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Research Article

Cite This: ACS Appl. Mater. Interfaces XXXX, XXX, XXX−XXX www.acsami.org

Flexible Pressure-Sensitive Contact Transistors Operating in the


Subthreshold Regime
Sanghoon Baek,†,⊥ Geun Yeol Bae,‡,§,⊥ Jimin Kwon,† Kilwon Cho,*,‡ and Sungjune Jung*,†,‡

Department of Creative IT Engineering and ‡Department of Chemical Engineering, Pohang University of Science and Technology
(POSTECH), 77 Cheongam-Ro, Nam-Gu, Pohang 37673, Republic of Korea
§
Intelligent Sustainable Materials R&D Group, Research Institute of Sustainable Manufacturing System, Korea Institute of Industrial
Technology, Cheonan-si 331-822, Chungcheongnam-do, Republic of Korea
*
S Supporting Information
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ABSTRACT: Organic thin-film transistor (TFT)-based pressure


sensors have received huge attention for wearable electronic
applications such as health monitoring and smart robotics. However,
there still remains a challenge to achieve low power consumption and
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high sensitivity at the same time for the realization of truly wearable
sensor systems where minimizing power consumption is significant
because of limited battery run time. Here, we introduce a flexible
pressure-sensitive contact transistor (PCT), a new type of pressure-
sensing device based on organic TFTs for next-generation wearable
electronic skin devices. The PCT consists of deformable S/D
electrodes integrated on a staggered TFT. The deformable S/D
electrodes were fabricated by embedding conducting single-walled
carbon nanotubes on the surface of microstructured polydimethylsiloxane. Under pressure loads, the deformation of the
electrodes on an organic semiconductor layer leads modulation of drain current from variation in both the channel geometry
and contact resistance. By strategic subthreshold operation to minimize power consumption and increase the dominance of
contact resistance because of gated Schottky contact, the PCT achieves both ultralow power consumption (order of 101 nW)
and high sensitivity (18.96 kPa−1). Finally, we demonstrate a 5 × 5 active matrix PCT array on a 3 μm-thick parylene substrate.
The device with ultralow power consumption and high sensitivity on a biocompatible flexible substrate makes the PCT
promising candidate for next-generation wearable electronic skin devices.
KEYWORDS: organic field-effect transistors, pressure sensor, electronic skin, active matrix, contact resistance,
gated Schottky contact, subthreshold operation, low power consumption.

■ INTRODUCTION
Organic thin-film transistors (TFTs) have enabled develop-
sensitivity but consume minimal power. Various types of
organic TFT-based pressure sensors have been investigated by
ment of numerous flexible products, including flexible displays, the modulation of different parameters of organic TFTs.10−14
ultrathin circuits, and wearable sensors.1−3 Their transforma- One representative approach modulates the effective electric
tional advantages such as flexibility, light weight, thinness, and field by exploiting a change of resistance typically from
biocompatibility have extended their potential to various pressure sensitive rubber, PSR, connected to the source (S) or
wearable sensor applications, such as biological and chemical drain (D) electrodes of individual organic TFT (one-
sensors,4 and physical sensors.5 Among them, organic TFT- transistor−one-resistor structure).10,11,15−20 Another approach
based pressure sensors that mimic the tactile sensing of the integrates a ferroelectric material (typically poly(vinylidene
human skin are promising candidates for wearable electronic fluoride trifluoroethylene)) into an individual organic TFT as a
skin (E-skin) technologies that include human−machine ferroelectric capacitor;14,21 however, their pressure sensitivity is
interfaces, health monitoring devices, and advanced prosthe- limited by the properties of the integrated PSR and of the
sis.6−8 For skin-like devices that sense spatial pressure, organic ferroelectric material. More recent approaches modulate the
TFTs can be fabricated into an array of sensor pixels addressed effective gate capacitance by incorporating a deformable
by an active matrix and can exhibit superior electrical dielectric layer such as microstructured elastomer (typically
characteristics such as fast read-out, high spatial contrast, and polydimethylsiloxane, PDMS) or air gap; this design achieves
minimal signal crosstalk.9 high sensitivity12,13,22,23 but consumes much power for
For the realization of truly wearable devices where
minimizing power consumption is significant because of Received: June 3, 2019
limited battery run time, organic TFT-based E-skins that Accepted: August 2, 2019
consist of an array of multiple sensor pixels must have high Published: August 2, 2019

© XXXX American Chemical Society A DOI: 10.1021/acsami.9b09636


ACS Appl. Mater. Interfaces XXXX, XXX, XXX−XXX
ACS Applied Materials & Interfaces Research Article

