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JOURNAL OF APPLIED PHYSICS VOLUME 88, NUMBER 11 1 DECEMBER 2000

Modeling of organic thin film transistors of different designs


P. V. Necliudova) and M. S. Shur
Rensselaer Polytechnic Institute, Department of Electrical, Computer and System Engineering,
Troy, New York
D. J. Gundlach and T. N. Jackson
Department of Electrical Engineering, Pennsylvania State University, University Park, Pennsylvania
共Received 14 July 2000; accepted for publication 15 September 2000兲
We report on modeling of direct current 共DC兲 characteristics of organic pentacene thin film
transistors of different designs. Our model incorporates a gate-voltage dependent mobility and
highly nonlinear drain and source contact series resistances. The contact nonlinearities are especially
pronounced in bottom source and drain contact thin film transistors. The model successfully
reproduced both below- and above-threshold characteristics of top source and drain contact and
bottom source and drain contact organic pentacene thin film transistors. © 2000 American Institute
of Physics. 关S0021-8979共00兲03524-6兴

I. INTRODUCTION II. DETAILS OF EXPERIMENT

Recently, Gundlach et al. reported a mobility of 2.1 The layouts of the BC and TC TFTs are presented in
cm /V-s for organic pentacene thin film transistors 共TFTs兲
2 Figs. 1共a兲 and 1共b兲, respectively. The TFT fabrication started
from thermal growth of SiO2 gate dielectric of thickness t ox
with the on/off ratio as high as 108 . 1 These numbers compare
⫽290 nm and t ox⫽250 nm for BC for TC TFTs, respec-
very favorably with mainstream ␣-Si:H TFT technology.
tively, on a highly doped Si substrate, which served as a
Simple pentacene-based circuits such as five-stage ring os-
common gate electrode. The gate dielectric surface was
cillators with propagation delay of 73 ␮sec have been
ozone cleaned and treated by a self-assembled octadecyltri-
demonstrated.2 A relatively simple technology with low gate
chlorosilane 共OTS兲 agent prior to the pentacene active region
dielectric and active layers deposition temperatures3 allows deposition. Such a treatment considerably improves penta-
fabricating organic TFTs on virtually any substrate including cene TFT performance.7 For the BC TFTs, gold was depos-
flexible ones, and therefore makes organic TFTs attractive ited on the gate dielectric and source and drain contact pads
for low-end circuits and large-area applications. Moreover, were patterned prior to the pentacene active layer deposition
organic TFTs are natural candidates to the drivers of organic from a commercially available pre-purified powder. In case
light emitting diodes 共OLEDs兲, which have already been of the TC TFTs, the source and drain contact pads were
used in high-resolution active matrix displays.4 formed by gold deposition on top of the pentacene active
Contemporary pentacene organic TFTs have different layer through a shadow mask. More details on the TFT fab-
designs. One of them is the so-called top source and drain rication process can be found elsewhere.8 The gate length L,
contact 共TC兲 TFT design, where both source and drain con- defined by the source-drain pads spacing, was 30 ␮m for the
tact pads are deposited on top of an active layer through a TC TFTs and 20 ␮m for the BC TFTs. The gate width W
shadow mask. The TC TFTs are the easiest to fabricate and 共contact pads width兲 was 220 ␮m and the pentacene active
they showed superior characteristics over TFTs of other layer thickness was 50 nm for both types of TFTs.
designs.1 However, there is no suitable procedure to pattern We used an HP 4156B Precision Semiconductor Param-
the TC TFT active layer to isolate the devices from each eter Analyzer to measure the DC electrical characteristics of
other. TFTs of another design, where drain and source con- the TFTs. In order to minimize effects of environment on the
tact metal is deposited on the gate dielectric and patterned TFT characteristics,9 we placed our probe-station in a light
prior to the active layer deposition, are referred to as bottom isolated dry-nitrogen ambient. The pentacene active layer
source and drain contact 共BC兲 TFTs. A special procedure has was mechanically removed around the measured TFTs in
been developed to pattern nonchemically the TFT active order to minimize the drain current leakage.
layer between individual TFTs on a substrate.5
In this article we present a model simulating DC charac-
teristics of both TC and BC TFTs. We also present an III. MEASURED DC CHARACTERISTICS
equivalent circuit allowing us to simulate a highly nonlinear Figures 2共a兲 and 2共b兲 show the measured TC TFT output
source and drain series resistance for the BC TFTs. Prelimi- and transfer characteristics, respectively. The BC TFT
nary results for the TC TFT modeling were reported at current-voltage characteristics resemble those for the TC
ISDRS-99.6 TFTs. However, the BC TFTs have a highly nonlinear region
in the output drain current I D –drain-source voltage V DS
a兲
Electronic mail: neclip@rpi.edu characteristic at low V DS , as shown in Fig. 3. The TC TFT

