Refrigerating

type dryer
Desiccant

Electro pneumatic regulator

type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
 Components for air preparation and pressure adjustment / F.R.L. unit / others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Overview Compact
F.R.
Components controlling air Precise
pressure and flow rate regulator
F.R.L.
electrically. (Related
products)
Clean
Features F.R.
Electro
(1) High precision / quick pneumatic
regulator
response system Air
booster
Controlling pressure, flow
Speed
rate continuously according control valve
to applications. Silencer
(2) Changes pneumatics lines
Check valve
Pressure setting for / others

regulators in pneumatic Joint

/ tube
lines is enabled with using a Vacuum
remote computer control, filter

etc. Thrust/speed, etc., of Vacuum

regulator
cylinder can be flexibly Suction
controlled. C O N T E N T S plate
Magnetic
spring buffer

Product introduction 714 Mechanical

pressure SW
Series variation 716 Electronic
pressure SW
Applications 718
Contact / close
Safety precautions 720 contact conf.
SW

Air sensor
Digital electro pneumatic regulator
Product introduction 734 Pressure SW
for coolant
 Solenoid valve type medium flow (EVD-1000) 736 Small
flow sensor
 Solenoid valve type large flow (EVD-3000) 740 Small
flow controller
Electro pneumatic regulator
Flow sensor
 Solenoid valve type medium flow (EV2000) 760 for air

 Solenoid valve type vacuum (EV2100V) 771 Flow sensor

for water
 Solenoid valve type small flow (EV0000) 765 Total air
system
 Compact solenoid valve type (EVS) 768 Total air
system
Thin electro pneumatic regulator (Gamma)

Product introduction 776 Ending

 Reduced wiring manifold type (MEVT) 778

F.R.L. unit

Technical data 789

Manifold specification sheet 798
Proportional control valve
 Proportional solenoid method (3AP/2AF/3AF) 800
 Controller (APC) 804
Interface
 Interface (PI) 808

713
 Complying with FA and FMS with
Refrigerating
type dryer
proportional control and systematization. Refrigerating
type dryer
Desiccant
type dryer
High polymer
Realize highly advanced electronic control. Desiccant
type dryer
High polymer
membrane membrane
type dryer type dryer

Air filter Air filter

Auto. drain Auto. drain

/ others / others
F.R.L. F.R.L.
(Module unit) (Module unit)
F.R.L.
Pressure controls based on proportional control Proportional pressure controls for advanced use F.R.L.
(Separate)
Compact Proportional control technology is at the core of Pro- Proportional pressure controls enable the pneu-
Proportional pressure control system with wide potential (Separate)
Compact
F.R. F.R.
portional pressure controls. In simple terms, this tech- matic cylinder's speed, thrust, position, etc., to
Precise nology attains an output and flow rate proportional to be freely controlled. Continuous high accuracy Precise
regulator regulator
F.R.L. the input voltage (current), and input and output are variable device control, remote pressure setting F.R.L.
(Related (Related
products) linearly proportional. Using this technology expands ap- of pneumatic lines, and use in FA and FMS are products)
Clean plications of conventional ON-OFF control pneumatic accurately realized. The features of this system 䢇 Electro-pneumatic regulator Clean
F.R. F.R.
Electro
components to enable continuous analog control. are well expressed in the flexible robot finger. Electro
pneumatic pneumatic
regulator regulator
Air 䢇 Static diagram of proportional control valve input to control 䢇 Block diagram of control concept in machinery and equipment Air
booster booster
Speed 0.5 Speed
control valve control valve
Setting pressure (MPa)

0.4 Control device Control device Actuator

Silencer Silencer
Microcomputer solenoid valve Cylinder
Check valve 0.3 controller Work 䢇 Pressure proportional applications 䢇 Proportional valve & controller Check valve
Relay Solenoid (mechanisms)
/ others Programmable / others
0.2 controller Motor driver Motor 䢇 Spot welding gun pressure control
Joint Sensors Joint
/ tube 䢇 Grinder pressure control / tube
0.1 䢇 Tension control of paper, cloth or film, etc. 䢇 Semiconductor manufacture
Vacuum Vacuum
filter Feedback signals filter
0
Vacuum
2 4 6 8 10 䢇 Balancer and lifter pressure control Vacuum
Input voltage (VDC)
regulator 䢇 Die cushion control for press 䢇 Paint and gas industry regulator
Suction 䢇 Air brake pressure control Suction
plate
䢇 Robot handling force control 䢇 Pressure switch plate
Magnetic Proportional pressure control system 䢇 Fluid and powder flow control using
spring buffer 䢇 Chemistry / powder Magnetic
spring buffer
pneumatic pressure
Mechanical The proportional pressure control system includes Mechanical
pressure SW pressure SW
an interface that connects with the host control-
Electronic 䢇 Flow rate proportional control applications 䢇 Food processing Electronic
pressure SW ler (programmable controller, etc.), the regulator pressure SW
Contact / close and proportional valve that conduct proportional 䢇 Cylinder, pneumatic motor speed control Contact / close
contact conf. contact conf.
SW control, and the pressure switch that also func- 䢇 Cylinder positioning control SW
䢇 Various applications using air flow rate control 䢇 Transportation / precise
Air sensor tions as the system sensor. These can be used 䢇 Interface Air sensor
(e.g. : Temperature control of film, alminium foil, etc.)
in combination or independently based on the
Pressure SW Pressure SW
for coolant purpose and application. 䢇 Pulp / paper-making for coolant
Small Small
flow sensor 䢇 Proportional pressure control system flow sensor
Small Small
flow controller
Host controller Interface with Proportional control Auxiliary 䢇 Textile industry flow controller
other system components
Flow sensor Digital electro Flow sensor
for air for air
pneumatic
Flow sensor Flow sensor
for water for water
Total air
system
Electro
Needs field Applicable field Control field Line-up Total air
system
Total air pneumatic Total air
system system
(Gamma) regulator (Gamma)
䢇 Continuous 䢇 FA 䢇 Tensile control 䢇 Variable continuous
Ending Ending
PLC
control of air pressure
䢇 Flexible 䢇 FMS 䢇 Pressurization control

F.R.L. unit
Interface Pressure switch
䢇 Soft touch 䢇 Replacing human sense of automation 䢇 Tension control 䢇 Various continuous
control air flow rate
䢇 Detailed 䢇 Higher control 䢇 Blow control
Proportional
control valve Other sensors 䢇 Precise 䢇 Remote control
and controller
䢇 Minute

Serial Thin electro

communication pneumatic
PLC regulator

Read the safety precautions before starting use.

714 715
 Series Electro-pneumatic regulator Electro-pneumatic regulator
Refrigerating
variation Series variation
Refrigerating
type dryer
䡬
䡩 : Appropriate type dryer
Desiccant
type dryer
䡬 : Sufficient Desiccant
type dryer
High polymer Input Input Control pressure Step response Maximum flow rate Linearity Hysteresis High polymer
Control method

membrane Wiring method Port size Power voltage Applications membrane

type dryer signal signal range (Loadless) ( /min. (ANR)) (%F.S.) (%F.S.) type dryer

0 to 600kPa and over

Serial transmission

11 to 16 VDC

Suction of work
D sub-connector

FA connector

Pilot pressure control

Termin.al box

Parallel 10bit
-101.3 to0kPa

Page
Variable resistance input
Air filter Air filter

DIN terminal

0 to 100kPa
0 to 500kPa
0 to 900kPa

±0.3 or less
±0.5 or less
±1.5 or less
±2.5 or less
0.1s or less
0.2s or less
0.6s or less
0.8s or less
Push-in ø4
Push-in ø6

4-20mADC
Model name

0-10 VDC

0.4 or less
0.5 or less
1.0 or less
3.0 or less
2s or less
100 VAC
200 VAC

0-5 VDC

7 or less
24 VDC

Tension
Tension
Auto. drain Auto. drain

Rc1/4
Rc3/8
/ others / others

1500

Blow
Non

120
150
400
500
700
800
M5
F.R.L. F.R.L.

2
6
(Module unit) (Module unit)
F.R.L. EVD-1000 Functions include pressure display F.R.L.
(Separate) and error display and direct memory. (Separate)
Compact The 10-bit parallel model has been 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䡬 䡩 䡬
䡩 䡬 䡩 736 Compact
F.R. added to the input signal type. F.R.
Precise Precise
regulator regulator
EVD-3000 Functions include pressure display
F.R.L. F.R.L.
(Related and error display and direct memory. (Related
products) products)
The 10-bit parallel model has been 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䡬 䡩 䡬
䡩 䡬 䡩 740
Clean added to the input signal type. Flow Clean
F.R. F.R.
is large compared to the EVD-1000.
Electro Electro
pneumatic pneumatic
regulator EV2000 Feedback control with semiconductor regulator
Air pressure sensor and electronic control Air
booster circuit is used. This electro pneumatic 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䡬 䡩 䡬
䡩 䡬 䡩 760 booster
Speed regulator allows continuous and precise Speed
Solenoid valve type

control valve controlling air pressure by electric signals. control valve

Silencer EV2100V Feedback control with semiconductor Silencer

pressure sensor and electronic control
Check valve circuit is used. This electro pneumatic 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䡬
䡩 771 Check valve
/ others / others
regulator allows continuous and precise
Joint controlling vacuum by electric signal. Joint
/ tube / tube
Vacuum EV0000 Feedback control with semiconductor Vacuum
filter pressure sensor and electronic control filter
Vacuum
circuit is used. This pneumatic proportional 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䡩 䡬 䡬
䡬 765 Vacuum
regulator pilot valve allows continuous and precise regulator
Suction
controlling air pressure by electric signals. Suction
plate plate
EVS Smaller than conventional models.
Magnetic Body extending cable is used for this Magnetic
spring buffer spring buffer
pneumatic proportional pilot valve to 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䡩 䡬 䡬
䡬 768
Mechanical achieve ultimate convenience and Mechanical
pressure SW pressure SW
space saving.
Electronic Electronic
pressure SW MEVT Reduced wiring thin shape. Ultimate pressure SW
Contact / close space saving due to manifold. Thin Contact / close
contact conf. type electro pneumatic regulator with 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䢇 䡩 䡬 䡬
䡬 776 contact conf.
SW SW
higher accuracy and performance than
Air sensor conventional mechanism. Air sensor

Pressure SW 3AP Pressure control type with regulator Pressure SW

for coolant function. Enabling continuous variable for coolant
Small control for thrust. Speed, cushion 䢇 䢇 䢇 䢇 *2 䢇 䢇 䢇 䢇 䢇 䡬 䡬
䡩 䡬 800 Small
flow sensor effect, etc. for cylinders. flow sensor
Small Small
Proportional solenoid method

flow controller flow controller

2AF/3AF Flow rate control type with regulator Max. effective sectional area (mm)
Flow sensor function. Enabling continuous variable Flow sensor
for air 20 for air
control for thrust. Speed, cushion 16
Flow sensor effect, etc. for cylinders. 2AF Flow sensor
for water 10 for water
Total air 䢇 䢇 䢇 䢇 *2 5 䢇 䢇 䡬
䡩 800 Total air
system system
17
Total air Total air
system 11 system
(Gamma) 3AF (Gamma)
6
Ending 3 Ending

APC Amplifier to control current of proportional

F.R.L. unit
valve with 0 to10V of input signal. At the Control of
same time, dither is added to impressed 䢇 䢇 䢇 䢇 proportional 804
current to achieve the max. performance control valve
of proportional valve with PWM method.

PI Interface components to easily connect

Interface

to proportional control valve. Digital Control of

8 bit and BCD input is converted to 䢇 䢇 䢇 proportional 808
analog signals. control valve

*1: Interface (PI Series) and pressure controller (PPS2 Series; refer to page 1154) are available only for 0 to 10 V input components (including APC).
* 2: Controlled via controller (APC Series). (Available only for 0 to 10V input.)

716 717
 Basic system functions
Pneumatic proportional control components
Refrigerating
type dryer attain an output and flow rate proportional to
Desiccant the input voltage or current. The input voltage
type dryer and output pressure/flow rate must be lineally Pressure
High polymer switch
membrane proportional. To achieve this, the pressure and
type dryer
flow rate are varied with electric signals, and
Air filter
an electric controller enables variable continu- Digital electro
Host Electro pneumatic
Auto. drain ous control. When used as a system, the cir- controller pneumatic regulator

Loads
/ others regulator
cuit is configured so signals from the host con- (PLC)
F.R.L. interface Electro
(Module unit) troller are converted to 0 to 10 VDC signals, pneumatic
F.R.L. etc., by the D/A converter (interface). These regulator
(Separate) signals operate the proportional control valve
Compact via the controller, controlling the thrust and Proportional Proportional
F.R. valve valve
speed of each actuator, etc. Highly accurate controller
Precise
regulator control is possible by feeding back the state
F.R.L. with sensors as required.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Examples of using proportional pressure controls
Speed
control valve

Silencer

Check valve
/ others
 Fluid discharge control  Chemical drip prevention control  Micro position control
Joint
/ tube
Vacuum
filter
Vacuum
regulator Bellows
Suction Pump
plate
CKD
Magnetic
spring buffer air operated valve
EV0000 Series CKD
Mechanical
pressure SW EV2500 automatic suck-valve
EVD
Electronic
pressure SW
Contact / close Tank
contact conf. Index table
SW EV0000 Series
Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor  Fluid pressure control  Balancer tension control  Grinding force control
for air
EV2500
Flow sensor EV2500 Controller
for water Controller EVD
EVD
Total air Cylinder
system
Total air
system
(Gamma) Large flow rate
regulator
Ending

APC Solenoid valve

3AP2
EVD
Nozzle Exhaust Grindstone
Power supply Setting signal
EV2500
EVD Air pump
Motor

718
 Electro-pneumatic regulator
Applications

Examples of using proportional pressure controls Refrigerating

type dryer
Desiccant
type dryer
High polymer
 Tension control using air brakes  Air turbine speed control membrane
type dryer

Air filter

Magnetic tape Auto. drain

/ others
Air brake F.R.L.
EVD (Module unit)
EV2500 Air turbine
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
EVD F.R.
EV2500
Electro
pneumatic
regulator
Air
booster

 Shock free cylinder operation  Speed cushion control  Air flow control Speed
control valve

Silencer

Check valve
/ others
Joint
APC / tube

3AF Vacuum
Switchover signal filter
APC 2AF
APC Vacuum
Solenoid valve regulator
Regulator Suction
Control circuit plate
APC
Exhaust Magnetic
Power supply spring buffer
Power supply
Mechanical
2AF pressure SW
Power supply Speed control signal
Electronic
pressure SW
Contact / close
contact conf.
SW
 Applications for fluid pressure feeding  Fixing such as lead frame, etc.,  Chip part assembly Air sensor

Pressure SW
for coolant
EV2500 EVD
PPS2 EVD Small
flow sensor
Small
flow controller
Flow sensor
for air

Chip Flow sensor

Lead frame for water
Total air
24 VDC system
Total air
system
(Gamma)

Ending
 Leakage inspection
F.R.L. unit

EVD FSM2

Resin

719
 Pneumatic components(Electro-pneumatic regulator)

Safety precautions
Refrigerating Always read this section before starting use.
type dryer
Refer to Intro 67 for general precautions for pneumatic components, and to
Desiccant
type dryer " Safety precautions" in this section for detailed cautions pertaining to each series.
High polymer
membrane
type dryer Electro-pneumatic regulator
Air filter

Auto. drain
/ others
Design & Selection
F.R.L.
 When releasing secondary control pressure, such
(Module unit)
F.R.L.
CAUTION
as an air blowing, to the atmosphere, pressure could
(Separate)
 Response is affected by working pressure and load
Compact fluctuate depending on piping conditions and flow
F.R. volume. If repeatability with stable responsiveness
conditions. Test under actual working conditions, or
Precise is required, install a regulator in the proceeding stage.
regulator consult with CKD before using this method.
F.R.L.
(Related
products)  Take the following countermeasures to prevent mal-
 When selecting dryer, air filter, oil mist filter or regu-
Clean function caused by noise.
F.R. lator, select a device with a flow rate higher than
Electro  Insert a line filter in the AC power supply line.
pneumatic that used by proportional pressure controls.
regulator  Use a surge suppressor, such as a CR or diode on the load (so-
Air
booster lenoid valve, relay, etc.), to remove noise where it is generated.
 Separate wiring to proportional pressure controls from  This product has moving parts due to its operation
Speed
control valve strong magnetic fields. and structure, and the accuracy, etc., can change
Silencer  Connect wiring to proportional pressure controls with a shield wire. over time. Before starting use, evaluate the part in
 Ground the shield wire on the power supply side. Note that the system. Depending on the operation frequency,
Check valve
/ others the shielding wire for the serial transmission communication use this product as a periodic maintenance part, etc.
Joint cable must be treated based on communication specifications.
/ tube
Vacuum
filter Installation & Adjustment
Vacuum
regulator
Suction CAUTION when screwed in. This could cause the tape to enter the
plate pneumatic components and lead to faults.
Magnetic
 Do not use the product where the product is exposed to
spring buffer direct-sunlight or may come in contact with water or oil.  Correct pressure control is not possible if the ex-
Mechanical
pressure SW haust port is plugged. Release this port to the atmo-
Electronic  Sufficiently flush air pipes before connecting to pro- sphere.
pressure SW
Contact / close
portional pressure controls. Prevent pipe from catch-
contact conf. ing tips of sealing tape when piping.
SW  Apply adequate torque when connecting pipes.
Air sensor  To prevent air leakage and screw damage.
Pressure SW
 Mount the product as indicated in the individual pre-  First tighten the screw by hand to prevent threads, then
for coolant cautions. use a tool.
Small
flow sensor
Small  When connecting pipes, wrap sealing tape in the
flow controller
opposite direction from threads starting 2 mm inside
Flow sensor
for air from the end of piping threads.
Flow sensor  If sealing tape protrudes from pipe threads, it could be cut
for water
Total air
(Recommended tightening torque)
system Tightening torque N·m
Port thread
Total air
system M5 1 to 1.5
(Gamma)
Rc1/4 6 to 8
Ending
Rc3/8 13 to 15

 When using the CKD cable option M12 connector type,

tighten with the appropriate torque. (EV, EVS Series)
Recommended tightening torque 0.4 to 0.49 N·m

During Use & Maintenance

CAUTION
 Disassembling the regulator could result in problems.
Operation after disassembly cannot be guaranteed.
 Do not use with the cover and housing removed.
 An electronic board is assembled inside. Using the product
with the cover or housing removed could result in unex-
pected accidents or trouble.

720
 EVD Series
EVD Series Refrigerating
type dryer
Desiccant
Design & Selection type dryer
High polymer
membrane
type dryer
 Take the following countermeasures to prevent mal-
WARNING Air filter
function caused by noise.
 Understand compressed air features before design- Auto. drain
 Insert a line filter in the AC power supply line. / others
ing a pneumatic circuit.
 Use a surge suppressor, such as a CR or diode on the load F.R.L.
 The same functions as mechanical, hydraulic, and electrical (solenoid valve, relay, etc.), to remove noise where it is (Module unit)

methods cannot be anticipated if instantaneous service inter- generated. F.R.L.

(Separate)
ruption and holding are required during an emergency stop.  Separate wiring to the EVD device from strong magnetic Compact
 Pop-out, air discharge, or leakage due to air compression fields. F.R.
and expansion could occur.  Connect wiring to EVD device with a shield wire. Precise
regulator
 Confirm that the product will withstand the working  Ground the shield wire on the power supply side. F.R.L.
(Related
environment.  Keep the power supply cable as short as possible. products)
 Do not share power with an inverter or components caus- Clean
 This product cannot be used in an environment containing cor- F.R.
ing motor noise, etc. Electro
rosive gas, chemical liquids, solvents, water or steam. If wa- pneumatic
 Do not lay the power wire, signal wire, and other power regulator
ter, oil, or metal chips (spatter or cutting chips, etc.) could come
cables in parallel. Air
in contact with the product, provide appropriate protection. booster
 A gauge pressure type pressure sensor is built-in. To pro- Speed
tect the sensor, do not seal the product, and make sure
 When the current input type is wired, the power control valve

that air can be introduced. ground and signal common are shared.  Silencer

 This product cannot be used in a flammable environment.  When driving several EV units with one PLC and D/A unit, Check valve
/ others
depending on the D/A unit circuit, wiring could prevent the
 Care must be taken to the electrical circuit during Joint
correct signal from being input. Consult with the PLC maker. / tube
emergency stop and cylinder operation, etc., during
Vacuum
a service interruption.  The current input type can be used with input signal filter
Vacuum
 Install a "pressure switch" and "shut-off valve" on 1 to 5V, but as opposed to other voltage input types, regulator

the device's compressed air supply side.  input impedance is small (250Ω). Use an appropri- Suction
plate
 The pressure switch uses disable operation if set pressure ate voltage generator.
Magnetic
cannot be reached. The shut-off valve exhausts compressed spring buffer

air in the pneumatic circuit, and prevents accidents caused  Poor air quality will worsen the characteristics and Mechanical
pressure SW
by operation of the pneumatic devices by residual pressure. adversely affect the durability. Electronic
pressure SW
 If the regulator is left standing with power off and Contact / close
primary pressure applied, secondary pressure could  The air quality must satisfy the clean dry air “ISO contact conf.
SW
rise to the primary pressure level. Due to the struc- 8573-1 Class 1.3.2 or equivalent” or “JIS B 8392-1
Air sensor
ture, a small amount of air is consumed from the Class 1.3.2 or equivalent”.
Pressure SW
EXH port when secondary pressure is generated.  For the pneumatics source, always supply clean air, from for coolant

Set the primary regulator to 0 or use a valve on the which solids, moisture and oil have been sufficiently re- Small
flow sensor
primary side to shut off the supply source when not moved with a dryer, air filter and oil mist filter.
Small
using the regulator. Do not use lubricated air as it will adversely affect the char- flow controller
acteristics. Flow sensor
for air
CAUTION Air filter Regulator
5μm Flow sensor
 Indicate the maintenance conditions in the device's for water
Total air
instruction manual. system

 The product's function can drop markedly with working sta- Air dryer Oil mist filter (Pressure switch) Total air
system
(Oil removing) (Gamma)
tus, working environment, and maintenance, and can pre- (Recommended air circuit)
vent safety from being attained. With correct maintenance, Ending
the product functions can be used to the fullest.  When the secondary pressure is lowered with an input sig-
F.R.L. unit

 Use the constant voltage power supply.
 Check leakage current to prevent malfunction caused
by leakage current from other fluid control components.
 When using a programmable controller, etc., leakage cur-
rent could cause the electro pneumatic regulator to mal-
function.
For 24 VDC 1.8mA or less
 Response is affected by working pressure and load
volume. If repeatability with stable responsiveness
is required, install a regulator in the proceeding stage.
nal, etc., the secondary air passes through the product and
is discharged from the EXH port. Contamination on the
secondary piping and the inside of the load will have an
adverse effect on the characteristics, etc. Thus, keep the
inside of the piping as clean as possible.
 If power is turned OFF under pressure, secondary
pressure is held.
 To discharge pressure, lower set pressure with an input
signal and then turn OFF, or use a shut-off valve, etc. This
holding state is not guaranteed for a long time.

721
 EVD Series
Refrigerating
type dryer
Design & Selection
Desiccant
type dryer  Working environment
CAUTION
High polymer Do not use the product where the product is exposed
 Primary pressure:
membrane
type dryer
to direct-sunlight or may come in contact with water
Air filter For 100kPa pressure specifications, make sure that or oil, etc. Consult with CKD on specifications when
Auto. drain
the pressure is not less than “set secondary pres- using outside designated specifications or for spe-
/ others sure + 50kPa”. cial applications.
F.R.L.
(Module unit) For 500 or 900kPa pressure specifications, make
F.R.L. sure that the pressure is not less than “set sec-  Drip-proof environment
(Separate)
ondary pressure + 100kPa”. This product’s protective structure is equivalent to
Compact
F.R.  Product life is shortened if primary pressure is not supplied IP40. Do not install this product where water, salt,
Precise for a long time while power is on. Do not use this way. dust, or swarf is present or in a pressurized or de-
regulator pressurized environment. Use where the temperature
F.R.L.
(Related
 When releasing secondary control pressure, such changes greatly or where high humidity environment
products) as an air blowing, to the atmosphere, pressure could could cause damage through dew condensation.
Clean
F.R. fluctuate depending on piping conditions and flow
Electro conditions. Test under actual working conditions, or  Even when pressure is set to 0 MPa at 1%F.S. or less
pneumatic
regulator
consult with CKD before using this method. of maximum control pressure, secondary pressure is
Air
booster not completely released. If precise 0 MPa is required,
 When selecting dryer, air filter, oil mist filter or regu- bleed the secondary side or install a 3-way valve on
Speed
control valve lator, select a device with a flow rate higher than the secondary side to switch the secondary side to
Silencer that used by proportional pressure controls. atmospheric pressure.
Check valve
/ others
Joint
/ tube Installation & Adjustment
Vacuum
filter
DANGER trostatic discharge among personnel or tools before
Vacuum
regulator and during work. Connect and wire bending resis-
Suction
Installation tant material, such as robot wire material for mov-
plate
able sections.
Magnetic  Use power voltage and output within the specified
 Do not use this product at levels exceeding the power
spring buffer
voltage. Using voltage exceeding the specified volt-
Mechanical
pressure SW age could cause malfunctions, controller damage, voltage range. If voltage exceeding the specified
Electronic electrical shock, or fire. range or AC power (100 VAC) is applied, the con-
pressure SW
Contact / close
Do not use a load exceeding the output rating. Failure troller could break or burn.
contact conf. to observe this could result in output damage or fire.
SW
 Do not short-circuit the load. The product could break
Air sensor
WARNING or burn.
Pressure SW
for coolant Wiring
Small
CAUTION
flow sensor
 Check the connector pin and cable conductor wire color Installation
Small
when wiring. Incorrect connections could cause dam-
flow controller
 Mounting attitude
Flow sensor age, problems, or malfunctions. Check the wire color
for air There are no restrictions to the mounting direction
against instructions and precautions before wiring. or mounting attitude, but provide sufficient space
Flow sensor
for water
 Check wiring insulation. around the product for operation, mounting, removal,
Total air
system Check that wires do not contact other circuits, that wiring and piping work.
Total air
system no ground faults occur, and that the insulator be-  Install an air filter just before the pneumatic compo-
(Gamma)
tween terminals is not defective. Overload could nent in the circuit.
Ending damage the product.
 Install so that the exhaust port is not blocked and
 Use a stabilized DC power supply, within the speci- provide sufficient space for exhaust.
fied rating, insulated from the AC power supply. Not
insulating the power supply could cause electrical
shock. If power is not stabilized, the peak value could
exceed the rating and damage the product or re-
duce precision.
W
Pilot
 Stop the control device and equipment and turn power exhaust air
off before wiring. Starting operation suddenly could
cause unpredictable operation and hazards. Conduct
an energized test with control devices and equipment
stopped. Be sure to discharge any accumulated elec-
Main exhaust air 5mm and over
722
 EVD Series
Installation & Adjustment Refrigerating
type dryer
Desiccant
 The D-sub connector’s rotating mechanism is not  The D-sub connector has a 90˚ rotating mechanism. type dryer
designed for use in moving applications. Use it at When fitting the D-sub connector, press it in by hand High polymer
membrane
type dryer
the top or side, not inclined. Fix any cables that could so that it faces the top or side.
Air filter
move in place.
Press down
securely with the Auto. drain
/ others
hand when inserting
the connector !! F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
() () ()  Correct pressure control will not be possible if plugged booster

into the exhaust port. Always release to the atmo- Speed

control valve
sphere.
Silencer
CAUTION
Check valve
Piping  Apply adequate torque when connecting pipes. / others

 To prevent air leakage and screw damage. Joint

 Do not remove the port seal until just before piping  First tighten the screw by hand to prevent threads, then
/ tube
Vacuum
the product. use a tool. filter

 Removing the port seal from the piping port before piping  The electric components are assembled onto main body Vacuum
regulator
work starts could let foreign matter enter from the piping with two hooks on the housing side. Carefully handle so
Suction
port and cause faults or faulty operation. that excessive force is not applied. plate
Magnetic
spring buffer
 Flash the pipe carefully before installation.
Prevent pipe from catching tips of sealing tape when (Recommended tightening torque) Mechanical
pressure SW

piping. Port thread Tightening torque N·m Electronic

pressure SW
Rc1/4 6 to 8
Contact / close
Rc3/8 13 to 15 contact conf.
 When connecting pipes, wrap sealing tape in the SW

opposite direction from threads starting 2 mm inside Air sensor

 When supplying compressed air for the first time af-
from the end of piping threads. Pressure SW
ter connecting pipes, do not apply high pressure for coolant
 If sealing tape protrudes from pipe threads, it could be cut
suddenly. Small
when screwed in. This could cause the tape to enter the flow sensor
pneumatic components and lead to faults. Small
 Before supplying compressed air after connecting flow controller

pipes, check that there are no air leaks at any pipe Flow sensor
for air
connections. Flow sensor
 Apply a leakage detection agent on pipe connections with for water
Total air
a brush, and check for air leaks. system
Total air
 Lock the D-sub connector so that it will not be dislo- system
(Gamma)
cated. Fix the fixed bed in place with a tool, etc., Ending
when releasing the screw lock.
F.R.L. unit

Wiring Driver

 The optional shield cable connector is a shielded

wire. Fix with a tool before loosening
the screw lock !!
 Insulate wires not being used so that they do not contact
other wires, including shielded wires. Unintended connec-
tion to the ground, etc., could cause malfunction or dam-
age the product. Tool

 Insert and fit the D-sub connector securely on the

back.

