A silicon micromachined gyroscope and accelerometer for vehicle stabi...

http://cat.inist.fr/?aModele=afficheN&cpsidt=16973128

Refdoc est un servi powered by

Faire une nouvelle recherche Make a new search

Commander ce document

Order this document

Titre du document / Document title

A silicon micromachined gyroscope and accelerometer for vehicle stability control system

Auteur(s) / Author(s)
NAGAO Masaru (1) ; WATANABE Hikaru (1) ; NAKATANI Eiichi (1) ; SHIRAI Kouji (1) ; AOYAMA Kouji (1) ; HASIMOTO Masato (1) ;

Affiliation(s) du ou des auteurs / Author(s) Affiliation(s)

(1)

Toyota Motor Corporation, JAPON

Rsum / Abstract
A silicon micromachined gyroscope (angular rate sensor, yaw rate sensor) and accelerometer for vehicle stability control system is presented. The 5.1mmX4.7mm sensor chip is fabricated with a silicon micromachining process using a SOI (Silicon on Insulator) silicon wafer and a deep reactive ion etching. The sensor chip has a pair of resonators which are mechanically coupled and function as a tuning fork. The resonators are driven by electrostatic force and their movements are detected by capacitively sensing angstrom displacements. This sensor chip works not only as a gyroscope but also as an accelerometer with a single senior chip. The sensor unit consists of the sensor chip above, a signal processing IC, a microcomputer and an EEPROM. sigma-delta analog-to-digital conversion (sigma-delta ADC) is adopted to realize the digital calibration of sensor properties. Sigma-delta modulators on the signal processing IC convert the analog signals of angular rate, acceleration and temperature into oversampled 1-bit digital data. These data are transmitted to the microcomputer and converted into high-resolution, multi-bit digital data through the process of digital decimation filter. Sensor variation is calibrated by the microcomputer with the calibration data which has been stored in the EEPROM.

Revue / Journal Title

SAE transactions ISSN 0096-736X

Source / Source
2004, vol. 113, no 7 (295 p.) [Document : 6 p.] (7 ref.), pp. 102-107 [6 page(s) (article)]

Langue / Language
Anglais

Editeur / Publisher
Society of Automotive Engineers, New York, NY, ETATS-UNIS (1927-200) (Revue)

Mots-cls anglais / English Keywords

Reactive ion etching ; Digital filter ; Multiresolution analysis ; Analog ; Signal processing ; Resonator ; Wafer ; Micromachining ; Measurement sensor ; Accelerometer ; Velocity sensor ; Yawing ; Vehicle stability ; Gyroscope ; Microsensor ; High resolution ; Calibration ; Miniaturization ; Angular velocity ; Silicon ;

Mots-cls franais / French Keywords

Gravure ionique ractive ; Filtre numrique ; Analyse multirsolution ; Analogue ; Traitement signal ; Rsonateur ; Pastille lectronique ; Microusinage ; Capteur mesure ; Acclromtre ; Capteur vitesse ; Oscillation lacet ; Stabilit vhicule ; Gyroscope ; Microcapteur ; Haute rsolution ; Etalonnage ; Miniaturisation ; Vitesse angulaire ; Silicium ;

Mots-cls espagnols / Spanish Keywords

Grabado inico reactivo ; Filtro numrico ; Anlisis multiresolucin ; Anlogo ; Procesamiento seal ; Resonador ; Pastilla electrnica ; Micromaquinado ; Captador medida ; Acelermetro ; Sensor velocidad ; Movimiento lazo ; Estabilidad vehculo ; Giroscopio ; Microcaptador ; Alta resolucion ; Contraste ; Miniaturizacin ; Silicio ;

Localisation / Location
INIST-CNRS, Cote INIST : 5876, 35400013224358.0130
N notice refdoc (ud4) : 16973128

Commander ce document

Order this document

Faire une nouvelle recherche Make a new search

1 sur 1

10/05/2012 19:35