0021-8979/2000/88(11)/6594/4/$17.00 6594 © 2000 American Institute of Physics

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J. Appl. Phys., Vol. 88, No. 11, 1 December 2000 Necliudov et al. 6595

FIG. 1. 共a兲 Bottom source and drain and 共b兲 top source and drain pentacene
TFT layouts. FIG. 3. Measured output TC 共circles兲 and BC 共squares兲 TFTs characteris-
tics. The drain current is normalized to allow comparison of both TFT
characteristics. Drain-gate voltage V GS ⫽⫺60 V for both TFTs.

output characteristic is free from this feature, see Fig. 3. A


similar nonlinear I D ⫺V DS behavior was also observed for process, and therefore was attributed to the presence of para-
␣-hexathienylene TFTs10 and in SiC MOSFETs.11 In the sitic Schottky diodes in series with the source and drain con-
case of SiC MOSFETs, this nonlinearity was observed only tacts. The results of our 1/f noise studies for the BC penta-
for the p-channel samples with a nonideal contact fabrication cene TFTs suggested that drain and source series resistances
were, in fact, nonlinear12 and depended on the drain current
value. Below, we present an equivalent circuit simulating the
nonlinear BC TFT series resistance.

IV. DC MODEL AND SIMULATION RESULTS


According to the conventional crystalline semiconductor
MOSFET theory, the MOSFET drain current in saturation is
proportional to the square of the effective gate-source volt-
age swing V GT ⫽V GS ⫺V T , 13
W␮ci 2
I d ⫽I sat⫽ V GT , 共1兲
2L
where c i is the gate dielectric capacitance per unit area, ␮ is
the mobility 共hole or electron兲, W and L are the gate width
and length, respectively.
Our previous studies showed that a model based on the
Si MOSFET Unified Charge Control Model13 adequately de-
scribed saturation current in the above-threshold region of
the TC TFT operation, while it considerably deviated in both
linear and below-threshold regions.6 In order to obtain a bet-
ter fit of the measured data, we developed a model incorpo-
rating a gate voltage dependent mobility.6 According to the
model, in pentacene organic TFTs operating above threshold,
most of the charge induced by the gate-source voltage is
trapped in the numerous traps and only a fraction of the
carriers participates in the current conduction. The effect of
the charge trapping is accounted for by the empirical gate-
voltage dependent field-effect mobility,

␮ FET⫽ ␮ 0 冉 V GS ⫺V T
V AA 冊 ␥
, 共2兲

where ␥ and V AA are empirical parameters that can be ex-


FIG. 2. Measured TC pentacene TFT 共a兲 output and 共b兲 transfer character- tracted from the I DS (V GS ) characteristics and ␮ 0 is a con-
istics. Gate length L⫽30 ␮ m, gate width W⫽220 ␮ m. stant. This approach is similar to that used for amorphous Si

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6596 J. Appl. Phys., Vol. 88, No. 11, 1 December 2000 Necliudov et al.

FIG. 5. Proposed equivalent circuit of the BC TFT including nonlinear


source and drain contact resistances. V DD is the extrinsic drain voltage, R S
and R D are the source and drain constant parasitic resistances, respectively.
The diode ideality factors ␩ are fitting parameters.

⫽0.65 eV in our simulations. Comparisons of the circuit


simulation results with the experiment showed that the pair
of diodes connected to the drain terminal was enough to
simulate the measured nonlinearity. Figure 6 shows the
simulation results of the BC TFT output characteristics.
Please note that we were able to obtain a good fit of both
nonlinear region ( 兩 V DS 兩 ⬍5V) and linear as well as satura-
tion region (5V⬍ 兩 V DS 兩 ⬍60V). The model parameters are
presented in Table I. As in the TC TFT case, the extracted

FIG. 4. Modeling of TC pentacene TFT 共a兲 output and 共b兲 transfer charac-
teristics. Modeling parameters are listed in Table I.

TFTs modeling.14 The model includes the parasitic series


drain and source resistances. The full set of equations de-
scribing the above- and below-threshold regimes of the TFTs
operation can be found elsewhere.15 Figure 4 presents the
results of the TC TFTs simulations. We were able to obtain a
satisfactory fit of both the above- and below-threshold re-
gions of the TC TFT operation by the developed model. The
extracted gate-voltage dependent mobility tends to reach the
mobility value ␮ ⫽0.17 cm2 /V-s extracted from the 冑 I D,sat
⫺V GS characteristic. Therefore, the model resembles the
MOSFET Unified Charge Control Model at high gate-source
voltages, at which most of the traps are filled and a larger
fraction of the gate-voltage induced carriers participate in the
drain current conduction.
In order to simulate the nonlinear I D ⫺V DS output char-
acteristics for BC TFTs, we proposed an equivalent BC TFT
circuit that consists of the TFT with linear source and drain
access resistances R D and R S , respectively, and a pair of
antiparallel leaky Schottky diodes connected to each access
resistor in series, see Fig. 5. Two diodes in parallel are
needed to obtain a symmetric current-voltage characteristic.
FIG. 6. Modeling of the BC TFT 共a兲 output and 共b兲 transfer characteristics.
The diode ideality factors ␩, which are responsible for the
The BC TFT equivalent circuit includes diodes in series with the drain and
steepness of the current-voltage characteristic, are the fitting source terminals to simulate the nonlinear source and drain contact
parameters. We used the Schottky barrier height E B resistances.

