Académique Documents
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PDF Solutions
Users Conference
• Fabless • Process
Solutions Control
• IDM Solutions
Fabless Solutions
Reporting
Big Data
SYL
PCM/WAT Spatial
SBL
Outlier
Final Test Ensemble
STL Manual Review
SPL
Sort
Test Outlier Equipment
ML A Grade
Assy FDC Ensemble Variance
Multiple data types, Multiple algorithms, Machine Learning, Potentially large data sets,
Collaborative Learning, …
PDF Solutions, All Rights Reserved 6
Point Solutions not Sufficient
FDC / APC
TOOL
FDC
MES
METROLOGY WIP
WAT Defect
DESIGN Team
YIELD/QUALITY
EDAS TEST Team
WAFER SORT/
FINAL TEST
PACKAGE PROD
ASSY Team
Multiple Databases – Multiple User Interfaces - Custom integrations - Silos with only part
of the picture available to each team – Local optimization – Many data types/formats
Traditional FDC/APC
Sensor/Tool Audit:
Approach
Does the toolSensor
achieve tool capability?
Prioritization:
APC/SPC Limits:
Configuration Efficiency
YieldAware
Approach
Exensio Unified Big Data Infrastructure
Does the equipment achieve required process
capability?
Diagnostics
Modeling
ROI
Yield
• Examples:
– Aligning events in a fab with wafer data to answer question like “which wafers were processed with
the new batch of resist”?
– Mapping equipment signals across a fleet of tools to account for configuration differences
– Meaningful merging of chip data as the chips flow through wafer sort, assembly, and final test
• Digital Twins require models and harmonized data collection to enable machine
learning
Technology Equipment Equipment Indicators Parametric Equipment SPC sCV testchip Die traceability Other
Family Operator TrackIn/Out Summaries Categorical Fab chemical DPCV Location of performance
delivery metric databases
Process Program Recipe Trace Charts Lot / Wafer PCM reel/tube
Product Recipe Operator Summaries Equipment …
Model Wafer Sort Solder paste
Defect counter data
Source Lot Date/Time Chamber prediction Bin Map batch, vendor
Lot Process Flow QueueTime Summary Equipment Event
Exensio real Multi-Bin Equipment
Kill Ratio / PM
Wafer # Stages CycleTime time data parameters
Defect Images Consumables Final Test
Die Steps Wfr Counts collection Operator logs
Reticle
Module Data
>100 Fab Tools Types supported, >20 Tester Types supported, >160
Assembly Tool Types supported, > 50 Data types supported
PDF Solutions, All Rights Reserved 11
Data Quality – Completeness/Consistency – Data Collection/DEX
Data Exchange Network - DEX
FDC Assembly
Data Collection and Data Collection and
Control Control
Analytics
…….. ……..
Data Collection and Data Collection and
Control Control
…….. ……..
Data Collection and Data Collection and
Control Control
45
RDBMS
40
(All Data)
35
40 X
Performance Multipliers
30
25
Cluster
20
RDBMS
15 Cassandra (Meta Data)
10
(Data)
5 8X 8X
Spark
0
Data Ingestion Data Retrieval Server Side Analytics
Parallel Storage + Parallel Analytics
Average results from four pilots in 2019
PDF Solutions, All Rights Reserved 16
Example Benefits of Exensio Cloud Deployment
Acquired company in 2015 that was one of the first to
o Reduced costs compared to on-premise deploy web-native analytics capabilities for the
o For deployed projects range is between 18% and 34% semiconductor industry on the cloud and integrated
its capabilities within Exensio
o 24/7 support and maintenance by expert resources Constantly expanding percentage of accounts
o Faster access to latest releases and faster resolution of issues deploying Exensio on the cloud
Currently ~ 15% on the cloud with clear acceleration in
o Dynamic scaling to fit future use scenarios this direction
o Organic growth (or reduction), Temporary needs, ML model training
AWS and AliCloud as primary cloud providers
o Tiered storage offered in future releases
o Reduced costs and longer online data availability benefit Traffic from/to Cloud to Customer HQ is limited Traffic from/to Cloud to Customer HQ is
VPN VPN
TLS 1.2
• Consolidated environment for the enterprise Load
Balanc
er
Remote VCN peering
Compartment = PDF
Load
Balanc
er
Object
Storage
PDF Management VCN
File Storage
Cust2 Private Subnet 1
SFTP Server
Oracle DB
ETL Servers Block Storage Oracle DB
Cassandra/Spark Cluster ETL Servers Block Storage
Update Server Monitoring Host Cassandra/Spark Cluster
Cust1 Private Subnet 2 Firewall
Cust2 Private Subnet 2
VPN
Customer1 VCN Customer2 VCN
Compartment = Customer-01 Compartment = Customer-02
performance requirements
Virtual Virtual
Cloud Cloud
Network PDF HQ Network
DFI CV Core
CVi
Ability to enter into “ad hoc mode” into full client Exensio-
Yield capability, from any analysis as desired.
User System
Decision
Configuration Learning AIM solutions are not reports:
Engine
– AUTOMATIC
AIM Decision – INTELLIGENT AI + ML
– CONFIGURABLE
o PDF Focuses its development efforts on the areas where it can deliver value
o We license and OEM best in class components to leverage the expertise of others, including
the open source community
o We handle all of the licensing from our suppliers, so our customers have only to reach
agreement with PDF and get all sublicenses
PDF Domain
Knowledge
Fully scalable, big Automated Machine
data system / analytics Learning Solutions