Académique Documents
Professionnel Documents
Culture Documents
1960
Microtome knives Microtome knives
1970
Radius tools Radius tools Waviness < 1 m Waviness < 1 m
1980
Waviness < 0.1 m Waviness < 0.1 m Non-circular cutting edges Non-circular cutting edges
1990
2000
2010
Glass scale feedback Glass scale feedback Multi-axis machines and FTS turning Multi-axis machines and FTS turning
From Brinksmeier & Courtesy: Moore Nanotechnology Systems , ALMT
1960
1970 1980
1990
Triangular microprisms Triangular microprisms
2000 2010
Freeform surfaces Freeform surfaces
From Brinksmeier & Courtesy: Moore Nanotechnology Systems , ALMT
Ref, Technodiamant
Thermal stability of the NION machine provided by 5 advanced temperature control systems (+/- 0.001 deg C)
29 mm
Individual mirrors: 12 x 1mm Form error: < 10nm RMS Curvature radius: 162.5mm
12
Infrared optimised space telescope searching for first galaxies formed in the Universe 13
Workpiece Accuracy < 1 micron per metre Workpiece weight up to 2000 Kg Oil shower temp control
14
15
Lab temperature control +/- 1C Enclosure temperature control +/- 0.1C Active vibration isolation
Displays
Flat panel 120 100 80 60 40 20 0 CRT
100000
2003
2005
2007
2009
Optical films: solar concentrators and antireflection film, increasing efficiency, reducing silicon costs
Optical films are utilised in all flat panel displays for backlighting, depixelation, 3D displays etc.
18
Identity fraud:~ 25 billion US$ p.a. Optical security devices business ~ 1.25 billion US$ growing 12% p.a. Applications - fraud prevention: note printing, securency, ID, etc.
Film-based lighting market expected to total US$10 billion by 2010 including domestic and industrial applications using LED and OLED technologies
19
Telescopes E-ELT
E-ELT
42 metre diameter primary mirror Aspheric primary mirror design based on 984 x 1.46 metre hexagonal segments 6 metre diameter secondary monolithic deformable mirror adaptive optics
Ref: www.eso.org operational by 2020 estimated cost 950m
E-ELT primary mirror design having ~ 984 1.46 metre hexagonal segments
Form accuracy : 20 nm RMS, roughness 1 nm RMS
size to
part 1
8 10 in
e lativ re
f on o si reci p
Ref, www.eso.org
Primary mirror
42m diameter Far off-axis ellipsoidal form 984 segments @1.46m
Process Chain
Major new UK-based research initiative - processing time for large (1+ metre scale) freeform optical surfaces reduced from 100 hours to 10 hours
Aspherisation
Develop grinding and support technology for the aspherisation of large metre scale optics Machine; Grinding Process; Metrology; Handling
Grinding Requirement:
1 Segment per day 1mm material removed 1m form accuracy No edge chipping or roll-off
1000
1 2
100
10
IBF
0.1
diamond turning
MRF
0.01 0.1 1 10 100 1000
Grinding machine
Free-form grinding capability Hydrostatic bearings 10 KW grinding power High performance thermal control (0.1c) Integrated metrology capability
Rapid material removal rate, (200 mm3/sec) Form accuracy < 1 m/m RMS Low sub-surface damage < 10 m Compact machine size
http://www.hembrug.com
Ultra-precision, ultra stiff 3 axis freeform grinding machine for large optics up to 2 metres diameter
Workpiece Metrology
Workpiece metrology has full system accuracy ~ 0.25 m
Optical Straightedge Mini-laser interferometer X axis Z axis
Workpiece
LVDT probes
www.cranfield.ac.uk
Grinding motion
Z X C
20 Free-form grinding capability Novel 3 axes configuration R-theta grinding mode Toroidal shape grinding wheel Sophisticated toolpath software C X Z
Grinding technology
Grinding Wheels 325mm DIA Resin bond D25, D46, D76 50 concentration Multi-stage grinding process
GrindingConditions Gritsize (m) Depthof cut(m) Feedrate (mm/rev) Workspeed (mm/s) Cuttingspeed (m/s) MMR (mm3/s)
76 46 25
500 200 50
15 10 1.5
25 20 25
30 30 30
187.5 40 1.87
32
ELT segment SPN01 (15:15) Material Zerodur 580,000 measurement points Data to within 0.5mm of the edge.
