16-Jul-13

Loading Time Specifications

Remarks WD3 WD4 X Y W-Lb1 Al-Ka
mm mm cps

4th cassette (100 0 0

wafers) - Post WD4 9.30am 11am 26 26
(SRRS-310-450) -26 -26

4th cassette (100 0 0

wafers) - Post WD4 9.30am 11am 26 26
(SRRS-309-599) -26 -26

8th cassette (200 0 0

wafers) - Post WD4 10am 11.30am 26 26
(SRRS-304-262) -26 -26

8th cassette (200 0 0

wafers) - Post WD4 10am 11.30am 26 26
(SRRS-310-632) -26 -26

12th cassette (300 0 0

wafers) - Post WD4 10.30am 12pm 26 26
(JRRS-358-508) -26 -26

12th cassette (300

wafers) - Post WD4 0 0
(JRRS-358-570) 10.30am 12pm 26 26
-26 -26

16th cassette (400 0 0 179.53 109.36

wafers) - Post WD4 11am 12.30pm 26 26 156.6 109.87
(JRRS-359-643) -26 -26 976.64 110.16

16th cassette (400 0 0 259.17 122.1

wafers) - Post WD4 11am 12.30pm 26 26 200.54 120.21
(JRRS-359-751) -26 -26 968.18 111.86
20th cassette (500 0 0 195.53 158.97
wafers) - Post WD4 11.30am 1pm 26 26 201.73 159.99
(JRRS-357-894)
-26 -26 724.12 161.13

20th cassette (500 0 0 465.9 150.8

wafers) - Post WD4 11.30am 1pm 26 26 190.75 154.23
(JRRS-358-199) -26 -26 533.53 159.94
<1000 <5 <500 <5 <5 <5 <5
P-Ka S-Ka Cl-Ka K-Ka Ca-Ka Ti-Ka Cr-Ka Mn-Ka Fe-Ka Ni-Ka
E10 E10 E10 E10 E10 E10 E10 E10 E10 E10

< 7226.29 77.38 < 3.94 9.62 < < 1.58 ND

< 7127 73.88 < 8.02 5.98 < < 1.67 ND
< 6531.67 99.06 < 5.52 8.55 < < 1.53 ND

< 10682.97 < < 6.14 8.14 < < 1.35 0.33
< 10702.48 < < 7.79 8.36 < < 1.21 ND
< 8452 < < 6.13 6.48 < < 1.69 ND
< 6402.42 397.69 < 8.05 10.32 < < 2.43 ND
< 7086.6 230.79 < 17.1 6.62 < < 4.65 0.33
< 6779.33 225.19 < 18.92 6.82 < < 3.76 ND

< 5797.06 291.46 < 12 8.9 < < 2.77 ND

< 5819.82 249.09 < 22.02 7.33 < < 4.65 0.37
< 5951.51 236.51 < 13.91 6.65 < < 2.73 0.42
 <5 <5
Cu-Ka Zn-Ka
E10 E10

ND <
0.44 <
ND <

< <
< <
< <
0.72 ND
0.75 0.92
ND 0.89

ND ND
0.81 1.08
ND ND
 16-Jul-13
Loading Time Specifications
Remarks WD3 WD4 Ontrack X Y W-Lb1 Al-Ka
mm mm cps E10

4th cassette (100 0 0

wafers)-PostOntrack 9.30am 11am 3pm 26 26
(SRRS-308-659) -26 -26

4th cassette (100 0 0

wafers)-PostOntrack 9.30am 11am 4pm 26 26
(SRRS-309-991 -26 -26

8th cassette (200 0 0

wafers)-PostOntrack 10am 11.30am 5pm 26 26
(SRRS-310-640) -26 -26

8th cassette (200 0 0

wafers)-PostOntrack 10am 11.30am 6pm 26 26
(SRRS-310-342) -26 -26

12th cassette (300 0 0

wafers)-PostOntrack 10.30am 12pm 6.30pm 26 26
(JRRS-359-396) -26 -26

12th cassette (300 0 0

wafers)-PostOntrack 10.30am 12pm 8pm 26 26
(JRRS-358-505) -26 -26

16th cassette (400 0 0 192.64 123

wafers)-PostOntrack 11am 12.30pm 9pm 26 26 167.64 125.42
(JRRS-359-924) -26 -26 1259.03 119.56

16th cassette (400 0 0 193.96 128.17

wafers)-PostOntrack 11am 12.30pm 10.30pm 26 26 166.33 125.45
(JRRS-359-934) -26 -26 945.03 130.32
 20th cassette (500 0 0 255.4 156.85
wafers)-PostOntrack 11.30am 1pm 12am 26 26 179.76 147.05
(JRRS-358-184) -26 -26 848.02 154.54

20th cassette (500 0 0 197.17 157.92

wafers)-PostOntrack 11.30am 1pm 1.30am 26 26 198.61 155.64
(SRRS-358-206) -26 -26 1976.28 157.85
<1000 <5 <500 <5 <5 <5 <5
P-Ka S-Ka Cl-Ka K-Ka Ca-Ka Ti-Ka Cr-Ka Mn-Ka Fe-Ka Ni-Ka
E10 E10 E10 E10 E10 E10 E10 E10 E10 E10