Figure 1. (a) 3D schematic diagram of the PCT consisting of deformable S/D electrodes integrated on the top of staggered organic TFT (without
S/D electrodes). (b) SEM image of a pyramidal the PDMS microstructure array with embedded SWNTs. Width = 30 μm and interval = 60 μm
[scale bar = 30 μm (left) and 100 μm (right)]. (c) SEM image of laser-patterned interdigitated S/D electrodes (deformable S/D electrodes).
Channel length, L = 90 μm, and width W = 8280 μm (scale bar = 200 μm). (d) Microscopic image (top view) of deformable S/D electrodes
integrated on the gated area of the staggered organic TFT (scale bar = 500 μm).

practical applications because of the height of the micro- strategically operate the PCT in the subthreshold regime
structures or a spacer for air gap which equals the dielectric where contact resistance is predominant because of gated
thickness (typically >10 μm). High operating voltage in the Schottky contact and suggest an approach to substantially
range of 20−100 V and power are necessary to demonstrate reduce power consumption while maintaining high sensitivity.
functioning systems. Several strategies to reduce operating As a proof of concept, we finally demonstrate a 5 × 5 active
power (<1 μW) have been suggested, but the resulting devices matrix PCT array with spatial resolution of 12.83 ppi,
have relatively low sensitivity (<1 kPa−1) when compared to comparable to that of human’s tactile sensing, for spatial
devices that have high operating power.24−26 Recently, a mapping of the applied pressure. The PCT illustrates the
polyelectrolyte dielectrics-based organic TFT-based pressure potential as a wearable E-skin in which low power
sensor has achieved both low voltage operation and high consumption and high sensitivity are vital.
sensitivity, but with the high value of detection limit (≈2
kPa).27 Therefore, achieving low power consumption and high
sensitivity simultaneously remains challenging in organic TFT-
■ RESULTS AND DISCUSSION
The PCT is a transistor that uses the change in contact
based E-skins. resistance and in the channel geometry under pressure to
Meanwhile, subthreshold TFT operation has recently control electrical behavior of the device. The device consists of
received significant attention as a solution to achieving a staggered organic TFT (without conventional metal S/D
ultralow power consumption in wearable devices and environ- electrodes) and deformable S/D electrodes (Figure 1a). Only
mental sensors to avoid the need for batteries.28−30 Lee and the deformable S/D electrodes differ from the conventional
Nathan29 reported Schottky barrier indium−gallium−zinc- staggered organic TFT structure of the bottom gate and top
oxide TFT operating near the off-state regime at a very low contact. The deformable S/D electrodes are integrated on the
power below 1 nW. The group also used inkjet printing to top of the staggered organic TFT, and they replace the
fabricate a Schottky barrier organic TFT and demonstrated its conventional rigid metal S/D electrodes. The deformable S/D
capability to achieve high-gain amplifier for the detection of electrodes deform when subjected to pressure, so drain current
electrophysiological signals.30 Other works also suggest ID varies with pressure.
approaches of reducing power by the strategic utilization of To fabricate the ultrathin staggered organic TFT, parylene C
device physics occurring at the subthreshold regime for was used for both the flexible substrate and the gate dielectric
wearable sensing applications.31,32 layer because of its low surface roughness and high dielectric
In this article, we introduce a flexible pressure-sensitive strength.33 Poly(N-alkyl diketopyrrolo-pyrrole dithienylthieno-
contact transistor (PCT) with low power consumption and [3,2-b]thiophene) (DPP-DTT) was used as the organic
high sensitivity. Inspired by the point-contact transistor, the semiconductor material because of its uniform surface
first solid-state transistor that uses Schottky barriers between morphology, good electrical performance, and air stability
metal wires and semiconductor junctions, we integrate an (Figure S1).34 To fabricate the deformable S/D electrodes, a
organic TFT with deformable electrodes composed of a conducting single-walled carbon nanotube (SWNT) was
conducting microstructured elastomer that deforms under embedded only at the surface of PDMS that was micro-
pressure. The device exploits the effects of pressure on the structured in a periodic pyramid shape of width = 30 μm,
channel geometry and contact resistance RC to control the height = 20 μm, and interval = 60 μm (Figure 1b). The
electrical behavior of the device. The relative importance of the SWNT-embedded PDMS was then laser-patterned to form
two effects are investigated both in the above-threshold regime interdigitated S/D electrodes (Figure 1c). The channel length
(>VTH) and in the subthreshold regime (<VTH). We L was 90 μm and the width W was 8280 μm. The laser
B DOI: 10.1021/acsami.9b09636
ACS Appl. Mater. Interfaces XXXX, XXX, XXX−XXX
ACS Applied Materials & Interfaces Research Article

Figure 2. (a) Side/projected-view schematic diagram of the PCT showing parameter changes upon pressure loading. (b) Microscopic images of the
contact area between deformable S/D electrodes and semiconductor under applied pressure (scale bar = 10 μm). (c) Contact length d and
corresponding channel geometrical parameter k = W/L change with applied pressure; bars: ±1 s.d., n = 3.

