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Specifications <1000
Remarks Wafers X Y W-Lb1 P-Ka S-Ka
mm mm cps E10 E10
Sample
1 0 0 145.92 1502.12 3153.59
Test 1 - After WD4 A 2 26 26 143.37 1702.96 2437.87
3 -26 -26 1231.24 1302.18 2736.79
Sample
1 0 0 268.48 1432 2836.6
Test 1 - After WD4 B 2 26 26 148.4 1577.64 2639.75
3 -26 -26 436.7 1509.96 2284.73
Sample
1 0 0 141.3 1283.14 3064.94
Test 1 - After Ontrack
(Normal Flow) A 2 26 26 126.89 1348.57 2573.89
3 -26 -26 776.72 1396 2349.4
Sample
1 0 0 149.88 1331.57 2963.64
Test 1 - After Ontrack
(Normal Flow) B 2 26 26 137.43 1654.83 2089.32
3 -26 -26 794.82 1278.19 2435.63
Sample
1 0 0 199.18 1433.59 3462.89
Test 1 - After Ontrack
(Reverse Flow) A 2 26 26 158.58 1627.21 3197.25
3 -26 -26 1377.72 1574.25 3072.51
Sample
1 0 0 215.2 1299.64 3083.04
Test 1 - After Ontrack
(Reverse Flow) B 2 26 26 152.29 1380.86 2772.52
3 -26 -26 1085.66 1366.39 2704.21
Sample
1 0 0 2958.8 10996.96
Test 2 - After WD4 A 2 26 26 2721.74 10312.19
3 -26 -26 3607.34 9900.58
Sample
1 0 0 2594.87 6835.88
Test 2 - After WD4 B 2 26 26 1289.38 4903.1
3 -26 -26 3019.29 7634.17
Sample
1 0 0 142.85 1182.18 2385.99
Test 2 - After Ontrack
(Normal Flow) A 2 26 26 133.63 889.18 2216.31
3 -26 -26 1080.42 1298.97 1906.11
Sample
1 0 0 121.43 665.74 1882.58
Test 2 - After Ontrack
(Normal Flow) B 2 26 26 156.14 1008.81 1977.81
3 -26 -26 963.44 770.46 1835.58
Sample
1 0 0 566.72 288.43 2649.24
Test 2 - After Ontrack
(Reverse Flow) A 2 26 26 125.14 990.72 2375.98
3 -26 -26 611.04 973.89 2257.58
Sample
1 0 0 167.91 451.14 2483.76
Test 2 - After Ontrack
(Reverse Flow) B 2 26 26 135.35 1018.1 2129.62
3 -26 -26 852.4 842.19 2449.31
Sample
1 0 0 280.82 ND 3870.44
Test 3 - After WD4 A 2 26 26 364.02 178.29 3771.92
3 -26 -26 252.86 175.21 3450.99
Sample
1 0 0 130.84 ND 3794.04
Test 3 - After WD4 B 2 26 26 147.07 171.55 3390.96
3 -26 -26 1206.34 ND 3257.72
Sample
1 0 0 171.23 < 4117.89
Test 3 - After Ontrack
(Normal Flow) A 2 26 26 142.15 < 3578.7
3 -26 -26 863.08 < 3746.2
Sample
1 0 0 157.88 < 4075.71
Test 3 - After Ontrack
(Normal Flow) B 2 26 26 149.58 < 3892.24
3 -26 -26 896.38 < 3784.9
Sample
1 0 0 152.02 < 3478.33
Test 3 - After Ontrack
(Reverse Flow) A 2 26 26 146.75 < 3801.74
3 -26 -26 1229.33 < 4095.72
Sample
1 0 0 488.2 < 3611.48
Test 3 - After Ontrack
(Reverse Flow) B 2 26 26 141.69 < 3876.37
3 -26 -26 498.78 < 3821.96
Sample
1 0 0 932.72 191.86 3611.57
Standard Flow - After
WD4 A 2 26 26 163.13 225.47 3741.97
3 -26 -26 895.23 199.05 3478.61
Sample
1 0 0