< 3133.16 702.11 < 106.58 < < 0.96 6.58 8.79
< 3196.1 615.42 < 57.83 < < 0.49 4.46 5.81
< 3124.9 514.43 < 43.37 < < ND 5.09 6.86

< 3399.54 569.51 < 151.93 < ND 0.8 7.73 14.04

< 3226.95 760.39 < 71.2 < ND ND 4.84 5.74
< 4122.2 563.12 < 72.32 < ND 0.75 5.36 8.7
< 4286.19 595.01 < 177.91 < < 1.28 6.57 17.45
< 3909.58 626.6 < 70.72 < < 0.56 3.05 7.01
< 3601.01 784.92 < 75.04 < < ND 4.33 7.2

< 3699.46 745.61 < 172.62 1.11 < 1.09 7.64 19.41
< 3310.74 682.24 < 59.46 ND < 0.62 4.35 6.32
< 3538.54 566.24 < 58.18 ND < 0.9 5.47 7.29
 <5 <5
Cu-Ka Zn-Ka
E10 E10

1.16 6.38
ND 1.64
ND 2.24

1.19 8.61
ND 2.64
ND 3.01
1.44 13.33
ND 3.36
ND 4.39

1.18 12.34
ND 3.84
ND 4.1
 WD4

4th Cassette

(SRRS-310-450) (SRRS-309-599)

8th Cassette

(SRRS-304-262) (SRRS-310-632)

12th Cassette

(SRRS-304-262) (JRRS-358-508)
12th Cassette

(SRRS-304-262) (JRRS-358-508)

16th Cassette

(JRRS-359-643) (JRRS-359-751)

20th Cassette

(JRRS-357-894) (JRRS-358-199)
 Ontrack

(SRRS-309-599) (SRRS-308-659) (SRRS-309-991)

(SRRS-310-632) (SRRS-310-640) (SRRS-310-342)

(JRRS-358-508) (JRRS-359-396) (JRRS-358-505)

(JRRS-358-508) (JRRS-359-396) (JRRS-358-505)

(JRRS-359-751) (JRRS-359-924) (JRRS-359-934)

(JRRS-358-199) (JRRS-358-184) (SRRS-358-206)

(SRRS-309-991)

(SRRS-310-342)

(JRRS-358-505)
(JRRS-358-505)

(JRRS-359-934)

(SRRS-358-206)
Fe

After Ontrack
Value (E10)
100 wafers 200 wafers 300 wafers 400 wafers 500 wafers 3.00
Wafer A 2.38 2.70 1.43 1.34
Wafer B 2.34 2.03 1.46 1.14
2.50

2.00

1.50

E10
1.00

0.50

0.00
0.5 1
 Fe Chart
3.00

2.50

2.00

Wafer A
1.50
E10

Wafer B

1.00

0.50

0.00
0.5 1 1.5 2 2.5 3 3.5 4 4.5 5
Num of wafers run (x100)
 Specifications <1000 <5 <500
Remarks X Y W-Lb1 Al-Ka P-Ka S-Ka Cl-Ka K-Ka Ca-Ka
mm mm cps E10 E10 E10 E10 E10 E10
192.64 123 3133.16 702.11 106.58
167.64 125.42 3196.1 615.42 57.83
1259.03 119.56 3124.9 514.43 43.37

Al S Cl Ca Mn Fe Ni Cu
x y cps E10A/cm2 E10A/cm2 E10A/cm2 E10A/cm2 E10A/cm2 E10A/cm2 E10A/cm2
0 0 123 3133.16 702.11 106.58 0.96 6.58 8.79 1.16
26 26 125.42 3196.1 615.42 57.83 0.49 4.46 5.81 ND
-26 -26 119.56 3124.9 514.43 43.37 ND 5.09 6.86 ND
Average 122.662 3151.387 610.653 69.259 0.483 5.377 7.152 0.388
Sigma 2.943 38.945 93.933 33.122 0.48 1.089 1.511 0.672
R(%) 4.775 2.259 30.735 91.273 198.675 39.431 41.681 300
C.V.(%) 2.399 1.236 15.382 47.823 99.344 20.248 21.132 173.205
NDlevel 14.4 8.32 2.28 0.4 0.3 0.25 0.27
 <5 <5 <5 <5 <5 <5
Ti-Ka Cr-Ka Mn-Ka Fe-Ka Ni-Ka Cu-Ka Zn-Ka
E10 E10 E10 E10 E10 E10 E10
0.96 6.58 8.79 1.16 6.38
0.49 4.46 5.81 ND 1.64
ND 5.09 6.86 ND 2.24

Zn *W-Lb
E10A/cm2 cps
6.38 192.64
1.64 167.64
2.24 1259.03
3.418 539.773
2.585 623.02
138.9 202.193
75.636 115.423
0.34