Figure 3. (a) Transfer characteristics with various applied pressures (0, 1.9, 10.3, and 38.7 kPa) where the threshold voltage at 0 kPa, VTH0 = −1.55
V. Drain voltage, VDS = −10 V. [Black: above-threshold regime (above-T), red: subthreshold regime (sub-T)]. (b) Relative current change (ΔI/I0)
with gate voltage (VGS) under various applied pressures (1.9, 10.3, and 38.7 kPa) where the maximum ΔI/I0 appears in sub-T (VGS = −1.2 V). (c)
ΔI/I0 as a function of applied pressure at different VGS (tangential slope: pressure sensitivity S). Bars: ±1 s.d., n = 3.

patterning process peeled off the embedded SWNT from the Figure 2a, when pressure is applied, W increases from the
surface of the pyramidal microstructure without damaging its initial width W0 to W0 + Δd, and L decreases from the initial
original shape. Lastly, the patterned SWNT-embedded PDMS length L0 to L0 − Δd. Therefore, the channel geometrical
was integrated on the top of the staggered organic TFT as the parameter k = W/L increases with pressure, resulting in
deformable S/D electrodes (Figure 1d). The staggered organic pressure dependence of drain current. Figures 2b and S2 show
TFT with the deformable S/D electrodes formed a transistor microscopic images of d of S/D contacts under different
that is sensitive to pressure. pressure. The contact length of the deformable S/D electrodes
The pressure detection of the PCT is based on the variation was measured from their contacts on a thin glass substrate
in contact length Δd of the deformable S/D electrodes on a upon each pressure load. The contact length extracted from
semiconductor layer when pressure is applied. As illustrated in the images varied from 2 to 9.5 μm during deformation at
C DOI: 10.1021/acsami.9b09636
ACS Appl. Mater. Interfaces XXXX, XXX, XXX−XXX
ACS Applied Materials & Interfaces Research Article

Figure 4. (a) ΔI/I0 as a function of the relative channel geometrical parameter change Δk/k0 in above-T and sub-T regimes. Blue dashed line: y =
x. (b) Normalized relative current change (ΔI/I0)/(Δk/k0) as a function of Δd at two different regimes; above-T and sub-T. (c) Schematic
diagram of the current crowding model of the conventional staggered organic TFTs and the conceptual diagram of the contact length (d = LOV)
change upon pressure in the PCT. (d) Positive threshold voltage (VTH) shift with applied pressure because of the reduction of the contact
resistance RC from the enlarged contact length (d = LOV). (e) Normalized changes in the drain current ID(1/L)/(ID(1/L1)) as a function of 1/L in
above-T and sub-T regimes. VDS = −10 V. Bars: ±1 s.d., n = 3.