723
 EVD Series
Refrigerating
type dryer
During Use & Maintenance
Desiccant
type dryer  If abnormal operation occurs, turn power and air pres-
High polymer
WARNING
sure sources off immediately and stop use.
 Do not supply other than compressed air.
membrane
type dryer

Air filter
 Use this product within the working pressure range.
Auto. drain
 Use clean compressed air that does not contain cor-
/ others rosive gases.
F.R.L.  This product does not start pressure control for two
(Module unit)
 Use “ISO 8573-1 Class 1.3.2 or equivalent” or “JIS seconds or so after power is turned on to complete
F.R.L.
(Separate)
B 8392-1 Class 1.3.2 or equivalent” clean dry air self-diagnostics. Provide a control circuit and pro-
Compact
from which oil has been removed. gram that ignores signals for at least two seconds
F.R.
Precise
after power is turned on.
regulator
F.R.L.
 Be sure to turn power off, stop supplied compressed
(Related air, and check that there is no residual pressure be-  If the output setting value is changed, control sys-
products)
Clean fore starting maintenance. tem devices could operate unintentionally. Stop de-
F.R.
 This is required to ensure safety. vices before changing settings.
Electro
pneumatic
regulator
Air  Regularly inspect the product at least once a year or
booster
more, and confirm that it is operating correctly.
Speed CAUTION
control valve  This product uses a compact solenoid valve as the actua-
Silencer
 Plan daily inspections and periodic inspections to tor. The life may change according to the operation fre-
ensure that maintenance is correctly controlled. quency by pressure switching and the working conditions,
Check valve
/ others  If maintenance is not correctly controlled, the product's func- etc.
Joint tions could drop markedly and lead to a shortened life, The warranty term is set as one year or 3,000,000 repeated
/ tube
damage, malfunctions, faults, and accidents. operations, whichever is earlier, so use this as an inspec-
Vacuum
filter tion guideline.
Vacuum 1. Control of supplied compressed air pressure * The conditions for the 3,000,000 operations listed in the
regulator
Suction
 Is the set pressure supplied? Does the pressure gauge warranty are as follows.
plate indicate the set pressure during operation of the device? When the input signal which causes the control pressure
Magnetic to rise from zero to the maximum control pressure is re-
spring buffer
peatedly applied in steps. The working air quality in this
Mechanical
pressure SW case shall be clean compressed air from the recom-
Electronic Minimum Maximum
mended air circuit. The secondary side load capacity shall
pressure SW
(MIN) (MAX) be 300cm3
Contact / close
contact conf.
SW

Air sensor
 The case is made of resin. Do not use solvent, alco-
hol or any other cleaning agent to remove contami-
Pressure SW
for coolant
2. Control of pneumatics filter nation, etc., or the resin case could be corroded or
Small  Is the drain correctly discharged? damaged. Wipe contaminations with a well wrung
flow sensor
Is the bowl or element dirty? rag, etc., after soaked in weakened neutral deter-
Small
flow controller gent.
Flow sensor 3. Control of compressed air leaks from piping connec-
for air
tions
Flow sensor
for water  Is the state of the connection, especially at movable sec-
Total air tions, normal?
system
Total air
Leaks in piping could cause incorrect operation.
system
(Gamma)
4. Operational status control
Ending
 Are operations delayed? Is exhaust normal?

5. Control of pneumatic actuator operation

 Is operation smooth? Is the end stop state normal?
Is coupling with the load normal?

724
 EV Series
EV2000/EV0000/EVS000 Series Refrigerating
type dryer
Desiccant
Design & Selection type dryer
High polymer
membrane
type dryer
WARNING  Do not leave the product nonpressurized with power
Air filter
and input signals applied. Product life and proper-
 If the regulator is left standing with power off and Auto. drain
ties could be reduced. / others
primary pressure applied, secondary pressure could
F.R.L.
rise to the primary pressure level. Due to the struc-
 If an input signal exceeding the specified range, as (Module unit)
ture, a small amount of air is consumed from the F.R.L.
shown below, is applied the solenoid valve will op- (Separate)
EXH port when secondary pressure is generated.
erate excessively and can cause life or characteris- Compact
F.R.
tics to degrade. Always use within the specified
CAUTION range.
Precise
regulator
 Poor air quality will worsen the characteristics and F.R.L.
(Related
0-10 V type 0-5 V type 4-20mA type products)
adversely affect the durability.
Less than 0V Less than 0V Less than 4mA Clean
Over 10V Over 5V Over 20mA F.R.

 The air quality must satisfy the clean dry air “ISO Electro
pneumatic
regulator
8573-1 Class 1.3.2 or equivalent” or “JIS B 8392-1  When the current input type is wired, the power Air
Class 1.3.2 or equivalent”. ground and signal common are shared.
booster
Speed
 For the pneumatics source, always supply clean air, from  When operating several EV units with one PLC and D/A, control valve
which solids, moisture and oil have been sufficiently re- depending on the D/A unit circuit, wiring could prevent the Silencer
moved with a dryer, air filter and oil mist filter. correct signal from being input. Consult with PLC maker.
Do not use lubricated air as it will adversely affect the char- Check valve
/ others
acteristics.  The current input type can be used with input signal Joint
/ tube
1 to 5 V, but as opposed to other voltage input types, Vacuum
Air filter Regulator input impedance is small (250Ω). Use an appropri- filter
5μm
ate voltage generator. Vacuum
regulator
Suction
 With the EV2000 Series, even if pressure is set to plate
Air dryer Oil mist filter (Pressure switch) Magnetic
(Oil removing) 0MPa, secondary pressure is not released and re- spring buffer
(Recommended air circuit) mains at less than 5kPa. If 0MPa is required, bleed Mechanical
pressure SW
the secondary side, or install a 3-way valve on the
Electronic
 When secondary pressure is lowered with an input signal, secondary side to switch to atmosphere, etc. pressure SW

etc., secondary air passes through the EV and is discharged Contact / close
contact conf.
from the exhaust port (EXH port or R port). Contamination  The EV2509 Series has two supply port systems on SW

the left and right of the unit. These are indicated as Air sensor
on the secondary piping and the inside of the load will have
an adverse effect on the characteristics, etc. Thus, keep IN1 and IN2. Always plug the system that is not be- Pressure SW
for coolant
the inside of the piping as clean as possible. ing used.
Small
flow sensor
 If power is turned OFF under pressure, secondary  The EV0000 and EVS000 Series have small flow Small
flow controller
pressure is held. specifications, so leaks in secondary piping could Flow sensor
 To discharge pressure, lower set pressure with an input cause vibration. for air
signal and then turn OFF, or use a shut-off valve, etc. This Flow sensor
 Leaks in secondary piping prevents set pressure from be- for water
holding state is not guaranteed for a long time.
ing maintained when released into atmospheric pressure, Total air
system
including blowing, or if reverse pressure is applied to the
 Primary pressure must be over " Setting secondary Total air
secondary side such as when using a cylinder, such as a system
pressure + max. control pressure x 0.1". (Gamma)
fine speed cylinder, with large leakage. Groaning may oc-
 If primary pressure is not supplied for a long time when cur and life and properties could be reduced. Do not use in Ending
secondary pressure is set within more than 0MPa to this way.
F.R.L. unit

12%F.S., product life is shortened. Avoid this use.

 Drip-proof environment
The protective structure of this product can be con-
firmed in the specifications of each product. Do not
use this product if a problem could occur in the ap-
plicable work environment.

725
 EV Series
Refrigerating
type dryer
Installation & Adjustment
Desiccant
type dryer  Mounting attitude
High polymer
membrane There are no restrictions to the mounting direction
type dryer
or mounting attitude, but provide sufficient space for
Air filter
exhausting from the exhaust port.
Auto. drain
/ others
F.R.L.
(Module unit)
During Use & Maintenance
F.R.L.
(Separate)
CAUTION
Compact  Regularly inspect the product at least once a year or
F.R.
 The optional shield cable connector is a 4-conductor
Precise
more, and confirm that it is operating correctly.
regulator shield wire.
 This product uses a compact solenoid valve as the actua-
F.R.L.
(Related tor. The life may change according to the operation fre-
products)
 When not using the green special application wire quency by pressure switching and the working conditions,
Clean
F.R. (monitor output, etc.) with the EV2000 Series or etc.
Electro
pneumatic EV0000 Series, insulate the wire so it does not con- The warranty term is set as one year or 1,000,000 repeated
regulator
Air
tact the other wires (including the shielding wire). If operations, whichever is earlier, so use this as an inspec-
booster the wire inadvertently contacts the ground, etc. tion guideline.
Speed
control valve  The shielding wire on the main side of the EVS000 is con- * The conditions for the 1,000,000 operations listed in the
nected to the green wire of the optional shielding cable warranty are as follows.
Silencer
connector, so connect the green wire and shielding wire to When repeatedly, in a step, applying an input signal which
Check valve the power supply ground. causes the control pressure to rise from zero to the maxi-
/ others
Joint
mum control pressure. The working air quality in this case
/ tube must be clean compressed air from the recommended
Vacuum air circuit. The secondary load capacity shall be 300cm3
filter
for the EV2000 Series and 15cm3 for the EV0000 or EVS
Vacuum
regulator Series.
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending

726
 EV210*V Series
EV210*V Series Refrigerating
type dryer
Desiccant
Design & Selection type dryer
High polymer
membrane
type dryer
shut-off valve, etc. This holding state is not guaranteed for
WARNING Air filter
a long time.
 If the product is left with working pressure (vacuum Auto. drain
/ others
source pressure) applied when power is not ON, the
secondary pressure degree of vacuum could rise to the  Supply pressure is used to supply specified pres- F.R.L.
(Module unit)
working pressure. If this poses a safety hazard, take sure to control pressure. Use the device within the F.R.L.
working pressure range. (Separate)
measures using a valve on the secondary side, etc.
Compact
 If working pressure is not supplied for a long time when F.R.

CAUTION secondary pressure is set within more than 0MPa to 12% Precise
regulator
F.S., or if the product is left for a long time with working
 If poor quality air is supplied to the primary side (at- pressure at "control pressure + (- 10kPa)" or less, product
F.R.L.
(Related
mosphere side), characteristics could deteriorate and life is shortened. Avoid this use.
products)
Clean
durability be adversely affected. F.R.
Electro
 When using this product in a dusty environment, etc., re-  Set the input signal within the specifications. pneumatic
regulator
move dust with a filter.  Applying a signal exceeding the range could reduce the life Air
 As with secondary side load, if piping or the inside of the and properties. Do not use in this way.
booster

load is contaminated, characteristics and durability could Speed

control valve
be adversary affected. Blow air piping with compressed
 The current input type can be used with input signal Silencer
air to remove foreign matter before connecting.
1 to 5V, but as opposed to other voltage input types,
 Install an air filter as shown in the recommended air circuit Check valve
input impedance is small (250Ω). / others
below if necessary.
Joint
/ tube
 When the current input type is wired, the power Vacuum
filter
ground and signal common are shared.
Vacuum
 When operating several EV units with one PLC and D/A, regulator
depending on the D/A unit circuit, wiring could prevent the Suction
plate
correct signal from being input. Consult with PLC maker.
Magnetic
spring buffer

 If power is turned off while the working pressure side  Even if pressure is set to 0MPa, secondary pressure Mechanical
pressure SW
is not released and remains as is within 0 to -5kPa
is in a vacuum state, secondary pressure is held. Electronic
range. pressure SW
 To release secondary pressure to the atmospheric level,
 If 0MPa is required, install a 3-way valve on the secondary Contact / close
contact conf.
lower the input signal and then turn power off, or use a SW
side to switch to atmosphere, etc.
Air sensor

During Use & Maintenance Pressure SW

for coolant
Small
flow sensor
CAUTION Small
 When using a hydraulic rotary type vacuum pump, flow controller
 Correct pressure control is not possible if the IN port be sure to prevent oil from entering by breaking the Flow sensor
is plugged. Release this port to the atmosphere. vacuum with a residual pressure discharge valve,
for air

 When connecting a joint to the piping port (VAC, OUT, etc., after the vacuum pump power is turned off.
Flow sensor
for water
IN), use seal material (sealing tape, gel sealant) to  Regularly inspect the product at least once a year or Total air
system
prevent leaks. Check that seal material or piping
more, and confirm that it is operating correctly. Total air
screw swarf does not enter the port. When tighten- system
 This product uses a compact solenoid valve as the actuator. (Gamma)
ing the VAC port joint, use a wrench on the intake
The life may change according to the operation frequency Ending
block (*27).
by pressure switching and the working conditions, etc.
 When using the manifold and connecting several
F.R.L. unit

The warranty term is set as one year or 1,000,000 repeated

units with a module connection, atmosphere release
ports (IN1 and IN2) are shared.
 The optional shield cable connector is a 4-conductor
shield wire.
 When not using the green special application wire
(monitor output, etc.), insulate so that there is no
contact with other wires (including the shield wire).
Unintended connection to the ground, etc., could
cause malfunction or damage the product.
operations, whichever is earlier, so use this as an inspec-
tion guideline.
* The conditions for the 1,000,000 operations listed in the
warranty are as follows.
When repeatedly, in a step, applying an input signal which
causes the control pressure to rise from zero to 90% of
the maximum control pressure. The working air quality in
this case must be clean compressed air from the recom-
mended air circuit. The secondary load capacity shall be
300cm3.

727
 MEVT Series
Refrigerating Thin electro-pneumatic regulator MEVT Series
type dryer
Desiccant
type dryer Design & Selection
High polymer
membrane
type dryer
 Take the following countermeasures to prevent mal-
Air filter Circuit design function caused by noise.
Auto. drain  Insert a line filter in the AC power supply line.
/ others
WARNING  Use a surge suppressor, such as a CR or diode on the load
F.R.L.
(Module unit)  Understand compressed air features before design- (solenoid valve, relay, etc.), to remove noise where it is
F.R.L. ing a pneumatic circuit. generated.
(Separate)
 The same functions as mechanical, hydraulic, and electrical  Separate wiring to the MEVT device from strong magnetic
Compact
methods cannot be anticipated if instantaneous service inter- fields.
F.R.
ruption and holding are required during an emergency stop.  Use the designated wire material for the serial transmis-
Precise
regulator  Pop-out, air discharge, or leakage due to air compression sion line.
F.R.L. and expansion could occur.  If operation could be affected by noise, wire the power sup-
(Related
products)  Confirm that the product will withstand the working ply independently for each manifold when possible.
Clean
environment.  Keep the power supply cable as short as possible.
F.R.
 Do not share power with an inverter or components caus-
Electro  This product cannot be used in an environment containing
pneumatic ing motor noise, etc.
regulator corrosive gas, chemical liquids, solvents, water, vapor, or
 Do not lay the power wire, signal wire, and other power
Air ozone. If water, oil, or metal chips (spatter or cutting chips,
booster cables in parallel.
etc.) could come in contact with the product, provide ap-
Speed  Precautions for wiring
control valve propriate protect.
 This product cannot be used in a flammable environment.  When wiring the common gland and D-sub connector, the
Silencer
 Care must be taken to the electrical circuit during power supply gland and signal common are shared. When
Check valve emergency stop and cylinder operation, etc., during driving several EVT units with one PLC and D/A unit, de-
/ others
a service interruption. pending on the D/A unit circuit, wiring could prevent the
correct signal from being input. Consult with the PLC maker.
Joint
/ tube  Install a "pressure switch" and "shut-off valve" on
When using a shield wire, connect it to the ground on the
Vacuum the device's compressed air supply side.  power supply side.
filter
Vacuum
 The pressure switch uses disable operation if set pressure  This regulator cannot be used with a cylinder having
regulator cannot be reached. The shut-off valve exhausts com- a large leakage rate, such as an air bearing cylinder.
Suction pressed air in the pneumatic circuit, and prevents acci-  When using for blowing applications or when back pres-
plate dents caused by operation of the pneumatic devices by sure is applied on the secondary side, it is not be possible
Magnetic residual pressure. to maintain the set pressure. A large beating sound is gen-
spring buffer
Mechanical
erated and life is shortened. Avoid this use.
pressure SW Valve  Residual pressure of 2 kPa or less (EVT100) or 10
Electronic
Cylinder kPa or less (EVT500) is generated even when the
pressure SW
Contact / close
Compressor
Shut-off Pressure
input signal is set to 0%. If 0 MPa is required, install
contact conf.
SW
valve switch a three-way valve on the secondary side or release
into to the atmosphere, etc.
Air sensor

Pressure SW
for coolant
CAUTION
CAUTION
Small  Use a valve on the primary or secondary side when
flow sensor  Indicate the maintenance conditions in the device's required.
Small instruction manual.
flow controller  If the product is left with the supply pressure applied when
 The product's function can drop markedly with working sta-
Flow sensor power is not on, secondary pressure could rise to the pri-
for air tus, working environment, and maintenance, and can pre-
mary pressure. If this could pose a safety hazard, take
Flow sensor vent safety from being attained. With correct maintenance,
for water measures on the system by using a valve on the primary
the product functions can be used to the fullest.
side or secondary side, etc.
Total air  Use the constant voltage power supply.
system  Working environment
Total air  Set the input signal within the specifications. Avoid using this product where it is subject to direct
system
(Gamma)  Applying a signal exceeding the range could reduce the life sunlight, water, or oil, etc. Consult with CKD on speci-
and properties. Do not use in this way. fications when using outside designated specifica-
Ending
 Check leakage current to prevent malfunction caused tions or for special applications.
by leakage current from other fluid control components.
 Ambient temperature
When using a programmable controller, etc., leakage current • Do not use this product in an environment hotter than
could cause the EVT to malfunction. 50˚C or colder than 5˚C.
 Vibration and shock
• Do not use this product where vibration exceeds 50m/s2,
or where impact exceeds 300m/s2.
 Drip-proof environment
This product’s protective structure is equivalent to
IP40. Do not install this product where water, salt,
dust, or swarf is present or in a pressurized or de-
pressurized environment. Use where the temperature
changes greatly or where high humidity environment
For 24 VDC 1.8mA or less could cause damage through dew condensation.
728
 MEVT Series
Installation & Adjustment Refrigerating
type dryer
Desiccant
type dryer
Installation Piping High polymer
membrane
type dryer

WARNING CAUTION Air filter

 Do not install the MEVT by supporting it with pipes.  Do not remove the MEVT packaging until just before Auto. drain
/ others
 Fix the MEVT. piping. F.R.L.
 If the package is removed before connecting pipes, foreign (Module unit)

 Do not wash the MEVT with water or solvent, or paint matter could enter the EVT from the piping port and result F.R.L.
(Separate)
the body. in fault or malfunction. Compact
F.R.
 The MEVT is made of resin parts, and could be damaged.
Paint could plug the exhaust port and result in malfunc-  Always flush just before piping Precise
regulator
tions. pneumatic component. F.R.L.
(Related
 Check that foreign matter in pipes products)
CAUTION does not enter the EVT.
Clean
F.R.

 Secure sufficient space around the MEVT for instal- Electro

pneumatic
regulator
lation, removal, wiring, and piping work. Air
 Connect piping so that connections are not dislo- booster

 Install an air filter just before the pneumatic compo- cated by system movement, vibration, or tension. Speed
control valve
nent in the circuit. Silencer
 Release the exhaust port (R) to the atmosphere to
Check valve
 Response is affected by working pressure and load that exhaust is proper. / others
volume. If repeatability with stable responsiveness Joint
/ tube
is required, install a regulator in the proceeding stage.  Do not restrict the EVT exhaust port (R) to a bore
Vacuum
smaller the piping connection port. filter

Valving element operation causes breathing at the Vacuum

regulator
EVT exhaust port (R), so foreign matter exhaust port Suction
(R) is facing upward. plate

Install a silencer or pipe in the exhaust port (R) fac- Magnetic

spring buffer
ing downward. Mechanical
pressure SW
 The actuator does not function correctly if exhaust is not
Electronic
smooth. When using a manifold, exhaust could prevent pressure SW
the other EVT units from functioning correctly. Contact / close
 Mounting attitude contact conf.
SW
 The MEVT is mounted on a DIN rail. If the manifold's total  When supplying compressed air for the first time af- Air sensor
weight exceeds 1kg, or when using the MEVT in an envi-
ter connecting pipes, do not apply high pressure Pressure SW
ronment with vibration or impact, fix the DIN rails on the for coolant
suddenly.
mounting surface at pitch of 50 to 100mm. Check that there Small
are no problems with installation.  The pipe connection could dislocate causing the pipe tube flow sensor

 There is no restriction for installation or mounting, but vi- to bounce and result in accidents. Small
flow controller
bration could loosen set screws and drop the manifold.  Note: If compressed air is supplied too slowly, the sealing
Flow sensor
 Mounting and removal method of MEVT mechanism in he EVT does not form a seal and result in for air

Removing air leaks. Flow sensor

for water
Loosen the four DIN rail set screw (two each on left/right). Total air
Installation  Before supplying compressed air after connecting system

1. Catch the jaws into the DIN rail in the order of (1), (2). pipes, check that there are no air leaks at any pipe Total air
system
(Gamma)
2. Press the retainer in the direction of (3). connections.
3. While holding down so that there is no gap between  Apply a leakage detection agent on pipe connections with Ending

blocks, tighten DIN set screws. (recommended tighten- a brush, and check for air leaks.
F.R.L. unit

ing torque 0.6 to 0.8N·m).

Note: If retainer jaw are
EVT
 Observe the following precautions when using ny-
not securely set, lon tubes or urethane tubes for piping material.
2
air could leak or Press  Use flame-resistant tubes where spatter could scatter.
the product could
drop. Check that
1
these jaws are
Retainer 3
secure.

DIN rail set screw

729
 MEVT Series
 Connecting port  Bending radius of tube
Refrigerating
type dryer  Applicable tube The tube's bending radius must be larger than the mini-
Desiccant Use us assignment's tube. mum bending radius. (Otherwise, this could result in dislo-
type dryer
Soft nylon (F-1500 Series) cation or leaks)
High polymer
membrane
type dryer
Urethane (U-9500 Series) Minimum bending radius mm
When using a commercially available tube, check external Bore size
Air filter Nylon Urethane
dimension accuracy, thickness, and hardness. Use a ure- ø4 10 10
Auto. drain
/ others thane tube with a hardness of 93˚ and over (rubber hard- ø6 20 20
F.R.L. ness meter). If a tube that does not satisfy the diameter
(Module unit)
accuracy or hardness is used, the chucking force may drop,  Minimum tube length
F.R.L.
the tube may dislocate, or may be difficult to insert. As a guide, the output port (A) tube length should have a
(Separate)
Outer diameter capacity of 1cc and over.
Compact
F.R. Outer Bore size mm (Otherwise this could result in vibration)
mm
Precise diameter Nylon Urethane Min. length mm
regulator
ø4 ø2.5 ø2 Bore size
F.R.L. Nylon Urethane
(Related ø6 ø4 ø4
products) ø4 200 320
Clean Tolerance of outer diameter ø6 80 80
F.R.
Electro Soft and hard nylon ±0.1mm
pneumatic  Cut of tube
regulator Urethane ø4, ø6 +0.1mm
Use a tube knife (AZ1200), and cut at a right angle to the
Air -0.15mm
booster axis. Air could leak if a tube cut at a slant is inserted.
Speed  Tube connection state
control valve
Provide a straight section as long as the O.D. of the tube
Silencer
being used from the end of the joint, and avoid piping with a
Check valve sudden bending at the joint insertion port. Check that the tube's
/ others
tensile strength in the lateral direction does not exceed 40N.
Joint
/ tube  Applicable blanking plug
Vacuum Use a CKD-designated blanking plug.
filter
Blanking plug GWP*-B Series
Vacuum
regulator
Suction
During Use & Maintenance
plate
Magnetic  When control pressure is lowered with an input signal, etc.,
spring buffer
Quality of air secondary air pressure through the EVT and is discharged
Mechanical
pressure SW from the exhaust port (R). Contamination of secondary pip-
Electronic WARNING ing and the inside of the load side adversely affect charac-
pressure SW
Contact / close  Do not supply other than compressed air. teristics, etc. Keep the inside of piping as clean as pos-
contact conf.
SW sible.
 The pneumatic component must be disassembled and as-
Air sensor  Use clean compressed air that does not contain cor-
sembled by a qualified worker.
Pressure SW rosive gases.
for coolant The grade not less than Pneumatics technique certifica-
Small tion grade 2 is required.
flow sensor  The air quality must satisfy the clean dry air “ISO  Read the relevant product instruction manual thoroughly
Small
flow controller
8573-1 Class 1.3.2 or equivalent” or “JIS B 8392-1 and fully familiarize yourself with work before disassem-
Flow sensor
Class 1.3.2 or equivalent”. bling or assembling the pneumatic component.
for air
Flow sensor
for water
CAUTION
Total air  Poor air quality will worsen the characteristics and During Use & Maintenance
system
Total air adversely affect the durability.
system
(Gamma)  For the pneumatic pressure source, supply clean air from
WARNING
Ending which solids, moisture, and oil have been sufficiently re-  Be sure to turn power off, stop supplied compressed
moved with a dryer, air filter, and oil mist filter. air, and check that there is no residual pressure be-
Air filter Regulator
fore starting maintenance.
5μm  This is required to ensure safety.

Air dryer Oil mist filter (Pressure switch)

(Oil removing)
(Recommended air circuit)

730
 MEVT Series
CAUTION Refrigerating
type dryer
 Correct maintenance  Regularly inspect the product at least once a year or Desiccant
Plan daily inspections and periodic inspections. more, and confirm that it is operating correctly. type dryer
High polymer
 If maintenance is not correctly controlled, the product's func-  This product uses a compact solenoid valve as the actuator. membrane
type dryer
tions could drop markedly and lead to a shortened life, The life may change according to the operation frequency
Air filter
damage, malfunctions, faults, and accidents. by pressure switching and the working conditions, etc.
Auto. drain
1. Control of supplied compressed air pressure The warranty term is set as one year or 1,000,000 repeated / others
 Is the set pressure supplied? Does the pressure gauge operations, whichever is earlier, so use this as an inspec-
F.R.L.
indicate the set pressure during operation of the device? tion guideline. (Module unit)
* The conditions for the 1,000,000 operations listed in the F.R.L.
(Separate)
warranty are as follows.
Compact
When the input signal which causes the control pressure F.R.
Minimum Maximum to rise from zero to the maximum control pressure is re- Precise
(MIN) (MAX) peatedly applied in steps. The working air quality in this regulator
F.R.L.
case shall be clean compressed air from the recom- (Related
products)
mended air circuit. The secondary side load capacity shall
Clean
be 15cm3. F.R.
2. Control of air filter Electro
pneumatic
 Is the drain correctly discharged? regulator
Is the bowl or element dirty?
Other Air
booster
CAUTION Speed
3. Control of compressed air leaks from piping connec- control valve

tions  Disassembling the regulator could result in problems. Silencer

 Is the state of the connection, especially at movable sec- Operation after disassembly cannot be guaranteed.
Check valve
tions, normal?  If power is turned OFF under pressure, control pres- / others
Joint
sure is held. / tube
4. EVTOperational status control To discharge pressure, lower set pressure and turn power Vacuum
filter
 Are operations delayed? Is exhaust normal? OFF, or use a shut-off valve, etc. This holding state is not Vacuum
guaranteed for a long time. regulator

5. Control of pneumatic actuator operation Suction

 Check that supply pressure does not drop to less plate
 Is operation smooth? Is the end stop state normal? than the "Setting secondary pressure + maximum Magnetic
Is coupling with the load normal? spring buffer
control pressure x 0.1", Mechanical
If supply pressure in not supplied for a long time when control pressure SW

pressure is set within more than 0MPa to 12% F.S., large bear- Electronic
pressure SW
ing sound is generated and product life cut. Avoid using so. Contact / close
contact conf.
 When using the EVT Series, if there are leaks in SW

Air sensor
secondary piping, vibration could occur.
Pressure SW
Securely pipe the system so that there are no leaks. Leaks for coolant
will prevent set pressure from being held, large beating sound Small
is generated and product life is shortened. Avoid using so. flow sensor
Small
flow controller

How to replace cartridge join Flow sensor

for air
Flow sensor
for water
CAUTION Cartridge type push-in joint model no. Total air
Model Parts name Model no. system
Check procedures before changing the push-in joint size. If Total air
ø4 straight 4G1–JOINT–C4 system
installed not correctly, leakage could be occurred. EVT (Gamma)
ø6 straight 4G1–JOINT–C6
Ending
(1) Stop pin extract with
F.R.L. unit

driver, etc.,
(2) Pull the joint out.
* Check that the filter is
not removed when re-
placing.
(3) Insert the joint for replace-
ment vertically until it
2 reaches the back.
A
(4) Insert the stopper pin. Pull
on the joint to confirm
that it is properly in-
stalled.

731
 3AP, 2/3AF, APC Series
Refrigerating Proportional valve 3AP, 2/3AF Series
type dryer
Desiccant
type dryer Design & Selection
High polymer
membrane
type dryer
CAUTION  This regulator can be used in prelubricated applica-
Air filter
tions. If lubrication is required, use Turbin Oil Class
Auto. drain  This regulator has a highly accurate metal spool struc- 1 (ISO VG32). Lubrication is effective in lowering
/ others
ture, so poor quality air adversely affects character-
F.R.L. the effect of air quality and lengthens life.
(Module unit) istic and durability.
 Use an air filter to suppress the generation of drain, and a
 When using the pressure type (3AP), design sec-
F.R.L.
(Separate)
submicron air filter (0.3μm) to remove solid such as tar and
Compact ondary load volume as 300cm3 and over to prevent
F.R. carbon.
secondary pressure from vibrating.
Precise
regulator
Air filter Regulator
F.R.L.
(Related 5μm  Characteristic of flow control (2AF, 3AF) indicate the
products)
Clean
effective sectional area for the valve. When design-
F.R. ing the system, the composite effective sectional
Electro
pneumatic Air dryer Sub-micron filter (Pressure switch) area with piping and joints is applied and linearity
regulator
(0.3μm) changes. The effective sectional area of parts other
Air
booster (Recommended air circuit)
than the valve should be designed with 1.4-fold to
Speed
control valve 2-fold larger effective sectional area. Note that if the
cylinder has a restricted connection port, the required
Silencer
speed may not be attained.
Check valve
/ others
Joint
/ tube
Installation & Adjustment
Vacuum
filter
CAUTION  Vibration is generated from the proportional valve
Vacuum body, so use vibration proofing when installing the
regulator
 Install the proportional valve so the spool is parallel. valve near devices, etc., easily affected by vibration.
Suction
plate
Magnetic  The proportional valve will become hot, so do not
spring buffer
install it near devices, etc., affected by heat.
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant APC Series
Small
flow sensor
Small
Installation & Adjustment
flow controller
Flow sensor
for air WARNING CAUTION
Flow sensor
for water
 When using AC power specifications, there is a risk  The controller is damaged if power terminal and in-
Total air of electrical shook if the AC power supply section is put signal terminal polarities are reversed.
system
touched while power is on. Turn power off before
Total air
system
(Gamma)
starting wiring. Do not touch the charged sections  Do not input a setting signal from an external source
with wet hands. while the potentiometer is connected.
Ending

 Do not excessively tighten terminal screws.

