Industry standard To qualify to the SEMI specification for the semiconductor gas distribution systems referring specifically to orbital

GTAW. To qualify to ASME section IX of the boiler & pressure vessel code and B31.3 of the chemical plant & petroleum refining piping. This ensures that the welds will have the required strength for safe operation of the system. The results of the tests done to conform to ASME section IX as well as the weld parameters & variables, are to be documented in a Weld Procedure Specification (WPS) and a Procedure Qualification Record (PQR). The welder that made the test is to be qualified, and is recorded in a Performance Qualification Record (PQR). Weld criteria All parties to agree on weld acceptance criteria before the actual production welding takes place. Non chlorinated solvents to be used for cleaning. Oxygen & nitrogen bearing argon mixtures are not to be used. The purge gas is Ar 99.999% as a minimum incorporating a filter at the end of the line for particulates. Wash passes or cosmetic welds are not allowed. Before welding a particular size, wall thickness, or material heat number , test samples must be made, disected, and analyzed. The test welds must be examined for poor penetration, joint contamination, joint soundness, surface oxidation, discoloration, pitting, cracking, and defects of fit-up or workmanship. Acceptable weld samples are to be retained on file to evaluate other welds, and all weld parameters and essential and supplementary variables should be documented in the PQR. If a weld in the system is found to be defective with respect to the test weld, the preceding two welds are cut out and evaluated. If either of these is found defective, all welds made since the last welding procedure should be removed and replaced. The weld samples and relevant documentation are to be accepted by COMPANY prior to the actual welding takes place & become the property of COMPANY. All welds are to be individually identified by referring to drawings that become the property of COMPANY. Purge plugs must be air tight. The use of cardboard or tape of any kind is not acceptable. A completely colorless weld on the tube inner diameter is required. This is usually accomplished if the oxygen level in the purge gas is about 1 to 2 parts per milllion (PPM) or less, and the flow rate is sufficient. Each weld coupon should include the magnahelic pressure at which the weld was done to ensure the pressure at the weld is the same for each weld. The system should be designed such that the inner weld bead be crevice-free. Mill test reports (MTRs) listing the chemical composition of each specific heat of tubing should be kept as part of the system documentation. When a change in heat number is made, a test coupon should be made on that heat. The sulfur content in the tubing should be between 0.005 and 0.017 percent to optimize weldability & surface finish. All materials to be welded must be free of oxides, rust , oil, grease, paint, chemicals, and residue left from electropolishing, etc., on surfaces or near the the weld joint before welding. If a materials are precleaned

and wrapped when recieved, measures must be taken to maintain the clean condition during fabrication and welding. The tubing ends as sent from the mill are not adequately prepped for welding. The ends should be squarely faced without burrs while being purged. Machined tungsten tips are to be used for consistent weld results. Tacking is to be minimized & no filler wire must not be used for tacking. The tacks must be as small as possible, yet strong enough to hold the parts in place. The ID of the tubing (or other components) must be purged during tacking. Preferrably, all stainless steel alloys should be fabricated in facilities dedicated to stainless steel to minimize the possibilities with carbon steel and other contaminants. All tubing to be 316L Ra 10 or better. AWC (Automatic Weld Coupon) is required when any of these exist 1) start of shift (in) End of shift (out). 2) change of weld parameters. 3) change of material (heat number) 4) change of tube size, or wall thickness. 5) change of ambient temperature +/-11degrees Celcius. 6) change of source of power supply to power supply to include addition or subtraction of extension cords. 7) Change or removal of the weld tungsten. 8) Any change of equipment such as the weld head, weld head extensions, or power supply. 9) Any change of ID or OD purge gas. NOTE: Operator shall coupon out before any changes are made and coupon in before resuming production welds. System weld Criteria 1) There shall be no undercut or profile defect reducing the wall thickness below that of the parent metal. (Fig. 1) 2) OD Concavity shall not exceed 10% of the tube wal thickness. OD convexity shall not exceed 15% of the wall thickness. (Fig. 2) ID Encroachment shall be 0% to +10% of the wall thickness when measured at the 6 O'clock position . (bottom of weld) (Fig. 2) 3) Penetration and bead width is uniform throughout the entire weld. Bead variation will not exceed 25% of the bead width. (Fig. 3) 4) Bead meander / snaking shall not exceed 20% of bead width. (Fig. 4) 5) There is no inclusions or porosity when viewed with unaided eye. 6) Bead width 2x the wall thickness +/- 25%. (Fig. 5) 7) Bead overlap is 80% on OD and 70% on ID minimum in all areas except the tail-out. (Fig. 6) 8) Tacks must be totally consumed and undetectable in or around the weld bead. (Fig.7) 9) OD colour will be minimized (no excesssive oxidation). 10) Axial misalignment shall not exceed 10% of the tube wall thickness. (Fig. 8) 11) Angular misalignment shall not exceed 2 degrees. (Fig. 9) 12) The weld tail-out (i.e. down slope) must be present and of sufficient length to prevent a crater at the end of the weld. The minimum distance between the ID tail-out and the OD tail-out will be three times the tube wall thickness. (Fig. 10) 13) The weld fit-up gap shall not exceed 0.003 (0.08mm) when the entire circumference is affected. (Fig. 11) The maximum gap in any one area shall not exceed 0.006 (0.15mm). (Fig. 12) 14) The tube shall be faced to remove all necking / wedging caused by the tube cutters. (Fig. 13) 15) The maximum OD or ID chamfering shall be less than 10% of the wall thickness or 0.005 (0.13mm) whichever is less. (Fig. 14)