Standard Flow - After
WD4 B 2 26 26
3 -26 -26
Sample
Standard Flow - After 1 0 0 139.77 ND 3596.33
Ontrack (Normal Flow) 2 26 26 160.67 158.7 3041.92
A 880.5 156.42 3026.03
3 -26 -26
Sample
Standard Flow - After 1 0 0 172.79 ND 3317.41
Ontrack (Normal Flow) 2 26 26 139.86 193.22 3162.01
B 912.12 ND 3120.63
3 -26 -26
Sample
Standard Flow - After 1 0 0 211.8 ND 3216.73
Ontrack (Reverse Flow) 2 26 26 151.07 182.72 2972.63
A 984.45 ND 3171.99
3 -26 -26
Sample
Standard Flow - After 1 0 0 1338.11 ND 3134.77
Ontrack (Reverse Flow) 2 26 26 155.09 194.45 3234.52
B 1210.8 ND 3277.22
3 -26 -26
<5 <500 <5 <5 <5 <5 <5 <5
Cl-Ka K-Ka Ca-Ka Ti-Ka Cr-Ka Mn-Ka Fe-Ka Ni-Ka Cu-Ka Zn-Ka
E10 E10 E10 E10 E10 E10 E10 E10 E10 E10
351.09 < 391.75 < < < 4.8 2.65 0.61 3.37
302.34 < 176.78 < < < 8.79 1.19 0.46 3.4
275.47 < 170.92 < < < 6.58 0.98 ND 2.31
246.48333
334.43 < 250.95 < < 1.89 12.7 2.03 0.83 5.23
299.59 < 161.68 < < 0.84 8.06 0.91 0.34 2.65
263.15 < 171.51 < < 0.94 8.61 2.05 ND 4
194.71333
304.34 < 230.1 < < 3.21 10.28 1.92 5.06 3.1
239.52 < 144.24 < < 0.53 12.66 0.81 0.44 2.61
268.16 < 158.75 < < 1.23 7.29 1.14 ND 2.7
177.69667
193.57 < 38.66 52.78 1.87 < 35.68 1.46 < 16.28
132.45 < 39.82 33.29 ND < 28 0.88 < 13.13
125.1 < 56 64.44 ND < 35.56 1.91 < 23.05
44.826667
156.02 < 117.05 < < 0.65 10.95 1.96 0.49 7.52
220.01 < 43.9 < < ND 12.04 0.3 0.48 4.36
245.93 < 123.02 < < ND 17.75 1.01 ND 17.45
94.656667
< < 101.77 1.16 < < 2.76 < < 1.23
< < 113.98 2.26 < < 3.17 < < 1.84
< < 82.65 ND < < 3.05 < < 0.94
99.466667
237.69 < 202.58 < < < 4.88 2.04 0.42 1.04
347.25 < 170.85 < < < 10.16 0.66 0.43 ND
317.53 < 181.79 < < < 4.67 0.75 ND ND
185.07333
216.29 < 166.13 < < < 3.33 0.47 0.41 1.14
385.94 < 200.31 < < < 3.39 0.78 ND 1.2
420.71 < 190.38 < < < 2.84 0.47 ND 1.15
185.60667
162.61 < 22.87 < < 0.53 4.13 4.04 0.77 1.03
239.48 < 92.66 < < ND 6.36 ND 0.71 1.44
256.43 < 159.54 < < ND 6.05 0.62 ND 1.66
91.69
160.48 < 82.31 < < < 2.84 1.98 ND ND
288.11 < 130.51 < < < 2.27 0.38 0.33 0.88
264.16 < 129.02 < < < 2.16 0.28 ND 1.09
113.94667
278.53 < 206.61 < < < 4.39 1.78 < 0.66
404.14 < 155.18 < < < 4.03 ND < ND
437.24 < 187.28 < < < 2.67 ND < 0.89
183.02333
266.41 < 73.29 < < < 3.21 0.53 < 0.87
573.04 < 63.26 < < < 4.62 0.35 < ND
466.84 < 143.35 < < < 5.63 ND < 0.61
93.3
Wafer A
Wafer B
Ontrack
Normal Flow Reverse Flow
WD4
Normal Flow
Wafer A
Wafer B
Ontrack
Normal Flow Reverse Flow
WD4
Normal Flow
Wafer A
Wafer B
Ontrack
Normal Flow Reverse Flow
WD4
Normal Flow
Wafer A
Wafer B
Ontrack
Normal Flow Reverse Flow