 The APC body becomes hot, so do not install it near

device, etc., affected by heat.

732
 PI Series
PI Series Refrigerating
type dryer
Desiccant
Design & Selection type dryer
High polymer
membrane
type dryer
WARNING EV250*-0**··············· 0 to 10VDC Air filter

 Use a 2kΩ or lager external variable resistor for EV0*00-0**··············· 0 to 10VDC Auto. drain
manual purposes. EVS*00-0**·············· 0 to 10VDC / others
F.R.L.
EV210*V-0**············· 0 to 10VDC (Module unit)

 EV Series and input signal differ depending on the F.R.L.

(Separate)
model no. Select the "0 to 10V" type input signal
Compact
when using the PI Series. F.R.
Precise
regulator
Installation & Adjustment F.R.L.
(Related
products)
Clean
WARNING  Do not connect the external output power source F.R.
except to the EV Series. Electro
 There is a risk of electrical shock if the AC power (The controller cannot be connected)
pneumatic
regulator
supply section is touched while power is ON. Turn Air
booster
power off before starting wiring. Do not touch the  Do not use this product where there are vibration or Speed
charged sections with wet hands. impact.
control valve

Silencer

CAUTION  Twist the PI output wire when possible (Twist the Check valve
/ others
 Do not wire the output terminal over long distances. two wires). Joint
/ tube

 Do not excessively tighten terminal screws.  Check polarity of a COM terminal. Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
F.R.L. unit

733
 EVD Series EVD Series
 
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter
Compact, high-function, digital control EDV Series digital electro pneumatic regulator - realizing high functions and ease-of-use in a compact
size with a variety of new functions including pressure display, error display and direct memory functions.
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
User-friendly with outstanding installation performance Realizing high-functions with microcomputer Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
Digital display shows the control state at a glance. Error display function (Module unit)
F.R.L.
(Separate) (Separate)
The output pressure value is displayed digitally with Errors are displayed and notified with electrical signals.
Compact Compact
three digits. The output state (switch output ON-OFF)
F.R.
Precise is displayed in addition to the error display. Zero/span adjustment function F.R.
Precise
regulator regulator
Zero and span can be adjusted according to the usage methods.
F.R.L.
(Related
Output display 3-digit LED display F.R.L.
(Related
products) D-sub connector Direct memory function products)
Clean Clean
F.R. F.R.
Electro Input signals from an external source are no longer required. Electro
pneumatic pneumatic
regulator Freely adjust the secondary pressure with the product's operation keys. regulator
Air Air
booster
Preset input function booster
Speed Speed
control valve
Parallel input type available Up to 8 channels of pressure can be saved in the control valve
Digital indicator main unit and switched with external signals.
Silencer
as a standard Silencer

Check valve
/ others Direct control from the PLC is possible. Switch output function Check valve
/ others
Joint Joint
/ tube Switch outputs (built-in overcurrent protection) is / tube
Vacuum possible by setting the upper/lower limit pressure. Vacuum
filter
Compact design is 25% smaller (CKD comparison) filter
Vacuum
regulator Operation key Attaining high-accuracy, high-response pressure control Vacuum
regulator
Suction Highly universal D-sub connector Suction
plate
Magnetic allows connections in two directions Linearity 0.3% plate
Magnetic
spring buffer spring buffer
Mechanical Modular design The connection can be rotated 90° from the top to side allowing a top Hysteresis 0.5% Mechanical
pressure SW pressure SW
or side connection to be selected freely according to the usage state.
Electronic
pressure SW
Response time 0.2sec Electronic
pressure SW
Contact / close
contact conf.
SW
Proportional value change function (Only EVD*100) Contact / close
contact conf.
SW

Air sensor Highly accurate and stable control is possible by adjusting the proportional Air sensor

Pressure SW value upward (one stage) or proportional value downward (ten stages). Pressure SW
for coolant for coolant
Small
flow sensor
Small
Port size : Rc1/4
Flow rate : 60, 400 /min
Modular design Eco-friendly design Small
flow sensor
Small
flow controller flow controller
Flow sensor
Pressure range: 100, 500, 900 kPa
Flow path section: Non-grease specifications
Filters and regulators, such as the Complies with RoHS Directives Flow sensor
for air C1000 Series, can be connected. for air
Flow sensor
All substances, such as lead and Flow sensor
for water hexavalent chromium, which can for water
Total air adversely affect the global environment, Total air
system system
Total air
have been eliminated from the materials. Total air
system system
(Gamma)
Energy saving Material indication (Gamma)

Ending Ending
The automatic power OFF Material names are indicated
function can automatically on the main components to

Digital electro-pneumatic regulator

Large flow type turn OFF the digital display. facilitate sorting for recycling.
Digital electro-pneumatic regulator variation
Series Pressure range Input signal Port size Output method Max. flow rate Flow path section material
Port size : Rc1/4, Rc3/8
Flow rate : 700, 1500 /min
Pressure range: 100, 500, 900 kPa Grease
free
Analog Parallel Switch Analog

F.R.L. unit
Digital electro-pneumatic regulator output output

Fluorine Vaseline
grease (custom order)
Analog Parallel Switch Analog
output output
734 735
 Digital electro-pneumatic regulator

Refrigerating
type dryer
Desiccant
type dryer
EVD-1000 Series
High polymer JIS symbol
membrane R

type dryer P A

Air filter

Auto. drain
/ others
Specifications
F.R.L.
(Module unit) EVD-1100-*08* EVD-1100-P08* EVD-1500-*08* EVD-1500-P08* EVD-1900-*08* EVD-1900-P08*
F.R.L. Descriptions Analog type Parallel type Analog type Parallel type Analog type Parallel type
(Separate)
(*··· 0/1/2) (*···0/1/2) (*···0/1/2)
Compact
F.R. Working fluid Clean compressed air (ISO 8573-1 Class 1.3.2 or equivalent or JIS B 8392-1 Class 1 1.3.2 or equivalent)
Precise Max. working pressure 160kPa 700kPa 1000kPa
regulator
F.R.L. Min. working pressure Control pressure + 50kPa Control pressure + 100kPa
(Related
products) Withstanding Inlet side 240kPa 1050kPa 1500kPa
Clean pressure
F.R. Output side 150kPa 750kPa 1350kPa
Electro Control pressure range Note 1 0 to 100kPa 0 to 500kPa 0 to 900kPa
pneumatic
regulator
Power voltage 24 VDC 10% (safety power supply with ripple ratio 1% or less)
Air
booster Current consumption 0.15A or less (power supply rush current 0.6A or less when power turned ON)
Speed 0-10 VDC (6.7kΩ) 0-10 VDC (6.7kΩ) 0-10 VDC (6.7kΩ)
control valve Input signal
0-5 VDC (10kΩ) 10bit 0-5 VDC (10kΩ) 10bit 0-5 VDC (10kΩ) 10bit
Silencer (Input impedance)
4-20mADC(250Ω) 4-20mADC(250Ω) 4-20mADC(250Ω)
Check valve None None None
/ others Pre-set input 8 points 8 points 8 points
Joint Output accuracy: ±6%F.S or less, analog output: 1-5 VDC (connected load impedance 500kΩ or more)
/ tube Output signal Note 2
Switch output: NPN or PNP open collector output, 30V or less 50mA or less, voltage drop 2.4V or less, PLC and relay compatible
Vacuum
filter Error output signal NPN or PNP open collector output, 30V or less 50mA or less, voltage drop 2.4V or less, PLC and relay compatible
Vacuum 1 to 100kPa 5 to 500kPa 9 to 900kPa
regulator Direct memory setting
(Minimum setting width 1kPa/setting resolution 1kPa) (Minimum setting width 1kPa/setting resolution 1kPa) (Minimum setting width 1kPa/setting resolution 2kPa)
Suction
plate Display method 7-segment LED 3 digits, display accuracy: ±2%F.S. or less
Magnetic Pressure display Display range 0 to 100kPa 0 to 500kPa 0 to 900kPa
spring buffer
Mechanical
Display resolution 1kPa 1kPa 1kPa
pressure SW
Hysteresis Note 3 0.5%F.S. or less
Electronic
pressure SW Linearity Note 3 ±0.3%F.S. or less
Contact / close Resolution Note 3 0.2%F.S. or less
contact conf.
SW Repeatability Note 3 0.3%F.S. or less
Air sensor
Temperature Zero point variation 0.15%F.S./˚C or less
Pressure SW characteristics Span variation 0.07%F.S./˚C or less
for coolant
Maximum flow rate (ANR) Note 4 60 /min. 400 /min.
Small
flow sensor Step response Note 5 Loadless 0.2sec. or less
Small Mechanical vibration proof 98m/s2 or less
flow controller
Flow sensor Ambient temperature 5 to 50˚C
for air
Working fluid temperature 5 to 50˚C
Flow sensor
for water Piping connection port size Rc1/4
Total air Installation direction Free
system
Total air Weight (body) 250 g
system
(Gamma) Protective circuit Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection

Ending Note 1: There is a 1%F.S. or less residual pressure when the input signal is 0%. (EVD-1100: 1kPa, EVD-1500: 5kPa, EVD-1900: 9kPa)
Note 2: Select the analog output or switch output.
Note 3: The above characteristics apply in the control pressure 10 to 90% range with a 24 VDC power voltage and the working pressure set to maximum control
pressure +50kPa (EVD-1100), or maximum control pressure +100kPa (EVD-1500, 1900).
Also, limited to a closed circuit in the secondary side, and the pressure may vary if used as air blow etc.
Note 4: The characteristics where working pressure is maximum and control pressure is maximum are shown.
Note 5: Working pressure: Max. working pressure and step rate: 50% F.S.→100% F.S.
50% F.S. → 60% F.S.
50% F.S. → 40% F.S.

Secondary battery compliant device specifications (Catalog No. CC-947)

EVD1500/1900 - [Input specifications, port diameter, output specifications] - [Option] - 3 - P4*

EVD3500/3900 - [Input specifications, port diameter, output specifications] - [Option] - 3 - P4*
Contact your nearest CD sales office or dealer for details.
736
 EVD-1000 Series
How to order / Internal structure drawing
How to order Refrigerating
type dryer

EVD-1 500 0 08 AN C1B1 3 Desiccant

type dryer
High polymer
Symbol Descriptions membrane
type dryer
A Pressure specifications Air filter
A Pressure specifications
100 100kPa
Auto. drain
500 500kPa / others

900 900kPa F.R.L.

(Module unit)
B Input specifications F.R.L.
B Input specifications (Separate)
0 0-10 VDC
Compact
1 0-5 VDC F.R.

4-20mADC Precise
2 regulator
P Parallel 10bit F.R.L.
(Related
products)
C Port diameter Clean
C Port diameter F.R.
08 Rc1/4
Electro
pneumatic
D Output specifications regulator
D Output specifications Air
AN 1-5V analog, error (NPN) booster
AP 1-5V analog, error (PNP) Speed
control valve
SN Switch (NPN), error (NPN)
SP Switch (PNP), error (PNP) Silencer

Check valve
EOption / others
E Option
Cable option Joint
/ tube
Blank None
Vacuum
C1 Analog 9-conductor, cable 1m filter

C3 Analog 9-conductor, cable 3m Vacuum

regulator
P1 Parallel 15-conductor, cable 1m Suction
plate
P3 Parallel 15-conductor, cable 3m
Magnetic
F Power Bracket option enclosed spring buffer
voltage
Blank None Mechanical
 Discrete option (cable, bracket) model no. pressure SW
B1 B-type bracket, floor mounted type
Electronic
EVD- C1 L1 L-type bracket, wall mounted type pressure SW
Contact / close
contact conf.
F Power voltage SW
3 24 VDC Air sensor
E Option
*Contact your nearest CD sales office or dealer for details on UL compliant parts.
Pressure SW
for coolant
Internal structure and parts list Small
flow sensor
Small
flow controller
1
9 Flow sensor
for air
Flow sensor
2 No. Parts name Material for water
10
1 Cover PBT resin Total air
system
2 D sub-connector – Total air
3 system
11 3 Housing ABS resin (Gamma)
4 Controller board – Ending
4 5 3 way valve –
Digital electro-pneumatic regulator

12 6 Valve base Polyphenylene sulfide resin

7 Pilot chamber Polyphenylene sulfide resin
5
8 Body Aluminum alloy die-casting
13
9 Pressure sensor –
10 Diaphragm Special nitrile rubber
6
14
11 Relief sheet Aluminum alloy
12 Steel ball (exhaust valve) Stainless steel
F.R.L. unit

7
15 13 Valve Special nitrile rubber, stainless steel
14 Bottom rubber Silicon rubber
15 Bottom plug Brass, electroless nickel plating
8 16
16 O ring Fluoro rubber

737
 EVD-1000 Series
Refrigerating
Dimensions
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

48.6
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L. D-sub connector 15-pin, plug
(Separate) 2-#4–4OUNC

Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean ø4.2
F.R. Port R
Electro (Pilot air exhaust port)
pneumatic

(107)
regulator
100

Air
booster
Speed
control valve

50
Silencer
IN OUT
Check valve
/ others
18

Joint
/ tube
Vacuum
filter 21 2-Rc1/4
42 8
Vacuum
regulator
Suction 27
plate
Magnetic
spring buffer
Mechanical
pressure SW
36

Electronic 4-M3 depth6

pressure SW
Contact / close
contact conf. ø5.3
SW
EXH port
Air sensor

Pressure SW
for coolant
Small
Option external dimensions
flow sensor
Small  B-type bracket(-B1): Floor mounted type  L-type bracket(-L1): Wall mounted type
flow controller 30.5
Flow sensor
for air 36 27
Flow sensor 4 - full R 4 3.5 3.5
for water 8–ø3.5 27 -f
ull
4.4

Total air R
system
10

Total air
system
(Gamma)
2
ø2
36

27

30

44

Ending
51
36
4.4

56

64 42
44
1.6
1.6

4.4
7.2

17.5
5

22
32
*Refer to page 745 for details on the outline dimensions of the cable options.
42

738
 EVD-1000 Series
I/O characteristics / monitor output / flow characteristics / relief characteristics
I/O characteristics Refrigerating
type dryer

 EVD–1100  EVD–1500  EVD–1900 Desiccant

type dryer
100 500 900 High polymer
800 membrane
type dryer
Control pressure (kPa)

Control pressure (kPa)

Control pressure (kPa)

80 400 700
Air filter
600
60 300 Auto. drain
500
/ others
400
40 200 F.R.L.
300 (Module unit)
20 100 200 F.R.L.
100 (Separate)

0 0 0 Compact
F.R.
0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100
Input signal (%) Input signal (%) Input signal (%) Precise
regulator
F.R.L.
(Related
products)
Clean
Monitor output (Only analog output type: Model AN/AP) F.R.
Electro
pneumatic
 EVD–1100  EVD–1500  EVD–1900 regulator
Air
5 5 5 booster
Speed
4 4 4 control valve
Analog output (VDC)

Analog output (VDC)

Analog output (VDC)

Silencer
3 3 3
Check valve
2 2 2 / others
Joint
1 1 1 / tube
Vacuum
filter
0 0 0
0 20 40 60 80 100 0 100 200 300 400 500 0 100 200 300 400 500 600 700 800 900 Vacuum
regulator
Control pressure (kPa) Control pressure (kPa) Control pressure (kPa)
Suction
plate
Magnetic
spring buffer
Flow characteristics Mechanical
pressure SW
 EVD–1100  EVD–1500  EVD–1900 Electronic
Working pressure 160kPa Working pressure 700kPa Working pressure 1000kPa pressure SW
120 600 1000
Contact / close
900 contact conf.
100 500 800 SW
Control pressure (kPa)

Control pressure (kPa)

Control pressure (kPa)

80 400 700 Air sensor

600
Pressure SW
60 300 500 for coolant
400
40 200 Small
300 flow sensor
20 100 200 Small
100 flow controller
0 0 0 Flow sensor
0 20 40 60 80 100 120 0 200 400 600 0 100 200 300 400 500 600 for air
Flow [R/min. (ANR)] Flow [R/min. (ANR)] Flow [R/min. (ANR)] Flow sensor
for water
Total air
system
Total air
Relief characteristics system
(Gamma)

 EVD–1100  EVD–1500  EVD–1900 Ending

Working pressure 160kPa Working pressure 700kPa Working pressure 1000kPa
120 600 1000
Digital electro-pneumatic regulator

900
100 500
Control pressure (kPa)

Control pressure (kPa)

Control pressure (kPa)

800
80 400 700
600
60 300 500
400
40 200
300
20 100 200
100
0 0 0
F.R.L. unit

0 20 40 60 80 100 120 140 0 100 200 300 400 0 100 200 300 400 500 600
Flow [R/min. (ANR)] Flow [R/min. (ANR)] Flow [R/min. (ANR)]

739
 Digital electro-pneumatic regulator

Refrigerating
type dryer
Desiccant
type dryer
EVD-3000 Series
High polymer JIS symbol
membrane R

type dryer P A

Air filter

Auto. drain
/ others
F.R.L.
Specifications
(Module unit)
EVD-3100-*08* EVD-3100-P08* EVD-3500-*08* EVD-3500-P08* EVD-3900-*08* EVD-3900-P08*
F.R.L.
(Separate) EVD-3100-*10* EVD-3100-P10* EVD-3500-*10* EVD-3500-P10* EVD-3900-*10* EVD-3900-P10*
Descriptions
Compact Analog type Parallel type Analog type Parallel type Analog type Parallel type
F.R.
(*··· 0/1/2) (*···0/1/2) (*···0/1/2)
Precise
regulator Working fluid Clean compressed air (ISO 8573-1 Class 1.3.2 or equivalent or JIS B 8392-1 Class 1 1.3.2 or equivalent)
F.R.L.
(Related Max. working pressure 160kPa 700kPa 1000kPa
products)
Clean Min. working pressure Control pressure + 50kPa Control pressure + 100kPa
F.R.
Electro Withstanding Inlet side 240kPa 1050kPa 1500kPa
pneumatic pressure
regulator Output side 150kPa 750kPa 1350kPa
Air Control pressure range Note 1 0 to 100kPa 0 to 500kPa 0 to 900kPa
booster
Speed
Power voltage 24 VDC 10% (safety power supply with ripple ratio 1% or less)
control valve
Current consumption 0.15A or less (power supply rush current 0.6A or less when power turned ON)
Silencer 0-10 VDC (6.7kΩ) 0-10 VDC (6.7kΩ) 0-10 VDC (6.7kΩ)
Input signal
Check valve 0-5 VDC (10kΩ) 10bit 0-5 VDC (10kΩ) 10bit 0-5 VDC (10kΩ) 10bit
/ others (Input impedance)
4-20mADC (250Ω) 4-20mADC (250Ω) 4-20mADC (250Ω)
Joint
/ tube Pre-set input 8 points None 8 points None 8 points None
Vacuum
filter
Output accuracy: ±6%F.S or less, analog output: 1-5 VDC (connected load impedance 500kΩ or more)
Output signal Note 2
Vacuum Switch output: NPN or PNP open collector output, 30V or less 50mA or less, voltage drop 2.4V or less, PLC and relay compatible
regulator
Error output signal NPN or PNP open collector output, 30V or less 50mA or less, voltage drop 2.4V or less, PLC and relay compatible
Suction
plate 1 to 100kPa 5 to 500kPa 9 to 900kPa
Direct memory setting
Magnetic (Minimum setting width 1kPa/setting resolution 1kPa) (Minimum setting width 1kPa/setting resolution 1kPa) (Minimum setting width 1kPa/setting resolution 2kPa)
spring buffer
Display method 7-segment LED 3 digits, display accuracy: ±2%F.S. or less
Mechanical
pressure SW Pressure display Display range 0 to 100kPa 0 to 500kPa 0 to 900kPa
Electronic
pressure SW Display resolution 1kPa 1kPa 1kPa
Contact / close Hysteresis Note 3 0.5%F.S. or less
contact conf.
SW
Linearity Note 3 ±0.3%F.S. or less
Air sensor
Resolution Note 3 0.2%F.S. or less
Pressure SW Repeatability Note 3 0.3%F.S. or less
for coolant
Small Temperature Zero point variation 0.15%F.S./˚C or less
flow sensor characteristics Span variation 0.07%F.S./˚C or less
Small
flow controller Maximum flow rate (ANR) Note 4 700 /min. 1500 /min.
Flow sensor Step response Note 5 Loadless 0.2sec. or less
for air
Mechanical vibration proof 98m/s2 or less
Flow sensor
for water Ambient temperature 5 to 50˚C
Total air Working fluid temperature 5 to 50˚C
system
Total air Piping connection IN, OUT port Port diameter option 08:Rc1/4, 10: Rc3/8
system
(Gamma) port size EXH port Rc3/8
Ending Installation direction Free
Weight (body) 450g
Protective circuit Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection
Note 1: There is a 1%F.S. or less residual pressure when the input signal is 0%. (EVD-1100: 1kPa, EVD-1500: 5kPa, EVD-1900: 9kPa)
Note 2: Select the analog output or switch output.
Note 3: The above characteristics apply in the control pressure 10 to 90% range with a 24 VDC power voltage and the working pressure set to maximum control
pressure +50kPa (EVD-1100), or maximum control pressure + 100kPa (EVD-1500, 1900).
Also, limited toa closed circuit in the secondary side, and the pressure may vary if used as air blow etc.
Note 4: The characteristics where working pressure is maximum and control pressure is maximum are shown.
Note 5: Working pressure: Max. working pressure and step rate: 50% F.S. →100% F.S.
50% F.S. → 60% F.S.
50% F.S. → 40% F.S.

740
 EVD-3000 Series
How to order / Internal structure drawing
How to order Refrigerating
type dryer

EVD-3 500 0 08 AN C1B3 3 Desiccant

type dryer
High polymer
Symbol Descriptions membrane
type dryer
A Pressure specifications
A Pressure specifications Air filter
100 100kPa
Auto. drain
500 500kPa / others

900 900kPa F.R.L.

(Module unit)
B Input specifications F.R.L.
B Input specifications (Separate)
0 0-10 VDC
Compact
1 0-5 VDC F.R.

2 4-20mADC Precise
regulator
P Parallel 10bit F.R.L.
(Related
products)
C Port diameter (IN,OUT) Clean
C Port diameter F.R.
08 Rc1/4
(IN,OUT) Electro
10 Rc3/8 pneumatic
regulator
D Output specifications Air
D Output specifications booster
AN 1-5V analog, error (NPN) Speed
control valve
AP 1-5V analog, error (PNP)
Switch (NPN), error (NPN) Silencer
SN
SP Switch (PNP), error (PNP) Check valve
/ others
EOption Joint
E Option / tube
Cable option
Vacuum
Blank None filter

Analog 9-conductor, cable 1m Vacuum

C1 regulator
C3 Analog 9-conductor, cable 3m Suction
plate
P1 Parallel 15-conductor, cable 1m
Magnetic
F Power P3 Parallel 15-conductor, cable 3m spring buffer
voltage
 Option (cable, bracket) single part model
Bracket option enclosed Mechanical
pressure SW
Blank None
Electronic
EVD- C1 B3 B-type bracket, floor mounted type pressure SW
Contact / close
L3 L-type bracket, wall mounted type contact conf.
SW

E Option
F Power voltage Air sensor
3 24 VDC Pressure SW
for coolant
*Contact your nearest CD sales office or dealer for details on UL compliant parts.
Internal structure and parts list Small
flow sensor
Small
flow controller
Flow sensor
1 for air
No. Parts name Material
Flow sensor
1 Cover PBT resin for water
2 10
2 D sub-connector – Total air
system
3 Housing ABS resin Total air
3 11 system
4 Controller board – (Gamma)
5 3 way valve – Ending
4 12 6 Valve base Polyphenylene sulfide resin
Digital electro-pneumatic regulator

7 Pilot chamber Polyphenylene sulfide resin

5 13 8 Piston body assembly Aluminum alloy die-casting, etc.
9 Body Aluminum alloy die-casting
6 14 10 Pressure sensor –
11 Piston assembly Aluminum alloy, stainless steel, etc.

7
12 Spring Stainless steel
15
13 Top valve Brass, special nitrile rubber
F.R.L. unit

14 Bottom valve Brass, special nitrile rubber

8 16
15 Bottom cap Brass
16 O ring Nitrile rubber
9 17
17 Base plate Steel sheet

741
 EVD-3000 Series
Refrigerating
Dimensions
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

52.4
Air filter

Auto. drain
/ others
F.R.L.
(Module unit) D-sub connector 15-pin, plug 2-#4–4OUNC
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L. ø4.2
(Related Port R (Pilot air
products)
exhaust port)
Clean
F.R.
Electro
pneumatic
regulator

(140)
Air
133

booster
Speed Silencer (optional)
control valve
(Model no.: SlW-10A)
Silencer

Check valve
/ others
IN OUT
Joint
/ tube

25.7
Vacuum
filter
Vacuum
regulator 2-Rc1/4
Suction 50 2-Rc3/8 25 78 Rc3/8 8
plate EXH port
38
Magnetic
spring buffer
Mechanical
pressure SW
2-M5 depth
Electronic
24

pressure SW 12
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
Option dimensions
flow sensor
Small  B-type bracket (-B3): Floor mounted type  L-type bracket (-L3): Wall mounted type
flow controller
Flow sensor 38
for air 38
Flow sensor 24
8–ø4.5 24 4 - full R
for water
6

Total air
system 8–ø4.5
Total air
36.5

system 2
(Gamma) ø3
38
24

30
50

61.5

2
Ending ø3
38
24
6

71
87 50
2.3

53.2
1.6

22
12

26
7

36
50
*Refer to page 745 for details on the outline dimensions of the cable options.

742
 EVD-3000 Series
I/O characteristics / Monitor output
I/O characteristics Refrigerating
type dryer
Desiccant
 EVD-3100  EVD-3500  EVD-3900 type dryer
High polymer
membrane
100 500 900 type dryer
800 Air filter
Control pressure (kPa)

Control pressure (kPa)

Control pressure (kPa)

80 400 700
Auto. drain
600 / others
60 300
500 F.R.L.
400 (Module unit)
40 200
300 F.R.L.
(Separate)
20 100 200
Compact
100 F.R.
0 0 0 Precise
0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 regulator
Input signal (%) Input signal (%) Input signal (%) F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve
Monitor output (Only analog output type: Model AN/AP)
Silencer

Check valve
 EVD-3100  EVD-3500  EVD-3900 / others
Joint
5 5 5 / tube
Vacuum
4 filter
4 4
Analog output (VDC)

Analog output (VDC)

Analog output (VDC)

Vacuum
regulator
3 3 3
Suction
plate
2 2 2
Magnetic
spring buffer
1 1 1
Mechanical
pressure SW
0 0 0
Electronic
0 20 40 60 80 100 0 100 200 300 400 500 0 100 200 300 400 500 600 700 800 900 pressure SW
Control pressure (kPa) Control pressure (kPa) Control pressure (kPa) Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Digital electro-pneumatic regulator
F.R.L. unit

743
 EVD-3000 Series
Refrigerating Flow characteristics
type dryer
Desiccant  EVD-3100-*08  EVD-3100-*10
type dryer
High polymer Working pressure 160kPa Working pressure 160kPa
membrane 120 120
type dryer
Control pressure (kPa)

Control pressure (kPa)

Air filter 100 100

Auto. drain 80 80
/ others
60 60
F.R.L.
(Module unit)
40 40
F.R.L.
(Separate) 20 20
Compact
F.R. 0 0
Precise 0 200 400 600 800 1000 0 200 400 600 800 1000 1200
regulator Flow [R/min. (ANR)] Flow [R/min. (ANR)]
F.R.L.
(Related
products)
Clean
F.R.
Electro
 EVD-3500-*08  EVD-3500-*10
pneumatic
regulator Working pressure 700kPa Working pressure 700kPa
Air 600 600
booster
500 500
Control pressure (kPa)

Control pressure (kPa)

Speed
control valve
400 400
Silencer
300 300
Check valve
/ others 200 200
Joint 100 100
/ tube
Vacuum 0 0
filter 0 1000 2000 3000 4000 0 1000 2000 3000 4000
Vacuum Flow [R/min. (ANR)] Flow [R/min. (ANR)]
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
 EVD-3900-*08  EVD-3900-*10
pressure SW Working pressure 780kPa Working pressure 780kPa
1000 1000
Electronic 900 900
Control pressure (kPa)

Control pressure (kPa)

pressure SW
800 800
Contact / close
contact conf. 700 700
SW 600 600
Air sensor 500 500
400 400
Pressure SW 300 300
for coolant
200 200
Small 100 100
flow sensor
0 0
Small 0 500 1000 1500 2000 2500 3000 3500 4000 4500 5000 0 500 1000 1500 2000 2500 3000 3500 4000 4500 5000
flow controller
Flow [R/min. (ANR)] Flow [R/min. (ANR)]
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air Relief characteristics
system
(Gamma)

Ending  EVD-3100  EVD-3500  EVD-3900

Working pressure 160kPa Working pressure 700kPa Working pressure 1000kPa
120 600 1000
900
100 500
Control pressure (kPa)

Control pressure (kPa)

Control pressure (kPa)

800
700
80 400
600
60 300 500
400
40 200 300
200
20 100
100
0 0 0
0 200 400 600 800 1000 0 1000 2000 3000 4000 0 500 1000 1500 2000 2500 3000 3500 4000 4500 5000
Flow [R/min. (ANR)] Flow [R/min. (ANR)] Flow [R/min. (ANR)]

744
 EVD Series
Cable optional dimensions
Cable optional dimensions Refrigerating
type dryer

 EVD-C1, EVD-C3 Desiccant

type dryer
28.5 High polymer
membrane
type dryer
11
Shield wire Air filter
*Connect the shielding wire
to the “power - ” (0 V). Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
(ø6)
(ø10)

9-AWG26 Precise
regulator
F.R.L.
(Related
33.4

18.9 products)
Clean
F.R.
1000 Electro
3000 100 pneumatic
regulator
Air
booster
D-sub
Speed
socket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 control valve
pin No.
Silencer
Isolator color Brown Orange Yellow – Red – – – – Gray White – Green Blue Black
Check valve
Power Monitor Switch Error / others
Name Pre-set input signal supply Input signal Vacant
output output output Joint
+ / tube
Power
Vacant Vacuum
Vacant Vacant Vacant Vacant Common NPN NPN supply - filter
0-10 0-5 4-20 Output or or
Input type Bit 1 Bit 2 Bit 3 +24VDC Vacant (0V) Vacuum
VDC VDC mADC 1-5 VDC PNP PNP
regulator
output output
Suction
plate
Note: The No. 10 pin common is the common for the preset input (pin No. 1 to 3).
Magnetic
spring buffer
 EVD-P1, EVD-P3 Mechanical
pressure SW
28.5
Electronic
pressure SW
11 Shield wire Contact / close
*Connect the shielding wire contact conf.
SW
to the “power - ” (0 V).
Air sensor

Pressure SW
for coolant
Small
flow sensor
(ø6.5)

Small
(ø10)

flow controller
Flow sensor
for air
33.4

18.9 Flow sensor

15-AWG26 for water
Total air
1000 system
3000 100 Total air
system
(Gamma)

Ending
D-sub
socket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Digital electro-pneumatic regulator

pin No.
White Red Green
Light (with (with (with
Isolator color Brown Orange Yellow Purple Red blue Pink black black Gray White Green Blue Black
black
line) line) line)
Power Parallel input Monitor Switch Error
Name Parallel input signal supply Parallel input signal signal
+ output output output

Power
Common
F.R.L. unit

NPN NPN supply -

Output or or (0V)
Input type Bit 1 Bit 2 Bit 3 Bit 4 +24VDC Bit 5 Bit 6 Bit 7 Bit 8 Bit 9 Bit 10
1-5 VDC PNP PNP
output output

Note1: The No. 10 pin common is the common for the parallel input signal (pin No., 1 to 4, 6 to 9, 11, 12).