16) There is no visible colour on the tube ID when viewed under a bright fluorescent light. Installation Criteria 1) All welds must use positive & repeatable (Magnehelic or equivalent) form of ID purge presssure control. (Drawings 1 & 1A) 2) The ID purge gas will meet or exceed the system gas purity and particle requirements. (Only heavy wall {PFA or stainless tubing shall be used on the ID purge. (Drawing 2) 3) If the coupon out fails to meet the weld criteria the last 2 system welds shall be removed & inspected. If either weld fails, keep removing the last two welds until you find 2 acceptable welds in series or until you have removed all welds since the last acceptable coupon-out. (see section 4) 4) If cut-out or cut in is required, purge shall be applied to both ends or the down stream end must be discarded or cleaned. WARNING: When the tube is cut purge gas will escape the cut area at high velocity. This gas contains particles from the cut or the tubing. Protect yourself, others, and nearby equipment from injury or damage. (Drawing 3) - Set purge pressures to below 20psi (137KPa) for safety - make initial cut (see warning) - make any addtional cuts - face the ends - set single purge direction for welding - all cuts shall be done in the horizontal when possible 5) The tungsten shall be ground to the factory specification for head & weld type. (Tungsten shall not be broken to length. 6) When bending cutting, or facing tubing a positive purge must be used to remove particles. 7) All benders, cutters, facing tool collets that are to be used on stainless tubing or alloy tubing shall not be used on carbon steel tubing & care should be used on mixing alloys. All tools shall be maintained in clean condition and shall be free of grease, oil, dirt, and other foreign matter. 8) Bends on tubing shall not be made on weld area. 9) Welders shall follow all clean room protocol & use Non-powered latex gloves 10) Once construction begins an ID purge should be maintained, either be flowing purge of (3 to 5 SCFH) (1 to 2 L/M) or a block purge of 30 psi (206 KPa), until the system is complete. 11) All couponing shall use the system ID purge gas. (Drawing 4) 12) A Weld Log shall be maintained on all system welds and coupons. 13) Helium leak rate 1 X 10-10 atm/cc/sec minimum. Leak testing with helium: a) The unit under test (UUT) to be evacuated by a helium leak tester with 100% He sprayed around all welded and de-mountable joints on the outside and checked for He leaking to the inside; b) The UUT is then filled with Electronics grade (99,9995% pure) 5% He in 95% N2 systematically so that valve seat leakage can be determined at working pressure; c) When the UUT is fully pressurized (1.2 x working pressure) a He sniffer probe is used to check all welded and de-mountable joints for leaks; 14) Tested to ensure that they do not contribute particulate matter to more than 10 particles of 0.1 size per cubic ft and less than a 10 ppb contribution of H2O or O2 to the gas stream passing through them.