Final figure correction Developing RAP technology for the final figuring of large metre scale optics
Figuring requirement:
1 Segment per day Form accuracy < 20 nm RMS Surface roughness < 1 nm RMS Removal of process signatures
RAP technology
Rapid nanometer dexterity surface process for figure correction of ultra precision metre-scale optics. Technology employs inductively Coupled Plasma Torch.
Gaussian beam distribution Dwell time based raster figuring algorithm No induced SSD
Dimension (mm)
RAP facility
Processed materials:
Fused silica ULE SiC Silicon Borosilicate
Refs
3 axes CNC Fanuc motion control Low cost operation 1.2 m capacity Compact machine size
1: Jourdain et al., (2011). Fast 3D Figuring of Large Optical Surfaces Using Reactive Atom Plasma (RAP) Processing, 2nd EOS Conference on Manufacturing of Optical Components, Munich (D), May 2011. 2: Castelli et al., (2010). Initial Strategies for 3D RAP Processing of Optical Surfaces Based on a Temperature Adaptation Approach 36th Matador Conference, Manchester, section:18, pp 569-572 , July 2010
rms:80nm
18 nm RMS 146 nm PV
Grinding
Removal rates up to 187.5 mm3/s Grinding time 20 hours - 1.45 m ELT segment Form accuracy < 1 m RMS, SSD < 10 m Form accuracy < 16 nm RMS No induced SSD
Acknowledgements: The authors acknowledge funding support from the UK research councils Basic Technologies Programme, the EPSRC Integrated Knowledge Centre in Ultra Precision and Structured Surfaces (UPS2) and the McKeown Foundation.
Wheel form
Grinding
Advanced DUV Lithography Systems employ fused silica optics of up to 250 mm diameter having form accuracy of 2.5nm RMS and roughness < 0.5nm RMS ; 38nm linewidths
1nm
wavelength
pump
lens
laser illuminator
wafer stage
48
49
Process Chain
Major new UK-based research initiative processing metre scale freeform optical surfaces
Polishing
Computer control polishing Machine; Polishing Process; Metrology; Fixturing
Requirement:
Hale (1948)
Keck (1993)
GMT (2018)
TMT (2018)
E-ELT (2018)
Mirror technology
Active segmented mirror technology pioneered through the Keck telescope
Acknowledgement: Dr John Mitchell, Cranfield Ultra Precision and Structured Surfaces (UPS2)
Composite measurements constructed from lateral and rotational shears Form 16.8 nm 2nm RMS Mid spatial frequencies < 5nm RMS
Source: David Walker, University of Wales Professor of Optics at Glyndwr University , Professorial Research Associate, University College London, Research Director, Zeeko Ltd
Sub-surface Damage
Evaluation technique:
Polished tapered grooves Etched HF, target removal 1m Groove depth - contact profilometery Crack observation using optical microscope
Ref: Tonnellier, T. et al. 2008, Sub-surface damage issues for effective fabrication of large optics, Proc of SPIE Vol. 7018, pg 701836-1 to 701836-10
Arrayed flat fresnel lenses on optical film Laminate in one shot to support frame
BoX Ultra Precision fixed abrasive Grinding & Measuring System, Cranfield
IRP1200 Ultra Precision 7 axes free abrasive polishing system, UCL & Zeeko Ltd
RAP Re-active atom plasma surface figuring system, Cranfield and RAPT Industries
66
High Precision Diamond Turning of Structured / Textured Surfaces on rolls for large scale replication of plastic films
67
Textured roll
CPV installations growth 1.5GW capacity will be installed in 2014 forecast Equates to 7 million m2 of solar units
70
71
Segmented mirrors
Pioneered by Keck
Major new UK-based research initiative* processing time for large (1+ metre scale) freeform optical surfaces reduced from 100 hours to 10 hours 3 step process chain