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(Page 5 manual)
Adsorption Pump
Cold Trap Getter Pump Sublimation Pump Evaporation Ion Pump Sputter Ion Pump
Liquid Ring Pump Rotary Piston Pump Sliding Vane Rotary Pump Rotary Plunger Pump
Dry Pump
Roots Pump
Cryopump
Turbomolecular Pump
Condenser
BAROMETER
Mercury: 13.58 times heavier than water: Column is 13.58 x shorter : 10321 mm/13.58=760 mm (= 760 Torr)
10.321 mm
760 mm
29,9 in
WATER
(Page 12 manual)
MERCURY
Pressure Equivalents
Atmospheric Pressure (Standard) = 0 14.7 29.9 760 760 760,000 101,325 1.013 1013
gauge pressure (psig) pounds per square inch (psia) inches of mercury millimeter of mercury torr millitorr or microns pascal bar millibar
GAS
SYMBOL
PERCENT BY VOLUME
Nitrogen Oxygen Argon Carbon Dioxide Neon Helium Krypton Hydrogen Xenon Water
N2 O2 A CO2 Ne He Kr H2 X H2 O
593 158 7.1 0.25 1.4 x 10-2 4.0 x 10-3 8.7 x 10-4 4.0 x 10-4 6.6 x 10-5 5 to 50
79,000 21,000 940 33 1.8 5.3 x 10-1 1.1 x 10-1 5.1 x 10-2 8.7 x 10-3 665 to 6650
P (mbar)
1013 32
25
0 -40 -78.5 -196 (DRY ICE)
(FREEZING)
6.4
0.13 6.6 x 10 -4
(LIQUID NITROGEN)
(Page 14 manual)
10 -24
(Page 15 manual)
(Page 15 manual)
PRESSURE RANGES
RANGE
PRESSURE
759 TO 1 x 10 -3 (mbar)
HIGH VACUUM
1 x 10 -3 TO 1 x 10 -8 (mbar)
(Page 17 manual)
(Page 24 manual)
FLOW REGIMES
Viscous Flow: Distance between molecules is small; collisions between molecules dominate; flow through momentum transfer; generally P greater than 0.1 mbar Transition Flow: Region between viscous and molecular flow Molecular Flow: Distance between molecules is large; collisions between molecules and wall dominate; flow through random motion; generally P smaller than 10 -3 mbar
(Page 25 manual)
MFP
FLOW REGIMES
Mean Free Path is less than 0.01 Characteristic Dimension Mean Free Path Characteristic Dimension
Viscous Flow:
Transition Flow:
Molecular Flow:
Under viscous flow conditions doubling the pipe diameter increases the conductance sixteen times. The conductance is INVERSELY related to the pipe length
(Page 28 manual)
Under molecular flow conditions doubling the pipe diameter increases the conductance eight times. The conductance is INVERSELY related to the pipe length.
Series Conductance
RT = R1 + R2
1 = 1 + 1
CT CT C1 C2 C1 C2
PUMP SYSTEM
1 = C1 + C2
C1 x C2 C T = C 1 x C2 C1 + C2
(Page 29 manual)
GAS LOAD
Outgassing Permeation Real Leaks Diffusion Virtual Backstreaming
Pumpdown Curve
10+1
10-1
Pressure (mbar) 10-3 10-5 10-7
Volume
Surface Desorption
Roughing Pumps
2
(Page 39 manual)
Adsorption Pump
Cold Trap Getter Pump Sublimation Pump Evaporation Ion Pump Sputter Ion Pump
Liquid Ring Pump Rotary Piston Pump Sliding Vane Rotary Pump Rotary Plunger Pump
Dry Pump
Roots Pump
Cryopump
Turbomolecular Pump
Condenser
High Vacuum
Rough Vacuum
Rotary Vane Mechanical Pump Rotary Piston Mechanical Pump Dry Mechanical Pump Sorption Pump Blower/Booster Pump
Venturi Pump
High Vac. Pumps Ultra-High Vac. Pumps 10-12 10-10 10-8 10-6 10-4 P (mbar) 10-2 1 10+2
4 7
2 6 3a
Chamber High Vac. Pump Roughing Pump Foreline Pump Hi-Vac. Valve Roughing Valve Foreline Valve Vent Valve Roughing Gauge High Vac. Gauge
(Page 45 manual)
Pump Mechanism
(Page 46 manual)
OIL BACKSTREAMING
(Page 48 manual)
Blower/Booster Pump
(Page 61 manual)
10
8 7 6 5
(Page 62 manual)
(Page 54 manual)
Vapor Pressure
(Page 56 manual)
Cryo-condensation
Cryo-sorption
(Page 55 manual)
3
(Page 63 manual)
Adsorption Pump
Cold Trap Getter Pump Sublimation Pump Evaporation Ion Pump Sputter Ion Pump
Liquid Ring Pump Rotary Piston Pump Sliding Vane Rotary Pump Rotary Plunger Pump
Dry Pump
Roots Pump
Cryopump
Turbomolecular Pump
Condenser
10-12
10-10
10-8
10-2
10+2
4 8
2 2 6 3a
Pump Construction
(Page 66 manual)
Pumping Speed
1 Pumping Speed (Air) 2
Critical Point
1. Compression Ratio Limit 2. Constant Speed 3. Constant Q (Overload) 4. Mechanical Pump Effect
10-10
10--1
(Page 73 manual)
(Page 78 manual)
Approximate Vapor Pressure (mbar) 10-22 500 10 -7 >760 >760 >760 350 >760 760 <10 -10
Turbomolecular Pump
INLET FLANGE ROTOR BODY STATOR BLADES HIGH PUMPING SPEED
HIGH COMPRESSION
(Page 81 manual)
(Page 82 manual)
Pump Operation
Molecule V
1
5 2 2
3
(Page 91 manual)
Pumping by Cryocondensation
Cryosorption in charcoal
(Page 98 manual)
Charcoal placement
Gauges
5
(Page 123 manual)
High Vacuum
Rough Vacuum
Bourdon Gauge Capacitance Manometer Thermocouple Gauge Pirani Gauge Hot Fil. Ion Gauge Cold Cathode Gauge Residual Gas Analyzer McLeod Gauge Spinning Rotor Gauge
10-12
10-10
10-8
10-2
10+2
Bourdon Gauge
Thermocouple Gauge
Ionization gauges
QUADRUPOLE HEAD
CONTROL UNIT
RGA SPECTRUM
RELATIVE INTENSITY
H2 O
(A)
H2
RGA SPECTRUM
RELATIVE INTENSITY
N2
SYSTEM WITH AIR LEAK H2 O O2 H2 MASS NUMBER (A.M.U.) CO2
(B)
LEAK DETECTION
9
(Page 249 manual)
Introduction
Trapped Volumes
Vented Screw
Differential Pumping
Atmosphere (1013 mbar) Vacuum
To Pump
1 mbar
PERMEATION LEAKS
Permeation leaks are different than real leaks because the only way to stop them is to change to a less permeable material
-3 10
std
HELIUM
Helium is very light and small Low concentration in air (0.0005%) Permits dynamic testing Permits non-destructive testing Helium is safe
12
9 8 3 5 4 10
2 11
Ion Source
To Pre-Amplifier
Collector Heavier ions: less He ions pass through slit and are collected