01/08/2019 InfiniteFocusSL | 3D measurement system for form & finish | Alicona

3D measurement system for form &

nish

In niteFocusSL

In niteFocusSL is a cost e cient optical 3D measurement

system for easy, fast and traceable measurement of form
and nish on micro structured surfaces. Users measure both
form and roughness of components with only one system. In
addition, color images with high contrast and depth of focus
are achieved. The long working distance of up to 33mm in
combination with its measurement eld of 50mm x 50mm
allows a wide range of applications. Measurements are
achieved in seconds and features, such as a coaxial laser for
quick and easy focusing, further increase usability. With an
automation interface, In niteFocusSL is also applied for fully
automatic measurement in production.

Technical Speci cations

Measurement principle non-contact, optical, three-dimensional, based at Focus-Variation

Positioning volume (X x Y RL objectives: mot.: 50 mm x 50 mm x 155 mm (Z: 25 mm mot., 130 mm man.) = 387500
x Z) mm³
SXRL/AXRL objectives: mot.: 50 mm x 50 mm x 120 mm (Z: 25 mm mot., 95 mm man.) =
300000 mm³

Objective magni cation   10x 20x 50x 2xSX 5xAX 10xAX 20xAX 50xSX

Working distance mm 17.5 16 10.1 34 34 33.5 20 13

Lateral measurement area (X,Y) mm 2 1 0.4 10 3.61 2 1 0.4

(X x Y) mm² 4 1 0.16 100 13.03 4 1 0.16

Vertical resolution nm 100 50 20 3500 460 130 70 45

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Height step accuracy (1 mm) % 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1

Max. measurable area mm² 2500 2500 2500 2500 2500 2500 2500 2500

Min. measurable roughness (Ra) µm 0.3 0.15 0.08 n.a. n.a. 0.45 0.25 0.15

Min. measurable roughness (Sa) µm 0.15 0.075 0.05 n.a. n.a. 0.25 0.1 0.08

Min. measurable radius µm 5 3 2 20 10 5 3 2

For more information download the product yer or send us a request.

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High measuring point Measurement of steep Full form

density
Up to 500 million measurement
points ensure a meticulously
detailed measurement with
tolerances in the μm and sub-μm
range along with large working
distance. The high measurement
point density ofFocus-Variation
enables operators to gain a
anks measurement with
Light coming from different Real3D
directions is used to positively Using Real3D, users measure
in uence a measurement. The surfaces from numerous
measurement of the maximum perspectives. Single
ank angle is not restricted by the measurements are automatically
numerical aperture of an objective. merged into a full 3D dataset. High-
Depending on the surface users precision and calibrated rotation
measure surfaces with slope and tilt axes ensure automated,
angles up to 87°.

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01/08/2019 InfiniteFocusSL | 3D measurement system for form & finish | Alicona

consistently high lateral and repeatable and traceable

vertical resolution across high measurement on the whole
measurement volumes. measurement object.

Focus-Variation
Technology
Alicona measurement systems are based on
the technology of Focus-Variation and
combine the functionalities of a surface
roughness measurement device and a form
measurement system. Each Alicona
measurement instrument is a surface
measurement device, surface roughness
measurement system, 3D measurement
system for geometrical tolerancing and micro
coordinate measurement system. The Focus-
Variation technology combines the small
depth of focus of an optical system with
vertical scanning to provide topographical
and color information from the variation of
focus. The main component of the system is
a precision optics containing various lens
systems that can be equipped with different
objectives, allowing measurements with
different resolution.

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