745
 EVD Series
Refrigerating
Wiring methods
type dryer
Desiccant
type dryer
High polymer Example of internal circuit and load connection Analog input type
membrane
type dryer

Air filter

Auto. drain
/ others
EVD-1*-0*AN-*-*, EVD-1*-1*AN-*, EVD-1*-2*AN-* EVD-1*-0*AP-*-*, EVD-1*-1*AP-*, EVD-1*-2*AP-*
F.R.L.
(Module unit) EVD-3*-0*AN-*-*, EVD-3*-1*AN-*, EVD-3*-2*AN-* EVD-3*-0*AP-*-*, EVD-3*-1*AP-*, EVD-3*-2*AP-*
F.R.L.
(Analog input, analog output + error output type NPN output) (Analog input, analog output + error output type PNP output)
(Separate)
Compact
F.R.
Precise
regulator Pin 5 (power +) Pin 5 (power +)

F.R.L.
Pin 11 (analog input)
(Related Pin 13 (monitor output)
products) Signal generator

Clean
F.R. Pin 1 (preset bit 1)

Output short-circuit
protection circuit
Electro
pneumatic Pin 2 (preset bit 2)
max50mA
regulator Pin 14 (error output)

+
Air Pin 11 (analog input)
Main circuit

Main circuit
Pin 3 (preset bit 3) Signal generator
+
booster

–
–

Speed Pin 10 (common)

control valve Pin 1 (preset bit 1)

Silencer Pin 13 (monitor output)

Pin 2 (preset bit 2)
Load Load

Check valve Load Load

/ others Pin 14 (error output) Pin 3 (preset bit 3)
Output short-circuit
protection circuit

Joint Pin 10 (common)

/ tube Pin 15 (power -)
max50mA
Pin 15 (power -)

Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
EVD-1*-0*SN-*-*, EVD-1*-1*SN-*, EVD-1*-2*SN-* EVD-1*-0*SP-*-*, EVD-1*-1*SP-*, EVD-1*-2*SP-*
Mechanical
pressure SW EVD-3*-0*SN-*-*, EVD-3*-1*SN-*, EVD-3*-2*SN-* EVD-3*-0*SP-*-*, EVD-3*-1*SP-*, EVD-3*-2*SP-*
Electronic (Analog input, switch output + error output type NPN output) (Analog input, switch output + error output type PNP output)
pressure SW
Contact / close
contact conf.
SW

Air sensor
Pin 5 (power +) Pin 5 (power +)

Pressure SW Pin 11 (analog input)

for coolant
Output short-circuit protection circuit

Signal generator
max50mA
Small Pin 13 (switch output)
flow sensor Pin 1 (preset bit 1)

Small max50mA
flow controller Pin 2 (preset bit 2)
Pin 14 (error output)
+

Flow sensor Pin 11 (analog input)

Main circuit
Main circuit

for air Pin 3 (preset bit 3) Signal generator

–
+

Flow sensor Pin 10 (common)

–

for water Pin 1 (preset bit 1)

Total air Load

system Pin 13 (switch output) Load Load
Pin 2 (preset bit 2)
Output short-circuit protection circuit

Total air Load

system max50mA
Pin 14 (error output) Pin 3 (preset bit 3)
(Gamma)
Pin 10 (common)
Ending Pin 15 (power -)
max50mA
Pin 15 (power -)

 Connector pin layout (product side)

(Analog input type)

(1) (2) (3) (4) (5) The analog input type does not have the (4), (6), (7), (8), (9) or (12) pins.

(6) (7) (8) (9) (10)

(11) (12) (13) (14) (15)

746
 EVD Series
Technical data
Refrigerating
type dryer
Desiccant
type dryer
Example of internal circuit and load connection Parallel input type High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
EVD-1*-P*AN-*-* EVD-1*-P*AP-*-*
F.R.L.
EVD-3*-P*AN-*-* EVD-3*-P*AP-*-* (Module unit)
(Parallel input, analog output + error output type NPN output) (Parallel input, analog output + error output type PNP output) F.R.L.
(Separate)
Compact
F.R.
Precise
Pin 5 (power +) Pin 5 (power +) regulator
Pin 12 (MSB bit 10) F.R.L.
Pin 11 (bit 9) Pin 13 (monitor output) (Related
Pin 9 (bit 8)
Pin 8 (bit 7)
products)
Pin 7 (bit 6) Clean
Pin 6 (bit 5)
F.R.

Output short-circuit
Pin 4 (bit 4)

protection circuit
Pin 3 (bit 3)
Pin 2 (bit 2)
Electro
max50mA pneumatic
Pin 1 (LSB bit 1)
Pin 14 (error output) regulator

+
Pin 12 (MSB bit 10) Air

Main circuit
Main circuit

Pin 11 (bit 9)
+

booster

–
Pin 9 (bit 8)
–

Pin 8 (bit 7)
Pin 10 (common)
Pin 7 (bit 6) Speed
Pin 6 (bit 5) control valve
Pin 4 (bit 4)
Pin 3 (bit 3)
Pin 13 (monitor output) Pin 2 (bit 2) Load Load Silencer
Pin 1 (LSB bit 1)

Load Load Check valve

Pin 14 (error output) / others
Output short-circuit
protection circuit

Pin 10 (common) Joint

max50mA / tube
Pin 15 (power -) Pin 15 (power -)

Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
EVD-1*-P*SN-*-* EVD-1*-P*SP-*-*
Mechanical
EVD-3*-P*SN-*-* EVD-3*-P*SP-*-* pressure SW
(Parallel input, switch output + error output type NPN output) (Parallel input, switch output + error output type PNP output) Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor
Pin 5 (power +) Pin 5 (power +)

Pin 12 (MSB bit 10)

Pin 11 (bit 9)
Pressure SW
Output short-circuit protection circuit

Pin 9 (bit 8) for coolant

Pin 8 (bit 7)
max50mA
Pin 7 (bit 6) Pin 13 (switch output) Small
Pin 6 (bit 5) flow sensor
Pin 4 (bit 4)
Pin 3 (bit 3)
Pin 2 (bit 2) max50mA Small
Pin 1 (LSB bit 1)
Pin 14 (error output)
flow controller
+

Pin 12 (MSB bit 10) Flow sensor

Main circuit
Main circuit

Pin 11 (bit 9)
for air
–

Pin 9 (bit 8)
+

Pin 8 (bit 7)
Pin 10 (common) Pin 7 (bit 6) Flow sensor
–

Pin 6 (bit 5) for water

Pin 4 (bit 4)
Load Pin 3 (bit 3)
Pin 2 (bit 2)
Total air
Pin 13 (switch output) Load Load
Pin 1 (LSB bit 1) system
Output short-circuit protection circuit

Load
Total air
max50mA system
Pin 14 (error output)
(Gamma)
Pin 10 (common)
max50mA Ending
Pin 15 (power -) Pin 15 (power -)
Digital electro-pneumatic regulator

 Connector pin layout (product side)

(Parallel input type)

(1) (2) (3) (4) (5)

F.R.L. unit

(6) (7) (8) (9) (10)

(11) (12) (13) (14) (15)

747
 EVD Series
Refrigerating Input method
type dryer
Desiccant
type dryer
High polymer
 Relation of parallel type input signal and control pressure
membrane The parallel type input signal has 10 bits, and when converted into a decimal is O-1023.
type dryer
Input signal = EVD setting pressure (kPa)/maximum control pressure x 1023 The maximum control pressure is 100kPa for EVD-1000
Air filter
500kPa for EVD-1500
Auto. drain 900kPa for EVD-1900.
/ others
F.R.L. Example: When setting 300kPa with EVD-1500
(Module unit)
300 (kPa) / 500 (kPa)1023 = 613.8→614
F.R.L.
(Separate)
When converted and set in 614, then
Compact .
F.R. 500 (kPa)614 / 1023 =. 300 (kPa)
Precise
regulator
F.R.L.
(Related
products)
Clean
When 614 (decimal) is converted into a binary, the result is 1001100110. 1 sets the input signal ON, and 0 sets the input signal OFF. (Refer to table below).
F.R.
Electro
pneumatic D-sub socket pin 12 11 9 8 7 6 4 3 2 1
regulator No.
Air
booster Green Red White
Cable option
Speed (with black White (with black (with black Pink Light blue Purple Yellow Orange Brown
control valve isolator color
line) line) line)
Silencer
Bit
Bit 9 Bit 8 Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1
Check valve Type of input 10
/ others LSB
MSB
Joint
/ tube
Binary
Vacuum [For 614 (decimal)] 1 0 0 1 1 0 0 1 1 0
filter
Vacuum
regulator
Suction Input signal ON OFF OFF ON ON OFF OFF ON ON OFF
plate
Magnetic
spring buffer
Mechanical
pressure SW  Relation of preset memory and input signals
Electronic
pressure SW
Contact / close D-sub socket pin No.
contact conf. 3 2 1
SW No.
Air sensor
Cable option
Yellow Orange Brown Pre-set memory
Pressure SW isolator color
for coolant
Small
flow sensor Type of input Bit 3 Bit 2 Bit 1
Small
flow controller
OFF OFF OFF P1
Flow sensor
for air OFF OFF ON P2
Flow sensor
for water OFF ON OFF P3
Total air OFF ON ON P4
system Input signal
Total air ON OFF OFF P5
system
(Gamma) ON OFF ON P6
Ending ON ON OFF P7
ON ON ON P8

748
MEMO Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Digital electro-pneumatic regulator
F.R.L. unit

749
 EVD Series
Refrigerating
type dryer
Names and functions of display and operation section
Desiccant 3-digit LED display (green)
type dryer
High polymer Output display (red)  Displays the pressue display and function setting
membrane details during RUN mode (pressure display).
type dryer
 "F" is displayed when confirming * The setting mode No. and setting details are dis-
Air filter the function setting. played when displaying details of function settings.
 "-" lights when switch output is on.  The value, etc., is displayed when data is set.
Auto. drain
/ others (Only when using switch output  The error code No. is displayed when an error is
F.R.L. specifications.) output.
(Module unit) * Blinks when overcurrent is de- (Pressure display) (Setting details display) (Error output)

F.R.L.
tected.
(Separate)  "E" lights when error output is on.
Compact * Blinks when overcurrent is de-
F.R. tected. Setting Setting Code No.
mode No. descriptions
Precise
regulator
* If there are conditions of +/-, upper/lower limit, key
F.R.L.
(Related
products)
and are indicated.
Clean  Setting details are sequentially displayed during
F.R.
RUN mode (pressure display).
Electro
pneumatic  Use to select the setting when setting data.
regulator  Use to count up the value, etc., when setting
Key
Air data.
booster
Speed
 Use to enter each setting mode.
control valve  Use to set values, etc., when setting data. Key
Silencer  Use to select the digit of the value, etc., when
setting data.
Check valve
/ others
Joint
/ tube Function list
Vacuum
filter
Setting
Vacuum Screen display Name Display content (RUN MODE) Setting details (setting mode)
regulator method
Suction Secondary pressure is confirmed with the 3-digit
plate Pressure
numerical display LED.
Magnetic
Display
Unit: kPa
spring buffer
Mechanical
pressure SW For analog input: Analog input, preset memory in-
put, or direct memory input is selected.
Electronic
Screen F1 The selected input signal type and current target For pre-set input/direct memory input, input the set-
pressure SW Input
value (pressure conversion value) are confirmed. ting for this mode.
Contact / close signal P.753
contact conf. *When pre-set input (8-point) is selected, the For parallel input: Parallel input or direct memory in-
SW selection
currently selected preset No. and setting value are put is selected.
Air sensor displayed. For direct memory input, input the setting for this
mode.
Pressure SW
for coolant
The validity of the zero/span adjustment and the
Small
Select whether to use with the full scale or with the
Screen F2 setting value are confirmed.
flow sensor zero and span adjusted.
Zero/span When "valid," the F2.on - zero point adjustment
When zero/span adjustment is selected, P.754
Small adjustment value (L) and span point adjustment value (H) are
flow controller the adjustment value for this mode can be set
alternately displayed.
randomly.
Flow sensor * The default setting is set with the full scale (–).
for air
Flow sensor
for water Screen F3 The validity of the automatic power off function is
The validity of the automatic power off function is
Automatic selected.
Total air confirmed. P.754
system power off Note: The automatic power off time is about one
* The default setting is invalid (– –).
Total air minute and cannot be changed.
system
(Gamma)
The switch output validity and setting value are
Ending Switch
confirmed. When "Mode 1 valid" is selected, the
output * Switch output validity is selected.
Screen F4 F4.0 - - tolerable range setting value (L) - +
When valid, mode 1 or 2 is selected.
tolerable range setting value (H) are alternately
displayed. When "Mode 2 valid" is selected, F4.1 - +/- tolerable values and maximum/minimum values P.754
Only switch minimum setting value (L) - maximum setting value are set randomly.
output (H) is alternately displayed. Note: The hysteresis width cannot be set.
specifications * The default setting is invalid (– –).

Screen F5 The validity of proportional value changes and the Select whether to use the standard value or
Proportional set level are confirmed. When "Proportional Value whether to change the proportional value.
change Up" is selected, F5.H is displayed.
The proportional value level is set in this mode only P.755
When "Proportional Value Down" is selected, the
when "Proportional Value Down" is selected. (10
F.5L - setting value is alternately display.
stages)
* The default setting is the standard value (– –).
* Only EVD-*100

750
 EVD Series
Operation
Operation Refrigerating
type dryer
Desiccant
type dryer
RUN MODE dislay content list High polymer
membrane
type dryer

 F1 (input signal selection) screen F1 display descriptions Air filter

The input signal type and target value are alternately displayed. Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Input signal type symbol Target (pressure conversion) Compact
F.R.
(Analog input type) (Digital input type) Precise
EVD-*-0**-*-*,EVD-*-1**-*-*,EVD-*-2**-*-* EVD-*-P**-*-* regulator
F.R.L.
(Related
Input signal type symbol Descriptions Input signal type symbol Descriptions products)
Clean
Analog 0-10 VDC input * Parallel 10 bit input F.R.
Electro
pneumatic
Analog 0-5 VDC input * Direct memory input regulator
Air
booster
Analog 4-20mADC input *
Speed
Pre-set memory input control valve
to The selected preset No. is displayed. Silencer

Direct memory input Check valve

/ others
* [F1/A0], [F1/A1], or [F1/A2] display one based on the model. Joint
/ tube
Vacuum
filter
 F2 (zero/span adjustment) screen F2 display descriptions
Vacuum
The validity of the zero/span adjustment and the setting value are confirmed. regulator
Note: This function is invalid if preset memory input or direct memory input is selected for F1 mode. Suction
plate

(Invalid) (Valid) Magnetic

spring buffer
Control pressure

Invalid
Mechanical
100% 100% pressure SW
Span point (H) Electronic
Valid setting range pressure SW
Zero point (L) setting range 100 to10%
Contact / close
contact conf.
0 to50% SW
Zero Set value Span Set value
0% 0%
point (%) point (%) 0% 100% 0% 100% Air sensor
adjustment adjustment
Input signal Input signal
Pressure SW
for coolant
 F3 (auto power off ) screen F2 display descriptions Small
flow sensor
The validity of the automatic power off function is confirmed.
Small
flow controller

Invalid Flow sensor

for air
Flow sensor
for water
Valid
Total air
system
Total air
 F4 (switch output function) screen F4 dislay description (applicable model: EVD-**-**SN, EVD-**-**SP) system
(Gamma)
The switch output validity and setting value are confirmed.
Note: This is invalid with analog output specifications. (– –) is displayed on the screen but cannot be used. Ending
Digital electro-pneumatic regulator

Invalid

Mode 1 (Mode 1) (Mode 2)

H (+ tolerance) H (upper limit side)
Input signal set point
- tolerance Set + tolerance Set L (- tolerance) L (lower limit side)
value (%) value (%)

Mode 2
Output

Output

ON ON ON ON ON ON
F.R.L. unit

OFF OFF OFF OFF OFF OFF

Lower Set Upper Set
limit side value (%) limit side value (%)

751
 EVD Series
Refrigerating
type dryer
RUN MODE dislay content list
Desiccant
type dryer
 F5 (proportional value change) screen F5 display descriptions
High polymer
membrane
type dryer Applicable model: EVD-1100-***-*-*,EVD-3100-***-*-*
Note) This screen is no displayed for EVD-*500 or EVD-*900.
Air filter

Auto. drain
The validity of the proportional value and the set level are confirmed.
/ others
 When invalid : control is applied with standard values (default value)
F.R.L.
(Module unit)  When valid : "Proportional value up" or "proportional value down" is selected.
The set level is selected from ten stages only when "proportional value down" is selected.
F.R.L.
(Separate)
Compact <Effect of increasing propotional value>
F.R.
The effect differs with piping and load capacity conditions, but control is done at higher accuracy.
Precise
regulator Hunting occures easily, requiring care during use.
F.R.L.
(Related
products) Increased proportional value
Clean Standard setting Increased proportional value setting
F.R.
Control pressure

Control pressure

Pressure reduction
Electro Pressure increase
pneumatic
regulator
Air
booster
Speed
control valve Input signal Input signal

Silencer
<Effect of decreasing propotional value>
Check valve If vibration occures during blow applications or during a leakage test, stabe control is ensured by decreasing the proportional value as shown below.
/ others
Joint
/ tube
Decreased proportional value
Vacuum After adjustment (Decreased proportional value setting)
filter Before adjustment (standard setting)
Vacuum
regulator
Control pressure

Control pressure

Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW Time Time
Contact / close
contact conf.
SW
Invalid
Air sensor

Pressure SW
When the
for coolant proportional value
is increased (H)
Small
flow sensor When the
proportional value
Small is decreased (H)
flow controller
Flow sensor Setting level
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending

752
 EVD Series
Operation

How to set setting mode CAUTION Release the key lock before changing setting details. (Refer to page 756.) Refrigerating
type dryer
Desiccant
type dryer
 F1 (input signal selection function) Hold down the SET key for two seconds or longer with the screen F1 displayed. F1 setting mode is entered.
High polymer
 Changing the analog input signal selection membrane
type dryer
Note: Anlog input specifications cannot be changed.
Air filter

Auto. drain
2 seconds or longer
/ others
F.R.L.
When analog input is selected *Default setting (Module unit)

After setting, exits setting mode and returns to screen F1. F.R.L.
(Separate)
2 seconds or longer Compact
F.R.

When preset memory input is selected Precise

regulator
Enters preset memory input setting mode (see below) F.R.L.
(Related
2 seconds or longer
products)
Clean
F.R.
When direct memory input is selected Electro
pneumatic
Enters the direct memory input setting mode (see below) regulator
Air
2 seconds or longer booster
Speed
control valve
Exits input signal selection setting mode, and returns to screen F1. Silencer

Check valve
 Changing parallel input signal selection / others
Joint
/ tube
2 seconds or longer Vacuum
filter
When parallel input is selected *Default setting
Vacuum
After setting, exits setting mode and returns to screen F1. regulator
Suction
2 seconds or longer plate
Magnetic
When direct memory input is selected spring buffer
Mechanical
Enters the direct memory input setting mode (see below) pressure SW
2 seconds or longer Electronic
pressure SW
Contact / close
contact conf.
Exits input signal selection setting mode, and returns to screen F1. SW

Air sensor
 Using preset memory input setting mode
Pressure SW
* Hold down the SET key for two seconds or longer with screen F1 preset memory input set. for coolant
Small
flow sensor

2 seconds 2 seconds Small

or longer
or longer
Input the targer value. flow controller
key: Moves digit Moves to the next No. after setting. Flow sensor
key: Counts up value
for air
Flow sensor
for water
Total air
After setting, exits setting mode, and returns to screen F1. system
Total air
system
2 seconds
or longer
2 seconds
or longer
(Gamma)

Input the targer value. Ending

key: Moves digit
Exit preset memory
Digital electro-pneumatic regulator

input setting mode and key: Counts up value

returns to screen F1.

 Using direct memory input setting mode

* Hold down the SET key for two seconds or longer with screen F1 direct memory input set.

After setting, exits setting mode, and returns to screen F1.

2 seconds
or longer
F.R.L. unit

Input the targer value.

key: Moves digit

key: Counts up value

753
 EVD Series
Refrigerating
type dryer
How to set setting mode CAUTION Release the key lock before changing setting details. (Refer to page 756.)

Desiccant
type dryer  F2 (zero/span adjustment function) Hold down the SET key for two seconds or longer with the screen F2 displayed. F2 setting mode is entered.
High polymer
membrane
type dryer

Air filter 2 seconds or longer

Auto. drain To use with full scale *Default setting

/ others
After setting, exits setting mode and returns to screen F2.
F.R.L.
(Module unit)
2 seconds or longer
F.R.L.
(Separate)
Compact To use with adjusted zero/span
F.R.
Precise After setting, exits setting mode and returns to screen F2.
regulator
F.R.L. 2 seconds or longer
2 seconds 2 seconds
(Related or longer or longer
products)
Input the setting value. Input the setting value.
Clean key: Moves digit key: Moves digit
F.R. Exits zero/span
Electro adjustment setting mode key: Counts up value key: Counts up value
pneumatic and returns to screen F2.
regulator
Air * This function cannot be used when present memory input or direct memory input is selected with F1 (input signal selection function). Only the full scale can be
booster
used.
Speed  F3 (automatic power OFF function) Hold down the SET key for two seconds or longer with the screen F3 displayed. F3 setting mode is entered.
control valve

Silencer

Check valve 2 seconds or longer

/ others
Joint To disable automatic power off function *Default setting
/ tube
After setting, exits setting mode and returns to screen F3.
Vacuum
filter 2 seconds or longer

Vacuum
regulator
Suction To enable automatic power off function
plate
After setting, exits setting mode and returns to screen F3.
Magnetic
spring buffer 2 seconds or longer

Mechanical
pressure SW
Electronic Exits automatic power off mode, and returns to screen F3.
pressure SW
Contact / close
contact conf. * If any key is pressed during automatic power off, the display is turned on.
SW * The automatoc power off time is set to about one minute and cannot be changed.
Air sensor
 F4 (switch output function) Hold down the SET key for two seconds or longer with the screen F4 displayed. F4 setting mode is entered.
Pressure SW (Applicable model: EVD-**-**SN,EVD-**-**SP)
for coolant
Note: This is not vald with analog output specifications. (– –) is displayed on the screen but cannot be used.
Small
flow sensor
Small
flow controller
Flow sensor 2 seconds
or longer
for air
To disable switch output *Default setting
Flow sensor
for water After setting, exits setting mode and returns to screen F4.
Total air 2 seconds or longer
system
Total air
system To enable switch output mode 1
(Gamma)

Ending After setting, exits setting mode and returns to screen F4.

2 seconds or longer 2 seconds 2 seconds

or longer or longer

Input the setting value. Input the setting value.

key: Moves digit key: Moves digit

key: Counts up value key: Counts up value

To enable switch output mode 2

After setting, exits setting mode and returns to screen F4.

2 seconds or longer 2 seconds 2 seconds

or longer or longer

Input the setting value. Input the setting value.

Exits switch output key: Moves digit key: Moves digit
setting mode, and
key: Counts up value key: Counts up value
returns to screen F4.

754
 EVD Series
Operation

How to set setting mode CAUTION Release the key lock before changing setting details. (Refer to page 756.) Refrigerating
type dryer
Desiccant
type dryer
 F5 (Proportional value change function) Hold down the SET key for two seconds or longer with the screen F5 displayed. F5 setting mode is entered.
High polymer
membrane
Applicable model: EVD-1100-***-*-*,EVD-3100-***-*-* type dryer
Note) This screen is no displayed for EVD-*500 or EVD-*900.
Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
2 seconds
or longer F.R.L.
(Separate)
To disable the proportional value change function *Default setting Compact
F.R.
After setting, exits setting mode and returns to screen F5.
Precise
regulator
2 seconds or longer
F.R.L.
(Related
products)
Clean
F.R.
To use with increased proportional values Electro
pneumatic
regulator
After setting, exits setting mode and returns to screen F5.
Air
2 seconds or longer
booster
Speed
control valve

Silencer
To use with decreased proportional values
Check valve
After setting, exits setting mode and returns to screen F5. / others
Joint
2 seconds / tube
or longer

Vacuum
Select the setting level.
Exits proportional value filter
key: Setting level up
change mode and Vacuum
returns to screen F5. + key: Setting level down regulator
Suction
plate
Magnetic
After setting, exits setting mode and returns to screen F5. spring buffer
Mechanical
2 seconds
or longer pressure SW
Electronic
Select the setting level. pressure SW
key: Setting level up
Contact / close
+ key: Setting level down contact conf.
SW

Air sensor

Pressure SW
After setting, exits setting mode and returns to screen F5. for coolant
Small
2 seconds
or longer flow sensor
Small
flow controller
*When used with a decreased proportional value, operation takes place with the set level displayed on the even when the set level is selected.
When the set level is decided, press the "SET key" for two seconds or longer to enter the value. Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Digital electro-pneumatic regulator
F.R.L. unit

755
 EVD Series
Refrigerating
type dryer
Key lock
Desiccant
type dryer
This function prevents incorrect operation. Release the key lock before changing settings.
High polymer
membrane
type dryer  Operating the key lock  Releasing the key lock
Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
Hold down simultaneously for two seconds or longer Hold down simultaneously for two seconds or longer
F.R.L.
(Separate)
* The key is locked when power is turned on or turned on again.
Compact
F.R.
Precise
regulator Each setting range
F.R.L.
(Related
products)
Clean Function Settin display screen Setting details Setting specifications
F.R. Note 1
Electro F1: Input signal selection Range:
pneumatic Pre-set memory input *100 / 000 to 100
regulator Set the target value
*500 / 000 to 500
Air (pressure).
booster *900 / 000 to 900
Setting min. unit: 1kPa
Speed
control valve Note 1
F1: Input signal selection Range:
Silencer Direct memory input *100 / 000 to 100
Set the target value
*500 / 000 to 500
(pressure).
Check valve *900 / 000 to 900
/ others
Setting min. unit: 1kPa
Joint
/ tube Note 2
Set the zero point Range: 00 to 50
Vacuum F2: Zero/span adjustment
adjustment value. Setting level: 1%
filter
Note 2
Vacuum
regulator Set the span point Range: 100 to 010
adjustment value. Setting min. unit: 1%
Suction
plate
Magnetic
Range: -00 to -50
F4: Switch output Set the - tolorable value.
spring buffer Setting min. unit: -1%
Mode 1
Mechanical
pressure SW Range: 00 to 50
Set the + tolorable value. Setting min. unit: 1%
Electronic
pressure SW
Note 2
Contact / close Range: 00 to 90
contact conf. F4: Switch output Set the minimum value.
SW Setting min. unit: 1%
Mode 2
Air sensor Note 2
Range: 100 to 010
Pressure SW
Set the maximum value.
Setting min. unit: 1%
for coolant
Small F5: Proportional value change function
flow sensor
Proportional value up
Small The level cannot be set.
flow controller
Flow sensor
for air F5: Proportional value change function
Flow sensor Proportional value down Range: 01 to 10
for water Set the level.
Setting min. unit: 1
Total air
system
Total air
system Note 1: If set to a pressure of 1% F.S. or less, it may not be possible to control pressure due to the effect of residual pressure.
(Gamma)
Note 2: The setting range may be limited depending on the setting value.
Ending
F4: The switch output function is limited to the switch to the switch output type. It cannot be used with the analog output type.
Applicable model: EVD-**-**SN, EVD-**-**SP
F5: The proportional value change function is limited to the pressure range 100kPa type.
Applicable model: EVD-1100-***

756
 EVD Series
Operation

Default mode settings (Initialization) Refrigerating

type dryer
Desiccant
<Initializing> type dryer
Screen display Name Setting display Setting details High polymer
membrane
Screen F1 Analog type Parallel type type dryer

Input signal Analog/parallel input Air filter

selection
A0.A1.A2 Auto. drain
/ others
Screen F2 Hold down simultaneously for
F.R.L.
Full scale three seconds or longer
(Module unit)
Zero/span (Zero/span
adjustment adjustment invalid) F.R.L.
In initialization (Separate)
Compact
Screen F3 F.R.

