market.

Headquarter and US Contact Japan Contact Taiwan Contact

European Contact

Levitronix GmbH Levitronix Technologies LLC Levitronix Japan K.K. Levitronix Taiwan
Technoparkstr. 1 20 Speen Street, Suite 102 Wing Eight 5floor, 4-16-4 5F, No. 251, Dong Sec. 1, Guangming
CH-8005 Zurich Framingham, Massachusetts 01701 Asakusabashi, Taito-ku 6th Rd., Chu Pei City,
Switzerland USA Tokyo, 111-0053 Japan Hsin-Chu 302, Taiwan, R.O.C.

Phone: +41 44 445 19 13 Phone: +1 508 861 3800 Phone: +81 3 5823 4193 Phone: +886 3 657 6209
Fax: +41 44 445 19 14 Fax: +1 508 861 3837 Fax: +81 3 5823 4195 Fax: +886 988 321472
E-Mail: salesEurope@levitronix.com E-Mail: salesUS@levitronix.com E-Mail: salesJapan@levitronix.com E-Mail: salesAsia@levitronix.com

First Release: 25-Sep-15 Last Update: 14-Jun-17 PL-4510-00, RevC, DCO# RD