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S. Choomchuay, Ph.D. y,
Intro. to VLSI Design
S. Choomchuay //KMITL
Fabrication
Intro. to VLSI Design
S. Choomchuay //KMITL
S. Choomchuay //KMITL
Development History
Vacuum tube Semiconductor
Germanium Discrete Small IC Metal Base PCB
10-50 / 6"x9"
Chip
10-50 /2x2 mm 10000-100000/1x1 cm
1906
1930
1951
1961
1969
1975
Year Y
4
S. Choomchuay //KMITL
Mask Set
Fabrication Process
Material & Equipments Assembly & Packaging
IC Chips p
S. Choomchuay //KMITL
Result
Switch 3 Switch 4
Switch
S. Choomchuay //KMITL
Bipolar
Speed = ? Dissipation = ?
MOS
Intro. to VLSI Design
S. Choomchuay //KMITL
Mixed Mi d (BiCMOS)
7
IC Process
Wafers
Mask Set
Protective cover
Implant Dope
Front End
Dicing Di i
Bonding B di
Molding M ldi
Back End B kE d
S. Choomchuay //KMITL
IC Fabrication
3"- 8" Silicon
Wafer
Clean Room IC PROCESS
Implantation
Annealing A li
Intro. to VLSI Design
S. Choomchuay //KMITL
10
11
12
Structural Architecture Synthesis Design RTL Level Algorithm g Synthesis Structural Logic Level RTL Design Synthesis Verification Logic g Logic Design Verification Layout Design (Syn) g Gate Verification V ifi ti
S. Choomchuay //KMITL
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Simulation
Logic Level i l Model
Mask Sets
Simulation
Cell Library
14
Simulation
Logic Level Model
Layout Design
Extraction
Masks
15
S. Choomchuay //KMITL
Board Level
S. Choomchuay //KMITL
16
Verilog
1981 CAE software launched by Dateway Design Auto. (founded by Phil Mooreby) 1983 Release of Verilog HDL 1987 Extended to Verilog XL g 1989 Verylog XL is widely used 1990 Cadence bought Gateway 1995 Verilog --> IEEE1364
Intro. to VLSI Design
S. Choomchuay //KMITL
17
Synthesis Optimisation
VHDL/Verilog
Criteria
Synthesis (Translation)
Optimisation module
Constraints
Netlist
Intro. to VLSI Design
S. Choomchuay //KMITL
18
Synthesis Constrains
Global
Library process factor Operating voltage Operating temperature
Circuit Specification
Area - max area Timing - fan-in, fan-out - I/p & o/p loading cap. p p g p - Max.clock frequency Power - max power max. Testability - Full or partial scan - Boundary scan
S. Choomchuay //KMITL
19
Layout Design
Static Complement MOS - Conventional Circuit Dynamic Logic - Clock CMOS - Domino Logic
S. Choomchuay //KMITL
20
Layout Design
Conventional static gate (Complementary)
C A Y A C B B
NMOS chain implements the function PMOS chain is a complementary arrangement of N-Chain g Output is taken at the center
Y = ( A B) + C
S. Choomchuay //KMITL
21
Layout Design
(N)
(N) Silicon(P)
Gate
= ? micron
S. Choomchuay //KMITL
22
Layout Design
MOS Parameters
W
Tox
(N) Silicon(P) L (N)
I D = K (VGS VT ) 2
1 K = 2 [C OX ( W )] L
S. Choomchuay //KMITL
23
Layout Design
S
W Channel Width L Channel Length AD, AS Drain,Source Area PD,PS Drain,Source Periphery
W
( ) (N) ( ) (N)
Substrate (P)
vG Cgs Cgsub iD
AS
AD
L
Cgd g vD
SubvS
Intro. to VLSI Design
S. Choomchuay //KMITL
24
vSub
n P Well
N-Type Substrate
Intro. to VLSI Design
S. Choomchuay //KMITL
25
Vdd
I/P
O/P
GND
Inverter Circuit
Intro. to VLSI Design
Actual X-Section
S. Choomchuay //KMITL
P Well
N-Type Substrate S
Layout Design
26
Only one active, We have to say N-active or P-active Poly Contact or Active Contact (both to metal) Substrate ties Port names need for extraction (simulation) ( ) DRC needs
Intro. to VLSI Design
S. Choomchuay //KMITL
27
2x2
Minimum features size (Layers & wire) Minimum spacing between 2 objects Define in base & micron base
S. Choomchuay //KMITL
28
Stick Diagram
29
R
Low
Comments
Power distribution Global Signal Long wiring g g High IR drop Moderate RC product High Capacitance Moderate IR drop
Polysilicon Diffusion
Low Moderate
Moderate High
S. Choomchuay //KMITL
30
MOS as RC
W B L
0 r ( WL ) t ( WL ) Cg = TOX C G Sub =
L L L = = s ( ) A Wt W 1 1 n = ; p = q n n q p p R AB = 1 R AB = q n n( W ) NMOS L
31
S. Choomchuay //KMITL
RP
Rn
nCg
S. Choomchuay //KMITL
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S. Choomchuay //KMITL
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