Auto power off Auto power off invalid Precise

regulator
F.R.L.
(Related
products)
Screen F4 Complete
Switch output Clean
F.R.
*Only switch output Switch output invalid
Electro
specifications pneumatic
regulator

Screen F5 Air
Proportional booster
Standard setting
value change (Proportional value Speed
* Only EVD-*100 change invalid) control valve

Silencer

Check valve
/ others
Joint
Error code / tube
Vacuum
filter

Error display Cause Countermeasures Vacuum

regulator
Suction
The power voltage is not within the rating. Check the product's specifications, set the power voltage plate
Detected at 19.5 VDC within the rated range, then turn power on again. Magnetic
Detection accuracy ±10% spring buffer

The input signal exceeded the rating range. Mechanical

Check the product's input signal type, set the input signal pressure SW
Detected at 110% or more input.
within the rated range, then turn power on again.
Detection accuracy ±1% Electronic
pressure SW
Contact / close
contact conf.
An error occurred during EEPROM reading or writing. Contact your CKD branch or dealer. SW

Air sensor

Pressure SW
An error occurred during memory reading or writing. Contact your CKD branch or dealer. for coolant
Small
flow sensor
Small
Check primary pressure provide pressure within the rating flow controller
Secondary pressure did not reach the set value for five range, then turn power on again.
seconds or more consecutively. Check that ther are no leaks from pipes, joints, or other Flow sensor
for air
20% F.S. or less of the set value was not attained.
(Detection accuracy ±6%F.S. ) devices. Correctly connect, then turn power on again.
If the error is not resolved, contact your CKD branch or Flow sensor
for water
dealer.
Total air
system
Total air
The switch output's overcurrent protection circuit has func- Check whether load current exceeds the rating. Correctly system
tioned. connecct, then turn power on again. (Gamma)

Ending
When the above errors occur, the error displays and error output turn on.
Digital electro-pneumatic regulator
F.R.L. unit

757
 EVD Series
Refrigerating
 Glossary
type dryer
Desiccant Max. working pressure
type dryer
High polymer
Maximum value of primary side pressure which can satisfy the specifications. Differs according to the pressure
membrane
type dryer
specifications.
Air filter
Min. working pressure
Auto. drain
/ others
The primary pressure value required to control up to the full scale pressure. Differs according to the pressure specifications.
F.R.L.
(Module unit) Withstanding pressure
F.R.L. Pressure value under which the electro pneumatic regulator will not break even if temporarily applied. The supply side and
(Separate)
output side guaranteed values are given separately to limit the withstand pressure of the pressure sensor mounted on the
Compact
F.R. secondary side.
Precise
regulator Control pressure range
F.R.L.
(Related Indicates the pressure which can be controlled. Depending on the product, a residual pressure may be generated. With the
products)
EVD, 1% F.S. or less residual pressure is generated when the input signal is 0% F.S.
Clean
F.R. Note: This is different from the guaranteed accuracy range. Refer to the
Electro
pneumatic
hysteresis and linearity items below.
regulator
Air Hysteresis (measurement circuit 1) (Straight line connecting center value 10%F.S. and 90%F.S.)
booster
The difference (D1) of the rise curve and lower curve when the input When characteristic curve is lowering
Speed
control valve signal is reciprocated once between 0% and 100%, indicated as a
percentage of the full scale (FS). Hysteresis
Silencer
(Hysteresis) = Maximum value of D1 / FS control pressure x 100 [%]
Check valve
/ others Note: The guaranteed accuracy range will differ according to the D1

Joint product. D2 Linearity

/ tube For EVD, 10% to 90% F.S. is the guaranteed range.
Vacuum
filter
Linearity (measurement circuit 1) Characteristic
Vacuum curve center value
regulator The difference (D2) from the reference line connecting the input signal
Suction (X1) % F.S. and (X2) % F.S. when the input signal is reciprocated once
plate
between 0% F.S. to 100% F.S., indicated as a percentage of the full When characteristic curve is rising
Magnetic
spring buffer scale (FS).
Mechanical
(Linearity) = Maximum value of D2 / FS control pressure x 100 [%]
0% X1 X2 100%
pressure SW Note: The guaranteed accuracy range will differ according to the product.
Electronic For EVD, X1=10% F.S., X2=90% F.S. is the guaranteed range.
pressure SW
Contact / close
contact conf.
SW
Resolution (measurement circuit 1)
The minimum value of the input signal generated when the control pressure changes, indicated as a percentage of the full
Air sensor
scale (F.S.). The value is indicated as the difference with the input signal obtained after the input signal is pressurized from
Pressure SW 0% F.S. to 15% F.S. and held for 10 seconds or longer, then gradually increased until the control pressure starts to rise
for coolant
Small
again. This is applied in the same way for input signal 50% F.S. and 85% F.S.
flow sensor
Small Repeatability (measurement circuit 1)
flow controller
The maximum value of the control pressure variation when the same setting value is repeatedly applied is indicated as a percentage of the
Flow sensor full scale (F.S.).
for air
The value is calculated with the variation of the control pressure (D2) when the input signals 0% F.S. and 50% F.S. are repeated applied.
Flow sensor (Repeatability) = D3 / FS control pressure x 100 [%]
for water
Total air
system Temperature characteristics
Total air Indicates the fluctuation of the control temperature according to changes in the ambient temperature (reference
system
(Gamma) temperature 25˚C) converted per 1˚C. The characteristics are indicated for the zero point and span width.
Ending
Maximum flow rate (measurement circuit 2)
Indicates flow rate possible at control pressure 100% F.S..
105%
100%
Relief characteristics (measurement circuit 3) 95%
Set control pressure

Indicates the relation of the control pressure and exhaust flow rate when a back
pressure is applied on the secondary side from an external source in the
pressure control state. The relief flow rate when the back pressure is gradually
increased is measured.

Step response (measurement circuit 1)

Indicates the time for the control pressure to reach the set pressure in respect 0%
to a stepped input signal. Step response time
Input signal
The time for the control pressure to reach the setting value ±5% F.S. range after
the input signal is applied is measured. (Response time) = Time to reach within ±5% of final value

758
 EVD Series
Glossary
CKD measurement circuit Refrigerating
type dryer
Desiccant
type dryer
(Measurement circuit 1) High polymer
Signal generator membrane
type dryer

Air filter
P1
Auto. drain
/ others
F.R.L.
X (Module unit)
F.R.L.
(Separate)
X-Y recorder
Compact
F.R.
Precise
regulator
Sample
Outline ø6 (inner diameter ø4) tube F.R.L.
(Related
products)
Y
Clean
F.R.
Electro
Outline ø6 (inner diameter ø4) tube  1000 Pressure detector pneumatic
regulator
Air
booster
Speed
control valve

Silencer

(Measurement circuit 2) Check valve

/ others
Signal generator Joint
/ tube
Vacuum
filter
P1 Vacuum
Differential pressure regulator
detector (flow rate)
Metering Suction
plate
valve
Magnetic
X spring buffer
Mechanical
pressure SW
Laminar X-Y recorder Electronic
flow type pressure SW
flow meter
Contact / close
Sample P2 contact conf.
SW
Y
Air sensor

Pressure detector (P2) Pressure SW

for coolant
Small
flow sensor
Small
flow controller
(Measurement circuit 3) Flow sensor
for air
Flow sensor
for water
Signal generator Pressure detector Y X-Y recorder X
Total air
system
Total air
system
(Gamma)
P1 P2'
P2 Ending
Digital electro-pneumatic regulator

IN OUT

Inlet side Sample Metering valve Back pressure side

F.R.L. unit

EXH Differential pressure

detector (flow rate)

759
 Electro pneumatic regulator (solenoid valve type medium flow)

Refrigerating
EV2000 Series
type dryer High precision air pressure proportional control valve enabling ultimate
Desiccant
type dryer space saving of device.
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L. Specifications
(Module unit)
F.R.L. Overview Descriptions EV2500 EV2509
(Separate) Working fluid Clean compressed air (ISO 8573-1 Class 1.3.2 or equivalent or JIS B 8392-1 Class 1 1.3.2 or equivalent)
Compact In this electro pneumatic regulator EV2000 Se- Max. working pressure 0.7MPa
F.R.
ries, feedback control with semiconductor pres-
Precise Min. working pressure Control pressure + 0.05MPa
regulator sure sensor and electronic control circuit is used.
Withstanding (Inlet side) 1.05MPa
F.R.L. Using electric signals, continuous and precise
(Related pressure (Output side) 0.75MPa
products) air pressure control are achieved.
Clean
F.R.
Control pressure range 0 to 0.49MPa
Electro Power voltage 24 VDC 10% (safety power supply with ripple ratio 1% or less)
pneumatic Features
regulator Current consumption 0.1A or less (power supply rush current 0.6A when power turned ON)
Air
booster  Compact and light weight 0-10 VDC (20kΩ)
Speed
 Compact module design Input signal 0-5 VDC (10kΩ)
control valve  Non-bleeding (Input impedance) 4-20mA DC or 1-5 VDC (250Ω) Note 1
Silencer  High-relief 10kΩ variable resistance or 0-10 VDC (20kΩ)
 High precision / high speed response
Check valve Monitor output 1-5 VDC (none for 10kΩ variable resistance input)
/ others  Manifold type available
Joint  Embedding type option Hysteresis 1%F.S. or less Note 2
/ tube
 Various input signal Linearity ±0.5%F.S. or less Note 2
Vacuum
filter  Easy wiring Resolution 0.5%F.S. or less Note 2
 Pressure monitor available
Vacuum Repeatability 0.5%F.S. or less Note 2
regulator  Equivalent to protective structure IP64
Temperature (Zero point variation) 0.15%F.S./˚C or less
Suction  Common exhaust
plate characteristics (Span variation) 0.07%F.S./˚C or less
Magnetic
spring buffer JIS symbol Maximum flow rate (ANR) 800 /min.
Mechanical
Step (Loadless) 0.6s or less
pressure SW IN1 IN2 response
Note 3 (1 load) 0.6s or less
Electronic EXH
pressure SW Mechanical vibration proof 98m/s2 or less (JIS C60068-2-6)
EXH
Contact / close
contact conf. IN OUT Ambient temperature 5 to 50˚C
SW
OUT
Protective structure IP64 or equivalent, IP67(cable connector) Note 4
Air sensor
Port size Rc1/4
Pressure SW
for coolant Weight (body) 300g 320g
Small Note 1: When used with signal voltage 1-5 VDC, 4-20 mA of current flows into inside of EV from the signal
flow sensor source. Confirm specifications of the signal source before starting use.
Small Note 2: The above characters apply for a control pressure of 10 to100% when power voltage is 24VDC,
flow controller and working pressure range is 0.54 to 0.7MPa. Also, limited toa closed circuit in the secondary
Flow sensor side, and the pressure may vary if used as air blow etc.
for air Note 3: Working pressure: Max. working pressure and step rate: 50%F.S.→100%F.S.
Flow sensor 50%F.S.→ 60%F.S.
for water 50%F.S.→ 40%F.S.
Total air Note 4: Protective structure IP64 is applied only when installed with facing connector upward.
system
Total air
system
(Gamma) Clean room specifications (catalog No. CB-033S)
Ending  Dust generation preventing structure for use in cleanrooms

EV2500 –····························– P70

EV2509 –····························– P70

760
 EV2000 Series
How to order / Internal structure and parts list
How to order Refrigerating
type dryer
Symbol Descriptions
EV2 5 0 0 0 08 C11E2B A Control pressure Desiccant
type dryer
5 0-0.49MPa High polymer
membrane
type dryer
B Body type
A Air filter
Control B Body type 0 Discrete
pressure Auto. drain
9 Discrete manifold / others
F.R.L.
C Input signal (Module unit)
C Input signal 0 0-10 VDC F.R.L.
(Separate)
1 0-5 VDC
Compact
2 4-20mA DC or 1-5 VDC F.R.

3 10kΩ variable resistance or 0-10 VDC Precise

regulator
D Port size F.R.L.
(Related
D Port size products)
08 Rc1/4
Clean
F.R.
EOption
E Electro
Option pneumatic
Cable option regulator
Note 1
Note 2 Blank None Air
booster
Note 3 C11 1m attached
Speed
C13 3m attached control valve

Exhaust option Silencer

Blank Rc1/4 port Check valve

/ others
E1 ø8 push-in joint
Joint
E2 With silencer / tube

Bracket option Vacuum

filter
Blank None Vacuum
B C type bracket attached regulator
Suction
B4 B type bracket attached plate

Note 1: Piping adaptor can be used for Rc3/8 or larger, but B type, C type bracket can Magnetic
spring buffer
not be used (refer to other peripheral devices on page 790).
Note 2: Model no. for option is EV2000- option symbol . Mechanical
pressure SW
Internal structure and parts list Note 3: The bracket option B4 cannot be used when using the EV2509 (manifold type).
Electronic
pressure SW
 EV2500  EV2509
Contact / close
contact conf.
SW

Air sensor
9 8 9 8
Pressure SW
7 7 for coolant

6 6 Small
10 10 flow sensor
5 5 Small
flow controller
11 11 Flow sensor
for air
4 4
Flow sensor
12 for water
3 3
12
Total air
IN OUT IN1 IN2 system
Total air
system
13 2 13 2 (Gamma)

1 1 Ending
Electro pneumatic regulator

OUT

No. Parts name Material No. Parts name Material

1 O ring Fluoro rubber 8 Housing ABS resin
F.R.L. unit

2 Bottom valve Brass, special nitrile rubber 9 3 way valve  

3 Body Aluminum alloy die-casting 10 Rod Stainless steel
4 Disk Aluminum alloy 11 Top valve Brass, special nitrile rubber
5 Diaphragm Special nitrile rubber 12 E type snap ring Steel
6 Valve base Polyphenylene sulfide resin 13 Plate cover ABS resin
7 Pressure sensor (Diffusion semiconductor)

761
 EV2000 Series
 
Refrigerating
Dimensions
type dryer
Desiccant
 EV2500  EV2509
type dryer
High polymer
membrane

9.5
type dryer
ø26
Air filter
ø8
Auto. drain (Non rotating) 10
/ others
M12, 4 pin M12, 4 pin
F.R.L. connector/plug Panel cut
(Module unit) connector/plug
F.R.L.
Zero/span
(Separate) adjustment window
Zero/span

11
Compact
adjustment window

11
F.R.
PUSH OPEN
Precise
regulator PUSH OPEN

F.R.L.
(Related
products)

72
Clean

72
F.R.
Electro
pneumatic
regulator
Air IN1 IN2 EXH
booster
IN OUT EXH 22.5
Speed
control valve

32
22.5

Silencer
9.5

4–Rc1/4
Check valve 3-Rc1/4
OUT
/ others 26 26
26 26 50 Mount nut
Joint 50 (Panel mount)
/ tube
Vacuum Refer to "cable option" on page 764 for how to wire.
filter
Refer to pages 763 to 764 for optional dimensions.
Vacuum
regulator Monitor output
Suction
plate
 EV2500/2509
Magnetic
spring buffer 5

Mechanical
pressure SW 4
Monitor output voltage (VDC)

Electronic
pressure SW
Contact / close
contact conf. 3
SW

Air sensor
2
Pressure SW
for coolant
Small
flow sensor 1
Small
flow controller
Flow sensor
for air 0 0.1 0.2 0.3 0.4 0.5
Control pressure (MPa)
Flow sensor
for water
Total air I/O characteristics
system
Total air  Input signal 0-10VDC  Input signal 0-5VDC  Input signal 4-20mA DC or 1-5 VDC  Input signal 10kΩ variable resistance or 0-10 VDC
system
(Gamma)
0.5 0.5 0.5 0.5
Ending
EV250* EV250* EV250* EV250*
0.4 0.4 0.4 0.4
Control pressure (MPa)

Control pressure (MPa)

Control pressure (MPa)

Control pressure (MPa)

0.3 0.3 0.3 0.3

0.2 0.2 0.2 0.2

0.1 0.1 0.1 0.1

0 0 0 0
2 4 6 8 10 1 2 3 4 5 4 8 12 16 20 2 4 6 8 10
Input signal (VDC) Input signal (VDC) (mADC)
Input signal (kΩ)
1 2 3 4 5
Input signal (VDC) (VDC)

762
 EV2000 Series
Flow characteristics / Optional dimensions
Flow characteristics Refrigerating
type dryer
 EV2500  EV2509
Desiccant
type dryer
Working pressure: 0.7MPa Working pressure: 0.7MPa High polymer
membrane
type dryer

Air filter
0.5 0.5
Auto. drain

Control pressure (MPa)

Control pressure (MPa)

/ others
0.4 0.4 F.R.L.
(Module unit)

0.3 0.3 F.R.L.

(Separate)
Compact
0.2 0.2 F.R.
Precise
regulator
0.1 0.1 F.R.L.
(Related
products)
0 0 Clean
500 1000 1500 500 1000 1500 F.R.
FlowR/min. (ANR) FlowR/min. (ANR) Electro
pneumatic
regulator
Air
booster
Option dimensions Speed
control valve
EV2000 Series common option Silencer
Embedding type option
Check valve
 Standard (blank)  Dedicated silencer: **-E2  ø8 push-in: **-E1 / others
Joint
/ tube
Vacuum
Side view Rear view Side view Rear view Side view Rear view filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
26 26 Rc 1/4 26 35 26 42
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Bracket option Small
flow sensor
 B type bracket (-B4): Floor installation type  C type bracket (–B): Wall installation type Small
flow controller

86 Flow sensor
4-ø6 for air
74
Flow sensor
for water
Total air
system
Total air
system
54
40

(Gamma)
33
41

Ending
7

Electro pneumatic regulator

18 t2.3
38 45
54
F.R.L. unit
36
t2.3

763
 EV2000 Series
Cable option
Refrigerating
type dryer
Desiccant
type dryer -C1* shield/cable/connector
High polymer Type of input signal
membrane Isolator
type dryer 4-0.3mm2 * Pin No. Applications 4-20mA 10kΩ VR
ø6.8 color 0-10V 0-5V
Air filter
1-5V (0-10V)
1 Red Power supply 
+ 24V
Auto. drain
/ others 2 Green — Monitor output 1-5V VR input terminal
F.R.L. VR input terminal
(Module unit) 3 Black Common 0V
38.5 0V
1000
F.R.L. Input 4-20mA VR output terminal
(Separate) 3000 45±5 4 White 0-10V 0-5V
signal 1-5V (0-10V)
Compact Shield wire
F.R. If a cable connector is not used, following recommended cable sockets can be
Precise
used. Anyway, use a shield wire cable.
regulator Set screw type ELW1KA4012 CORRENS (HIRSHMAN)
F.R.L. Axial type (solder) XS2C-D421 OMRON
(Related
products) L type (solder) XS2C-D422 OMRON
Clean
F.R.
Electro Other peripheral devices
pneumatic
regulator
Air
 Example of system up grading
booster
B310-W B310-W
Speed
control valve
F3000-W
Silencer A401-*-W
A400-*-W
Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
J400-W
Suction
plate EV2509
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor  A400-8/10/15-W  A400-8-W/10-W/15-W-B31W

Pressure SW Piping adaptor set Piping adaptor set
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
 D401-00-8/10/15-W-(B31W)  A401-8/10/15-W-(B31W)
Distributor L type piping adapter

T type bracket
T type bracket
Port
Port

O ring

Packing seal
Packing seal or "O" ring

Joiner
Circuit Joiner

764
 Electro pneumatic regulator (solenoid valve type small flow)

EV0000 Series Refrigerating

High precision air pressure proportional control valve enabling ultimate type dryer
Desiccant
space saving of device. type dryer
JIS symbol High polymer
R
membrane
type dryer
P A

Air filter

Auto. drain
/ others
Specifications F.R.L.
(Module unit)
Descriptions EV0100 EV0500
Overview F.R.L.
Working fluid Clean compressed air (ISO 8573-1 Class 1.3.2 or equivalent or JIS B 8392-1 Class 1 1.3.2 or equivalent) (Separate)

In this electric pneumatic regulator EV0000 Se- Max. working pressure 200kPa 0.7MPa Compact
F.R.
ries, feedback control with semiconductor pres- Min. working pressure Control pressure + max. control pressure x 0.1 Precise
sure sensor and electronic control circuit is used. regulator
Withstanding (Inlet side) 300kPa 1.05MPa
Using electric signals, continuous and precise pressure
F.R.L.
(Output side) 150kPa 0.75MPa (Related
air pressure controlling is achieved. products)
Control pressure range 0 to 98kPa 0 to 0.49MPa Clean
F.R.
Power voltage 24 VDC 10% (safety power supply with ripple ratio 1% or less) Electro
Features Current consumption 0.1A or less (power supply rush current 0.6A when power turned ON) pneumatic
regulator
0-10 VDC (20kΩ) Air
䢇 Compact and light weight Input signal 0-5 VDC (10kΩ) booster
䢇 Non-bleeding (Input impedance) 4-20mA DC or 1-5 VDC (250Ω) Note 1 Speed
control valve
䢇 High precision / high speed response 10kΩ variable resistance or 0-10 VDC (20kΩ)
䢇 Various input signal Monitor output 1-5 VDC (none for 10kΩ variable resistance input) Silencer
䢇 Easy wiring Hysteresis 1%F.S. or less Note 2 Check valve
䢇 Pressure monitor available Linearity ±0.5%F.S. or less Note 2
/ others

䢇 Equivalent to protective structure IP64 Joint

Resolution 0.5%F.S. or less Note 2 / tube
䢇 Two systems of piping port
Repeatability 0.5%F.S. or less Note 2 Vacuum
䢇 Common exhaust filter
Temperature Zero point variation 0.15%F.S./˚C or less
Vacuum
characteristics Span variation 0.07%F.S./˚C or less regulator
Suction
Maximum flow rate (ANR) 2 /min. 6 /min. plate
Step response (Loadless) 0.2s or less Magnetic
spring buffer
Note 3 (15cm3 load) 0.5s or less
Mechanical
Mechanical vibration proof 98m/s2 or less (JIS C60068-2-6) pressure SW
Ambient temperature 5 to 50˚C Electronic
pressure SW
Protective structure IP64 or equivalent, IP67(cable connector) Note 4 Contact / close
contact conf.
Port size M5 SW
Weight (body) 180g Air sensor

Note 1: When used with signal voltage 1-5 VDC, 4-20 mA of current flows into inside of EV from the signal Pressure SW
source. Confirm specifications of the signal source before starting use. for coolant
Note 2: The above characters apply for a control pressure of 10 to 100% when power voltage is 24VDC, Small
and working pressure range is: EV0100/110 to 200kPa EV0500/0.54 to 0.7 MPa. Limited to a flow sensor
How to order closed circuit in the secondary side, the pressure may fluctuate if used air blow, etc. Small
Note 3: Working pressure: Max. working pressure and step rate: 50%F.S.→100%F.S. flow controller
50%F.S.→ 60%F.S. Flow sensor
EV0 1 00 0 M5 C11 50%F.S.→ 40%F.S. for air
Note 4: Protective structure IP64 is applied only when installed with facing connector upward. Flow sensor
for water
Symbol Descriptions
Total air
A Control pressure system
A Control pressure Total air
1 0-98kPa system
(Gamma)
5 0-0.49MPa
Ending
B Input signal
B Input signal 0 0-10 VDC
Electro pneumatic regulator

1 0-5 VDC
2 4-20mA DC or 1-5 VDC
10kΩ variable resistance or 0-10 VDC
3
(Integrated 10 VDC power supply connection)
C Port size
Clean room specifications
F.R.L. unit

C Port size (Catalog No. CB-033S)

M5 M5
䢇 Dust generation preventing structure
D Cable option for use in cleanrooms
D Cable
option Blank None
C11 1m attached EV0 ···················· P70
C13 3m attached
Note 1 Model no. for option is
EV2000- option symbol . 765
 EV0000 Series
 
Refrigerating
Dimensions
type dryer
Desiccant
type dryer 38
High polymer
membrane
type dryer

Air filter

38.5
Set screw hole 4-M3

50
Auto. drain depth 6
/ others
F.R.L.
(Module unit)
F.R.L. 50 M12, 4 pin View A
(Separate) connector/plug
Compact
F.R. Zero/span
adjustment window
Precise
regulator

11
F.R.L.
(Related
products) PUSH OPEN

Clean
F.R.

54.5
Electro
pneumatic * There are two P/A/R port systems on either
regulator
Air
side. Use the enclosed plug on the idle port.

7.5
booster The R port must be released into the atmo-
Speed 6-M5 sphere.
control valve 12.5 12.5
A
Silencer
Refer to "cable option" on page 767 for how to wire.
Check valve
/ others
Joint Monitor output
/ tube
Vacuum 䢇 EV0100 䢇 EV0500
filter
5 5
Vacuum
regulator
Suction 4 4
plate
Monitor output voltage (VDC)

Monitor output voltage (VDC)

Magnetic
spring buffer
3 3
Mechanical
pressure SW
Electronic
pressure SW
2 2
Contact / close
contact conf.
SW

Air sensor
1 1
Pressure SW
for coolant
Small
flow sensor 0 20 40 60 80 100 0 0.1 0.2 0.3 0.4 0.5
Small Control pressure (kPa) Control pressure (MPa)
flow controller
Flow sensor
for air
Flow sensor
I/O characteristics
for water
Total air 䢇 Input signal 0-10 VDC 䢇 Input signal 0-5 VDC 䢇 Input signal 4-20mA DC or 1-5 VDC 䢇 Input signal 10kΩ variable resistance or 0-10 VDC
system
Total air 0.5 0.5 0.5 0.5
system
(Gamma)
EV0500 EV0500 EV0500 EV0500
Ending 0.4 0.4 0.4 0.4
Control pressure (MPa)
Control pressure (MPa)

Control pressure (MPa)

Control pressure (MPa)

0.3 0.3 0.3 0.3

0.2 0.2 0.2 0.2

EV0100 EV0100 EV0100 EV0100

0.1 0.1 0.1 0.1

0 0 0 0
2 4 6 8 10 1 2 3 4 5 4 8 12 16 20 2 4 6 8 10
(mADC)
Input signal (VDC) Input signal (VDC) 1 2 3 4 5 (kΩ)
Input signal
Input signal (VDC) (VDC)

766
 EV0000 Series
Flow characteristics
Flow characteristics Refrigerating
type dryer
䢇 EV0100 䢇 EV0500
Desiccant
type dryer
High polymer
Working pressure: 200KPa Working pressure: 0.7MPa membrane
type dryer

Air filter
100 0.5

Control pressure (MPa)

Control pressure (kPa)

Auto. drain
/ others
80 0.4
F.R.L.
(Module unit)
60 0.3 F.R.L.
(Separate)
40 0.2 Compact
F.R.

