Application Spotlight

Chemical Monitoring in Photovoltaic Manufacturing

During the manufacturing of photovoltaic cells, different wet chemistries are used to clean and texture the wafers to create a special surface. Wet processing tools are used which need specialized sensors to monitor wet chemistry levels, measure the amount applied, and verify the object that needs to be processed is in position. It is important that the sensors used can accurately detect wafers, solar cells, and different substrate materials. At the same time, it is important that they have a space-saving design that can be put in compact locations, or are non-invasive and do not require holes to be drilled that could create a potential leak point of harmful acids and other liquids. Balluff offers a unique solution with the SmartLevel line of capacitive sensors, ideal for such a demanding environment. The SmartLevel patented technology means no false detection due to foaming, films/layers, or splashing of liquids onto the sensor. And with one of the industrys broadest ranges of PTFE housed sensors and cap accessories, Balluff SmartLevel capacitive sensors are versatile enough to fit all the various applications in PV manufacturing.
Benefits of Balluff Capacitive Sensors

n No holes required - designed to sense material through tank wall n Eliminates false detection from foaming, frothing, film and splashing in liquid level detection n PTFE housing withstands most wet chemistries used in the manufacturing process (Note: De-ionized water can only be detected by Balluffs standard level detection capacitive sensors) n Accurately detects wafers, PV cells and different substrates independent of surface finish or color (Note: SmartLevel only detects aqueous liquids standard Balluff capacitive sensors detect objects like cells and glass) n Space-saving designs can be put in compact locations
Wet chemistry processes for wafer-based photovoltaics Glass cleaning/drying for thin film-based photovoltaics

Balluffs extensive line of capacitive sensors includes such a broad offering that they fit the various needs of the PV manufacturing process. Wet chemistries are stored and transferred to cleaning, etching, and texturing PV wet benches. Ensuring the right amount of liquid is in the system increases overall quality, so finding a sensor to accurately monitor level is crucial. Balluffs SmartLevel series of PTFE level detection sensors can detect wet chemistries through the wall of non metallic tanks, without the need for a bypass. The SmartLevel series additionally compensates for adherence, which means less material needed and lower mounting costs. Removal of surface contamination on wafers must be done before chemical processes can be started. Wet cleaning in low concentrated acids are required which makes PTFE housed capacitive sensors ideal for glass detection. Reliably detecting glass and wafers with various surface finishes can be challenging in a wet environment with optical sensors, which makes capacitive sensors a more stable non-contact choice. The transport of wafers should be controlled in a plant for etching wafers. The sensors must be completely mounted in a robot arm because of the missing space between the wafers in the carrier box. This can be solved with Balluffs miniature series of capacitive disk sensors. Special PTFE housing may be required because of close contact to different wet chemistries. See more about Balluffs SmartLevel capacitive sensors at www.balluff.com/SmartLevel See Balluffs full line of capacitive sensors at www.balluff.com/BCS

www.balluff.com/Solar
Balluff, Inc. n 8125 Holton Drive Florence, KY 41042 n 1-800-543-8390 n www.balluff.com

PS_060 Chemical Monitoring in Photovoltaic Manufacturing 2010-11