Accurate estimation of geometry

factor in the four point probe method

using COMSOL.
Aditya Kalavagunta , Vanderbilt University,
Nashville, TN
Robert.A.Weller, Vanderbilt University, Nashville,TN
 Introduction

• Motivation.
• Basics of four point probe method.
• Analytical results(from literature)
• Modeling
• Results
• Analysis
 Motivation

• Everyday problems in a laboratory can be modeled.

• Need for simulations to verify experimental results.
• Very popular technique for resistivity measurement.
• Literature exists for only a few select cases.
• No studies on unconventional shapes.
• How does substrate impact the results?
• Possible use for multilayer structures??
• Need to decouple measurement error to estimate
displacement damage in dies.
• COMSOL is an invaluable clean room tool.
 Basics:Four point probe method

• Method to measure resistivity of film.

• Inject current through probe 1, collect through probe 4.
• Measure voltage across probes 2 and 3(high impedance circuit).
• Usual assumptions:
– Infinite extent, homogenous material.
– Substrate is insulating.
– Film is not very thin.
 Basics:Four point probe method

#V
• Resistivity is given as: " = G(s,t)
I
• G(s,t) depends on thickness of sample, probe spacing.
• G(s,t) is also dependent on geometry of the sample.
• !
To estimate resistivity well, G(s,t) needs to be known well.
• Typically known from analytical expressions.
• New paradigm: could use (FEM methods).
 Tabulated examples

• Cylindrical, cuboidal, regular shapes

• The geometry factor will vary according to:
– Substrate conductivity.
– Thickness of substrate.
– Extent of geometry(a,b).
 Finite cylinder

" # l& # t l&

G= • t • D3 % ( • F2% , (
ln(2) $ s' $ s s'

!
 Thin rectangular block
" #b a&
G= • t • R1% , (
ln(2) $ s b'

!
 FEM simulation

• Cuboidal Silicon film : 2mm×2mm×2×10-4 m.

• Cuboidal Silica substrate: 2mm×2mm×2×10-4 m.
• Finite cuboidal geometry.
" #b a&
• Theory predicts: G(s,t ) = R1% , (
ln(2) $ s b '

!
 Modeling details

• Used Conductive media DC application mode.

• Solve for potential and current density.
• Integrate current density over hemisphere to get current.
• Validate with theory.
 FEM simulation

• σfilm= 1×10-12, σsub= 1×10-14

• ρest = 1.02×1012, error is 2%.
• Substrate is insulating, most current passes through film.
• Plot shows streamlines through film(only).
 Impact of substrate
conductivity

•Factor increases with conductivity.

•More current through substrate.
• Beyond σsubs =10-12, is correction factor meaningless?
 Impact of film thickness

•Factor increases almost linearly with thickness.

•Agrees with literature.
•Reducing thickness of substrate affects measurement.
 Arbitrary 3D geometry

•Resistivity predicted using thin slice expression: 1.2 × 1012.

•Error is 20%.
•Use COMSOL to get geometry factors.
 Comparisons

• Plot compares results with different conductivities.

• Error is significant and COMSOL can correct that.
 Conclusions

• COMSOL: easy and accurate modeling of four point probe method.

• Can be an invaluable tool for cheap and accurate resistivity
measurement.
• Arbitrary films with different substrate layers can be calibrated.
• Could create tables for various configurations on the fly.
• Displacement damage effects can be decoupled from error in
measurement.