20 0.1 Precise
regulator
F.R.L.
0 0 (Related
1 2 3 2 4 6 8 10 products)
Flow /min. (ANR) Flow /min. (ANR) Clean
F.R.
Electro
pneumatic
regulator
Cable option Air
booster
Speed
-C1* shield/cable/connector control valve
Type of input signal
Isolator Silencer
4-0.3mm2 * Pin No. Applications 4-20mA 10kΩVR
color 0-10V 0-5V
1-5V (0-10V) Check valve
ø6.8

/ others
1 Red Power supply 䡬+ 24V
Joint
2 Green — Monitor output 1-5V VR input terminal / tube

VR input terminal Vacuum

3 Black Common 0V filter
0V
38.5
1000 Vacuum
Input 4-20mA VR output terminal regulator
3000 45±5 4 White 0-10V 0-5V
signal 1-5V (0-10V)
Suction
Shield wire If a cable connector is not used, following recommended cable sockets can be plate
used. Anyway, use a shield wire cable. Magnetic
Set screw type ELW1KA4012 CORRENS (HIRSHMAN) spring buffer
Axial type (solder) XS2C-D421 OMRON Mechanical
L type (solder) XS2C-D422 OMRON pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Electro pneumatic regulator
F.R.L. unit

767
 Electro pneumatic regulator (compact solenoid valve type)

Refrigerating
EVS Series
type dryer JIS symbol
Desiccant
type dryer
R
High polymer
membrane P A
type dryer

Air filter

Auto. drain
/ others
F.R.L.
Specifications
(Module unit)
Overview Descriptions EVS100 EVS500
F.R.L.
(Separate) Working fluid Clean compressed air (ISO 8573-1 Class 1.3.2 or equivalent or JIS B 8392-1 Class 1 1.3.2 or equivalent)
Compact
For electro pneumatic regulator EVS Series, Max. working pressure 200kPa 0.7MPa
F.R. feedback control with semiconductor pressure Min. working pressure Control pressure + max. control pressure x 0.1
Precise sensor and electronic control circuit is used to Withstanding Inlet side 300kPa 1.05MPa
regulator enable continuous and precise controlling 150kPa 0.75MPa
pressure Output side
F.R.L. pneumatics with electric signals.
(Related Control pressure range 0 to 98kPa 0 to 0.49MPa
products) Smaller than EV0000, body extending cable is
used to achieve ultimate convenience and Power voltage 24 VDC 10% (safety power supply with ripple ratio 1% or less)
Clean
F.R. space saving. Current consumption 0.1A or less (power supply rush current 0.6A when power turned ON)
Electro 0-10 VDC (6.6kΩ)
pneumatic Input signal
regulator 0-5 VDC (3.3kΩ)
Features (input impedance)
Air 20mA or 1-5 VDC (250Ω)
booster
How to wire Shield cable connector or applicable connectors and shield wire
(1) Downsized
Speed Insulation resistance 100MΩ (500 VDC mega) and over
control valve Redesigned the internal structure, the
volume is reduced by approx. 50% Withstand voltage 1500 VAC for one minute
Silencer
comparing to CKD conventional model Hysteresis Note 1 1%F.S. or less
(EV0000 Series). (Excluding cable outlet) Linearity Note 1 ±0.5%F.S. or less
Check valve
/ others (2) Light weight Resolution Note 1 0.5%F.S. or less
Joint Minimized body, the weight is reduced by Repeatability Note 1 0.5%F.S. or less
/ tube approx. 20% comparing to CKD Zero point variation 0.15%F.S./˚C or less
Temperature
Vacuum conventional model (EV0000 Series). characteristics Span variation 0.07%F.S./˚C or less
filter (3) Space saving
Maximum flow rate (ANR) Note 2 2 /min. 6 /min.
Vacuum Footprint is reduced by 40% comparing to
regulator Step response Loadless 0.2s or less
CKD conventional model (EV0000 Series).
Suction This enables installation in a narrow space, Note 3 15cm3 load 0.5s or less
plate or in a raw, and contributes to reduce the Ambient temperature 5 to 50˚C
Magnetic device size. Fluid temperature 5 to 50˚C
spring buffer (4) Non-bleeding Lubrication Not available
Mechanical Oar poppet structure and PWM control are Mounting attitude Free
pressure SW used to elimin.ate constant bleeding. This Protective structure IP60 (without protective structure for water)
Electronic can be used not only for energy saving, Main dimensions W30ⴒD50ⴒH50
pressure SW
also for the case that air source has no
Contact / close Port size M5
contact conf. surplus.
SW Weight (body) 140g
(5) Precise/quick response
Precision, high speed response of EV Note 1: The above apply for a 10 to 100% control pressure at 24 VDC power voltage, with working pressure between
Air sensor maximum control pressure x 1.1 (EVS100: 110kPa, EVS500: 0.54MPa) and maximum working pressure.
Series is completely succeeded. New Limited to a closed circuit in the secondary side, the pressure may fluctuate if used air blow, etc.
Pressure SW model can be directly replaced from old one Note 2: Working pressure: Maximum working pressure, Control pressure: Maximum control pressure
for coolant
if the input signal type is matched (when Note 3: Working pressure: Maximum working pressure, step amount 50%F.S.→100%F.S.
Small monitor output signal is not used). 50%F.S.→ 60%F.S.
flow sensor 50%F.S.→ 40%F.S.
(6) Easy wiring
Small
flow controller
A body extending cable connector is used Clean room specifications (catalog No. CB-033S)
to reduce man-hours for wiring, installation
Flow sensor and maintenance. Shield type is used for 䢇 Dust generation preventing structure for use in cleanrooms
for air
cable connector.
Flow sensor EVS ·························· P70
for water Example of use
Total air
system 䢇 Chemical liquids discharge control 䢇 Fine position control
Total air
system
(Gamma)

Ending

Pilot regulator
Bellows
(for chemical liquid)

Tank

768
 EVS Series
How to order / Dimensions
How to order Refrigerating
type dryer
Desiccant
EVS 1 00 2 M5 C11 type dryer
High polymer
membrane
type dryer
Symbol Descriptions
Air filter
Model no.
A Control pressure range
A Control pressure range Auto. drain
1 0 to 98kPa / others
5 0 to 0.49MPa F.R.L.
(Module unit)
B Input control signal F.R.L.
B Input control signal (Separate)
0 0 to 10 VDC
Compact
1 0 to 5 VDC F.R.

4 to 20mA DC or 1 to 5 VDC Precise

2 regulator
(Input impedance 250Ω) F.R.L.
(Related
C Port size products)
C Port size Clean
M5 M5 F.R.
Electro
D Cable option pneumatic
D Cable option regulator
Blank None Air
booster
Note on selection guide C11 1m (axial)
Speed
Note: Model no. for option is
C13 3m (axial) control valve

EV2000 - Cable option symbol . Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Dimensions Vacuum
regulator
Suction
plate
30 67 500
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
M5 depth 7 pressure SW
Air supplying
2-M5 depth 7 Contact / close
50

port M12, 4 pin contact conf.

connector/plug SW
7.5

7.5

R Air sensor

P A Pressure SW
for coolant
Output port
14 Small
Exhaust port flow sensor
Small
flow controller
Flow sensor
for air
18

Flow sensor
for water

3-M3 depth 7 Total air

17.5 14.5 system
Total air
system
(Gamma)

Ending
Electro pneumatic regulator
F.R.L. unit

769
 EVS Series
Refrigerating
I/O characteristics
type dryer
Desiccant 䢇 Input signal 0-10 VDC 䢇 Input signal 0-5 VDC 䢇 Input signal 4-20mA DC or 1-5 VDC
type dryer
High polymer 0.5 0.5 0.5
membrane
type dryer EVS500 EVS500 EVS500

Air filter
0.4 0.4 0.4
Auto. drain
/ others
F.R.L.
(Module unit)

Control pressure
Control pressure

Control pressure
0.3 0.3 0.3
F.R.L.
(Separate)
Compact
F.R.
Precise 0.2 0.2 0.2
regulator
F.R.L.
(Related
products) EVS100 EVS100 EVS100
Clean 0.1 0.1 0.1
F.R.
Electro
pneumatic
regulator
Air 0 0 0
booster 2 4 6 8 10 1 2 3 4 5 4 8 12 16 20
(MPa) (MPa) (MPa) (mADC)
Speed Input signal (VDC) Input signal (VDC) 1 2 3 4 5
control valve Input signal (VDC)
Silencer

Check valve
/ others
Joint
/ tube
Vacuum Cable option
filter
Vacuum
regulator -C1* shield/cable/connector
4-0.3mm2
Suction Type of input signal
Isolator
ø6.8

plate
* Pin No. Applications 4-20mA
Magnetic
color 0-10V 0-5V
spring buffer
1-5V
1 Red Power supply 䡬+ 24V
Mechanical
pressure SW 2 Green — Vacant
Electronic 38.5
1000
pressure SW
3000 45±5 3 Black Common 0V
Contact / close
contact conf. 4-20mA
SW Shield wire 4 White Input signal 0-10V 0-5V
1-5V
Air sensor
If a cable connector is not used, following recommended cable
Pressure SW sockets can be used. Anyway, use a shield wire cable.
for coolant Set screw type ELW1KA4012 CORRENS (HIRSHMAN)
Small Axial type (solder) XS2C-D421 OMRON
flow sensor L type (solder) XS2C-D422 OMRON
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending

770
 Electro pneumatic regulator (solenoid valve type vacuum)

EV2100V Series Refrigerating

type dryer
IN Desiccant
OUT type dryer
JIS symbol VAC High polymer
membrane
type dryer
EV2100V
Air filter

Auto. drain
/ others
Specifications F.R.L.
(Module unit)
Overview Descriptions EV2100V EV2109V
F.R.L.
Working fluid Air (using air circuit recommended on page 726) (Separate)
For electro pneumatic regulator EV2100V Working pressure range -96kPa to -101.3kPa Compact
Series, feedback control with semiconductor Withstanding Inlet side 196kPa F.R.

pressure sensor and electronic control circuit is pressure Output side 196kPa Precise
-10.1 to -91.2kPa (10 to 90%F.S.) regulator
used to enable continuous and precise vacuum Assured pressure range Note 5
F.R.L.
Power voltage 24 VDC±10% (safety power supply with ripple ratio 1% or less) (Related
control with electric signals. products)
Current consumption 0.1A or less (power supply rush current 0.6A when power turned ON)
Clean
Input signal 0-10 VDC 0-5 VDC 4-20mA DC or 1-5 VDC 10kΩ variable resistance or F.R.
(Input impedance) (20kΩ) (10kΩ) (250Ω) Note 1 0-10 VDC (20kΩ) Electro
Monitor output 1-5 VDC (none for 10kΩ variable resistance input) pneumatic
regulator
Features Hysteresis 1%F.S. or less Note 2 Air
Linearity ±0.5%F.S. Note 2 booster
䢇 Compact / light weight Resolution 0.5%F.S. or less Note 2 Speed
䢇 Enabling module Repeatability 0.5%F.S. or less Note 2 control valve

䢇 Non-bleeding Temperature Zero point variation 0.15%F.S./˚C or less Silencer

䢇 High-relief characteristics Span variation 0.07%F.S./˚C or less
Check valve
䢇 Precise/quick response Maximum flow rate (ANR) 150 /min. 120 /min. / others
䢇 Manifold type available Step response Loadless 0.6sec or less Joint
䢇 Various input signal Note 3 1 load 2.0sec or less / tube
Mechanical vibration proof 98m/s2 or less (JIS C60068-2-6)
䢇 Easy wiring Vacuum
filter
Ambient temperature 5 to 50˚C
䢇 Pressure monitor available
Protective structure IP64 or equivalent (body) IP67(cable connector) Note4 Vacuum
䢇 Equivalent to protective structure IP64 regulator
Port size Rc1/4
Suction
Weight (body) 300g 320g plate
Note 1: When used with signal voltage 1-5VDC, 4-20mA of current flows into inside of EV from the signal
Magnetic
source. Confirm specifications of the signal source before starting use. spring buffer
Note 2: The above characters apply for a control pressure of 10 to 90% when power voltage is 24 VDC,
Mechanical
working pressure is -96.0 to -101.3 kPa. Limited to a closed circuit in the secondary side, the pressure SW
pressure may fluctuate if used air blow, etc.
Electronic
Note 3: Working pressure: -100kPa, step rate: 50%F.S. → 90%F.S. pressure SW
50%F.S. → 60%F.S. Contact / close
How to order 50%F.S. → 40%F.S. contact conf.
SW
Note 4: Main body protective structure IP64 is limited to cable connector top vertical installation. Above
characteristics are values where used in working pressure range. If used exceeding working Air sensor
EV210 0 V 1 08 C11 pressure range, please consult with CKD.
Note 5: There is a 0 to 5 kPa residual pressure when the input signal is 0%. Pressure SW
Refer to the input/output characteristics graph (page 774). for coolant
Symbol Descriptions Small
A Body type flow sensor
A Body type 0 Discrete Small
flow controller
9 Discrete manifold
Flow sensor
B Input signal for air
B Input signal 0 0-10 VDC
Flow sensor
1 0-5 VDC for water
2 4-20mA DC or 1-5 VDC Total air
10kΩ variable resistance or 0-10 VDC system
3 Total air
(Integrated 10 VDC power supply connection) system
(Gamma)
C Port size
C Port size 08 Rc1/4 Ending
D Option
Note on selection guide
Electro pneumatic regulator

D Option Cable option

Note 1: Model no. for option is Note 1 Blank None
EV2000- option symbol . Note 3 C11 1m attached
Note 2: However, combination of optional "intake block 1"
and " T type bracket" is not available.
C13 3m attached
Note 3: The bracket option B4 cannot be used when using Intake option
the EV2109V (manifold type). Blank Intake block 1
K1 Intake block 2
F.R.L. unit

Clean room specifications (catalog No. CB-033S) Bracket option

Blank None
䢇 Dust generation preventing structure for use in cleanrooms
B4 B type bracket
EV2100V –····················– P70 T T type bracket

EV2109V –····················– P70

771
 EV2100V Series
 
Refrigerating Internal structure and parts list
type dryer
Desiccant
type dryer
High polymer 䢇 EV2100V 䢇 EV2109V
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R. 9 8 9 8

Precise 7 7
regulator
F.R.L.
(Related 10 6 10 6
products)
Clean 5 5
F.R.
Electro 11 11
pneumatic
regulator 4 4
Air
booster 3 3
12 12
Speed
control valve IN OUT IN1 IN2
Silencer 13 2 13 2

Check valve 1 1
/ others
Joint
/ tube
Vacuum
filter
OUT
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
No. Parts name Material No. Parts name Material
Small
flow sensor 1 O ring Fluoro rubber 8 Housing ABS resin
Small 2 Bottom valve Brass, special nitrile rubber 9 3 way valve
flow controller
3 Body Aluminum alloy die-casting 10 Rod Stainless steel
Flow sensor
for air 4 Disk Aluminum alloy 11 Top valve Brass, special nitrile rubber
Flow sensor 5 Diaphragm Special nitrile rubber 12 E type snap ring Steel
for water
6 Valve base Polyphenylene sulfide resin 13 Plate cover ABS resin
Total air
system 7 Pressure sensor Diffusion semiconductor
Total air
system
(Gamma)

Ending

772
 EV2100V Series
Dimensions
Dimensions Refrigerating
type dryer
49
䢇 EV2100V Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
M12, 4 pin
F.R.L.
connector plug (Separate)
2-Rc1/4 Compact
Zero/span adjustment window F.R.
Precise
regulator
F.R.L.
PUSH OPEN (Related
products)
Clean
F.R.

72
105.5

Electro
pneumatic
regulator
Air
booster
IN OUT VAC Speed
control valve

22.5
Silencer

Check valve
Rc1/4 / others
50 26 35
Joint
/ tube
49
䢇 EV2109V Vacuum
filter
Vacuum
9.5 regulator
Suction
plate
Magnetic
ø26 spring buffer

ø8 Mechanical
pressure SW
(Non rotating) (Panel cut)
M12, 4 pin
Electronic
connector plug 10 pressure SW
Contact / close
Zero/span adjustment window 2-Rc1/4 contact conf.
SW

Air sensor

Pressure SW
PUSH OPEN
for coolant
Small
flow sensor
72

Small
flow controller
115

Flow sensor
for air
IN1 IN2 Flow sensor
for water
22.5

Total air
VAC system
Total air
system
(Gamma)
OUT
Rc1/4
9.5

50 26 50 Ending
(Lower outlet)
Rc1/4
Electro pneumatic regulator

39

Piping method

(Atmosphere) IN
F.R.L. unit

OUT
Workpiece
VAC

Vacuum pump EV210*V

* Refer to the cautions (recommended circuit) on page 727 for details.

773
 EV2100V Series
 
Refrigerating I/O characteristics
type dryer
Desiccant
type dryer 䢇 Input signal 0-10 VDC 䢇 Input signal 0-5 VDC
High polymer
membrane
type dryer -100 -100
Air filter -90 -90
-80
Control pressure (kPa)

Control pressure (kPa)

Auto. drain -80
/ others -70 -70
F.R.L. -60 -60
(Module unit)
-50 -50
F.R.L.
(Separate) -40 -40
Compact -30 -30
F.R. -20 -20
Precise -10 -10
regulator
F.R.L. 0 0
(Related 0 1 2 3 4 5 6 7 8 9 10 0 1 2 3 4 5
products) Input signal (VDC) Input signal (VDC)
Clean
F.R.
Electro 䢇 Input signal 4-20mADC or 1-5 VDC 䢇 Input signal 10kΩ variable resistance or 0-10 VDC
pneumatic
regulator -100 -100
Air -90 -90
booster
Control pressure (kPa)

Control pressure (kPa)

-80 -80
Speed
control valve -70 -70
Silencer
-60 -60
-50 -50
Check valve
/ others -40 -40
Joint
-30 -30
/ tube -20 -20
Vacuum -10 -10
filter
0 0
Vacuum 0 2 4 6 8 10 12 14 16 18 20 0 1 2 3 4 5 6 7 8 9 10
regulator Input signal (mADC) (kΩ)
Input signal
Suction 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 40 4.5 5.0 (VDC)
plate
Input signal (VDC)
Magnetic
spring buffer
Flow characteristics
Mechanical
pressure SW
䢇 EV2100V 䢇 EV2109V
Electronic
pressure SW Working pressure-100kPa Working pressure-100kPa
-100 -100
Contact / close
contact conf.
SW
-80 -80
Control pressure (kPa)

Control pressure (kPa)

Air sensor

Pressure SW -60
for coolant -60

Small
flow sensor -40 -40
Small
flow controller
Flow sensor -20 -20
for air
Flow sensor 0
for water 0
100 200 100 200
Total air
system Flow /min. (ANR) Flow /mi.n (ANR)
Total air
system Monitor output
(Gamma)
䢇 EV2100V, EV2109V
Ending

4
Monitor output (VDC)

0
0 -10 -20 -30 -40 -50 -60 -70 -80 -90 -100
Control pressure (kPa)

774
 EV2100V Series
Option status
Refrigerating
Option status type dryer
Desiccant
Optional embedded intake type dryer
High polymer
䢇 Standard (blank) 䢇 -K1 membrane
type dryer

Air filter
Intake block 1 Intake block 2
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Rc 1/4 (Lower outlet)
26 35 26 50 Clean
Rc 1/4 F.R.
Electro
pneumatic
regulator
Bracket option Air
booster
䢇 Floor installation type: **-B4 (B type bracket) 䢇 Rear side installation type: **-T (T type bracket)
Speed
control valve

Silencer
86
4-ø6 74 Check valve
/ others
Joint
/ tube
Vacuum
filter
54
40

Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW
* An O ring and a gasket are included.
Air sensor
36
t2.3

Pressure SW
for coolant
Note: Refer to page 391 for dimensions of T type bracket.
Small
flow sensor
Small
flow controller
Flow sensor
for air
Cable option Flow sensor
for water
Total air
-C1* shield/cable/connector system
Total air
Type of input signal system
Isolator (Gamma)
4-0.3mm2 * Pin No. Applications 4-20mA 10kΩVR
color 0-10V 0-5V
1-5V (0-10V)
ø6.8

Ending
1 Red Power supply 䡬+ 24V
Electro pneumatic regulator

2 Green — Monitor output 1-5V VR input terminal

VR input terminal
3 Black Common 0V
0V
38.5
1000
Input 4-20mA VR output terminal
3000 45±5 4 White 0-10V 0-5V
signal 1-5V (0-10V)
Shield wire If a cable connector is not used, following recommended cable sockets can be
F.R.L. unit

used. Anyway, use a shield wire cable.

Set screw type ELW1KA4012 CORRENS (HIRSHMAN)
Axial type (solder) XS2C-D421 OMRON
L type (solder) XS2C-D422 OMRON

775
 MEVT Series MEVT Series

Advancing to ultra-precise micro system ranges

Refrigerating Refrigerating
type dryer
14mm type dryer
Desiccant Desiccant
type dryer
High polymer
membrane
14mm thin and 80g light type dryer
High polymer
membrane
type dryer type dryer

Air filter Manifold type thin electro pneumatic regulator compatible with PC With this high integration type, up to 24 Air filter
manifold stations can be used.
Auto. drain
/ others control and reduced wiring. Auto. drain
/ others
F.R.L.
(Module unit) Perfect for pressure control and fine speed cylinder control, etc., in Network-compatible F.R.L.
(Module unit)
F.R.L.
(Separate) semiconductor fields and precise processing fields, etc. A serial transmission, common gland and
F.R.L.
(Separate)
Compact D-sub connector wiring block are available. Compact
F.R. F.R.
Precise Precise
regulator regulator
F.R.L. F.R.L.
(Related (Related
products) products)
Clean
DIN rail Clean
F.R. two-face mounting 䢇 Serial transmission type 䢇 Common gland type 䢇 D sub-connector type F.R.
Electro Electro
pneumatic pneumatic
regulator regulator
Air
booster
2-color display of operation status Air
booster
Speed Speed
control valve The 2-color operation indicator (PAT. PEND) indicates the green zone control valve

Silencer Operation indicator when pressure is at set pressure and the red zone when pressure is Silencer
not within the setting or when an error has occurred.
Check valve 䢇 Output port Check valve
/ others 䢇 Input port / others
Joint
/ tube
Easy piping and wiring work Joint
/ tube
Vacuum Vacuum
filter Piping and wiring have been centralized filter
Vacuum on the front, improving workability and Vacuum
regulator reducing space. regulator
Suction Serial transmission 䢇 Exhaust port 䢇 Wiring connector Suction
plate plate
Magnetic Magnetic
spring buffer
Mechanical
2 installation direction (PAT.PEND) spring buffer
Mechanical
pressure SW pressure SW
Electronic This regulator can be installed either Electronic
䢇 Bottom
pressure SW on the bottom or on the back. installation
pressure SW
Contact / close
contact conf. The surface for installation and work Contact / close
contact conf.
SW can be selected freely. 䢇 Rear side SW

Air sensor installation Air sensor

Pressure SW Pressure SW
for coolant for coolant
Small
flow sensor
Precise/quick response Small
flow sensor
Small Small
flow controller Fluid pressure is controlled at high accuracy and high speed response flow controller
Flow sensor
using electrical signals. Flow sensor
for air Repeatability is 0.3%F.S. and response time is 0.1 sec. (with no load) for air
Flow sensor * Refer to specifications Flow sensor
for water for water
Total air Total air
system
Total air
Environmental-friendly product system
Total air
system
(Gamma)
Output port push-in joint system
(Gamma)
The material name is indicated on main components,
Ending making easy to sort parts for recycling. Ending

Applications

Thin electro pneumatic regulator

Other applications
䢇 Painting
䢇 Fluid precise constant discharge system
Control PC
· IC chip bondind
Manifold dispenser
· PCB cream soldering
· PCB coating
· UV adhesive, etc.

F.R.L. unit
䢇 CMP grinder

MEVT Microcapsule
Micro thin electro pneumatic regulator
776 777
 Thin type Electro-pneumatic regulator
Reduced wiring manifold type
Refrigerating
type dryer
Desiccant
type dryer
High polymer
MEVT Series JIS symbol

R
membrane
type dryer P A

Air filter

Auto. drain
/ others
F.R.L. Specifications (Note 1)
(Module unit)
Descriptions EVT100 EVT500
F.R.L.
(Separate) Working fluid Clean compressed air (ISO 8573-1 Class 1.3.2 or equivalent or JIS B 8392-1 Class 1 1.3.2 or equivalent)
Compact Max. working pressure 200kPa 0.7MPa
F.R.
Precise
Min. working pressure Control pressure + max. control pressure x 0.1
regulator
Withstanding Inlet side 300kPa 1.05MPa
F.R.L.
(Related pressure Output side 150kPa 0.75MPa
products)
Clean Control pressure range 0 to 100kPa 0 to 0.5MPa
F.R.
Electro Power voltage 24 VDC ±10% (safety power supply with ripple ratio 1% or less)
pneumatic
regulator Current consumption 0.1A or less
Air 0 to 10 VDC (6.6kΩ)
booster Input signal (input impedance) 0 to 5 VDC (3.3kΩ)
Speed 4 to 20mA
control valve
Monitor output Note 2 1 to 5 VDC (load impedance 1kΩ and over)
Silencer Insulation resistance 100MΩ (500 VDC mega) and over
Check valve Withstand voltage 1500 VAC for one minute
/ others
Joint
Hysteresis Note 3 0.4%F.S. or less
/ tube Linearity Note 3 ±0.5% F.S. or less
Vacuum
filter Resolution Note 3 0.1% F.S. or less
Vacuum Repeatability Note 3 0.3%F.S. or less
regulator
Temperature Zero point variation 0.15%F.S./˚C or less
Suction
plate characteristics Span variation 0.07% F.S./˚C or less
Magnetic Maximum flow rate (ANR) Note 4 2 /min. 6 /min.
spring buffer
Mechanical
Note 5 Loadless 0.1s or less
pressure SW Step response
15cm3 load 0.5s or less
Electronic
pressure SW Ambient temperature 5 to 50˚C
Contact / close Fluid temperature 5 to 50˚C
contact conf.
SW
Indicator Note 6 2 color indicator
Air sensor
Lubrication Not available
Pressure SW Mounting attitude Free
for coolant
Small Working environment Containing corrosive gas is not permissible.
flow sensor
Main dimensions W14D75H75
Small
flow controller Port size ø4, ø6 push-in joint (selection)
Flow sensor Weight (body) 80g
for air
Note 1: Above characteristics are the values where power voltage is 24V±0.15 VDC, and measured at room temperature.
Flow sensor
for water Note 2: Monitor output is not available for the serial transmission type.
Device Net-compatible (T9DAR) and CC-Link-compatible (T9GAR) types have pressure monitor data. (Refer to the serial transmission slave station specifications on page 819.)
Total air
system Note 3: Working pressure is to be max. control pressure X1.1 (EVT100: 110kPa, EVT500: 0.55MPa), and the characteristics at control pressure 10 to100% are shown.
Total air Limited to a closed circuit in the secondary side, the pressure may fluctuate if used air blow, etc.
system Note 4: The characteristics where working pressure is maximum and control pressure is maximum are shown.
(Gamma)
Note 5: Characteristics where working pressure is maximum, and step rates 50% F.S. → 100% F.S. are shown.
Ending
50% F.S. → 60% F.S.
50% F.S. → 40% F.S.
Note 6: Operational indicator is just for reference, but not to assure the accuracy.
Manifold specifications
Electric / supply and exhaust block
Descriptions
T11R/T30R T9DAR/T9GAR
Manifold type Block manifold
Installation method DIN rail mount type
Air supply / exhaust method Common supply / common exhaust
Maximum station number 8 stations 12 stations *1
Output port (A) ø4, ø6 push-in joint (selection)
Port size
Input (P)/exhaust port (R) ø4, ø6 push-in joint (selection)
*1: The maximum number of stations for one slave unit is four (T9DAR/T9GAR).

778
 MEVT Series
How to order
How to order Refrigerating
type dryer
Manifold model no.
Desiccant
MEVT 500 0 C4 T11R 8 U 3 * Always indicate "Manifold specification sheet" (page 799). type dryer
High polymer
Discrete EVT model no. membrane
type dryer
EVT 500 0 C4 E2 3 Symbol Descriptions Air filter

Model no. A Control pressure range Auto. drain

/ others
A Control pressure range
100 0 to 100kPa F.R.L.
(Module unit)
500 0 to 0.5MPa
F.R.L.
B Input control signal (Separate)
B Input control signal Compact
Electric / supply and exhaust block F.R.
T11R T30R T9DAR T9GAR Precise
regulator
0 0 to 10 VDC  
F.R.L.
1 0 to 5 VDC     (Related
products)
2 4 to 20mA   Clean
F.R.
C Port size (output port (A)) Electro
pneumatic
C Port size regulator
Note 1 C4 ø4 push-in joint
Air
Note 2 C6 ø6 push-in joint booster
Speed
D Electric / supply and exhaust block control valve
D Electric / supply and exhaust block
T11R Common gland type Silencer
T30R D sub-connector type
Check valve
T9DAR Serial transmission type (Device Net input 4 point/output 4 point) / others
Joint
T9GAR Serial transmission type (CC-Link Ver1.10 input 4 point/output 4 point) / tube
Vacuum
E Lead wire type filter
E Lead wire type
Electric / supply and exhaust block Vacuum
regulator
T11R T30R T9DAR T9GAR
Suction
E2 4P connector     plate
Magnetic
F Station number spring buffer
F Station number Mechanical
1 1 station
pressure SW
to
12 12 stations ( Differs with the reduced wiring connection specifications.
Refer to manifold specifications on page 778. ) Electronic
pressure SW
Contact / close
contact conf.
G DIN rail installation attitude SW
G DIN rail Air sensor
installation U Bottom side
attitude B Rear side Pressure SW
for coolant
H Voltage Small
H Voltage flow sensor
3 24 VDC
Small
flow controller
Flow sensor
for air
Flow sensor
Note on selection guide for water
Total air
system
Note 1: Indicate port size of input (P)/exhaust (R) at electric/supply and exhaust block section.
Total air
Note 2: A filter is integrated to input (P)/output (A). system
(Gamma)

Ending

Clean room specifications (catalog No. CB-033S)

Thin electro pneumatic regulator

 Dust generation preventing structure for use in cleanrooms

MEVT –·····························– P70

F.R.L. unit

779
 MEVT Series
Refrigerating MEVT component explanation and part list
type dryer
Desiccant
type dryer Common gland type
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others 7
F.R.L.
(Module unit)
F.R.L.
(Separate) 5
Compact
F.R.
Precise
regulator 3
F.R.L.
(Related
products)
Clean 2
F.R.
Electro
pneumatic 1
regulator
Air
booster
Speed D sub-connector type
control valve

Silencer

Check valve
/ others 7

Joint
/ tube
Vacuum 5
filter
Vacuum
regulator
Suction
plate 3

Magnetic
spring buffer
Mechanical 2
pressure SW
1
Electronic
pressure SW
7
Contact / close
contact conf.
Serial transmission type
SW

Air sensor 6

Pressure SW
for coolant
Small 5
flow sensor
4
Small
flow controller
Flow sensor
for air 3

Flow sensor
for water
Total air 2
system
Total air 1
system
(Gamma) Main parts list
Ending No. Block configurations parts name Model no. No. Block configurations parts name Model no.
1 Retainer L EVT-HL 5 Electric / supply and exhaust block EVT-T*
2 End block L EVT-EL 6 End block R EVT-ER
3 EVT EVT*00 7 Retainer R EVT-HR
4 Piping joint EVT-P

Weight (g)
Block type Weight Block type Weight
EVT EVT*00 80 T11R 115
Electric / supply and exhaust
EVT-EL 30 T30R 125
End block block
EVT-ER 30 T9*R 145
Retainer EVT-H* 25
Piping joint EVT-P –

780
 MEVT Series
Internal structure and parts list
Internal structure and parts list Refrigerating
type dryer

 EVT Desiccant
type dryer
High polymer
membrane
type dryer
R
A Air filter
P
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
1 2 3 F.R.
Precise
regulator
F.R.L.
(Related
products)
11 Clean
4 F.R.
Electro
pneumatic
regulator
Air
booster

5 Speed
10 control valve

Silencer

Check valve
/ others
6
Joint
/ tube
Vacuum
filter

9 Vacuum
regulator
Suction
7 plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor
8
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Main parts list Total air
system
No. Parts name Material No. Parts name Material
Total air
1 Solenoid valve 7 Connection hook plate Polyamide resin system
(Gamma)
2 Wiring cover ABS resin 8 Solenoid valve for exhaust
Ending
3 Valve guard ABS resin 9 Control circuit board
4 Display lens Polycarbonate resin 10 Pressure sensor
Thin electro pneumatic regulator