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J. Appl. Phys., Vol. 88, No. 11, 1 December 2000 Necliudov et al. 6597

TABLE I. TC and BC TFT parameters used in the DC characteristics modeling.

Mobility,
Gate length L, R S ,R D , cm2/V-s at ␮0 , Diode
TFT width W, ␮m Ohm V T ,V V GS ⫽⫺60 V cm2/V-s ␥ V AA ,V ␩
TC L⫽30 1⫻10 5
⫹5 ␮ ⫽0.22 10 0.45 3⫻10 5
¯
W⫽220
BC L⫽20 5⫻104 ⫹13 ␮ ⫽1.2 10 0.38 1.9⫻104 10
W⫽220

1
gate-voltage dependent mobility at high V GS reaches the mo- D. J. Gundlach, C. C. Kuo, S. F. Nelson, and T. N. Jackson, 57th Device
bility value ␮ ⫽1.1 cm2 /V-s extracted from the 冑 I d,sat⫺V GS 2
Research Conference Digest, June 1999, pp. 164–165.
H. Klauk, D. J. Gundlach, and T. N. Jackson, IEEE Trans. Electron De-
characteristic at high V GS . vices 20, No. 6, 289 共1999兲.
3
Y. Y. Lin, D. J. Gundlach, S. F. Nelson, and T. N. Jackson, IEEE Trans.
Electron Devices 44, No. 8, 320 共1997兲.
V. CONCLUSION 4
P. E. Burrows, G. Gu, and S. R. Forrest, Proc. SPIE 3363, 269 共1997兲.
5
H. Klauk, D. J. Gundlach, M. Bonse, and T. N. Jackson, 46th International
We presented the results of the TC and BC TFT DC Symposium of the American Vacuum Society Technical Program, 1999,
characteristic simulations by a gate-voltage dependent mo- p. 85.
6
P. V. Necliudov, M. S. Shur, D. J. Gundlach, and T. N. Jackson,
bility model. The model simulates both above- and below-
ISDRS—99 Proceedings, 1999, pp. 373–376.
threshold regimes of the TC and BC TFTs operation. Unlike 7
T. N. Jackson, Y. Y. Lin, D. J. Gundlach, and H. Klauk, IEEE J. Sel. Top.
TC TFTs, the BC TFTs exhibit nonlinearities in the output Quantum Electron. 4, No. 1, 100 共1998兲.
8
characteristics at low V DS . We attributed those features to Y. Y. Lin, D. J. Gundlach, S. F. Nelson, and T. N. Jackson, IEEE Trans.
Electron Devices 44, No. 8, 320 共1997兲.
the effect of nonlinear series resistances. We proposed an 9
P. V. Necliudov, M. S. Shur, S. L. Rumyantsev, D. J. Gundlach, and T. N.
equivalent circuit incorporating a pair of diodes in series Jackson, Symposium JJ, MRS Fall Meeting, 2000.
10
with the source and drain parasitic resistances to model the L. Torsi, A. Dodbalapur, and H. E. Katz, J. Appl. Phys. 78共2兲, 1088
measured BC TFT output characteristics. The diode ideality 共1995兲.
11
D. B. Slater, Jr., L. A. Larkin, G. M. Johson, A. V. Suvorov, and J. W.
factors were the fitting parameters. The proposed model al- Palmour, 53rd Annual Device Research Conf. Digest, University of Vir-
lowed us to obtain a good fit of the BC TFT output charac- ginia, 1995, p. 100.
teristic in the 0⬍ 兩 V DS 兩 ⬍60 V range. 12
P. V. Necliudov, S. L. Rumyantsev, M. Shur, D. J. Gundlach, and T. N.
Jackson, J. Appl. Phys. 共in press兲.
13
K. Lee, M. S. Shur, T. A. Fjeldly, and T. Ytterdal, Semiconductor Device
Modeling for VLSI 共Prentice-Hall, Englewood Cliffs, NJ, 1993兲, pp. 301–
ACKNOWLEDGMENTS
316.
14
M. Shur and M. Hack, J. Appl. Phys. 55共10兲, 3831 共1984兲.
DARPA 共Program Monitor Dr. G. Henderson兲 has sup- 15
K. Lee, M. S. Shur, T. A. Fjeldly, and T. Ytterdal, Semiconductor Device
ported this research under Contract No. N61331-98-C-0021 Modeling for VLSI 共Prentice-Hall, Englewood Cliffs, NJ, 1993兲, pp. 494–
via subcontract from Sarnoff Corporation. 512.

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