MEMs Applications Valves and Pumps

ROCHESTER INSTITUTE OF TEHNOLOGY MICROELECTRONIC ENGINEERING

Microelectromechanical Systems (MEMs) Applications Valves and Pumps

Dr. Lynn Fuller
webpage: http://www.people.rit.edu/lffeee Microelectronic Engineering Rochester Institute of Technology 82 Lomb Memorial Drive Rochester, NY 14623-5604 Tel (585) 475-2035 Fax (585) 475-5041 Email: Lynn.Fuller@rit.edu Webpage: http://www.microe.rit.edu
Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

4-21-2008 mem_app_pumps.ppt
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MEMs Applications Valves and Pumps

REVIEW
Valves and Pumps Valves Flap Diaphragm Pumps Rotary Diaphragm Pump Peristaltic Actuation Heat Piezoelectric Electrostatic Magnetic

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

OUTLINE
Introduction Basic Flapper and Diaphragm Valve Micromachined Silicon Microvalve, T. Ohnstein, et.el., Sensor and System Development Center, Honeywell, Inc., Bloomington, Minnesota, Proceedings of the IEEE Micro Electro Mechanical Systems Conference, February 1990. A Pressure-Balanced Electrostatically Actuated Microvalve, M. A. Huff, et.el., MIT, Cambridge, MA, Technical Digest of the IEEE Solid-State Sensor and Actuator Workshop, June 1990.
Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

OUTLINE
Basic Diaphragm and Peristaltic Pumps A Thermopneumatic Micropump Based on Microengineering Techniques, F.C. M. Van De Pol, et. el., University of Twente, Department of Electrical Engineering, Enschede, The Netherlands, Proceedings of 5th International Conference on SolidState Sensors and Actuators, June 1990 Piezoelectrically Actuated Miniature Peristaltic Pump, Y. Bar-Cohen, JPL/Caltech, Pasadena, CA, SPIEs 7th Annual International Symposium on Smart Structures and Materials, March 1-5, 2000, Newport CA. Thermally Actuated Peristaltic Pump Design, Vinay V. Abhyankar, Lynn F. Fuller, RIT, January 22, 2002
Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

INTRODUCTION

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

FLAPPER VALVES

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

DIAPHRAGM VALVE

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

AN ELECTROSTATIC FLAPPER VALAVE

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

AN ELECTROSTATIC FLAPPER VALAVE

Normally-open Valve Closure Plate 350 m x 390 m Inlet Orifice 24 m x 60 m

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

AN ELECTROSTATIC FLAPPER VALAVE

Metal electrodes (did not say, guess W) 4 Nitride Layers Oxide or Aluminum Sacrificial Layer
Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

AN ELECTROSTATIC FLAPPER VALAVE

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

AN ELECTROSTATIC FLAPPER VALAVE

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

AN ELECTROSTATIC DIAPHRAGM VALVE

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

AN ELECTROSTATIC DIAPHRAGM VALVE

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

AN ELECTROSTATIC DIAPHRAGM VALVE

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

AN ELECTROSTATIC DIAPHRAGM VALVE

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

AN ELECTROSTATIC DIAPHRAGM VALVE

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

VALVE DESIGN AND SIMULATION

Greg Schallert 2003 Fluent Simulation

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

JERMAINE WHITE CHECK VALVE

2 2

100

200

200

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

CHECK VALVE THEORY OF OPERATION

When the backside pressure is greater, the flexible flap will bend up and allow airflow. When the front side pressure is greater, the flap bends down and occludes the hole thus preventing airflow.