5 Body Polyamide resin 11 Case ABS resin

6 Push-in joint
F.R.L. unit

781
 MEVT-T1/3/9 Series
Refrigerating Dimensions
type dryer
Desiccant
type dryer
MEVT
L2 = L1 + (40 to)
High polymer
membrane
 Common gland type (T11R)
type dryer L3=L2–12.5
Air filter L1=(14n)+42+10+23
n: EVT station number
Auto. drain
/ others 20 11.5 10 14 14 42 11.5
F.R.L.
(Module unit)
F.R.L.
(Separate)

5.5
Compact
F.R.

75
35
Precise
regulator

37
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic

6.5
regulator
Air Electric / supply and exhaust block
booster Push-in joint ø4, ø6 (selection) (Common gland)
Speed End block L EVT Input port (P)
control valve

Silencer

131
Check valve
/ others
P 1
Joint

77.3
/ tube

12
A 2 A 2 A 2 A 2 A 2 R 3

Vacuum
filter
32.8
Vacuum

2.3
regulator
Suction
plate
Push-in joint ø4, ø6 (selection) Push-in joint ø4, ø6 (selection)
Magnetic Output port (A) Exhaust port (R)
spring buffer
Mechanical
pressure SW MEVT
Electronic
 D sub-connector type (T30R)
pressure SW
Contact / close L2 = L1 + (40 to)
contact conf.
SW L3=L2–12.5
Air sensor L1=(14n)+42+10+23
n: EVT station number
Pressure SW
for coolant 20 11.5 10 14 14 42 11.5
Small
flow sensor
Small
flow controller
5.5

Flow sensor
for air
35

75

Flow sensor
for water
37

Total air
system
Total air
system
(Gamma)

Ending
6.5

Electric / supply and exhaust block

Push-in joint ø4, ø6 (selection) (D sub-connector)
End block L EVT Input port (P)
131

P 1
77.3
12

A 2 A 2 A 2 A 2 A 2 R 3
32.8

2.3

Push-in joint ø4, ø6 (selection) Push-in joint ø4, ø6 (selection) 87.9

Output port (A) Exhaust port (R)
782
 MEVT-T1/3/9 Series
Dimensions
Dimensions Refrigerating
type dryer

MEVT Desiccant
type dryer
 Serial transmission type (T9*) High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
L2=L1 + (40 to) Precise
regulator
L3=L2–12.5 F.R.L.
(Related
L1=(14n)+(32m)+20+23 products)
n: EVT station number, m: communication slave unit block no. Clean
F.R.
20 11.5 10 14 14 32 10 11.5 Electro
pneumatic
regulator
Air
booster
Speed

5.5
control valve

35

75
Silencer

Check valve

37
/ others
Joint
/ tube
Vacuum
filter

6.5
Vacuum
Electric / supply and exhaust block regulator
Push-in joint ø4, ø6 (selection) (Serial transmission)
Suction
Input port (P) plate
End block L EVT End block R
Magnetic
spring buffer

131
Mechanical
pressure SW
Electronic
P 1 P 1
pressure SW
77.3

Contact / close
12

A 2 A 2 A 2 A 2 R 3 A 2 A 2 A 2 A 2 R 3
contact conf.
SW

Air sensor
32.8

2.3
Pressure SW
for coolant

Push-in joint ø4, ø6 (selection) Push-in joint ø4, ø6 (selection) Small

flow sensor
Output port (A) Exhaust port (R)
Small
flow controller
Flow sensor
*1: The maximum number of stations for one slave unit is four (T9DAR/T9GAR). for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Thin electro pneumatic regulator
F.R.L. unit

783
 MEVT-T1/3/9 Series
Refrigerating I/O characteristics
type dryer
Desiccant  Input signal 0-10 VDC  Input signal 0-5 VDC  Input signal 4-20mA
type dryer
0.5 0.5 0.5
High polymer
membrane EVT500 EVT500 EVT500
type dryer

Air filter
0.4 0.4 0.4
Auto. drain
/ others
Control pressure (MPa)

Control pressure (MPa)

Control pressure (MPa)
F.R.L.
(Module unit)
0.3 0.3 0.3
F.R.L.
(Separate)
Compact
F.R.
0.2 0.2 0.2
Precise
regulator
F.R.L.
(Related
products) EVT100 EVT100 EVT100
0.1 0.1 0.1
Clean
F.R.
Electro
pneumatic
regulator
0 0 0
Air 4 8 12 16 20
booster 2 4 6 8 10 1 2 3 4 5
Input signal (VDC) Input signal (VDC) Input signal (mA)
Speed
control valve

Silencer

Check valve
/ others
Flow characteristics
Joint
/ tube
 EVT100  EVT500
Vacuum
filter
Vacuum Working pressure 200kPa Working pressure 0.7MPa
regulator 120 0.6
Suction
plate 100 0.5
Control pressure (kPa)

Control pressure (MPa)

Magnetic
spring buffer
80 0.4
Mechanical
pressure SW
Electronic
60 0.3
pressure SW
Contact / close 40 0.2
contact conf.
SW

Air sensor 20 0.1

Pressure SW
for coolant 0 0
0 1.0 1.5 2.0 2.5 3.0 3.5 0 2 4 6 8 10 12
Small Flow (R/min.)
flow sensor Flow (R/min.)
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending

784
MEMO Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Thin electro pneumatic regulator
F.R.L. unit

785
 MEVT-T1/3/9 Series
Refrigerating MEVT: block configurations
type dryer
Desiccant  Discrete EVT
type dryer
High polymer (1) Required station No. of EVT can be placed on DIN rail.
membrane
type dryer However, the maximum station No. is limited by method. (Refer to page 804.)
Air filter (2) Viewed from the joint, nominal station No. of EVT is assigned as 1, 2, 3, ··· from right.
Auto. drain (3) The REG-No. indicated on the EVT wiring cover is counted as 1, 2, 3, etc., from the nearest EVT for each electric and supply /
/ others
F.R.L.
exhaust block.
(Module unit)
 Electric / supply and exhaust block
F.R.L.
(Separate) (1) Required number can be placed onto the connecting section per block.
Compact
F.R.  End block
Precise (1) For serial transmission type, install the blocks to both sides.
regulator
F.R.L. (2) If common gland or D sub connector type, install this block on the contrary side of electric / supply and exhaust block.
(Related
products)
Clean
F.R. A Discrete EVT
Electro  4P connector Common gland D sub-connector
pneumatic
regulator Piping (
DeviceNet, CC-Link )
Air section
booster
Speed
control valve
2
Piping block

Silencer A

Check valve
/ others
Joint B End block
/ tube
 For left side  For right side (serial transmission)
Vacuum
filter
Vacuum
regulator
Suction  

0.7
Ｎ

plate
Ｎ
0.7

Magnetic
spring buffer
Mechanical
pressure SW MEVT C Common gland type D D sub-connector type E Serial transmission type
Electronic configuration
Electric / supply and exhaust block

pressure SW
Contact / close
contact conf.
SW Wiring
Air sensor section P
1
P
1
P
1

3
3
3

Pressure SW
for coolant
Small
flow sensor
Small F Related products
flow controller
 DIN rail  Silencer  Blanking plug
Related products

Flow sensor
for air
Flow sensor Related
for water
products
Total air
system
Total air
system
(Gamma)

Ending

786
 MEVT-T1/3/9 Series
Block configurations
Piping section Refrigerating
type dryer

A.Discrete EVT Desiccant

type dryer
High polymer
Refer to pages 778 to 779 for selection guide. membrane
type dryer

Air filter

B.End block Auto. drain

/ others
For serial transmission type (T9*), install the block to both ends of manifold. F.R.L.
(Module unit)
For common gland type (T11R) or D sub connector type (T30R), install the block on the contrary side of electric / supply and exhaust block.
F.R.L.
(Separate)
EVT E R (Retainer) Compact
F.R.
Fix at both ends of manifold.
Model no. A Type B Installation position Precise
regulator
F.R.L.
(Related
A Type B Installation position EVT H R A Installation position products)
E Common exhaust L For left side L For left side Clean
F.R.
R For right side (serial transmission) Model no. A Installation R For right side Electro
position pneumatic
regulator
Air
booster
Speed
control valve

Silencer
 

0.7
Ｎ

Ｎ
Check valve
0.7
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Electric / supply and exhaust block
Suction
plate
C.Common gland type D.D sub-connector type Magnetic
spring buffer

EVT T11R C6 EVT T30R C6 Mechanical

pressure SW
Electronic
Model no. Type B Model no. Type pressure SW
Input (P)/exhaust (R) port size B Input (P)/exhaust (R) port size
Contact / close
contact conf.
SW
B Input (P)/exhaust (R) port size B Input (P)/exhaust (R) port size
Air sensor
C4 ø4 push-in joint C4 ø4 push-in joint
C6 ø6 push-in joint C6 ø6 push-in joint Pressure SW
for coolant
P
1
P
1 Small
3 3
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
E.Serial transmission type Total air
system
Total air
system
EVT T9DAR C6 (Gamma)

Ending
Model no. A Type B Input (P)/exhaust (R) port size
Thin electro pneumatic regulator

A Type B Input (P)/exhaust (R) port size 1

T9DAR DeviceNet input 4 point/output 4 point C4 ø4 push-in joint

T9GAR CC-Link Ver1.10 input 4 point/output 4 point C6 ø6 push-in joint
F.R.L. unit

787
 MEVT-T1/3/9 Series
Refrigerating Related products DIN rail, silencer and blanking plug
type dryer
Desiccant
type dryer
 DIN rail
High polymer
membrane EVT-BAA (length)
type dryer
12.5
Air filter
(Pitch)
Auto. drain
/ others
F.R.L.
5.5
35
25

(Module unit)
F.R.L.
(Separate)
Compact 4–R 3
F.R. 8
Precise L 7.5
regulator
F.R.L.
(Related
products) * Select <Length> from the DIN rail length selection table L2 on page 798.
Clean
F.R.
Electro
pneumatic

 Silencer  Blanking plug

regulator
Air
booster
23
Speed
control valve L

Silencer l
øD

øA

Check valve
/ others

ød
øD
20
Joint
/ tube
L
Vacuum
filter
Vacuum Model no. D L A Model no. D L l d
regulator
SLW-H6 ø6 41 16 GWP4-B ø4 27 9 6
Suction
plate GWP6-B ø6 29 11 8
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending

788
 MEVT-T1/3/9 Series
Technical data 1 Notes when wiring
Common gland type (T11R): Wiring method Refrigerating
type dryer

Notes when wiring Desiccant

type dryer
High polymer
[Common gland type (T11R): Wiring method] Internal wiring method of T11R (up to 8 stations for EVT) membrane
type dryer
Viewed from piping port, station No. on EVT is assigned from right.
Terminal array Terminal box No. Air filter
If voltage may drop depending on simultaneous communication or 18 COM
17 +
Monitor REG No.8
18 16 Auto. drain
cable length, 4 - 20mA of current type is recommended for input 9 15
input

COM
/ others
17 14 +
REG No.7
signal. 8 13
Monitor
input F.R.L.
16 12 COM (Module unit)
Terminal box recommended screw tightening torque 0.25N·m 7 11 +
Monitor REG No.6
15 10 input
F.R.L.
6 COM (Separate)
14 +
Monitor REG No.5
5 input

13 Compact
4
COM
+ F.R.
Monitor REG No.4
12 input

3 9 COM
Precise
11 8 +
Monitor REG No.3 regulator
2 7 input

10 6 F.R.L.
1 5
COM
+ (Related
Monitor REG No.2 products)
4 input
3
2
COM
+
Clean
1 Monitor REG No.1 F.R.
input

Electro
pneumatic
regulator
Air
booster
Speed
control valve
8th station
7th station Silencer
6th station
Check valve
5th station / others
4th station
Joint
3rd station / tube
2nd station
1st station Vacuum
filter
Vacuum
regulator
Suction
plate
n-th station · · · 2nd station 1st station Station number of EVT Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Terminal array of wiring method T11R Contact / close
contact conf.
* Maximum station number of EVT is 8 stations. SW
Terminal No. Air sensor
18 17 16 15 14 13 12 11 10
Pressure SW
for coolant
9 8 7 6 5 4 3 2 1
Small
(Standard wiring) flow sensor
Small
Terminal No. 18 17 16 15 14 13 12 11 10 flow controller

Terminal array COM Monitor output 8 Monitor output 7 Monitor output 6 Monitor output 5 Monitor output 4 Monitor output 3 Monitor output 2 Monitor output 1 Flow sensor
for air
Terminal No. 9 8 7 6 5 4 3 2 1
Flow sensor
Terminal array Power supply + Input signal 8 Input signal 7 Input signal 6 Input signal 5 Input signal 4 Input signal 3 Input signal 2 Input signal 1 for water
Total air
system
Total air
system
(Gamma)

Ending
Thin electro pneumatic regulator
F.R.L. unit

789
 MEVT-T1/3/9 Series
Refrigerating
type dryer
D sub-connector type (T30R): Wiring method
Desiccant D sub-connector type (T30R)
type dryer
High polymer
membrane
type dryer A connector used for wiring method T30R, is generally called as D
Air filter sub connector and widely used in FA and OA components.
Auto. drain Especially, 25P type complying RS-232C standards is a dedicating
/ others
connector widely used in PC communication board. 8th station
F.R.L.
(Module unit) 7th station
6th station
F.R.L.
(Separate) [Cautions for D sub connector type (T30R)] 5th station
4th station
Compact Viewed from piping port, station No. on EVT is assigned from 3rd station
F.R.
2nd station
right. 1st station
Precise
regulator If voltage may drop depending on simultaneous communication
F.R.L.
(Related or cable length, 4 - 20mA of current type is recommended for input
products)
Clean signal.
F.R.
Electro
pneumatic
regulator
Air
booster connector pin No.

Speed Monitor
13 13
control valve REG No.8 input
+
25 25
12 12
COM
24 24
Silencer Monitor
input 11 11
REG No.7 +
23 23
COM
10 10
Check valve Monitor
input 22 22
/ others REG No.6 +
9 9
COM
21 21
Monitor
8
Joint REG No.5 input
+
8
20 20
/ tube COM
7
7
Monitor
input 19 19
Vacuum REG No.4 +
6 6
COM
filter 18 18
Monitor
input 5 5
Vacuum REG No.3 +
17 17
COM
4
regulator Monitor
4
input 16 16
REG No.2 +
3 3
Suction COM
15 15
plate Monitor

REG No.1 input

+
COM
2
14
2
14
n-th station · · · 2nd station 1st station Station number of EVT
Magnetic 1 1
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW Connector pin array of wiring method T30R
Air sensor * Maximum station number of EVT is 8 stations.
Pressure SW 1 2 3 4 5 6 7 8 9 10 11 12 13
for coolant
Small 14 15 16 17 18 19 20 21 22 23 24 25
flow sensor
Small
flow controller
Pin No. 1 2 3 4 5 6 7 8 9 10 11 12 13
Flow sensor
for air Pin array Input signal 1 Input signal 2 Input signal 3 Input signal 4 Input signal 5 Input signal 6 Input signal 7 Input signal 8 (Void) Power supply + (Void) COM COM
Flow sensor Pin No. 14 15 16 17 18 19 20 21 22 23 24 25
for water
Pin array Monitor output 1 Monitor output 2 Monitor output 3 Monitor output 4 Monitor output 5 Monitor output 6 Monitor output 7 Monitor output 8 (Void) Power supply + (Void) COM
Total air
system
Total air
system
(Gamma)

Ending

790
 MEVT Series
Technical data 1 Notes when wiring
How to order cable with D-sub connector Refrigerating
type dryer

EVT CABLE D0 0 1 Desiccant

type dryer
High polymer
membrane
type dryer

Air filter
Model
Auto. drain
/ others
Symbol EVT F.R.L.
(Module unit)
0 Only cut
A F.R.L.
A User interface 1 With round terminal for M3.5 screw (Separate)

1 1m Compact
F.R.
B 3 3m Precise
B Cable length
5 5m regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
D sub-connector pin No. and conductor regulator
Air
䢇 EVT-CABLE-D00-B booster
Speed
control valve
D sub-connector
Multi conductor cable Silencer
HDBB–25S
HIROSE ELECTRIC CO. LTD. (UL) 2464-SB-13P24AWG
Check valve
/ others
Joint
/ tube

Cable length Vacuum

Plug case filter
HDB-CTF
HIROSE ELECTRIC CO. LTD. Vacuum
regulator
Suction
plate

D sub-connector pin No. 1 2 3 4 5 6 7 8 9 10 11 12 13 Magnetic

spring buffer
Isolator color Yellow Green Gray White Yellow Green Gray White Yellow Orange Green Orange Orange
Conductor Mechanical
I.D. Mark type 1 point 1 point 1 point 1 point 2 points 2 points 2 points 2 points 3 points 1 point 3 points 1 point 2 points pressure SW
Mark color Black Black Black Black Black Black Black Black Black Red Black Black Black Electronic
pressure SW
D sub-connector pin No. 14 15 16 17 18 19 20 21 22 23 24 25 Contact / close
Isolator color contact conf.
Yellow Green Gray White Yellow Green Gray White Yellow Orange Orange Orange SW
Conductor
I.D. Mark type 1 point 1 point 1 point 1 point 2 points 2 points 2 points 2 points 3 points 2 points 3 points 3 points Air sensor
Mark color Red Red Red Red Red Red Red Red Red Red Red Black
Pressure SW
for coolant
䢇 EVT-CABLE-D01-B Small
flow sensor
Small
Multi conductor cable Round crimp terminal flow controller
(UL2464-SB-13P24AWG) (1.25-3.5) Flow sensor
D sub-connector for air
HDBB-25S Flow sensor
HIROSE ELECTRIC CO. LTD. for water
Total air
system
Plug case Total air
Cable length 100 system
HDB-CTF (Gamma)
HIROSE ELECTRIC CO. LTD.
Ending
Thin electro pneumatic regulator

D sub-connector pin No. 1 2 3 4 5 6 7 8 9 10 11 12 13

Isolator color Yellow Green Gray White Yellow Green Gray White Yellow Orange Green Orange Orange
Conductor Mark type 1 point 1 point 1 point 1 point 2 points 2 points 2 points 2 points 3 points 1 point 3 points 1 point 2 points
I.D.
Mark color Black Black Black Black Black Black Black Black Black Red Black Black Black
Mark tube No. 1 2 3 4 5 6 7 8 Cut 10 Cut 12 13
D sub-connector pin No. 14 15 16 17 18 19 20 21 22 23 24 25
Isolator color Yellow Green Gray White Yellow Green Gray White Yellow Orange Orange Orange
Conductor
F.R.L. unit

Mark type 1 point 1 point 1 point 1 point 2 points 2 points 2 points 2 points 3 points 2 points 3 points 3 points
I.D.
Mark color Red Red Red Red Red Red Red Red Red Red Red Black
Mark tube No. 14 15 16 17 18 19 20 21 Cut 23 Cut 25

791
 MEVT Series
Refrigerating
type dryer
Serial transmission type (T9*): Wiring method
Desiccant [Serial Transmission type (T9*)]
type dryer
High polymer  The slave unit's output No. differs with the maker. The internal connector No. and EVT
membrane
type dryer correspond as shown below.
Air filter  EVT station are set in order from the right facing the piping port regardless of wiring block

MS
NS
Auto. drain
supply / exhaust block positions.
/ others  Since internal connectors are wired in order, if there are fewer EVT stations than total connectors,
F.R.L. some connectors are left open. Do not use these open connectors for drives other than EVTs
(Module unit)
F.R.L.
in use. n-th station · · · 2nd station 1st station Station number of EVT
(Separate)  Do not remove protective connectors connected to void connectors or a failure may occur.
Compact
F.R.  The working power is 24 VDC.
Precise  The slave for each communication system is used. Consult with CKD for compatible PC and
regulator
host station models and communication system specifications. (Refer to page 793)
F.R.L.
(Related  To ensure network reliability, use the communication cable recommended for each
products)
Clean communication system. Cable set screw connector set screw
F.R.
 Securely fix the enclosed connector with set screw. Power supply connector 0.25N·m
0.4N·m
Electro
pneumatic (Refer to the right table) Communication connector 0.5N·m
regulator
Air  The USB power supply terminal is exclusively used as a crossover wire. When using
booster
independently, use only the MAIN power supply terminal. Do not apply power on both SUB
Speed
control valve and MAIN power supply terminals because a malfunction could occur.
Silencer
 MAIN and SUB power terminals are connected internally. When not using the SUB power
terminal, connect the enclosed connector to prevent short-circuiting.
Check valve
/ others [Wiring power cable]
Joint
/ tube When using one wiring block (electric, supply and exhaust block) When using more than one wiring block (electric, supply and exhaust block)
Connect the power cable to MAIN. Connect one power cable to the first MAIN, and then from SUB to the next MAIN.
Vacuum
filter * Check power polarity. * Check power polarity.
T9DAR/T9GAR : left 24V, right 0V T9DAR/T9GAR : left 24V, right 0V
Vacuum
regulator T9LOR : left 0V, right 24V T9LOR : left 0V, right 24V
Suction
plate SUB
(0V 24V)
MAIN
(0V 24V)
SUB
(0V 24V)
MAIN
(0V 24V)
SUB
(0V 24V)
MAIN
(0V 24V)

P 1 P 1 P 1
Magnetic L1
L2
L1
L2
L1
L2

spring buffer A 2 A 2 A 2 A 2 R 3
FG
L1
A 2 A 2 A 2 A 2 R 3
FG
L1
A 2 2 2 2 R 3
FG
L1
L2 L2 L2

Mechanical
pressure SW
Electronic
pressure SW *See the table below for the number of EVT stations.
Contact / close
contact conf.
SW EVT maximum station number
Air sensor Slave unit (electric, supply and Communication EVT maximum station number
Pressure SW exhaust block) model no. system name When using 1 slave unit When using 2 slave units When using 3 slave units
for coolant T9DAR DeviceNet 4 units 8 units 12 units
Small T9GAR CC-Link 4 units 8 units 12 units
flow sensor
Up to three slave units can be connected per manifold.
Small
flow controller
Flow sensor Internal connector No.
for air
Correspondence of wiring method T9* channel no. and connector no. T9DAR T9GAR
Flow sensor
for water T9DAR
Total air Channel No. 0 (1) 1 (2) 2 (3) 3 (4)
system (Pressure setting data)
Total air
system Channel No.
(Gamma) (Pressure monitor data) 0 (1) 1 (2) 2 (3) 3 (4)

Ending
Connector No. (REG No. )
(EVT station number) 1 2 3 4

* The channel No. may be counted from "1" depending on the master.
T9GAR 3 2 3 2
Channel No. 1 2 3 4 4 1 4 1
(Pressure setting data)
Channel No.
(Pressure monitor data) 1 2 3 4

Connector No. (REG No. )

(EVT station number) 1 2 3 4

792
 MEVT Series
Technical data 1 Notes when wiring
Serial transmission slave unit specifications (See the table below for the applicable PLC correspondence table) Refrigerating
type dryer
Descriptions T9DAR T9GAR Desiccant
Communication subject DeviceNet *1 CC-Link Ver1.10 *2 type dryer
High polymer
156kbps/625kbps/2.5Mbps/ membrane
Communication speed 125kbps/250kbps/500kbps type dryer
5Mbps/10Mbps
Air filter
24 VDC ±10% *3
24 VDC±10% *3 Auto. drain
Power voltage (Unit power supply, regulator power supply common terminal) / others
(Unit power supply, regulator power supply common terminal)
Communication power supply (V +, V-): 11 to 25 VDC F.R.L.
(Module unit)
60mA or less F.R.L.
80mA or less (Separate)
Current consumption Load current is not included
Load current is not included Compact
Communication power supply (V +, V-): 50mA or less F.R.
Max. output no. Precise
4 points regulator
(DA output)
F.R.L.
Max. input no. (Related
4 points products)
(AD input) Clean
F.R.
DA Pressure setting data 12 bit Electro
output Precision *4 pneumatic
±1%F.S. or less regulator

AD Pressure monitor data 12 bit Air

booster
input Precision *5 ±6%F.S. or less
Speed
Occupied output memory: 2 x n (byte) *6 Occupied unit No.: 1 station control valve
Occupied
Occupied input memory: 2 x n (byte) *6 (Remote device station) Silencer

*1 Consult with CKD for EDS file . Check valve

*2 Consult with CKD for profile. / others
*3 To secure output accuracy, use safety power supply with 1% or less of ripple ratio. Joint
*4 DA output accuracy does not include EVT accuracy. / tube
*5 AD input accuracy includes EVT monitor accuracy. Vacuum
*6 The slave unit's memory occupied by the PLC is determined by the number of EVT units (n) connected when the filter
slave unit's power is turned on. (Note that if no units are connected, the memory for four units is occupied) Vacuum
regulator
Suction
PLC table plate
Magnetic
Model no. Maker name (progress body) Series Communication system name Host station model no. spring buffer

ODVA Each Corp. DeviceNet compatible PLC, PC, SBC DeviceNet Connect to each maker's DeviceNet compatible master Mechanical
pressure SW
Type CS1W-DRM21-V1
SYSMAC CS Series Electronic
Type CJ1W-DRM21 pressure SW
SYSMAC CJ Series Contact / close
Type CVM1-DRM21-V1 contact conf.
SYSMAC CV Series DeviceNet SW
Type C200HW-DRM21-V1
OMRON SYSMAC Series (CompoBus/D) Air sensor
Type ITNC-EI*01-DRM (master integrated PLC)
T9DAR SYSMAC C200HS Series
Type 3G8B3-DRM21 (VME board) Pressure SW
Other sensors for coolant
Other DeviceNet compatible master
Small
THK-5398 flow sensor
PC3J/2J Series Small
DeviceNet TIC-5642 (master integrated PLC)
PC3JD flow controller
TOYODA (DLNK) TFU-5359
PC2F/PC2FS Flow sensor
Other DeviceNet compatible master for air

CLPA Each Corp. CC-Link compatible PLC, PC, SBC CC-Link Connect to each maker's CC-Link compatible master Flow sensor
for water
AJ61BT11 Total air
AJ61QBT11 system
Total air
MELSEC A Series A1SJ61BT11 system
T9GAR MITSUBISHI (Gamma)
MELSEC QnA Series CC-Link A1SJ61QBT11
Ending
MELSEC Q Series QJ61BT11
Other sensors A80BD-J61BT11 (PCI bus)
Thin electro pneumatic regulator

Other CC-Link master

F.R.L. unit

793
 MEVT Series
Refrigerating
Model no. LED display Wiring and setting method
type dryer Following
Desiccant
Wiring method Front station
DeviceNet cable
T branch tap station
type dryer (Black) V– V–
High polymer
membrane (Blue) CAN_L CAN_L
type dryer SUB
(24V 0V)
ＭAＩＮ
(24V 0V)

(No) Drain Drain

Air filter P 1
(White) CAN_H CAN_H
Auto. drain R 3

/ others (Red) V+ V+
F.R.L.
(Module unit)
(Black) (Black)
F.R.L.
(Separate) NS (Blue) (Blue)
The wiring section connector is included. (No) (No)
Compact Check power's polarity. (Left: 24 V, right: 0 V) (White)
F.R. MS Unit power and regulator power use a common terminal. (Red)
(White)
(Red)
Precise The power connector (24 V, 0 V) is insulated from communication power (V+, V-).
regulator
F.R.L.
Multi drop method T branch method
(Related
products) T9DAR How to set DR HOLD
Clean Communication speed 0 1
F.R. ON
Electro LED name Display content 125kbps OFF OFF
pneumatic 250kbps ON OFF
regulator NS Displays network status
Air MS Displays slave unit's status 500kbps OFF ON
booster 0 1 − CLEAR
Setting not available ON ON
Speed Set the Set output status if
control valve communication a communication Setting HOLD/CLEAR
speed. error occurs. HOLD
Silencer NA If a communication error occurs, the status of output is held
in the state just before the error occurred. (Only for set
addresses)
Check valve ＯＮ Note: Output may not be held depending on the state of the
/ others error.
CLEAR
Joint If a communication error occurs, all channels are turned off
/ tube (0 data output to EVT). (Only for set addresses)
Vacuum 1 2 4 8 16 32
filter
Cautions
Set the slave unit address.  Output to EVT is output simultaneously for all channels.
Vacuum
regulator  Refer to the slave unit specifications for details on occupied memory.
 Contact CKD for information on the EDS file.
Suction
plate Front station
Front station
Magnetic CC-Link the dedicating cable DA
spring buffer Wiring method (Blue) DA
(White) DB DB
Mechanical
pressure SW
(Yellow) DG DG
Electronic SUB MAIN
SLD
pressure SW LERR (24V 0V) (24V 0V)
(Bare) SLD
Contact / close P 1 FG
contact conf.
DA
FG
DB
DA (Blue)
SW LRUN R 3 DG
SLD DB (White)
Air sensor FG

DG (Yellow)
Pressure SW
RD SLD (Bare)
for coolant FG * SLD and FG are
Small SD shortcircuited in
flow sensor The wiring section connector is included. the slave unit.
Check power's polarity. (Left: 24 V, right: 0 V)
Small
flow controller
POWER Unit power and regulator power use a common terminal.
Flow sensor Setting HOLD/CLEAR
for air HOLD
How to set • When the "analog output enabling signal" flag turns off, output of the
Flow sensor How to set corresponding channel is held in the status just before the flag turned off.
for water T9GAR Set the transmission speed. • If a communication error occurs, the status of output is held in the state
Set the slave unit's
just before the error occurred. (Only for set addresses)
Total air station No. (1st place)
system LED name Display content 0 : 156kbps 3 : 5Mbps Note: Output may not be held depending on the state of the error.
1 : 625kbps 4 : 10Mbps CLEAR
Total air Lights when transmission error • When the "analog output enabling signal" flag turns off, all channels are
system 2 : 2.5Mbps 5 to : Setting not available
occurs. turned off (0 data output to EVT).
(Gamma)
0 1 0 1 • If a communication error occurs, all channels are turned off (0 data output
Turns off when time has lapsed. to EVT). (Only for set addresses)
7 8 9

7 8 9

Ending Lights when the station No.