increasing pressure loads from 0 to 21 kPa, and the normalized relative current change (ΔI/I0)/(Δk/k0) in the
corresponding change in k followed the same trend (Figure above-threshold regime quickly converged to 1, whereas that in
2c). subthreshold regime continued to increase with Δd. Therefore,
To assess the electrical response of the PCT, we measured the remarkable current increase in the subthreshold regime
ID of the PCT at pressures of 0−38.7 kPa. The transfer cannot be fully explained only by the pressure-sensitive
characteristics at different pressure loads are shown at Figure channel geometry variation.
3a. The initial current at 0 kPa I0, at gate voltage VGS = 10 V We attribute the high sensitivity in the subthreshold regime
was ∼10−6 A because of a short contact length of the to nonideally high contact resistance and its exponential
deformable S/D electrodes. Increasing the pressure load to reduction with pressure. The PCT is a type of a staggered
38.7 kPa, the on-current improved by approximately 10 times. organic TFT with deformable S/D electrodes, in which the
We observed that the dependency of ID on applied pressure charge transport can be explained by the current crowding
was most significant in the subthreshold regime. The relative model.35,36 In this framework of staggered configuration,
current change (ΔI/I0) showed drastic rise in the subthreshold increasing gate-to-electrode overlap length LOV, which equals
regime (VGS = −1.2 V) at various applied pressures (Figure the contact length d in the design (Figure 4c), along with
3b). Accordingly, the pressure sensitivity (S = (ΔI/I0)/ΔP) pressure, facilitates charge injection under the S/D electrodes,
drastically enhanced in the subthreshold regime at both low so RC decreases.37 A positive shift in VTH with increasing
(<1 kPa) and high (>10 kPa) pressure ranges (Figure 3c). In pressure is an evidence of such reduction of RC with enlarged
the low pressure range, S in the subthreshold regime (VGS = contact (Figure 4d), as has been reported previously.38 The
−1.2 V) was remarkably high (18.96 kPa−1) over a wide output characteristics confirm the change in RC (Figure S3).
pressure range (>5 kPa). Meanwhile, S in the above-threshold The relative weight of contact resistance with respect to total
regime (VGS = −10 V) remained low (1.31 kPa−1) and began resistance, however, varies with VGS because the Schottky
to saturate from <1 kPa. In the high pressure range, S barrier height is modulated by VGS. In the subthreshold regime,
significantly increased from 0.05 to 2.07 kPa−1 by subthreshold the contact resistance is particularly high because of high
operation. Schottky barrier,28 and it can critically affect the device
We investigated the reason for the pressure sensitivity to be characteristics in organic TFTs.39,40 Such high dominance of
so high in the subthreshold regime. To quantify how the the contact resistance in the subthreshold regime was verified
pressure-sensitive channel geometry affects ID change in each by observing the dependency of IDS on channel resistance RCH.
operating regime, we observed ΔI/I0 as a function of the IDS exhibited strong dependency of channel resistance in the
relative change in channel geometry Δk/k0 for both above- above-threshold regime, but a weak dependency in the
threshold and subthreshold regimes (Figure 4a). Given that subthreshold regime, when IDS was measured with channel
the function y = x indicates that ΔI/I0 is linearly proportional lengths varying from 90 to 360 μm (Figure 4e); this difference
to Δk/k0, the two sets of measurements show significantly indicates that RC is dominant over RCH in the subthreshold
different trends. In the above-threshold regime, ΔI/I0 followed regime. Therefore, we conclude that the substantial contact
the linear line; this result means that ID increase in this regime resistance in the subthreshold regime predominates the device
resulted mostly from the change in the channel geometry. characteristics, resulting in high pressure sensitivity.
However, in the subthreshold regime, ΔI/I0 far exceeds Δk/k0. We analyzed the limit of detection, durability, response time,
To exclude the channel geometry effect, ΔI/I0 was normalized and hysteresis of the PCT in the subthreshold regime. The
by Δk/k0 and plotted as a function of Δd (Figure 4b). The PCT responded to a low pressure of 12 Pa (Figure S4a), which
D DOI: 10.1021/acsami.9b09636
ACS Appl. Mater. Interfaces XXXX, XXX, XXX−XXX
ACS Applied Materials & Interfaces Research Article

Figure 5. (a) Microscopic image of each pixel of the PCT array. WL: word line; and BL: bit line. (Scale bar = 1 mm). (b) Photograph of the array
peeled off from a glass carrier. Total size: 25 mm × 20 mm, and thickness = 3 μm (scale bar = 1 cm). (c) Photograph of the flexible PCT array on
the back of the hand as a proof-of-concept of a wearable E-skin (scale bar = 2 cm). (d) Photograph of letter “E” (≈4 kPa) positioned over the 5 × 5
PCT array (scale bar = 5 mm). (e) Corresponding contour pressure map of the letter “E” in above-T and sub-T regimes.

