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Introduction to Electron Microscopy Why Electron Microscopy came in existence? Physical Principle Involved Components of Electron Microscope Comparison of LM, TEM and SEM Scanning Electron Microscope -Overview Transmission Electron Microscope Overview Disadvantages
The electron range increases with beam energy. Fig.e.g.. The internal structure of the Au deposits examined at high electron beam energies in SEM and TEM.
Bremstrahlung
Visible Light
Auger Electrons
Characteristic X-Rays
SEM Electron beam is focused and scanned over the sample surface Secondary electrons or back scattered electrons and characteristic x-rays from each point of interaction is collected by the detector 2-D image of spatial distribution of these signals are mapped. TEM Transmitted electron beam (through sample) forms an enlarged image.
Electron Source
Thermionic gun: triode or self-biasing gun, W, LaB6, CeB6 Field Emission Gun: Single crystal W
Condenser Lens
Collects light to direct it at the small area of the object. It makes the object brighter (better contrast). Enables to control the angle at which the illumination reaches the object. Converge the light beam on object or can illuminate it with parallel rays. Condenser aperture: controls the area of specimen to be illuminated.
Electron beam is scanned back and forth over the specimen, imaging only one point at a time. PE energy is kept relatively low (1-30 keV) to limit the interaction volume in the specimen so high sensitivity to surface composition (cannot penetrate far into the sample). Can be used for thicker specimens
SEM
Applications of SEM
Fig.Fracture section through a pellet of tungsten powder sintered and then sputter coated with an alloy of osmium and ruthenium.
EDAX analysis
Fig.Intermetallic particles from an aluminium alloy and EDAX analysis of an Al-rich intermetallic phase.
TEM
Resultant Image
Resultant Image
Bright-Field Image
Dark-Field Image
TEM Images
Metals
Mechanical Grinding, Polishing,Electrolytic thinning
Organic Materials
Freeze drying, Ultramicrotomy (cryo)
Different types:
1. Kikuchi Patterns 2.Convergent-Beam Electron Diffraction (CBED) 3. Ring Patterns 4.Spot Patterns
Ring Pattern
Kikuchi Pattern
Spot Pattern
CBED Pattern
Imaging in TEM
Disadvantages of EM
Larger ,expensive and destructive technique. Some materials are sensitive to electron beam radiation, resulting in a loss of crystallinity and mass (TEM). Sample may be damaged by the electron beam, particularly in the case of biological materials. Field of view is relatively small- the region analysed may not be characteristic of the whole sample. Sample preparation is very time consuming, sample dimension small .