2 3

2 3

LERR setting or transmission speed Terminal station setting

setting is incorrect. 5 6
4
5 6
4 This product has a 110Ω terminator between DA and DB communication lines.
Blinks when the station number The terminal station is set by turning the terminal station setting switch on. A
terminator need not be connected to this product's connector.
setting or transmission speed B RATE STATION No. <CAUTION>
setting changes midway. (X1) Be sure to turn the terminal station setting switch off when this product is the
terminal station and a CC-Link-dedicated cable (CC-Link dedicated high
Turns on when accuracy data is HOLD END performance cable (Kurashige Denko FANCSBH) requiring a terminal
0 1 resistance other than 110Ω is used for the communication cable. This also
received, and turns off when time applies when the terminator's connection differs due to the T-branch
7 8 9

LRUN has lapsed. (Lights when correct ON connection. Connect a commercially available terminator or the one included
2 3

data is received.)
RD Turns on when receiving data.
SD Turns on when sending data. CLEAR Terminal
POWER Lights when power is ON. station setting
Set output status
if a communication
error occurs.
with the master station to this product's connector based on connection
4 conditions (specifications). Insulate this terminator.
5 6
STATION No.
(X10) Cautions
 Output to EVT is output simultaneously for all channels.
Set the slave unit's
station No. (1st place)  Consult with CKD for information on PRO files.

794
1

MEMO Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Thin electro pneumatic regulator
F.R.L. unit

795
 MEVT Series
Refrigerating MEVT deal drawing
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
Retainer R
F.R.L.
(Separate)
Compact
F.R. End block R
Precise
regulator
F.R.L.
(Related
products)
Clean Electric / supply and exhaust block
F.R.
Electro
pneumatic
regulator Piping joint
Air DIN rail set screw
booster
Speed
EVT
control valve DIN rail

Silencer

Check valve End block L

/ others
Joint
/ tube Retainer L
Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Increasing and reducing the EVT stations
Electronic
1. Loosen the retainer's DIN rail set screw A.
pressure SW
2. Open the EVT wiring cover B.
Contact / close
contact conf.
SW
3. When using the common gland or D-sub connector, slide end hook R E and release the hook. Next, loosen and remove screws on the
Air sensor
electric cover . For serial transmission, open the wiring cover C. (For common gland, check that the wiring cover D does not catch the
gland.)
Pressure SW
for coolant
Small Common gland type (T11R) D sub-connector type (T30R) Serial transmission type (T9*)
flow sensor
Small End hook R E End hook R E
flow controller
Flow sensor
for air k
oo ok
ndh ho
Flow sensor de nd
for water Sli d e
Sli Wiring
Total air Wiring cover C
system cover B
Total air
system Electric cover
(Gamma) Wiring cover D Electric cover

Ending
Wiring cover B
Wiring cover B

DIN rail
set
screw A

DIN rail
set screw A DIN rail
set screw A

Retainer

Retainer
Retainer
Terminal box

796
 MEVT Series
Technical data 2 How to expand reduced wiring manifold
4. Remove the connecting hook spring F and connecting hook plate G where the manifold is to be increased, and remove the connection
Refrigerating
between blocks. type dryer

5. Separate blocks to be expanded. Desiccant

type dryer
Wiring cover C High polymer
membrane
type dryer
4. Wiring cover B 5.
Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
DIN rail set screw (Separate)
Retainer F
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
G
Clean
F.R.
Electro
6. Insert two piping joints H into the input (P) and exhaust (R) ports at the separated section. pneumatic
regulator
(Note: At the separated section, two piping joints H protrude from each side (4 joints in all)). Air
booster
EVT to be added Speed
control valve

Silencer
Piping
joint H Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Do not change if end block Suction
plate
7. Mount the EVT to be added to the DIN rail. Magnetic
spring buffer
Mechanical
pressure SW
2 Catch the hook
Electronic
until a click is heard. pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor

1 Catch on front jaw Small

flow controller

8. Press so that there is no gap between blocks, and close the connecting hook spring F and connecting hook plate G to connect blocks. Flow sensor
for air
9. Insert signal wires for the expended EVT to connectors in the wiring and supply / exhaust block. Flow sensor
for water
10. For serial transmission, close the wiring cover C . When using the common gland or D-sub connector, fit the electric cover on, fix it in
Total air
place with screws, and return the end hook R E to the original position. system
Total air
(Tightening torque: 0.35 to 0.5N·m) system
(Gamma)
11. Close wiring cover B while taking care not to catch signal wires.
12. (1) Catch the retainer jaws onto the DIN rail. (2) Press so there is no gap Ending

(2) Press so that there is no gap between blocks.

Thin electro pneumatic regulator

(3) Press the retainer in the direction of arrow.

(4) Tighten DIN rail set screw A.
(Recommended tightening torque: 0.6 to 0.8N·m)

(3) Press retainer in

direction of arrow
F.R.L. unit

(4) DIN rail set screw A

(1) Catch retainer jaws onto DIN rail

797
 MEVT Series
Refrigerating
type dryer
MEVT How to complete manifold specification sheet (Ver. 2)
Desiccant
type dryer
 Manifold mode no. (example)
High polymer
membrane MEVT 500 — 0 C4 — T9DAR — 12 — U — 3
type dryer
Model no. A Pressure B Control C Port size D Electric / supply E Station F DIN rail G Voltage
Air filter control input and exhaust block number installation
range signal attitude
Auto. drain
/ others Layout
Part name Model no. 1 2 3 4 5 6 7 8
9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 Quantity
F.R.L.
(Module unit) EVT EVT 500 - 0 C4             12

F.R.L. EVT -
(Separate)
EVT -
Compact EVT -
F.R.
EVT -  
Precise
regulator Electric / supply and exhaust block EVT-T   R-
9DA C4    3
F.R.L. End block EVT-EL (for left side)  1
(Related
products) EVT-ER (for right side)  1
Clean
F.R.
DIN rail Attached Blanking plug Silencer
Electro L2=
pneumatic part GWP4-B GWP6-B SLW-H6
regulator
Air
booster *1 DIN rail length (L2) (Note)
Speed (1) Find DIN rail length by the calculation shown below. · Viewed from piping port, allocation position is assigned
control valve from left.
The obtained length is standard.
Silencer · Select the type from the block part configuration (pages
(2) For standard length, length (L2) is not required on the specification sheet. 786 to 788).
Check valve Indicate the length when using a non-standard length.
/ others · Allocation numbers 1 to 31 on the table above are for ref-
Joint Select the length based on the following DIN rail length setting table L2. erence. For REG-No. shown on wiring cover of EVT, num-
/ tube bers 1, 2, 3, ··· are allocated from nearer side per electric/
 How to calculate length of DIN rail supply and exhaust block connected.
Vacuum EVT Electric / supply and exhaust block End block Retainer
filter Manifold length (L1) = (An) + (Bm) + (C1) + D2
Vacuum n, m and l show usage per block.
regulator
DIN raillength (L2) = L2’12.5
n: EVT m: Electric / supply and exhaust block l:End block
Suction
L1+40 A/B/C/D indicates length (depth) per block.
plate L2’: → round up at the decimal point
Magnetic
12.5
spring buffer Block width
DIN rail mounting pitch (L3) = L2 - 12.5 (mm)
Mechanical
pressure SW A EVT 14
*2 Multiple combinations between serial transmission type Electric / T11R 42
Electronic
pressure SW Multiple serial transmission types can be combined and installed on the same B supply and 42
T30R
Contact / close
DIN rail.
contact conf. (Maximum station number: 12 for T9DAR/T9GAR) exhaust block T9* 32
SW C End block 10
Install EVT or end block next to serial transmission slave unit.
Air sensor Indicate the combination on the specification sheet. D Retainer 11.5
Example) EVT: 12 stations, electric/supply and exhaust unit T9DAR: 4 point x 3 L2
Pressure SW
for coolant
REG-No. L3 (=L2–12.5)
Small
flow sensor 12.5
Small
5.5

flow controller
Flow sensor
for air
Flow sensor
for water
Total air 4 stations 4 stations 4 stations
2.25 8
system
 DIN rail length setting table
Total air
system
(Gamma)
L1: Manifold length

Ending
97.5 110 122.5 135 147.5 160 172.5 185 197.5 210 222.5 235 247.5 260 272.5 285 297.5 310 322.5 335 347.5 360 372.5 385 397.5 410 422.5 435

to to to to to to to to to to to to to to to to to to to to to to to to to to to to

97.5
110 122.5 135 147.5 160 172.5 185 197.5 210 222.5 235 247.5 260 272.5 285 297.5 310 322.5 335 347.5 360 372.5 385 397.5 410 422.5 435 447.5
or
less
L2: Rail length

137.5 150 162.5 175 187.5 200 212.5 225 237.5 250 262.5 275 287.5 300 312.5 325 337.5 350 362.5 375 387.5 400 412.5 425 437.5 450 462.5 475 487.5
Pitch L3

125 137.5 150 162.5 175 187.5 200 212.5 225 237.5 250 262.5 275 287.5 300 312.5 325 337.5 350 362.5 375 387.5 400 412.5 425 437.5 450 462.5 475

Note 1: When L1 exceeds this table range, calculate according to "How to calculate DIN rail length".
798
 MEVT Series
Manifold specification sheet
MEVT Manifold specification sheet (Ver.2) Refrigerating
type dryer

 Manifold model no. Desiccant

type dryer

MEVT — — — — — High polymer

membrane
type dryer
A Pressure B Control C Port size D Electric / supply E Station F DIN rail G Voltage
Model no. control input and exhaust number installation Air filter
range signal block attitude
Auto. drain
/ others
Layout
F.R.L.
Part name Model no. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 Quantity (Module unit)
F.R.L.
EVT EVT - (Separate)
EVT - Compact
F.R.
EVT - Precise
regulator
EVT -
F.R.L.
(Related
EVT - products)
Clean
Electric / supply and exhaust block EVT-T R- F.R.
End block Electro
EVT-EL (for left side) pneumatic
regulator
EVT-ER (for right side) Air
booster
Speed
DIN rail control valve
Attached Blanking plug Silencer
L2= part Silencer
GWP4-B GWP6-B SLW-H6
Check valve
/ others
• Viewed from piping port, allocate positions from left. Joint
/ tube
• As shown on the wiring cover of EVT, REG-No. is assigned as 1, 2, 3, ··· per electric/supply exhaust block from the
Vacuum
nearest side. filter
• Install electric/supply and exhaust block to right side of EVT. Vacuum
regulator
Serial transmission type allows left installation. Consult with CKD.
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Thin electro pneumatic regulator
F.R.L. unit

799
 Proportional control valve

Refrigerating
3AP/23AF Series
type dryer Variable controlling pressure/flow rate with 0 to 10 V of voltage input (DC).
Desiccant
type dryer Flexibly controlling thrust / flow rate / position / cushion, etc.
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L. Specifications
(Module unit)
Overview Descriptions 3AP 2AF/3AF
F.R.L.
(Separate) Working fluid Clean compressed air (refer to page 760 for recommended air circuits)
Compact In CKD proportional control valves, both pres-
F.R. Working pressure range 0.1 to 0.97MPa 0 to 0.97MPa
sure control (3AP) type with regulator, and flow
Precise rate control type with metering valve (2 way vale: Control range Refer to the model no. table below.
regulator
F.R.L. 2AF, 3 way valve: 3AF) are available. Combined Withstanding pressure 1.47MPa
(Related
products) with a signal input controller according to appli- Rated current 780mA (max. control current)
Clean cations, continuous variable controlling thrust/ Coil resistance 19.5Ω (20˚C)
F.R.
Electro
speed/cushion effect, etc., of a cylinder, never Max. temperature rises 80˚C or less (780mA)
pneumatic achieved before, is enabled.
regulator Insulation class Class B JIS C4003
Air
booster Working temperature 5 to 50˚C
Speed Features Lubrication ISO VG32 (oil-free permissible)
control valve
Using proportional control valve, flexible and Mounting attitude tobe installed with horizontal coil section
Silencer
constant operation controls of a pneumatic cyl- Hysteresis 3%F.S. or less 7%F.S. or less
Check valve inder and other actuators are enabled. Linearity 2.5%F.S. or less –
/ others
䢇 Flexible control Step response hour 200ms or less Note 1 200ms or less
Joint
/ tube 䢇 High speed response / high precision Port size Rc1/4, 3/8
Vacuum CKD original plunger mechanism and low fric-
filter Weight 1.18kg
tion design. Superior response time and high
Vacuum Note 1: For load volume 300cm3
regulator precision due to precise machining technology.
Suction 䢇 Low noise level / low vibration
plate
Noise and vibration are very low level due to How to order
Magnetic design.
spring buffer
Mechanical
䢇 Common exhaust method 2AF 2 08
pressure SW Common exhaust method of type with bleed port
Electronic This product can be used where contamination Symbol Descriptions
pressure SW
is inhibited, vice versa, many dusts are present. A Model no.
Contact / close
contact conf. 䢇 Compact design A Model no.
SW 2AF 2 way valve/control subject: flow
Compact design for all controller for space sav-
Air sensor 3AF 3 way valve/control subject: flow
ing.
Pressure SW 3AP 3 way valve/control subject: pressure
for coolant
Small System configuration B Control range
flow sensor B Control range Model no. 2AF 3AF 3AP
Small Note 1
flow controller Proportional Max. effective sectional area Max. effective sectional area Pressure range
Controller control valve 2
Flow sensor
P2
20mm2 17mm2 0.05 to 0.59MPa
for air 3AP Series
A
Pressure 3 16mm2 11mm2
Flow sensor display
for water (3 way 4 10mm2 6mm2
Total air PR valve)
system O V 5 5mm2 3mm2
DC
Total air 2AF Series S
system 0 to 10 VDC C Port size
(Gamma) setting A Flow C
(2 way Port size 08 Rc1/4
signal APC-2 Series
Ending
valve)
or P 10 Rc3/8
10kΩVR O V
3AF Series
A S P→A
Flow
(3 way
R P valve)
(JIS symbol)
O V Note on model no. selection
24 VDC Note 1: Maximum effective sectional area is the value for discrete
Air A→R
100 VAC product.
Note that the total effective sectional area may vary per
Power supply Pressure source
effective sectional area before and after the product.

800
 3AP/ 23 AF Series
Internal structure and parts list / Dimensions
Internal structure and parts list Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
2 3 4 5 6 7 (Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
1 booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
No. Parts name Material No. Parts name Material Vacuum
filter
1 Sub-plate Aluminum alloy die-casting 5 Spool Stainless steel
Vacuum
2 Body Aluminum alloy die-casting 6 Molded coil regulator
3 Sleeve Stainless steel 7 Cartridge Suction
plate
4 O ring Nitrile rubber
Magnetic
spring buffer
Mechanical
pressure SW
Dimensions
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor
VALVE

MODEL Pressure SW
54.5

3AP -10 for coolant

63

SERIAL
Small
CKD Corporation MADE IN JAPAN
flow sensor
Small
flow controller
Flow sensor
DIN terminal box PG11 for air
2-ø5.5
45.5 Flow sensor
Gland direction per 4.25 for water
90˚ increment
Total air
system
Total air
system
(Gamma)

Cable size Ending

ø7 to ø10
Proportional control valve
114

F.R.L. unit
27
17

12.5

9 1/4
26 12.5 12.5 3-Rc3/8
Rc1/8
156
(Bleeding board)

801
 3AP/ 23AF Series
Refrigerating
Pressure control type
type dryer
Desiccant 䢇 I/O characteristics 䢇 Pressure control characteristics
type dryer
High polymer
membrane 0.6 0.21
type dryer

Air filter
0.5
Auto. drain 0.205
/ others
F.R.L.
Control pressure (MPa)

Control pressure (MPa)

(Module unit) 0.4
F.R.L. 0.2
(Separate) Set
point
Compact
F.R. 0.3
Precise
regulator 0.195
F.R.L.
(Related 0.2
products)
Clean
F.R.
Electro
0.19
pneumatic
0.1
regulator
Air
booster
0
Speed 2 4 6 8 10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9
control valve
Input voltage (VDC) Primary pressure P1 (MPa)
Silencer

Check valve
/ others
䢇 Flow characteristics 䢇 Relief characteristics
Joint
/ tube
0.7 P→A Working pressure = 0.83MPa 0.7 A→R
Vacuum
filter 0.6 0.6
Control pressure (MPa)

Control pressure (MPa)

Vacuum
regulator 0.5 0.5
Suction
plate 0.4 0.4
Magnetic 0.3
spring buffer 0.3
Mechanical
pressure SW 0.2 0.2
Electronic 0.1 0.1
pressure SW
Contact / close
0 0
contact conf.
SW
500 1000 1500 2000 500 1000 1500 2000
Flow /min.(ANR) Flow /min.(ANR)
Air sensor

Pressure SW
for coolant
Small Flow control type
flow sensor
Small 䢇 I/O characteristics 2AF 䢇 I/O characteristics 3AF
flow controller
Flow sensor
for air
P→A A→R P→A
Flow sensor
for water 2AF2
Total air 20 20
system 3AF2
Total air
Effective sectional area (mm2)

Effective sectional area (mm2)

system 2AF3
(Gamma)
15 15
Ending
3AF3

2AF4
10 10

2AF5 3AF4

5 5
3AF5

0 0
2 4 6 8 10 2 4 6 8 10
Input voltage (VDC) Input voltage (VDC)

802
MEMO Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
Proportional control valve
F.R.L. unit

803
 Controller

Refrigerating
APC Series
type dryer Dedicated control component required for driving proportional control
Desiccant
type dryer valves
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L. Specifications
(Module unit)
Descriptions DC power supply type AC power supply type
F.R.L. Overview
(Separate) Power voltage 24 to 30 VDC (ripple ratio 1% or less) 100AC±10% (50/60Hz)
Compact This is an amplifier to control current of propor-
F.R. Power consumption 30W or less 40VA or less
tional valve (780mA) with 0 to 10 V of input sig-
Precise nal. Dither is applied to impressed current with Output current/applicable models 0 to 780mA/ (3AP.2AF.3AF)
regulator
F.R.L. PWM method at the same time. This controller Input impedance 100kΩ
(Related
products) draws maximum performance of proportional Set input voltage 0 to 10 VDC
Clean valve. External potentiometer 10kΩ (1/8W)
F.R.
Electro Span adjusting range 50 to 90mA/V (increase ratio in output current for set input voltage)
pneumatic
regulator Zero point adjusting range 0 to 250mA
Air
booster Delay adjusting range 10ms to 1s
Speed Dither frequency adjusting range 125 to 200Hz
control valve
Output current vs. impedance change 1% or less for 19.5 to 26Ω (780mA F.S. rated voltage)
Silencer
Output current vs. 1% or less for power source range
Check valve power supply variation (780mA F.S. impedance 19.5Ω )
/ others
Joint Output current vs. temperature fluctuation ±0.04%/˚C (780mA F.S. rated voltage)
/ tube
Working temperature 0 to 50˚C
Vacuum
filter Use humidity 0 to 85%R.H.
Vacuum Storage temperature –10 to 65˚C
regulator
Suction
Weight 0.60kg 1.64kg
plate
Magnetic How to order
spring buffer
Mechanical
pressure SW APC 2 1
Electronic
pressure SW
Contact / close Symbol Descriptions
contact conf.
SW A Power voltage
A Power voltage
Air sensor 1 100 VAC (standard)
Pressure SW 2 200 VAC (custom order)
for coolant
3 24 VDC (standard)
Small
flow sensor 7 110 VAC (custom order)
Small 8 220 VAC (custom order)
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air Operational principle
system
(Gamma)
䢇 Circuit structure block diagram
Ending

Impressed 0 to 10VDC of signal voltage according to the set

+V
input are inputted into the integrating circuit via buffer amplifier
Zero pint and pre-amplifier sections. Integrating circuit output and triangle
+V wave are compared in the voltage comparator after that, and
IN
SG Buffer Integral pulse amplitude are rectified. Switching the directive circuit with
Preamplifier
amplifier circuit pulse signals, the proportional valve is driven with receiving dither
Voltage Drive Proportional
Triangle comparator circuit valve effect. Performed current feedback by detecting current which
wave
occurrence
Time constant circuit flows in proportional valve, the constant current circuit resistant
Safety
Power power to change in impedance, power supply variation, and tempera-
supply supply
Dither ture fluctuation of a proportional solenoid are configured.
frequency

804
 APC Series
Dimensions / Cautions
Dimensions Refrigerating
type dryer
䢇 AC power supply type 䢇 DC power supply type Desiccant
type dryer
High polymer
membrane
type dryer

22.5
15
SG IN +V SOL +24V 0V

Air filter

40
4-φ4.8
SENSOR Auto. drain
DELAY FREO ZERO SPAN
/ others

85
60
F.R.L.
(Module unit)

SG IN +V SOL AC
F.R.L.
(Separate)
4-φ4.8

SENSOR
DELAY FREO ZERO SPAN Compact
F.R.
Precise
regulator
F.R.L.
(Related
120 120 products)
110 Clean
110 F.R.
95 95 Electro
pneumatic
regulator
Air
booster
Speed
control valve

PARECT CONTROLLER PARECT

4-φ4.8
CONTROLLER
4-φ4.8

Silencer

Check valve
/ others
Joint
/ tube

105
150
105
150

Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic

15
spring buffer
15

Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW
Operation and cautions
Air sensor

䢇 DC power supply type (1) (2) DC power supply terminal (+ 24V, 0V) (5) Power supply terminal for external poten- Pressure SW
for coolant
SPAN ZERO DELAY FREO
SENSOR
Use power voltage 24VDC and capacity tiometer
Small
more than 1A, and connect terminal (1) Used to obtain set input signals from po- flow sensor
to +, while terminal (2) to -. If connected tentiometer. Connect as shown below. Do Small
+24V 0V SOL +V IN SG to wrong polarity, the controller may be not input external set signals simulta- flow controller

damaged. neously when connecting to the potenti- Flow sensor

1 2 3 4 5 6 7 for air
(1) (2) AC power supply type terminal (AC) ometer.
䢇 AC power supply type Supply the power voltage indicated on
Flow sensor
for water
SPAN ZERO DELAY FREO
SENSOR
name seal on terminal (1) (2). Total air
system
(3) (4) Solenoid terminal (SOL)
Total air
Connect terminal (3) (4) to coil section of +V IN SG system
(Gamma)
AC SOL +V IN SG DIN terminal of proportional control valve. 5 6 7 CW: clockwise
The terminal has no polarity. Ending
1 2 3 4 5 6 7 CCW: counterclockwise
CW CCW
F.R.L. unit
Controller

9.5 10kΩ,1/8W
M3ⴒ0.5
7.7 Free termin.al setscrew
If potentiometer is connected as shown
above, output current increases when
rotates clockwise.
3 and over 7.7 and over

ø3 and over
(6) (7) Setting input terminal (IN, SG)
Supply external 0 to 10 VDC of voltage
signals, and connect terminal (6) to +,
7.7 and over

Crimp while terminal (7) to –.

termin.al

* Use a crimp terminal to wire to the gland.

805
 APC Series
Refrigerating
Signal source and interface
type dryer
Desiccant
To achieve high performance of proportional control valve, understanding input characteristics per control valve and matching output signals.
type dryer
High polymer
membrane
type dryer 䢇 Pressure controlled manually (1) 䢇 Pressure controlled manually (2) 䢇 Automatic pressure switchover circuit by PC
Air filter

Auto. drain
/ others
PC output board EV2500 (Note 1)
F.R.L. APC
(Module unit) EV2500 (Note 1) Controller COM
MAX 3AP
F.R.L. 100Ω +24V
2W 24 VDC 3
(Separate) 0V SOL
DC10V to +V 2
200Ω min.
Compact
F.R. 1W IN 1
10kΩ SG
Precise
regulator 1/8W
100Ω MAX
F.R.L. DC10V to
(Related 200Ω MIN
products)
Setting 2 3
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve 䢇 Precision control by D/A converter of PC 䢇 Diagram of circuit using interface
/ others
Joint
/ tube Interface
PC analog output board
Vacuum
filter D/A 4 to 20mA
converter Controller Current input
Vacuum
regulator EV2500 (Note 1)
Suction Analog output
plate
Analog EV2500 (Note 1)
Magnetic 0 to 10V
spring buffer
Mechanical C COM
pressure SW GND (30mA)
Electronic
1 1
pressure SW PC 2 2
Contact / close
Micro 3 3
contact conf. computer 4 4
SW Bit input
5 5
Air sensor 6 6
7 7
Pressure SW
for coolant 8 8

Small PI
flow sensor (Note 1) For EV2500, 24 VDC power supply is required.

Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending

806
MEMO Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
Compact
F.R.
Precise
regulator
F.R.L.
(Related
products)
Clean
F.R.
Electro
pneumatic
regulator
Air
booster
Speed
control valve

Silencer

Check valve
/ others
Joint
/ tube
Vacuum
filter
Vacuum
regulator
Suction
plate
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Contact / close
contact conf.
SW

Air sensor

Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Total air
system
Total air
system
(Gamma)

Ending
F.R.L. unit
Controller

807
 Interface

Refrigerating
PI Series
type dryer Interface components to connect proportional control valve easily.
Desiccant
type dryer Digital 8 bits, BCD, analog signal compatible.
High polymer
membrane
type dryer

Air filter

Auto. drain
/ others
F.R.L. Specifications
(Module unit)
Overview Analog input Digital input
F.R.L.
(Separate)
Descriptions
PI-EV-D0 PI-EV-D1 PI-EV-D2 PI-EV-D3 PI-EV-D4
Compact This product is an interface between proportional
Setting input range 0 to 10 VDC 0 to 5 VDC 4 to 20mA DC — —

specifications spec. Input specifications

F.R.
control valve and upper stream controller. This
Precise Input impedance 1MΩ 250Ω — —
regulator
interface eliminates the dedicating controller, and
enables flexible controlling electric signals by a Input no. — — — 8 points BCD2 digit
F.R.L.
(Related
products) common programmable controller. Also, manual Input method — — — No-voltage contact or open collector input
Clean operation is done easily with installing external Insulation method Not insulated Photocoupler
F.R.
Electro
volume. Input display None LED
pneumatic
Manual Output

regulator Output voltage 0 to 10 VDC

Air
Features
booster Protective circuit Output short-circuit protection (50mA cut-off)
䢇 All models
Speed Manual setting method External volume (2kΩ and over)
control valve Internal power supply enabling direct connect
Switching method Toggle switch (with remote switching terminal)
to 100 VAC and 200V.
Silencer
· Remote manual operation enabled by manual Manual display Indicated by turning LED (AUTO) off
Check valve
/ others
and remote switch terminals. Total precision ±1.5%F.S.
Joint
䢇 Digital input type Power voltage Rated ±10%
/ tube · No voltage contact input eliminates power sup- 10W or less
Vacuum ply for load. Power consumption
filter Note 1
· Input insulation protection by photo coupler.
Vacuum External output voltage 24 VDC
regulator · Input display by LED.
Suction
Working temperature 0˚C to 50˚C
plate Use humidity 0 to 85%R.H.
Magnetic
spring buffer Storage temperature -10˚C to 65˚C
Mechanical Weight 0.7kg
pressure SW
Note 1: During electronic regulator (EV series) operation
Electronic
pressure SW
Contact / close
contact conf.
SW How to order Example of connection of digital input type
Air sensor
䢇 Contact output
Pressure SW PI EV D3 1
for coolant High-order controller Interface
Small
flow sensor Symbol Descriptions Surge 0 1
Internal circuit
Internal circuit

RA suppressor to to
Small A External output power supply 7 8
flow controller A External output
RA
Electro-pneumatic regulator
Flow sensor
for air
power supply EV 24 VDC (
EV series dedicating power supply ) COM
COM
Flow sensor Input circuit power supply (10VDC)
for water B Input signal
Total air
B Input signal
system
D0 Voltage 0 to 10 VDC
Total air D1 Voltage 0 to 5 VDC
system 䢇 Transistor output
(Gamma) D2 Current 4DC to 20mA High-order controller Interface
Ending D3 Digital 8Bit
D4 Digital BCD 0 1
Internal circuit

to to
Internal circuit

7 8
C Power voltage
C Power
1 100 VAC
voltage
2 200 VAC

COM Input circuit power supply (10VDC)

External power

Note) Transistor source output can not be used.

Note) For external power, the voltage is to be 12 VDC and over.
Note) Connect the COM terminal to external power source 0 V.

808
 PI Series
System configuration / Dimensions
System configuration Refrigerating
type dryer
䢇 User controller Desiccant
Input signal type dryer
High polymer
0 to 10 VDC membrane
type dryer

Type: PI-EV-D0 Air filter

Auto. drain
Analog output component

/ others

0 to 5 VDC F.R.L.
(Module unit)
䢇 Electro-pneumatic regulator EV2500 F.R.L.
Type: PI-EV-D1 (Separate)
Compact
F.R.
Precise
regulator
4 to 20mA DC F.R.L.
(Related
䢇 Interface products)
Type: PI-EV-D2 Clean

PA
R
F.R.

AC
T
Electro
䢇 Controller + proportional valve pneumatic
regulator
8 bit APC+3AP, 2AF, 3AF
Air
binary booster

Type: PI-EV-D3 Speed

control valve
䢇 Programmable and controller
Silencer
BCD Check valve
2 digit / others

Type: PI-EV-D4 Joint

/ tube
Vacuum
filter
䢇 Computer for FA Vacuum
regulator
Suction
Dimensions plate
Magnetic
spring buffer
Mechanical
4-ø5.5 pressure SW
Electronic
pressure SW
Contact / close
contact conf.
PARECT INTERFACE SW

Air sensor

EXT MANU IN 1 3 5 7 RUN

Pressure SW
for coolant
24V 15V SI G G +
Small
64

78

G +
2 4 6 8 AUto
flow sensor
AC OUT SW COM

AUto
Small
flow controller
Flow sensor
MANU for air
Flow sensor
for water
Total air
Gland guard system
Terminal box pitch-10 (M3.5) Total air
system
(Gamma)

Ending
F.R.L. unit
Interface
43

145
157
173

809