corresponds to the pressure of mass of a salt grain (≈120 mg) mainstream design because of limited battery capacity. The
on an area of 1 cm2. The representative response of the device PCT suggests a way of achieving both low power and high
to gradually increase pressure loads from 1 to 30 kPa is shown sensitivity. Because only the deformable S/D electrodes differ
in Figure S4b. The measured response and relaxation times from the conventional organic TFT, a thin-film dielectric layer
were 140 and 60 ms, respectively, for an applied pressure of 1 (150 nm) could be used; therefore, operation at relatively low
kPa (Figure S4c). To evaluate the reversibility and durability of voltage (VD < 10 V) is possible unlike conventional organic
the device, we conducted cycle tests by applying and releasing TFT-based E-skins with thick (>1 μm) deformable dielectric
pressure of 10 kPa. Even after 5000 full cycles at 0.5 Hz, the layers.12,13,22,23 Moving forward, the key for ultralow power
device still operates reliably (Figure S4d). We monitored the consumption without sacrificing sensitivity was strategical
change in the drain current under loading/unloading pressure, subthreshold operation followed by the careful consideration
and no significant hysteresis was observed (Figure S5). of the device physics occurring in the subthreshold regime of
We demonstrated a skin-attachable 5 × 5 proof-of-concept organic TFTs, rather than just lowering the operating voltage.
active matrix PCT array (Figure S6). The pixel resolution Therefore, the PCT operating in the subthreshold regime is
between adjacent transistors is 1.98 mm, giving a spatial located at a highly desirable combination of ultralow power
resolution of 12.83 ppi which is comparable to that of the consumption (order of 101 nW) and high sensitivity (18.96
human skin for tactile sensing (≈14 ppi).41 An optical image of kPa−1) in a comparative plot of sensitivity versus power
four pixels is shown in Figure 5a. The “word line” is a bottom consumption of previously reported organic TFT-based E
gate line of the staggered organic TFT and acts as the row skins (Figure 6, Table S1).12−14,18,19,21−26,42−44,46−49 The
select; the “bit line” is a drain line and acts as the column static power consumption (Pstatic = ID·VD) was calculated from
select. A targeted pixel can be selected by the combination of the maximum ID in the pressure-sensing range and VD of the
the row and column section. All source electrodes were device found in the literatures. The achieved sensitivity is the
grounded through a via-hole formed by nano-pulsed laser current record high for ultralow power (down to order of 101
drilling and printing of silver inks. The array was fabricated on nW) organic TFT-based E-skins. We envision that the
the ultrathin (≈3 μm) parylene substrate to yield a skin-like
device (Figure 5b,c).
For spatial mapping of the applied pressure, a 3D-printed
stamp with a shape of letter “E” was used to apply a constant
pressure (≈4 kPa) on the array (Figure 5d). ID was measured
by biasing VDS = −10 V and VGS = −10 V for above-threshold
operation or −1.2 V for the subthreshold operation. A gray-
scale signal map visualizes the applied pressure (Figure 5e).
The PCT operated in the above-threshold regime yielded
rather low contrast between activated and nonactivated cells
with ΔI/I0 < 5 and power consumption of tens of microwatts.
However, when operated in the subthreshold regime, much
clearer contrast was observed because of high sensitivity of ΔI/
I0 ≈ 50, and the power consumption fell down to the order of
101 nW. All the 25 devices in the array showed reliable and
robust behaviors without failure.
For practical applications of the wearables in real-world, Figure 6. Sensitivity vs power consumption of the PCT compared to
minimizing power consumption should be considered as a representative organic TFT-based E-skins.

E DOI: 10.1021/acsami.9b09636
ACS Appl. Mater. Interfaces XXXX, XXX, XXX−XXX
ACS Applied Materials & Interfaces Research Article

subthreshold operating flexible contact transistor opens up new pulsed fiber laser with a pulse width of 2.5 ns and λ = 532 nm to serve
possibilities for wearable or skin-attachable electronic as deformable electrodes (drain electrodes were connected as bit
application where low power and high sensitivity are essential lines). The channel length was 90 μm and the channel width was
requirements. 8280 μm. The fabricated deformable electrodes were integrated on


the staggered organic TFT array to complete the active matrix of the
PCT.
CONCLUSIONS Electrical Characterization. Scanning electron microscopy
In conclusion, we introduced a flexible PCT, a new type of the (SEM) images were captured by using a Hitachi S-4800 operating
at a beam voltage of 3 kV. The dc characteristics of the transistors
pressure-sensing device for the realization of truly wearable were measured using a semiconductor parameter analyzer (Keithley,
devices where low power consumption and high sensitivity are 4200-SCS) under ambient conditions. The pressure-sensing capability
vital. The deformable S/D electrodes fabricated by embedding of the PCT was measured using a mechanized z-axis stage (Future
conducting carbon nanotubes on the surface of micro- Science, 0.1 μm resolution) and a force gauge (Mark 10, M7-05). The
structured PDMS were integrated on a staggered TFT to pressure was calculated by dividing the force by the size of the sensor
provide pressure sensitivity to the device. The deformation of (2.25 cm2). ID was measured in real time while applying constant VGS
the electrodes on an organic semiconducting layer modulates and VDS at various pressures. Spatial mapping of the 5 × 5 active
the channel geometry and contact resistance, resulting in matrix was plotted by measuring the drain current of each cell before
and after applying the pressure and calculating ΔI/I0.