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

MOVIE OF CHECK VALVE OPERATING

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

MOVIE OF CHECK VALVE OPERATING

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

DIAPHRAGM PUMP

Heater

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

PERISTALTIC PUMP

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

THERMAL ACTIVATED DIAPHRAGM PUMP

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

THERMAL ACTIVATED DIAPHRAGM PUMP

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

THERMAL ACTIVATED DIAPHRAGM PUMP

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

THERMAL ACTIVATED DIAPHRAGM PUMP

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

THERMAL ACTIVATED DIAPHRAGM PUMP

Conclusion:

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP

Flow = 3 cc/min Pressure = 1100 Pascal = 0.16 psi

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

THERMAL ACTUATED PERISTALTIC PUMP

Silicon

Silicon Substrate Insulating material Thin Film Heater 80 m diaphragm (watch glass)
Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

THERMAL ACTUATED PERISTALTIC PUMP

1 reservoir 1 1 2 2 2 3 3 3 4 4 4 5 5 5 6 6 6 reservoir

Sequentially activating the pumps 1- 6 will advance the fluid Cycling pumping system gives desired flow rate [picoL/sec] Additional channels can be added in increase flow rate further

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

THERMAL ACTUATED PERISTALTIC PUMP

Silicon

Silicon Substrate

The resistive heating element heats the cavity The cavity pressure rises till the watch glass deflects downward since p/T = constant (want 10 psi activation pressure) The deflection results in volume displacement in the etched channel
Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

THERMAL ACTUATED PERISTALTIC PUMP

Length

Deflected diaphragm Width

Reverse Displacement
Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

Forward Displacement
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MEMs Applications Valves and Pumps

THERMAL ACTUATED PERISTALTIC PUMP

(249.979) PR [(1 / v ) 1] y= 2 3 E (1 / v )
4 2

y = deflection [m] P = pressure [mm hg] R = diaphragm radius [m] v = Poissons ratio [-] Y = Youngs Modulus [dyne/cm2] = diaphragm thickness [m]

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

THERMAL ACTUATED PERISTALTIC PUMP

Required Pressure vs Diaphragm Radius for 0.75 m deflection
Required Pressure vs Diaphram Radius for 0.75 m Deflection
30 25 Pressure [psi] 20 15 10 5 0 1000 1200 1400 Radius 1600 1800

v = 0.206 [-] y = 0.75 m Y = 7.30E11 dyne/cm2 = 80 m P = 517.149 mm Hg (10 psi) R = 1226.932983 m

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

THERMAL ACTUATED PERISTALTIC PUMP Thermal Design Calculations

Tambient q1 Power q2 Tsurface Theater (kA/L)glass (kA/L) silicon Tambient
Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

(qin qout) + qgen = qstored 0 0 qgen= q1 + q2

~0

qgen = q2 Theater Tambient (kA/L)glass + (kA/L) silicon = 20 mW

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q2 =

MEMs Applications Valves and Pumps

THERMAL ACTUATED PERISTALTIC PUMP Fabrication Process

Anisotropically etch pump pattern in silicon wafer Glue 80m thick slip glass cover across channel section Place resistance heaters above diaphragm Glue patterned rubber insulator or pattern photoresist over channel section

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

THERMAL ACTUATED PERISTALTIC PUMP Fabrication Process Continued

Heater Diaphragm Insulator Channel

Not to scale
Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

PUMPING FLUIDS WITH VOLTAGE

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

PUMPING FLUIDS WITH VOLTAGE

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

REFERENCES
1. Micromachined Transducers, Gregory T.A. Kovacs, McGrawHill, 1998. 2. Microsystem Design, Stephen D. Senturia, Kluwer Academic Press, 2001. 3. Microfluidic Technology and Applications, Michael Koch, Research Studies Press Ltd., Baldock, Hertfordshire, England, TJ853.K63 2000, ISBN 0 86380 244 3, 2000. 2. IEEE Journal of Microelectromechanical Systems.

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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MEMs Applications Valves and Pumps

HW APPLICATIONS VALVES AND PUMPS

1. Find another publication describing the fabrication of a MEMs valve or pump. Describe the fabrication sequence in your own words. Attach a copy of the paper.

Rochester Institute of Technology Microelectronic Engineering April 21, 2008 Dr. Lynn Fuller

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