Académique Documents
Professionnel Documents
Culture Documents
Scanning
Scanning Acoustic
Acoustic Microscope(SAM)
Microscope(SAM)
H.S. Jang
1
HS Jang
What
What is
is Ultrasonics
Ultrasonics ??
• The sound waves which can not be heard by the human ear.
2
HS Jang
Types
Types of
of Ultrasonic
Ultrasonic Waves
Waves
1. Shear Wave
1) The vibration direction and propagation direction are
perpendicular.
2) Transmission in liquid or air is impossible.
Vibration
Propagation
3
HS Jang
Types
Types of
of Ultrasonic
Ultrasonic Waves
Waves
2. Longitude Wave
1) The vibration direction and propagation direction are same.
2) Transmission in liquid is possible.
Vibration
Propagation
4
HS Jang
Characteristics
Characteristics of
of Ultrasonics
Ultrasonics
EMC
Air
Die
5
HS Jang
Advantages
Advantages of
of Ultrasonics
Ultrasonics
1. High resolution :
Detectable minimum gap thickness of Sonix : 0.13 micro meter
2. High sensitivity :
The measuring of size, location, shape of fine defects is possible.
6
HS Jang
Weak
Weak Points
Points of
of Ultrasonics
Ultrasonics
7
HS Jang
Uses
Uses for
for Ultrasonics
Ultrasonics
8
HS Jang
SONAR(Sound
SONAR(Sound Navigation
Navigation Ranging)
Ranging)
9
HS Jang
SONAR(Sound
SONAR(Sound Navigation
Navigation Ranging)
Ranging)
1000m
4 deg.C
10
HS Jang
Examination
Examination of
of Human
Human Body
Body
11
HS Jang
Reasons
Reasons for
for Use
Use of
of Ultrasonics
Ultrasonics
12
HS Jang
Structure
Structure of
of QFP
QFP
Silicon Chip
Cu L/F Cu L/F
Epoxy
Cu Lead Frame
13
HS Jang
Detectable
Detectable Defects
Defects
1. Delamination
2. Package Crack
Void PKG Crack
Delamination
3. Die Crack
Chip Crack
4. Void
5. Tilt PKG Crack
6. Foreign Materials
14
HS Jang
Structure
Structure of
of Flip
Flip Chip
Chip
Die
Bump
Underfill
Substrate
15
HS Jang
Inspection
Inspection using
using Ultrasonic
Ultrasonic
Transducer
Die
Bottom
Die
Ultrasonic
Package Surface
Surface
Package Surface
16
HS Jang
Inspection
Inspection Methods
Methods
2. Thru-Transmission Method
17
HS Jang
Pulse
Pulse Echo
Echo &
& Thru-Transmission
Thru-Transmission
18
HS Jang
Structure
Structure of
ofaaScanner
ScannerWhich
Whichuses
usesboth
bothPulse
Pulse
Echo
Echoand
andThru-Transmission
Thru-Transmission
Water
Transducer for
Thru-Transmission
19
HS Jang
A-Scan
A-Scan
Ultrasonic
PKG Surface
PKG Surface Die Surface Die Bottom
Die Surface
Die Bottom
20
HS Jang
A-Scan
A-Scan
Stethoscope
21
HS Jang
A-Scan
A-Scan
A-Scan
A-Scan
23
HS Jang
B-Scan
B-Scan
24
HS Jang
B-Scan
B-Scan
25
HS Jang
B-Scan
B-Scan
26
HS Jang
B-Scan
B-Scan
PKG Surface
PKG Crack
Die Surface
27
HS Jang
B-Scan
B-Scan
28
HS Jang
EMC
EMC Void
Void Insp.
Insp.
Void
Void
No Void
PKG Surface
Void Void
Die Surface
29
HS Jang
Void
Void Size
Size Measuring
Measuring
Void
Void
No Void
Void
Size
PKG Surface
Die Surface
Void
Void
30
HS Jang
Die
Die Crack
Crack Direction
Direction Insp
Insp
B-Scan Image
Die Crack
PKG Surface
Die Surface
Die Bottom
B-Scan
Die Surface
Die Bottom
31
HS Jang
C-Scan
C-Scan
32
HS Jang
C-Scan
C-Scan
EM
C
EMC
33
HS Jang
C-Scan
C-Scan
34