pressure-dependent ID. By the strategic subthreshold operation
where contact resistance is predominant due to gated Schottky
contact, we achieved both ultralow power consumption (order ASSOCIATED CONTENT
of 101 nW) and high sensitivity (18.96 kPa−1). Finally, we *
S Supporting Information
demonstrated a 5 × 5 active matrix PCT array on a 3 μm-thick The Supporting Information is available free of charge on the
parylene substrate. Our PCT suggests the importance of ACS Publications website at DOI: 10.1021/acsami.9b09636.
contact behaviors in device physics of many organic TFT- Device characteristics of the staggered organic TFT;
based devices and provides a path for achieving ultralow power microscopic images of the contact area; output
consumption with high sensitivity simultaneously for the characteristics of the PCT; electrical responses of the
realization of wearable electronic devices.


PCT; hysteresis of the PCT; design of the active matrix
PCT array; and summary of previously reported organic
EXPERIMENTAL SECTION TFT-based E-skins (PDF)


Fabrication of the Staggered Organic TFT. PCTs were
fabricated on biocompatible flexible parylene C substrate. A parylene
C(diX C, KISCO Ltd.) layer (≈3 μm) was deposited by chemical
AUTHOR INFORMATION
vapor deposition (CVD, Obang Technology, OBT-PC300) on a Corresponding Authors
surfactant-treated glass substrate (Corning) to be peeled off afterward. *E-mail: kwcho@postech.ac.kr (K.C.).
Ti (3 nm)/Al (50 nm) word lines and ground lines were thermally *E-mail: sjjung@postech.ac.kr (S.J.).
evaporated using a shadow mask of the 5 × 5 active matrix with a
pixel area of 3.92 mm2, and a total area of 2 cm × 2.5 cm. A dielectric ORCID
layer (150 nm) of parylene C(diX C, KISCO Ltd.) was deposited by Sanghoon Baek: 0000-0003-1572-6018
CVD. DPP-DTT (M315, Ossila Inc.) dissolved in chlorobenzene (5 Jimin Kwon: 0000-0002-5213-1323
mg/mL) was then spin-coated at 3000 rpm for 60 s and annealed at Kilwon Cho: 0000-0003-0321-3629
100 °C for 30 min in a glovebox. Au (40 nm) contact pads for the
deformable S/D electrodes were thermally evaporated, and Sungjune Jung: 0000-0001-9258-0572
interconnection via-holes for connecting source contact pads to the Author Contributions
ground were formed using a pulsed green fiber laser (shot pulse width ⊥
S.B. and G.Y.B. contributed equally. The manuscript was
2.5 ns, λ = 532 nm). Then, the via-holes were filled by dispensing written through contributions of all the authors. All the authors
(Musashi Engineering, 350PC) Ag-precursor ink (TEC-IJ-060, have given approval to the final version of the manuscript.
InkTec) as a conductive metal ink and sintered at 100 °C for 30
min in an inert atmosphere. Notes
Fabrication of the Deformable S/D Electrodes. For the The authors declare no competing financial interest.
fabrication of microstructured elastomer which served as deformable
S/D electrodes, an Si mold patterned with pyramidal cavities was
prepared by photolithography and wet etching processes.45 The
surface was modified to be hydrophobic by treating with
■ ACKNOWLEDGMENTS
This work was supported by a grant (code no.
octadecyltrichlorosilane (Gelest); then, the mold was spray-coated 2015M3A6A5072945 and 2012M3A6A5055728) from the
with SWNT-dispersed solution [TUBALL, OCSiAl, SWNT conc. 0.3 Center for Advanced Soft Electronics under the Global
g/L and sodium dodecylbenzenesulfonate (SDBS) conc. 0.3 wt % in Frontier Research Program of the Ministry of Science and
deionized water (DIW)] by using an automated spray coater (Revo-S, ICT of South Korea, by the “IT Consilience Creative Program”
Korea). During coating, the temperature of the Si mold was 100 °C, (IITP-2019-2011-1-00783) supervised by IITP *Institute for
the feed rate of the solution was 0.4 mL/min, and the air pressure for Information & Communications Technology Promotion).


atomizing was 0.3 MPa. To remove the SDBS, the mold was left in
DIW at 60 °C for 1 h, then dried at 50 °C in a vacuum oven for 1 h.
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