ElectronMicroscopy El t Mi

SEMandTEM SEM and TEM

Content
1. Introduction:Motivationforelectronmicroscopy 2. Interactionwithmatter 2 Interaction with matter 3. SEM:ScanningElectronMicroscopy 3.1FunctionalPrinciple 3.2Examples 3.3EDX(EnergyDispersiveXrayspectroscopy) 4. TEM:TransmissionElectronMicroscopy 4 TEM: Transmission Electron Microscopy 4.1FunctionalPrinciple 4.2Examples 4.3ComparingSEMandTEM d 4.4HAADF(HighAngleAnnularDarkFieldImaging)

1.MotivationforEM 1 Motivation for EM

Resolution oflightmicroscopeislimited:
sin = 1.22 D

wavelenght of visible light wavelenghtofvisiblelight lessdiffractionforsmallerwavelenghts

possiblemagnification:~2000
[ ] [1]

1.MotivationforEM 1 Motivation for EM

Differentapproach:useelectronsinsteadoflight Access to much smaller wavelengths Accesstomuchsmallerwavelengths h = (3.7pmfor100keV) p electrostatic/electromagneticlenses l t t ti / l t ti l insteadofglasslenses

possiblemagnification:~2000000

[2]

2.Interactionwithmatter 2 Interaction with matter

Backscatteredelectrons Secondaryelectrons y Augerelectrons Transmittedelectrons Transmitted electrons XRays

specimen

phonons

2.Interactionwithmatter 2 Interaction with matter

Topographyandcomposition Topography p g p y Structureandcomposition Structure and composition Composition Backscatteredelectrons Secondaryelectrons y Transmittedelectrons Transmitted electrons XRays

2.Interactionwithmatter 2 Interaction with matter

2differentapproaches: Backscatteredand B k d d secondaryelectrons Transmittedelectrons T i d l

SEM

TEM

3.SEM 3 SEM

Scanning g Electron Microscopy

3.1FunctionalPrinciple 3 1 Functional Principle

Electronsource Condenserlens Scancoil Objectivelens Specimen +Detectors
225kV

3.1FunctionalPrinciple 3 1 Functional Principle

Electrongun Condenserlens Scancoil Objectivelens Specimen +Detectors coils N
N

coils

3.1FunctionalPrinciple 3 1 Functional Principle

Electrongun Condenserlens Scancoil Objectivelens Specimen +Detectors Waveform generator Detectorsignal e

3.1FunctionalPrinciple 3 1 Functional Principle

Electrongun Condenserlens Scancoil Objectivelens Specimen +Detectors coils coils e

3.1FunctionalPrinciple 3 1 Functional Principle

Electrongun Condenserlens Scancoil Objectivelens Specimen +Detectors e

Electron and El t d Lightdetectors

3.2Examples 3 2 Examples
Photoniccrystalinsiliconsubstrate Nanowires insiliconsubstrate

WSI,D.Dorfner

WSI,D.Pedone

3.3EnergyDispersiveSystems(EDX) 3 3 Energy Dispersive Systems (EDX)

e

e
Bremsstrahlung Electronfillingholes

XrayContinuum

CharacteristicXrays Informationabout chemicalcomposition p

3.3EnergyDispersiveSystems(EDX) 3 3 Energy Dispersive Systems (EDX)

SolidstateX rayDetector Solid state Xray Detector
N2

Si(Li) coldfinger Xray

Xraycreateshole/electronpairs(3.8eVnecessaryperpair) Number of pairs and current are a measure for Xray energy NumberofpairsandcurrentareameasureforX rayenergy

3.3EnergyDispersiveSystems(EDX) 3 3 Energy Dispersive Systems (EDX)

Alloyofaluminumand tungsten

[3]

reminder
2differentapproaches: Backscatteredand B k d d secondaryelectrons Transmittedelectrons T i d l

SEM

TEM

4.TEM 4 TEM

Transmission Electron Microscopy

4.1Functionalprinciples 4 1 Functional principles

Electrongun Condenserlenses Object Objectivelens +intermediatelens +projectivelense l
50 400kV

4.1Functionalprinciples 4 1 Functional principles

Electrongun Condenserlenses Object Objectivelens +intermediatelens +projectivelense l e

4.1Functionalprinciples 4 1 Functional principles

Electrongun Condenserlenses
~100nm

specimen p

Object Objectivelens +intermediatelens +projectivelense l

scattered

directbeam

4.1Functionalprinciples 4 1 Functional principles

Electrongun Condenserlenses Object Objectivelens +intermediatelens +projectivelense l

4.2Example 4 2 Example
Crossectional analysisofa conductornanogap device

WSI,S.Strobel

WSI,D.Pedone

4.3ComparisonofSEMandTEM 4 3 Comparison of SEM and TEM

SEM:scanswitha focusedpoint TEM:illumanteswhole sample

4.4HighAngleAnnularDarkField 4 4 High Angle Annular Dark Field Imaging(HAADF) g g( )

usedinSTEM(scanningtransmissionelectronmicroscopy) rayleigh scattering at high angles rayleighscatteringathighangles AngledependsontheatomicnumberZ: electronintesity: I Z 2

bymessuringtheelectronintensity,whilescanningover thesample,informationaboutthechemicalcompositio canbeaquired can be aquired

Thanks for your attention.

reference
TUMchemiedepartment: http://www.ch.tum.de/em/emlabor/methoden/rem.htm http://www.ch.tum.de/em/emlabor/methoden/tem.htm http://www ch tum de/em/emlabor/methoden/tem htm wikipedia: http://en.wikipedia.org/wiki/Electron_microscopy http://en.wikipedia.org/wiki/Transmission_electron_microscope http://en wikipedia org/wiki/Transmission electron microscope http://en.wikipedia.org/wiki/Scanning_Electron_Microscope http://en.wikipedia.org/wiki/Energydispersive_Xray_spectroscopy http://en.wikipedia.org/wiki/HAADF http://en wikipedia org/wiki/HAADF http://en.wikipedia.org/wiki/EELS TransmissionElectronMicroscopy,D.B.WilliamsandC.B.Carter ScanningelectronmicroscopyandXrayMicroanalysis,G.Lowes g py y y , electronmicroscopyinsolidstatephysics,H.BethgeandJ.Heydenreich

reference
[1]http://en.wikipedia.org/wiki/Optical_microscope [2]http://de.wikipedia.org/wiki/Elektronenmikroskop [3]http://www.ch.tum.de/em/emlabor/methoden/remedx.htm [3] http://www ch tum de/em/emlabor/methoden/rem edx htm